Flexible sensing and driving integrated soft gripper and preparation method thereof

Abstract

The invention provides a flexible sensing and driving integrated soft gripper and a preparation method thereof. The soft gripper comprises a palm and at least one finger, the finger comprises a flexible sensor module extending along the length direction of the finger; the at least one flexible driving structure is embedded in a groove in the surface of the flexible sensor module; the two end part electrical connection modules are respectively arranged at the finger root and the finger tip of the finger; each end electrical connection module comprises an upper substrate, an upper electrode, a lower electrode and a lower substrate; two ends of the flexible sensor module are respectively clamped by the two end part electrical connection modules, so that the end part of the flexible sensor module is electrically connected between the upper electrode and the lower electrode; the flexible driving structure is composed of an upper driving layer, a middle flexible electric heating layer and a lower driving layer. The soft gripper integrates the two functions of flexible driving and flexible sensors, the bending degree of the soft gripper can be detected during gripping action, and external pressure signals borne by the gripper are detected.

Description

Technical Field

[0001] This invention relates to the field of soft robot technology, and more particularly to the field of flexible sensor and flexible drive technology, specifically to a flexible sensing and drive integrated soft gripper and its preparation method. Background Technology

[0002] Traditional robots are made of rigid materials, limiting their degrees of freedom and elastic deformation capabilities, which restricts their application in certain scenarios and makes them unsuitable for working environments requiring high flexibility. Soft robots, on the other hand, are composed of soft materials and possess strong elastic deformation capabilities, enabling them to perform tasks in complex environments. Therefore, they are highly suitable for fields such as medicine and smart wearables. The soft gripper, as a key actuation component of a soft robot, is its core component.

[0003] Common soft grippers are mainly composed of flexible actuation structures and mostly use a single actuation method. They can only perform actions under the action of external actuation and lack sensing functions. They cannot detect their own deformation or external signals, which limits the intelligent development of soft robots. For example, the variable stiffness soft finger, variable stiffness soft gripper, and manipulator in patent publication number CN119635707A rely on a single gas actuation method to achieve grasping actions in complex environments, but they cannot detect the degree of bending or stress on the gripper. Similarly, the biomimetic gecko toe electrothermal driven soft gripper and its preparation method in patent publication number CN113070896A achieves rapid gripper action through electrothermal drive, but it also lacks integrated sensors and cannot detect the degree of bending or stress on the gripper.

[0004] To address this, some researchers have proposed adding sensing functionality to soft actuator structures. However, this typically involves fabricating the sensor and actuator separately and integrating them through a stacked or adhesive package. For example, patent CN210401285U, which integrates actuator sensing into a flexible intelligent device, fabricates both a flexible sensor and a flexible actuator structure separately, then directly attaches the flexible sensor beneath the actuator structure. However, this stacked structure suffers from low integration and issues such as increased resistance during actuator movement and interference / affects on the flexible sensor signal from the actuator structure. Summary of the Invention

[0005] In view of the background art, one aspect of the present invention is to provide a flexible sensing and driving integrated soft gripper structure, which aims to solve the problems of low intelligence level of flexible driving, low sensitivity of flexible sensors under high pressure, and low integration of flexible sensing and driving.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A flexible sensing and actuation integrated soft gripper includes a palm and at least one finger; the finger includes: a flexible sensor module extending along the length of the finger; at least one flexible actuation structure embedded in a groove on the surface of the flexible sensor module; and two end electrical connection modules respectively disposed at the base and tip of the finger; each end electrical connection module includes an upper base, an upper electrode, a lower electrode, and a lower base arranged sequentially from top to bottom; wherein, both ends of the flexible sensor module are respectively clamped by the two end electrical connection modules, such that the ends of the flexible sensor module are electrically connected between the upper electrode and the lower electrode; The flexible driving structure consists of an upper driving layer, a middle flexible electric heating layer and a lower driving layer. The upper driving layer and the lower driving layer are made of liquid crystal elastomer, and the middle flexible electric heating layer is a PI heating film coated with alloy resistors. The flexible sensor module includes an upper sensitive layer and a lower sensitive layer; the upper sensitive layer is an integral continuous structure, and its lower surface is provided with multiple sets of first sensitive microstructure units at the base and tip of the finger respectively; there are two lower sensitive layers, which are fixed to the lower surface of the upper sensitive layer at the base and tip of the finger respectively, and the upper surface of the lower sensitive layer is provided with multiple sets of second sensitive microstructure units that are nested and cooperate with the first sensitive microstructure units.

