Film tearing clamping jaw device and full-automatic film expanding machine

Abstract

The invention provides a film tearing clamping jaw device and a full-automatic film expanding machine, and belongs to the technical field of semiconductor preparation. The film tearing clamping jaw device comprises a driving piece and two clamping assemblies. The two clamping assemblies are connected with the driving part so that the two clamping assemblies can be driven by the driving part to be closed or opened mutually. The two clamping assemblies are each provided with a clamping face, the clamping faces are opposite outer walls when the two clamping assemblies are closed, the two clamping faces are each provided with a plurality of air blowing holes, the air blowing holes are distributed at intervals, and the diameter of each air blowing hole is 1-5 mm. According to the film tearing clamping jaw device, the waste film can be effectively prevented from being adhered to the film tearing clamping jaw device due to static electricity.

Description

Film tearing gripper device and fully automatic film expanding machine Technical Field

[0001] This disclosure belongs to the field of semiconductor fabrication technology, and specifically relates to a film-tearing gripper device and a fully automatic film expander. Background Technology

[0002] A fully automatic film expansion machine is a device used to prepare semiconductor devices.

[0003] In related technologies, fully automatic film expanding machines include a film tearing gripper device, which is used to hold waste film and tear it off the iron ring.

[0004] However, in cleanrooms, the contact and friction between objects of different materials can generate a large amount of static electricity. This causes the waste film to adhere to the tearing gripper after it is torn off, making it difficult to remove. Manual demolding is required, which not only wastes labor costs but also affects work efficiency. Summary of the Invention

[0005] This disclosure provides a film-tearing gripper device and a fully automatic film expanding machine, which can effectively prevent waste film from adhering to the film-tearing gripper device due to static electricity. The technical solution is as follows: In a first aspect, this disclosure provides a film-tearing gripper device, including: a driving member and two clamping components; the two clamping components are respectively connected to the driving member, so that the two clamping components can close or open with each other under the drive of the driving member; both clamping components have clamping surfaces, which are the opposite outer walls when the two clamping components are closed with each other, and both clamping surfaces have multiple air holes, which are arranged at intervals and the diameter of the air holes is 1~5mm.

[0006] In one implementation of this disclosure, the clamping surface has a hole arrangement trajectory, and the extension direction of the hole arrangement trajectory is consistent with the extension direction of the outer edge of the clamping surface; a plurality of air blowing holes are arranged sequentially at intervals along the extension direction of the hole arrangement trajectory.

[0007] In another implementation of this disclosure, the number of hole arrangement trajectories is at least two; the at least two hole arrangement trajectories are spaced apart from each other, and the air holes on each hole arrangement trajectory correspond one-to-one.

[0008] In another implementation of this disclosure, the distance between two adjacent air holes on the same hole arrangement trajectory is 1~5mm; the distance between two corresponding air holes on two adjacent hole arrangement trajectories is 1~5mm.

[0009] In another implementation of this disclosure, the clamping surface has a first clamping portion, a second clamping portion, and a spacer groove; the spacer groove is located between the first clamping portion and the second clamping portion, and the opening of the spacer groove is located on the same plane as the first clamping portion and the second clamping portion.

[0010] In another implementation of this disclosure, the first clamping portion is closer to the outer edge of the clamping surface than the second clamping portion; at least a portion of the air blowing holes are located in the first clamping portion.

[0011] In another implementation of this disclosure, the clamping surface has an insulating and non-stick coating; all the air holes are located within the insulating and non-stick coating.

[0012] In another implementation of this disclosure, the film-tearing gripper device further includes an ion air bar; the outlet of the ion air bar faces the clamping surface.

[0013] In another implementation of this disclosure, the clamping assembly includes a first clamping member and a second clamping member; the first clamping member and the second clamping member are arranged side by side with a gap, and one end of the first clamping member and the second clamping member are respectively connected to the driving member, and the clamping surface is located at the other end of the first clamping member and the second clamping member.

