TCO conductive glass processing method

Abstract

The invention discloses a TCO conductive glass processing method, and relates to the technical field of glass production. The TCO conductive glass processing method comprises the following steps: forming glass, melting a glass raw material in a melting furnace at a high temperature to form a uniform glass melt, continuously flowing the glass melt into a tin bath, floating the glass melt on the surface of tin liquid in the tin bath to form a glass tape, and carrying out edge pulling on the glass tape through an edge pulling roller to achieve a target size and form a glass substrate; and carrying out high-temperature coating, and moving the glass substrate to a coating channel through the outlet end of the tin bath and a material conveyor. According to the invention, the coating assemblies and the glass substrate are arranged to move synchronously, and two adjacent coating assemblies form a closed flow channel, so that a single coating assembly can perform continuous coating on the surface of a section of glass substrate, and a gas-phase reactant deposition process can be dynamically matched with the continuously moving glass substrate; and the coating uniformity of the chemical vapor deposition method is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of glass production, in particular to a TCO conductive glass processing method. BACKGROUND

[0002] TCO conductive glass, also known as transparent conductive oxide glass, is a material coated with a layer of transparent conductive oxide film on the surface of the glass by physical or chemical methods. The online coating process is a technology that directly completes thin film deposition in the continuous production process of glass substrates, without the need to take the glass off the production line for separate coating treatment. Its core advantage is that it can utilize the waste heat (such as the high-temperature glass ribbon of float glass) in the glass production process, greatly reducing energy consumption and production cost, while achieving strong bonding force between the thin film and the glass substrate, which is the mainstream coating scheme for TCO conductive glass.

[0003] For example, the patent with publication number CN101844874A discloses an online coating method and device for conductive glass, which sets multiple reaction gas inlet channels and multiple waste gas extraction channels in the coating area, and drives the glass substrate through the multiple reaction gas inlet channels and multiple waste gas extraction channels by a conveying roller, so that the gas phase reactants deposit on the surface of the glass substrate to achieve coating. However, the multiple inlet channels are prone to interference of the gas phase reactants, affecting the uniformity of the coating. SUMMARY

[0004] In view of the deficiencies of the prior art, the present application provides a TCO conductive glass processing method, which solves the problem of interference of the gas phase reactants between the multiple inlet channels, affecting the uniformity of the coating.

[0005] To achieve the above purpose, the present application realizes the following technical scheme: a TCO conductive glass processing method, comprising the following steps: Step one, glass forming: uniformly melt the glass raw materials in a melting furnace to form a glass melt, and the glass melt continuously flows into a tin bath, where the glass melt floats on the surface of the tin liquid to form a glass ribbon. The glass ribbon is edge-lapped by an edge-lapping roller to reach the target size and form a glass substrate. Step two, high-temperature coating: the glass substrate is moved to the coating channel by a material conveyor through the outlet end of the tin bath. The coating channel has a split coating device, which moves synchronously with the glass substrate to coat a layer of transparent conductive oxide film on the surface of the glass substrate and reduce the waste gas flow space. Step three, annealing and cooling: the coated glass ribbon is drawn into an annealing furnace for gradient annealing to eliminate internal stress.

[0006] Further, the coating device comprises a conveyor and multiple groups of coating assemblies uniformly distributed in the conveying direction of the conveyor. The single set of coating assembly comprises: The air jet nozzle is a plate structure with a cavity, and the thickness of the plate structure is in the conveying direction of the conveyor. The air jet nozzle is provided with supports at both ends, and the supports are provided with air flow baffles. The exhaust nozzle is located on one side of the air jet nozzle, and the adjacent two exhaust nozzles and the air flow baffles can form a closed flow channel therebetween. The closed flow channel blocks the expansion of the reaction exhaust gas, so that the reaction exhaust gas is gradually exhausted in the controlled closed flow channel.

