Bias voltage introduction and vacuum ionization prevention all-dimensional coating tool

Abstract

The invention discloses a bias voltage introduction and vacuum ionization prevention all-dimensional coating tool, and belongs to the technical field of vacuum coating. The tool is mainly composed of a track, a walking mechanism, a planetary workpiece disc assembly, a bias voltage wiring and leading-in mechanism and the like, and the core of the tool is that bias voltage output by a bias voltage power supply can be safely applied to a sample to be plated which is completely isolated from a grounded vacuum chamber in an atmospheric state. Through multiple insulation designs (such as an insulation sleeve and a ceramic bearing), reliable insulation between key components such as a planetary workpiece disc, a fixed rod and a self-rotating rod and a cavity is realized, and vacuum ionization sparking is effectively prevented. The bias voltage is finally applied to the sample through a series of transmission of the bias voltage wiring assembly, the entering mechanism, the introducing autorotation rod mechanism and the like. The traveling mechanism enables the tool to enter and exit the cavity along the track, and bias connection can be automatically switched on and off along with the traveling mechanism. In addition, the planetary workpiece disc adopts a wear-resistant and high-temperature-resistant full-bead bearing steel thrust bearing, so that the height of revolution and rotation parts is reduced, and the utilization rate of a coating space is improved. The coating quality and the automation degree are improved, and high reliability and large load capacity are achieved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of vacuum coating, and relates to a coating tool, in particular to a full-range coating tool capable of introducing bias and preventing vacuum ionization. BACKGROUND

[0002] Bias refers to the negative voltage applied to the coating workpiece during the coating process. According to the process requirements, the vacuum coating machine needs to apply bias to the coating workpiece, so as to improve the uniformity of the plasma, increase the adhesion of the coating and improve the coating quality. The usual practice is to connect the positive pole of the bias power supply to the vacuum chamber and the vacuum chamber is grounded at the same time, and the negative pole of the bias power supply is connected to the coating workpiece.

[0003] When coating the surface of the workpiece to be plated, the workpiece to be plated can be loaded in multiple layers on the planetary workpiece disc which has both revolution and rotation functions and bias is introduced, so that the sputtered target material positive ions obtain kinetic energy under the action of bias, accelerate to the workpiece and bombard the workpiece, knock off the atoms on the workpiece surface which are not firmly combined, and improve the film-substrate adhesion. Introducing bias before deposition can also make argon ions bombard the workpiece surface, remove surface impurities and improve the quality of the thin film.

[0004] During the coating process, if no effective insulation structure is provided between the workpiece to be plated and the planetary workpiece disc, when bias is applied to the workpiece to be plated, the bias will inevitably be transmitted to the planetary workpiece disc, causing it to also have a corresponding bias. This condition not only adversely affects the quality of the coating, but more seriously, it can induce the phenomenon of vacuum ionization sparking in the gaps between the components of the planetary workpiece disc, causing safety hazards in the use of the equipment. During the long-term use of the planetary workpiece disc, the surface of the insulating material may also be covered with a thin film due to the coating process, or be contaminated by the film material. Once the surface state of the insulating material changes, it may also trigger the sparking phenomenon, further increasing the safety risk of the equipment in use. During the process of realizing the revolution and rotation functions of the planetary workpiece disc, due to the existence of bias and the absence of insulation structure, there is also a risk of vacuum ionization sparking.

[0005] It is worth noting that if the planetary workpiece disc cannot be conveniently pushed out from the vacuum chamber, it will greatly increase the difficulty of installing the workpiece to be plated in the vacuum chamber, reducing the operation efficiency. On the contrary, if the planetary workpiece disc can be pushed out of the vacuum chamber, it is necessary to manually connect the bias wire each time it enters the chamber. This operation step is not only cumbersome, but also increases the possibility of human error, which also brings inconvenience and potential safety risk to the use of the equipment. SUMMARY

[0006] In view of the problems of easy vacuum ionization sparking caused by insufficient insulation when introducing bias in the existing vacuum coating tool, and tedious operation, low efficiency and safety risks caused by manual connection of bias line when the planetary workpiece disc enters and exits the chamber, the present application provides a full-range coating tool for introducing bias and preventing vacuum ionization. The core purpose is to build an "independent floating platform" completely electrically isolated from the grounded vacuum chamber, and through an automatic contact conduction mechanism, the bias is safely, accurately and reliably introduced to the workpiece to be coated, while ensuring reliable and durable insulation measures between all moving parts.

