A three-dimensional macro-micro composite positioning stage

Abstract

This invention relates to the field of precision drive and positioning technology, and discloses a three-dimensional macro-micro composite positioning stage, which includes a stage body, an X-axis motion component, a Y-axis motion component, a Z-axis motion component, and a mobile terminal platform connected to the X-axis motion component, Y-axis motion component, and Z-axis motion component respectively. The X-axis motion component includes an X-axis macro-drive and an X-axis micro-drive; the Y-axis motion component includes a Y-axis macro-drive and a Y-axis micro-drive; the Z-axis motion component includes a Z-axis macro-drive and a Z-axis micro-drive, used to jointly drive the mobile terminal platform to linear motion along the X-axis, Y-axis, and Z-axis. This invention balances large stroke and high precision, achieving three-dimensional positioning with millimeter-level stroke and nanometer-level precision. The X-axis, Y-axis, and Z-axis micro-drives use piezoelectric ceramic direct drive, resulting in high positioning accuracy and fast response speed. The overall structure of this invention is reasonable and compact, and its operation is reliable.

Description

Technical Field

[0001] This invention belongs to the field of precision drive and positioning technology, and specifically relates to a three-dimensional macro-micro composite positioning stage. Background Technology

[0002] With the continuous advancement of microelectronics, precision lasers, and micro / nano fabrication technologies, nanoscale positioning technology has been widely applied in many fields. Nanoscale positioning technology is a crucial foundation for large-scale integrated circuit fabrication, micro / nano manipulation and optical positioning, microelectromechanical systems (MEMS) manufacturing and assembly, large-area high-precision diffraction grating fabrication, and cell manipulation. Traditional nanoscale precision positioning platforms are typically composed of compliant mechanisms driven by piezoelectric ceramics. As research in the microscopic field shifts towards industrial applications, the limited range of motion of piezoelectric ceramics significantly restricts the promotion of related technologies, making large-stroke, high-precision positioning platforms a research target. Existing three-dimensional positioning platforms struggle to simultaneously achieve large stroke and high precision, and are often structurally complex and bulky.

[0003] Based on the above, the current problem to be solved is to provide a three-dimensional macro-micro composite positioning stage with a large stroke, high precision, compact structure, and reliable operation. Summary of the Invention

[0004] The purpose of this invention is to provide a three-dimensional macro-micro composite positioning stage, which aims to solve the problems in the prior art where three-dimensional positioning platforms cannot simultaneously achieve large stroke and high precision, have complex structures, large volumes, and poor operational reliability.

[0005] The present invention is implemented as follows: a three-dimensional macro-micro composite positioning stage includes a stage body, on which an X-axis motion component, a Y-axis motion component and a Z-axis motion component are provided, as well as a mobile terminal platform connected to the X-axis motion component, the Y-axis motion component and the Z-axis motion component respectively.

[0006] The X-axis motion component includes an X-axis macro-drive and an X-axis micro-drive; the Y-axis motion component includes a Y-axis macro-drive and a Y-axis micro-drive; the Z-axis motion component includes a Z-axis macro-drive and a Z-axis micro-drive, used to drive the mobile terminal platform to move linearly along the X-axis, Y-axis, and Z-axis.

[0007] Furthermore, the X-axis macro drive, Y-axis macro drive, and Z-axis macro drive are set to micrometer.

[0008] Furthermore, the X-axis micro actuator and the Y-axis micro actuator each include a housing and lock nuts and ceramic seats located at both ends of the housing. The lock nuts, housing, and ceramic seats form a cavity, and a first piezoelectric ceramic is disposed in the cavity. One end of the first piezoelectric ceramic is connected to the ceramic seat, and the other end of the first piezoelectric ceramic is connected to a gasket, a hemisphere, and a lock nut in sequence.

[0009] Furthermore, the X-axis motion assembly also includes:

[0010] X-axis clamping block, which is connected to the platform body, is used to fix the X-axis macro drive;

[0011] The X-axis fixing block is connected to the platform body;

[0012] The X-axis moving block is arranged at a distance from the X-axis clamping block;

[0013] An X-axis flexible hinge connects the X-axis fixed block and the X-axis moving block;

[0014] X-axis guide assembly, which connects the X-axis moving block and the mobile terminal platform;

[0015] The X-axis macro actuator is mounted on the X-axis clamping block, and the output end of the X-axis macro actuator abuts against the X-axis moving block. The X-axis micro actuator is mounted on the X-axis moving block and is used to drive the X-axis moving block, the X-axis guide assembly, and the mobile terminal platform to move linearly along the X-axis.

