Micro-nano phase shifter, manufacturing method thereof and antenna device

Abstract

The invention provides a micro-nano phase shifter, a manufacturing method thereof and an antenna device, and relates to the technical field of communication. The micro-nano phase shifter comprises a substrate base plate; the driving structure is supported on the substrate body; the at least one group of transmission lines are positioned on the substrate body; the at least one pair of phase shift lines are suspended and are connected with the driving structure; and two end parts of each phase shift line respectively cover at least part of the corresponding first transmission line and at least part of the corresponding second transmission line. According to the invention, the positions of at least one pair of phase shift lines are adjusted through the driving structure, so that the electromagnetic waves output by the second output port connected with the first phase shift line have different phase advance, and the electromagnetic waves output by the second output port connected with the second phase shift line have different phase lag. And on the basis of the arbitrary adjustment of the positions of the at least one pair of phase shift lines, the continuous adjustment of the inclination angle of the electromagnetic beam can be realized, so that the scanning precision is improved.

Description

Technical Field

[0001] This disclosure relates to the field of communication technology, and more specifically, to a micro / nano phase shifter and its fabrication method, and an antenna device. Background Technology

[0002] With the rapid development of the communications industry, the demand for electrically tunable antennas is also increasing. To meet the growing market demand and reduce production costs, antenna production is becoming increasingly modular and integrated. The phase shifter is one of the core components of an electrically tunable antenna, allowing the antenna beam tilt angle to be changed remotely by controlling the phase shifter as needed.

[0003] In related technologies, there are increasingly more types of phase shifters, such as cavity phase shifters, PCB-type phase shifters, and fan-shaped phase shifters. However, with the continuous iteration and upgrading of communication technology and the development of antennas towards high-frequency integration, the phase shift step values ​​of phase shifters in related technologies are relatively large, such as four-phase shifters and six-phase shifters, which results in low scanning accuracy of electrically tunable antennas.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this disclosure is to provide a micro / nano phase shifter and its fabrication method, as well as an antenna device, which can improve the continuous adjustment of phase shift and enhance phase shift accuracy.

[0006] According to one aspect of this disclosure, a micro / nano phase shifter is provided, comprising:

[0007] The substrate includes a substrate body, and an input port, a first output port, and a plurality of second output ports located on the substrate body, wherein the input port is directly connected to the first output port;

[0008] At least one set of transmission lines is located on the substrate body. Each set of transmission lines includes two pairs of transmission lines. Each pair of transmission lines includes a first transmission line and a second transmission line. Each first transmission line in the at least one set of transmission lines is connected to the input port, and each second transmission line is connected to a second output port.

[0009] The driving structure is supported on the substrate body;

[0010] At least one pair of phase shifting lines are connected to the driving structure and are suspended on the substrate body. One pair of phase shifting lines corresponds to a set of transmission lines, and one phase shifting line corresponds to one pair of transmission lines. The two ends of each phase shifting line respectively cover at least a portion of the corresponding first transmission line and at least a portion of the corresponding second transmission line.

[0011] Each pair of phase-shifting lines includes a first phase-shifting line and a second phase-shifting line. The driving structure is used to drive the at least one pair of phase-shifting lines to move. After the at least one pair of phase-shifting lines move, the length of the first phase-shifting line covered by each first phase-shifting line on the corresponding pair of transmission lines increases, and the amount of increase is different for each pair. The length of the second phase-shifting line covered by each second phase-shifting line on the corresponding pair of transmission lines decreases, and the amount of decrease is different for each pair.

[0012] According to any of the micro / nano phase shifters described in this disclosure, both the first transmission line and / or the second transmission line include winding segments, and the winding density of the winding segments on the first transmission line is different in any two sets of transmission lines, and / or the winding density of the winding segments on the second transmission line is different.

[0013] According to any of the micro / nano phase shifters described in this disclosure, the at least one set of transmission lines are distributed sequentially along a direction away from the input port, and in two adjacent sets of transmission lines, the winding density of the winding segment in the set of transmission lines closer to the input port is greater than the winding density of the winding segment in the set of transmission lines farther from the input port.

[0014] According to any of the micro / nano phase shifters described in this disclosure, the driving structure includes a first support portion and a suspended portion;

[0015] The first support portion is fixed on the substrate body, the suspended portion is suspended on the substrate body, and the at least one pair of phase shifting lines are all fixedly connected to the suspended portion.

[0016] The first support portion has a first conductive portion, and the suspended portion has a second conductive portion. The first conductive portion and the second conductive portion are configured to apply voltage or current to adjust the position of the suspended portion.

[0017] According to any of the micro / nano phase shifters described in this disclosure, the suspended portion includes a first suspended arm, a second suspended arm, and a connecting bridge;

[0018] The first cantilever arm is disposed opposite to the first support portion and has a second conductive portion. At least one end of the first cantilever arm and at least one end of the second cantilever arm are both supported on the substrate body.

[0019] According to any of the micro / nano phase shifters described in this disclosure, the driving structure further includes a connecting arm, the two ends of which are fixedly connected to the end of the first support portion and the end of the first cantilever arm, respectively.

[0020] According to any of the micro / nano phase shifters described in this disclosure, in each pair of phase shift lines, the first phase shift line is fixedly connected to the first suspended arm and / or the connecting bridge, and the second phase shift line is fixedly connected to the second suspended arm and / or the connecting bridge.

[0021] According to any of the micro / nano phase shifters described in this disclosure, the driving structure further includes a second support portion;

[0022] The second support portion is disposed opposite to the second cantilever arm, and the second support portion is fixedly connected to the end of the second cantilever arm.

[0023] According to any of the micro / nano phase shifters described in this disclosure, the second support portion has a third conductive portion, the second suspended arm has a fourth conductive portion, and the third conductive portion and the fourth conductive portion are configured to apply voltages of opposite polarities to adjust the position of the suspended portion.

[0024] According to any of the micro / nano phase shifters described in this disclosure, the surface of the first support portion facing the suspended portion has a protrusion.

[0025] According to any of the micro / nano phase shifters described in this disclosure, the driving structure further includes a resistance arm, which is suspended on the substrate body, and one end of the resistance arm is located between the first support portion and the suspended portion.

[0026] According to any of the micro / nano phase shifters described in this disclosure, the first conductive portion and the second conductive portion are both conductive electrode sheets, and the first conductive portion and the second conductive portion are used to apply voltages of opposite polarity.

[0027] According to any of the micro / nano phase shifters described in this disclosure, both the first conductive part and the second conductive part are conductive coils, and the first conductive part and the second conductive part are used to load currents in the same or opposite directions.

[0028] According to any of the micro / nano phase shifters described in this disclosure, the first and second phase shift lines in each pair of phase shift lines are U-shaped or W-shaped.

