A sample stage for a high vacuum coating device and a high vacuum coating device

Abstract

This invention belongs to the technical field of vacuum coating equipment, and discloses a sample stage and high-vacuum coating equipment for high-vacuum coating. The sample stage for high-vacuum coating includes a vacuum chamber, a substrate stage, a tilting motion mechanism, a rotating motion mechanism, and a lifting motion mechanism. By setting the tilting motion mechanism, the rotating motion mechanism, and the lifting motion mechanism, the substrate stage can simultaneously have multi-degree-of-freedom motion of rotation, lifting, and tilting. Each of the three mechanisms can drive the substrate stage individually, or at least two can work together to drive the substrate stage. The sample stage used in high-vacuum coating equipment can flexibly adjust the position of the substrate stage according to different coating sources, improving the versatility of the sample stage for high-vacuum coating equipment. It can also improve the uniformity of coating on workpieces, precisely control deposition parameters, and achieve uniform coating on complex-structured irregular workpieces.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment technology, and in particular to a sample stage and a high vacuum coating equipment for use in high vacuum coating equipment. Background Technology

[0002] High vacuum (usually referring to pressure below 10) -4 High vacuum environments (Pa) and even ultra-high vacuum environments are fundamental conditions for modern surface science, thin film physics, nanotechnology, and quantum materials research. In these environments, the sample stage, as the core component for supporting, positioning, and manipulating samples, directly determines the controllability, precision, and efficiency of the experiment. An ideal high-vacuum sample stage must simultaneously meet the following requirements: high-precision multi-degree-of-freedom motion, excellent vacuum compatibility and stability, good thermal and electrical properties, and reliable long-term operational capability.

[0003] Existing sample stages typically include rotating, lifting, and tilting stages. Rotating stages can average out the "shadowing effect" and spatial flux unevenness from a fixed deposition source, improving coating uniformity. However, for films requiring directional growth or epitaxy, this may disrupt the directionality of lattice growth, and it's difficult to eliminate film thickness differences caused by uneven spatial distribution of the deposition source when coating irregularly shaped workpieces. Lifting stages can adjust the distance between the sample and the deposition source, controlling deposition parameters and improving coating uniformity, but they cannot compensate for uneven coating thickness caused by uneven spatial distribution of the deposition source. Tilting stages can change the particle incident angle, improving coating uniformity on irregularly shaped workpieces. However, for processes requiring continuous coating, a single tilting posture can only optimize deposition conditions in a specific area, failing to ensure uniformity across all parts of the irregularly shaped workpiece throughout the entire coating process.

[0004] Therefore, although existing high-vacuum sample stages can achieve individual motion functions such as rotation, lifting, or tilting, their motion modes are relatively independent. In actual coating processes, for irregularly shaped workpieces with complex three-dimensional structures (such as curved surfaces, steps, and deep hole structures), the above-mentioned single motion modes are insufficient to eliminate problems such as localized missed coating, film thickness gradients, or compositional inhomogeneity caused by the inherent non-uniformity of the spatial distribution of the coating source. Furthermore, different coating sources have different spatial distribution characteristics, and each high-vacuum sample stage cannot be applied to different coating sources. Summary of the Invention

[0005] The purpose of this invention is to provide a sample stage for a high vacuum coating equipment and a high vacuum coating equipment. The sample stage for the high vacuum coating equipment has multiple degrees of freedom of movement, including rotation, lifting, and tilting, which improves the uniformity of coating on the workpiece, enhances the versatility of the sample stage for the high vacuum coating equipment, and has a high degree of integration.

