Fiber-free spectrum transmission system

By using a fiber-free spectral transmission system to directly transmit optical signals using optical components, the problems of signal attenuation and aging caused by fiber optic transmission are solved, extending equipment life and reducing costs.

CN120927625APending Publication Date: 2025-11-11VELA OPTOELECTRONICS SUZHOU CO LTD
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Patent Information

Application Number
CN202511213157.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-28
Publication Date
2025-11-11

AI Technical Summary

Technical Problem

When existing handheld spectrometers transmit signals via optical fiber, the extreme ultraviolet (EUV) spectral signal causes signal attenuation, and the optical fiber ages in the UV environment, affecting the performance and lifespan of the device.

Method used

A fiber-free spectral transmission system is adopted, which uses optical components such as biconvex lenses and parabolic mirrors to form a spectral information acquisition module to directly transmit optical signals to the main body of the spectrometer, thus avoiding the use of optical fibers.

Benefits of technology

It extends the service life of the equipment, avoids signal attenuation, has a simple installation structure, low cost, and is suitable for mass production.

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Abstract

The invention provides an optical fiber-free spectrum transmission system, which does not need to use an optical fiber to transmit a signal, can avoid the problem of signal attenuation of the optical fiber in an ultraviolet environment for a long time, and further prolongs the service life of equipment. Comprising a spectrometer main body; the spectral information acquisition module is arranged between the spectrograph main body and a to-be-detected sample and is used for receiving an optical signal generated by plasma sparks on the to-be-detected sample and transmitting the optical signal to the spectrograph main body according to a preset signal transmission path; the spectral information acquisition module comprises at least one group of optical elements with optical coupling focusing, and preset angles are formed between the optical elements and the to-be-detected sample and between the optical elements and the spectrometer main body, so that a signal input path and a signal output path are respectively formed; the signal input path is used for receiving and collecting optical signals generated by plasma sparks on the to-be-detected sample; and the signal output path is used for converging and transmitting the optical signals to the spectrometer main body.
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Description

Technical Field

[0001] This invention relates to the field of spectral detection equipment technology, specifically to a fiber-free spectral transmission system. Background Technology

[0002] Existing handheld spectrometers all use optical fibers to collect signals and transmit them to the spectrometer; however, there are the following problems with transmitting signals through optical fibers: 1) For extreme ultraviolet spectral signals, the optical fiber material itself will absorb the signals of elements such as S and P, resulting in large signal attenuation; 2) Long-term reception of ultraviolet signals by optical fibers will accelerate aging, thereby causing changes in the performance of the device. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a fiber-free spectral transmission system that eliminates the need for optical fiber signal transmission, thus avoiding signal attenuation issues caused by long-term exposure to ultraviolet light and extending the lifespan of the equipment.

[0004] This invention adopts the following technical solution: a fiber-free spectral transmission system, comprising: Spectrometer body; A spectral information acquisition module is arranged between the spectrometer body and the sample to be tested. It is used to receive the light signal generated by the plasma spark on the sample to be tested and transmit the light signal to the spectrometer body according to a preset signal transmission path. The spectral information acquisition module includes at least one set of optical elements with optical coupling focusing. The optical elements are set at a preset angle to the sample to be tested and the spectrometer body to form a signal input path and a signal output path, respectively. The signal input path is used to receive and collect the optical signal generated by the plasma spark on the sample under test; The signal output path is used to converge and transmit the optical signal to the main body of the spectrometer.

