Electro-optical system with emv seal having mechanical decoupling and laser system having the same

Abstract

The invention relates to an electro-optical system (1) having an electrical system part (2) and an optical system part (3). These system parts (2, 3) are arranged relative to one another such that light (9) can pass from the electrical system part (2) into the optical system part (3) through a coupling region (6). The system (1) further comprises at least one shielding element (7) surrounding the coupling region (6) for electromagnetic shielding, which forms an electrically conductive connection of the two system parts (2, 3) to one another. Here, the shielding element (7) is arranged between the two system parts (2, 3) in order to mechanically decouple them and is configured to be able to deform flexibly. The invention also relates to a laser system having such an electro-optical system (1).

Description

Technical Field

[0001] The present invention relates to an electrical and optical system having an EMV seal, and a laser system equipped with such an electrical and optical system. Background Technology

[0002] Today, electrical systems and equipment are used in a wide variety of forms and applications, and can be quite complex. Simultaneously, there are requirements regarding electromagnetic compatibility (EMV). Therefore, special measures are often needed to prevent accidental leakage of electromagnetic radiation, particularly in systems or equipment that cannot be practically housed in a single enclosure. However, these measures, in turn, can cause other problems, such as acting as transmission paths for interference, mechanical forces, or vibrations.

[0003] As a solution, US 10 561 046 B2 describes a seal for sealing a connection between two housing components of an electrical or electronic device according to an IP protection rating and in terms of EMV. The seal has a sealing body and a metal carrier connected to the sealing body, the metal carrier having numerous contact sections for electrical contact with the boundary surfaces of the two housing components. Here, the seal is pressed between these boundary surfaces. While this achieves an EMV seal when necessary, mechanical forces can be transmitted between the housing components via the seal, which can lead to undesirable interference or effects. Summary of the Invention

[0004] The objective of this invention is to achieve safe, robust, and precise operation of multi-part electrical and optical systems.

[0005] This task is accomplished through the subject matter of the main claim and the parallel claims, or independent claims. Other possible configurations of the invention are given in the dependent claims, the description, and the drawings. Features, advantages, and possible configurations set forth within the scope of the description for one of the subjects of the independent claims are at least similarly regarded as the corresponding subjects of the other independent claims, as well as features, advantages, and possible configurations of each possible combination of the subjects of the independent claims, and, where necessary, combined with one or more of the dependent claims.

[0006] The electro-optical system according to the invention comprises an electrical system portion for generating and / or guiding non-optical electromagnetic radiation or fields and an optical system portion for generating and / or guiding light. Here, "light" should be understood in a broad sense, and thus may specifically refer to the visible spectral range, or also to the adjacent infrared and / or ultraviolet spectral ranges. In the context of the invention, non-optical radiation or fields are correspondingly located in spectral ranges outside the aforementioned ranges, i.e., for example, in the high-frequency or radio-frequency (HF, RF) range. The system according to the invention is referred to herein as an electro-optical system, meaning that it has primarily electrically or electrically operated functions and primarily optical or optically operated functions and components. Therefore, the system does not necessarily need to utilize true electro-optical effects.

[0007] In the system according to the invention, the electrical system portion and the optical system portion are arranged relative to each other such that light can enter from the electrical system portion into the optical system portion through a connection or coupling region, or vice versa. The system according to the invention also has at least one shielding element, i.e., an EMV sealing element, which surrounds the coupling region for electromagnetic shielding or sealing. For example, the shielding element can therefore extend circumferentially around the propagation or beam direction of light extending in the coupling region between the two system portions, and here extends from the electrical system portion in or along the propagation or beam direction to the optical system portion. The shielding element is therefore arranged such that it forms or creates a conductive connection between the electrical system portion and the optical system portion in the coupling region. For this purpose, the shielding element can be conductively fixed to the electrical system portion, i.e., the housing of the electrical system portion, for example, with one side, and conductively fixed to the optical system portion or the housing of the optical system portion with the other side.

[0008] For example, each of the two system components may have its own electromagnetic shielding housing. However, these housings may each have a penetration or groove on at least one side, particularly on the sides facing each other, to allow light to pass through. However, especially in the electrical system component, electromagnetic radiation or field leakage into the surrounding environment should be prevented. This is achieved here by shielding elements. In a laser system, the electrical system component may, for example, include components for electric or electromagnetic pumping (i.e., for amplifying the laser), while the optical system component may, for example, include optical components, such as mirrors and / or lenses, for directing and / or shaping the laser or laser beam.