[0007] To achieve the above-mentioned purpose, the present application adopts the following technical solutions: A full-range coating tool for introducing bias and preventing vacuum ionization, the core of which is to realize safe introduction and reliable isolation of bias through systematic insulation and conduction design. The tool mainly includes: The basic support and moving unit is composed of a track fixed to the bottom plate of the vacuum chamber and a walking mechanism supported on the track and capable of walking along the track, providing a moving basis for the entire tool to enter and exit the chamber.

[0008] The core rotation and insulation unit mainly includes a planetary workpiece disc assembly installed on the walking mechanism, a fixed rod and a support assembly installed on the planetary workpiece disc assembly, a rotation seat assembly, and a rotation rod connected between the rotation seat assembly and the upper fixed disc assembly. The workpiece to be coated can be loaded on the rotation rod and the fixed rod.

[0009] The bias introduction and conduction unit includes a bias connection assembly fixed to the chamber bottom plate, a bias entering mechanism connected between the walking mechanism and the planetary workpiece disc assembly, and a bias introduction rotation rod mechanism connected between the bias entering mechanism and the rotation seat assembly.

[0010] The key design of the present application is the systematic insulation configuration: reliable insulation structures are provided between the walking mechanism and the track, between the planetary workpiece disc assembly and the walking mechanism, between the fixed rod and the support assembly and the revolution large gear disc, between the rotation seat assembly and the revolution large gear disc, and between the bias entering mechanism and the walking mechanism and the revolution large gear disc. This series of insulation designs work together to form an electrically isolated rotation rod and fixed rod relative to the grounded vacuum chamber, so that the bias can be safely introduced.

[0011] As a further optimization of the present application, the insulation structures at each location can be implemented as follows: The walking mechanism and the track are insulated by an insulation sleeve provided between the walking support and the support plate.

[0012] The planetary workpiece disc assembly and the walking mechanism are insulated by an insulation positioning transition plate provided between the fixed gear disc and the support plate.

[0013] The fixed rod and support assembly and the revolving large gear plate are insulated by a fixed rod lower insulation pad and a fixed rod upper insulation sleeve.

[0014] The insulation between the self-rotating seat assembly and the revolving large gear plate is achieved by a ceramic ball bearing and an insulation transition shaft, wherein the ceramic ball bearing is arranged between the self-rotating seat and the upper half shaft, and the insulation transition shaft connects the upper half shaft and the lower half shaft.

[0015] The insulation structure of the biasing mechanism is achieved by a combination of multiple insulation components, including an insulation pad, an upper insulation sleeve, an intermediate shielding insulation sleeve, a lower fixed insulation sleeve, and a lower insulation sleeve.

[0016] As a further optimization of the application, the transmission structure of the planetary workpiece disc assembly is as follows: the revolving large gear plate is supported on the fixed gear plate by a full-bead heat-resistant bearing steel thrust bearing and can revolve; the self-transmission gear plate, as a self-rotating component, revolves relative to the revolving large gear plate through gear meshing and transmits the self-rotating motion to the lower half shaft of the self-rotating seat assembly through a flat key and a shaft clamp spring.

[0017] As a further optimization of the application, an insulation transition shaft in the self-rotating seat assembly is externally sleeved with a transition shaft base for accommodating fragments of the insulation transition shaft in case of accidental breakage, preventing the fragments from jamming the rotating components and improving system reliability.

[0018] As a further optimization of the application, the upper fixed disc assembly adopts a split design, including a circular ring-shaped upper fixed disc and multiple detachable upper chucks that are lapped into open slots of the upper fixed disc. This design enables the upper fixed disc assembly to be disassembled and passed through the central column target when the central column target is arranged at the center of the vacuum chamber, enhancing the applicability of the tooling.

