A three-axis gyroscope

Abstract

This application discloses a three-axis gyroscope, comprising: a central coupling structure; a first torsion mass block, a second torsion mass block, a third torsion mass block, and a fourth torsion mass block, coupled to the central coupling structure; a first driving mass block, a second driving mass block, a third driving mass block, and a fourth driving mass block, adjacent driving mass blocks being coupled to each other; a first detection mass block, a second detection mass block, a third detection mass block, and a fourth detection mass block, each detection mass block being located within and coupled to a corresponding driving mass block; and a shared coupling structure, wherein the first, second, third, and fourth detection mass blocks are coupled to the shared coupling structure, and each torsion mass block is coupled to the shared coupling structure. The three-axis gyroscope provided by this application can significantly reduce zero-bias drift and temperature sensitivity.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a MEMS three-axis gyroscope. Background Technology

[0002] MEMS (Micro-Electro-Mechanical Systems) gyroscopes, as a crucial component of inertial sensors, are widely used in consumer electronics, automotive electronics, industrial control, and emerging smart devices. With the rapid development of high-precision applications such as drones, augmented reality / virtual reality (AR / VR), and autonomous driving, more stringent requirements are being placed on the performance of MEMS gyroscopes, particularly in terms of zero-bias stability, temperature adaptability, vibration resistance, and long-term operational reliability. Traditional three-axis gyroscope structures are prone to increased zero-bias drift when facing complex environmental stresses due to substrate deformation, uneven thermal stress, or mechanical asymmetry, thus affecting the accuracy of angular velocity measurement and the overall system performance. Furthermore, in multi-axis integrated designs, effectively decoupling mechanical crosstalk between detection axes and achieving a balance between high sensitivity and high robustness within a limited chip area remains a key challenge in current technological development.

[0003] To address the aforementioned issues, various improved MEMS gyroscopes have been proposed in existing technologies, including differential detection mechanisms, optimized topology layouts, and the introduction of decoupling frameworks to enhance device symmetry and stability. However, existing structures still suffer from problems such as detection electrodes deviating from the topological center, uneven mass distribution, or complex coupling paths, leading to non-ideal responses under temperature changes or external vibration excitation. Therefore, a novel three-axis gyroscope mechanical architecture is urgently needed, capable of efficiently integrating driving, detection, and decoupling functions, thereby significantly reducing zero-bias temperature drift and improving anti-interference performance. Summary of the Invention

[0004] In view of the above problems, the purpose of this application is to provide a three-axis gyroscope that significantly reduces zero-bias drift and temperature sensitivity.

[0005] According to one aspect of the present invention, a three-axis gyroscope is provided, comprising: a central coupling structure; a first detection structure including a first torsion mass block and a second torsion mass block with identical structures for detecting angular velocity in the X-axis direction; a second detection structure including a third torsion mass block and a fourth torsion mass block with identical structures for detecting angular velocity in the Y-axis direction, wherein the first, second, third, and fourth torsion mass blocks surround the central coupling structure and are respectively coupled to the central coupling structure; a first driving mass block, a second driving mass block, a third driving mass block, and a fourth driving mass block, wherein adjacent driving mass blocks among the first, third, second, and fourth driving mass blocks are coupled to each other; and a third detection structure including a first detection mass block, a second detection mass block, a third detection mass block, and a fourth detection mass block with identical structures. The system comprises a gauge block and a fourth detection mass block, wherein each of the first, second, third, and fourth detection mass blocks is located in and coupled to its corresponding first, second, third, and fourth driving mass blocks, and the third detection structure is used to detect the angular velocity in the Z-axis direction; a shared coupling structure surrounds and is coupled to the first, second, third, and fourth detection mass blocks, wherein the shared coupling structure further surrounds the first, second, third, and fourth torsional mass blocks, and each of the first, second, third, and fourth torsional mass blocks is coupled to the shared coupling structure.

[0006] Optionally, the first, second, third, and fourth torsional mass blocks are located in the inner region of the quadrilateral formed by the shared coupling structure.

[0007] Optionally, the first, second, third, and fourth torsional mass blocks surround the central coupling structure to form a quadrilateral region.

[0008] Optionally, the first detection mass block is located in the first driving mass block, the second detection mass block is located in the second driving mass block, the third detection mass block is located in the third driving mass block, and the fourth detection mass block is located in the fourth driving mass block. The first torsional mass block is coupled to the first driving mass block via the shared coupling structure, the second detection mass block is coupled to the second driving mass block via the shared coupling structure, the third torsional mass block is coupled to the third driving mass block via the shared coupling structure, and the fourth torsional mass block is coupled to the fourth driving mass block via the shared coupling structure.

[0009] Optionally, the shared coupling structure includes: a first group of coupling rods, a second group of coupling rods, a third group of coupling rods, and a fourth group of coupling rods with identical structures. The first group of coupling rods is located between the first detection mass block and the first torsional mass block, the second group of coupling rods is located between the second detection mass block and the second torsional mass block, the third group of coupling rods is located between the third detection mass block and the third torsional mass block, and the fourth group of coupling rods is located between the fourth detection mass block and the fourth torsional mass block; and four groups of first coupling beams, wherein adjacent groups of coupling rods in the first, second, third, and fourth groups are respectively coupled via corresponding first coupling beams.

[0010] Optionally, the third detection structure further includes: four sets of second coupling beams, wherein each of the first detection mass block, the second detection mass block, the third detection mass block and the fourth detection mass block is coupled to a corresponding set of coupling rods via a set of second coupling beams, wherein each set of coupling rods includes at least two coupling rods connected via the corresponding second coupling beams.

[0011] Optionally, it also includes: four sets of connecting beams, wherein each of the first, second, third, and fourth torsional mass blocks is coupled to a corresponding set of coupling rods via a set of connecting beams.

[0012] Optionally, the stiffness of the second coupling beam in the detection direction is greater than the stiffness of the second coupling beam in the driving direction.

[0013] Optionally, adjacent torsional mass blocks among the first, third, second, and fourth torsional mass blocks are coupled to each other.

[0014] Optionally, the first and second torsional mass blocks are arranged in a mirror image about the X-axis, and the third and fourth torsional mass blocks are arranged in a mirror image about the Y-axis.

[0015] Optionally, it further includes: four sets of third coupling beams, each set of the third coupling beams being coupled to the central coupling structure, and coupling two adjacent torsional mass blocks of the first, third, second, and fourth torsional mass blocks; and four sets of first driving beams, each torsional mass block of the first, third, second, and fourth torsional mass blocks being coupled to the central coupling structure via the corresponding first driving beam.

[0016] Optionally, the third detection structure further includes: four sets of detection beams, each of the first, second, third and fourth detection mass blocks being coupled to the corresponding driving mass block via a set of detection beams, wherein the four sets of detection beams are symmetrical about the X-axis, symmetrical about the Y-axis and centrally symmetrical.

[0017] Optionally, it further includes: four sets of first anchor points, with a corresponding set of first anchor points provided between every two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks; four sets of second driving beams located inside the first anchor points, with each set of second driving beams connected to a corresponding set of first anchor points, and every two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks being coupled via a corresponding set of second driving beams; and four sets of rotational coupling structures located outside the first anchor points, with each set of rotational coupling structures connected to a corresponding set of first anchor points, and a corresponding set of rotational coupling structures provided between every two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks, and every two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks also being coupled via a corresponding set of rotational coupling structures.