[0009] According to the invention, the shielding element is configured to be capable of repeated and reversible flexible, particularly inelastic, deformation without damage, in order to mechanically decouple the electrical system portion from the optical system portion. In other words, the shielding element can thus be arranged and configured to minimize the transmission of mechanical forces and vibrations from one system portion to another while maintaining electromagnetic shielding or sealing. By virtue of the shielding element's ability to deform at least locally and substantially inelastically, restoring forces or the resulting mechanical effects on one or both system portions that would otherwise occur can be avoided or minimized during deformation. In particular, for this purpose, the shielding element cannot be tensioned or pre-tightened between the two system portions, nor can it be pressed between or by them. For example, the shielding element can be flexibly deformed in the intermediate region between the two system portions and is at least substantially immune to mechanical stress or force. In the end region where it is in mechanical contact with the system part (i.e., fixed to or abutting against the system part), mechanical forces or stresses may be applied where necessary to ensure tight or sealed mechanical and electromagnetic contact between the shielding element and the system part, and to maintain that contact, for example, even when one of the two system parts deforms and moves relative to the other.

[0010] Therefore, in the prescribed installation position, the shielding element achieves damage-free relative movement between the two system parts while maintaining EMV shielding. This achieves mechanical decoupling due to the flexibility of the shielding element, i.e., bending relaxation or compliance, or the lowest possible stiffness. In existing solutions, there is often a problem: especially, electrical system parts used to generate high frequencies may be prone to mechanical oscillations or vibrations, or may be subjected to mechanical forces themselves, which can be transmitted to the optical system parts when rigidly coupled or coupling with them to transmit mechanical forces. However, optical system parts may be highly sensitive or susceptible to mechanical forces, vibrations, shocks, or similar conditions. Therefore, for optically sensitive components, such as components of a laser system, even relatively small forces of less than 10 Newtons can significantly affect optical alignment and thus ultimately optical performance, efficiency, or effectiveness. Optical alignment refers to the adjustment or alignment of the axis of an optical component, or the optical path or beam axis. This invention addresses this problem. This can also be supported by the arrangement of shielding elements between two system parts (i.e., between corresponding housings), with the shielding elements automatically or potentially positioned at a distance from mechanically or vibrationally sensitive optical components of the optical system. This simplifies the process by avoiding direct coupling or action paths of mechanical forces between the shielding elements and the corresponding optical components, while still establishing or ensuring electromagnetic shielding or sealing of the entire electro-optical system. This is evident, for example, compared to placing the corresponding sealing points for electromagnetic sealing or shielding directly at the corresponding sensitive optical components, where implementing such sealing or shielding, at least substantially without mechanical decoupling, would likely be much more difficult.

[0011] The shielding element itself can be so flexible or deformable that, in the event of movement, thermal expansion or contraction, vibration, etc., excessive force is not transmitted from one system part to another via the shielding element, thus preventing errors in optical alignment. Therefore, stable optical alignment can be achieved at all operating points of the electro-optical system or the entire device comprising that system. Conversely, if, for example, a steel corrugated tube is used for electromagnetic shielding, due to its rigidity, even when the corrugated tube is installed on the system part with only small mechanical stress or prestress, excessive mechanical force may be transmitted from one system part to another via it.

[0012] In one possible configuration of the invention, the electrical system portion is or includes at least a portion of a high-frequency generator and / or amplifier. This high-frequency generator is particularly designed for use in laser systems or for applications within laser systems. Such a generator can produce mechanical vibrations during operation, making mechanical decoupling via shielding elements particularly useful. The amplifier can be particularly configured or designed for amplifying laser light. Therefore, the electrical system portion may, for example, include connections and / or electrodes, particularly at least a pair of high-frequency electrodes or pump electrodes and / or coils and / or the like. Likewise, such devices will also produce mechanical vibrations of very different frequencies during operation, and, for example, induce thermal expansion effects. Especially in applications involving laser systems, the optical system portion may further be particularly sensitive to such vibrations and / or—for example—relative motion or positional changes caused by heat. However, simultaneously, the use of high-frequency energy (i.e., a corresponding purely electrical or electromagnetically coupled input of pump energy) may be particularly easy to achieve and can be controlled with extremely high precision. Overall, the configuration presented herein can therefore present particularly advantageous applications of the invention.