[0029] According to one aspect of this disclosure, a method for fabricating a micro / nano phase shifter is provided, the method comprising:

[0030] A substrate body is provided, and an input port, a first output port and a plurality of second output ports are formed on the substrate body, as well as at least one set of transmission lines. The input port is directly connected to the first output port. Each set of transmission lines includes two pairs of transmission lines. Each pair of transmission lines includes a first transmission line and a second transmission line. Each first transmission line in the at least one set of transmission lines is connected to the input port, and each second transmission line is connected to one of the second output ports.

[0031] A silicon substrate is provided, and a driving structure and at least one pair of phase-shifting lines are formed on the silicon substrate. The at least one pair of phase-shifting lines are both connected to the driving structure. A pair of phase-shifting lines corresponds to a set of transmission lines, and one phase-shifting line corresponds to a pair of transmission lines.

[0032] The silicon substrate and the substrate body are bonded together so that the driving structure is supported on the substrate body. The at least one pair of phase shifting lines are suspended on the substrate body. The two ends of each phase shifting line respectively cover at least a portion of the corresponding first transmission line and at least a portion of the corresponding second transmission line. Each pair of phase shifting lines includes a first phase shifting line and a second phase shifting line.

[0033] The driving structure is used to drive the at least one pair of phase shifting lines to move. After the at least one pair of phase shifting lines move, the length of each first phase shifting line covered by the corresponding pair of transmission lines increases, and the amount of increase is different. The length of each second phase shifting line covered by the corresponding pair of transmission lines decreases, and the amount of decrease is different.

[0034] According to one aspect of this disclosure, an antenna device is provided, comprising a plurality of antenna elements and a micro / nano phase shifter as described above.

[0035] The plurality of antenna elements include a first antenna element and a plurality of second antenna elements, wherein the first antenna element is connected to the first output port, and each second antenna element is connected to a second output port.

[0036] According to any of the antenna devices described in this disclosure, a plurality of the antenna elements are integrated on the substrate body.

[0037] The embodiments disclosed herein include at least the following technical effects:

[0038] In this embodiment of the present disclosure, by adjusting the position of at least one pair of phase shift lines through a driving structure, the electromagnetic waves output from the second output port connected to the first phase shift line have different phase advances, and the electromagnetic waves output from the second output port connected to the second phase shift line have different phase lags. Thus, for an antenna device equipped with this micro / nano phase shifter, the tilt of the electromagnetic beam radiated by the antenna device can be achieved. Furthermore, based on the arbitrary adjustment of the position of at least one pair of phase shift lines by the driving structure, the tilt angle of the electromagnetic beam radiated by the antenna device can be continuously adjusted, thereby improving the scanning accuracy of the antenna device.

[0039] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0040] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0041] Figure 1 This is a top view of a micro / nano phase shifter provided for an embodiment of this disclosure.

[0042] Figure 2 for Figure 1 The diagram shows a side view of the micro / nano phase shifter.

[0043] Figure 3 for Figure 1 The diagram shows a partially enlarged view of the micro / nano phase shifter.

[0044] Figure 4 This is a top view of another micro / nano phase shifter provided in this embodiment of the present disclosure.

[0045] Figure 5 for Figure 4 The diagram shows a top view of the micro / nano phase shifter after phase shifting.

[0046] Figure 6 This is a top view of another micro / nano phase shifter provided in this disclosure.

[0047] Figure 7 This is a top view of another micro / nano phase shifter structure provided in this embodiment of the present disclosure after phase shifting.

[0048] Figure 8 This is a top view of another micro / nano phase shifter structure provided in this embodiment of the present disclosure after phase shifting.

[0049] Figure 9 This is a top view of another micro / nano phase shifter provided in this disclosure.

[0050] Figure 10 for Figure 9 The diagram shows a top view of the micro / nano phase shifter after phase shifting.

[0051] Figure 11 This is a top view of another micro / nano phase shifter provided in this embodiment of the present disclosure.

[0052] Figure 12 This is a top view of an antenna device provided for an embodiment of the present disclosure.

[0053] Figure 13 This is a flowchart illustrating a method for fabricating a micro / nano phase shifter according to an embodiment of the present disclosure.

[0054] Figure label:

[0055] 10. Antenna device;

[0056] 1. Micro / nano phase shifter; 2. Antenna unit;

[0057] 11. Substrate; 12. Transmission line; 13. Driving structure; 14. Phase shifter;

[0058] 111. Substrate body; 112. Input port; 113. First output port; 114. Second output port;

[0059] 121. First transmission line; 122. Second transmission line; 123. Wrapping segment; 124. Input trace; 125. Output trace;

[0060] 131. First support section; 132. Suspended section; 133. Second support section; 134. Support column; 135. Connecting arm; 136. Protrusion; 137. Resistance arm;

[0061] 1311, First conductive part; 1312, Third conductive part;

[0062] 1321. First cantilever arm; 1322. Second cantilever arm; 1323. Connecting bridge; 1324. Second conductive part; 1325. Fourth conductive part;

[0063] 141. First phase-shifting line; 142. Second phase-shifting line;

[0064] 21. First antenna element; 22. Second antenna element; 23. Third antenna element; 24. Fourth antenna element; 25. Fifth antenna element. Detailed Implementation

[0065] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore detailed descriptions of them will be omitted. Furthermore, the drawings are merely illustrative of this disclosure and are not necessarily drawn to scale.

[0066] Although relative terms such as "up" and "down" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples shown in the accompanying drawings. It is understood that if the device of the icon is flipped upside down, the component described as "up" will become the component described as "down." When a structure is "up" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" mounted on the other structure, or that the structure is "indirectly" mounted on the other structure through another structure.

[0067] The terms “a,” “one,” “the,” “the,” and “at least one” are used to indicate the presence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to the listed elements / components / etc.; the terms “first,” “second,” and “third,” etc., are used only as markers and are not a limitation on the number of objects.

