Polishing device and method driven by integrated ionic polymer metal composite material

Abstract

The invention belongs to the technical field of ultra-precision polishing, and discloses a polishing device and method driven by an integrated ionic polymer metal composite material. The device comprises a workbench, a controller, a robot, a main shaft clamp, a polishing main shaft, an integrated ionic polymer metal composite air bag polishing head, a workpiece, an optical platform and a micro strain gauge pressure detection device. The polishing head is of a multi-layer composite structure, an electro-bending actuator of the polishing head can achieve active deformation through low-pressure driving, the polishing head is precisely matched with the complex curved surface contour through a variable-curvature flexible attaching mechanism, precise regulation and control over local polishing pressure are synchronously achieved, and the profile precision of complex curved surface machining is guaranteed. In the polishing process, the deformation change of the attached surface is sensed in real time through a miniature strain gauge pressure detection device attached to the interior of the air bag, the deformation amount is converted into an electric signal to be transmitted to a controller, and the characterization polishing head deformation area is obtained through calculation. The controller dynamically adjusts and drives the electro-bending actuator according to the difference value of electric signals transmitted back by the micro strain gauge pressure detection device, and closed-loop control is formed. The problems that traditional air bag polishing local pressure cannot be finely adjusted, the adaptive complex curved surface morphology is poor, and real-time feedback is lacked are effectively solved, and the consistency of polishing precision and polishing quality is remarkably improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of ultra-precision polishing, and particularly relates to a polishing device and method integrated with ion polymer metal composite driving, which is especially suitable for ultra-precision polishing of complex workpieces such as aspheric surfaces, grooves, free-form surfaces and the like of materials such as optical crystals, aerospace high-temperature alloys and semiconductor silicon wafers. BACKGROUND

[0002] Under the background of continuous progress of processing technology and detection technology, complex curved surface parts are widely used in high-end fields such as optical manufacturing, aerospace, semiconductors and precision molds due to their unique advantages such as structural optimization and superior performance. However, due to the complex morphology and the thin-walled and easily deformed properties of complex curved surface optical elements, how to achieve high-precision polishing becomes an important challenge and key problem in related manufacturing fields.

[0003] The surface of complex curved surface optical elements is required to be super-smooth, and the surface accuracy and surface integrity directly determine the use performance of the terminal product. Air bag polishing has become a common solution for complex curved surface polishing due to its flexible fitting characteristics. However, the air bag surface and the workpiece contact will produce local depression due to pressure during polishing, and the edge and corner areas of the workpiece are prone to boundary effects of pressure concentration. The traditional air bag polishing can only adjust the air bag depression by controlling the global air pressure, and cannot achieve local precise adjustment. The depression is prone to pressure concentration, resulting in over-polishing and under-polishing in the non-fitting area. The edge collapses and the surface shape distorts due to the boundary effect, and there is a lack of real-time detection feedback, only open-loop processing, which is difficult to cope with dynamic deviations in the polishing process, seriously affecting the processing accuracy. Therefore, a polishing device and method integrated with ion polymer metal composite driving are designed. SUMMARY

[0004] The purpose of the application is to provide a polishing device and method integrated with ion polymer metal composite driving, which realizes high-precision and high-consistency flexible polishing of complex curved surface workpieces by controlling the synergistic effect of driving and real-time detection.

[0005] The technical scheme adopted by the application is:

[0006] The polishing device driven by integrated ionomer polymer metal composite comprises a workbench, a controller, a robot, a spindle clamp, a polishing spindle, an integrated ionomer polymer metal composite air bag polishing head, an optical platform and a micro strain gauge pressure sensing device. The workbench is used to realize the polishing work area; the controller is used to receive detection data and dynamically output regulation and control instructions, and each module realizes complete closed-loop polishing work; the robot is used to realize accurate adjustment of the spatial position and fitting angle of the spindle and the integrated ionomer polymer metal composite air bag polishing head; the spindle clamp is used to realize the fixation of the polishing spindle; the polishing spindle provides stable rotating speed; the integrated ionomer polymer metal composite air bag polishing head is used to realize flexible fitting with adjustable curvature and microscopic air bag depression correction, cooperatively eliminate boundary effect and stress concentration, and solve the problem of over-polishing or missed polishing; the optical platform is used to realize the fixation of the workpiece; and the micro strain gauge pressure sensing device realizes real-time monitoring of the air bag polishing contact state, and provides accurate feedback for closed-loop regulation and control.