[0006] To achieve this objective, the present invention adopts the following technical solution: On the one hand, a sample stage for a high vacuum coating apparatus is provided, comprising: A vacuum cavity, wherein a vacuum chamber is provided within the vacuum cavity; A substrate stage is disposed within the vacuum chamber and is used to mount a workpiece. A tilting motion mechanism is driven and connected to the substrate stage, and the tilting motion mechanism is used to drive the substrate stage to tilt about a first axis. A rotary motion mechanism is driven and connected to the substrate stage, and the rotary motion mechanism is used to drive the substrate stage to rotate about a second axis; A lifting motion mechanism is driven and connected to the rotary motion mechanism, and the lifting motion mechanism is used to drive the rotary motion mechanism to move up and down along the second axis.

[0007] Optionally, the tilting motion mechanism includes a first driving member and a first lifting module. The substrate stage is rotatably connected to the rotary motion mechanism. The first driving member is driven to be connected to the first lifting module. The first driving member can drive the first lifting module to move up and down along the second axis. The substrate stage is rotatably connected to the first lifting module.

[0008] Optionally, the first driving member is connected to the rotary motion mechanism, and the substrate stage is slidably connected to the first lifting module along the third axis.

[0009] Optionally, the tilting motion mechanism further includes a slide rail and a slider. The slide rail is connected to the side of the substrate stage facing away from the workpiece and extends along the third axis. The slider is slidably connected to the slide rail, and the first lifting module is rotatably connected to the slider.

[0010] Optionally, the rotary motion mechanism includes a second driving member and a rotating shaft. The second driving member is disposed outside the vacuum chamber, the rotating shaft extends along the second axis, the second driving member is driven to be connected to the first end of the rotating shaft, the second driving member is capable of driving the rotating shaft to rotate, the second end of the rotating shaft extends into the vacuum chamber, and the substrate stage is connected to the second end of the rotating shaft.

[0011] Optionally, the rotary motion mechanism further includes a magnetorheological fluid and a bellows. Both the magnetorheological fluid and the bellows are disposed outside the vacuum chamber and are sleeved on the rotating shaft. The first end of the bellows is sealed to the outer wall of the vacuum chamber, the first end of the magnetorheological fluid is sealed to the second end of the bellows, the second end of the magnetorheological fluid is sealed to the rotating shaft, and the bellows is capable of extending and retracting along the second axis.

[0012] Optionally, the substrate stage is provided with functional elements, and the rotary motion mechanism further includes a conductive slip ring, which is disposed in the vacuum chamber and sleeved on the rotary shaft. The conductive slip ring is used to electrically connect the functional elements to external devices.

[0013] Optionally, the lifting mechanism includes a third driving member and a second lifting module. The third driving member is driven and connected to the second lifting module, and the third driving member can drive the second lifting module to move up and down along the second axis. The rotary mechanism is connected to the second lifting module.

[0014] Optionally, the sample stage for the high vacuum coating equipment further includes a control unit, and the rotary motion mechanism, the lifting motion mechanism and the tilting motion mechanism are all electrically connected to the control unit.

[0015] On the other hand, a high vacuum coating apparatus is provided, including a coating source and the above-mentioned sample stage for the high vacuum coating apparatus, wherein the coating source is used to emit coating material into the vacuum chamber.

[0016] The beneficial effects of this invention are: This invention provides a sample stage for a high-vacuum coating equipment and the high-vacuum coating equipment itself. The sample stage for the high-vacuum coating equipment includes a vacuum chamber, a substrate stage, a tilting motion mechanism, a rotating motion mechanism, and a lifting motion mechanism. A vacuum chamber is provided within the vacuum chamber, and the substrate stage is disposed within the vacuum chamber for mounting workpieces. The tilting motion mechanism is driven and connected to the substrate stage, and is used to drive the substrate stage to tilt around a first axis. The rotating motion mechanism is driven and connected to the substrate stage, and is used to drive the substrate stage to rotate around a second axis. The lifting motion mechanism is driven and connected to the rotating motion mechanism, and is used to drive the rotating motion mechanism to move up and down along the second axis. By providing the tilting motion mechanism, the rotating motion mechanism, and the lifting motion mechanism, the substrate stage can simultaneously possess multi-degree-of-freedom motion including rotation, lifting, and tilting. The tilting, rotating, and lifting mechanisms can each drive the substrate stage individually, in pairs, or all three in a coordinated manner. This allows the sample stage in high-vacuum coating equipment to flexibly adjust its position according to different coating sources, improving its versatility. Furthermore, the coordinated action of these mechanisms enhances the uniformity of the coating, precisely controls deposition parameters, and enables uniform coating of complex, irregularly shaped workpieces. The sample stage used in high-vacuum coating equipment also boasts high integration and a compact overall size. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the sample stage for a high-vacuum coating equipment provided in an embodiment of the present invention.