[0014] Secondly, embodiments of this disclosure provide a fully automatic film expanding machine, including the film tearing gripper device described in the first aspect.

[0015] The beneficial effects of the technical solution provided in this disclosure are as follows: The film-tearing gripper device provided in this disclosure includes a driving member and two clamping components. The two clamping components can close or open with each other under the drive of the driving member, thereby clamping or releasing the waste film. When the two clamping components are closed, their clamping surfaces face each other and fit together, thereby clamping the waste film. When the two clamping components are opened, their clamping surfaces become spaced apart, and the air blowing hole outputs airflow, allowing the waste film to detach from the clamping surface. Furthermore, since the diameter of the air blowing hole is 1~5mm, the small diameter effectively increases the airflow velocity when the gas flow rate is constant, which is beneficial for blowing the waste film away from the clamping surface.

[0016] In other words, by setting air holes on the clamping surface and designing the diameter of the air holes to be 1~5mm, the waste film can be effectively blown away from the clamping surface, solving the problem of waste film adhering to the film tearing gripper device due to static electricity. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 is a structural schematic diagram of the film-tearing gripper device provided in an embodiment of this disclosure; Figure 2 is a schematic diagram of the arrangement of air blowing holes provided in an embodiment of this disclosure.

[0019] The symbols in the diagram represent the following meanings: 10, driving component; 20, clamping assembly; 210, clamping surface; 211, first clamping part; 212, second clamping part; 213, spacer groove; 220, air blowing hole; 230, hole arrangement trajectory; 240, first clamping member; 241, clamping plate; 2411, clamping part; 2412, connecting part; 2413, groove; 242, swing arm; 250, second clamping member.

[0020] The accompanying drawings have illustrated specific embodiments of this disclosure, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concepts of this disclosure to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this disclosure clearer, the embodiments of this disclosure will be described in further detail below with reference to the accompanying drawings.

[0022] This disclosure provides a film-tearing gripper device. Figure 1 is a schematic diagram of the structure of the film-tearing gripper device. Referring to Figure 1, in this embodiment, the film-tearing gripper device includes a drive member 10 and two clamping components 20.

[0023] The two clamping components 20 are respectively connected to the driving component 10 so that the two clamping components 20 can close or open with each other under the drive of the driving component 10.

[0024] Both clamping components 20 have clamping surfaces 210, which are the opposite outer walls of the two clamping components 20 when they are closed together. Both clamping surfaces 210 have multiple air holes 220, which are arranged at intervals and have a diameter of 1~5mm.

[0025] The film-tearing gripper device provided in this embodiment includes a driving member 10 and two gripping assemblies 20. The two gripping assemblies 20 can close or open with each other under the drive of the driving member 10, thereby clamping or releasing the waste film. When the two gripping assemblies 20 are closed, their gripping surfaces 210 face each other and fit together, thus clamping the waste film. When the two gripping assemblies 20 are opened, their gripping surfaces 210 become spaced apart, and the air outlet 220 outputs airflow, allowing the waste film to detach from the gripping surfaces 210. Furthermore, since the diameter of the air outlet 220 is 1-5 mm, its small diameter effectively increases the airflow velocity under a constant gas flow rate, thus facilitating the blowing of the waste film away from the gripping surfaces 210.

[0026] In other words, by setting an air hole 220 on the clamping surface 210 and designing the diameter of the air hole 220 to be 1~5mm, the waste film can be effectively blown away from the clamping surface 210, thus solving the problem of the waste film adhering to the film tearing gripper device due to static electricity.

[0027] As described above, in this embodiment, by reducing the diameter of the blowing hole 220, the flow rate of the gas output from a single blowing hole 220 is effectively increased, which is beneficial for blowing the waste membrane away from the clamping surface 210. In addition, this embodiment also increases the total blowing area, that is, the cross-sectional area through which the gas output from all the blowing holes 220 flows. This will be explained below.