[0007] The polishing method driven by integrated ionomer polymer metal composite comprises the following steps:

[0008] S1. Preprocessing of the polishing head, preprocessing the surface of the integrated ionomer polymer metal composite air bag polishing head (6) to remove oil stains and dust on the surface;

[0009] S2. Micro strain gauge mounting and calibration, mounting a micro strain gauge on the inner surface area of the electro-bending actuator (11) of the integrated ionomer polymer metal composite air bag polishing head (6) to constitute the micro strain gauge pressure detection device (16), and connecting it to the controller (2) for initial value calibration and sensor calibration;

[0010] S3. Workpiece fixation and preliminary fitting, the optical platform (8) is equipped with a vacuum chuck or other clamps to fix the workpiece (7), and the robot (3) drives the integrated ionomer polymer metal composite air bag polishing head (6) to preliminarily fit with the workpiece (7);

[0011] S4. Calibration of the detection system, starting the polishing spindle (5), and passing a low-voltage current of 0-5V to the electro-bending core layer (12) to make the integrated ionomer polymer metal composite air bag polishing head (6) bend towards the air bag side to the contact pressure of the workpiece (7) to the preset value, and real-time detect the contact pressure distribution and the deformation of the polishing head by the micro strain gauge pressure detection device (16) to complete the calibration;

[0012] S5. Polishing operation and real-time detection, the polishing operation is carried out, in the process, the controller (2) controls the robot (3) to drive the integrated ionomer metal composite air bag polishing head (8) to move along the preset path, and the polishing operation is carried out; in the process, the micro strain gauge pressure detection device (6) continuously monitors the regional contact pressure distribution and the polishing head deformation signal, and transmits the same to the controller (2) in real time;

[0013] S6. Closed-loop regulation and defect elimination, the controller (2) compares the real-time detected contact pressure distribution or deformation signal with the preset target value, and dynamically adjusts to control the deformation of the integrated ionomer metal composite air bag polishing head (6), so that the integrated ionomer metal composite air bag polishing head (6) can be kept in the expected polishing posture, and the driving voltage of the local electro-bending actuator (11) can be accurately adjusted, so that active variable-curvature flexible polishing is realized, the concave effect and the pressure concentration effect caused by the traditional air bag are compensated, and the boundary effect is eliminated.

[0014] Compared with the prior art, the present application has the following beneficial effects:

[0015] The present application drives flexible deformation by integrating the low-pressure driving electro-bending core layer of the air bag polishing layer, realizes variable-curvature flexible polishing, actively adapts to the complex morphology of the workpiece, realizes flexible fitting and micro air bag concave correction, cooperatively eliminates the boundary effect and stress concentration, effectively solves the problem of over-polishing or missed polishing, and widens the application scenarios.

[0016] The present application realizes the deformation of the air bag polishing head contact area of the complex surface by the micro strain gauge pressure sensing device, realizes real-time collection of polishing contact area data, real-time feedback, dynamic error correction, reduces dynamic deviation, and improves polishing precision.

[0017] The micro strain gauge pressure sensing device of the present application is a micro foil resistance strain gauge, which is distributed in a grid shape with a rotation center. The substrate is polyimide, which is attached to the inner surface of the electro-bending actuator by a special adhesive resistant to high temperature and corrosion of polishing liquid. The attachment area is pre-roughened and cleaned.

[0018] The present application realizes closed-loop control by wired electrical connection of the controller and the robot, the integrated ionomer metal composite air bag polishing head and the micro strain gauge pressure sensing device, combined with real-time detection of contact pressure distribution and dynamic adjustment of the polishing head deformation, which significantly improves the stability of the polishing posture.

[0019] The present application adopts a six-degree-of-freedom robot, reduces the time of manual intervention and process adjustment, reduces the process fluctuation caused by manual intervention through accurate regulation and real-time feedback, and effectively reduces the production cost. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1is a structural schematic diagram of the present application;

[0021] Figure 2 is a structural sectional view of the integrated ionomer polymer metal composite air bag polishing head structure of the present application;

[0022] Figure 3 is a schematic diagram of the layered structure of the electro-bending actuator in the present application;

[0023] Figure 4 is a polishing work flow chart of the present application;

[0024] Figure 5 is a simulation schematic diagram of the present application;

[0025] Wherein: 1, workbench; 2, controller; 3, robot; 4, spindle clamp; 5, polishing spindle; 6, integrated ionomer polymer metal composite air bag polishing head; 7, workpiece; 8, optical platform; 9, polishing head support; 10, locking nut; 11, electro-bending actuator; 12, electro-bending core layer; 13, metal electrode layer; 14, ionomer polymer matrix; 15, elastic packaging layer; 16, micro strain gauge pressure sensing device. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and function of the present application more clear, the present application will be further described in detail below with reference to the drawings.