[0018] Optionally, the four sets of first anchor points are symmetrical about an axis with an angle of 45° between them and the X-axis and Y-axis, the four sets of second drive beams are symmetrical about an axis with an angle of 45° between them and the X-axis and Y-axis, and the four sets of rotational coupling structures are symmetrical about an axis with an angle of 45° between them and the X-axis and Y-axis.

[0019] Optionally, it further includes: four sets of second anchor points, with a set of second anchor points provided on the side of each of the first, third, second, and fourth driving mass blocks away from the common coupling structure; and four sets of third driving beams, with each set of second anchor points coupled to the corresponding driving mass block via a set of third driving beams.

[0020] Optionally, each of the first, third, second, and fourth driving mass blocks further includes a first cavity, a second cavity, a third cavity, and a fourth cavity. The first cavity, the second cavity, and the third cavity are located on the side away from the common coupling structure, and the fourth cavity is located on the side close to the common coupling structure. Each of the first, second, third, and fourth detection mass blocks is located in the fourth cavity of the corresponding driving mass block. The first cavity and the third cavity are provided with driving comb teeth, and the second cavity is provided with driving feedback comb teeth. The second cavity is located between the first cavity and the third cavity.

[0021] Optionally, in the driving mode, the first driving mass block and the second driving mass block move in opposite phases along the Y-axis, the first detection mass block moves in phase with the first driving mass block, the first torsional mass block moves in phase with the first driving mass block, the second detection mass block moves in phase with the second driving mass block, and the second torsional mass block moves in phase with the second driving mass block; the third driving mass block and the fourth driving mass block move in opposite phases along the X-axis, the third detection mass block moves in phase with the third driving mass block, and the third torsional mass block indirectly moves in phase with the third driving mass block. The fourth detection mass block moves in phase with the fourth driving mass block, and the fourth torsional mass block indirectly moves in phase with the fourth driving mass block. Specifically, at the first moment in the driving mode of the three-axis gyroscope, the first and second driving mass blocks move towards the center of the three-axis gyroscope, while the third and fourth driving mass blocks move away from the center of the three-axis gyroscope. At the second moment in the driving mode of the three-axis gyroscope, the first and second driving mass blocks move away from the center of the three-axis gyroscope, while the third and fourth driving mass blocks move towards the center of the three-axis gyroscope.

[0022] Optionally, in the X-axis angular velocity detection mode, each of the first, second, third, and fourth driving mass blocks does not move due to the constraints of the first and second anchor points; the first, second, third, and fourth detection mass blocks in the third detection structure are decoupled from the shared coupling structure and do not move; the first, second, third, and fourth torsional mass blocks, the central coupling structure, and the shared coupling structure together form a whole torsional structure, which torsionally moves around the X-axis centerline to detect the externally input X-axis angular velocity.

[0023] Optionally, in the Y-axis angular velocity detection mode, each of the first, second, third, and fourth driving mass blocks does not move due to the constraints of the first and second anchor points; the first, second, third, and fourth detection mass blocks in the third detection structure are decoupled from the shared coupling structure and do not move; the first, second, third, and fourth torsional mass blocks, the central coupling structure, and the shared coupling structure together form a whole torsional structure, which torsionally moves around the Y-axis centerline to detect the externally input Y-axis angular velocity.

[0024] Optionally, in the detection mode of angular velocity in the Z-axis direction, each of the first, second, third, and fourth driving mass blocks does not move due to the constraints of the first and second anchor points; the first, second, third, and fourth torsional mass blocks are decoupled from the shared coupling structure and do not move; each of the first, second, third, and fourth detection mass blocks is decoupled from its corresponding driving mass block, and the first detection mass... The first, second, third, and fourth detection mass blocks are restricted to move in the XY plane by a shared coupling structure coupled thereto. The first and second detection mass blocks move in opposite phases along the X-axis, and the third and fourth detection mass blocks move in opposite phases along the Y-axis. The first and third detection mass blocks move relative to each other along their 45° axis of symmetry, and the second and fourth detection mass blocks move relative to each other along their 45° axis of symmetry, in order to detect the angular velocity in the Z-axis direction input from the outside.

[0025] Optionally, the first detection structure is symmetrical about the X-axis and the Y-axis.

[0026] Optionally, the first detection structure is symmetrical about an axis that is 45° apart from the X-axis and Y-axis.

[0027] Optionally, the second detection structure is symmetrical about the X-axis and the Y-axis.

[0028] Optionally, the second detection structure is symmetrical about an axis that is 45° apart from the X-axis and Y-axis.

[0029] Optionally, the third detection structure is symmetrical about the X-axis and the Y-axis.

[0030] Optionally, the third detection structure is symmetrical about an axis that forms a 45° angle with respect to the X and Y axes.

[0031] Optionally, the three-axis gyroscope is symmetrical about the X-axis and the Y-axis.

[0032] Optionally, the three-axis gyroscope is symmetrical about an axis that is 45° apart from the X-axis and Y-axis.

[0033] Optionally, the shared coupling structure and the structure composed of the four sets of the second coupling beams are symmetrical about the X-axis, symmetrical about the Y-axis, and symmetrical about the center.

[0034] Optionally, the structure consisting of the shared coupling structure, the four sets of second coupling beams, and the four sets of connecting beams is symmetrical about the X-axis, symmetrical about the Y-axis, and symmetrical about the center.

[0035] Optionally, the first, second, third, and fourth torsional mass blocks are connected by the four sets of third coupling beams, the four sets of first driving beams, the central coupling structure, and the four sets of connecting beams and the shared coupling structure to form a whole torsional structure, which is symmetrical about the X-axis, Y-axis, and center-symmetric.

[0036] Optionally, the connecting beam and the second coupling beam, which are connected to the same set of coupling rods, are arranged opposite each other.

[0037] Optionally, the three-axis gyroscope is formed on a substrate.

[0038] The triaxial gyroscope provided in this application introduces a shared coupling structure that can be connected to the first, second, and third detection structures. The triaxial detection structure is positioned at the center of the triaxial gyroscope's topology to minimize the transmission of substrate deformation to the detection structure. This significantly reduces the impact of thermal stress-induced structural deformation on the zero bias, effectively suppresses zero bias temperature drift, and greatly improves the triaxial gyroscope's detection accuracy and environmental adaptability over a wide temperature range. Furthermore, the shared coupling structure not only serves as the mechanical support and motion transmission path for the Z-axis detection mass but is also reused for connecting and coupling the torsional mass in the X-axis and Y-axis driving modes. This allows multiple detection degrees of freedom to share the same structure, significantly improving the structure's space utilization efficiency and overall stiffness consistency.

[0039] Furthermore, this application integrates the Z-axis detection mass block and the X / Y-axis torsion mass block into the same topology by setting a shared coupling structure, which realizes effective mass sharing between the driving mass block, the Z-axis detection mass block, and the X / Y-axis detection torsion block. While maintaining a low driving frequency, it is beneficial to increase the width of the driving beam, thereby effectively improving the on-chip uniformity problem caused by process etching tilt angle and size fluctuation, and reducing orthogonality error.