[0016] Furthermore, the Y-axis motion component also includes:

[0017] Y-axis clamping block, which is connected to the platform body, is used to fix the Y-axis macro drive;

[0018] The Y-axis moving block is positioned relative to the Y-axis clamping block at a distance.

[0019] A Y-axis flexible hinge connects the Y-axis moving block to the platform.

[0020] The Y-axis guide assembly connects the Y-axis moving block to the mobile terminal platform;

[0021] The Y-axis macro actuator is mounted on the Y-axis clamping block, and the output end of the Y-axis macro actuator abuts against the Y-axis moving block. The Y-axis micro actuator is mounted on the Y-axis moving block and is used to drive the Y-axis moving block, the Y-axis guide assembly, and the mobile terminal platform to move linearly along the Y-axis.

[0022] Furthermore, a first pre-tensioning assembly is provided between the X-axis clamping block and the X-axis moving block, and between the Y-axis clamping block and the Y-axis moving block; the first pre-tensioning assembly includes a first compression spring rod and a first compression spring sleeved on the outside of the first compression spring rod.

[0023] Furthermore, the Z-axis motion component also includes:

[0024] Z-axis clamping block, which is connected to the platform body, is used to fix the Z-axis macro drive;

[0025] The first Z-axis moving block is arranged at a distance from the Z-axis clamping block;

[0026] The second Z-axis moving block is arranged at an interval relative to the first Z-axis moving block;

[0027] Z-axis flexible hinge, which connects the first Z-axis moving block to the platform and the second Z-axis moving block to the platform;

[0028] Z-axis guide assembly, which connects the second Z-axis moving block to the mobile terminal platform;

[0029] The two ends of the Z-axis micro-motion actuator are respectively connected to the first Z-axis moving block and the second Z-axis moving block; the Z-axis macro-motion actuator is located on the Z-axis clamping block, and the output end of the Z-axis macro-motion actuator abuts against the first Z-axis moving block, which is used to push the first Z-axis moving block, the Z-axis micro-motion actuator, the second Z-axis moving block, the Z-axis guide assembly, and the mobile terminal platform to move linearly along the Z-axis.

[0030] Furthermore, the Z-axis micro-motion actuator includes a second piezoelectric ceramic, the two ends of which abut against the first Z-axis moving block and the second Z-axis moving block respectively through hemispheres, for pushing the second Z-axis moving block, the Z-axis guide assembly, and the mobile terminal platform to move slightly along the Z-axis.

[0031] Furthermore, a second pre-tensioning assembly is provided between the first Z-axis moving block and the second Z-axis moving block. The second pre-tensioning assembly includes a tension spring and two pull rods connected to both ends of the tension spring. The two pull rods are respectively fixed on the first Z-axis moving block and the second Z-axis moving block.

[0032] Furthermore, a housing is provided on the platform body and on the outer periphery of the second Z-axis moving block, and a third pre-tensioning assembly is provided between the second Z-axis moving block and the housing; the third pre-tensioning assembly includes a second compression spring rod and a second compression spring.

[0033] The beneficial effects of the three-dimensional macro-micro composite positioning stage provided by this invention are as follows:

[0034] The present invention achieves three-dimensional large-range displacement and positioning tracking by setting X-axis macro-motion driver, Y-axis macro-motion driver and Z-axis macro-motion driver; by setting X-axis micro-motion driver, Y-axis micro-motion driver and Z-axis micro-motion driver to perform three-dimensional nanometer-level high-speed motion, it can compensate for the positioning error generated during the large-range motion process, so that the present invention has millimeter-level stroke and nanometer-level precision, taking into account both large stroke and high precision.

[0035] The X-axis, Y-axis, and Z-axis micro-motion actuators employ piezoelectric ceramic direct drive and are equipped with corresponding flexible hinges on the X, Y, and Z axes, resulting in high positioning accuracy and fast response speed. This invention also incorporates a first pre-tightening component and a third pre-tightening component to ensure the restoring force of the X-axis, Y-axis, and Z-axis moving blocks, making the entire structure more reliable. The X-axis, Y-axis, and Z-axis micro-motion actuators have a reasonable and compact structural design, with each operating independently, effectively avoiding motion coupling and resulting in more accurate positioning. This invention features a reasonable spatial layout, a compact overall structure, high positioning accuracy, and simple operation.

