A multifunctional analyzer and analytical method combining CL-LIBS-LA-ICP-MS

Abstract

This invention discloses a multifunctional analyzer combining CL-LIBS-LA-ICP-MS, comprising a laser optical path module, an electronic excitation system, a spectral detection module, a sample chamber, and a mass spectrometry detection module. The laser optical path module includes a laser source, a beam adjustment system, a scanning galvanometer, and a coaxial microscopic observation system. The spectral detection module includes a light signal collection end, an echelle grating spectrometer, a gated camera, and a timing control module. Another aspect of this invention discloses an analytical method, comprising setting the environment to vacuum and performing CL imaging scanning; selecting a LIBS test area based on the CL imaging scan image and performing LIBS scanning; selecting a third test area based on the LIBS scan results, filling the sample chamber with carrier gas, and performing laser ablation mass spectrometry detection. This invention eliminates the positioning error caused by sample transfer between multiple instruments during combined techniques, provides more comprehensive information on the structure and composition of the sample, and further improves the detection efficiency of the entire method through two screening test ranges.

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