[0013] In another possible configuration of the invention, the optical system portion is or includes a beam source or beam generator for lasers and / or optical devices. There, mechanical forces and vibrations may be particularly critical, for example, in terms of optical alignment, efficiency, and reliable operation. Accordingly, the mechanical decoupling effect of shielding elements may be particularly useful here. The optical devices may have one or more optical components or parts, for example, for guiding and / or shaping light or beams. The optical devices may, for example, include at least one mirror and / or a lens and / or a beam splitter and / or a phase element and / or the like for applying or shifting phase.

[0014] In another possible configuration of the invention, the shielding element is at least partially capable of flexible, and in particular inelastic, deformation without damage in all three spatial directions. This allows for a particularly complete and effective mechanical decoupling between the electrical system portion and the optical system portion. Depending on the configuration or function of the system portion, this enables particularly robust, reliable, and / or precise operation. To achieve the flexibility or deformability specified herein, the shielding element can be, for example, appropriately determined to be oversized (i.e., having additional material compared to the minimum material required to connect the two system portions) in the intermediate region (i.e., between its ends or fixing points), and / or may not have continuous rigid or stiff elements or structures, especially those connected to each other and extending longitudinally in different directions.

[0015] In another possible configuration of the invention, the shielding element is designed such that, while maintaining the conductive connection between the two system parts, its extension dimensions and / or at least partial positions in all spatial directions capable of non-damaging flexible deformation, starting from a central or intermediate position, can be changed by at least 5 mm respectively. The central or intermediate position can refer to a position or arrangement of the shielding element and the two system parts in which, in or at this position or arrangement, equal changes in the shielding element or relative movement of the two system parts in two respective directions are possible in each dimension without damaging the shielding element or detaching it from either system part. Starting from this, the shielding element can therefore, for example, be changed by at least 5 mm, and shortened by at least 5 mm in the connection direction between the two system parts, while allowing for lateral movement of at least 5 mm in each of the respective two directions (i.e., in the positive and negative height directions and in the positive and negative lateral directions) of one system part relative to the other in a lateral direction perpendicular to the connection direction. This design of shielding components is typically simple and low-cost to implement, requiring little installation space and minimal added weight, while providing ample leeway for reliable and robust mechanical decoupling of the two system components in many practical applications.

[0016] In another possible configuration of the invention, the shielding element is designed such that it allows the two system parts to rotate a few degrees relative to each other about all three spatial axes without damage. In other words, for example, one of the two system parts can rotate relative to the other system part about one or more arbitrary spatial axes, for example, at least or at most 5°, or at least or at most 10°, without damaging the shielding element or interrupting the electromagnetic shielding. This allows for particularly effective mechanical decoupling of the two system parts, and thereby ultimately contributes to the particularly robust, reliable, and precise operation of the respective systems.

[0017] In another possible configuration of the invention, the shielding element is at least partially, and especially only partially, formed of a metallic material or composition. This enables particularly effective electromagnetic shielding with very little material consumption. To achieve flexibility or deformability of the shielding element, the metallic material can be configured, for example, as a foil or as a coating of a flexible or deformable carrier material, or embedded in a flexible or deformable matrix of the carrier material.

[0018] In another possible configuration of the invention, the shielding element is configured at least or only partially, or at least or only partially, as a textile and / or pad and / or mesh or mesh structure. This allows for the realization of the flexibility and deformability described elsewhere while simultaneously achieving particularly effective mechanical decoupling. As a textile, so-called EMV textiles can be used here, for example, which may contain, for example, metal wires or filaments woven therein. The pad can be formed, for example, at least partially, of a conductive elastomer or an elastomer or rubber material internally embedded with or coated with a conductive (especially metallic) material or substance. The mesh configuration can be implemented, for example, in the form of a mesh or grid structure, or in the form of a woven conductive metal wire, i.e., for example, a copper mesh or copper wire woven fabric. Here, correspondingly finer metal wires, such as scraped or finely drawn metal wires, can be used to achieve the described flexible deformability. In the configuration proposed in this paper, the shielding element can be, in particular simply and effectively, both electromagnetically shielded and flexible or compliant, i.e., unable to maintain its shape autonomously without support and therefore correspondingly capable of being, or configured to be, flexible, especially inelastically deformable.