[0007] Further, the exhaust nozzle comprises: The outer exhaust plate is fixed with the support, and the inner exhaust plate is movably arranged inside the outer exhaust plate. The outer exhaust plate is provided with a plurality of outer through grooves on both sides along the thickness direction of the outer exhaust plate. The inner exhaust plate is provided with an inner through groove matched with the outer through groove. The inner exhaust plate moves in the outer exhaust plate to make the inner through groove close to or away from the corresponding outer through groove, so as to change the opening and closing size of the outer through groove and control the exhaust capacity of the exhaust nozzle.

[0008] Further, the coating channel is provided with a slide rail fixed therein, and the slide rail is located at both ends of the coating assembly. The slide rail comprises an inclined rail gradually rising along the transmission direction of the conveyor. A straight rail is arranged above the inclined rail. The inclined rail and the straight rail are connected as an integrated structure through a first arc-shaped rail and a second arc-shaped rail at both ends. The first arc-shaped rail is a poor arc with gradually increasing diameter, and the second arc-shaped rail is a poor arc with fixed diameter. The upper part of both ends of the inner exhaust plate is fixed with a sliding block, and the sliding block can slide on the slide rail.

[0009] Further, the air inlet end of the air jet nozzle is provided with a converging section, and the lower part of the converging section is provided with a diverging section. A throat is formed between the converging section and the diverging section. The lower part of the diverging section is provided with a flat section. The air jet end of the air jet nozzle is provided with a flat nozzle.

[0010] Further, the conveyor is provided with a third air inlet manifold on both sides. One end of the third air inlet manifold is provided with an air inlet pipe. The upper end of the air inlet pipe extends to the outside of the coating channel. The gas phase reactant is introduced into the third air inlet manifold through the air inlet pipe. The second connecting pipe is connected between the air jet nozzle and the third air inlet manifold.

[0011] Further, the conveyor is provided with a second exhaust manifold on both sides. One end of the second exhaust manifold is provided with an exhaust pipe. A first exhaust manifold is fixed at the top end of the coating channel. The upper end of the exhaust pipe extends to the outside of the coating channel and is fixedly connected with the first exhaust manifold. The first connecting pipe is connected between the exhaust nozzle and the second exhaust manifold.

[0012] Further, the inlet and outlet ends of the coating channel are provided with exhaust cylinders, the upper ends of the exhaust cylinders are fixedly connected with exhaust pipes, and the end portions of the exhaust pipes are fixedly communicated with the first exhaust manifold.

[0013] Further, the support frame is in the shape of an isosceles triangle, the airflow baffle is located on the isosceles side of the isosceles triangle, and is inclined downward away from the air jet nozzle.

[0014] Further, the conveyor comprises: The first conveyor belt and the second conveyor belt are arranged side by side, and the first conveyor belt and the second conveyor belt are each provided with a coating assembly; An installation gap is formed between the first conveyor belt and the second conveyor belt, and a support frame is arranged on the side of the first conveyor belt and the second conveyor belt away from each other and at the installation gap position, the support frame is connected with the rotating shaft of the conveyor through a bearing, and an installation frame is connected to the support frame at the installation gap position, and the upper portion of the installation frame is installed on the top of the coating channel.

[0015] The present application has the following advantages: 1. The TCO conductive glass processing method, by setting the coating assembly to move synchronously with the glass substrate, the adjacent two groups of coating assemblies form a closed flow channel, so that a single coating assembly can continuously coat the surface of a section of glass substrate, the vapor deposition process of the gas phase reactant can be dynamically matched with the continuously moving glass substrate, the uniformity of the chemical vapor deposition coating is improved, the closed flow channel blocks the diffusion of the airflow outward, reduces the interference of the waste gas flow on the substrate surface, and makes the coating gas flow stably on the substrate surface.

[0016] 2. The TCO conductive glass processing method, by setting the inner exhaust plate, the outer exhaust plate and the sliding rail, the inner exhaust plate gradually rises along the moving direction of the glass substrate under the action of the inclined rail, that is, as the coating work proceeds, the inner exhaust plate gradually moves upward to make the inner channel and the corresponding outer channel close, so as to change the opening and closing size of the outer channel, control the air suction amount of the exhaust nozzle, and adapt to the gradually increasing amount of waste gas in the coating work.