[0019] Compared with the prior art, the application has the following beneficial effects: 1. Extremely high safety and improved coating quality: By setting multiple insulation structures at key connection points throughout the system, the path for bias voltage leakage to the grounded cavity is completely blocked, fundamentally eliminating the phenomenon of vacuum ionization sparking, ensuring the safety of the equipment and personnel. At the same time, stable bias voltage application ensures plasma uniformity and film-substrate adhesion, significantly improving coating quality.

[0020] 2. Highly convenient and automated operation: Through the automatic contact and conduction design of the bias voltage guide rod of the bias voltage entering mechanism and the carbon brush of the bias voltage wiring assembly, the "plug and play" of the bias voltage after the tooling enters the chamber is achieved, eliminating the tedious and error-prone manual wiring steps, and significantly improving production efficiency and automation level.

[0021] 3. Stable and reliable operation, strong load capacity: the planetary workpiece disc assembly adopts full-bead heat-resistant bearing steel thrust bearing, which gives the revolution gear plate high load capacity and stable rotation performance at high temperature. The anti-fragment design (transition shaft base) of the rotation seat assembly effectively avoids system jamming caused by insulation failure, ensuring the smoothness of long-term operation of the rotation rod and the high reliability of the entire tool.

[0022] 4. Optimized structure, wide applicability: the detachable design of the upper fixed disc assembly enables the tool to adapt to vacuum chambers with central column targets, solving the problem of inconvenient installation of traditional integral structures and expanding the application scenarios of the tool. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a front view of a bias introduction and vacuum ionization prevention all-direction coating tool according to the present application.

[0024] Figure 2 is the A-A sectional view of Figure 1 .

[0025] Figure 3 is the assembly relationship and sectional view of the track and the walking mechanism in the present application.

[0026] Figure 4 is the assembly relationship and sectional view of the track, the walking mechanism, the planetary workpiece disc assembly, and the bias introduction mechanism in the present application.

[0027] Figure 5 is the assembly relationship and sectional view of the fixed rod and the support assembly, and the anti-fouling plate and the planetary workpiece disc assembly in the present application.

[0028] Figure 6 is the assembly relationship and sectional view of the rotation seat assembly and the planetary workpiece disc assembly in the present application.

[0029] Figure 7 is the overall assembly and sectional view of the bias introduction mechanism and the bias introduction mechanism in the present application.

[0030] Figure 8 is the connection and conduction relationship and sectional view of the rotation seat assembly, the bias introduction rotation rod mechanism, and the bias introduction mechanism in the present application.

[0031] Figure 9 is an axonometric view of a bias introduction and vacuum ionization prevention all-direction coating tool according to the present application.

[0032] Figure 10 is the overall assembly view of the upper fixed disc assembly in the present application.

[0033] In the figure, 1, biasing wiring assembly, including ceramic package wiring valve 101, red copper pad 102, knife edge transition flange 103, connecting flange 104, insulating base 105, carbon brush base 106, carbon brush 107, upper insulating cover 108; 2, track, including positioning bolt 21, track 22; 3, walking mechanism, including support plate 31, positioning transition plate 32, mounting positioning bolt 33, walking support 34, bearing 35, walking wheel 36, walking shaft 37, shaft sleeve 38, insulating sleeve pad 39; 4, planetary workpiece disc assembly, including positioning bolt 41, fixed gear disc 42, full-bead heat-resistant bearing steel material thrust bearing 43, revolving large gear disc 44, ball bearing 45, clamping spring 46, rotating gear disc 47, flat key 48, shaft clamping spring 49; 5, biasing entering mechanism, including revolving upper insulating cover 51, upper pressing bolt 52, upper insulating sleeve 53, upper pressing cover 54, copper brush 55, wire connecting base 56, insulating pad 57, upper revolving connecting plate 58, biasing guide rod 59, intermediate shielding insulating sleeve 510, lower pressing bolt 511, lower fixed insulating sleeve 512, lower insulating sleeve 513, lower clamping plate 514, lower fixed connecting plate 515, lower positioning bolt 516; 6, fixed rod and support assembly, including fixed rod 61, fixed rod lower insulating pad 62, fixed rod upper insulating sleeve 63, fixed rod seat 64, fixed bolt 65, anti-skid stop pad 66; 7, rotating seat assembly, including rotating seat 71, upper hole clamping spring 72, ceramic ball bearing 73, shaft clamping spring 74, upper half shaft 75, insulating transition shaft 76, transition shaft base 77, lower half shaft 78, thrust bearing 79; 8, biasing introducing rotating rod mechanism, including wire 81 passing through ceramic bowl, rear tightening threaded sleeve 82, copper brush 83 with spring, ceramic seat 84, clamping plate 85; 9, dirt prevention plate support; 10, dirt prevention plate; 11, connecting nut; 12, upper fixed disc assembly, including upper fixed disc 121, upper chuck 122; 13, locking nut; 14, rotating sleeve; 15, rotating rod. DETAILED DESCRIPTION