[0019] In a possible extension of the invention, a fixed hollow structure extends between the electrical system portion and the optical system portion in the coupling region. A shielding element is then at least partially abutted against the fixed hollow structure externally. For example, before mounting the hollow structure, the shielding element can be pulled onto it from one side along or parallel to the central axis of the hollow structure. The fixed hollow structure can be, in particular, a hollow cylinder or ring. Despite the flexibility and deformability of the shielding element, the fixed hollow structure ensures reliable transmission of light energy through the coupling region at all times. To prevent the transmission of mechanical forces or vibrations between system portions via the fixed hollow structure, the hollow structure can be guided, for example, through respective openings in the system portions or their housings, and movably supported therein. Similarly, the fixed hollow structure may not extend completely to the optical system portion or its housing at its respective ends, allowing for gaps or distances therein. The fixed hollow structure can then be carried or held, for example, by the shielding element, and / or support the shielding element itself, i.e., it provides some degree of shaping. The shielding element can be fixed to one or both of the system components, or to one or both of the system components or their respective housings. The shielding element can then, if necessary, surround or bridge the gap or distance between the hollow structure and the system component or housing, providing electromagnetic shielding or sealing. For example, in a laser system, the hollow structure can be a closed hollow cylinder (such as quartz glass or the like). Its interior may contain, in particular, a gaseous laser medium or laser amplification medium. For example, in the electrical system component, energy can be coupled into this laser medium or laser amplification medium, for example, by means of electrodes arranged adjacent to it, and then that energy is transferred to the passing laser. This hollow structure can extend, for example, from the electrical system component into the coupling region or all the way into the adjacent optical system component. Similarly, this hollow structure can extend, for example, through the electrical system component and protrude on opposite sides beyond the electrical system component or its housing, for example, into the coupling region or optical system component respectively arranged there.

[0020] In another possible configuration of the invention, the shielding element is at least partially frictionally locked to or abutted against the electrical system portion and / or the optical system portion. For example, the shielding element may be secured to the system portion by means of respective clamping devices or respective clamping rings. If the shielding element is, for example, fixed to a corresponding housing of the system portion, these housings may have openings or recesses that allow light to pass through or transmit. The shielding element can then be secured around these openings or recesses. Frictionally locked fixing or coupling here achieves particularly good or sealed contact between the shielding element and the respective system portion or housing, thereby achieving particularly good electromagnetic shielding or sealing. Furthermore, frictionally locked connections prevent damage to the shielding element, thereby enabling a particularly flexible and easy-to-maintain design of the electro-optical system. Through frictionally locked connections or couplings, relative movement between the shielding element and the corresponding system portion can be allowed, for example, radially (i.e., perpendicular to the direction of light or beam propagation in the coupling region), without sacrificing electromagnetic sealing. For this purpose, the shielding element may, for example, have a perforated disk with an inner diameter large enough to allow relative movement in the radial direction (e.g., relative to a hollow structure mentioned elsewhere, which can be guided through the perforated disk). The perforated disk may frictionally engage with the respective system portion or with a corresponding mating member, which may be fixedly positioned relative to the respective system portion or as part of the respective system portion or its housing.

[0021] In another possible configuration of the invention, the shielding element has at least one fold and / or corrugation, either in a prescribed mounting position or immediately after the initial system assembly. This includes one or more creases, wavy deformations, or upward or inward protrusions. The fold and / or corrugation extends transversely to the connection direction or connecting line extending from the electrical system portion to the optical system portion in the coupling region. Therefore, the shielding element can be shaped, for example, like a folded corrugated tube, or, for example, compressed in the connection direction as a textile, mat, or mesh, as described elsewhere, to create or produce folds. At least one fold or corrugation can be at least partially flattened when the two system portions move away from each other in the connection direction or along the connection direction. In this case, the length of the shielding element in the connection direction or along the connection direction can be increased without substantially any corresponding tension being transferred from one system portion to the other. Similarly, when the shielding element shortens or compresses in or along the connection direction, one or more folds or corrugations are created, and / or one or more predefined folds, creases, or fold lines serve as predetermined locations or starting points for deformation, wrinkling, or bulging of the shielding element. This avoids or at least reduces or keeps the corresponding pressure transmitted between system parts at a particularly low level. The shielding element configuration proposed herein therefore allows for shortening or compression with particularly low resistance, as well as lengthening or stretching of the shielding element, thereby achieving particularly effective mechanical decoupling between the two system parts.