[0036] The surfaces of the first and second piezoelectric ceramics of the present invention can be equipped with strain sensors. Closed-loop feedback control formed by voltage and displacement is used to achieve adaptive nanoscale drive positioning control, which greatly improves nonlinearity, reduces external influences and interference, and further improves the positioning accuracy. Attached Figure Description

[0037] Figure 1 This is a three-dimensional structural schematic diagram of the three-dimensional macro-micro composite positioning stage provided by the present invention;

[0038] Figure 2 This is a top view of the three-dimensional macro-micro composite positioning stage provided by the present invention;

[0039] Figure 3 This invention provides Figure 2 Sectional view along the AA direction;

[0040] Figure 4 This invention provides Figure 3 A magnified view of a portion of the image;

[0041] Figure 5 This invention provides Figure 2 BB-direction cross section;

[0042] Figure 6 This invention provides Figure 2 Cross-sectional view along the CC direction;

[0043] Figure 7 This is a three-dimensional structural diagram of the combination of the platform, X-axis motion component, Y-axis motion component and Z-axis motion component provided by the present invention;

[0044] Figure 8 This is a three-dimensional structural diagram of the combination of the mobile terminal platform, the X-axis guide component, the Y-axis guide component and the Z-axis guide component provided by the present invention;

[0045] Figure 9 This is an exploded view of the combination of the housing, the third pre-tightening assembly, and the second Z-axis moving block provided by the present invention.

[0046] Figure 10 This is a front view of the second pretensioning component provided by the present invention;

[0047] In the diagram: 1-Stage; 2-X-axis motion assembly; 21-X-axis macro actuator; 22-X-axis micro actuator; 23-X-axis clamping block; 24-X-axis fixed block; 25-X-axis moving block; 26-X-axis flexible hinge; 27-X-axis guide assembly; 3-Y-axis motion assembly; 31-Y-axis macro actuator; 32-Y-axis micro actuator; 33-Y-axis clamping block; 34-Y-axis moving block; 35-Y-axis flexible hinge; 36-Y-axis guide assembly; 4-Z-axis motion assembly; 41-Z-axis macro actuator; 42-Z-axis micro actuator; 421-Second piezoelectric ceramic; 43-Z-axis clamping block; 44-Z-axis... 1. Moving block; 45-Z-axis second moving block; 451-Vertical block; 452-Horizontal block; 46-Z-axis flexible hinge; 47-Z-axis guide assembly; 48-Second preload assembly; 481-Tension spring; 482-Pull rod; 49-Third preload assembly; 491-Second compression spring rod; 492-Second compression spring; 5-Mobile terminal platform; 51-Top plate; 52-Support body; 6-Outer shell; 7-Top cover; 8-Moving surface; a1-Encapsulation shell; a2-Lock nut; a3-Ceramic seat; b-First piezoelectric ceramic; c1-Washer; c2-Hemisphere; d-First preload assembly; d1-First compression spring rod; d2-First compression spring. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0049] The implementation of the present invention will be described in detail below with reference to specific embodiments.

[0050] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this invention, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this invention. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0051] Reference Figure 1-10 The image shown is a preferred embodiment of the present invention.

[0052] The three-dimensional macro-micro composite positioning stage, from bottom to top, includes a stage body 1, an outer shell 6, a top cover 7, and a moving surface 8, as shown in the reference. Figure 1-2 The platform 1, outer shell 6, top cover 7, and moving surface 8 form a receiving cavity. The platform 1 and the receiving cavity house an X-axis motion assembly 2, a Y-axis motion assembly 3, and a Z-axis motion assembly 4, as well as a mobile terminal platform 5 connected to the X-axis motion assembly 2, Y-axis motion assembly 3, and Z-axis motion assembly 4 respectively. (Refer to...) Figure 2-6 The top of the mobile terminal platform 5 is bolted to the moving surface 8, which drives the moving surface 8 to move under the action of the X-axis moving assembly 2, Y-axis moving assembly 3, and Z-axis moving assembly 4. The top cover 7 is located on the outer shell 6 and around the moving surface 8 to protect the internal mechanism.