[0034] The specific embodiments, technical features and working principles of the present application will be described in detail below with reference to the accompanying drawings. The description is intended to enable those skilled in the art to fully understand and reproduce the present application, but should not be construed as limiting the scope of protection of the present application.

[0035] Embodiment: As Figures 1 to 9As shown, the present application provides a kind of introduction bias, prevent vacuum ionization all-around coating tool, its overall assembly relationship as follows: the track 2 is fixed on the bottom plate in vacuum chamber, the first and last ends of track 2 are provided with tool limiting mechanism, for locking the tool to the right position;The walking mechanism 3 is installed on track 2;The planetary workpiece disc assembly 4 is installed on walking mechanism 3;The fixed rod and support assembly 6 and rotation seat assembly 7 are all installed on planetary workpiece disc assembly 4;The lower part of bias entry mechanism 5 is connected with walking mechanism 3, and the upper part is connected with planetary workpiece disc assembly 4;The bias introduction rotation rod mechanism 8 is connected between rotation seat assembly 7 and bias entry mechanism 5;The rotation rod 15 is connected between rotation seat assembly 7 and upper fixed disc assembly 12;The upper fixed disc assembly 12 is installed on the top end of fixed rod and support assembly 6;The antifouling plate support 9 and antifouling plate 10 are installed on planetary workpiece disc assembly 4.

[0036] The detailed assembly process and function of each component are as follows: 1. The installation of track 2 and tool limiting mechanism As shown in the figure, Figure 3 The track 22 is fixedly installed on the bottom plate of the vacuum chamber through a plurality of positioning bolts 21. When installing, it is necessary to ensure that the two tracks 22 are parallel, and the headway (i.e. the center distance of the two tracks) must be consistent with the center distance of the same row walking wheels 36 on the subsequent walking mechanism 3, so as to ensure that the walking mechanism 3 can walk flexibly and stably on the track 22 without jamming phenomenon.

[0037] In order to realize the precise positioning of the tool in the vacuum chamber and prevent displacement caused by tangential force, a tool limiting mechanism is provided at the first end and the tail end of the track 22 extension path. Specifically, at the rear end of the track 22 corresponding to the complete entry of the tool into the working position, an insulating bolt is used to fix a rear stop block on the grounded vacuum chamber bottom plate, which serves as the termination limiting of the tool advancement. At the front end of the track 22, corresponding to the position where the tool completely exits the chamber, a front stop block is also provided, which is installed on the chamber bottom plate through detachable bolts. When the tool needs to be pushed into the chamber, the front stop block is removed; after the tool enters the chamber and is in place, the front stop block is installed back to the original position. Through the joint action of the front and rear stop blocks, the front and rear movement gap of the tool is strictly limited within the effective meshing range of the drive gear, effectively overcoming the tangential force that may be generated when the drive gear and the revolution large gear plate 44 are in meshing transmission, causing the tool to "pop up" or displace, ensuring the reliability and stability of the transmission meshing.

[0038] 2. Assembly and installation of walking mechanism 3 As shown in the figure, Figure 3As shown, the assembly process of the walking mechanism 3 is as follows: First, the positioning transition plate 32 is welded to the corresponding position of the support plate 31. The bearing 35 is pressed into the inner hole of the walking wheel 36, and then the walking shaft 37 passes through the inner ring of the bearing 35. A bushing 38 is fitted on each end of the walking shaft 37, and then the entire walking wheel assembly is installed onto the walking support 34 through both ends of the walking shaft 37. Subsequently, an insulating sleeve 39 made of alumina ceramic is placed on the upper and lower sides between the mounting surfaces of the walking support 34 and the support plate 31. Finally, the walking support 34 is fastened to the support plate 31 with the mounting positioning bolts 33. In this way, four sets of walking wheel assemblies are assembled at the four corners of the support plate 31. After assembly, the entire walking mechanism 3 is placed on the track 22 to check whether it moves freely.