[0022] In another possible configuration of the invention, the electro-optical system further comprises at least one second optical system portion. Accordingly, the optical system portion mentioned elsewhere may also be referred to as the first optical system portion. The second optical system portion is connected to the electrical system portion via a corresponding second coupling region, wherein the second coupling region is electromagnetically shielded by means of its own or a second shielding element. The two optical system portions may, for example, be arranged on different, particularly opposite, sides of the electrical system portion, or coupled to or connected to it. The construction or configuration of the second shielding element may be the same as that of the shielding element mentioned elsewhere, wherein the latter may also be referred to as the first shielding element. In the configuration presented herein, the system according to the invention has more than two system portions, which makes the mechanical decoupling of the corresponding system portions from each other more important and useful.

[0023] The present invention also relates to a laser system comprising an electro-optical system according to the invention. Here, the electro-optical system (and thus the laser system according to the invention) is configured to generate and / or amplify laser light or laser radiation. The electrical system portion is particularly configured to provide electrical or electromagnetic energy. The laser system according to the invention may in particular be a laser system mentioned in conjunction with or corresponding to the electro-optical system according to the invention.

[0024] Other features of the invention can be derived from the following description and reference to the accompanying drawings. The features and combinations thereof mentioned above in the specification, as well as the features and combinations thereof shown separately in the accompanying drawings and / or in the drawings, can be used not only in the given combinations, but also in other combinations or individually, without departing from the scope of the invention. Attached Figure Description

[0025] The attached diagram shows: Figure 1 A partial schematic diagram of an electro-optical system with connected but mechanically decoupled system parts; Figure 2 A partial schematic diagram of the electromagnetic sealing area between system components; Figure 3 : A partially exploded schematic diagram of the component from the sealing area; and Figure 4 : A partial schematic cross-sectional view of the component from the sealed area. Detailed Implementation

[0026] Figure 1 A partial schematic diagram of system 1 is shown. System 1 includes an electrical system section 2 and an optical system section 3, and thus it may also be referred to as an electro-optical system 1. The electrical system section 2 is used to generate or provide electromagnetic high-frequency or radio-frequency fields, for example, for amplifying lasers. The optical system section 3 is used to generate and / or guide lasers. The corresponding laser can then be output, for example, via an output terminal 4 shown schematically here.

[0027] For example, system 1 may have multiple such optical system portions 3 on both sides of electrical system portion 2, or the optical system portions 3 may be configured as multi-part.

[0028] To enable the laser to pass through system parts 2 and 3, they are arranged relative to each other in a specific manner. However, to prevent electromagnetic fields, i.e., radio frequency radiation, from leaking from electrical system part 3, these two system parts 2 and 3 are interconnected. However, electrical system part 2 is not always free from oscillations, or is not always free from motion or dimensional changes, for example, due to heat. Transmitting such interference to optical system part 3, or, if necessary, to the optical components therein, can negatively affect the beam guidance, beam quality, and / or similar aspects of the laser light, as if it were an external force, for example, due to displacement and / or deformation of the components of optical system part 3. Therefore, decoupling of motion and / or force between the two system parts 2 and 3 is desirable. At the same time, in the sense of electromagnetic compatibility of the present invention, uncontrolled propagation of electromagnetic radiation from electrical system part 2, or the entire system 1, into the surrounding environment should also be avoided.

[0029] Therefore, the optical system parts 3 are connected to the sidewalls 5 of the electrical system parts 2 via coupling regions 6 located in the middle. Shielding elements 7 are present in the coupling regions 6. The shielding elements 7 serve for electromagnetic shielding or sealing and are configured to maximize the mechanical decoupling between the optical system parts 3 and the electrical system parts 2. For this purpose, the shielding elements 7 are at least partially formed of conductive material, thereby establishing conductive contact between the respective optical system parts 3 and the electrical system parts 2. Simultaneously, the shielding elements 7 are flexible or flexibly deformable. For example, the shielding elements 7 can be formed of textiles or corresponding pads or mesh structures with electromagnetic shielding properties, and have extremely low stiffness, allowing them to move in all six translational and rotational degrees of freedom without transmitting significant mechanical forces between the system parts 2 and 3 that are respectively coupled to each other. Therefore, through this mechanical decoupling configuration or function of the shielding elements 7, external mechanical influences on the respective optical system parts 3 can be particularly avoided or reduced, thereby preventing, for example, negative impacts on the alignment of the optical components of the respective optical system parts 3.

