A MOCVD preparation method for infinitely layered nickel-based high-temperature superconducting thin films

CN122314528APending Publication Date: 2026-06-30SHENCHUANG SUPERCONDUCTOR (SHENZHEN) TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHENCHUANG SUPERCONDUCTOR (SHENZHEN) TECH CO LTD
Filing Date
2026-04-02
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing technologies are difficult to prepare infinite-layer nickel-based high-temperature superconducting thin films efficiently and at low cost. Furthermore, the narrow film-forming window, slow growth rate, and low yield limit their application in superconducting wires and tapes and in the field of electronics.

Method used

Perovskite nickel oxide films were grown on single-crystal substrates using MOCVD technology, followed by CaH2 reduction treatment to prepare infinite-layer nickel-based high-temperature superconducting films. The specific steps included deposition and reduction annealing.

Benefits of technology

It has achieved large-area, rapid growth of infinite-layer nickel-based high-temperature superconducting thin films, reducing preparation costs and improving yield. The films exhibit zero resistance characteristics below 40 K, making them suitable for applications such as strong-field magnet coils, high-frequency low-loss cables, superconducting computers, and superconducting microwave devices.

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Abstract

This invention provides a method for preparing infinite-layer nickel-based high-temperature superconducting thin films using metal-organic chemical vapor deposition (MOCVD). The main concept involves dissolving a soluble metal cation precursor in a solvent at a stoichiometric ratio, forming a thin film precursor on a single-crystal perovskite oxide substrate via MOCVD; subsequently, annealing under a high-oxygen-pressure atmosphere yields a thermodynamically metastable perovskite intermediate; finally, reduction conditions are used to transform it into an infinite-layer nickel-based high-temperature superconducting thin film. The advantages of this method include low cost, suitability for large-scale, large-area preparation of superconducting thin films, flexible control of film composition, and high reproducibility. The superconducting thin film prepared using this method exhibits zero resistance below 40 K and at ambient pressure, promising to promote the large-scale application of nickel-based superconducting materials in superconducting wires and tapes and in electronics, including high-field magnet coils, high-frequency low-loss cables, superconducting computers, superconducting antennas, and superconducting microwave devices.
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