[0017] 3. The TCO conductive glass processing method, the conveyor for conveying the coating assembly to move synchronously with the glass substrate is provided with a first conveyor belt and a second conveyor belt, an installation gap is formed between the two, the coating assembly is arranged on the first conveyor belt and the second conveyor belt, the balanced operation of the coating assembly is realized, the installation gap facilitates the installation and fixation of the conveyor, the synchronous movement of the coating assembly and the glass substrate does not interfere with the coating work.

[0018] Of course, implementing any product of the present application does not necessarily require all the advantages described above. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1Process step of the present application; Figure 2 Schematic diagram of appearance structure of the present application; Figure 3 Sectional view of the present application; Figure 4 Schematic diagram of coating device of the present application; Figure 5 Partial schematic diagram of coating device of the present application; Figure 6 Schematic diagram of connection between coating assembly and conveyor of the present application; Figure 7 Schematic diagram of conveyor of the present application; Figure 8 Schematic diagram of exhaust nozzle of the present application; Figure 9 Sectional view of exhaust nozzle of the present application; Figure 10 Schematic diagram of working state of coating device of the present application; Figure 11 Schematic diagram of working state of exhaust nozzle of the present application.

[0020] In the figure, 1, coating channel; 2, material conveyor; 31, first exhaust manifold; 32, exhaust pipe; 33, exhaust cylinder; 34, second exhaust manifold; 35, first connecting pipe; 41, air inlet pipe; 42, third air inlet manifold; 43, second connecting pipe; 5, conveyor; 51, first conveying belt; 52, second conveying belt; 53, installation gap; 54, support frame; 55, mounting frame; 6, slide rail; 61, inclined rail; 62, first arc rail; 63, second arc rail; 64, straight rail; 7, coating assembly; 71, air jet nozzle; 711, converging section; 712, diverging section; 713, straight section; 714, flat jet; 72, exhaust nozzle; 721, inner exhaust plate; 7211, sliding block; 722, outer exhaust plate; 723, outer through groove; 724, inner through groove; 73, support; 74, air flow baffle; 8, closed flow channel. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0022] In the description of the present application, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the components or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0023] In the following, the TCO conductive glass processing method provided by the embodiments of the present application will be described in detail. Figures 1-11 The TCO conductive glass processing method provided by the embodiments of the present application will be described in detail.

[0024] Please refer to Figure 1 The TCO conductive glass processing method provided by the embodiments of the present application will be described in detail. Step one, glass forming, the glass raw materials are melted at high temperature in a melting furnace to form a uniform glass melt, the glass melt continuously flows into a tin bath, the glass melt floats on the surface of the tin liquid in the tin bath to form a glass ribbon, the glass ribbon is edge drawn by an edge roller to reach the target size to form a glass substrate; Step two, high-temperature coating, the glass substrate is moved to a coating channel 1 through a material conveyor 2 at the outlet end of the tin bath, the coating channel 1 has a split type coating device, the split type coating device moves synchronously with the glass substrate, which is used to coat a layer of transparent conductive oxide film on the surface of the glass substrate and reduce the waste gas flow space; Step three, annealing and cooling, the glass ribbon after coating is pulled into an annealing furnace to perform gradient annealing to eliminate internal stress.

[0025] Please refer to Figures 2-6 The coating device includes a conveyor 5 and a plurality of coating assemblies 7 uniformly distributed in the conveying direction of the conveyor 5, the coating assemblies 7 can coat the glass substrate and exhaust waste gas, wherein the transmission speed of the conveyor 5 is the same as that of the material conveyor 2, so that the coating assemblies 7 move synchronously with the glass substrate, and then the vapor reaction deposition process of the coating assemblies 7 can be dynamically matched with the continuously moving glass substrate, the plurality of coating assemblies 7 can continuously and stably coat the surface of the corresponding glass substrate, and the uniformity of the chemical vapor deposition coating is improved.