[0018] In the picture: 1. Vacuum chamber; 2. Substrate stage; 3. Tilting motion mechanism; 31. First driving component; 32. First lifting module; 33. Slide rail; 34. Slider; 35. First mounting plate; 36. First hinge; 4. Rotary motion mechanism; 41. Second driving component; 42. Rotating shaft; 43. Magnetofluid; 44. Bellows; 45. Conductive slip ring; 46. Second mounting plate; 47. First gear; 48. Second gear; 49. Second hinge; 5. Lifting mechanism; 51. Third drive component; 52. Second lifting module; 53. Third mounting plate; 100. Vacuum chamber. Detailed Implementation

[0019] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0021] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0022] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0023] like Figure 1 As shown, this embodiment provides a sample stage for a high-vacuum coating equipment. The sample stage for the high-vacuum coating equipment includes a vacuum chamber 1, a substrate stage 2, a tilting motion mechanism 3, a rotating motion mechanism 4, and a lifting motion mechanism 5. A vacuum chamber 100 is provided inside the vacuum chamber 1, and the substrate stage 2 is disposed within the vacuum chamber 100, used to mount workpieces. The tilting motion mechanism 3 is driven and connected to the substrate stage 2, and is used to drive the substrate stage 2 to tilt around a first axis. The rotating motion mechanism 4 is driven and connected to the substrate stage 2, and is used to drive the substrate stage 2 to rotate around a second axis. The lifting motion mechanism 5 is driven and connected to the rotating motion mechanism 4, and is used to drive the rotating motion mechanism 4 to move up and down along the second axis. By providing the tilting motion mechanism 3, the rotating motion mechanism 4, and the lifting motion mechanism 5, the substrate stage 2 can simultaneously possess multi-degree-of-freedom motion including rotation, lifting, and tilting. The tilting motion mechanism 3, the rotating motion mechanism 4, and the lifting motion mechanism 5 can each drive the substrate stage 2 individually, or they can work together in pairs or all three. This allows the sample stage in high-vacuum coating equipment to flexibly adjust its position according to different coating sources, improving its versatility. Furthermore, the coordinated action of the tilting motion mechanism 3, the rotating motion mechanism 4, and the lifting motion mechanism 5 improves the uniformity of the coating on the workpiece, precisely controls deposition parameters, and achieves uniform coating on complex, irregularly shaped workpieces. The sample stage used in high-vacuum coating equipment also features high integration and a small overall size.

[0024] Specifically, the first axis, the second axis, and the third axis are perpendicular to each other. In this embodiment, the second axis extends vertically, while the first and third axes both extend horizontally. The bottom surface of the substrate stage 2 is used to mount the workpiece.

[0025] Optionally, the sample stage for the high-vacuum coating equipment also includes a control unit, with the rotary motion mechanism 4, lifting motion mechanism 5, and tilting motion mechanism 3 all electrically connected to the control unit. The control unit can precisely control the movement of the rotary motion mechanism 4, lifting motion mechanism 5, and tilting motion mechanism 3, thereby precisely controlling the position of the substrate stage 2. Specifically, the control unit is configured to: acquire the spatial distribution characteristic parameters of the coating source and the three-dimensional morphology data of the workpiece; and, based on the spatial distribution characteristic parameters of the coating source and the three-dimensional morphology data of the workpiece, control the rotary motion mechanism 4, lifting motion mechanism 5, and tilting motion mechanism 3 to move individually or at least two in coordination during the coating process. Depending on different coating sources and different workpiece shapes, the substrate stage 2 drives the workpiece to execute different motion trajectories, improving the uniformity of the coating.