[0005] Furthermore, the spectrometer body is mounted on a base, the base is provided with a detection seat, the detection seat is provided with a detection window facing the sample to be tested, the spectral information acquisition module is installed between the spectrometer body and the detection window through a lens assembly, and both the spectrometer body and the lens assembly are provided with an air inlet and an air outlet. Furthermore, the optical element employs a biconvex lens, and the spectrometer body and at least one set of the optical elements are arranged optically coaxially in sequence; Furthermore, the optical element is provided in two groups, which are divided into a first optical element and a second optical element; Furthermore, both the first and second optical elements are parabolic reflectors, with the second optical element positioned above the first optical element. The first optical element receives the light signal generated by the plasma spark on the sample under test and reflects it parallel to the second optical element. The second optical element is located in the reflected light path of the first optical element and receives the parallel light reflected by the first optical element, focusing and reflecting it onto the receiving end of the spectrometer body. Furthermore, at least one set of optical reflectors with light reflection is provided in the transmission optical path between the first optical element and the second optical element. The optical reflectors are plane mirrors. The diameter of the optical reflectors is 6mm to 15mm. The optical reflectors are made of glass and have an aluminum film coated on their reflective surface. Furthermore, the first optical element employs a biconvex lens, the second optical element employs a parabolic reflector, and a set of optical reflectors is arranged in the transmission optical path between the first and second optical elements; the second optical element is located above the optical reflectors, and the optical axis of the optical reflector forms a 45° angle with the optical axes of both the first and second optical elements; the first optical element is used to receive the light signal generated by the plasma spark on the sample under test and emits it parallel to the optical reflector; the optical reflector is used to receive the parallel light emitted from the first optical element and reflect it parallel to the second optical element; the second optical element is used to receive the parallel light reflected by the optical reflector and focus it onto the receiving end of the spectrometer body; Furthermore, both the first and second optical elements employ biconvex lenses; two sets of optical mirrors, namely a first mirror and a second mirror, are arranged in the transmission optical path between the first and second optical elements, and are arranged vertically parallel to each other; the optical axis of the first mirror forms a 45° angle with the optical axes of both the first and second optical elements; the first optical element receives the light signal generated by the plasma spark on the sample under test and emits it in parallel onto the first mirror; the first mirror receives the parallel light emitted from the first optical element and reflects it in parallel onto the second mirror; the second mirror receives the parallel light reflected by the first mirror and reflects it in parallel onto the second optical element; the second optical element receives the parallel light reflected by the second mirror and focuses it onto the receiving end of the spectrometer body; Furthermore, the focal length of the biconvex lens is 12mm~50mm, the diameter of the biconvex lens is 4mm~15mm, the thickness of the biconvex lens is 1.5mm~5mm, and the biconvex lens is made of fused silica or magnesium fluoride. Furthermore, the diameter of the parabolic reflector is 6mm~15mm, the parabolic reflector is made of copper alloy, and the reflective surface of the parabolic reflector is coated with an aluminum film.

[0006] The technical advantage of this invention is that the optical signal generated by the plasma spark on the sample under test is transmitted to the main body of the spectrometer by the spectral information acquisition module according to the preset signal transmission path. This eliminates the need for the existing optical fiber transmission structure, avoids the signal attenuation problem caused by the long-term exposure of optical fibers to ultraviolet light, extends the service life of the equipment, and has a simple installation structure, low cost, and suitability for mass production, thus having good practical value. Attached Figure Description

[0007] Figure 1 This is a schematic diagram of the optical path structure in Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the assembly structure of Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the structure after the air inlet is assembled in Embodiment 1 of the present invention; Figure 4 This is a schematic diagram of the optical path structure in Embodiment 2 of the present invention; Figure 5 This is a schematic diagram of the assembly structure of Embodiment 2 of the present invention; Figure 6 This is a schematic diagram of the structure after the air inlet is assembled in Embodiment 2 of the present invention; Figure 7 This is a schematic diagram of the optical path structure in Embodiment 3 of the present invention; Figure 8 This is a schematic diagram of the optical path structure in Embodiment 4 of the present invention; Figure 9 This is a schematic diagram of the optical path structure in Embodiment 5 of the present invention; Figure 10 This is a schematic diagram of the assembled three-dimensional structure of Embodiment 5 of the present invention; Figure 11 This is a top view schematic diagram of the assembly structure of Embodiment 5 of the present invention. Detailed Implementation

[0008] Example 1 like Figure 1 , Figure 2 , Figure 3 As shown, a fiber-optic-free spectral transmission system of the present invention includes: Spectrometer body 1; The spectral information acquisition module is arranged between the spectrometer body 1 and the sample to be tested 2. It is used to receive the light signal generated by the plasma spark on the sample to be tested 2 and transmit the light signal to the spectrometer body 1 according to the preset signal transmission path. The spectral information acquisition module includes at least one set of optical elements 3 with optical coupling focusing. The optical elements 3 are set at a preset angle with the sample to be tested 2 and the spectrometer body 1 to form a signal input path and a signal output path, respectively. The signal input path is used to receive and collect the optical signal generated by the plasma spark on the sample 2 under test. The signal output path is used to converge and transmit the optical signal to the main body of the spectrometer 1.

[0009] The optical element 3 uses a double convex lens, and the spectrometer body 1 and a set of optical elements 3 are optically coaxial; the set of optical elements 3 is assembled in the lens tube assembly 4.

[0010] Example 2 like Figure 4 , Figure 5 , Figure 6 As shown, the optical element 3 uses a biconvex lens. The optical element 3 has two sets, which are divided into a first optical element 3-1 and a second optical element 3-2. The spectrometer body 1 is optically coaxially arranged with the second optical element 3-2 and the first optical element 3-1 in sequence. The first optical element 3-1 and the second optical element 3-2 are coaxially assembled in the lens tube assembly 4.