[0026] Further, the two adjacent groups of coating assemblies 7 can form a closed flow channel 8 covering only the area of the glass substrate, the closed flow channel 8 blocks the diffusion of the gas flow outward, at the same time reduces the interference of the waste gas flow on the surface of the glass substrate, so that the gas phase reactants flow stably on the substrate surface, specifically, a single group of coating assemblies 7 includes a gas nozzle 71 and an exhaust nozzle 72, the gas nozzle 71 is a hollow plate structure, the thickness of the plate structure is in the conveying direction of the conveyor 5, and supports 73 are installed at both ends of the gas nozzle 71, and the supports 73 are provided with a gas flow baffle 74, and the exhaust nozzle 72 is located on one side of the gas nozzle 71, so that the two adjacent exhaust nozzles 72 and the gas flow baffles 74 can form a closed flow channel 8, the closed flow channel 8 blocks the outward diffusion of the reaction waste gas, so that the reaction waste gas is gradually exhausted in the controlled closed flow channel 8.

[0027] Therefore, in the TCO conductive glass processing method provided by the embodiment of the present application, the coating assembly 7 moves synchronously with the conveyor 5 and the glass substrate, for a section of the glass substrate, the gas phase reactants of the TCO film are transported to the closed flow channel 8 through the gas nozzle 71, and the surface of the corresponding section of the glass substrate is continuously coated, at the same time, the exhaust nozzles 72 located at both ends of the gas nozzle 71 work, so that the gas phase reactants move to both sides of the closed flow channel 8, and then uniformly cover the surface of the section of the glass substrate, the gas phase reactants are adsorbed on the surface of the glass substrate, and a chemical reaction is triggered by the high temperature of the substrate, so that the TCO film and waste gas are generated, the exhaust nozzles 72 can also collect the waste gas desorbed from the surface of the glass, so as to avoid pollution of the film or equipment, and at this time, the waste gas in the entire coating channel 1 will not interfere with each other to affect the coating effect.

[0028] Preferably, the supports 73 form an isosceles triangle structure, the gas flow baffles 74 are located on the isosceles sides of the isosceles triangle, and are inclined downward in the direction away from the gas nozzle 71, so that the gas phase reactants diffusing to both sides can be more closely attached to the glass substrate through the inclined gas flow baffles 74, the edge flux is compensated, and the edge attenuation of the gas flow is reduced.

[0029] Preferably, the acute angle end of the support 73, which is not provided with the exhaust nozzle 72, is fixedly provided with an L-shaped corner clamp, the L-shaped corner clamp is matched with the edge of the exhaust nozzle 72, so that the two adjacent groups of coating assemblies 7 can be stably connected to form the closed flow channel 8.

[0030] Preferably, the material conveying machine 2 is a lifting roller conveying machine, for example, the roller conveying machine is lifted by hydraulic pressure, air pressure or the like, at the beginning of the coating work, the material conveying machine 2 is lifted to push the glass substrate to rise and approach the coating device, so that the gas nozzle 71 is close to the glass substrate, which is beneficial to the gas phase deposition.

[0031] Further, the distance between the gas nozzle 71 and the glass substrate is 2-3 cm, which reduces the impact of the sprayed gas flow on the glass, and also ensures the diffusion of the gas flow after being sprayed, and the distance between the exhaust nozzle 72 and the glass substrate is 2-10 mm.

[0032] Please refer to Figures 3-5 , in order to facilitate the uninterrupted intake of the film-coated assembly 7 with the conveyor 5 movement, here on both sides of the conveyor 5 is provided with a third intake manifold 42, one end of the third intake manifold 42 is provided with an intake pipe 41, the upper end of the intake pipe 41 extends to the outside of the film-coated channel 1, the gas nozzle 71 and the third intake manifold 42 are connected by a second connecting pipe 43, the gas phase reactant enters the third intake manifold 42 through the intake pipe 41, and then enters the gas nozzle 71 through the second connecting pipe 43, and the gas phase reactant is released to the glass substrate surface through the gas nozzle 71.