[0039] 3. Assembly and installation of planetary workpiece disk assembly 4 like Figure 4 As shown, firstly, the fixed gear disc 42 is fastened to the positioning transition plate 32 of the traveling mechanism 3 using positioning bolts 41. Then, the lower race of the thrust bearing 43, made of full-ball heat-resistant steel, is installed onto the designated support surface of the fixed gear disc 42. Next, the revolution gear disc 44 is placed on the upper race of the thrust bearing 43 and radially positioned by ball bearings 45, wherein the inner ring of the ball bearing 45 is installed on the shaft at the center of the fixed gear disc 42, and the outer ring is installed in the center hole of the revolution gear disc 44. Finally, a snap ring 46 is inserted into the slot on the revolution gear disc 44 to axially limit the revolution gear disc 44. The rotating gear disc 47 is mounted on the revolution gear disc 44 by bearings and connected to the lower half shaft 78 of the rotating seat assembly 7 by a flat key 48, and then axially fixed by a shaft snap ring 49. When the revolving large gear disk 44 is driven by an external force to revolve around the fixed gear disk 42, the rotating gear disk 47 generates a rotational motion around its own axis under the meshing action of the fixed gear disk 42.

[0040] 4. Assembly and connection of bias input mechanism 5 like Figure 4 and Figure 7 As shown, the assembly of this mechanism is carried out in layers: Lower fixing part: First, the lower fixing connecting plate 515 is fixed to the support plate 31 of the traveling mechanism 3 using the lower positioning bolt 516. Then, the lower insulating sleeve 513 is placed on the lower fixing connecting plate 515, and the lower clamping plate 514 is connected to the lower end of the biasing guide rod 59 and placed on the lower insulating sleeve 513. Next, the lower fixing insulating sleeve 512 is fitted onto the lower clamping plate 514, and finally, the lower clamping bolt 511 is tightened to press and fix the lower clamping plate 514. This structure ensures reliable insulation between the lower part of the biasing guide rod 59 and the traveling mechanism 3 through the lower insulating sleeve 513 and the lower fixing insulating sleeve 512.

[0041] Upper Rotating Part: First, the upper orbital connecting plate 58 is bolted to the orbital large gear 44 of the planetary workpiece disk assembly 4. An insulating pad 57 is placed on the upper orbital connecting plate 58, and then the wire connector 56, containing the copper brush 55, is installed on the insulating pad 57. The upper pressure cap 54 is then used to press down on the copper brush 55 and position it within the wire connector 56. Next, the upper insulating sleeve 53 is fitted onto the upper pressure cap 54. Finally, the upper clamping bolt 52 is screwed into the wire connector 56 and tightened to compress the upper insulating sleeve 53, thereby fixing the entire upper rotating part. This structure ensures insulation between the wire connector 56 and the orbital large gear 44 through the insulating pad 57.

[0042] Intermediate connection: The intermediate shielding insulating sleeve 510 is fitted onto the exposed middle part of the bias guide rod 59 to prevent vacuum ionization at that point. Finally, the orbital upper insulating cover 51 is placed on top, so that the wire connector 56 is wrapped and not exposed.

[0043] Function: When the large revolving gear 44 rotates, it drives the upper wire connector 56 to rotate together, while the copper brush 55 inside it maintains sliding contact with the fixed bias guide rod 59, so as to realize the current conduction in the rotating state.

[0044] 5. Installation of fixing rod and support assembly 6 like Figure 5 As shown, firstly, the insulating sleeve 63 on the fixing rod is fitted onto the fixing rod seat 64. Then, the fixing rod 61 is passed through the fixing rod seat 64, and a lower insulating pad 62 is placed between the lower end of the fixing rod 61 and the contact surface of the revolving large gear 44. Subsequently, the entire assembly is placed in the mounting position of the revolving large gear 44, and a fixing bolt 65 with an anti-slip stop pad 66 is used to pass through the revolving large gear 44 from above to press and fix the assembly. The lower insulating pad 62 and the insulating sleeve 63 on the fixing rod together ensure reliable insulation between the fixing rod 61 and the revolving large gear 44.