[0040] Furthermore, this application adopts a modal design of "four driving motion blocks and one detection motion block." In the driving mode, each driving mass block drives the corresponding detection mass block and torsion mass block to perform stable anti-phase motion. In the X-axis and Y-axis angular velocity detection modes, the four torsion mass blocks, together with the central coupling structure and the shared coupling structure, form a whole torsion structure to perform out-of-plane torsional motion, effectively improving the sensitivity of the detection motion. In the Z-axis detection mode, each detection mass block is restricted from rotating in an undesirable motion form, such as simultaneous clockwise motion, through the shared coupling structure, and is effectively decoupled from the torsion structure, ensuring the independence and reliability of Z-axis detection.

[0041] Furthermore, the first anchor point and the second anchor point of the three-axis gyroscope in this application are both located on the periphery far away from the first detection structure, the second detection structure, and the third detection structure, which can further improve the strain resistance.

[0042] Furthermore, the triaxial gyroscope of this application is symmetrical about the X-axis and Y-axis, and even more so about the 45° axis. This not only balances the thermal stress distribution and reduces thermally induced zero-bias drift, but also ensures good symmetry and consistency in the manufacturing process. This effectively reduces the in-phase error and orthogonal error introduced by manufacturing deviations, thereby comprehensively improving the overall performance of the MEMS triaxial gyroscope. Attached Figure Description

[0043] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0044] Figure 1 A top view of the structure of a three-axis gyroscope provided according to an embodiment of this application is shown;

[0045] Figure 2 This diagram illustrates the third detection structure and the common coupling structure in a three-axis gyroscope according to an embodiment of this application.

[0046] Figure 3 A schematic diagram of the first and second detection structures and the common coupling structure in a three-axis gyroscope provided according to an embodiment of this application is shown.

[0047] Figure 4 A schematic diagram of the first to fourth drive mass blocks in a three-axis gyroscope provided according to an embodiment of this application is shown;

[0048] Figure 5 A schematic diagram of the motion of the driving mode of a three-axis gyroscope provided according to an embodiment of this application is shown;

[0049] Figure 6This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in an embodiment of this application when there is an angular velocity input in the Z-axis direction;

[0050] Figure 7 This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in an embodiment of this application when there is an angular velocity input in the X-axis direction;

[0051] Figure 8 This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in an embodiment of this application when there is an angular velocity input in the Y-axis direction. Detailed Implementation

[0052] Various embodiments of the invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by the same or similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale.

[0053] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples.

[0054] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," and "coupling" should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0055] Figure 1 This diagram shows a top view of a three-axis gyroscope provided according to an embodiment of this application. Figure 2 This diagram illustrates the third detection structure and the common coupling structure in a three-axis gyroscope provided according to an embodiment of this application. Figure 3 This diagram illustrates the first and second detection structures and the common coupling structure in a three-axis gyroscope provided according to an embodiment of this application. Figure 4 A schematic diagram of the first to fourth drive mass blocks in a three-axis gyroscope provided according to an embodiment of this application is shown.

[0056] like Figure 1 As shown, the three-axis gyroscope includes a central coupling structure 110, a first detection structure, a second detection structure, a third detection structure, a first driving mass block 101, a second driving mass block 102, a third driving mass block 103, a fourth driving mass block 104, and a common coupling structure 120.

[0057] The adjacent drive mass blocks in the first drive mass block 101, the second drive mass block 102, the third drive mass block 103, and the fourth drive mass block 104 are coupled to each other.

[0058] The first detection structure includes a first torsional mass block 201 and a second torsional mass block 202 with identical structures, used to detect the angular velocity in the X-axis direction.

[0059] The second detection structure includes a third torsional mass block 301 and a fourth torsional mass block 302 with identical structures, used to detect the angular velocity in the Y-axis direction.

[0060] The first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301 and the fourth torsional mass block 302 surround the central coupling structure 110 and are respectively coupled to the central coupling structure 110.

[0061] The third detection structure includes a first detection mass block 401, a second detection mass block 402, a third detection mass block 403, and a fourth detection mass block 404, all with identical structures. Each of these detection mass blocks is located within and coupled to its corresponding first driving mass block 101, second driving mass block 102, third driving mass block 103, or fourth driving mass block 104. The third detection structure is used to detect the angular velocity in the Z-axis direction. For example, the first detection mass block 401 is located in the first driving mass block 101, the second detection mass block 402 is located in the second driving mass block 102, the third detection mass block 403 is located in the third driving mass block 103, and the fourth detection mass block 404 is located in the fourth driving mass block 104. The first torsional mass 201 is coupled to the first driving mass 101 via a common coupling structure 120 and the first detection mass 401. The second torsional mass 202 is coupled to the second driving mass 102 via a common coupling structure 120 and the second detection mass 402. The third torsional mass 301 is coupled to the third driving mass 103 via a common coupling structure 120 and the third detection mass 403. The fourth torsional mass 302 is coupled to the fourth driving mass 104 via a common coupling structure 120 and the fourth detection mass 404.

[0062] The first detection mass block 401, the second detection mass block 402, the third detection mass block 403 and the fourth detection mass block 404 surround the common coupling structure 120 and are respectively coupled to the common coupling structure 120.

[0063] The common coupling structure 120 also surrounds the first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302. Each of the first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302 is coupled to the common coupling structure 120 and indirectly coupled to the corresponding driving mass block via the third detection structure.

[0064] Furthermore, the first torsional mass block 201 and the second torsional mass block 202 are arranged in a mirror image about the X-axis. The third torsional mass block 301 and the fourth torsional mass block 302 are arranged in a mirror image about the Y-axis.

[0065] Furthermore, the first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302 are located in the inner region of the quadrilateral formed by the shared coupling structure 120.

[0066] Furthermore, the first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302 surround the central coupling structure 110 and together form a quadrilateral region.

[0067] For example, combined Figure 2 , Figure 3 As shown, the shared coupling structure 120 includes a first set of coupling rods 121, a second set of coupling rods 122, a third set of coupling rods 123, a fourth set of coupling rods 124, and four sets of first coupling beams (coupling beams 1251, 1252, 1253, and 1254). The first set of coupling rods 121 is located between the first detection mass block 401 and the first torsional mass block 201; the second set of coupling rods 122 is located between the second detection mass block 402 and the second torsional mass block 202; the third set of coupling rods 123 is located between the third detection mass block 403 and the third torsional mass block 301; and the fourth set of coupling rods 124 is located between the fourth detection mass block 404 and the fourth torsional mass block 302. Adjacent sets of coupling rods in the first set of coupling rods 121, the second set of coupling rods 122, the third set of coupling rods 123, and the fourth set of coupling rods 124 are coupled to each other via corresponding first coupling beams. Specifically, the first set of coupling rods 121 and the third set of coupling rods 123 are coupled via coupling beam 1251, the first set of coupling rods 121 and the fourth set of coupling rods 124 are coupled via coupling beam 1252, the second set of coupling rods 122 and the third set of coupling rods 123 are coupled via coupling beam 1254, and the second set of coupling rods 122 and the fourth set of coupling rods 124 are coupled via coupling beam 1253.