[0033] Preferably, referring to Figure 9 , the gas nozzle 71 is provided with a tapered section 711 at the intake end, a diverging section 712 is provided at the lower part of the tapered section 711, and a throat is formed between the two, a flat section 713 is provided at the lower part of the diverging section 712, the cross-sectional area of the tapered section 711 gradually decreases, forcing the fluid to accelerate, the throat is the smallest cross-sectional area region, the flow rate reaches the maximum value and the static pressure drops to the minimum value here, the cross-sectional area of the diverging section 712 gradually recovers, the flow rate decreases and the gas is fully mixed by pressure difference, the initial mixing uniformity of the gas phase reactant directly determines the subsequent diffusion effect, the design of the tapered section 711-throat-diverging section 712 can eliminate the problem of raw material stratification and concentration gradient, and the flat section 713 stabilizes the flow field and guides the gas flow parallel to the glass substrate surface.

[0034] In addition, referring to Figure 9 , the gas nozzle 71 is provided with a flat spray head 714 at the gas injection end, the length of the flat spray head 714 matches the width of the glass, replacing the traditional circular nozzle, so that the gas phase reactant is sprayed to the glass surface in laminar flow, avoiding the use of circular nozzles to form turbulent flow, resulting in local concentration too high.

[0035] Please refer to Figures 3-5 , in order to facilitate the uninterrupted exhaust of the film-coated assembly 7 with the conveyor 5 movement, here on both sides of the conveyor 5 is provided with a second exhaust manifold 34, one end of the second exhaust manifold 34 is provided with an exhaust pipe 32, the top end of the film-coated channel 1 is fixed with a first exhaust manifold 31, the upper end of the exhaust pipe 32 extends to the outside of the film-coated channel 1 and is fixedly connected with the first exhaust manifold 31, the first connecting pipe 35 is connected between the exhaust nozzle 72 and the second exhaust manifold 34, the exhaust nozzle 72 can absorb the unreacted gas phase reactant (such as silane, ammonia, metal organic compound) and reaction byproduct (such as hydrogen chloride, hydrogen, methane), the first exhaust manifold 31 is provided with an integrated pipe, and the integrated pipe is provided with an exhaust pump, the exhaust nozzle 72 can absorb the exhaust gas through the operation of the exhaust pump, enters the second exhaust manifold 34 through the first connecting pipe 35, and is then concentrated to the first exhaust manifold 31 through the exhaust pipe 32.

[0036] Further, referring to Figure 8 andFigure 11 In order to adjust the air suction amount of the exhaust nozzle 72 according to the film coating state, the exhaust nozzle 72 is provided with an outer exhaust plate 722 fixedly connected with the support 73, the inner exhaust plate 722 is provided with an inner exhaust plate 721 which can move longitudinally, and the outer exhaust plate 722 is provided with a plurality of outer through grooves 723 on both sides, the inner exhaust plate 721 is provided with inner through grooves 724 matched with the outer through grooves 723, the lower ends of the inner exhaust plate 721 and the outer exhaust plate 722 are closed structures and not used as exhaust ports, the inner through grooves 724 can be close to or away from the corresponding outer through grooves 723 by longitudinally moving the inner exhaust plate 721, so as to change the opening and closing size of the outer through grooves 723, control the air suction amount of the exhaust nozzle 72, and the pair of outer through grooves 723 at the lowermost end of the outer exhaust plate 722 are always in an open state.

[0037] It should be noted that the exhaust nozzle 72 performs the exhaust work, so that the gas-phase reactants move to both sides of the closed flow channel 8 and diffuse to the position directly below the exhaust nozzle 72, and therefore the glass substrate located directly below the exhaust nozzle 72 can also complete the film coating work and generate the TCO thin film.