[0007] In some preferred embodiments, the groove is provided on the surface of the joint position of the flexible sensor module.

[0008] In some preferred embodiments, the first sensitive microstructure unit is a stepped composite protrusion structure formed by coaxially connecting a first cylinder with a larger diameter and a second cylinder with a smaller diameter; the second sensitive microstructure unit is composed of a protruding triangular prism and a small rectangular groove adjacent to the triangular prism; in the assembled state, the apex of the triangular prism faces the first cylinder, and the inclined surface of the triangular prism faces the second cylinder.

[0009] In some preferred embodiments, the upper and lower substrates are made of PET or PI film; the upper and lower electrodes are made of flexible thin-film conductive material.

[0010] In some preferred embodiments, the palm and the flexible sensor module are made of PDMS-doped multi-walled carbon nanotubes.

[0011] In some embodiments, when the upper and lower electrodes within the same end electrical connection module are connected, a first sensing loop is formed for detecting pressure signals. In other embodiments, when the upper electrodes of two end electrical connection modules of the same finger are connected, a second sensing loop is formed for detecting the degree of finger bending.

[0012] In some preferred embodiments, the fingers include one short finger and four long fingers, all of which are connected to the palm at their base, and each finger has at least one joint.

[0013] Another objective of this invention is to provide a method for preparing a flexible sensing and driving integrated soft gripper.

[0014] To achieve the above objectives, the present invention adopts the following technical solution: A method for preparing the flexible sensing and driving integrated soft gripper as described in claim 1 includes the following steps: 1) fabricating a palm mold, an upper sensitive layer mold, and a lower sensitive layer mold using an additive manufacturing method; 2) Carbon-based conductive silicone is prepared using multi-walled carbon nanotubes and PDMS, and then poured into the palm mold, upper sensitive layer mold and lower sensitive layer mold and heated to cure. After complete molding, the palm, upper sensitive layer and lower sensitive layer are peeled off, and the upper sensitive layer and lower sensitive layer are bonded together to obtain the flexible sensor module. 3) Prepare flexible driving ink, perform ink direct writing 3D printing on the flexible driving ink to prepare the upper driving layer and the lower driving layer respectively, and cure the upper driving layer and the lower driving layer with ultraviolet light. Then, align and bond the upper driving layer, the intermediate flexible electric heating layer and the lower driving layer to encapsulate the flexible driving structure. 4) The flexible driving structure is embedded in the groove on the surface of the flexible sensor module, and the upper substrate, upper electrode, flexible sensor module, lower electrode and lower substrate are aligned and attached in sequence to encapsulate the finger; 5) Repeat the above preparation steps to prepare the other fingers; 6) Connect the fingers to the palm to obtain the flexible sensing and driving integrated soft gripper.

[0015] In some preferred embodiments, in step 4), the groove is provided on the surface of the joint position of the flexible sensor module.

[0016] In some preferred embodiments, in step 2), the first sensitive microstructure unit is a stepped composite protrusion formed by coaxially connecting a first cylinder with a large diameter and a second cylinder with a small diameter; the second sensitive microstructure unit is a prism-shaped protrusion with a triangular cross-section and an adjacent rectangular groove; in the assembled state, the apex of the triangular prism faces the first cylinder, and its inclined surface faces the second cylinder.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: The beneficial effects of this invention are: 1) The intelligent soft gripper integrates the functions of flexible drive and flexible sensor. It can detect its own bending degree during the gripping action, and can also detect the pressure signal of the external environment on the gripper. After receiving the signal, it can feed the information back to the control system to drive the fingers to move further, so as to realize closed-loop control.