[0053] The X-axis motion assembly 2 includes an X-axis macro actuator 21 and an X-axis micro actuator 22. The Y-axis motion assembly 3 includes a Y-axis macro actuator 31 and a Y-axis micro actuator 32. The Z-axis motion assembly 4 includes a Z-axis macro actuator 41 and a Z-axis micro actuator 42. The X-axis macro actuator 21, Y-axis macro actuator 31, and Z-axis macro actuator 41 adjust the mobile terminal platform 5 to perform millimeter-level linear motion along the X, Y, and Z axes. For ease of adjustment, parts of the X-axis macro actuator 21, Y-axis macro actuator 31, and Z-axis macro actuator 41 can extend through the housing 6 to its exterior. The X-axis macro actuator 21, Y-axis macro actuator 31, and Z-axis macro actuator 41 are preferably micrometers. The X-axis micro-motion actuator 22, Y-axis micro-motion actuator 32, and Z-axis micro-motion actuator 42 adjust the mobile terminal platform 5 to perform micron- and nanometer-level linear motion along the X, Y, and Z axes. This compensates for positioning errors generated during large-scale movements, giving it a stroke of at least millimeters and nanometer-level precision, thus balancing large stroke and high precision. The mobile terminal platform 5 drives the motion surface 8 to perform high-precision motion along the three degrees of freedom of the X, Y, and Z axes.

[0054] The X-axis motion assembly 2 also includes an X-axis clamping block 23, an X-axis fixing block 24, an X-axis moving block 25, an X-axis flexible hinge 26, and an X-axis guide assembly 27, as shown in the reference. Figure 3 The X-axis clamping block 23 and the X-axis fixing block 24 are fixed to the platform 1. The X-axis moving block 25 is connected to the X-axis fixing block 24 via the X-axis flexible hinge 26, and is spaced apart from the X-axis clamping block 23, as shown in the figure. Figure 7The X-axis macro actuator 21 is fixed to the X-axis clamping block 23. The output end of the X-axis macro actuator 21 passes through the X-axis clamping block 23 and abuts against or is connected to the X-axis moving block 25, which can push the X-axis moving block 25 closer to or away from the X-axis clamping block 23, while the X-axis flexible hinge 26 deforms. The X-axis moving block 25 transmits motion to the mobile terminal platform 5 through the X-axis guide assembly 27. The X-axis guide assembly 27 is arranged parallel to the X-axis, preferably with two sets, to ensure the stability of the motion.

[0055] The X-axis micro-motion actuator 22 is located on the side of the X-axis moving block 25 opposite to the X-axis clamping block 23. The X-axis micro-motion actuator 22 includes a housing a1, a lock nut a2, and a ceramic base a3, as shown in the figure. Figure 4 The encapsulation shell a1 is preferably a cylindrical body with openings at both ends. One end of the encapsulation shell a1 is connected to the lock nut a2, and the other end is connected to the ceramic base a3. The lock nut a2, the encapsulation shell a1, and the ceramic base a3 form a cavity. A first piezoelectric ceramic b is disposed inside the cavity, and one end of the first piezoelectric ceramic b is attached to the ceramic base a3. The other end of the first piezoelectric ceramic b is connected in sequence to the gasket c1, the hemisphere c2, and the lock nut a2.

[0056] The X-axis moving block 25 has a threaded through hole, and the outer wall of the encapsulation shell a1 near the lock nut a2 has a thread corresponding to the through hole. The encapsulation shell a1 and the X-axis moving block 25 are connected by threads. The lock nut a2 has a hemisphere c2 on the side away from the first piezoelectric ceramic b. The two hemispheres c2 on both sides of the lock nut a2 are coaxially arranged. Preferably, the output end of the X-axis macro actuator 21 abuts against the hemisphere c2 on the side of the lock nut a2 away from the first piezoelectric ceramic b. The first piezoelectric ceramic b will elongate along the X-axis under the excitation voltage. The first piezoelectric ceramic b pushes the encapsulation shell a1, which in turn drives the X-axis moving block 25 to move slightly away from the X-axis clamping block 23 along the X-axis. This, in turn, drives the guide component 27 and the mobile terminal platform 5 to move in the positive direction of the X-axis. When the voltage is removed, the first piezoelectric ceramic b returns to its original length, causing the encapsulation shell a1, X-axis moving block 25, X-axis guide component 27, and mobile terminal platform 5 to move in the negative direction of the X-axis, achieving micro-motion in the X-axis direction, compensating for errors in large-stroke movements, and making control more precise. A strain sensor is installed on the first piezoelectric ceramic b, enabling closed-loop control, which further ensures ultra-high control precision, achieving nanometer-level positioning on the X-axis. Simultaneously, the piezoelectric ceramic direct drive provides a fast response speed.