[0045] 6. Assembly and installation of the self-rotating assembly 7 like Figure 6 As shown, this is a key component for achieving rotation and insulation. First, the thrust bearing 79 is installed at the bottom of the self-rotating seat 71. The lower half-shaft 78 is then installed on the thrust bearing 79. Next, the insulating transition shaft 76 (made of alumina ceramic) is placed inside the transition shaft base 77, and the upper end of the lower half-shaft 78 is connected to the lower end of the insulating transition shaft 76. The lower end of the upper half-shaft 75 is connected to the upper end of the insulating transition shaft 76, and is limited by a shaft retaining circlip 74. Subsequently, the ceramic ball bearing 73 is pressed into the bearing hole of the self-rotating seat 71, and the upper half-shaft 75 is passed through the inner ring of the ceramic ball bearing 73. Finally, the upper hole retaining circlip 72 is inserted into the slot of the self-rotating seat 71 to complete the axial fixation. After assembly, the self-rotating seat 71 of the entire self-rotating seat assembly 7 is fixed to the revolution large gear disk 44 with bolts.

[0046] Core function: The ceramic ball bearing 73 and the insulating transition shaft 76 work together to achieve complete electrical insulation between the upper shaft 75 (and the self-rotating rod 15 connected thereto) and the self-transmission seat 71 and the revolution large gear disk 44.

[0047] Failure-proof design: The transition shaft base 77 completely encloses the brittle insulated transition shaft 76. In the event that the insulated transition shaft 76 breaks under load and rotational torque, all fragments will be confined within the cavity of the transition shaft base 77, thus preventing fragments from falling into the gap between the lower half-shaft 78 and the self-transfer seat 71, causing rotational jamming or even equipment damage, and greatly improving the reliability of the system.

[0048] 7. Installation of bias wiring assembly 1 like Figure 7 As shown, this assembly is used to introduce bias voltage from outside the vacuum chamber. First, the connecting flange 104 is fixedly connected to the opening in the bottom plate of the vacuum chamber. Then, a knife-edge transition flange 103 is installed on the connecting flange 104, and the ceramic-encapsulated terminal valve 101 is installed on the knife-edge transition flange 103, with a copper gasket 102 placed in between to ensure a vacuum seal. Inside the chamber, an insulating seat 105 is installed on the connecting flange 104, and then a carbon brush holder 106 containing carbon brushes 107 is installed on the insulating seat 105, ensuring a reliable connection between the carbon brush holder 106 and the conductive inner core of the ceramic-encapsulated terminal valve 101. Finally, the carbon brushes 107 are covered with an insulating cover 108 to prevent them from being exposed. This structure ensures that the introduced bias voltage is insulated from the grounded vacuum chamber.

[0049] 8. Connection of the bias-introduced self-rotating rod mechanism 8 like Figure 8 As shown, this mechanism is used to transmit bias voltage from the bias input mechanism 5 to the upper half-shaft 75 of the spinner assembly 7. A spring-loaded copper brush 83 (made of high-purity copper) is inserted into a ceramic seat 84 (made of alumina ceramic), and then secured with a tightening threaded sleeve 82. The lug of one end of the wire 81 passing through the ceramic cup is connected to the wire connector 56 of the bias input mechanism 5. Then, the ceramic seat 84 assembly with the copper brush 83 is positioned by the clamping plate 85, ensuring that the copper brush 83 maintains good electrical contact with the upper half-shaft 75 under spring pressure.

[0050] 9. Final assembly of the upper fixed plate 12 and the self-rotating rod 15 like Figure 9 and 10As shown, the upper fixing plate 121 is fitted onto the top of the fixing rod 61 of the fixing rod and support assembly 6, and locked in place using the locking nut 13. Then, the upper chuck 122 is placed into the opening slot of the upper fixing plate 121, forming a complete circular structure. Finally, one end of the rotating rod 15 is connected to the upper half shaft 75 of the rotating seat assembly 7, and the other end is rotatably connected to the upper fixing plate 12 using the rotating sleeve 14.