[0018] 2) By using the gourd-shaped secondary cylindrical array microstructure of the upper sensitive layer of the flexible piezoresistive sensor and the nested design of the triangular columnar protrusions and rectangular groove microstructures of the lower sensitive layer, the secondary contact deformation under pressure increases the contact area of ​​the upper and lower sensitive structures, ensuring continuous contact between the upper and lower sensitive layers of the sensor and significantly improving the sensitivity of the sensor.

[0019] 3) The flexible drive structure has three layers: the upper and lower layers are smart material drive layers, and the middle layer is a flexible electric heating layer. The smart drive material contains a photoinducer, which can perform various drive methods such as light drive, electric drive, and thermal drive, making the drive method convenient, fast, and intelligent.

[0020] 4) By setting two electrical connection modules at the base and tip of the finger, and configuring independent upper and lower electrodes for each module, a flexibly configurable electrical measurement system is constructed. Users can easily switch between pressure detection mode and bending detection mode by selecting different electrode connection combinations (e.g., upper and lower electrodes of the same module, or upper electrodes of different modules) through external circuitry. Utilizing the simplest electrode layout, it achieves the perception of multiple physical signals, such as touch pressure and bending, improving the intelligence level and environmental adaptability of the soft gripper.

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the flexible sensing and driving integrated soft gripper structure according to an embodiment of the present invention; Figure 2 A three-dimensional structural diagram of the long fingers of the soft gripper according to an embodiment of the present invention; Figure 3 This is a schematic cross-sectional view of the long fingers of the soft gripper in an embodiment of the invention. Figure 4 This is an exploded structural diagram of the long finger of the soft gripper according to an embodiment of the invention. Figure 5 yes Figure 3 A magnified structural diagram of part A in the middle; Figure 6 This is a schematic diagram of the flexible drive structure of the soft gripper according to an embodiment of the present invention; Figure 7 and 8These are schematic diagrams of the upper and lower sensitive layers of the flexible sensor in the soft gripper according to an embodiment of the present invention.

[0023] In the figure: short finger 100; palm 200; long finger 300; upper substrate 310; upper electrode 320; flexible sensor module 330; upper sensitive layer 331; lower sensitive layer 332; lower electrode 340; lower substrate 350; flexible driving structure 360; upper driving layer 361; intermediate flexible electric heating layer 362; lower driving layer 363; first sensitive microstructure unit 337; first cylinder 3371; second cylinder 3372; second micro-sensitive microstructure unit 338; triangular prism 3381; rectangular groove 3382; electrical connection line 3621; rectangular groove 335; "V" shaped groove 336. Detailed Implementation

[0024] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention.

[0025] like Figure 1 As shown, this embodiment provides a flexible sensing and actuation integrated soft gripper, which consists of a short finger 100, a palm 200, and four long fingers 300. Its overall shape and positional relationship resemble a human hand, with the short finger 100 resembling a human thumb. The long fingers 300 have a thickness of 6-10 mm, a width of 10-15 mm, and a length of 85-100 mm. The short finger 100 has a length of 60-80 mm, and its thickness and width are the same as the long fingers. Similar to a human hand, the short finger 100 and the long fingers 300 differ in length and the number of joints.

[0026] Both the long finger 300 and the short finger 100 are multi-layered flexible components that integrate actuation and sensing functions. Their actuation and sensing principles and structures are the same; however, due to differences in length and the number of joints, the number of flexible actuation structures differs. The following section will use the long finger 300 as an example for detailed explanation.