[0030] To achieve the corresponding flexibility or deformability of the shielding elements 7, these shielding elements can not only be made of correspondingly flexible materials, but can also each have one or more folds 8. For example, the housings of the electrical system section 2 and the optical system section 3 may have, in particular, circular openings, channels, or penetrations on their opposing sides, around which one end of the respective shielding element 7 is fixed. Here, the shielding element 7 can be folded or corrugated, and installed with at most very low mechanical stress. In the specified system 1 configuration, the fixing or contact points of the shielding element 7 with the respective system sections 2, 3 can withstand, for example, a mechanical force of at least 10 N, or at most 5 N, or at most 1 N. Thus, at least almost mechanically decoupled radio frequency sealing can be achieved on the optically sensitive component (i.e., on the optical system section 3 in this document) by means of the shielding element 7, and at least substantially powerless relative movement between the system sections 2, 3 and each other can be allowed without loss of radio frequency sealing (i.e., EMV shielding). This is because the fold 8 can provide or allow the shielding element 7 to fully compensate for movement or shape changes, such that, for example, relative movement of at least 5 mm in all three spatial directions and relative rotation (e.g., up to 10° or more) about all three spatial axes can be generated between interconnected system parts 2 and 3.

[0031] System 1 is configured here for use in a laser device or as part of a laser device. For illustration, a laser beam 9 passing through system 1 is shown. The laser beam 9 can be directed toward the electrical system section 3 at a reflector 10 in one of the optical system sections 3, and the reflector 10 can be one of the aforementioned optical components or the aforementioned light-sensitive structural components. A gas duct 11, made of, for example, quartz glass or the like, is arranged in this electrical system section 2. Exemplarily, this gas duct 11 extends from one of the optical system sections 3 through the electrical system section 2 to the other optical system section 3 and through the coupling region 6 located in the middle. The arrangement of the gas duct 11 allows the laser beam 9 to pass through the gas duct 11 axially. A gas can be contained in the gas duct 11, by means of which the passing laser beam 9 can be amplified. For this purpose, the electrical system section 2 also includes electrodes 12 for generating a radio frequency field. These electrodes can thus be supplied with radio frequency power, and through their arrangement around the gas duct 11, energy is coupled into the gas contained therein.

[0032] To illustrate the connection between shielding element 7 and the electromagnetic seals of system parts 2 and 3, Figure 2 A partial schematic cross-sectional view is shown. The end portion of the shielding element 7 that annularly surrounds the trachea 11 is shown here. This portion has a radially extending groove 13 (or slot) and a spring element 14 disposed therein or on it. The groove 13 is shown here only schematically and exemplary to have a rectangular shape, and may also have, for example, a rounded bottom and / or sloping sidewalls. The spring element 14 may, for example, be fixed at its inner edge facing the trachea 11, while its outer edge may be free or slack.

[0033] Also shown is a perforated disk 15 that annularly surrounds the trachea 11 and the shielding element 7, or a portion thereof as shown herein. This perforated disk 15 may, for example, be fixed to the respective system portions 2, 3, or be part of their housing. The perforated disk 15 has an inwardly projecting annular region or flange, i.e., in the direction toward the trachea 11, which is referred to herein as a spring contact element 16. This element extends partially into the recess 13. In particular, the spring contact element 16 does not touch the bottom of the recess 13. Thus, a compensation area 17 is maintained between the spring contact element 16 and the bottom of the recess 13, which allows the shielding element 7 to move radially relative to the perforated disk 15 and also relative to the respective system portions 2, 3.

[0034] Spring element 14 can be mechanically preloaded, such that its free end, i.e., its outer edge, is subjected to force in the direction toward the opposing inner wall of groove 13. For this purpose, spring element 14 can be made, for example, of spring steel. Spring element 14 thus presses against spring contact element 16, and spring contact element presses against the opposing inner wall of groove 13. Thus, an electromagnetic seal frictional locking contact is established there between shielding element 7 and the corresponding system parts 2, 3, which allows relative movement and therefore dampens force transmission.