[0051] 10. Installation of anti-fouling components like Figure 5 As shown, the anti-fouling plate support 9 is installed on the planetary gear disk 44, then the anti-fouling plate 10 is placed on the anti-fouling plate support 9, and finally tightened with the connecting nut 11. The anti-fouling plate 10 is used to prevent film vapor from depositing on the bearings and insulating components of the planetary workpiece disk assembly 4 below, preventing insulation failure due to contamination.

[0052] The working process and bias path of this invention: Loading the workpiece: Push the entire fixture out of the vacuum chamber along the track 2 via the traveling mechanism 3 (at this time, the front stop has been removed). Suspend the workpiece to be plated on the rotating rod 15 and / or the fixed rod 61.

[0053] Entering the chamber: Push the tooling loaded with the workpiece back into the vacuum chamber along track 2 until the support plate 31 of the traveling mechanism 3 contacts the rear stop. At this point, the tooling has reached the preset working position. Then, install the front stop back onto the chamber bottom plate at the front end of the track to complete the mechanical limiting of the tooling.

[0054] Automatic bias connection: When the tooling is fully inserted into the chamber, the bias guide rod 59 of the bias entry mechanism 5 is automatically inserted into the carbon brush 17 of the bias wiring assembly 1 to achieve physical contact and electrical connection.

[0055] Establishing a bias path: The current from the external bias power supply is transmitted through the following path: Bias wiring assembly 1 (ceramic-encapsulated wiring valve 11 → carbon brush holder 16 → carbon brush 17) Bias input mechanism 5 (carbon brush 17 → bias guide rod 59 → copper brush 55 → wire connector 56) Bias voltage introduces a self-rotating rod mechanism 8 (wire connector 56 → wire passing through ceramic bowl 81 → spring-loaded copper brush 83). Self-rotating assembly 7 (copper brush 83 with spring → upper half shaft 75) Finally, the current is conducted (upper half shaft 75 → rotation rod 15; at the same time, through the upper fixed plate 12, the current is also conducted to the fixed rod 61).

[0056] At this point, all workpieces to be plated suspended on the rotating rod 15 and the fixed rod 61 have been subjected to bias voltage.

[0057] Start coating: start the vacuum system and coating process. The revolution gear plate 44 is driven to rotate, driving all workpieces to revolve; due to the limiting effect of the front and rear stoppers, the tooling is firmly limited on the track, effectively resisting the tangential force generated by the driving gear engagement, ensuring the continuous and stable meshing transmission between the revolution gear plate 44 and the driving system. At the same time, each self-rotating seat is self-rotating under the meshing of the self-rotating gear plate 47 and the fixed gear plate 42, realizing the full-range uniform coating of the workpiece. In the whole process, since all possible grounding components (such as the track, the walking mechanism, and the planetary disc body) and the live components (such as the self-rotating rod and the fixed rod) are reliably isolated by the above-mentioned insulation structure, the risk of vacuum ionization sparking is completely avoided.

[0058] The above description is only the preferred embodiment of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art can make equivalent replacements or changes within the technical range disclosed by the present application according to the technical solution and the inventive concept of the present application, which should be covered within the protection scope of the present application.