[0027] The block diagram shown in the drawings is only a functional entity, which does not necessarily correspond to a physically independent entity.

[0028] As Figure 1 shown, the present application provides a polishing device driven by integrated ionomer polymer metal composite, which comprises: a workbench 1, which provides a stable foundation for the whole system; a controller 2, which serves as the control center of the polishing system; a robot 3, which is fixedly installed on the workbench 1, preferably a six-axis industrial robot, used to realize accurate adjustment of the spatial position and fitting angle of the polishing spindle 5 and the polishing head, and to adapt to complex curved surface global coverage; a spindle clamp 4, which is installed on the end flange of the robot 3; a polishing spindle 5, which is firmly clamped by the spindle clamp 4, preferably a high-frequency electric spindle, capable of providing stable speed and integrated with a through hole for guiding the driving wire; an integrated ionomer polymer metal composite air bag polishing head 6, which is installed on the output end of the polishing spindle 5 through threaded connection or interference fit, rotates with the spindle, and is the core component for performing polishing work, realizing variable-curvature flexible polishing; an optical platform 8, which is placed on the workbench 1, used to fix the workpiece 7 through a vacuum chuck or other clamps, and equipped with a polyurethane shock pad for shock absorption, ensuring detection accuracy.

[0029] As Figure 2As shown, the integrated ionomer polymer metal composite airbag polishing head 6 specifically includes: a polishing head support 9, the upper part of which is installed on the output end of the polishing spindle 5 through threaded connection or interference fit, and rotates with the spindle 5; a locking nut 10 for tightly fixing the internal components on the polishing head support 9, adopting a locking structure design, and the polishing head support 9 is fastened by the threaded pair of the electric bending actuator 11; the electric bending actuator 11 is the main driving component of the polishing head.

[0030] As shown in Figure 3 , the electric bending actuator 11 adopts a multi-layer composite structure, specifically including: an electric bending core layer 12 and an elastic packaging layer 15, wherein the electric bending core layer 12 is composed of an ionomer polymer matrix 14 and a metal electrode layer 13 formed on the upper and lower two opposite surfaces by chemical electroplating method, and at least one of Li+, Na + , K + , Ca2 + + cations is pre-injected into the ionomer polymer matrix 14 to optimize its driving performance; the elastic packaging layer 15 is made of high-elastic and wear-resistant polyurethane rubber, which is completely wrapped on the outer surface of the electric bending core layer 12 by molding or coating process, and the outer surface is coated with a wear-resistant coating to play the role of sealing, insulation, protection and providing a polishing contact surface, and constitutes the contact surface during polishing operation, and the thickness ratio of the elastic packaging layer 15 to the electric bending core layer 12 is 3:1~10:1. The micro strain gauge pressure sensing device is attached to the inner surface of the electric bending core layer 12 to realize real-time detection of the polishing head pressure or deformation, and the deformation condition is converted into an electrical signal into the controller (2), and the controller (2) actively drives the electric bending actuator (11) after information processing, adjusts the concave part of the contact area, and flexibly fits the complex curved workpiece (7) to complete the polishing operation.

[0031] As shown in Figure 4 , the method for polishing using the above device includes the following steps:

[0032] S1. Polishing surface pretreatment. The elastic packaging layer 15 of the integrated ionomer polymer metal composite airbag polishing head 6 is carefully wiped with anhydrous ethanol or acetone solution to completely remove the oil stains and dust that may be contaminated during processing and storage, and to ensure good polishing quality.

[0033] S2. Micro strain gauge mounting and calibration, the micro strain gauge is attached to the inner surface area of the electric bending actuator 11 of the integrated ionomer polymer metal composite airbag polishing head 6 to constitute the micro strain gauge pressure detection device 16, and is connected to the controller 2 for initial value calibration and sensor calibration.

[0034] S3. Workpiece 7 fixation and initial contact. The workpiece 7 is fixed on the optical platform 8 with vacuum chuck or other gripping devices. The robot 3 drives the integrated IPMC airbag polishing head 6 to make initial contact with the workpiece 7.