[0057] In a further optimized design, a first pre-tightening component d is provided between the X-axis clamping block 23 and the X-axis moving block 25. The first pre-tightening component d includes a first compression spring rod d1 and a first compression spring d2. The first compression spring d2 is sleeved on the outside of the first compression spring rod d1. One end of the first compression spring rod d1 is connected to the X-axis clamping block 23, and the other side of the first compression spring rod d1 passes through a through hole in the X-axis moving block 25, with a nut at the end furthest from the X-axis clamping block 23. The first compression spring d2 abuts against the X-axis moving block 25 and the nut. The first pre-tightening component d is used to apply a pre-tightening force to the X-axis moving block 25 along the X-axis. When the voltage is removed, the first piezoelectric ceramic b returns to its original length, and the X-axis moving block 25 has a restoring force, ensuring the stable operation of the X-axis motion assembly 2.

[0058] The Y-axis motion assembly 3 also includes a Y-axis clamping block 33, a Y-axis moving block 34, a Y-axis flexible hinge 35, and a Y-axis guide assembly 36, as shown in the reference. Figure 5 The Y-axis clamping block 33 is fixedly connected to the platform 1. The Y-axis moving block 34 is spaced apart from the Y-axis clamping block 33. The bottom of the Y-axis moving block 34 is connected to the platform 1 via a Y-axis flexible hinge 35. The Y-axis macro actuator 31 is fixed to the Y-axis clamping block 33. The output end of the Y-axis macro actuator 31 passes through the Y-axis clamping block 33 and abuts against the Y-axis moving block 34, which can push the Y-axis moving block 34 closer to or away from the Y-axis clamping block 33, while the Y-axis flexible hinge 35 deforms. The Y-axis moving block 34 transmits motion to the mobile terminal platform 5 through the Y-axis guide assembly 36. The Y-axis guide assembly 36 is arranged parallel to the Y-axis, preferably with two sets, to ensure the stability of the motion.

[0059] The Y-axis micro-actuator 32 is located on the side of the Y-axis moving block 34 opposite to the Y-axis clamping block 33. The Y-axis micro-actuator 32 includes a housing a1, a locking nut a2, and a ceramic seat a3. The housing a1 is preferably a cylindrical body with openings at both ends. Both ends of the housing a1 are connected to the locking nut a2 and the ceramic seat a3, respectively. The locking nut a2, housing a1, and ceramic seat a3 form a cavity. A first piezoelectric ceramic b is disposed within the cavity, with one end of the first piezoelectric ceramic b adhered to the ceramic seat a3. The other end of the first piezoelectric ceramic b is sequentially connected to a gasket c1, a hemisphere c2, and the locking nut a2.

[0060] The Y-axis moving block 34 has a threaded through hole, and the outer wall of the encapsulation shell a1 near the lock nut a2 has a thread corresponding to the through hole. The encapsulation shell a1 and the Y-axis moving block 34 are connected by threads. The lock nut a2 has a hemisphere c2 on the side away from the first piezoelectric ceramic b. The two hemispheres c2 on both sides of the lock nut a2 are coaxially arranged. Preferably, the output end of the Y-axis macro actuator 31 abuts against the hemisphere c2 on the side of the lock nut a2 away from the first piezoelectric ceramic b. The first piezoelectric ceramic b will elongate along the Y-axis under the excitation voltage. The first piezoelectric ceramic b will push the encapsulation shell a1, and the encapsulation shell a1 will drive the Y-axis moving block 34 to move slightly away from the Y-axis clamping block 33 along the Y-axis, thereby pushing the Y-axis guide component 36 and the mobile terminal platform 5 to move in the positive direction of the Y-axis; when the voltage is removed, the first piezoelectric ceramic b will restore its length, and will drive the encapsulation shell a1, the Y-axis moving block 34, the Y-axis guide component 36, and the mobile terminal platform 5 to move in the negative direction of the Y-axis, realizing the micro-movement in the Y-axis direction.