[0068] Figure 1 A top view schematic diagram of a micro / nano phase shifter provided in this disclosure is illustrated. Figure 2 Example Figure 1 The diagram shows a side view of the micro / nano phase shifter. Figure 1 and Figure 2As shown, the micro / nano phase shifter 1 includes: a substrate 11, at least one set of transmission lines 12, a driving structure 13, and at least one pair of phase shifting lines 14. The substrate 11 includes a substrate body 111, and an input port 112, a first output port 113, and a plurality of second output ports 114 located on the substrate body 111. All input ports 112 are directly connected to the first output ports 113. At least one set of transmission lines 12 is located on the substrate body 111. Each set of transmission lines 12 includes two pairs of transmission lines 12, and each pair of transmission lines 12 includes a first transmission line 121 and a second transmission line 122. Each first transmission line 121 in the at least one set of transmission lines 12 is connected to an input port 112, and each second transmission line 122 is connected to a second output port 114. The driving structure 13 is supported on the substrate body 111. At least one pair of phase-shifting lines 14 are connected to the driving structure 13 and are suspended on the substrate body 111. Each pair of phase-shifting lines 14 corresponds to a set of transmission lines 12. Each phase-shifting line 14 covers at least a portion of the corresponding first transmission line 121 and at least a portion of the corresponding second transmission line 122 at both ends. Each pair of phase-shifting lines 14 includes a first phase-shifting line 141 and a second phase-shifting line 142. The driving structure 13 is used to drive at least one pair of phase-shifting lines 14 to move. After the at least one pair of phase-shifting lines 14 moves, the length of each first phase-shifting line 141 covering the corresponding pair of transmission lines 12 (i.e., the corresponding first transmission line 121 and second transmission line 122) increases, and the increase is different for each pair. The length of each second phase-shifting line 142 covering the corresponding pair of transmission lines 12 decreases, and the decrease is different for each second phase-shifting line 142.

[0069] In this embodiment of the present disclosure, the position of at least one pair of phase shift lines 14 is adjusted by the driving structure 13, so that the electromagnetic wave output from the second output port 114 connected to the first phase shift line 141 has a different phase advance, and the electromagnetic wave output from the second output port 114 connected to the second phase shift line 142 has a different phase lag. Thus, for the antenna device 10 with the micro-nano phase shifter 1, the tilt of the electromagnetic beam radiated by the antenna device 10 can be realized. Furthermore, based on the arbitrary adjustment of the position of at least one pair of phase shift lines 14 by the driving structure 13, the tilt angle of the electromagnetic beam radiated by the antenna device 10 can be continuously adjusted, thereby improving the scanning accuracy of the antenna device 10.

[0070] The micro / nano phase shifter 1 can be fabricated using microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEM), and of course, it can also be obtained using other process systems; this disclosure does not limit this aspect. Furthermore, regarding... Figure 1 The first phase shift line 141 and the second phase shift line 142 shown are merely examples. Alternatively, in a pair of phase shift lines 14, the one closer to the first support 131 may be the second phase shift line 142, and the one farther from the first support 131 may be the first phase shift line 141.

[0071] The substrate body 111 can be a glass substrate or the like. The input port 112 on the substrate body 111 is used to input electromagnetic wave signals. The first output port 113 and multiple second output ports 114 are each connected to an antenna element 2 to adjust the phase of the electromagnetic beam radiated by the multiple antenna elements 2 under the phase shifting action of the micro-nano phase shifter 1, thereby achieving the tilting of the electromagnetic beam of the antenna device 10 equipped with the micro-nano phase shifter 1. For example, if the multiple antenna elements 2 are distributed vertically, the upward or downward tilting of the electromagnetic beam radiated by the antenna device 10 can be achieved. Furthermore, the direct connection between the input port 112 and the first output port 113 ensures that the phase of the electromagnetic wave output from the first output port 113 is not affected by the micro-nano phase shifter 1, so that the electromagnetic wave output from the first output port 113 can be used as a reference wave.

[0072] Among them, at least one set of transmission lines 12 can be formed directly on the surface of the substrate body 111 by means of vapor deposition, etching, etc., so as to facilitate the connection of each first transmission line 121 in the at least one set of transmission lines 12 to the input port 112, and the connection of each second transmission line 122 to a second output port 114.

[0073] It should be noted that the first transmission line 121 and the second transmission line 122, as well as the input trace 124 between the input port 112 and the first output port 113, and the output trace 125 between each first transmission line 121 and a second output port 114, are all metal traces and can be formed on the surface of the substrate body 111 by vapor deposition or etching. In order to avoid interference that may occur when forming the input trace 124, output trace 125, first transmission line 121, and second transmission line 122 on the substrate body 111, a jumper structure can be provided between the two intersecting traces. That is, an insulating layer is provided at the intersection of the traces, and one of the two intersecting traces is connected based on a via on the insulating layer and a crossover line on the insulating layer.

[0074] In some embodiments, both the first transmission line 121 and / or the second transmission line 122 include a winding segment 123. The winding density of the winding segment 123 on the first transmission line 121 is different from that on the second transmission line 122, and / or the winding density of the winding segment 123 on the second transmission line 122 is different. The two ends of the phase-shifting line 14 respectively cover at least a portion of the corresponding winding segment 123 on the first transmission line 121 and at least a portion of the corresponding winding segment 123 on the second transmission line 122. For example, as... Figure 1 and Figure 3 As shown, both the first transmission line 121 and the second transmission line 122 include a winding segment 123.

[0075] Thus, by setting the winding segments 123 on the first transmission line 121 and / or the second transmission line 122 in each pair of transmission lines 12, and because the density of the winding segments 123 in any two sets of transmission lines 12 is different, after adjusting the position of at least one set of phase shifting lines, and with at least one set of phase shifting lines moving synchronously, it is ensured that the increase in line length covered by each first phase shifting line on the corresponding pair of transmission lines is different, and the decrease in line length covered by each second phase shifting line on the corresponding pair of transmission lines is different.

[0076] It should be noted that, in this embodiment of the present disclosure, besides ensuring that the increase in line length covered by each first phase shifting line 141 is different and the decrease in line length covered by each second phase shifting line 142 is different by setting winding segments 123 with different winding densities, other methods can also be used to achieve the same result. For example, the position of each group of phase shifting lines 14 can be adjusted individually by a driving structure, and the amount of movement of each group of phase shifting lines 14 is different.

[0077] Optionally, such as Figure 1 As shown, at least one set of transmission lines 12 are sequentially distributed along the direction away from the input port 112. In two adjacent sets of transmission lines 12, the winding density of the winding segment 123 in the set of transmission lines 12 closer to the input port 112 is greater than the winding density of the winding segment 123 in the set of transmission lines 12 farther from the input port 112. This facilitates the connection of each first transmission line 121 and second transmission line 122 to the corresponding second output port 114, thereby avoiding interference between multiple output traces 125.

[0078] In some implementations, such as Figure 3 As shown, both the first transmission line 121 and the second transmission line 122 have winding segments 123. In this case, for a set of transmission lines 12 including two first transmission lines 121 and two second transmission lines 122, the winding density of the winding segments 123 of the two first transmission lines 121 and the two second transmission lines 122 can be set to be the same. This reduces the design difficulty of the transmission lines 12 and simplifies the manufacturing process. Furthermore, after adjusting the positions of a pair of phase-shifting lines 14, the increase in the length of the winding covered by the first phase-shifting line 141 on the corresponding winding segments 123 of the first and second transmission lines 121 and 122 is equal to the decrease in the length of the winding covered by the second phase-shifting line 142 on the corresponding winding segments 123 of the first and second transmission lines 121 and 122. This ensures the symmetry of the electromagnetic waves output by the multiple second output ports 114, guaranteeing the symmetry of the electromagnetic beams output by the multiple antenna elements 2 and thus ensuring antenna performance.