[0038] Specifically, referring to Figure 10 In order to longitudinally move the inner exhaust plate 721 so that the inner through grooves 724 are close to or away from the corresponding outer through grooves 723, the film coating assembly 7 is provided with slide rails 6 at both ends, the slide rails 6 include an inclined rail 61 which gradually rises along the transmission direction of the conveyor 5, a straight rail 64 is arranged above the inclined rail 61, the inclined rail 61 and the straight rail 64 are integrally connected through a first arc-shaped rail 62 and a second arc-shaped rail 63 at both ends, the first arc-shaped rail 62 and the second arc-shaped rail 63 are close to the outlet end and the inlet end of the film coating channel 1 respectively, the first arc-shaped rail 62 is a poor arc with gradually increasing diameter, the second arc-shaped rail 63 is a poor arc with fixed diameter, slide blocks 7211 are fixedly arranged on the upper portions of both ends of the inner exhaust plate 721, the slide blocks 7211 can slide on the slide rails 6, and the arrangement of the inclined rail 61 and the first arc-shaped rail 62 with gradually increasing diameter enables the inner exhaust plate 721 to longitudinally move and return.

[0039] In addition, in order to avoid the exhaust gas from escaping from both ends of the film coating channel 1, the film coating channel 1 is provided with exhaust cylinders 33 at the inlet and outlet ends, the upper ends of the exhaust cylinders 33 are fixedly connected with the exhaust pipes 32, and the end portions of the exhaust pipes 32 are fixedly communicated with the first exhaust manifold 31.

[0040] Here, taking nine groups of film coating assemblies 7 as an example, three orientations (such as Figure 10 ) and three states (such as Figure 11 ) of the exhaust nozzle 72 are set, and the working state changes of a single group of film coating assemblies 7 are described: When the single group of film coating assemblies 7 moves to Figure 10When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 10 When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 11 When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6.

[0041] When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 10 Figure 10 When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 11

[0042] When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 10 Figure 10 Figure 11

[0043] When the single coating assembly 7 is in position (A), the exhaust nozzle 72 of the single coating assembly 7 on the right side is engaged with the L-shaped corner bracket, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 covering only the glass substrate area. At this time, the second connecting pipe 43 of the single coating assembly 7 in position (A) is opened, and the vapor phase reactant of the TCO film is transported to the closed flow channel 8 through the jet nozzle 71 to coat the surface of the glass substrate below. At the same time, the first connecting pipe 35 of the exhaust nozzle 72 on both sides of the closed flow channel 8 is opened, and at this time, the outer exhaust groove 723 at the lowermost end of the outer exhaust plate 722 can work, as shown in position (a) of FIG. 6. Figure 10 Figure 10 ​​​​​​In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6. Figure 11 In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6. Figure 11 In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6.

[0044] Figure 10 In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6. Figure 10 In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6. Figure 11 In the process of moving from the (C) position to the (A) position, the single set of coating assemblies 7 does not participate in the coating work, and the inner exhaust plate 721 on the right side of the single set of coating assemblies 7 slides along the straight rail 64 and the second arc-shaped rail 63, and is always in the (a) state as shown in FIG. 6.

[0045] When the single set of coating assemblies 7 moves to the (A) position again, that is, it starts a new round of coating work, the coating actions of the remaining eight sets of coating assemblies 7 are the same as those of the single set of coating assemblies 7 described above, and are not repeated here. The nine sets of coating assemblies 7 reciprocate to comprehensively coat the surfaces of the glass substrates. Figure 10 Please refer to

[0046] , Figure 3 , Figure 4 and Figure 7 In order to facilitate the connection of the conveyor 5 and the coating assemblies 7, the conveyor 5 is provided with the first conveying belt 51 and the second conveying belt 52 side by side, and the coating assemblies 7 are arranged on the first conveying belt 51 and the second conveying belt 52. The length of the single set of coating assemblies 7 matches the width of the glass substrate, and the coating assemblies 7 on the first conveying belt 51 and the second conveying belt 52 correspond to form the single set of coating assemblies 7. The arrangement of the first conveying belt 51 and the second conveying belt 52 does not affect the fixed installation of the conveyor 5, and realizes the balanced installation of the coating assemblies 7.