[0026] Optionally, the tilting motion mechanism 3 includes a first driving member 31 and a first lifting module 32. The substrate stage 2 is rotatably connected to the rotary motion mechanism 4. The first driving member 31 is driven to move the first lifting module 32 along a second axis. The substrate stage 2 is rotatably connected to the first lifting module 32. The first driving member 31 drives the first lifting module 32 to move along the second axis, thereby driving the substrate stage 2 to tilt. Specifically, the first driving member 31 is a drive motor, and the first lifting module 32 can be a lead screw and nut structure or a gear and rack structure; this embodiment does not limit this. In other embodiments, the tilting motion mechanism 3 can also be a cylinder or an electric cylinder, rotatably connected to the rotary motion mechanism 4, and the output end of the cylinder or electric cylinder is rotatably connected to the substrate stage 2.

[0027] Furthermore, the first driving component 31 is connected to the rotary motion mechanism 4, and the substrate stage 2 is slidably connected to the first lifting module 32 along the third axis. The connection of the first driving component 31 to the rotary motion mechanism 4 facilitates its fixation and allows the tilting motion mechanism 3 and the substrate stage 2 to rotate synchronously, preventing interference between them. The slidable connection of the substrate stage 2 along the third axis to the first lifting module 32 enables the first lifting module 32 to drive the substrate stage 2 to tilt, preventing jamming and ensuring good stability during tilting.

[0028] Specifically, the tilting motion mechanism 3 further includes a first mounting plate 35. The first mounting plate 35 is fixedly connected to the rotary motion mechanism 4 and is arranged in a horizontal direction, and the first driving member 31 is fixedly connected to the first mounting plate 35. In other embodiments, the first driving member 31 is rotatably connected to the rotary motion mechanism 4, and the first lifting module 32 is rotatably connected to the substrate stage 2.

[0029] Furthermore, the tilting motion mechanism 3 also includes a slide rail 33 and a slider 34. The slide rail 33 is connected to the side of the substrate stage 2 facing away from the workpiece and extends along a third axis. The slider 34 is slidably connected to the slide rail 33, and the first lifting module 32 is rotatably connected to the slider 34. When the first lifting module 32 drives the substrate stage 2 to move, the slider 34 slides relative to the slide rail 33. Specifically, the first lifting module 32 is rotatably connected to the slider 34 via a first hinge 36.

[0030] Optionally, the rotary motion mechanism 4 includes a second drive member 41 and a rotary shaft 42. The second drive member 41 is disposed outside the vacuum chamber 100, and the rotary shaft 42 extends along a second axis. The second drive member 41 is driven to rotate the first end of the rotary shaft 42. The second drive member 41 can drive the rotary shaft 42 to rotate, and the second end of the rotary shaft 42 extends into the vacuum chamber 100. The substrate stage 2 is connected to the second end of the rotary shaft 42. The second drive member 41 drives the rotary shaft 42 to rotate, thereby causing the substrate stage 2 to rotate, thus realizing the rotation of the substrate stage 2.

[0031] Specifically, the rotary motion mechanism 4 also includes a second mounting plate 46, a first gear 47, and a second gear 48. The second mounting plate 46 is fixedly connected to the lifting motion mechanism 5, and the second drive member 41 is fixedly connected to the second mounting plate 46. The second drive member 41 is a drive motor. The first gear 47 is sleeved on the output shaft of the second drive member 41 and rotates synchronously with the output shaft of the second drive member 41. The second gear 48 is sleeved on the first end of the rotating shaft 42 and rotates synchronously with the rotating shaft 42. The first gear 47 and the second gear 48 are meshed together. The second drive member 41 drives the rotating shaft 42 to rotate around its own axis. The center position of the substrate stage 2 is rotatably connected to the second end of the rotating shaft 42 through a second hinge 49.