[0027] The long finger 300 includes a flexible sensor module 330 that continuously covers the entire length of the finger, at least one flexible drive structure 360 ​​embedded in the joint portion of the flexible sensor module 330, and two end electrical connection modules respectively disposed at the base and tip of the flexible sensor module 330.

[0028] Each end electrical connection module includes an upper substrate 310, an upper electrode 320, a lower electrode 340, and a lower substrate 350 arranged sequentially from top to bottom. The two ends of the flexible sensor module 330 are respectively clamped by two end electrical connection modules.

[0029] Specifically, the upper substrate 310, as the outermost layer of the end electrical connection module, provides electrical insulation and physical protection. The upper electrode 320 covers or adheres to the inner surface (lower surface) of the upper substrate 310, forming the upper conductive layer of the end electrical connection module. The lower electrode 340 directly covers or adheres to the inner surface (upper surface) of the lower substrate 350, forming the lower conductive layer of the end electrical connection module. The lower substrate 350, as the outermost layer of the module, together with the upper substrate 310, constitutes encapsulation and support, and also provides insulation protection.

[0030] The upper electrode 320 and the lower electrode 340 are opposite to each other and parallel to each other, with space between them to accommodate the base and tip of the flexible sensor module 330. When the end electrical connection module is assembled with the flexible sensor module 330, the base and tip of the flexible sensor module 330 are clamped between the upper electrode 320 and the lower electrode 340 of the end electrical connection module, respectively. Through this clamping, the upper and lower surfaces of the base of the flexible sensor module 330 are in direct contact with the upper electrode 320 and the lower electrode 340, respectively, and the upper and lower surfaces of the tip of the flexible sensor module 330 are in direct contact with the upper electrode 320 and the lower electrode 340, respectively, thereby establishing a stable electrical connection.

[0031] At the joint of the long finger 300, a flexible drive structure 360 ​​is embedded to perform bending movements.

[0032] The upper substrate 310 and the lower substrate are made of PET or PI film. The upper electrode 320 and the lower electrode 340 are made of flexible thin-film conductive material with a thickness of 0.05-0.1 mm. The flexible sensor module 330 is made of PDMS-doped conductive material, and the doped conductive material is multi-walled carbon nanotubes.

[0033] like Figure 3 As shown, the flexible sensor module 330 consists of an upper sensitive layer 331 and a lower sensitive layer 332. Specifically, the upper sensitive layer 331 is an integral continuous structure that covers the entire flexible long finger 300 along its length. The positions of the upper sensitive layer 331 corresponding to the base and tip of the finger respectively form complementary microstructures with the two lower sensitive layers 332.

[0034] Specifically, the lower surface of the upper sensitive layer 331 has multiple sets of first sensitive microstructure units 337 at positions corresponding to the base and tip of the finger. Each set of first sensitive microstructure units consists of a larger diameter first cylinder 3371 and a smaller diameter second cylinder 3372 coaxially connected, forming a composite protrusion structure with a stepped axial cross-section, i.e., a gourd-shaped secondary cylindrical sensitive microstructure. There are two lower sensitive layers 332, which are fixed to the lower surface of the upper sensitive layer 331 at positions corresponding to the base and tip of the finger. The upper surface of each lower sensitive layer 332 has multiple sets of second sensitive microstructure units 338 corresponding to the multiple sets of first sensitive microstructure units 337. Each second sensitive microstructure unit 338 consists of a triangular prism 3381 and a small rectangular groove 3382 adjacent to the triangular prism 3381. The triangular prism 3381 is a prism-shaped protrusion with an isosceles triangle cross-section. In the assembled state, the apex of the triangular prism 3381 is perpendicularly aligned with the center of the lower surface of the first cylinder 3371, while the inclined surface of the triangular prism 3381 is located directly below the second cylinder 3372. Preferably, the diameter of the first cylinder 3371 ranges from 2 to 2.5 mm, and the diameter of the second cylinder 3372 ranges from 1 to 1.5 mm. The upper sensitive layer 331 and the lower sensitive layer 332 are designed in this way to significantly increase the contact area under pressure, thereby achieving high-sensitivity signal detection. When the sensor is under pressure, the stepped cylinder of the upper sensitive layer 331 moves downward and makes nested contact with the triangular prism 3381 of the lower sensitive layer 332. Under initial pressure, the first cylinder 3371 contacts the corner of the triangular prism 3381, achieving a sensitive response under low pressure. As the pressure increases, the second cylinder 3372 contacts the inclined surface of the triangular prism 3381, significantly increasing the contact area and thus achieving a continuous and linear change in resistance. This complementary microstructure design together constitutes a highly sensitive piezoresistive sensing unit.