[0068] like Figure 2As shown, the third detection structure also includes four sets of second coupling beams (coupling beam 4011, coupling beam 4021, coupling beam 4031, and coupling beam 4041). The four sets of second coupling beams are symmetrical about the X-axis, Y-axis, and center-symmetrical. Each of the first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404 is coupled to a corresponding set of coupling rods via a set of second coupling beams. Specifically, the first detection mass block 401 is coupled to the first set of coupling rods 121 via coupling beam 4011, the second detection mass block 402 is coupled to the second set of coupling rods 122 via coupling beam 4021, the third detection mass block 403 is coupled to the third set of coupling rods 123 via coupling beam 4031, and the fourth detection mass block 404 is coupled to the fourth set of coupling rods 124 via coupling beam 4041.

[0069] Furthermore, each set of coupling rods includes at least two coupling rods connected via a corresponding second coupling beam. For example, each set of coupling rods includes two coupling rods connected via a corresponding second coupling beam.

[0070] Furthermore, the stiffness of the second coupling beam in the detection direction is greater than the stiffness of the second coupling beam in the driving direction. For example, the detection direction of coupling beams 4031 and 4041 is the Y-axis direction, and the driving direction is the X-axis direction. The detection direction of coupling beams 4011 and 4021 is the X-axis direction, and the driving direction is the Y-axis direction.

[0071] Furthermore, the third detection structure also includes a third detection electrode, comprising detection comb teeth located in the cavities of each of the first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404. The third detection electrode is symmetrical about the X-axis, the Y-axis, and the center. Specifically, the first detection mass block 401 includes cavities 4012 and 4013, and detection comb teeth 4014 are disposed in cavities 4012 and 4013. The second detection mass block 402 includes cavities 4022 and 4023, and detection comb teeth 4024 are disposed in cavities 4022 and 4023. The third detection mass block 403 includes cavities 4032 and 4033, and detection comb teeth 4034 are disposed in cavities 4032 and 4033. The fourth detection quality block 404 includes cavities 4042 and 4043, and detection comb teeth 4044 are provided in cavities 4042 and 4043.

[0072] like Figure 3As shown, the three-axis gyroscope also includes four sets of connecting beams (connecting beams 5011, 5012, 5013, and 5014). Each of the first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302 is coupled to a corresponding set of coupling rods via a set of connecting beams. The four sets of connecting beams are symmetrical about the X-axis, the Y-axis, and the center. Specifically, the first torsional mass block 201 is coupled to the first set of coupling rods 121 via connecting beam 5011, the second torsional mass block 202 is coupled to the second set of coupling rods 122 via connecting beam 5013, the third torsional mass block 301 is coupled to the third set of coupling rods 123 via connecting beam 5014, and the fourth torsional mass block 302 is coupled to the fourth set of coupling rods 124 via connecting beam 5012.

[0073] Furthermore, the connecting beam and the second coupling beam, which are connected to the same set of coupling rods, are arranged opposite each other.

[0074] Furthermore, combined Figure 1 As shown, the movement of each of the first driving mass block 101, the third driving mass block 103, the second driving mass block 102, and the fourth driving mass block 104 is transmitted through the corresponding detection mass block and via the corresponding second coupling beam to the corresponding set of coupling rods, and then through the corresponding connecting beam to the corresponding torsion mass block, so as to drive the corresponding torsion mass block to move in phase with the driving mass block.

[0075] Furthermore, adjacent torsional mass blocks among the first torsional mass block 201, the third torsional mass block 301, the second torsional mass block 202, and the fourth torsional mass block 302 are coupled to each other.

[0076] For example, such as Figure 3 As shown, the three-axis gyroscope also includes four sets of third coupling beams (coupling beam 5021, coupling beam 5022, coupling beam 5023, coupling beam 5024) and four sets of first drive beams (drive beam 5031, drive beam 5032, drive beam 5033, drive beam 5034). The four sets of third coupling beams are symmetrical about the X-axis, Y-axis, and center-symmetric. The four sets of first drive beams are symmetrical about the X-axis, Y-axis, and center-symmetric.

[0077] Each group of third coupling beams is coupled to the central coupling structure 110, and couples two adjacent torsional mass blocks from the first torsional mass block 201, the third torsional mass block 301, the second torsional mass block 202, and the fourth torsional mass block 302. Specifically, coupling beam 5021 is coupled to the central coupling structure 110, and couples the first torsional mass block 201 and the third torsional mass block 301. Coupling beam 5022 is coupled to the central coupling structure 110, and couples the first torsional mass block 201 and the fourth torsional mass block 302. Coupling beam 5023 is coupled to the central coupling structure 110, and couples the second torsional mass block 202 and the fourth torsional mass block 302. Coupling beam 5024 is coupled to the central coupling structure 110, and couples the second torsional mass block 202 and the third torsional mass block 301.

[0078] Each of the first torsional mass block 201, the third torsional mass block 301, the second torsional mass block 202, and the fourth torsional mass block 302 is coupled to the central coupling structure 110 via a corresponding first driving beam. Specifically, the first torsional mass block 201 is coupled to the central coupling structure 110 via a driving beam 5031, the second torsional mass block 202 is coupled to the central coupling structure 110 via a driving beam 5032, the third torsional mass block 301 is coupled to the central coupling structure 110 via a driving beam 5033, and the fourth torsional mass block 302 is coupled to the central coupling structure 110 via a driving beam 5034.

[0079] Furthermore, combined Figure 1 , Figure 4 As shown, the three-axis gyroscope also includes four sets of first anchor points (anchor point 1051, anchor point 1052, anchor point 1053, anchor point 1054), four sets of second drive beams (drive beam 1061, drive beam 1062, drive beam 1063, drive beam 1064), and four sets of rotational coupling structures (rotational coupling structure 1071, rotational coupling structure 1072, rotational coupling structure 1073, rotational coupling structure 1074). The four sets of first anchor points are symmetrical about axes with an angle of 45° to the X and Y axes. The four sets of second drive beams are symmetrical about axes with an angle of 45° to the X and Y axes. The four sets of rotational coupling structures are symmetrical about axes with an angle of 45° to the X and Y axes.

[0080] A set of first anchor points is provided between every two adjacent drive mass blocks in the first drive mass block 101, the third drive mass block 103, the second drive mass block 102, and the fourth drive mass block 104. Specifically, anchor point 1051 is located between the first drive mass block 101 and the third drive mass block 103, anchor point 1052 is located between the first drive mass block 101 and the fourth drive mass block 104, anchor point 1053 is located between the second drive mass block 102 and the fourth drive mass block 104, and anchor point 1054 is located between the second drive mass block 102 and the third drive mass block 103.

[0081] The second drive beam is located inside the first anchor point. Each set of second drive beams is connected to a corresponding set of first anchor points, and every two adjacent drive mass blocks among the first drive mass block 101, third drive mass block 103, second drive mass block 102, and fourth drive mass block 104 are coupled via a corresponding set of second drive beams. Specifically, drive beam 1061 is connected to the inside of anchor point 1051 and coupled to the first drive mass block 101 and the third drive mass block 103, respectively. Drive beam 1062 is connected to the inside of anchor point 1052 and coupled to the first drive mass block 101 and the fourth drive mass block 104, respectively. Drive beam 1063 is connected to the inside of anchor point 1053 and coupled to the second drive mass block 102 and the fourth drive mass block 104, respectively. Drive beam 1064 is connected to the inside of anchor point 1054 and coupled to the second drive mass block 102 and the third drive mass block 103, respectively.