[0035] To further illustrate, Figure 3 A partial exploded cross-sectional view of a component that can be used near one of the coupling regions 6 to achieve the electromagnetic seal connection between the shielding element 7 and the respective system parts 2, 3 is shown. A perforated disc 15, which can be fixed to the respective system parts 2, 3, is also shown exemplarily here. In the illustrated variant, an axial compression spring washer 18 and a radial decoupling spring washer 19 are shown, for example, as components of the shielding element 7. They can be made, for example, of spring steel. The axial compression spring washer 18 functionally corresponds to... Figure 2 The spring element 14 generates a clamping force in the axial direction to ensure that the shielding element 7 abuts against the perforated disk 15, and thus against the respective system parts 2, 3. A radial decoupling spring washer 19 abuts against the axial compression spring washer 18, but has a smaller diameter, thereby allowing the shielding element 7 to undergo compensated movement in the radial direction (i.e., perpendicular to the beam direction of the laser beam 9) relative to the perforated disk 15 or the corresponding system parts 2, 3. In the axial direction, these components can be held together by the clamping ring 20.

[0036] To further illustrate, Figure 4 It shows Figure 3 A partial schematic detail view of the cross-section of the component located in the specified installation position. Here it can be seen that the inclined, upright, or bent axial compression spring washer 18 can rest against either the radial decoupling spring washer 19 or against the perforated disc 15 and / or the clamping ring 20. The smaller-diameter radial decoupling spring washer 19, while maintaining contact with the axial compression spring washer 18, can perform or enable compensating movement in the radial direction into the compensation region 17.

[0037] Overall, the described examples illustrate how mechanically decoupled radio frequency seals can be implemented and applied.

[0038] List of reference numerals 1 System 2. Electrical System Section 3. Optical System Section 4 Output terminal 5. Sidewalls 6. Coupling Region 7 Shielding components 8 Folding section 9 laser beams 10 Reflectors 11 Trachea 12 electrodes 13 Grooves 14 Spring elements 15 Perforated Discs 16 Spring contact elements 17 Compensation Area 18 Axial compression spring washers 19 Radial decoupling spring washers 20 Clamping rings

Claims

1. An electro-optical system (1) comprising: an electrical system portion (2) for generating and / or guiding a non-optical electromagnetic field, an optical system portion (3) for generating and / or guiding light (9), and a shielding element (7) surrounding a coupling region (6) for electromagnetic shielding, the electrical system portion and the optical system portion being arranged relative to each other such that the light (9) can enter from the electrical system portion (2) into the optical system portion (3), the shielding element forming a conductive connection between the electrical system portion (2) and the optical system portion (3), wherein, The shielding element (7) is configured to be flexibly deformable in order to mechanically decouple the electrical system part (2) from the optical system part (3).

2. The electro-optical system (1) according to claim 1. Its features are, The electrical system portion (2) includes at least a portion (12) of a high-frequency generator and / or an amplifier, the high-frequency generator being particularly for a laser system, and the amplifier being particularly for amplifying lasers.

3. The electro-optical system (1) according to any one of the preceding claims. Its features are, The optical system part (3) includes a beam generator and / or optical devices (10) for the laser (9).

4. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is capable of flexible, and in particular inelastic, deformation in all three spatial directions.

5. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is designed such that, while maintaining the two system parts (2, 3) electrically connected to each other, its extension scale and / or position in all spatial directions in which it can flexibly deform can be changed by at least 5 mm from the center position.

6. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is designed such that it allows the two system parts (2, 3) to rotate a number of degrees relative to each other about all three spatial axes without damage.

7. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is at least partially formed of a metallic material.

8. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is configured as textiles, mats, or nets.

9. The electro-optical system (1) according to claim 8. Its features are, In the coupling region (6), a fixed hollow structure (11), in particular a hollow cylinder or ring, extends between the electrical system part (2) and the optical system part (3), and the shielding element (7) is externally attached to the fixed hollow structure (11).

10. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) is frictionally locked against the electrical system portion (2) and / or the optical system portion (3).

11. The electro-optical system (1) according to any one of the preceding claims. Its features are, The shielding element (7) has at least one fold (8) and / or corrugated portion (8) extending transversely to the connection direction, the connection direction extending from the electrical system portion (2) to the optical system portion (3) in the coupling region (6).

12. The electro-optical system (1) according to any one of the preceding claims. Its features are, The system (1) further includes a second optical system section (3), and the coupling region (6) between the second optical system section and the electrical system section (2) is electromagnetically shielded by means of its own shielding element (7).

13. A laser system having an electro-optical system (1) according to any one of the preceding claims, said electro-optical system being configured to generate and / or amplify laser light (9).

Images