[0035] like Figure 2 As shown, the upper surface of the upper sensitive layer 331 has three rectangular grooves 335, which are used to install the flexible drive structure 360. The lower surface of the upper sensitive layer 331 has a V-shaped groove 336, which facilitates the bending of the upper sensitive layer 331.

[0036] The flexible drive structure 360, as an independent motion execution unit, is embedded within the rectangular groove. For example... Figure 4As shown, the flexible driving structure 360 ​​adopts a sandwich structure. Both the upper driving layer 361 and the lower driving layer 363 are composed of liquid crystal elastomers, with a flexible electric heating layer 362 sandwiched in between, enabling multiple driving methods such as electric, thermal, and optical. Both the upper driving layer 361 and the lower driving layer 363 are smart material driving layers, incorporating photoinducers to support various driving methods including optical, electric, and thermal driving, making the driving process convenient, fast, and intelligent. The overall length of the flexible driving structure 360 ​​is 15-30mm, and the width is 10-20mm. The upper driving layer 361 and the lower driving layer 363 are made of liquid crystal elastomers, with the upper driving layer having a thickness of 0.5-0.7mm and the lower driving layer having a thickness of 0.5-0.7mm. The intermediate electric heating layer 362 is a PI heating film coated with alloy resistors, with a thickness of 0.1-0.5mm, and is connected to an external power source via an electrical connection line 3621 to achieve electric heating.

[0037] In this embodiment, the flexible sensor module 330 is provided with four electrodes, and different pairs of electrodes can sense different signals when connected. When the upper and lower electrodes 320 and 340 at one end of the flexible sensor module 330 are connected, they can be used to detect signals such as pressure and touch. When the two upper electrodes 320 at both ends of the flexible sensor module 330 are connected, they can be used to measure whether the finger is bent and the degree of bending. When pressure is applied to one end of the finger, the larger cylinder 3371 of the gourd-shaped secondary cylindrical structure of the upper sensitive layer 331 first contacts the corner of the triangular prism 3381 of the lower sensitive layer 332. A small pressure will produce a large deformation and have a significant output signal. After further pressure and deformation, the smaller cylinder 3372 of the upper sensitive layer 331 will contact the inclined surface of the triangular prism 3382 of the lower sensitive layer 332. The contact area further increases, which will reduce the contact resistance and further increase the output signal. The signals detected by the sensors can be fed back to the control system. After receiving the signals, the control system processes them and then drives the fingers to perform different movements by controlling the current on and off of the flexible drive structure 360 ​​or by controlling the intensity and position of the light source.

[0038] The fabrication method of the flexible sensing and driving integrated soft gripper in this embodiment is as follows: Figure 5 As shown, it includes the following steps: 1) Use additive manufacturing methods to manufacture the hand mold 200, the upper sensitive layer mold 331 of the flexible sensor, and the lower sensitive layer mold 332.

[0039] 2) Mix PDMS and curing agent evenly at a mass ratio of 5:1 to 10:1, and then add 5-10% of conductive multi-walled carbon nanotubes. After stirring evenly again, perform ultrasonic dispersion and vacuum degassing, and then heat curing to obtain carbon-based conductive silicone.