[0047] In order to facilitate the installation and fixation of the conveyor 5, the installation gap 53 is formed between the first conveying belt 51 and the second conveying belt 52, and the support frame 54 is arranged on the side of the first conveying belt 51 and the second conveying belt 52 away from each other and the position of the installation gap 53. The support frame 54 is connected with the rotating shaft of the conveyor 5 through a bearing, a motor is arranged on the support frame 54 located on one side of the conveyor 5, and the motor can drive the rotation of the rotating shaft of the conveyor 5 to support the operation of the conveyor 5. The support frame 54 located at the position of the installation gap 53 is connected with the mounting frame 55, and the mounting frame 55 is mounted on the top of the coating passage 1 to fix the conveyor 5.

[0048] ​It should be noted that the gap between the single coating assembly 7 caused by the installation gap 53 is small, and the gas phase reactant has fluidity and will continue to diffuse to the surface of the glass substrate located in the gap to be coated.

[0049] Further, the second exhaust manifold 34 and the third intake manifold 42 are both fixed on the mounting frame 55, and the exhaust gas needs to be treated by the exhaust gas treatment device before being discharged into the atmosphere.

[0050] It should be noted that the relationship terms such as first and second in the present text are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0051] The preferred embodiments of the application disclosed above are only used to help explain the application. The preferred embodiments do not describe all the details and limit the application to the specific embodiments described. Obviously, many modifications and changes can be made according to the content of the present specification. The present specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the application, so that those skilled in the art can well understand and utilize the application. The application is limited only by the claims and their full scope and equivalents.

Claims

1. A method of processing TCO conductive glass, characterized by, The method comprises the following steps: Step 1: glass forming, raw glass materials are melted at high temperature in a melting furnace to form a uniform glass melt, the glass melt continuously flows into a tin bath, the glass melt floats on the surface of the tin liquid to form a glass ribbon, the glass ribbon is edge-lapped by an edge roller to reach a target size, and a glass substrate is formed; Step 2: high-temperature coating, the glass substrate is moved to a coating channel (1) through a material conveyor (2) at the outlet end of the tin bath, the coating channel (1) has a split coating device, the split coating device moves synchronously with the glass substrate, and is used for coating a layer of transparent conductive oxide film on the surface of the glass substrate and reducing the waste gas flow space; Step 3: annealing and cooling, the glass ribbon after coating is pulled into an annealing furnace to perform gradient annealing to eliminate internal stress.

2. The TCO conductive glass processing method according to claim 1, characterized in that: the coating device comprises a conveyor (5) and a plurality of coating assemblies (7) uniformly distributed in the conveying direction of the conveyor (5); a single coating assembly (7) comprises: an air jet nozzle (71), the air jet nozzle (71) is a hollow plate structure, the thickness of the plate structure is in the conveying direction of the conveyor (5), the air jet nozzle (71) is provided with a support (73) at both ends, and the support (73) is provided with an air flow baffle (74); an exhaust nozzle (72), the exhaust nozzle (72) is located on one side of the air jet nozzle (71), so that two adjacent exhaust nozzles (72) and the air flow baffle (74) can form a closed flow channel (8), the closed flow channel (8) blocks the expansion of the reaction waste gas, and the reaction waste gas is gradually exhausted in the controlled closed flow channel (8).

3. A method of processing TCO conductive glass according to claim 2, characterized in that, the exhaust nozzle (72) comprises: an outer exhaust plate (722), the outer exhaust plate (722) is fixed with the support (73), the outer exhaust plate (722) is internally provided with an inner exhaust plate (721) that can move longitudinally, and the outer exhaust plate (722) is provided with a plurality of outer through grooves (723) on both sides along the thickness direction of the outer exhaust plate (722); the inner exhaust plate (721) is provided with an inner through groove (724) matched with the outer through groove (723); and the inner exhaust plate (721) moves in the outer exhaust plate (722) to make the inner through groove (724) close to or away from the corresponding outer through groove (723), so as to change the opening and closing size of the outer through groove (723) and control the exhaust amount of the exhaust nozzle (72).

