Balance method high-pumping-speed vacuum system and application method thereof

Abstract

The invention belongs to the technical field of liquid variable-volume machinery, and particularly relates to a balance method high-pumping-speed vacuum system and an application method thereof.The balance method high-pumping-speed vacuum system comprises a vacuum pump and a vacuum main pipeline connected with the vacuum pump and further comprises a negative pressure cabin and a balance pipeline, and the volume of the negative pressure cabin is larger than that of the vacuum cabin; the two ends of the balance pipeline are connected with the negative pressure cabin and the vacuum cabin respectively, the vacuum main pipeline, the first branch pipeline, the balance pipeline and the vacuum cabin are sequentially communicated, a first vacuum valve is arranged on the first branch pipeline, the vacuum main pipeline, the second branch pipeline, the balance pipeline and the negative pressure cabin are sequentially communicated, and a second vacuum valve is arranged on the second branch pipeline. A balance regulating valve is arranged on the balance pipeline; the application method comprises the following steps: S1, pre-pumping the negative pressure cabin; s2, a vacuum chamber is pre-vacuumized; s3, rapid balancing; and S4, pumping is supplemented to the target pressure. The requirement for rapid air exhaust of the vacuum chamber can be met, and energy consumption is reduced.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of liquid variable volume mechanical technology, and particularly relates to a balanced method large pumping speed vacuum system and an application method thereof. BACKGROUND

[0002] As a core supporting device for high-end manufacturing and scientific research innovation, the vacuum system is widely used in the fields of semiconductor manufacturing, photovoltaic component production, vacuum heat test, material science experiment and the like. With the continuous improvement of the requirement for vacuum degree of the downstream industry and the continuous expansion of the volume of the vacuum chamber, the technical bottleneck of the traditional vacuum system is increasingly prominent, which is specifically embodied in three aspects: first, in order to meet the demand of large volume, short time and large pumping speed, an ultra-high power vacuum pump needs to be configured, which not only has high energy consumption, but also has problems of large equipment volume and high installation and maintenance cost, and the scenes of laboratories, small and medium-sized enterprises and the like are limited by the infrastructure conditions and are difficult to land, forming obvious technical barriers; second, the existing double-chamber auxiliary vacuum pumping structure in the industry can improve production efficiency and stabilize the vacuum environment, but still relies on a large power pump group, and is only applicable to batch production lines; third, the existing technology cannot simultaneously consider large pumping speed and low energy consumption, and lacks a pumping speed vacuum system which can meet the rapid pumping demand of large vacuum chamber without relying on an ultra-high power vacuum pump and can adapt to the infrastructure of small and medium-sized sites.

[0003] A new type of rapid pumping method is disclosed in Chinese Patent CN1032382A, which adopts a pump, a vacuum container and a multi-way valve, a plurality of vacuum containers are first pumped to vacuum levels in order of increasing vacuum degree, then the multi-way valve is used to connect the pumped member and the series of vacuum containers, when the multi-way valve is sequentially connected to the vacuum containers, according to the balance principle, the pumped member can reach the required vacuum degree in a very short time. The patent process is simple, and is suitable for rapid pumping or negative pressure leak detection of products on the production line. However, the patent is only applicable to medium and low vacuum and small volume scenes, and cannot meet the use demand of high vacuum; and the patent needs to pre-pump each vacuum container to a set vacuum degree, the pre-pumping process is complicated and has poor flexibility, once the volume and vacuum level of the vacuum container are fixed, it is difficult to adapt to the use demand of different specifications of the pumped member, and when a larger volume pumped member is replaced, an additional vacuum container needs to be added. SUMMARY

[0004] The purpose of the present application is to provide a balanced method large pumping speed vacuum system which can replace the direct pumping mode of the traditional ultra-high power vacuum pump, meet the demand of rapid pumping of the vacuum chamber, greatly reduce the energy consumption and equipment cost, and has a simple pre-pumping process and low operation difficulty. The present application also provides an application method of the balanced method large pumping speed vacuum system.

[0005] To achieve the above purpose, the technical scheme of the present application is as follows: The balanced method high pumping speed vacuum system of the application, comprising a vacuum pump and a vacuum main pipeline connected with the vacuum pump, further comprising a negative pressure cabin and a balance pipeline, the volume of the negative pressure cabin is greater than that of the vacuum cabin, the two ends of the balance pipeline are connected with the negative pressure cabin and the vacuum cabin respectively, the vacuum main pipeline, the first branch pipeline and the balance pipeline are communicated with the vacuum cabin in sequence, the first vacuum valve is arranged on the first branch pipeline, the vacuum main pipeline, the second branch pipeline and the balance pipeline are communicated with the negative pressure cabin in sequence, the second vacuum valve is arranged on the second branch pipeline, the balance adjusting valve is arranged on the balance pipeline, and the pump port valve is arranged on the vacuum pump.