Claims

1. A full-area coating tool with bias introduction and vacuum ionization prevention, characterized in that, The application relates to a vacuum coating machine, which comprises the following parts: a track (2) fixedly installed on a vacuum chamber bottom plate; a walking mechanism (3) supported on the track (2) through walking wheels (36) and capable of walking on the track; a planetary workpiece disc assembly (4) installed on the walking mechanism (3) and comprising a fixed gear disc (42), a revolution gear disc (44) and a rotation gear disc (47) to realize the revolution and rotation of workpieces; a biasing wiring assembly (1) fixedly installed on the vacuum chamber bottom plate and used for introducing external biasing; a biasing entering mechanism (5) connected with the walking mechanism (3) at the lower part and connected with the revolution gear disc (44) of the planetary workpiece disc assembly (4) at the upper part, wherein the biasing entering mechanism (5) is provided with a biasing guide rod (59) capable of automatically contacting and conducting with the biasing wiring assembly (1); at least one fixed rod and support assembly (6) installed on the revolution gear disc (44), wherein the fixed rod and support assembly (6) comprises a fixed rod (61); at least one rotation seat assembly (7) installed on the revolution gear disc (44); a rotation rod (15) connected with the rotation seat assembly (7) at one end; an upper fixed disc assembly (12) connected with the end of the fixed rod (61) and rotationally connected with the other end of the rotation rod (15); a biasing introducing rotation rod mechanism (8) connected between the biasing entering mechanism (5) and the rotation seat assembly (7) and used for conducting biasing; wherein insulation structures are arranged between the walking mechanism (3) and the track (2), between the planetary workpiece disc assembly (4) and the walking mechanism (3), between the fixed rod and support assembly (6) and the revolution gear disc (44), between the rotation seat assembly (7) and the revolution gear disc (44) and between the biasing entering mechanism (5) and the walking mechanism (3) and the revolution gear disc (44), so that the rotation rod (15) and the fixed rod (61) are insulated relative to the grounded vacuum chamber and can introduce biasing.

2. The coating tool of claim 1, wherein The insulation structure between the walking mechanism (3) and the track (2) comprises an insulation sleeve (39) arranged between a walking support (34) and a support plate (31).

3. The coating tool of claim 1, wherein The insulation structure between the planetary workpiece disc assembly (4) and the walking mechanism (3) comprises an insulation layer or an insulation piece arranged on a positioning transition plate (32) between the fixed gear disc (42) and the support plate (31) of the walking mechanism (3).

4. The coating tool of claim 1, wherein The insulation structure between the fixed rod and support assembly (6) and the revolution gear disc (44) comprises a fixed rod lower insulation pad (62) and a fixed rod upper insulation sleeve (63) sleeved on the fixed rod (61).

5. The coating tool of claim 1, wherein The insulation structure between the rotation seat assembly (7) and the revolution gear disc (44) comprises a ceramic ball bearing (73) arranged between a self-transmission seat (71) and an upper half shaft (75) and an insulation transition shaft (76) connecting the upper half shaft (75) and a lower half shaft (78).

6. The coating tool of claim 5, wherein the coating tool is a coating tool for coating a substrate with a coating material. The insulation transition shaft (76) is externally sleeved with a transition shaft base (77) for accommodating the fragments of the insulation transition shaft (76) when the insulation transition shaft (76) is broken.

7. The coating tool of claim 1, wherein The insulation structure of the biasing mechanism (5) comprises: An insulation pad (57) arranged between the wire connecting seat (56) and the upper revolution connecting plate (58); An upper insulation sleeve (53) arranged between the upper cover (54) and the upper compression bolt (52); An intermediate shielding insulation sleeve (510) sleeved outside the biasing guide rod (59); A lower fixed insulation sleeve (512) and a lower insulation sleeve (513) arranged between the lower clamping plate (514) and the lower fixed connecting plate (515).

8. The coating tool of claim 1, wherein The transmission structure of the planetary workpiece disc assembly (4) is that the revolution gear disc (44) is supported on the fixed gear disc (42) by the full-bead heat-resistant bearing steel thrust bearing (43) and can revolve, the rotation gear disc (47) installed on the revolution gear disc (44) is engaged with the fixed gear disc (42), thereby generating rotation while revolving, and the self-transmission gear disc (47) is connected with the lower half shaft (78) of the rotation seat assembly (7).

9. The coating tool of claim 8, wherein the coating tool is a coating tool for coating a substrate with a coating material. The lower half shaft (78) of the rotation seat assembly (7) is connected with the self-transmission gear disc (47) through the flat key (48) and the shaft clasp spring (49), thereby transmitting the rotation motion to the rotation seat assembly (7).

10. The coating tool of claim 1, wherein The upper fixed disc assembly (12) comprises a circular annular upper fixed disc (121) and a detachable upper chuck (122), the upper chuck (122) is overlapped in the open slot of the upper fixed disc (121), so that the upper fixed disc assembly (12) can be disassembled and passed through the central column target when the central column target is arranged in the center of the vacuum chamber.

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