[0032] Optionally, the rotary motion mechanism 4 further includes a magnetic fluid 43 and a bellows 44. Both the magnetic fluid 43 and the bellows 44 are disposed outside the vacuum chamber 100 and fitted onto the rotating shaft 42. The first end of the bellows 44 is sealed to the outer wall of the vacuum chamber 1, the first end of the magnetic fluid 43 is sealed to the second end of the bellows 44, and the second end of the magnetic fluid 43 is sealed to the rotating shaft 42. The bellows 44 can extend and retract along the second axis. By using the magnetic fluid 43 and the bellows 44, a good sealing effect can be achieved for the vacuum chamber 100. The bellows 44 can ensure that the rotating shaft 42 moves up and down along the second axis while sealing, and the magnetic fluid 43 can ensure that the rotating shaft 42 rotates along its own axis while sealing. Both the magnetic fluid 43 and the bellows 44 are mature technologies in the field, and will not be described in detail in this embodiment.

[0033] Optionally, the substrate stage 2 is provided with functional elements, and the rotary motion mechanism 4 also includes a conductive slip ring 45. The conductive slip ring 45 is disposed within the vacuum chamber 100 and sleeved on the rotating shaft 42. The conductive slip ring 45 is used to electrically connect the functional elements to external devices. Connecting the functional elements to external devices via the conductive slip ring 45 avoids complex cable routing within the vacuum chamber 100 and prevents cable entanglement during rotation of the rotating shaft 42, thus avoiding interference with the normal operation of the sample stage used in high-vacuum coating equipment. Specifically, the functional elements include heating elements, temperature sensors, and bias motors. The conductive slip ring 45 includes a stator and a rotor. The stator is electrically connected to an external power supply or control element, and the rotor is electrically connected to the functional elements, enabling real-time conduction of electrical signals from the functional elements.

[0034] Optionally, the lifting mechanism 5 includes a third drive member 51 and a second lifting module 52. The third drive member 51 is driven and connected to the second lifting module 52, and can drive the second lifting module 52 to move up and down along the second axis. The rotary motion mechanism 4 is connected to the second lifting module 52. The third drive member 51 drives the second lifting module 52 to move up and down along the second axis, thereby driving the rotary motion mechanism 4 to move up and down, and thus driving the substrate stage 2 to move up and down.

[0035] Specifically, the third driving component 51 is a drive motor, and the second lifting module 52 can be a lead screw and nut structure or a gear and rack structure; this embodiment does not limit this. The second mounting plate 46 is connected to the second lifting module 52. The lifting motion mechanism 5 also includes a third mounting plate 53, which is mounted on the outer wall of the vacuum chamber 1. The third driving component 51 or the second lifting module 52 is mounted on the third mounting plate 53 to fix the lifting motion mechanism 5.

[0036] This embodiment also provides a high-vacuum coating equipment, which includes a coating source and the sample stage described above. The coating source is used to emit coating material into the vacuum chamber 100. The coating source can be a sputtering source, an evaporation source, or a directional source, etc., and this embodiment does not limit this. The high-vacuum coating equipment can flexibly adjust the position of the substrate stage 2 according to different coating sources, improving the versatility of the high-vacuum coating equipment. Furthermore, the tilting motion mechanism 3, the rotating motion mechanism 4, and the lifting motion mechanism 5 work together to improve the uniformity of the coating on the workpiece, accurately control the deposition parameters, and achieve uniform coating on complex-structured irregular workpieces.