[0028] Figure 2 is a schematic diagram of the arrangement of the air holes 220. Referring to Figure 2, in this embodiment, the clamping surface 210 has a hole arrangement trajectory 230, and the extending direction of the hole arrangement trajectory 230 is consistent with the extending direction of the outer edge of the clamping surface 210. Multiple air holes 220 are arranged sequentially at intervals along the extending direction of the hole arrangement trajectory 230.

[0029] In the above implementation, the hole arrangement trajectory 230 is a virtual trajectory line used to plan the arrangement of the air holes 220. Since the extension direction of the hole arrangement trajectory 230 is consistent with the extension direction of the outer edge of the clamping surface 210, arranging each air hole 220 sequentially and at intervals along the extension direction of the hole arrangement trajectory 230 can ensure that each air hole 220 is sequentially and at intervals along the extension direction of the outer edge of the clamping surface 210.

[0030] It is worth noting that the outer edge of the clamping surface 210 is the edge of the clamping surface 210 away from the driving member 10, and the outer edge of the clamping surface 210 is used to clamp the waste film. Therefore, arranging the air holes 220 sequentially at intervals along the extension direction of the outer edge of the clamping surface 210 can facilitate the blowing away of the waste film.

[0031] For example, the outer edge of the clamping surface 210 is an outwardly convex arc shape.

[0032] This design makes it easy to clamp the waste film.

[0033] For example, there are at least two hole arrangement tracks 230. The at least two hole arrangement tracks 230 are spaced apart from each other, and the air holes 220 on each hole arrangement track 230 correspond one-to-one.

[0034] In the above implementation, by increasing the number of hole arrangement trajectories 230, it is easier to plan a larger number of air holes 220, so that a larger number of air holes 220 are reasonably arranged on the clamping surface 210 to ensure the blowing effect on the waste film.

[0035] In this embodiment, there are two hole arrangement trajectories 230.

[0036] Referring again to Figure 2, by way of example, on the same hole arrangement trajectory 230, the distance between two adjacent air holes 220 is 1~5mm.

[0037] In this embodiment, the distance between two adjacent air holes 220 on the same hole arrangement trajectory 230 is 3mm.

[0038] For example, the distance between two corresponding air holes 220 on two adjacent hole arrangement trajectories 230 is 1~5mm.

[0039] In this embodiment, the distance between two corresponding air holes 220 on two adjacent hole arrangement trajectories 230 is 3mm.

[0040] Referring again to FIG1, in this embodiment, the clamping surface 210 has a first clamping portion 211, a second clamping portion 212, and a spacer groove 213.

[0041] The interval groove 213 is located between the first clamping part 211 and the second clamping part 212, and the groove opening of the interval groove 213 is on the same plane as the first clamping part 211 and the second clamping part 212.

[0042] In the above implementation, the clamping surface 210 is divided into three parts: a first clamping part 211, a second clamping part 212, and a spacer groove 213. The first clamping part 211 and the second clamping part 212 work together to clamp the waste film, while the spacer groove 213 is located between the first clamping part 211 and the second clamping part 212, so it typically does not directly contact the waste film. This appropriately reduces the contact area between the clamping surface 210 and the waste film, thereby reducing the adhesion of electrostatic charge to the waste film.

[0043] In other embodiments, the clamping surface 210 can also be divided into other numbers of regions according to actual needs, and their arrangement is similar to the first clamping part 211, the second clamping part 212 and the spacer groove 213 described above. This disclosure does not limit this.

[0044] In this embodiment, the first clamping part 211 is closer to the outer edge of the clamping surface 210 than the second clamping part 212, and at least part of the air blowing hole 220 is located in the first clamping part 211.

[0045] In the above implementation, since the first clamping part 211 is close to the outer edge of the clamping surface 210, the first clamping part 211 is the main area for clamping the waste film. Therefore, by providing at least a portion of the air blowing holes 220 in the first clamping part 211, the waste film can be effectively blown away.