[0006] Further, the first pressure gauge is arranged on the balance pipeline matched with the vacuum cabin, and the second pressure gauge is arranged on the balance pipeline matched with the negative pressure cabin.

[0007] The application method of the balanced method high pumping speed vacuum system of the application, comprising the following steps: S1: pre-extracting the negative pressure cabin The balance adjusting valve, the first vacuum valve, the second vacuum valve and the pump port valve are closed, the vacuum pump is started, and the pump port valve and the second vacuum valve are opened, the negative pressure cabin is vacuumized, until the pressure reaches the initial pressure of the negative pressure cabin, and the second vacuum valve is closed. S2: pre-extracting the vacuum cabin The vacuum pump is kept running, the pump port valve is kept open, the first vacuum valve is opened, the vacuum cabin is vacuumized, until the pressure reaches the initial pressure of the vacuum cabin, and the running of the vacuum pump is continued. S3: rapid balancing The pump port valve is kept open, the balance adjusting valve is opened, the negative pressure cabin and the vacuum cabin are communicated through the balance pipeline, the negative pressure cabin extracts air from the vacuum cabin through the balance pipeline, and the vacuum pump extracts air from the vacuum cabin through the vacuum main pipeline, the first branch pipeline and the balance pipeline, until the pressure difference between the vacuum cabin and the negative pressure cabin is 0-2.6kPa. S4: supplement extraction to the target pressure When the pressure difference between the vacuum cabin and the negative pressure cabin is 0-2.6kPa, the balance adjusting valve is closed, the vacuum pump continues to supplement the vacuum cabin, until the pressure in the vacuum cabin reaches the final target pressure.

[0008] Further, when the pressure difference between the vacuum cabin and the negative pressure cabin is 0 in step S3, the vacuum cabin and the negative pressure cabin reach the balanced state, and the pressure of the balanced state is determined by the following formula:

[0009]

[0010] Wherein, V A is the volume of the negative pressure cabin, V B is the volume of the vacuum cabin, and PA P is the pressure of the negative pressure chamber B P is the pressure of the vacuum chamber, P is the pressure in equilibrium state, i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0011] Alternatively, in step S3, when the pressure difference between the vacuum chamber and the negative pressure chamber is 0, the vacuum chamber and the negative pressure chamber reach the equilibrium state, and the volume of the negative pressure chamber is determined by calculation according to the following formula:

[0012] Wherein, V A is the volume of the negative pressure chamber, V B is the volume of the vacuum chamber, P A is the pressure of the negative pressure chamber, P B is the pressure of the vacuum chamber, P is the pressure in equilibrium state, i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0013] Alternatively, in step S3, when the pressure difference between the vacuum chamber and the negative pressure chamber is 0, the vacuum chamber and the negative pressure chamber reach the equilibrium state, and the volume of the negative pressure chamber is determined by calculation according to the following formula:

[0014] Wherein, V A is the volume of the negative pressure chamber, V B is the volume of the vacuum chamber, P A is the pressure of the negative pressure chamber, P B is the pressure of the vacuum chamber, P is the pressure in equilibrium state, i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0015] Further, in step S3, the flow conductance of the equilibrium adjusting valve is determined by calculation according to the following formula:

[0016]

[0017]

[0018] Wherein, U is the flow conductance of the equilibrium adjusting valve, P A0 is the initial pressure of the negative pressure chamber, P B0 is the initial pressure of the vacuum chamber, ΔP0 is the initial pressure difference between the vacuum chamber and the negative pressure chamber, P A is the real-time pressure of the negative pressure chamber in the equilibrium process, P B is the real-time pressure of the vacuum chamber in the equilibrium process, ΔP is the real-time pressure difference between the vacuum chamber and the negative pressure chamber in the equilibrium process, V B is the volume of the vacuum chamber, i is the volume ratio of the negative pressure chamber to the vacuum chamber, t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber and the vacuum chamber are connected.