[0082] The rotational coupling structures are located outside the first anchor point, and each set of rotational coupling structures is connected to a corresponding set of first anchor points. A set of rotational coupling structures is provided between every two adjacent driving mass blocks in the first driving mass block 101, third driving mass block 103, second driving mass block 102, and fourth driving mass block 104, and these two adjacent driving mass blocks are also coupled via a corresponding set of rotational coupling structures. Specifically, rotational coupling structure 1071 is located between the first driving mass block 101 and the third driving mass block 103, connected to the outside of anchor point 1051, and coupled to both the first driving mass block 101 and the third driving mass block 103. Rotational coupling structure 1072 is located between the first driving mass block 101 and the fourth driving mass block 104, connected to the outside of anchor point 1052, and coupled to both the first driving mass block 101 and the fourth driving mass block 104. Rotational coupling structure 1073 is located between the second driving mass block 102 and the fourth driving mass block 104, connected to the outside of anchor point 1053, and coupled to both the second driving mass block 102 and the fourth driving mass block 104. Rotational coupling structure 1074 is located between the second driving mass block 102 and the third driving mass block 103, connected to the outside of anchor point 1054, and coupled to both the second driving mass block 102 and the third driving mass block 103. Exemplarily, the rotational coupling structure may include, for example, a coupling beam coupled to an adjacent driving mass block and a coupling beam connected to a corresponding anchor point.

[0083] Furthermore, such as Figure 4 As shown, the three-axis gyroscope also includes four sets of second anchor points (anchor point 1081, anchor point 1082, anchor point 1083, anchor point 1084) and four sets of third drive beams (drive beam 1091, drive beam 1092, drive beam 1093, drive beam 1094). The four sets of second anchor points are symmetrical about the X-axis, symmetrical about the Y-axis, and centrally symmetrical. The four sets of third drive beams are symmetrical about the X-axis, symmetrical about the Y-axis, and centrally symmetrical.

[0084] Each of the first driving mass block 101, the third driving mass block 103, the second driving mass block 102, and the fourth driving mass block 104 has a corresponding set of second anchor points on the side away from the common coupling structure 120. Each set of second anchor points is coupled to the corresponding driving mass block via a set of third driving beams. Specifically, anchor point 1081 is located on the side of the first driving mass block 101 away from the common coupling structure 120 and is coupled to the first driving mass block 101 via driving beam 1091. Anchor point 1082 is located on the side of the second driving mass block 102 away from the common coupling structure 120 and is coupled to the second driving mass block 102 via driving beam 1092. Anchor point 1083 is located on the side of the third driving mass block 103 away from the common coupling structure 120 and is coupled to the third driving mass block 103 via driving beam 1093. Anchor point 1084 is located on the side of the fourth drive mass 104 away from the common coupling structure 120 and is coupled to the fourth drive mass 104 via drive beam 1094.

[0085] Furthermore, each of the first driving mass block 101, the third driving mass block 103, the second driving mass block 102, and the fourth driving mass block 104 further includes a first cavity, a second cavity, a third cavity, and a fourth cavity. The first cavity, the second cavity, and the third cavity are located on the side away from the common coupling structure 120, and the fourth cavity is located on the side closer to the common coupling structure 120. Each of the first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404 is located in the fourth cavity of the corresponding driving mass block. Driving comb teeth are provided in the first cavity and the third cavity, and driving feedback comb teeth are provided in the second cavity. The second cavity is located between the first cavity and the third cavity.

[0086] Specifically, the first driving mass block 101 includes a first cavity 1011, a second cavity 1012, a third cavity 1013, and a fourth cavity 1014. The first cavity 1011, the second cavity 1012, and the third cavity 1013 are located on the side of the first driving mass block 101 away from the common coupling structure 120, and the fourth cavity 1014 is located on the side of the first driving mass block 101 close to the common coupling structure 120. The first cavity 1011 and the third cavity 1013 are provided with driving comb teeth 1015, the second cavity 1012 is provided with driving feedback comb teeth 1016, and the fourth cavity 1014 is provided with a first detection mass block 401. The second driving mass block 102 includes a first cavity 1021, a second cavity 1022, a third cavity 1023, and a fourth cavity 1024. The first cavity 1021, the second cavity 1022, and the third cavity 1023 are located on the side of the second driving mass block 102 away from the common coupling structure 120, and the fourth cavity 1024 is located on the side of the second driving mass block 102 close to the common coupling structure 120. The first cavity 1021 and the third cavity 1023 are provided with driving comb teeth 1025, the second cavity 1022 is provided with driving feedback comb teeth 1026, and the fourth cavity 1024 is provided with a second detection mass block 402. The third driving mass block 103 includes a first cavity 1031, a second cavity 1032, a third cavity 1033, and a fourth cavity 1034. The first cavity 1031, the second cavity 1032, and the third cavity 1033 are located on the side of the third driving mass block 103 away from the common coupling structure 120, and the fourth cavity 1034 is located on the side of the third driving mass block 103 close to the common coupling structure 120. The first cavity 1031 and the third cavity 1033 are provided with driving comb teeth 1035, the second cavity 1032 is provided with driving feedback comb teeth 1036, and the fourth cavity 1034 is provided with a third detection mass block 403. The fourth driving mass block 104 includes a first cavity 1041, a second cavity 1042, a third cavity 1043, and a fourth cavity 1044. The first cavity 1041, the second cavity 1042, and the third cavity 1043 are located on the side of the fourth driving mass block 104 away from the common coupling structure 120, and the fourth cavity 1044 is located on the side of the fourth driving mass block 104 close to the common coupling structure 120. The first cavity 1041 and the third cavity 1043 are provided with driving comb teeth 1045, the second cavity 1042 is provided with driving feedback comb teeth 1046, and the fourth cavity 1044 is provided with a fourth detection mass block 404.

[0087] Furthermore, the third detection structure also includes four sets of detection beams (detection beam 4015, detection beam 4025, detection beam 4035, and detection beam 4045), located in the fourth cavity of each driving mass block. Each of the first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404 is coupled to the corresponding driving mass block via a set of detection beams. The four sets of detection beams are symmetrical about the X-axis, the Y-axis, and the center. Specifically, the first detection mass block 401 is coupled to the first driving mass block 101 via detection beam 4015. The second detection mass block 402 is coupled to the second driving mass block 102 via detection beam 4025. The third detection mass block 403 is coupled to the third driving mass block 103 via detection beam 4035. The fourth detection mass block 404 is coupled to the fourth driving mass block 104 via detection beam 4045.

[0088] Furthermore, the first detection structure is symmetrical about the X-axis and the Y-axis. The first detection structure is symmetrical about an axis that makes a 45° angle with the X-axis and the Y-axis.

[0089] Furthermore, the second detection structure is symmetrical about the X-axis and the Y-axis. The second detection structure is symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis.

[0090] Furthermore, the third detection structure is symmetrical about the X-axis and the Y-axis. The third detection structure is symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis.

[0091] Furthermore, the three-axis gyroscope is symmetrical about the X-axis and the Y-axis. The three-axis gyroscope is symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis.

[0092] Furthermore, the structure composed of the shared coupling structure and the four sets of second coupling beams is symmetrical about the X-axis, Y-axis, and center.

[0093] Furthermore, the structure consisting of the shared coupling structure, four sets of second coupling beams, and four sets of connecting beams is symmetrical about the X-axis, Y-axis, and center-symmetric.