[0046] In some examples, all air holes 220 are located in the first clamping part 211.

[0047] In other examples, some of the air vents are located in the first clamping part 211, and the other part of the air vents are located in the second clamping part 212.

[0048] In some other examples, some air vents are located in the first clamping part 211, some air vents are located in the second clamping part 212, and some air vents are located in the spacer groove 213.

[0049] It is worth noting that since the thickness of the first clamping part 211 and the second clamping part 212 is greater than the thickness of the spacer groove 213, it is more advantageous to set the air blowing hole 220 and its related pipes in the first clamping part 211 and the second clamping part 212. The air blowing hole 220 is preferentially set in the first clamping part 211 and the second clamping part 212.

[0050] Of course, air holes 220 can also be provided in the interval groove 213. It is only necessary to adjust the relevant pipes of the air holes 220 in the interval groove 213 appropriately, such as reducing their size.

[0051] In this embodiment, the clamping surface 210 has an insulating and non-stick coating. The air holes 220 are all located within the insulating and non-stick coating.

[0052] In the above implementation, by providing an insulating and anti-stick coating on the clamping surface 210, the probability of waste film adhesion can be effectively reduced.

[0053] In this embodiment, the insulating and non-stick coating is a rubber film.

[0054] In other embodiments, the insulating and anti-stick coating is a rubber backing. The main difference between a rubber backing and a rubber film is their thickness. The rubber backing has stronger insulation capabilities and provides a gentler grip on the waste film, preventing damage to the waste film and thus avoiding waste film debris contaminating the production environment.

[0055] For example, an insulating and non-stick coating is provided on the first clamping part 211 and the second clamping part 212.

[0056] In this embodiment, the film-tearing gripper device also includes an ion air bar, the air outlet of which faces the gripping surface 210.

[0057] The ion wind bar can generate a large number of air masses with positive and negative charges, thereby neutralizing the charges on the object (waste film or clamping surface 210) and thus achieving the purpose of eliminating static electricity.

[0058] For example, the ion air bar is connected to the drive unit 10. In order to facilitate the integration of the ion air bar into the film tearing gripper device, the ion air bar is an air-source-free type, that is, it can blow air by itself without connecting to an additional air source.

[0059] Referring again to Figure 1, in this embodiment, the clamping assembly 20 includes a first clamping member 240 and a second clamping member 250. The first clamping member 240 and the second clamping member 250 are arranged side by side with a gap between them, and one end of the first clamping member 240 and the second clamping member 250 are respectively connected to the driving member 10, and the clamping surface 210 is located at the other end of the first clamping member 240 and the second clamping member 250.

[0060] In the above implementation, the first clamping member 240 and the second clamping member 250 are arranged side by side to form the clamping assembly 20. During the process of the clamping assembly 20 closing or opening with each other, the first clamping member 240 and the second clamping member 250 move synchronously, so that the first clamping member 240 and the second clamping member 250 act as a whole to clamp the waste film together or to release the waste film together.

[0061] When the waste film adheres to the clamping assembly 20, the first clamping member 240 and the second clamping member 250 can be driven respectively to make the first clamping member 240 and the second clamping member 250 misaligned, thereby loosening the waste film so that it can be detached.

[0062] In this embodiment, the structures of the first clamping member 240 and the second clamping member 250 are basically the same, and the first clamping member 240 will be used as an example for explanation.

[0063] In this embodiment, the first clamping member 240 includes a clamping plate 241 and a swing arm 242. One end of the swing arm 242 is connected to the driving member 10, and the other end of the swing arm 242 is connected to the clamping plate 241. The driving member 10 can drive the clamping plate 241 to move through the swing arm 242.