[0079] The winding segments 123 on each of the first transmission lines 121 and the second transmission lines 122 can be serrated or wavy, etc. Furthermore, to ensure that the winding lengths covered by the first phase shifter 141 and the second phase shifter 142 on their respective winding segments 123 can be adjusted after adjusting the position of at least one phase shifter 14, the length direction of the winding segments 123 on the first transmission line 121 and / or the second transmission line 122 (not the winding direction of the winding segments 123) is the same as the movement direction of at least one pair of phase shifters 14.

[0080] In this embodiment of the disclosure, the number of driving structures 13 can be one, in which case one driving structure 13 simultaneously drives at least one pair of phase shifting lines 14 to move; or there can be multiple driving structures 13. For example, the driving structures 13 and the phase shifting lines 14 correspond one-to-one, in which case one driving structure 13 drives a pair of phase shifting lines 14 to move.

[0081] In some implementations, such as Figure 1 and Figure 2 As shown, the driving structure 13 includes a first support portion 131 and a suspended portion 132; the first support portion 131 is fixed on the substrate body 111, and the suspended portion 132 is suspended on the substrate body 111, and at least one pair of phase shift lines 14 are fixedly connected to the suspended portion 132; the first support portion 131 has a first conductive portion 1311, and the suspended portion 132 has a second conductive portion 1324, the first conductive portion 1311 and the second conductive portion 1324 are configured to apply voltage or current to adjust the position of the suspended portion 132.

[0082] Thus, by applying voltage or current to the first conductive part 1311 and the second conductive part 1324, the position of at least one pair of phase shifting lines 14 can be adjusted after adjusting the position of the suspended part 132.

[0083] According to the specification, in this embodiment of the disclosure, in addition to adjusting the position of at least one pair of phase shifting lines 14 in the manner described above, the position of at least one pair of phase shifting lines 14 can also be adjusted in other ways.

[0084] The first support portion 131 and the suspended portion 132 can be formed on a silicon substrate, and when fabricating the first support portion 131 and the suspended portion 132, such as Figure 4 or Figure 5 As shown, the first support portion 131 and the suspended portion 132 can be an integral structure, that is, the drive structure 13 also includes a connecting arm 135. The first support portion 131 and the suspended portion 132 are fixedly connected through the connecting arm 135, so that when the first support portion 131 is fixed on the substrate body 111, the suspended portion 132 can be suspended on the substrate body 111.

[0085] Of course, the first support part 131 and the suspended part 132 can also be a separate structure, such as... Figure 1 or Figure 3 As shown, the drive structure 13 also includes a support column 134 fixedly connected to the suspended portion 132. In this case, the suspended portion 132 can be suspended on the substrate body 111 while the support column 134 is fixed on the substrate body 111.

[0086] In some implementations, such as Figure 1 or Figure 4 As shown, the suspended portion 132 includes a first suspended arm 1321, a second suspended arm 1322, and a connecting bridge 1323. The first suspended arm 1321 is disposed opposite to the first support portion 131 and has a second conductive portion 1324. At least one end of the first suspended arm 1321 and at least one end of the second suspended arm 1322 are both supported on the substrate body 111.

[0087] Thus, the ends of the first cantilever arm 1321 and the second cantilever arm 1322 are both supported on the substrate body 111 to ensure the stability of the cantilevered part 132, reduce the possibility of the cantilevered part 132 sinking, avoid direct contact between the cantilevered part 132 and the substrate body 111, and ensure the reliability of the movement of the cantilevered part 132.

[0088] Regarding the support of at least one end of the first cantilever arm 1321 on the substrate body 111, as described above, at least one end of the first cantilever arm 1321 can be fixedly connected to the first support portion 131 to ensure that the first cantilever arm 1321 can be suspended on the substrate body 111; or it can be as follows: Figure 1 or Figure 3 As shown, at least one end of the first cantilever arm 1321 is provided with a support rod, which is fixed to the substrate body 111 to ensure that the first cantilever arm 1321 can be suspended on the substrate body 111.

[0089] The fixed connection between at least one end of the first cantilever arm 1321 and the first support portion 131 can be as follows: Figure 4 or Figure 5 As shown, a connecting arm 135 connects the end of the first cantilever arm 1321 to the end of the first support portion 131. That is, both ends of the connecting arm 135 are fixedly connected to the ends of the first support portion 131 and the first cantilever arm 1321, respectively. The connecting arm 135 can be a structure fixed to the substrate body 111 or a structure suspended on the substrate body 111; this embodiment does not limit this. The support of at least one end of the second cantilever arm 1322 on the substrate body 111 can be as follows: Figure 1 or Figure 3As shown, at least one end of the second cantilever arm 1322 is provided with a support rod, which is fixed to the substrate body 111 to ensure that the second cantilever arm 1322 can be suspended on the substrate body 111.

[0090] Of course, it can also be like... Figure 4 or Figure 5 As shown, the drive structure 13 also includes a second support portion 133, which is disposed opposite to the second cantilever arm 1322, and the second support portion 133 is fixedly connected to the end of the second cantilever arm 1322. Thus, by fixing at least one end of the second cantilever arm 1322 to the second support portion 133, the second cantilever arm 1322 can be suspended on the substrate body 111. Furthermore, the second support portion 133, combined with the aforementioned first support portion 131, forms what appears to be two piers for the cantilever portion 132, further ensuring the stability of the cantilever portion 132.

[0091] The manufacturing method of the second support part 133 can refer to the manufacturing method of the first support part 131 described above, and the fixed connection between the second cantilever arm 1322 and the second support part 133 can refer to the fixed connection between the first cantilever arm 1321 and the first support part 131 described above. This embodiment will not be described in detail here.

[0092] It should be noted that, in this embodiment, the suspended portion 132 included in the drive structure 13 can be other structures besides those described above. For example, the suspended portion 132 may only include the first suspended arm 1321, or only include the first suspended arm 1321 and the connecting bridge 1323, as long as at least one pair of phase shifting lines 14 can be fixedly connected to the suspended portion 132. Furthermore, the number of connecting bridges 1323 included in the suspended portion 132 can be one or more, and the specific number of connecting bridges 1323 can be adjusted according to the number of pairs of phase shifting lines 14. For example, such as... Figure 6 As shown, the micro / nano phase shifter 1 includes three pairs of phase shift lines 14, and the suspended portion 132 includes two connecting bridges 1323 connecting the first suspended arm 1321 and the second suspended arm 1322.