[0019] Further, in step S3, the time required for the pressure difference to change from the initial pressure difference to the real-time pressure difference value after the negative pressure cabin is communicated with the vacuum cabin is calculated and determined by the following formula:

[0020]

[0021]

[0022] Wherein, U is the flow conductance of the balance regulating valve, P A0 is the initial pressure of the negative pressure cabin, P B0 is the initial pressure of the vacuum cabin, ΔP0 is the initial pressure difference between the vacuum cabin and the negative pressure cabin, P A is the real-time pressure of the negative pressure cabin in the balancing process, P B is the real-time pressure of the vacuum cabin in the balancing process, ΔP is the real-time pressure difference between the vacuum cabin and the negative pressure cabin in the balancing process, V B is the volume of the vacuum cabin, i is the volume ratio of the negative pressure cabin to the vacuum cabin, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference value ΔP after the negative pressure cabin is communicated with the vacuum cabin.

[0023] Further, the real-time pressure P B of the vacuum cabin in the balancing process is the detection value of the first pressure gauge.

[0024] Further, the real-time pressure P A of the negative pressure cabin in the balancing process is the detection value of the second pressure gauge.

[0025] The beneficial effects of the present application are: The present application cooperates with the vacuum pump to exhaust air through the negative pressure cabin, without configuring a super-large power vacuum pump corresponding to the traditional large exhaust speed requirement, only a conventional vacuum pump can meet the rapid air exhaust requirement of the vacuum cabin, compared with the traditional large power vacuum system, the energy consumption is reduced, the equipment volume is more compact, the installation and maintenance are simple, the infrastructure investment threshold of laboratory, small and medium-sized enterprises and other scenes is effectively reduced, the technical barriers of high cost and difficult landing of traditional large power vacuum system are solved, and the long-term operation of electricity and maintenance expenses is reduced.

[0026] The present application drives air exhaust by means of the initial pressure difference between the negative pressure cabin and the vacuum cabin, cooperates with the balance regulating valve, forms the double-way cooperative air exhaust of the vacuum pump and the negative pressure cabin, greatly shortens the core air exhaust time. At the same time, through the accurate formula parameter calculation, the high vacuum target can be stably realized, and the limitation that the existing similar double-cavity technology is only applicable to medium and low vacuum and small volume scenes is overcome, and the large exhaust speed and high vacuum requirement are considered.

[0027] The pre-pumping process of the application only needs two steps to complete the pre-pumping of the negative pressure cabin and the vacuum cabin, and does not need to pre-pump multiple staged vacuum containers one by one, so the process is simplified and the operation difficulty is low. Through the formula calculation of pumping speed, flow guide and time, the application can adapt to the use requirements of vacuum cabins with different volumes and different target vacuum degrees, without the need to additionally add containers or significantly adjust the equipment structure, solving the problems of poor adaptability and complicated parameter adjustment of the traditional technology, and being simple to operate, strong in adaptability and outstanding in flexibility.

[0028] The first pressure gauge and the second pressure gauge can detect the pressure of the vacuum cabin and the negative pressure cabin in real time and calculate the pressure difference, providing accurate basis for the flow guide adjustment of the balance regulating valve, ensuring that the pumping process is stable and reliable; the target pressure of the vacuum cabin is calculated by formula, so that the final vacuum degree is accurately controllable.

[0029] The negative pressure cabin can be arranged in the non-core area such as the underground or the top of the plant, which not only greatly releases the workshop ground space, but also avoids the high noise and strong vibration problems caused by the large power dynamic equipment in the traditional scheme, significantly reduces the harsh requirements on the construction area environment and engineering conditions, and widens the application scenarios.

[0030] The application utilizes the pressure difference to quickly reduce the pressure of the vacuum cabin through the on-off control of the balance pipeline and the balance regulating valve, and guarantees that the vacuum degree meets the standard through the supplementary pumping process, taking into account the efficiency and reliability, and the system components are all conventional vacuum equipment, which has strong popularization value and high practicality. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 is a structural schematic diagram of the application; In the figure: 1, vacuum pump; 2, vacuum main pipeline; 3, first vacuum valve; 4, first branch pipeline; 5, vacuum cabin; 6, negative pressure cabin; 7, balance pipeline; 8, second vacuum valve; 9, second branch pipeline; 10, balance regulating valve; 11, pump port valve; 12, first pressure gauge; 13, second pressure gauge. DETAILED DESCRIPTION

[0032] The application will be specifically described and explained in combination with the embodiments.