[0040] 3) such as Figure 7 and8 As shown, the PDMS doped with multi-walled carbon nanotubes configured in 2) above is poured onto the palm mold, upper sensitive layer mold, and lower sensitive layer mold obtained in 1), smoothed, and placed in a vacuum drying oven for heating and curing. After complete molding, the palm 200, upper sensitive layer 331, and lower sensitive layer 332 are obtained by peeling them off. The upper sensitive layer 331 and lower sensitive layer 332 are then glued together with insulating adhesive to obtain a flexible sensor module 330. The lower surface of the upper sensitive layer 331 has multiple sets of first sensitive microstructure units 337 at positions corresponding to the base and tip of the finger. Each set of first sensitive microstructure units consists of a first cylinder 3 with a larger diameter. The upper sensitive layer 331 and a smaller diameter second cylinder 3372 are coaxially connected to form a composite protrusion structure with a stepped axial longitudinal section, namely a gourd-shaped secondary cylindrical sensitive microstructure. There are two lower sensitive layers 332, which are fixed to the lower surface of the upper sensitive layer 331 at the positions corresponding to the finger root and fingertip, respectively. The upper surface of each lower sensitive layer 332 is provided with multiple sets of second micro-sensitive microstructure units 338 corresponding to the multiple sets of sensitive microstructure units. Each second micro-sensitive microstructure unit 338 consists of a triangular prism 3381 and a rectangular groove 3382 adjacent to the triangular prism 3381.

[0041] 4) Add liquid crystal elastomer powder and n-butylamine to a brown reagent bottle in a molar mass ratio of 1.1:1 to 1.5:1 and mix well. Then add 2 to 5% of the photoinitiator by mass of the mixed ink. After mixing, place the reagent bottle on a magnetic stirrer and stir magnetically. During the stirring process, heat the mixture in an oil bath at 100-110℃ to obtain flexible driving ink.

[0042] 5) Place the stirred ink into the printing syringe and use the ink direct writing 3D printing method to prepare the upper driving layer 361 and the lower driving layer 363 respectively, and cure them under ultraviolet light.

[0043] 6) Align and bond the upper driving layer 361, the middle flexible electric heating layer 362, and the lower driving layer 363 in sequence, and apply adhesive around the perimeter to encapsulate the flexible driving structure 360.

[0044] 7) Attach the three flexible drive structures 360 to the rectangular groove 335 of the flexible sensor module 330, and then align and attach the upper substrate 310, upper electrode 320, flexible sensor module 330, lower electrode 340 and lower substrate 350 in sequence. Apply glue around the perimeter to encapsulate the flexible sensing and driving integrated soft finger structure.

[0045] 8) Repeat the above steps to obtain short finger 100. Align and attach short finger 100, palm 200, and long finger 300 with insulating glue to obtain a flexible sensing and driving integrated soft gripper structure.

[0046] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A flexible sensor and actuator integrated soft gripper, characterized by, The hand includes a palm and at least one finger; the finger includes a flexible sensor module extending along the length of the finger, at least one flexible driving structure embedded in a groove on the surface of the flexible sensor module, and two end electrical connection modules respectively arranged at the root and the tip of the finger; each of the end electrical connection modules includes an upper substrate, an upper electrode, a lower electrode and a lower substrate arranged in order from top to bottom; wherein the two ends of the flexible sensor module are clamped by the two end electrical connection modules respectively, so that the ends of the flexible sensor module are electrically connected between the upper electrode and the lower electrode; The flexible driving structure is composed of an upper driving layer, a middle flexible electric heating layer and a lower driving layer; the materials of the upper driving layer and the lower driving layer are liquid crystal elastomers, and the middle flexible electric heating layer is a PI heating film plated with alloy resistance; The flexible sensor module includes an upper sensitive layer and a lower sensitive layer; the upper sensitive layer is a whole continuous structure, and a plurality of groups of first sensitive microstructure units are arranged on the lower surface of the upper sensitive layer at the root and the tip of the finger; the lower sensitive layer is two, and is respectively fixed to the lower surfaces of the root and the tip of the upper sensitive layer; and a plurality of groups of second sensitive microstructure units are arranged on the upper surfaces of the lower sensitive layer and are nested with the first sensitive microstructure units.