[0093] In some embodiments, an insulating layer and / or a barrier is provided between the first conductive part 1311 and the second conductive part 1324. In this way, the provision of the insulating layer and / or barrier can prevent the suspended part 132 from being attracted to the first support part 131 when it moves toward the first support part 131.

[0094] Regarding the barrier provided between the first conductive part 1311 and the second conductive part 1324, in some embodiments, such as Figure 7As shown, the surface of the first support portion 131 facing the suspended portion 132 has a protrusion 136. In this way, the protrusion 136 can block the suction between the suspended portion 132 and the first support portion 131, thus extending the service life of the micro-nano phase shifter 1.

[0095] Of course, the surface of the suspended portion 132 facing the first support portion 131 may have a protrusion 136, or both the opposing surfaces of the first support portion 131 and the suspended portion 132 may have a protrusion 136.

[0096] The protrusion 136 on the surface of the first support portion 131 and / or the surface of the suspended portion 132 can be a single, centrally located protrusion, or it can be a plurality of protrusions 136 spaced apart. Furthermore, when both the surface of the first support portion 131 and the surface of the suspended portion 132 have protrusions 136, the protrusions 136 on both surfaces can be directly opposite each other or staggered. Preferably, the protrusions 136 on both surfaces can be staggered to increase the adjustable space of the suspended portion 132.

[0097] In some implementations, such as Figure 8 As shown, the driving structure 13 also includes a resistance arm 137, which is suspended on the substrate body 111, with one end of the resistance arm 137 located between the first support portion 131 and the suspended portion 132. Thus, the resistance arm 137 prevents the suspended portion 132 from engaging with the first support portion 131, extending the service life of the micro / nano phase shifter 1.

[0098] Optionally, in conjunction with the above description, if the end of the first support portion 131 and the end of the first suspended portion 132 are connected by a connecting arm 135, then as follows: Figure 8 As shown, one end of the resistance arm 137 can be fixedly connected to the connecting arm 135, and the other end of the resistance arm 137 extends between the first support portion 131 and the first support arm. Due to the suspended arrangement of the resistance arm 137, the suction between the suspended portion 132 and the first support portion 131 can be avoided without restricting the movement of the suspended portion 132.

[0099] In some embodiments, the first conductive portion 1311 on the first support portion 131 and the second conductive portion 1324 on the suspended portion 132 (first suspended arm 1321), in conjunction with the above-described case where the first support portion 131 and the suspended portion 132 are fabricated on a silicon substrate, can be formed on the first support portion 131 and the suspended portion 132 by implantation or doping processes in order to ensure the conductivity of the first conductive portion 1311 and the second conductive portion 1324.

[0100] The first conductive part 1311 and the second conductive part 1324 can be formed on the surface of the first support part 131 and the surface of the suspended part 132 facing the first support part 131, respectively, or they can be formed inside the first support part 131 and the suspended part 132, respectively. As long as the voltage or current applied to the first conductive part 1311 and the second conductive part 1324 can cause the suspended part 132 to move so as to adjust the position of the suspended part 132.

[0101] Of course, in addition to forming the first conductive part 1311 and the second conductive part 1324 on the first support part 131 and the suspended part 132 respectively by implantation or doping process, the first conductive part 1311 and the second conductive part 1324 can also be prefabricated and then pasted on the two opposite surfaces of the first support part 131 and the suspended part 132 respectively. This disclosure does not limit this.

[0102] In some embodiments, the first conductive portion 1311 and the second conductive portion 1324 on the first support portion 131 and the suspended portion 132 are both conductive electrode sheets, used to apply voltages of opposite polarity. Thus, after voltages are applied to the first conductive portion 1311 and the second conductive portion 1324, a Coulomb force attracting each other is generated between them due to the presence of conductive charges. This Coulomb force then causes the suspended portion 132 to move closer to the first support portion 131.

[0103] When the voltage applied to the first conductive part 1311 and the second conductive part 1324 is different, the Coulomb force between the first conductive part 1311 and the second conductive part 1324 is also different. Therefore, by arbitrarily adjusting the voltage applied to the first conductive part 1311 and the second conductive part 1324, the position of the suspended part 132 can be adjusted arbitrarily.

[0104] It should be noted that, taking the case where both the first conductive part 1311 and the second conductive part 1324 are conductive electrode sheets as an example, the first conductive part 1311 and the second conductive part 1324 can only move the suspended part 132 towards the first support part 131. That is, for the antenna device 10 including the micro / nano phase shifter 1, only unilateral tilt angle adjustment of the electromagnetic beam can be achieved. Optionally, in conjunction with the above-described case where the suspended part 132 includes a second suspended arm 1322 and the driving structure 13 also includes a second support part 133, such as... Figure 9 and Figure 10As shown, the second support portion 133 has a third conductive portion 1312, and the second cantilever arm 1322 has a fourth conductive portion 1325. The third conductive portion 1312 and the fourth conductive portion 1325 are configured to apply voltages of opposite polarities to adjust the position of the cantilever portion 132.

[0105] In this embodiment, the third conductive part 1312 and the fourth conductive part 1325 are both conductive electrode sheets. The manufacturing method and position of the third conductive part 1312 and the fourth conductive part 1325 on the second support part 133 and the second cantilever arm 1322, respectively, can be referred to the manufacturing method and position of the first conductive part 1311 and the second conductive part 1324 on the first support part 131 and the first cantilever arm 1321, respectively, as described above. This embodiment will not be repeated here.

[0106] In other embodiments, both the first conductive portion 1311 and the second conductive portion 1324 are conductive coils, used to load currents in the same or opposite directions. Thus, after current is loaded onto the first conductive portion 1311 and the second conductive portion 1324, a magnetic force is formed between them due to the magnetic fields generated by the first conductive portion 1311 and the second conductive portion 1324. When the currents loaded onto the first conductive portion 1311 and the second conductive portion 1324 are in the same direction, an attractive magnetic force is formed between the first conductive portion 1311 and the second conductive portion 1324, causing the suspended portion 132 to move closer to the first support portion 131; when the currents loaded onto the first conductive portion 1311 and the second conductive portion 1324 are in opposite directions, a repulsive magnetic force is formed between the first conductive portion 1311 and the second conductive portion 1324, causing the suspended portion 132 to move away from the first support portion 131.

[0107] When the magnitude of the current applied to the first conductive part 1311 and / or the second conductive part 1324 is different, the magnetic field strength generated by the first conductive part 1311 and the second conductive part 1324 is different, and the magnitude of the magnetic force between the first conductive part 1311 and the second conductive part 1324 is also different. Thus, by arbitrarily adjusting the magnitude of the current applied to the first conductive part 1311 and the second conductive part 1324, the position of the suspended part 132 can be adjusted arbitrarily.