[0064] For example, when the first clamping member 240 and the second clamping member 250 are synchronized, the swing arms of the first clamping member 240 and the second clamping member 250 are parallel to each other, and the clamping plates of the first clamping member 240 and the second clamping member 250 are located on the same plane to jointly form the clamping surface 210.

[0065] In this embodiment, the clamping plate 241 includes a clamping part 2411 and a connecting part 2412. The clamping surface 210 is located in the clamping part 2411. One end of the connecting part 2412 is connected to the clamping part 2411, and the other end of the connecting part 2412 has a groove 2413. The swing arm 242 is inserted into the groove 2413, and the swing arm 242 is connected to the bottom of the groove 2413.

[0066] In the above implementation, the clamping plate 241 is divided into two parts: a clamping part 2411 and a connecting part 2412. The clamping part 2411 is used to clamp the waste film, and the connecting part 2412 is used to connect the swing arm. This design effectively isolates the clamping surface 210, avoiding interference from other components and improving the reliability of clamping the waste film.

[0067] Furthermore, by placing the swing arm 242 within the groove 2413, the swing arm 242 can be prevented from protruding from the clamping plate 241, thereby avoiding the possibility of interference or collision during the swinging process.

[0068] The working process of the film-tearing gripper device provided in this embodiment is briefly described below: First, the first clamping member 240 and the second clamping member 250 are driven to unfold by the driving member 10, thereby opening the two clamping surfaces 210.

[0069] Next, the ion air bar is activated, and the two clamping surfaces 210 are moved to the waste film that needs to be peeled off. The first clamping component 240 and the second clamping component 250 are driven to close by the driving component 10, so that the waste film is clamped by the two clamping surfaces 210.

[0070] Then, the drive film-tearing gripper is moved to peel off the waste film.

[0071] Finally, the first clamping member 240 and the second clamping member 250 are deployed by the driving member 10, thereby opening the two clamping surfaces 210. On the one hand, since the ion bar can generate a large number of gas clouds with positive and negative charges, it can eliminate static electricity on the clamping surfaces 210, thus preventing the waste film from being electrostatically adsorbed onto the clamping surfaces. On the other hand, since the clamping surfaces 210 are provided with an insulating and non-stick coating, it can also prevent the waste film from being electrostatically adsorbed onto the clamping surfaces.

[0072] If the waste membrane still fails to detach smoothly, then start the air pump connected to the air blowing hole 220, so that the waste membrane is detached from the clamping surface 210 under the blowing of the airflow.

[0073] In other words, the film-tearing gripper device provided in this embodiment can effectively solve the problem of waste film adhering to the film-tearing gripper device due to static electricity through various measures.

[0074] This disclosure provides a fully automatic film expanding machine, which includes the film tearing gripper device shown in Figures 1 and 2.

[0075] The fully automated film expansion machine provided in this disclosure can be applied to the fabrication of semiconductor chips and achieve fully automated film expansion.

[0076] In semiconductor chip manufacturing, wafers are diced into numerous densely packed tiny grains. These grains are attached to an adhesive film for transport and dicing. After dicing, the grain spacing is too small, making inspection, sorting, or picking difficult. A fully automated film expander can uniformly stretch the adhesive film along with the grains, thereby increasing the spacing between the grains; this process is called film expansion.

[0077] Because the fully automatic film expanding machine provided in this embodiment includes a film-tearing gripper device, the two gripping components 20 of the film-tearing gripper device can close or open with each other under the drive of the drive member 10, thereby achieving the clamping or releasing of waste film. When the two gripping components 20 are closed, the clamping surfaces 210 of the two gripping components 20 face each other and fit together, thereby achieving the clamping of waste film. When the two gripping components 20 are opened, the clamping surfaces 210 of the two gripping components 20 become spaced apart, and the air blowing hole 220 outputs airflow, allowing the waste film to detach from the clamping surface 210. Furthermore, since the diameter of the air blowing hole 220 is 1~5mm, the diameter of the air blowing hole 220 is relatively small, which can effectively increase the airflow velocity when the gas flow rate is constant, thereby facilitating the blowing of waste film away from the clamping surface 210.