4. The method of claim 3, wherein the TCO conductive glass is processed by a method comprising: The coating channel (1) is fixedly provided with a slide rail (6), and the slide rail (6) is located at both ends of the coating assembly (7); the slide rail (6) comprises an inclined rail (61) that gradually rises along the conveying direction of the conveyor (5); a straight rail (64) is arranged above the inclined rail (61); the inclined rail (61) and the straight rail (64) are connected into an integrated structure through a first arc rail (62) and a second arc rail (63) at both ends; the first arc rail (62) and the second arc rail (63) are close to the outlet end and the inlet end of the coating channel (1) respectively; the first arc rail (62) is a poor arc with a gradually increasing diameter; and the second arc rail (63) is a poor arc with a fixed diameter. The inner exhaust plate (721) is fixed with a sliding block (7211) on the upper part of both ends, and the sliding block (7211) can slide on the slide rail (6).

5. The method of claim 2, wherein the TCO conductive glass is processed by a method comprising: The air inlet end of the air nozzle (71) is provided with a tapered section (711), the lower part of the tapered section (711) is provided with a diverging section (712), a throat is formed between the two, the lower part of the diverging section (712) is provided with a straight section (713), and the air outlet end of the air nozzle (71) is provided with a flat nozzle (714).

6. The method of claim 2, wherein the TCO conductive glass is processed by a method comprising: Both sides of the conveyor (5) are provided with a third air inlet manifold (42), and one end of the third air inlet manifold (42) is provided with an air inlet pipe (41), the upper end of the air inlet pipe (41) extends to the outside of the coating channel (1), and the gas phase reactant is introduced into the third air inlet manifold (42) through the air inlet pipe (41); The air nozzle (71) and the third air inlet manifold (42) are connected with a second connecting pipe (43).

7. The method of claim 2, wherein the TCO conductive glass is processed by a method comprising: Both sides of the conveyor (5) are provided with a second exhaust manifold (34), and one end of the second exhaust manifold (34) is provided with an exhaust pipe (32), the top end of the coating channel (1) is fixed with a first exhaust manifold (31), and the upper end of the exhaust pipe (32) extends to the outside of the coating channel (1) and is fixedly connected with the first exhaust manifold (31); The air outlet nozzle (72) and the second exhaust manifold (34) are connected with a first connecting pipe (35).

8. A method of processing TCO conductive glass according to claim 7, characterized in that, The inlet and outlet ends of the coating channel (1) are provided with exhaust cylinders (33), the upper end of the exhaust cylinder (33) is fixedly connected with the exhaust pipe (32), and the end of the exhaust pipe (32) is fixedly communicated with the first exhaust manifold (31).

9. The method of claim 2, wherein the TCO conductive glass is processed by a method comprising: The support (73) forms an isosceles triangle structure, the airflow baffle (74) is located on the isosceles side of the isosceles triangle, and is inclined downward in the direction away from the air nozzle (71).

10. The method of claim 2, wherein the TCO conductive glass is processed by a method comprising: The conveyor (5) comprises: The first conveyor belt (51) and the second conveyor belt (52) are arranged side by side, and the first conveyor belt (51) and the second conveyor belt (52) are both provided with a coating assembly (7); The first conveyor belt (51) and the second conveyor belt (52) form an installation gap (53), and the side away from the first conveyor belt (51) and the second conveyor belt (52) and the installation gap (53) are provided with a support frame (54), the support frame (54) is connected with the rotating shaft of the conveyor (5) through a bearing, the support frame (54) located at the installation gap (53) is connected with a mounting frame (55), and the mounting frame (55) is mounted on the top of the coating channel (1).

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