[0108] It should be noted that, taking the case where both the first conductive part 1311 and the second conductive part 1324 are conductive coils as an example, although the suspended part 132 can be moved closer to or away from the first support part 131 by the current applied to the first conductive part 1311 and the second conductive part 1324, in order to avoid the movement of the suspended part 132 being affected by the large resistance, optionally, in conjunction with the case where the suspended part 132 includes a second suspended arm 1322 and the driving structure 13 also includes a second support part 133, the second support part 133 has a third conductive part 1312 and the second suspended arm 1322 has a fourth conductive part 1325. The third conductive part 1312 and the fourth conductive part 1325 are configured to apply current to adjust the position of the suspended part 132.

[0109] In this embodiment, both the third conductive part 1312 and the fourth conductive part 1325 are conductive coils. The currents applied to the first conductive part 1311 and the second conductive part 1324, and the third conductive part 1312 and the fourth conductive part 1325, are used to cause the suspended part 132 to move closer to or further away from the first support part 131. For example, the currents applied to the first conductive part 1311 and the second conductive part 1324 are in the same direction, and the currents applied to the third conductive part 1312 and the fourth conductive part 1325 are in opposite directions. The manufacturing method and position of the third conductive part 1312 and the fourth conductive part 1325 on the second support part 133 and the second suspended arm 1322, respectively, can be referred to the manufacturing method and position of the first conductive part 1311 and the second conductive part 1324 on the first support part 131 and the first suspended arm 1321, respectively, as described above. This embodiment will not be repeated here.

[0110] It should be noted that, in the case where the second support portion 133 and the second cantilever arm 1322 are respectively provided with the third conductive portion 1312 and the fourth conductive portion 1325, in order to prevent the second support portion 133 and the second cantilever arm 1322 from being attracted together when voltage or current is applied to the third conductive portion 1312 and the fourth conductive portion 1325, an insulating layer and / or a barrier can be provided between the second support portion 133 and the second cantilever arm 1322. For details, please refer to the above description. This disclosure does not limit the specific implementation of this embodiment.

[0111] In some embodiments, at least one pair of phase shift lines 14 can be formed on a silicon substrate. In this case, combined with the case where the suspended portion 132 is formed on the silicon substrate as described above, an integral structure of at least one pair of phase shift lines 14 and suspended portion 132 can be achieved, so as to ensure the stability of the at least one pair of phase shift lines 14 and suspended portion 132 and reduce the possibility of at least one pair of phase shift lines 14 falling.

[0112] To ensure the conductivity of at least one pair of phase-shifting lines 14, they can be formed on a silicon substrate through implantation or doping processes. Furthermore, the phase-shifting lines 14 included in the micro / nano phase shifter 1 can be one or more pairs, and correspondingly, the transmission lines 12 included in the micro / nano phase shifter 1 can be one or more sets. For example, as... Figure 4 As shown, the micro / nano phase shifter 1 includes two pairs of phase shift lines 14, and two sets of transmission lines 12 corresponding one-to-one with the two pairs of phase shift lines 14; or as shown... Figure 6 As shown, the micro / nano phase shifter 1 includes three pairs of phase shift lines 14 and three sets of transmission lines 12 corresponding to the three pairs of phase shift lines 14.

[0113] In this embodiment, for each pair of transmission lines 12, the winding methods of the first transmission line 121 and the second transmission line 122 may be the same or different; and for the micro-nano phase shifter 1 including multiple pairs of phase shift lines 14, the winding methods of the first phase shift line 141 in the multiple pairs of phase shift lines 14 may be the same or different, and this embodiment does not limit this.

[0114] The micro / nano phase shifter 1 includes phase shift lines 14 that can be straight, U-shaped, W-shaped, or spiral, etc. Specifically, each pair of phase shift lines 14, including the first phase shift line 141 and the second phase shift line 142, can be straight, U-shaped, W-shaped, or spiral. For example, the first phase shift line 141 and the second phase shift line 142 are both U-shaped; or both are W-shaped. Compared to straight phase shift lines 14, U-shaped, W-shaped, or spiral phase shift lines 14 can reduce the space occupied by the phase shift lines 14, thus facilitating the miniaturization of the micro / nano phase shifter 1.

[0115] In some embodiments, considering the aforementioned suspended portion 132 includes a first suspended arm 1321, a second suspended arm 1322, and a connecting bridge 1323, the first phase shifting line 141 of each pair of phase shifting lines 14 may be fixedly connected to the first suspended arm 1321 and / or the connecting bridge 1323, and the second phase shifting line 142 may be fixedly connected to the second suspended arm 1322 and / or the connecting bridge 1323. In this way, the first phase shifting line 141 of each pair of phase shifting lines 14 is positioned closer to the first suspended arm 1321, and the second phase shifting line 142 is positioned closer to the second suspended arm 1322, thereby ensuring the overall balance of the suspended portion 132 and avoiding the risk of the suspended structure (suspended portion 132 and phase shifting lines 14) falling due to excessive local weight.

[0116] For example, such as Figure 1 or Figure 4As shown, in each pair of phase shifting lines 14, the first phase shifting line 141 is fixedly connected to both the first suspended arm 1321 and the connecting bridge 1323, and the second phase shifting line 142 is fixedly connected to both the second suspended arm 1322 and the connecting bridge 1323, so as to increase the fixed area of ​​the first and second phase shifting lines 142 and the suspended part 132, thereby increasing the stability of the connection between at least one pair of phase shifting lines 14 and the suspended part 132.

[0117] In some embodiments, the first phase shifter 141 and the second phase shifter 142 in each pair of phase shifters 14 have the same extension length. This facilitates adjustment of the phase of the electromagnetic waves output from the two second output ports 114 connected to the first phase shifter 141 and the second phase shifter 142 of each pair of phase shifters 14, thereby ensuring the symmetry of the electromagnetic waves output from the two output ports.

[0118] In some embodiments, the extension lengths of the first phase shift lines 141 in the multiple pairs of phase shift lines 14 are all different. This facilitates the output of electromagnetic waves from the second output port 114 connected to each of the multiple pairs of phase shift lines 14 having a different phase.

[0119] For example, multiple first phase shift lines 141 are configured such that the phase of the electromagnetic waves output by the multiple connected second output ports 114, and the phase of the electromagnetic waves output by the first output port 113, are all in an arithmetic progression with a tolerance of 360 degrees. Specifically, the micro / nano phase shifter 1 includes two pairs of phase shift lines 14, where the phase of the electromagnetic waves output by the first output port 113 is 'a' degrees, the phase of the electromagnetic waves output by the second output port 114 connected to one first phase shift line 141 is (a+360) degrees, and the phase of the electromagnetic waves output by the second output port 114 connected to the other first phase shift line 141 is (a+720) degrees.