[0078] In other words, by setting an air hole 220 on the clamping surface 210 and designing the diameter of the air hole 220 to be 1~5mm, the waste film can be effectively blown away from the clamping surface 210, thus solving the problem of the waste film adhering to the film tearing gripper device due to static electricity.

[0079] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” “third,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms “an” or “a” and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “comprising” or “including” and similar terms mean that the elements or objects preceding “comprising” or “including” encompass the elements or objects listed following “comprising” or “including” and their equivalents, and do not exclude other elements or objects. The terms “connected” or “linked” and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper,” “lower,” “left,” “right,” etc., are used only to indicate relative positional relationships; when the absolute position of the described objects changes, the relative positional relationship may also change accordingly.

[0080] The above description is merely an optional embodiment of this disclosure and is not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A film-tearing gripper device, characterized in that, include: A driving element (10) and two clamping assemblies (20); the two clamping assemblies (20) are respectively connected to the driving element (10) so that the two clamping assemblies (20) can close or open with each other under the drive of the driving element (10); both clamping assemblies (20) have clamping surfaces (210), the clamping surfaces (210) are the opposite outer walls when the two clamping assemblies (20) are closed with each other, and both clamping surfaces (210) have multiple air holes (220), the multiple air holes (220) are arranged at intervals, and the diameter of the air holes (220) is 1~5mm.

2. The film-tearing gripper device according to claim 1, characterized in that, The clamping surface (210) has a hole arrangement trajectory (230), and the extension direction of the hole arrangement trajectory (230) is consistent with the extension direction of the outer edge of the clamping surface (210); a plurality of air blowing holes (220) are arranged sequentially at intervals along the extension direction of the hole arrangement trajectory (230).

3. The film-tearing gripper device according to claim 2, characterized in that, The number of the hole arrangement trajectory (230) is at least two; the at least two hole arrangement trajectories (230) are spaced apart from each other, and the air holes (220) on each hole arrangement trajectory (230) correspond one-to-one.

4. The film-tearing gripper device according to claim 3, characterized in that, On the same hole arrangement trajectory (230), the distance between two adjacent air holes (220) is 1~5mm; the distance between two corresponding air holes (220) on two adjacent hole arrangement trajectories (230) is 1~5mm.

5. The film-tearing gripper device according to any one of claims 1 to 4, characterized in that, The clamping surface (210) has a first clamping part (211), a second clamping part (212), and a spacer groove (213); the spacer groove (213) is located between the first clamping part (211) and the second clamping part (212), and the opening of the spacer groove (213) is on the same plane as the first clamping part (211) and the second clamping part (212).

6. The film-tearing gripper device according to claim 5, characterized in that, The first clamping part (211) is closer to the outer edge of the clamping surface (210) than the second clamping part (212); at least part of the air blowing hole (220) is located in the first clamping part (211).

7. The film-tearing gripper device according to any one of claims 1 to 4, characterized in that, The clamping surface (210) has an insulating and non-stick coating; the air holes (220) are all located within the insulating and non-stick coating.

8. The film-tearing gripper device according to any one of claims 1 to 4, characterized in that, The film-tearing gripper device also includes an ion air bar; the air outlet of the ion air bar faces the clamping surface (210).

9. The film-tearing gripper device according to any one of claims 1 to 4, characterized in that, The clamping assembly (20) includes a first clamping member (240) and a second clamping member (250); the first clamping member (240) and the second clamping member (250) are arranged side by side with a gap, and one end of the first clamping member (240) and the second clamping member (250) are respectively connected to the driving member (10), and the clamping surface (210) is located at the other end of the first clamping member (240) and the second clamping member (250).

10. A fully automatic film expanding machine, characterized in that, Includes the film-tearing gripper device as described in any one of claims 1 to 9.

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