[0061] To further optimize the design, a first pre-tightening component d is provided between the Y-axis clamping block 33 and the Y-axis moving block 34. The first pre-tightening component d includes a first compression spring rod d1 and a first compression spring d2. The first compression spring d2 is sleeved on the outside of the first compression spring rod d1. One end of the first compression spring rod d1 is connected to the Y-axis clamping block 33, and the other end of the first compression spring rod d1 passes through a through hole in the Y-axis moving block 34, with a nut at the end away from the Y-axis clamping block 33. The first compression spring d2 abuts against the Y-axis moving block 34 and the nut. The first pre-tightening component d is used to apply a pre-tightening force to the Y-axis moving block 34 along the Y-axis. When the voltage is removed, the first piezoelectric ceramic b returns to its original length, and the Y-axis moving block 34 has a restoring force. A strain sensor is installed on the first piezoelectric ceramic b for closed-loop control, further ensuring ultra-high control precision and achieving nanometer-level positioning of the Y-axis. Simultaneously, the piezoelectric ceramic direct drive provides a fast response speed.

[0062] The Z-axis motion assembly 4 also includes a Z-axis clamping block 43, a Z-axis first moving block 44, a Z-axis second moving block 45, a Z-axis flexible hinge 46, and a Z-axis guide assembly 47, as shown in the reference. Figure 6Z-axis clamping block 43 is fixed to the platform 1. Z-axis first moving block 44 is spaced apart from Z-axis clamping block 43. Z-axis second moving block 45 is spaced apart from Z-axis first moving block 44. Z-axis first moving block 44 and Z-axis second moving block 45 are respectively connected to platform 1 via Z-axis flexible hinge 46. Both ends of Z-axis micro-motion actuator 42 are respectively connected to Z-axis first moving block 44 and Z-axis second moving block 45. Z-axis micro-motion actuator 42 can transmit the large stroke motion of Z-axis first moving block 44 to second moving block 45, and can also independently drive the second moving block 45 to micro-motion. Z-axis second moving block 45 transmits motion to mobile terminal platform 5 through Z-axis guide assembly 47. Z-axis second moving block 45 includes a vertical block 451 connected to Z-axis micro-motion actuator 42 and a horizontal block 452 perpendicular to vertical block 451. Horizontal block 452 is connected to mobile terminal platform 5 via Z-axis guide assembly 47. The second Z-axis moving block 45 moves away from the first moving block 44 under the push of the Z-axis macro actuator 41 or the Z-axis micro actuator 42. Since the bottom of the second Z-axis moving block 45 is constrained by the Z-axis flexible hinge 46, the vertical block 451 and the horizontal block 452 flip at a certain angle, that is, the horizontal block 452 drives the Z-axis guide assembly 47 and the mobile terminal platform 5 to move in the positive direction of the Z-axis. Adjusting the macro actuator 41 or the Z-axis micro actuator 42 to restore the first moving block 44 to its original state, the vertical block 451 and the horizontal block 452 flip back to their initial state, that is, the horizontal block 452 drives the Z-axis guide assembly 47 and the mobile terminal platform 5 to move in the negative direction of the Z-axis, realizing micro-motion in the Z-axis direction.

[0063] The Z-axis macro actuator 41 is fixed to the Z-axis clamping block 43. The output end of the Z-axis macro actuator 41 passes through the Z-axis clamping block 43 and abuts against the Z-axis first moving block 44. Preferably, the Z-axis clamping block 43 is provided with a hemisphere c2, and the output end of the Z-axis macro actuator 41 abuts against the hemisphere c2. The Z-axis macro actuator 41 can drive the Z-axis first moving block 44, the Z-axis micro actuator 42, the Z-axis second moving block 45, the Z-axis guide assembly 47, and the mobile terminal platform 5 to move linearly along the Z-axis, while the Z-axis flexible hinge 46 deforms.

[0064] The Z-axis micro-motion actuator 42 includes a second piezoelectric ceramic 421. The two ends of the second piezoelectric ceramic 421 abut against the first Z-axis moving block 44 and the second Z-axis moving block 45 respectively via hemispheres c2. Preferably, the opposite sides of the first Z-axis moving block 44 and the second Z-axis moving block 45 are provided with a first groove to accommodate the hemispheres c2. One side of the plane of the hemisphere c2 is attached to the two end faces of the long axis of the second piezoelectric ceramic 421, and the hemisphere contacts the first groove. The Z-axis micro-motion actuator 42 can push the second Z-axis moving block 45, the Z-axis guide assembly 47, and the mobile terminal platform 5 to move slightly along the Z-axis. A strain sensor is installed on the second piezoelectric ceramic 421 for closed-loop control, further ensuring ultra-high control precision and achieving nanometer-level Z-axis positioning. Simultaneously, the direct drive of the piezoelectric ceramic provides a fast response speed.