[0120] In light of the above-described distribution of at least one set of transmission lines 12 along a direction away from the input port 112, for multiple first phase-shifting lines 141 and second phase-shifting lines 142 of different lengths, such as Figure 1 , Figure 6 or Figure 9 As shown, at least one pair of phase shifting lines 14 can be arranged sequentially along the direction away from the input port 112, and the lengths of the first phase shifting line 141 and the second phase shifting line 142 both increase along the direction away from the input port 112.

[0121] Of course, such as Figure 11 As shown, the two pairs of phase shifting lines 14, including the first phase shifting line 141 and the second phase shifting line 142, can also be diagonally distributed. This can avoid the situation where one side of the micro-nano phase shifter 1 is unbalanced, which helps to ensure the stability of the micro-nano phase shifter 1 and avoids the risk of falling due to the large local weight.

[0122] This disclosure also provides an antenna device 10, such as... Figure 12 As shown, the antenna device 10 includes multiple antenna elements 2 and the micro / nano phase shifter 1 described in the above embodiment. The multiple antenna elements 2 include a first antenna element 2 and multiple second antenna elements 2. The first antenna element 2 is connected to a first output port 113, and each second antenna element 2 is connected to a second output port 114.

[0123] Combined with the micro / nano phase shifter 1 described above, the electromagnetic beam radiated by the antenna device 10 can achieve continuous adjustment of the downtilt and uptilt angles while simultaneously tilting down or up, thereby increasing the scanning accuracy of the antenna device 10 and improving its antenna performance.

[0124] In some implementations, such as Figure 12 As shown, multiple antenna elements 2 are integrated on the substrate body 111, thus realizing high-frequency integration of the antenna device 10 and facilitating the improvement of the service life of the antenna device 10.

[0125] For example, combined Figure 12 As shown, the substrate body 111 has an input port 112, a first output port 113, and four second output ports 114, which are symmetrically distributed on both sides of the first output port 113. The micro / nano phase shifter 1 includes two sets of transmission lines 12 and two pairs of phase shift lines 14 located between the input port 112 and the first output port 113. The winding density of the winding segment 123 in the set of transmission lines 12 closer to the input port 112 is greater than that in the set of transmission lines 12 farther from the input port 112. Figure 12 As shown, the antenna device 10 includes a first antenna unit 21, a second antenna unit 22, a third antenna unit 23, a fourth antenna unit 24, and a fifth antenna unit 25, which are respectively connected to a first output port 113 and each second output port 114.

[0126] Thus, after the first conductive part 1311 and the second conductive part 1324 of the driving structure 13 are respectively loaded with voltages of opposite polarities, and the two sets of phase shifting lines 14 are controlled to move towards the first support part 131, the phase of the electromagnetic waves radiated by the first antenna unit 21 and the second antenna unit 22 is lagging, and the phase lag of the electromagnetic waves radiated by the first antenna unit 21 is greater than the phase lag of the electromagnetic waves radiated by the second antenna unit 22; the phase of the electromagnetic waves radiated by the third antenna unit 23 remains unchanged; the electromagnetic waves radiated by the fourth antenna unit 24 and the fifth antenna unit 25 are leading, and the phase lead of the electromagnetic waves radiated by the fifth antenna unit 25 is greater than the phase lead of the electromagnetic waves radiated by the fourth antenna unit 24.

[0127] Figure 13An example is provided by an embodiment of this disclosure of a method for fabricating a micro / nano phase shifter, which can be used to fabricate the micro / nano phase shifter described in the above embodiments. For example... Figure 13 As shown, the method includes steps S110 to S130.

[0128] Step S110: Provide a substrate body and form an input port, a first output port and a plurality of second output ports, and at least one set of transmission lines on the substrate body. The input port is directly connected to the first output port. Each set of transmission lines includes two pairs of transmission lines. Each pair of transmission lines includes a first transmission line and a second transmission line. Each first transmission line in the at least one set of transmission lines is connected to the input port, and each second transmission line is connected to a second output port.

[0129] Step S120: Provide a silicon substrate and form a driving structure and at least one pair of phase shift lines on the silicon substrate. The at least one pair of phase shift lines are connected to the driving structure. A pair of phase shift lines corresponds to a set of transmission lines, and one phase shift line corresponds to a pair of transmission lines.

[0130] Step S130: Attach the silicon substrate and the substrate body to support the driving structure on the substrate body. At least one pair of phase shift lines are suspended on the substrate body. The two ends of each phase shift line cover at least a portion of the corresponding first transmission line and at least a portion of the corresponding second transmission line. Each pair of phase shift lines includes a first phase shift line and a second phase shift line.

[0131] The driving structure is used to drive at least one pair of phase shifting lines to move. After the at least one pair of phase shifting lines move, the length of each first phase shifting line covered on the corresponding pair of transmission lines increases, and the amount of increase is different. The length of each second phase shifting line covered on the corresponding pair of transmission lines decreases, and the amount of decrease is different.

[0132] In this embodiment of the disclosure, the micro / nano phase shifter fabricated using the above method adjusts the position of at least one pair of phase shift lines 14 through the driving structure 13, so that the electromagnetic waves output from the second output port 114 connected to the first phase shift line 141 have different phase advances, and the electromagnetic waves output from the second output port 114 connected to the second phase shift line 142 have different phase lags. Thus, for the antenna device 10 with the micro / nano phase shifter 1, the tilt of the electromagnetic beam radiated by the antenna device 10 can be achieved. Furthermore, based on the arbitrary adjustment of the position of at least one pair of phase shift lines 14 by the driving structure 13, the tilt angle of the electromagnetic beam radiated by the antenna device 10 can be continuously adjusted, thereby improving the scanning accuracy of the antenna device 10.

[0133] In step S110 above, the material of the substrate body can refer to the above embodiment. The input port, the first output port, the multiple second output ports and at least one set of transmission lines formed on the substrate body, as well as the input traces between the input port and the first output port and the first transmission line, and the output traces between the second transmission line and the second output port, can all be fabricated by processes such as vapor deposition and etching. In order to avoid interference between the first transmission line, the second transmission line, the input traces and the output traces during fabrication, a jumper structure can be set.

[0134] In step S120 above, the driving structure and at least one pair of phase shift lines formed on the silicon substrate can be referred to the above embodiments, and this disclosure does not limit them.

[0135] In step S130 above, the bonding of the substrate body and the silicon substrate can be performed by bonding, or other methods can be used. This embodiment does not limit the specific method used.

[0136] The specific structure of the micro / nano phase shifter fabricated through steps S110 to S130 can be found in the embodiments described above.

[0137] It should be noted that although the steps of the fabrication method of the micro / nano phase shifter in this disclosure are described in a specific order in the accompanying drawings, this does not require or imply that these steps must be performed in that specific order, or that all the steps shown must be performed to achieve the desired result. Additional or alternative steps may be omitted, multiple steps may be combined into one step, and / or one step may be broken down into multiple steps.