[0011] Example 3 like Figure 7 As shown, the optical element 3 is provided in two sets, namely the first optical element 3-1 and the second optical element 3-2. Both the first optical element 3-1 and the second optical element 3-2 are parabolic reflectors, with the second optical element 3-2 located above the first optical element 3-1. The first optical element 3-1 is used to receive the light signal generated by the plasma spark on the sample 2 to be tested, and reflects it in parallel onto the second optical element 3-2. The second optical element 3-2 is located on the reflected light path of the first optical element 3-1, and is used to receive the parallel light reflected by the first optical element 3-1, and focus and reflect it onto the receiving end of the spectrometer body 1.

[0012] Example 4 like Figure 8 As shown, the optical element 3 is provided in two sets, namely the first optical element 3-1 and the second optical element 3-2; at least one set of optical reflectors 5 with light reflection is provided in the transmission optical path between the first optical element 3-1 and the second optical element 3-2, and the optical reflectors 5 are plane mirrors; the diameter of the optical reflectors 5 is 6mm~15mm, the optical reflectors 5 are made of glass, and the reflective surface of the optical reflectors 5 is coated with an aluminum film; The first optical element 3-1 uses a biconvex lens, and the second optical element 3-2 uses a parabolic reflector. A set of optical reflectors 5 is arranged in the transmission optical path between the first optical element 3-1 and the second optical element 3-2. The second optical element 3-2 is located above the optical reflector 5, and the optical axis of the optical reflector 5 forms a 45° angle with the optical axes of the first optical element 3-1 and the second optical element 3-2. The first optical element 3-1 is used to receive the light signal generated by the plasma spark on the sample 2 to be tested, and emits it in parallel onto the optical reflector 5. The optical reflector 5 is used to receive the parallel light emitted by the first optical element 3-1, and reflect it in parallel onto the second optical element 3-2. The second optical element 3-2 is used to receive the parallel light reflected by the optical reflector 5, and focus and reflect it onto the receiving end of the spectrometer body 1.

[0013] Example 5 like Figures 9-11 As shown, both the first optical element 3-1 and the second optical element 3-2 are biconvex lenses; the optical reflector 5 is a plane mirror; the diameter of the optical reflector 5 is 6mm~15mm, the optical reflector 5 is made of glass, and the reflective surface of the optical reflector 5 is coated with an aluminum film; two sets of optical reflectors 5 are arranged in the transmission optical path between the first optical element 3-1 and the second optical element 3-2, and are divided into the first reflector 5-1 and the second reflector 5-2. By adding two sets of optical reflectors 5, the optical path can be folded, the optical path can be lengthened, miniaturization can be facilitated, and the detection accuracy can be improved; the first reflector 5-1 and the second reflector 5-2 are arranged vertically parallel to each other. The optical axis of the first reflector 5-1 forms a 45° angle with the optical axes of the first optical element 3-1 and the second reflector 5-2. The first optical element 3-1 is used to receive the light signal generated by the plasma spark on the sample 2 to be tested, and emits it in parallel onto the first reflector 5-1. The first reflector 5-1 is used to receive the parallel light emitted from the first optical element 3-1, and reflects it in parallel onto the second reflector 5-2. The second reflector 5-2 is used to receive the parallel light reflected by the first reflector 5-1, and reflects it in parallel onto the second optical element 3-2. The second optical element 3-2 is used to receive the parallel light reflected by the second reflector 5-2, and focuses it onto the receiving end of the spectrometer body 1.

[0014] In the above embodiments, the focal length of the biconvex lens is 12mm~50mm, the diameter of the biconvex lens is 4mm~15mm, the thickness of the biconvex lens is 1.5mm~5mm, and the biconvex lens is made of fused silica or magnesium fluoride; the diameter of the parabolic reflector is 6mm~15mm, the parabolic reflector is made of copper alloy, and the reflecting surface of the parabolic reflector is coated with an aluminum film.

[0015] Furthermore, in the above embodiment, the spectrometer body 1 is mounted on the base 6, and the base 6 is provided with a detection seat 7. The detection seat 7 is provided with a detection window 8 facing the sample 2 to be tested. The spectral information acquisition module is installed between the spectrometer body 1 and the detection window 8 through the lens tube assembly 4. That is to say, each optical lens is installed through the lens tube assembly 4. The lens tube assembly 4 can be set according to the actual optical signal transmission path so that the spectrometer body 1 and the detection window 8 can transmit optical signals according to the preset optical path. It can use sleeves, connecting tubes, etc., and is not limited to any structural form, as long as it can transmit optical signals. In addition, both the spectrometer body 1 and the lens tube assembly 4 are provided with an air inlet 9 and an air outlet 10. After argon gas is introduced through the air inlet 9, air can be discharged, which is convenient for testing the signals of C, P, and S elements.