[0065] To ensure the reliability of the Z-axis micro-actuator 42 structure, a second preload assembly 48 is provided between the Z-axis first moving block 44 and the Z-axis second moving block 45. The second preload assembly 48 includes a tension spring 481 and two pull rods 482, as shown in the figure. Figure 10 The Z-axis first moving block 44 and the Z-axis second moving block 45 are respectively provided with second grooves. Two pull rods 482 are respectively disposed in the two second grooves, and the two ends of the tension spring 481 are respectively connected to the two pull rods 482. The second preload assembly 48 can increase the preload between the Z-axis first moving block 44 and the Z-axis second moving block 45, so that the Z-axis micro-motion actuator 42 is pressed against the Z-axis first moving block 44 and the Z-axis second moving block 45, making the entire structure stable.

[0066] Preferably, a third pre-tightening assembly 49 is provided between the Z-axis second moving block 45 and the housing 6, as shown in the reference. Figure 9 The third preload assembly 49 includes a second spring rod 491 and a second spring 492. One end of the second spring rod 491 is connected to the housing 6, and the other end passes through the housing 6 and is fitted with the second spring 492 on its outer side. The side of the second spring 492 away from the housing 6 abuts against the second moving block 45. The second moving block 45 is provided with a third groove corresponding to the second spring 492, and the second spring 492 abuts against the third groove. The third preload assembly 49 is used to apply a preload force to the Z-axis second moving block 45. When the voltage is removed, the second piezoelectric ceramic 421 returns to its length, and the Z-axis second moving block 45 has a restoring force.

[0067] Mobile terminal platform 5 includes a top plate 51 and a support 52 connected to the top plate 51, as shown in the figure. Figure 8The top of the top plate 51 is connected to the moving surface 8. The top plate 51 is connected to the second Z-axis moving block 45 via a Z-axis guide assembly 47, preferably two sets of Z-axis guide assemblies 47 arranged parallel to the Z-axis. The support body 52 is connected to the X-axis moving block 25 via an X-axis guide assembly 27, preferably two sets of X-axis guide assemblies 27 arranged parallel to the X-axis. The support body 52 is connected to the Y-axis moving block 34 via a Y-axis guide assembly 36, preferably two sets of Y-axis guide assemblies 36 arranged parallel to the Y-axis. This structural design is reasonable and compact, making the overall structure of the invention compact, with high space utilization, small size, and easy integration.

[0068] This invention is not intended to limit the scope of the invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the invention should be included within the scope of protection of the invention.

Claims

1. A three-dimensional macro-micro composite positioning stage, comprising a stage body (1), characterized in that, The platform (1) is provided with an X-axis motion component (2), a Y-axis motion component (3) and a Z-axis motion component (4), and a mobile terminal platform (5) connected to the X-axis motion component (2), the Y-axis motion component (3) and the Z-axis motion component (4) respectively. The X-axis motion assembly (2) includes an X-axis macro-motion driver (21) and an X-axis micro-motion driver (22); the Y-axis motion assembly (3) includes a Y-axis macro-motion driver (31) and a Y-axis micro-motion driver (32); the Z-axis motion assembly (4) includes a Z-axis macro-motion driver (41) and a Z-axis micro-motion driver (42), for driving the mobile terminal platform (5) to move linearly along the X-axis, Y-axis and Z-axis.

2. The three-dimensional macro-micro composite positioning stage according to claim 1, characterized in that, The X-axis macro drive (21), Y-axis macro drive (31) and Z-axis macro drive (41) are set to micrometer.

3. The three-dimensional macro-micro composite positioning stage according to claim 1, characterized in that, The X-axis micro actuator (22) and the Y-axis micro actuator (32) each include a housing (a1) and a lock nut (a2) and a ceramic seat (a3) ​​located at both ends of the housing (a1). The lock nut (a2), the housing (a1), and the ceramic seat (a3) ​​form a cavity, and a first piezoelectric ceramic (b) is provided in the cavity. One end of the first piezoelectric ceramic (b) is connected to the ceramic seat (a3), and the other end of the first piezoelectric ceramic (b) is connected to the gasket (c1), the hemisphere (c2), and the lock nut (a2) in sequence.