[0138] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the appended claims.

Claims

1. A micro / nano phase shifter, characterized in that, include: The substrate includes a substrate body, and an input port, a first output port, and a plurality of second output ports located on the substrate body, wherein the input port is directly connected to the first output port; At least one set of transmission lines is located on the substrate body. Each set of transmission lines includes two pairs of transmission lines. Each pair of transmission lines includes a first transmission line and a second transmission line. Each first transmission line in the at least one set of transmission lines is connected to the input port, and each second transmission line is connected to a second output port. The driving structure is supported on the substrate body; At least one pair of phase shifting lines are connected to the driving structure and are suspended on the substrate body. One pair of phase shifting lines corresponds to a set of transmission lines, and one phase shifting line corresponds to one pair of transmission lines. The two ends of each phase shifting line respectively cover at least a portion of the corresponding first transmission line and at least a portion of the corresponding second transmission line. Each pair of phase-shifting lines includes a first phase-shifting line and a second phase-shifting line. The driving structure is used to drive the at least one pair of phase-shifting lines to move. After the at least one pair of phase-shifting lines move, the length of the first phase-shifting line covered by each first phase-shifting line on the corresponding pair of transmission lines increases, and the amount of increase is different for each pair. The length of the second phase-shifting line covered by each second phase-shifting line on the corresponding pair of transmission lines decreases, and the amount of decrease is different for each pair.

2. The micro / nano phase shifter as described in claim 1, characterized in that, The first transmission line and / or the second transmission line both include winding segments, and the winding density of the winding segments on the first transmission line is different in any two sets of transmission lines, and / or the winding density of the winding segments on the second transmission line is different. The two ends of the phase-shifting line respectively cover at least a portion of the winding segment on the corresponding first transmission line and at least a portion of the winding segment on the corresponding second transmission line.

3. The micro / nano phase shifter as described in claim 2, characterized in that, The at least one set of transmission lines are distributed sequentially along the direction away from the input port. Among two adjacent sets of transmission lines, the winding density of the winding segment in the set of transmission lines closer to the input port is greater than the winding density of the winding segment in the set of transmission lines farther from the input port.

4. The micro / nano phase shifter as described in claim 1, characterized in that, The drive structure includes a first support part and a suspended part; The first support portion is fixed on the substrate body, the suspended portion is suspended on the substrate body, and the at least one pair of phase shifting lines are all fixedly connected to the suspended portion. The first support portion has a first conductive portion, and the suspended portion has a second conductive portion. The first conductive portion and the second conductive portion are configured to apply voltage or current to adjust the position of the suspended portion.

5. The micro / nano phase shifter as described in claim 4, characterized in that, The suspended section includes a first suspended arm, a second suspended arm, and a connecting bridge; The first cantilever arm is disposed opposite to the first support portion and has a second conductive portion. At least one end of the first cantilever arm and at least one end of the second cantilever arm are both supported on the substrate body.

6. The micro / nano phase shifter as described in claim 5, characterized in that, The drive structure also includes a connecting arm, the two ends of which are fixedly connected to the end of the first support and the end of the first cantilever arm, respectively.

7. The micro / nano phase shifter as described in claim 5, characterized in that, The first phase-shifting line in each pair of phase-shifting lines is fixedly connected to the first cantilever arm and / or the connecting bridge, and the second phase-shifting line is fixedly connected to the second cantilever arm and / or the connecting bridge.

8. The micro / nano phase shifter as described in claim 5, characterized in that, The drive structure also includes a second support section; The second support portion is disposed opposite to the second cantilever arm, and the second support portion is fixedly connected to the end of the second cantilever arm.

9. The micro / nano phase shifter as described in claim 8, characterized in that, The second support portion has a third conductive portion, and the second cantilever arm has a fourth conductive portion. The third conductive portion and the fourth conductive portion are configured to apply voltages of opposite polarities to adjust the position of the cantilever portion.

10. The micro / nano phase shifter as described in claim 4, characterized in that, The surface of the first support portion facing the suspended portion has a protrusion.

11. The micro / nano phase shifter as described in claim 4 or 10, characterized in that, The drive structure also includes a resistance arm, which is suspended on the substrate body, and one end of the resistance arm is located between the first support portion and the suspended portion.

12. The micro / nano phase shifter according to any one of claims 4-10, characterized in that, Both the first conductive part and the second conductive part are conductive electrode sheets, and the first conductive part and the second conductive part are used to apply voltages of opposite polarity.

13. The micro / nano phase shifter according to any one of claims 4-10, characterized in that, Both the first conductive part and the second conductive part are conductive coils, and the first conductive part and the second conductive part are used to apply current in the same or opposite directions.

14. The micro / nano phase shifter according to any one of claims 1-10, characterized in that, The first and second phase shift lines in each pair of phase shift lines are U-shaped or W-shaped.

15. A method for fabricating a micro / nano phase shifter, characterized in that, The method includes: A substrate body is provided, and an input port, a first output port and a plurality of second output ports are formed on the substrate body, as well as at least one set of transmission lines. The input port is directly connected to the first output port. Each set of transmission lines includes two pairs of transmission lines. Each pair of transmission lines includes a first transmission line and a second transmission line. Each first transmission line in the at least one set of transmission lines is connected to the input port, and each second transmission line is connected to one of the second output ports. A silicon substrate is provided, and a driving structure and at least one pair of phase-shifting lines are formed on the silicon substrate. The at least one pair of phase-shifting lines are both connected to the driving structure. A pair of phase-shifting lines corresponds to a set of transmission lines, and one phase-shifting line corresponds to a pair of transmission lines. The silicon substrate and the substrate body are bonded together so that the driving structure is supported on the substrate body. The at least one pair of phase shifting lines are suspended on the substrate body. The two ends of each phase shifting line respectively cover at least a portion of the corresponding first transmission line and at least a portion of the corresponding second transmission line. Each pair of phase shifting lines includes a first phase shifting line and a second phase shifting line. The driving structure is used to drive the at least one pair of phase shifting lines to move. After the at least one pair of phase shifting lines move, the length of each first phase shifting line covered by the corresponding pair of transmission lines increases, and the amount of increase is different. The length of each second phase shifting line covered by the corresponding pair of transmission lines decreases, and the amount of decrease is different.

16. An antenna device, characterized in that, Includes multiple antenna elements and the micro / nano phase shifter as described in any one of claims 1-14; The plurality of antenna elements include a first antenna element and a plurality of second antenna elements, wherein the first antenna element is connected to the first output port, and each second antenna element is connected to a second output port.

17. The antenna device as claimed in claim 16, characterized in that, Multiple antenna units are integrated on the substrate body.

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