[0037] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A sample stage for a high vacuum coating equipment, characterized in that, include: Vacuum cavity (1), wherein a vacuum chamber (100) is provided inside the vacuum cavity (1); A substrate stage (2) is disposed in the vacuum chamber (100) and is used to mount workpieces; A tilting motion mechanism (3) is driven and connected to the substrate stage (2). The tilting motion mechanism (3) is used to drive the substrate stage (2) to tilt around a first axis. A rotary motion mechanism (4) is connected to the substrate stage (2) and is used to drive the substrate stage (2) to rotate around a second axis. A lifting motion mechanism (5) is driven and connected to the rotary motion mechanism (4). The lifting motion mechanism (5) is used to drive the rotary motion mechanism (4) to move up and down along the second axis.

2. The sample stage for a high-vacuum coating equipment according to claim 1, characterized in that, The tilting motion mechanism (3) includes a first driving member (31) and a first lifting module (32). The substrate stage (2) is rotatably connected to the rotary motion mechanism (4). The first driving member (31) is driven to be connected to the first lifting module (32). The first driving member (31) can drive the first lifting module (32) to move up and down along the second axis. The substrate stage (2) is rotatably connected to the first lifting module (32).

3. The sample stage for a high-vacuum coating equipment according to claim 2, characterized in that, The first driving member (31) is connected to the rotary motion mechanism (4), and the substrate stage (2) is slidably connected to the first lifting module (32) along the third axis.

4. The sample stage for a high-vacuum coating equipment according to claim 3, characterized in that, The tilting motion mechanism (3) further includes a slide rail (33) and a slider (34). The slide rail (33) is connected to the side of the substrate stage (2) facing away from the workpiece and extends along the third axis. The slider (34) is slidably connected to the slide rail (33). The first lifting module (32) is rotatably connected to the slider (34).

5. The sample stage for a high-vacuum coating equipment according to claim 1, characterized in that, The rotary motion mechanism (4) includes a second drive member (41) and a rotating shaft (42). The second drive member (41) is disposed outside the vacuum chamber (100). The rotating shaft (42) extends along the second axis. The second drive member (41) is driven to connect to the first end of the rotating shaft (42). The second drive member (41) can drive the rotating shaft (42) to rotate. The second end of the rotating shaft (42) extends into the vacuum chamber (100). The substrate stage (2) is connected to the second end of the rotating shaft (42).

6. The sample stage for a high-vacuum coating equipment according to claim 5, characterized in that, The rotary motion mechanism (4) further includes a magnetic fluid (43) and a bellows (44). The magnetic fluid (43) and the bellows (44) are both disposed outside the vacuum chamber (100) and are both sleeved on the rotating shaft (42). The first end of the bellows (44) is sealed to the outer wall of the vacuum chamber (1), the first end of the magnetic fluid (43) is sealed to the second end of the bellows (44), and the second end of the magnetic fluid (43) is sealed to the rotating shaft (42). The bellows (44) can extend and retract along the second axis.

7. The sample stage for a high-vacuum coating equipment according to claim 5, characterized in that, The substrate stage (2) is provided with functional elements, and the rotary motion mechanism (4) further includes a conductive slip ring (45). The conductive slip ring (45) is disposed in the vacuum chamber (100) and sleeved on the rotating shaft (42). The conductive slip ring (45) is used to electrically connect the functional elements to external devices.

8. The sample stage for a high-vacuum coating equipment according to claim 1, characterized in that, The lifting motion mechanism (5) includes a third driving member (51) and a second lifting module (52). The third driving member (51) is driven and connected to the second lifting module (52). The third driving member (51) can drive the second lifting module (52) to lift and move along the second axis. The rotary motion mechanism (4) is connected to the second lifting module (52).

9. The sample stage for a high vacuum coating apparatus according to any one of claims 1-8, characterized in that, The sample stage for the high vacuum coating equipment also includes a control unit, and the rotary motion mechanism (4), the lifting motion mechanism (5) and the tilting motion mechanism (3) are all electrically connected to the control unit.

10. A high-vacuum coating equipment, characterized in that, Includes a coating source and a sample stage for a high-vacuum coating apparatus as described in any one of claims 1-9, wherein the coating source is used to emit coating material into the vacuum chamber (100).

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