[0016] It should be noted that the lens assembly is used to assemble the lenses to facilitate the introduction of argon gas. In actual use, the lens assembly can be omitted, or other optical path structures can be used, as long as the optical signal generated by the plasma spark on the sample 2 can be transmitted to the spectrometer body according to the preset optical signal transmission path.

[0017] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0018] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A fiber-free spectral transmission system, characterized in that: include: Spectrometer body; A spectral information acquisition module is arranged between the spectrometer body and the sample to be tested. It is used to receive the light signal generated by the plasma spark on the sample to be tested and transmit the light signal to the spectrometer body according to a preset signal transmission path. The spectral information acquisition module includes at least one set of optical elements with optical coupling focusing. The optical elements are set at a preset angle to the sample to be tested and the spectrometer body to form a signal input path and a signal output path, respectively. The signal input path is used to receive and collect the optical signal generated by the plasma spark on the sample under test; The signal output path is used to converge and transmit the optical signal to the main body of the spectrometer.

2. The fiber-free spectral transmission system according to claim 1, characterized in that: The spectrometer body is mounted on a base, the base is provided with a detection seat, the detection seat is provided with a detection window facing the sample to be tested, the spectral information acquisition module is installed between the spectrometer body and the detection window through a lens tube assembly, and both the spectrometer body and the lens tube assembly are provided with an air inlet and an air outlet.

3. The fiber-free spectral transmission system according to claim 2, characterized in that: The optical element uses a biconvex lens, and the spectrometer body and at least one set of the optical elements are arranged optically coaxially.

4. The fiber-free spectral transmission system according to claim 2, characterized in that: The optical elements are provided in two groups, which are divided into a first optical element and a second optical element.

5. The fiber-free spectral transmission system according to claim 4, characterized in that: Both the first and second optical elements are parabolic reflectors, with the second optical element positioned above the first optical element. The first optical element receives the light signal generated by the plasma spark on the sample under test and reflects it parallel to the second optical element. The second optical element is located on the reflected light path of the first optical element and is used to receive the parallel light reflected by the first optical element and focus it onto the receiving end of the spectrometer body.

6. The fiber-free spectral transmission system according to claim 4, characterized in that: At least one set of optical reflectors with light reflection is provided in the transmission optical path between the first optical element and the second optical element. The optical reflectors are plane mirrors. The diameter of the optical reflectors is 6mm to 15mm. The optical reflectors are made of glass and have an aluminum film coated on their reflective surface.

7. The fiber-free spectral transmission system according to claim 6, characterized in that: The first optical element uses a biconvex lens, the second optical element uses a parabolic reflector, and a set of optical reflectors is provided in the transmission optical path between the first optical element and the second optical element; The second optical element is located above the optical mirror, and the optical axis of the optical mirror forms a 45° angle with the optical axes of both the first and second optical elements; the first optical element is used to receive the light signal generated by the plasma spark on the sample under test and project it parallel onto the optical mirror; The optical mirror is used to receive the parallel light emitted from the first optical element and reflect it parallel to the second optical element; The second optical element is used to receive the parallel light reflected by the optical mirror and focus it onto the receiving end of the spectrometer body.

8. A fiber-free spectral transmission system according to claim 6, characterized in that: Both the first and second optical elements employ biconvex lenses. Two sets of optical mirrors, designated as a first mirror and a second mirror, are arranged in the transmission optical path between the first and second optical elements, and are vertically parallel. The optical axis of the first mirror forms a 45° angle with the optical axes of both the first and second optical elements. The first optical element receives the light signal generated by the plasma spark on the sample under test and projects it parallel onto the first mirror. The first reflector is used to receive the parallel light emitted from the first optical element and reflect it parallel to the second reflector; The second reflector is used to receive the parallel light reflected by the first reflector and reflect it parallel to the second optical element; The second optical element is used to receive the parallel light reflected by the second mirror and focus it out onto the receiving end of the spectrometer body.

9. A fiber-free spectral transmission system according to claim 3, 7, or 8, characterized in that: The focal length of the biconvex lens is 12mm~50mm, the diameter of the biconvex lens is 4mm~15mm, the thickness of the biconvex lens is 1.5mm~5mm, and the biconvex lens is made of fused silica or magnesium fluoride.

10. A fiber-free spectral transmission system according to claim 5 or 7, characterized in that: The diameter of the parabolic reflector is 6mm to 15mm. The parabolic reflector is made of copper alloy and has an aluminum film coated on its reflective surface.

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