[0094] Furthermore, the first, second, third, and fourth torsional mass blocks are connected by four sets of third coupling beams, four sets of first driving beams and a central coupling structure, and by four sets of connecting beams and a shared coupling structure to form a whole torsional structure, which is symmetrical about the X-axis, Y-axis, and center.

[0095] Figure 5 A schematic diagram of the motion of the driving mode of a three-axis gyroscope provided according to an embodiment of this application is shown.

[0096] Under the action of electrostatic driving force, the three-axis gyroscope structure reciprocates at a set frequency. In the driving mode, the first driving mass 101 and the second driving mass 102 move in opposite phases along the Y-axis. The first detection mass 401 follows the first driving mass 101 connected to it in phase, and then transmits the motion to the first torsional mass 201, causing it to indirectly follow the first driving mass 101 in phase. The second detection mass 402 follows the second driving mass 102 connected to it in phase, and then transmits the motion to the second torsional mass 202, causing it to indirectly follow the second driving mass 102 in phase. The third driving mass 103 and the fourth driving mass 104 move in opposite phases along the X-axis. The third detection mass 403 follows the third driving mass 103 connected to it in phase, and then transmits the motion to the third torsional mass 301, causing it to indirectly follow the third driving mass 103 in phase. The fourth detection mass block 404 moves in phase with the fourth driving mass block 104 connected to it, and then transmits the motion to the fourth torsional mass block 302, so that it indirectly follows the fourth driving mass block 104 in phase.

[0097] Furthermore, at the first moment in the driving mode of the three-axis gyroscope, the first driving mass block 101 and the second driving mass block 102 move towards the center of the three-axis gyroscope, while the third driving mass block 103 and the fourth driving mass block 104 move away from the center of the three-axis gyroscope. At the second moment in the driving mode of the three-axis gyroscope, the first driving mass block 101 and the second driving mass block 102 move away from the center of the three-axis gyroscope, while the third driving mass block 103 and the fourth driving mass block 104 move towards the center of the three-axis gyroscope.

[0098] For example, at a certain moment in the driving mode, the first driving mass block 101 moves along the positive Y-axis, causing the first detection mass block 401 and the first torsional mass block 201 to move along the positive Y-axis. The second driving mass block 102 moves along the negative Y-axis, causing the second detection mass block 402 and the second torsional mass block 202 to move along the negative Y-axis. The third driving mass block 103 moves along the positive X-axis, causing the third detection mass block 403 and the third torsional mass block 301 to move along the positive X-axis. The fourth driving mass block 104 moves along the negative X-axis, causing the fourth detection mass block 404 and the fourth torsional mass block 302 to move along the negative X-axis.

[0099] Figure 6 This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in this application when there is an angular velocity input in the Z-axis direction.

[0100] In the driving mode, the first detection mass block 401 moves with the first driving mass block 101, the second detection mass block 402 moves with the second driving mass block 102, the third detection mass block 403 moves with the third driving mass block 103, and the fourth detection mass block 404 moves with the fourth driving mass block 104. When an external angular velocity is input in the Z-axis direction, the first to fourth detection mass blocks will be subjected to a Coriolis force in the Y-direction. Each of the first driving mass blocks 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 does not move due to the constraints of the first anchor point and the second anchor point. The first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302 are decoupled from the common coupling structure 120 and do not move. Each of the first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404 is decoupled from its corresponding driving mass block. The first detection mass block 401, the second detection mass block 402, the third detection mass block 403, and the fourth detection mass block 404 are restricted to move in the XY plane by a common coupling structure 120 with which they are coupled.

[0101] Furthermore, the first detection mass block 401 and the second detection mass block 402 move in opposite phases along the X-axis, and the third detection mass block 403 and the fourth detection mass block 404 move in opposite phases along the Y-axis. The first detection mass block 401 and the third detection mass block 403 move relative to each other along their 45° axis of symmetry, and the second detection mass block 402 and the fourth detection mass block 404 move relative to each other along their 45° axis of symmetry, in order to detect the angular velocity in the Z-axis direction input externally.

[0102] For example, at a certain moment in the mode of detecting angular velocity in the Z-axis direction, the first detection mass block 401 moves along the negative X-axis direction, the second detection mass block 402 moves along the positive X-axis direction, the third detection mass block 403 moves along the positive Y-axis direction, and the fourth detection mass block 404 moves along the negative Y-axis direction. At the same time, the common coupling structure 120 is stretched into a rhombus shape, causing a change in the detection capacitance of the third detection electrode in the first to fourth detection mass blocks. Then, the change in the detection capacitance is used to obtain the externally input angular velocity in the Z-axis direction.

[0103] Figure 7 This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in this application when there is an angular velocity input in the X-axis direction.

[0104] In the driving mode, the first torsional mass 201 moves with the first driving mass 101, and the second torsional mass 202 moves with the second driving mass 102. When an angular velocity in the X-axis direction is input externally, an outward Coriolis force is generated on the first torsional mass 201, and an inward Coriolis force is generated on the second torsional mass 202. The Coriolis forces on the first and second torsional mass 201 generate torque in the same direction (around the X-axis). In the mode of detecting angular velocity in the X-axis direction, each of the first driving mass 101, second driving mass 102, third driving mass 103, and fourth driving mass 104 does not move due to the constraints of the first and second anchor points. The first detection mass 401, second detection mass 402, third detection mass 403, and fourth detection mass 404 in the third detection structure are decoupled from the common coupling structure 120 and do not move. The first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302, together with the central coupling structure 110 and the shared coupling structure 120, form a complete torsional structure. The complete torsional structure performs out-of-plane torsional motion around the X-axis centerline, causing a change in the detection capacitance of the first detection electrode below the first torsional mass block 201 and the second torsional mass block 202. The change in the detection capacitance is then used to obtain the angular velocity in the X-axis direction of the external input.

[0105] Figure 8 This illustration shows a schematic diagram of the motion modes of a three-axis gyroscope provided in an embodiment of this application when there is an angular velocity input in the Y-axis direction.

[0106] In the driving mode, the third torsional mass 301 moves with the third driving mass 103, and the fourth torsional mass 302 moves with the fourth driving mass 104. When an angular velocity in the Y-axis direction is input externally, an outward Coriolis force is generated on the third torsional mass 301, and an inward Coriolis force is generated on the fourth torsional mass 302. The Coriolis forces on the third and fourth torsional mass 301 and 302 generate torque in the same direction (around the Y-axis). In the mode of detecting angular velocity in the Y-axis direction, each of the first driving mass 101, second driving mass 102, third driving mass 103, and fourth driving mass 104 does not move due to the constraints of the first and second anchor points. The first detection mass 401, second detection mass 402, third detection mass 403, and fourth detection mass 404 in the third detection structure are decoupled from the common coupling structure 120 and do not move. The first torsional mass block 201, the second torsional mass block 202, the third torsional mass block 301, and the fourth torsional mass block 302, together with the central coupling structure 110 and the shared coupling structure 120, form a complete torsional structure. The complete torsional structure performs out-of-plane torsional motion around the Y-axis centerline, causing a change in the detection capacitance of the second detection electrode below the third torsional mass block 301 and the fourth torsional mass block 302. The angular velocity in the Y-axis direction input from the outside is obtained by the change in the detection capacitance.