2. The flexible sensor and actuator integrated soft gripper according to claim 1, wherein, The groove is arranged on the surface of the joint position of the flexible sensor module.

3. The flexible sensor and actuator integrated soft gripper according to claim 1, wherein, The first sensitive microstructure unit is a stepped composite convex structure composed of a first cylinder with a larger diameter and a second cylinder with a smaller diameter connected coaxially; the second sensitive microstructure unit is composed of a convex triangular prism and a small rectangular groove adjacent to the triangular prism; in the assembled state, the corner tip of the triangular prism is opposite to the first cylinder, and the inclined surface of the triangular prism is opposite to the second cylinder.

4. The flexible sensor and actuator integrated soft gripper according to claim 1, wherein, The materials of the upper substrate and the lower substrate are PET or PI film; and the materials of the upper electrode and the lower electrode are flexible thin film conductive materials.

5. The flexible sensor and actuator integrated soft gripper according to claim 1, wherein, The materials of the palm and the flexible sensor module are PDMS doped with multi-walled carbon nanotubes.

6. The flexible sensor and actuator integrated soft gripper according to claim 1, wherein, When the upper electrode and the lower electrode in the same end electrical connection module are connected, a first sensing loop for detecting pressure signals is formed; when the upper electrodes of the two end electrical connection modules of the same finger are connected, a second sensing loop for detecting the bending degree of the finger is formed.

7. The flexible sensor and actuator integrated soft gripper according to any one of claims 1 to 6, wherein, The finger includes one short finger and four long fingers, the roots of which are connected to the palm, and each finger has at least one joint.

8. A method for manufacturing the flexible sensor and actuator integrated soft gripper according to claim 1, characterized in that, The method includes the following steps: 1) using an additive manufacturing method to manufacture a palm mold, an upper sensitive layer mold and a lower sensitive layer mold; 2) using multi-walled carbon nanotubes and PDMS to prepare carbon-based conductive silicone, pouring the carbon-based conductive silicone into the palm mold, the upper sensitive layer mold and the lower sensitive layer mold, and heating and curing to completely form the palm, the upper sensitive layer and the lower sensitive layer; and bonding the upper sensitive layer and the lower sensitive layer to obtain the flexible sensor module. 3) a flexible driving ink is prepared, the flexible driving ink is subjected to ink direct writing 3D printing, the upper driving layer and the lower driving layer are respectively prepared, the upper driving layer and the lower driving layer are subjected to ultraviolet curing, then the upper driving layer, the intermediate flexible electric heating layer and the lower driving layer are aligned and laminated, and the flexible driving structure is packaged; 4) the flexible driving structure is embedded in a groove on the surface of the flexible sensor module, the upper substrate, the upper electrode, the flexible sensor module, the lower electrode and the lower substrate are sequentially aligned and laminated, and the finger is packaged; 5) the above preparation steps are repeated to prepare other fingers; 6) the fingers are connected with the palm, and the flexible sensing and driving integrated soft gripper is obtained.

9. The method of claim 8, wherein, In step 4), the groove is arranged on the surface of the joint position of the flexible sensor module.

10. The method of claim 8, wherein, In step 2), the first sensitive microstructure unit is a stepped composite protrusion composed of a first cylinder with a large diameter and a second cylinder with a small diameter coaxially connected; the second sensitive microstructure unit is a prismatic protrusion with a triangular cross section and adjacent rectangular grooves; in the assembled state, the corner tip of the triangular prism is directly opposite the first cylinder, and the inclined surface of the triangular prism is directly opposite the second cylinder.

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