4. The three-dimensional macro-micro composite positioning stage according to claim 1, characterized in that, The X-axis motion component (2) also includes: X-axis clamping block (23), which is connected to the platform (1) and is used to fix the X-axis macro drive (21). X-axis fixing block (24), which is connected to the platform (1); The X-axis moving block (25) is arranged at a distance from the X-axis clamping block (23); X-axis flexible hinge (26) connects the X-axis fixed block (24) and the X-axis moving block (25); X-axis guide assembly (27), which connects the X-axis moving block (25) and the mobile terminal platform (5); The X-axis macro actuator (21) is mounted on the X-axis clamping block (23), and the output end of the X-axis macro actuator (21) abuts against the X-axis moving block (25); the X-axis micro actuator (22) is mounted on the X-axis moving block (25) and is used to drive the X-axis moving block (25), the X-axis guide assembly (27), and the mobile terminal platform (5) to move linearly along the X-axis.

5. The three-dimensional macro-micro composite positioning stage according to claim 4, characterized in that, The Y-axis motion component (3) also includes: Y-axis clamping block (33), which is connected to the platform (1) and is used to fix the Y-axis macro drive (31). The Y-axis moving block (34) is disposed opposite to the Y-axis clamping block (33) at a distance; Y-axis flexible hinge (35) connects the Y-axis moving block (34) to the platform (1). Y-axis guide assembly (36), which connects the Y-axis moving block (34) and the mobile terminal platform (5); The Y-axis macro actuator (31) is mounted on the Y-axis clamping block (33), and the output end of the Y-axis macro actuator (31) abuts against the Y-axis moving block (34); the Y-axis micro actuator (32) is mounted on the Y-axis moving block (34) and is used to drive the Y-axis moving block (34), the Y-axis guide assembly (36), and the mobile terminal platform (5) to move linearly along the Y-axis.

6. The three-dimensional macro-micro composite positioning stage according to claim 5, characterized in that, A first pre-tightening assembly (d) is provided between the X-axis clamping block (23) and the X-axis moving block (25), and between the Y-axis clamping block (33) and the Y-axis moving block (34); the first pre-tightening assembly (d) includes a first compression spring rod (d1) and a first compression spring (d2) sleeved on the outside of the first compression spring rod (d1).

7. The three-dimensional macro-micro composite positioning stage according to claim 1, characterized in that, The Z-axis motion component (4) also includes: Z-axis clamping block (43), which is connected to the platform (1) and is used to fix the Z-axis macro drive (41). The Z-axis first moving block (44) is arranged at a distance from the Z-axis clamping block (43); The second Z-axis moving block (45) is arranged opposite to the first Z-axis moving block (44) at a distance; Z-axis flexible hinge (46), which connects the first Z-axis moving block (44) to the platform (1) and the second Z-axis moving block (45) to the platform (1); Z-axis guide assembly (47), which connects the second Z-axis moving block (45) to the mobile terminal platform (5); The two ends of the Z-axis micro-motion actuator (42) are respectively connected to the Z-axis first moving block (44) and the Z-axis second moving block (45); the Z-axis macro-motion actuator (41) is located on the Z-axis clamping block (43), and the output end of the Z-axis macro-motion actuator (41) abuts against the Z-axis first moving block (44) to push the Z-axis first moving block (44), the Z-axis micro-motion actuator (42), the Z-axis second moving block (45), the Z-axis guide assembly (47), and the mobile terminal platform (5) to move linearly along the Z-axis.

8. The three-dimensional macro-micro composite positioning stage according to claim 7, characterized in that, The Z-axis micro-motion actuator (42) includes a second piezoelectric ceramic (421), the two ends of which are connected to the first Z-axis moving block (44) and the second Z-axis moving block (45) respectively through hemispheres (c2), for pushing the second Z-axis moving block (45), the Z-axis guide assembly (47), and the mobile terminal platform (5) to move slightly along the Z-axis.

9. The three-dimensional macro-micro composite positioning stage according to claim 7, characterized in that, A second pretensioning assembly (48) is provided between the first Z-axis moving block (44) and the second Z-axis moving block (45). The second pretensioning assembly (48) includes a tension spring (481) and two pull rods (482) connected to both ends of the tension spring (481). The two pull rods (482) are respectively fixed on the first Z-axis moving block (44) and the second Z-axis moving block (45).

10. The three-dimensional macro-micro composite positioning stage according to claim 7, characterized in that, The platform (1) has a housing (6) on its outer periphery of the second Z-axis moving block (45), and a third pre-tightening assembly (49) is provided between the second Z-axis moving block (45) and the housing (6); the third pre-tightening assembly (49) includes a second compression spring rod (491) and a second compression spring (492).

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