[0107] The triaxial gyroscope provided in this application introduces a shared coupling structure that can be connected to the first, second, and third detection structures. The triaxial detection structure is positioned at the center of the triaxial gyroscope's topology to minimize the transmission of substrate deformation to the detection structure. This significantly reduces the impact of thermal stress-induced structural deformation on the zero bias, effectively suppresses zero bias temperature drift, and greatly improves the triaxial gyroscope's detection accuracy and environmental adaptability over a wide temperature range. Furthermore, the shared coupling structure not only serves as the mechanical support and motion transmission path for the Z-axis detection mass but is also reused for connecting and coupling the torsional mass in the X-axis and Y-axis driving modes. This allows multiple detection degrees of freedom to share the same structure, significantly improving the structure's space utilization efficiency and overall stiffness consistency.

[0108] Furthermore, this application integrates the Z-axis detection mass block and the X / Y-axis torsion mass block into the same topology by setting a shared coupling structure, which realizes effective mass sharing between the driving mass block, the Z-axis detection mass block, and the X / Y-axis detection torsion block. While maintaining a low driving frequency, it is beneficial to increase the width of the driving beam, thereby effectively improving the on-chip uniformity problem caused by process etching tilt angle and size fluctuation, and reducing orthogonality error.

[0109] Furthermore, this application adopts a modal design of "four driving motion blocks and one detection motion block." In the driving mode, each driving mass block drives the corresponding detection mass block and torsion mass block to perform stable anti-phase motion. In the X-axis and Y-axis angular velocity detection modes, the four torsion mass blocks, together with the central coupling structure and the shared coupling structure, form a whole torsion structure to perform out-of-plane torsional motion, effectively improving the sensitivity of the detection motion. In the Z-axis detection mode, each detection mass block is restricted from rotating in an undesirable motion form, such as simultaneous clockwise motion, through the shared coupling structure, and is effectively decoupled from the torsion structure, ensuring the independence and reliability of Z-axis detection.

[0110] Furthermore, the first anchor point and the second anchor point of the three-axis gyroscope in this application are both located on the periphery far away from the first detection structure, the second detection structure, and the third detection structure, which can further improve the strain resistance.

[0111] Furthermore, the triaxial gyroscope of this application is symmetrical about the X-axis and Y-axis, and even more so about the 45° axis. This not only balances the thermal stress distribution and reduces thermally induced zero-bias drift, but also ensures good symmetry and consistency in the manufacturing process. This effectively reduces the in-phase error and orthogonal error introduced by manufacturing deviations, thereby comprehensively improving the overall performance of the MEMS triaxial gyroscope.

[0112] As described above, these embodiments of the present invention do not exhaustively cover all details, nor do they limit the invention to the specific embodiments described. Clearly, many modifications and variations can be made based on the above description. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to effectively utilize the invention and its modifications. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A three-axis gyroscope, comprising: Centrally coupled structure; The first detection structure includes a first torsion mass block and a second torsion mass block with identical structures, used to detect the angular velocity in the X-axis direction; The second detection structure includes a third torsional mass block and a fourth torsional mass block with the same structure, used to detect the angular velocity in the Y-axis direction. The first torsional mass block, the second torsional mass block, the third torsional mass block and the fourth torsional mass block surround the central coupling structure and are respectively coupled to the central coupling structure. The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are coupled to each other. The third detection structure includes a first detection mass block, a second detection mass block, a third detection mass block, and a fourth detection mass block with identical structures. Each of the first, second, third, and fourth detection mass blocks is located in and coupled to the corresponding first, second, third, and fourth driving mass blocks. The third detection structure is used to detect the angular velocity in the Z-axis direction. A shared coupling structure is provided, in which the first detection mass block, the second detection mass block, the third detection mass block, and the fourth detection mass block surround the shared coupling structure and are respectively coupled to the shared coupling structure. The shared coupling structure further surrounds the first torsional mass block, the second torsional mass block, the third torsional mass block, and the fourth torsional mass block, and each of the first torsional mass block, the second torsional mass block, the third torsional mass block, and the fourth torsional mass block is coupled to the shared coupling structure.

2. The three-axis gyroscope according to claim 1, wherein, The first, second, third, and fourth torsional mass blocks are located in the inner region of the quadrilateral formed by the shared coupling structure.

3. The three-axis gyroscope according to claim 1, wherein, The first, second, third, and fourth torsional mass blocks surround the central coupling structure and together form a quadrilateral region.

4. The three-axis gyroscope according to claim 1, wherein, The first detection mass block is located within the first driving mass block, the second detection mass block is located within the second driving mass block, the third detection mass block is located within the third driving mass block, and the fourth detection mass block is located within the fourth driving mass block. Wherein, the first torsional mass block is coupled to the first driving mass block via the shared coupling structure, the second torsional mass block is coupled to the second driving mass block via the shared coupling structure, the third torsional mass block is coupled to the third driving mass block via the shared coupling structure, the third driving mass block via the third driving mass block via the third driving mass block via the third driving mass block via the third driving mass block via the third driving mass block via the shared coupling structure, and the fourth driving mass block via the fourth driving mass block via the fourth driving mass block via the fourth driving mass block via the shared coupling structure.

5. The three-axis gyroscope according to claim 1, wherein, The shared coupling structure includes: A first set of coupling rods, a second set of coupling rods, a third set of coupling rods, and a fourth set of coupling rods with identical structures are provided. The first set of coupling rods is located between the first detection mass block and the first torsional mass block, the second set of coupling rods is located between the second detection mass block and the second torsional mass block, the third set of coupling rods is located between the third detection mass block and the third torsional mass block, and the fourth set of coupling rods is located between the fourth detection mass block and the fourth torsional mass block. Four sets of first coupling beams, with adjacent sets of coupling rods in the first, second, third, and fourth sets being coupled together via corresponding first coupling beams.

6. The three-axis gyroscope according to claim 5, wherein, The third detection structure also includes: Four sets of second coupling beams, wherein each of the first, second, third, and fourth detection mass blocks is coupled to a corresponding set of coupling rods via a set of second coupling beams. Each set of coupling rods includes at least two coupling rods connected via a corresponding second coupling beam.

7. The three-axis gyroscope according to claim 6, wherein, Also includes: Four sets of connecting beams, each of the first, second, third, and fourth torsional mass blocks is coupled to a corresponding set of coupling rods via a set of connecting beams.

8. The three-axis gyroscope according to claim 7, wherein, The stiffness of the second coupling beam in the detection direction is greater than that in the driving direction.

9. The three-axis gyroscope according to claim 1, wherein, The adjacent torsional mass blocks among the first, third, second, and fourth torsional mass blocks are coupled to each other.

10. The three-axis gyroscope according to claim 1, wherein, The first and second torsional mass blocks are arranged in a mirror image about the X-axis, and the third and fourth torsional mass blocks are arranged in a mirror image about the Y-axis.

11. The three-axis gyroscope according to claim 9, wherein, Also includes: Four sets of third coupling beams, each set of third coupling beams is coupled to the central coupling structure, and couples two adjacent torsional mass blocks in the first, third, second and fourth torsional mass blocks. The four sets of first drive beams, each of the first, third, second, and fourth torsional mass blocks is coupled to the central coupling structure via the corresponding first drive beam.