[0033] Embodiment 1 As Figure 1As shown, the balance method high pumping speed vacuum system comprises a vacuum pump 1, a vacuum main pipeline 2 connected with the vacuum pump 1, a negative pressure cabin 6 and a balance pipeline 7, the volume of the negative pressure cabin 6 is greater than that of the vacuum cabin 5, the balance pipeline 7 is connected with the negative pressure cabin 6 and the vacuum cabin 5 respectively, the vacuum main pipeline 2, the first branch pipeline 4 and the balance pipeline 7 are communicated with the vacuum cabin 5 in sequence, the first vacuum valve 3 is arranged on the first branch pipeline 4, the vacuum main pipeline 2, the second branch pipeline 9 and the balance pipeline 7 are communicated with the negative pressure cabin 6 in sequence, the second vacuum valve 8 is arranged on the second branch pipeline 9, the balance regulating valve 10 is arranged on the balance pipeline 7, and the pump port valve 11 is arranged on the vacuum pump 1.

[0034] The first pressure gauge 12 is arranged on the balance pipeline 7 in cooperation with the vacuum cabin 5, and the second pressure gauge 13 is arranged on the balance pipeline 7 in cooperation with the negative pressure cabin 6.

[0035] The volume V of the vacuum cabin 5 B =110m 3 , the total target pumping time t = 15s, the initial pressure P of the vacuum cabin B0 =75.28kPa, and the target pressure P' of the vacuum cabin B =18.74kPa.

[0036] According to the above process parameter limitation, the following component selection is completed: the volume V of the negative pressure cabin 6 A =430m 3 , the volume ratio i = 3.9, the pumping speed Q of the vacuum pump 1 = 0.333m 3 / h, the limit vacuum of the vacuum pump 1 ≤ 10Pa, the rated power of the vacuum pump 1 is 30kW, and the flow conductance U of the balance regulating valve 10 = 300m 3 / s.

[0037] The application method of the balance method high pumping speed vacuum system comprises the following steps: S1: pre-pumping the negative pressure cabin 6 The balance regulating valve 10, the first vacuum valve 3, the second vacuum valve 8 and the pump port valve 11 are closed, the vacuum pump 1 is started, and the pump port valve 11 and the second vacuum valve 8 are opened, the negative pressure cabin 6 is pumped, and the pressure of the negative pressure cabin 6 reaches the preset initial pressure P A0 =2kPa, and the second vacuum valve 8 is closed. S2: pre-pumping the vacuum cabin 5 The vacuum pump 1 is kept running, the pump port valve 11 is kept open, the first vacuum valve 3 is opened, the vacuum cabin 5 is pumped, and the pressure of the vacuum cabin 5 reaches the set initial pressure P B0 =75.28kPa, and the running of the vacuum pump 1 is continued. S3: rapid balancing Keep the pump port valve 11 open, open the balance regulating valve 10, make the negative pressure cabin 6 and the vacuum cabin 5 communicate through the balance pipeline 7, based on the initial pressure difference ΔP0=P B0 -P A0 =73.28kPa, the negative pressure cabin 6 pumps the vacuum cabin 5 through the balance pipeline 7, and the vacuum pump 1 pumps the vacuum cabin 5 through the vacuum main pipeline 2, the first branch pipeline 4 and the balance pipeline 7; The first pressure gauge 12 detects the real-time pressure P B of the vacuum cabin 5, and the second pressure gauge 13 detects the real-time pressure P A of the negative pressure cabin 6, and the real-time pressure difference ΔP=P B -P A is calculated according to the first pressure gauge 12 and the second pressure gauge 13; Finally, the pressure of the negative pressure cabin 6 and the vacuum cabin 5 approaches the equilibrium state, and the pressure of the vacuum cabin 5 is 19.0kPa at this time; S4: supplement to the target pressure When the pressure of the vacuum cabin 5 reaches 19.0kPa, the balance regulating valve 10 is closed, and the vacuum pump 1 continues to supplement the vacuum cabin 5 until the pressure in the vacuum cabin 5 reaches the final required target pressure P' B =18.74kPa.

[0038] In step S3, when the pressure difference between the vacuum cabin 5 and the negative pressure cabin 6 is 0, the vacuum cabin 5 and the negative pressure cabin 6 reach the equilibrium state, and the pressure of the equilibrium state is calculated and determined by the following formula:

[0039]

[0040] Wherein, V A is the volume of the negative pressure cabin 6, V B is the volume of the vacuum cabin 5, P A is the pressure of the negative pressure cabin 6, P B is the pressure of the vacuum cabin 5, P is the pressure of the equilibrium state, and i is the volume ratio of the negative pressure cabin 6 to the vacuum cabin 5.