[0035] S4. Calibration of the detection system. Start the polishing spindle 5, and apply 0-5V low voltage current to the electro-bending core layer 12, so that the integrated IPMC airbag polishing head 6 bends towards the airbag side to the contact pressure of the workpiece 7 to the preset value. The contact pressure distribution and the deformation of the polishing head are detected in real time by the micro strain gauge pressure detection device 16, and the calibration is completed.

[0036] S5. Start the system and initial deformation control. Start the polishing spindle 5, and drive the integrated IPMC airbag polishing head 6 to rotate at a preset speed. At the same time, low-frequency alternating current is applied to the two metal electrode layers 13 of the electro-bending core layer 12 through the slip ring in the polishing spindle 5. The IPMC will undergo ion migration and volume change under the action of the electric field, causing the entire actuator to bend to one side, thereby causing the polishing head to deform to an initial angle suitable for polishing contact. In this process, the micro strain gauge pressure detection device 6 continuously monitors the contact pressure distribution and the deformation signal of the polishing head, and transmits it to the controller 2 in real time.

[0037] S6. Closed-loop regulation and defect elimination. The core processor of the controller 2 compares the real-time detected contact pressure distribution or deformation signal in step S5 with the preset target value, dynamically adjusts, and calculates the error value. Based on the PID control algorithm preset, the size and polarity of the driving current output to the electro-bending core layer 12 are dynamically adjusted according to the size and sign of the error, so that the deformation of the contact area between the integrated IPMC airbag polishing head 6 and the workpiece 7 is kept more closely to the polishing surface, avoiding local depression or edge effect. Through this continuous feedback and adjustment, a closed-loop control system is formed, which can actively and accurately control the deformation of the polishing head to the expected polishing posture that matches the ideal workpiece 7 surface, so as to obtain consistent and extremely high material removal effect on the entire polishing path.

[0038] As Figure 5The simulation results of the application are shown in the figure. The integrated ionomer polymer metal composite airbag polishing head 6 used in the device has a continuous and smooth gradient characteristic in the contact pressure distribution diagram under the two typical working pressure conditions of 0.2 MPa and 0.4 MPa, and there is no pressure interruption or mutation area. This confirms that the polishing head has excellent flexible interface characteristics, can actively adapt to the curvature change of the workpiece surface, and realize large-area uniform and close contact. Under different pressure loads, the electro-bending actuator 11 can effectively compensate for the local depression of the elastic packaging layer caused by the contact with the workpiece surface through the driving flexible deformation, maintain the integrity of the contact area pressure distribution, and thus ensure the dynamic compensation ability of local geometric defects and the stability of the polishing process. This feature fundamentally avoids the local over-polishing or under-polishing caused by the shape mismatch of the traditional airbag polishing tool, and highlights the significant technical advantages of the device in realizing high-precision and high-consistency polishing.

[0039] The application has the characteristics of high efficiency, high precision and simple operation in the polishing process of complex curved surface optical elements.

[0040] It can be understood that the application is described through some embodiments, and those skilled in the art know that various changes or equivalent replacements can be made to the features and embodiments without departing from the spirit and scope of the application. In addition, under the guidance of the application, the features and embodiments can be modified to adapt to specific conditions and materials without departing from the spirit and scope of the application. Therefore, the application is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of the application are within the scope of the application.

Claims

1. A polishing device driven by an integrated ion-polymer metal composite material, characterized in that: It includes a worktable (1), a controller (2), a robot (3), a spindle fixture (4), a polishing spindle (5), an integrated ion polymer metal composite airbag polishing head (6), a workpiece (7), an optical platform (8), and a micro strain gauge pressure detection device (16).

2. The polishing device driven by an integrated ion-polymer metal composite material according to claim 1, characterized in that: The controller (2) is connected to the robot (3), polishing spindle (5), integrated ion polymer metal composite airbag polishing head (6) and micro strain gauge pressure detection device (16) via wired connection to form a closed-loop system, and the response time is adjusted to ≤10ms.

3. The polishing device driven by an integrated ion-polymer metal composite material according to claim 1, characterized in that: The integrated ion polymer metal composite airbag polishing head (6) includes a polishing head bracket (9), a locking nut (10), and an electro-bending actuator (11).

4. The polishing device driven by an integrated ion-polymer metal composite material according to claim 3, characterized in that: The electro-bending actuator (11) includes an electro-bending core layer (12) and an elastic encapsulation layer (16); the electro-bending core layer (12) is composed of an ion polymer matrix (14) and metal electrode layers (13) on two opposing surfaces of the matrix; the elastic encapsulation layer (15) wraps the outer surface of the electro-bending core layer (12).