12. The three-axis gyroscope according to claim 1, wherein, The third detection structure also includes: Four sets of detection beams, each of the first, second, third, and fourth detection mass blocks being coupled to its corresponding driving mass block via a set of detection beams. The four sets of detection beams are symmetrical about the X-axis, symmetrical about the Y-axis, and symmetrical about the center.

13. The three-axis gyroscope according to claim 1, wherein, Also includes: Four sets of first anchor points, with a corresponding set of first anchor points set between every two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks; Four sets of second drive beams are located inside the first anchor point. Each set of second drive beams is connected to a corresponding set of first anchor points, and each pair of adjacent drive mass blocks in the first drive mass block, third drive mass block, second drive mass block and fourth drive mass block are coupled through a corresponding set of second drive beams. as well as Four sets of rotational coupling structures are located outside the first anchor point. Each set of rotational coupling structures is connected to a corresponding set of first anchor points. A set of rotational coupling structures is provided between each two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks. Furthermore, each two adjacent driving mass blocks in the first, third, second, and fourth driving mass blocks are also coupled through a corresponding set of rotational coupling structures.

14. The three-axis gyroscope according to claim 13, wherein, The four sets of first anchor points are symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis. The four sets of second drive beams are symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis. The four sets of rotational coupling structures are symmetrical about an axis that makes a 45° angle with the X-axis and Y-axis.

15. The three-axis gyroscope according to claim 1, wherein, Also includes: Four sets of second anchor points are provided on the side of each of the first, third, second, and fourth driving mass blocks away from the common coupling structure. Four sets of third drive beams, with the second anchor point of each set coupled to the corresponding drive mass block via a set of third drive beams.

16. The three-axis gyroscope according to claim 1, wherein, Each of the first, third, second, and fourth drive mass blocks further includes: A first cavity, a second cavity, a third cavity, and a fourth cavity are provided. The first cavity, the second cavity, and the third cavity are located on the side away from the common coupling structure, and the fourth cavity is located on the side close to the common coupling structure. Each of the first, second, third, and fourth detection mass blocks is located in the fourth cavity of the corresponding drive mass block. Drive comb teeth are provided in the first cavity and the third cavity, and drive feedback comb teeth are provided in the second cavity. The second cavity is located between the first cavity and the third cavity.

17. The three-axis gyroscope according to claim 1, wherein, In the driving mode, The first driving mass block and the second driving mass block move in opposite phases along the Y-axis direction. The first detection mass block moves in phase with the first driving mass block. The first torsion mass block moves in phase with the first driving mass block. The second detection mass block moves in phase with the second driving mass block. The second torsion mass block moves in phase with the second driving mass block. The third driving mass block and the fourth driving mass block move in opposite phases along the X-axis. The third detection mass block follows the third driving mass block in the same phase. The third torsional mass block indirectly follows the third driving mass block in the same phase. The fourth detection mass block follows the fourth driving mass block in the same phase. The fourth torsional mass block indirectly follows the fourth driving mass block in the same phase. In the first moment of the driving mode, the first and second driving mass blocks move towards the center of the three-axis gyroscope, while the third and fourth driving mass blocks move away from the center of the three-axis gyroscope. In the second moment of the driving mode, the first and second driving mass blocks move away from the center of the three-axis gyroscope, while the third and fourth driving mass blocks move towards the center of the three-axis gyroscope.

18. The three-axis gyroscope according to claim 1, wherein, When detecting the angular velocity in the X-axis direction, Each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block does not move due to the constraints of the first anchor point and the second anchor point; The first detection mass block, the second detection mass block, the third detection mass block, and the fourth detection mass block in the third detection structure are decoupled from the shared coupling structure and do not move. The first, second, third, and fourth torsional mass blocks, together with the central coupling structure and the shared coupling structure, form a complete torsional structure. The complete torsional structure torsionals around the X-axis centerline to detect the angular velocity in the X-axis direction input from the outside.

19. The three-axis gyroscope according to claim 1, wherein, When detecting the angular velocity in the Y-axis direction, Each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block does not move due to the constraints of the first anchor point and the second anchor point; The first detection mass block, the second detection mass block, the third detection mass block, and the fourth detection mass block in the third detection structure are decoupled from the shared coupling structure and do not move. The first, second, third, and fourth torsional mass blocks, together with the central coupling structure and the shared coupling structure, form a complete torsional structure. The complete torsional structure torsionals around the Y-axis centerline to detect the angular velocity in the Y-axis direction input from the outside.

20. The three-axis gyroscope according to claim 1, wherein, When detecting the angular velocity in the Z-axis direction, Each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block does not move due to the constraints of the first anchor point and the second anchor point; The first, second, third, and fourth torsional mass blocks are decoupled from the shared coupling structure and do not move. Each of the first, second, third, and fourth detection mass blocks is decoupled from its corresponding driving mass block. The first, second, third, and fourth detection mass blocks are restricted to movement within the XY plane by the shared coupling structure to which they are coupled. The first and second detection mass blocks move in opposite phases along the X-axis, while the third and fourth detection mass blocks move in opposite phases along the Y-axis. The first and third detection mass blocks move relative to each other along their 45° axis of symmetry, and the second and fourth detection mass blocks move relative to each other along their 45° axis of symmetry, in order to detect the angular velocity in the Z-axis direction input from the outside.

21. The three-axis gyroscope according to claim 1, wherein, The first detection structure is symmetrical about the X-axis and the Y-axis.

22. The three-axis gyroscope according to claim 1, wherein, The first detection structure is symmetrical about an axis that forms a 45° angle with respect to the X and Y axes.

23. The three-axis gyroscope according to claim 1, wherein, The second detection structure is symmetrical about the X-axis and the Y-axis.

24. The three-axis gyroscope according to claim 1, wherein, The second detection structure is symmetrical about an axis that is 45° apart from the X-axis and Y-axis.

25. The three-axis gyroscope according to claim 1, wherein, The third detection structure is symmetrical about the X-axis and the Y-axis.

26. The three-axis gyroscope according to claim 1, wherein, The third detection structure is symmetrical about an axis that forms a 45° angle with the X and Y axes.

27. The three-axis gyroscope according to claim 1, wherein, The three-axis gyroscope is symmetrical about the X-axis and the Y-axis.

28. The three-axis gyroscope according to claim 1, wherein, The three-axis gyroscope is symmetrical about an axis that forms a 45° angle with respect to the X and Y axes.

29. The three-axis gyroscope according to claim 6, wherein, The shared coupling structure and the structure composed of the four sets of the second coupling beams are symmetrical about the X-axis, symmetrical about the Y-axis, and symmetrical about the center.

30. The three-axis gyroscope according to claim 7, wherein, The shared coupling structure, together with the four sets of second coupling beams and the four sets of connecting beams, forms a structure that is symmetrical about the X-axis, symmetrical about the Y-axis, and symmetrical about the center.

31. The three-axis gyroscope according to claim 11, wherein, The first, second, third, and fourth torsional mass blocks are connected by the four sets of third coupling beams, the four sets of first driving beams, the central coupling structure, and the four sets of connecting beams and the shared coupling structure to form a whole torsional structure, which is symmetrical about the X-axis, Y-axis, and center-symmetric.

32. The three-axis gyroscope according to claim 7, wherein, The connecting beam and the second coupling beam, which are connected to the same set of coupling rods, are arranged opposite each other.

33. The three-axis gyroscope according to claim 1, wherein, The three-axis gyroscope is formed on a substrate.

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