[0041] Alternatively, in step S3, when the pressure difference between the vacuum cabin 5 and the negative pressure cabin 6 is 0, the vacuum cabin 5 and the negative pressure cabin 6 reach the equilibrium state, and the pressure of the negative pressure cabin 6 is calculated and determined by the following formula:

[0042] Wherein, V A is the volume of the negative pressure cabin 6, V B is the volume of the vacuum cabin 5, P A is the pressure of the negative pressure cabin 6, P BP is the pressure of vacuum chamber 5, P is the pressure in equilibrium state, and i is the volume ratio of negative pressure chamber 6 to vacuum chamber 5.

[0043] Alternatively, in step S3, when the pressure difference between vacuum chamber 5 and negative pressure chamber 6 is 0, vacuum chamber 5 and negative pressure chamber 6 reach an equilibrium state, and the volume of negative pressure chamber 6 is calculated and determined by the following formula:

[0044] Among them, V A For the volume of negative pressure chamber 6, V B For the volume of vacuum chamber 5, P A For the pressure of negative pressure chamber 6, P B P is the pressure of vacuum chamber 5, P is the pressure in equilibrium state, and i is the volume ratio of negative pressure chamber 6 to vacuum chamber 5.

[0045] In step S3, the flow conductance of the balance regulating valve 10 is determined by the following formula:

[0046]

[0047]

[0048] Where U is the flow conductance of the balance regulating valve 10, and P A0 The initial pressure of negative pressure chamber 6, P B0 Let P be the initial pressure of vacuum chamber 5, ΔP0 be the initial pressure difference between vacuum chamber 5 and negative pressure chamber 6, and P be the initial pressure of vacuum chamber 5. A P represents the real-time pressure of negative pressure chamber 6 during the balancing process. B V is the real-time pressure of vacuum chamber 5 during the equilibrium process, ΔP is the real-time pressure difference between vacuum chamber 5 and negative pressure chamber 6 during the equilibrium process, and V is the pressure of vacuum chamber 5 during the equilibrium process. B Let be the volume of vacuum chamber 5, i be the volume ratio of negative pressure chamber 6 to vacuum chamber 5, and t be the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference value ΔP after negative pressure chamber 6 and vacuum chamber 5 are connected.

[0049] In step S3, after the negative pressure chamber 6 is connected to the vacuum chamber 5, the time required for the pressure difference to change from the initial pressure difference to the real-time pressure difference value is calculated and determined by the following formula:

[0050]

[0051]

[0052] Where U is the flow conductance of the balance regulating valve 10, and P A0 The initial pressure of negative pressure chamber 6, P B0P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5. A P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5. B P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5. B P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5.

[0053] P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5. B P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5.

[0054] P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5. A P0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5.

[0055] Comparative Example 1 The comparative example adopts a traditional vacuum system scheme, and does not set the negative pressure chamber 6 in the embodiment 1. Other structures are the same as those in the embodiment 1, and only one vacuum pump 1 is used to directly pump the vacuum chamber 5. The configuration power of the vacuum pump 1 is 1400 kW, a 10 kV high-voltage power supply is required, and the cooling water consumption is 200 m 3 / h.

[0056] The vacuum pump 1 is used to directly pump the vacuum chamber 5 to the target pressure. The configuration pumping speed of the vacuum pump 1 in the comparative example is 11.2 m 3 / s, and the pumping speed Q is calculated by the following formula:

[0057] wherein k is a redundancy coefficient, V is the volume of the vacuum chamber 5, t is the total target pumping time, P0 is the initial pressure of the vacuum chamber 5, P is the target pressure of the vacuum chamber 5. B B0 B

[0058] By comparison, the power of the vacuum pump 1 in the embodiment 1 is 30 kW, which is 2.1% of the power of the vacuum pump 1 in the comparative example 1. The vacuum pump 1 in the embodiment 1 is adapted to 380V domestic power, 3 m 3 / h of conventional tap water, without the need for a high-voltage power supply and large-flow cooling water. The embodiment 1 can complete the target pressure reduction within 15 seconds, the cost is controllable, and is only 10% of that of the comparative example 1.​​​

Claims

1. A balanced high-throughput vacuum system comprising a vacuum pump (1) and a vacuum main (2) connected to the vacuum pump (1), characterized in that The negative pressure cabin (6) has a volume greater than that of the vacuum cabin (5), and the balance pipeline (7) has two ends connected with the negative pressure cabin (6) and the vacuum cabin (5) respectively.