5. The polishing device driven by an integrated ion-polymer metal composite material according to claim 3, characterized in that: The lead wire of the electro-bending actuator (11) is made of ultra-fine silicone waterproof wire. The lead wire is fixed to the metal electrode layer (13) by adhesive bonding or laser welding. The connection is sealed with heat shrink tubing and wrapped with waterproof adhesive. The lead wire is led out through the sealed outlet hole at the tail of the polishing head bracket (9). The outlet hole is equipped with a fluororubber sealing ring to prevent polishing fluid leakage.

6. The polishing device driven by an integrated ion-polymer metal composite material according to claim 4, characterized in that: Li is dispersed within the polymer substrate. + Na + K + Ca 2 At least one cation; the metal electrode layer is a platinum electrode or a gold electrode formed by chemical electroplating.

7. The polishing device driven by an integrated ion-polymer metal composite material according to claim 4, characterized in that: The elastic encapsulation layer is a polyurethane rubber layer.

8. A polishing method driven by an integrated ion-polymer metal composite material, characterized in that, The polishing apparatus driven by the integrated ion-polymer metal composite material as described in claim 1 includes the following steps: S1. Polishing head pretreatment: The surface of the integrated ion polymer metal composite airbag polishing head (6) is pretreated to remove oil and dust from its surface. S2. Micro-strain gauge mounting and calibration: Micro-strain gauges are mounted on the inner surface area of ​​the electro-bending actuator (11) of the integrated ion polymer metal composite airbag polishing head (6) to form the micro-strain gauge pressure detection device (16), and connected to the controller (2) for initial value calibration and sensor calibration. S3. Fixing and initial bonding of the workpiece: The workpiece (7) is fixed by a vacuum suction cup or other clamp on the optical platform (8). The robot (3) drives the integrated ion polymer metal composite material airbag polishing head (6) to initially bond with the workpiece (7). S4. Detection system calibration: Start the polishing spindle (5) and pass a 0-5V low voltage current through the electro-bending core layer (12) to make the integrated ion polymer metal composite airbag polishing head (6) bend towards the airbag side until the contact pressure of the workpiece (7) reaches the preset value. The contact pressure distribution and polishing head deformation are detected in real time by the micro strain gauge pressure detection device (16) to complete the calibration. S5. Polishing operation and real-time detection: Polishing operation is carried out. During this process, the controller (2) controls the robot (3) to drive the integrated ion polymer metal composite material airbag polishing head (8) to move along the preset path to carry out polishing operation. During the process, the micro strain gauge pressure detection device (6) continuously monitors the area contact pressure distribution and polishing head deformation signal, and transmits it to the controller (2) in real time. S6. Closed-loop control and defect elimination: The controller (2) adopts a PID adaptive algorithm to compare the contact pressure distribution or deformation signal detected in real time with the preset target value and dynamically adjust it to control the deformation of the integrated ion polymer metal composite airbag polishing head (6) so that it is kept in the expected polishing posture. The driving voltage of the local electro-bending actuator (11) is precisely adjusted to achieve active variable curvature flexible polishing, compensate for the indentation effect and pressure concentration effect caused by the traditional airbag, and eliminate the boundary effect.

9. A polishing method driven by an integrated ion-polymer metal composite material according to claim 8, characterized in that: The S5 micro strain gauge pressure detection device includes the following steps: S51. During the high-speed rotation of the polishing head, the micro-strain gauge pressure sensing device (11) attached to its surface senses the local strain; S52. The micro strain gauge converts the strain signal into an electrical signal and transmits it to the signal processing unit of the controller (2); S53. The controller (2) filters, amplifies and solves the received multi-channel strain signals to obtain the deformation distribution of the polishing head and the pressure information of the area in contact with the workpiece in real time. S54. The controller (2) determines the current posture of the polishing head and its contact with the workpiece based on the calculated deformation and pressure information.

10. The polishing method driven by an integrated ion polymer metal composite material according to claim 8, characterized in that: The micro strain gauge pressure sensing device is a micro foil resistance strain gauge, which is distributed and attached in a grid pattern around the rotation center. Its substrate is polyimide, and it is attached to the inner surface of the electro-actuated bending actuator with a special adhesive that is resistant to high temperature and polishing fluid corrosion. The attachment area is pre-treated by surface roughening and cleaning.

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