2. The balanced high-throughput vacuum system of claim 1, wherein, The balance pipeline (7) is provided with a first pressure gauge (12) matched with the vacuum cabin (5), and a second pressure gauge (13) matched with the negative pressure cabin (6).

3. A method of using the balanced high-throughput vacuum system of claim 1 or 2, characterized in that, The steps include: S1: pre-extracting the negative pressure cabin (6) Close the balance regulating valve (10), the first vacuum valve (3), the second vacuum valve (8) and the pump port valve (11), open the vacuum pump (1) and open the pump port valve (11) and the second vacuum valve (8), and extract the negative pressure cabin (6) until the pressure reaches the initial pressure of the negative pressure cabin (6), and then close the second vacuum valve (8); S2: pre-extracting the vacuum cabin (5) Keep the vacuum pump (1) running, keep the pump port valve (11) open, open the first vacuum valve (3), extract the vacuum cabin (5) until the pressure reaches the initial pressure of the vacuum cabin (5), and continue to keep the vacuum pump (1) running; S3: rapid balance Keep the pump port valve (11) open, open the balance regulating valve (10), make the negative pressure cabin (6) and the vacuum cabin (5) communicate through the balance pipeline (7), and the negative pressure cabin (6) extracts the vacuum cabin (5) through the balance pipeline (7), while the vacuum pump (1) extracts the vacuum cabin (5) through the vacuum main pipeline (2), the first branch pipeline (4) and the balance pipeline (7), until the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0-2.6kPa; S4: supplement extraction to target pressure When the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0-2.6kPa, close the balance regulating valve (10), and the vacuum pump (1) continues to supplement the vacuum cabin (5) until the pressure in the vacuum cabin (5) reaches the final required target pressure.

4. The method of claim 3, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0, the vacuum cabin (5) and the negative pressure cabin (6) reach the equilibrium state, and the pressure of the equilibrium state is determined by the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

5. The method of claim 3, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0, the vacuum cabin (5) and the negative pressure cabin (6) reach the equilibrium state, and the pressure of the negative pressure cabin (6) is determined by the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

6. The method of claim 3, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0, the vacuum cabin (5) and the negative pressure cabin (6) reach the equilibrium state, and the volume of the negative pressure cabin (6) is determined by the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

7. The method of claim 3, wherein the method is used for a high-throughput vacuum system. In step S3, the flow conductance of the balance regulating valve (10) is determined by the following formula: Wherein, U is the flow conductance of the balance regulating valve (10), P A0 is the initial pressure of the negative pressure cabin (6), P B0 is the initial pressure of the vacuum cabin (5), ΔP0 is the initial pressure difference between the vacuum cabin (5) and the negative pressure cabin (6), P A is the real-time pressure of the negative pressure cabin (6) during the balancing process, P B is the real-time pressure of the vacuum cabin (5) during the balancing process, ΔP is the real-time pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) during the balancing process, V B is the volume of the vacuum cabin (5), i is the volume ratio of the negative pressure cabin (6) to the vacuum cabin (5), and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure cabin (6) and the vacuum cabin (5) are connected.

8. The method of claim 7, wherein the method further comprises: In step S3, the time required for the pressure difference to change from the initial pressure difference to the real-time pressure difference value after the negative pressure cabin (6) is communicated with the vacuum cabin (5) is calculated and determined by the following formula: wherein U is the flow conductance of the balance regulating valve (10), P A0 is the initial pressure of the negative pressure chamber (6), P B0 is the initial pressure of the vacuum chamber (5), ΔP0 is the initial pressure difference between the vacuum chamber (5) and the negative pressure chamber (6), P A is the real-time pressure of the negative pressure chamber (6) during the balancing process, P B is the real-time pressure of the vacuum chamber (5) during the balancing process, ΔP is the real-time pressure difference between the vacuum chamber (5) and the negative pressure chamber (6) during the balancing process, V B is the volume of the vacuum chamber (5), i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5), and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber (6) and the vacuum chamber (5) are connected.

9. The method of claim 8, wherein the method further comprises: Real-time pressure P of the vacuum chamber (5) during the balancing process B is the detected value of the first pressure gauge (12).

10. The method of claim 8, wherein the method further comprises: Real-time pressure P of the negative pressure chamber (6) during the balancing process A is the detection value of the second pressure gauge (13).

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