A circulating heating waste water-free tail gas treatment device

Abstract

This invention relates to a circulating heating wastewater-free tail gas treatment device. A reaction cylinder, a second cooling device, and an adsorption cylinder are sequentially connected. The reaction cylinder includes an inner cylinder, a tail gas inlet pipe, and a heating rod. A solid catalyst is placed inside the inner cylinder, and the heating rod is located inside the inner cylinder. The tail gas inlet pipe is connected to the inside of the inner cylinder. The second cooling device includes a housing, a liquid conveying device connected to both the inside of the inner cylinder and the housing, and an atomizing device outlet connected to the inside of the inner cylinder. This invention uses the liquid conveying device to transport waste liquid from the housing to the inner cylinder. The waste liquid evaporates at high temperature, releasing small bubbles and preventing production stoppages due to excessive waste liquid in the housing. Some of the gas generated in the waste liquid reacts in the high-temperature environment inside the inner cylinder to form harmless products, reducing the amount of harmful gases adsorbed by the adsorption cylinder and increasing the service life of the packing material inside the adsorption cylinder.

Description

Technical Field

[0001] This invention relates to the field of semiconductor exhaust gas treatment, and in particular to a circulating heating exhaust gas treatment device with no wastewater. Background Technology

[0002] Semiconductor manufacturing processes generate waste gases containing PFC gases (such as CF4), NF3, and NH3. Current technology involves introducing water vapor and air at high temperatures and using a catalyst to react the waste gases. Currently, the common practice is to first evaporate water into the air, then introduce the water vapor-containing air into the reaction chamber to participate in the reaction. However, external water evaporation equipment suffers from high energy consumption and large size.

[0003] After the reaction, the gas is typically washed with water or sprayed to adsorb some of the harmful gases and lower its temperature. If the gas temperature is too high, it cannot directly enter the adsorption device to adsorb the remaining harmful gases. However, washing and spraying generate waste liquid, which small institutions (such as university laboratories) or those without wastewater treatment qualifications cannot handle, rendering existing equipment inadequate.

[0004] Meanwhile, the temperature of the gas after leaving the cooling device may still be higher than the upper temperature limit of the adsorption cylinder. However, there are no further cooling measures at this time, so the packing material in the adsorption cylinder can only receive high-temperature gas, resulting in a decrease in the absorption effect. Summary of the Invention

[0005] This invention aims to solve the above-mentioned problems and provides a circulating heating wastewater-free exhaust gas treatment device. It solves the problems of energy consumption and large size of water evaporation equipment outside the machine, the problem of excessive accumulation of waste liquid inside the box, the problem of waste liquid generation in existing PFC gas treatment equipment, and the problem of excessively high gas temperature after leaving the cooling device.

[0006] A circulating heating wastewater-free tail gas treatment device includes: a reaction cylinder, a second cooling device, an adsorption cylinder, a liquid conveying device, and an atomizing device. The reaction cylinder, the second cooling device, and the adsorption cylinder are connected in sequence. The reaction cylinder includes an inner cylinder, a tail gas inlet pipe, and a heating rod. A solid catalyst is disposed inside the inner cylinder. The heating rod is located inside the inner cylinder. The tail gas inlet pipe is connected to the inside of the inner cylinder. The second cooling device includes a housing. The liquid conveying device is connected to both the inside of the inner cylinder and the inside of the housing. The outlet of the atomizing device is connected to the inside of the inner cylinder.

[0007] Furthermore, the reaction cylinder also includes an outer cylinder, a top plate, and a bottom plate. The upper and lower ends of the outer cylinder and the inner cylinder are fixedly connected to the top plate and the bottom plate, respectively. The inner cylinder is located inside the outer cylinder. A heat insulation cavity is formed between the outer cylinder and the inner cylinder. The outer cylinder has a first air inlet and a first air outlet. The first air inlet and the first air outlet are respectively connected to the heat insulation cavity. The first air inlet is connected to the outlet of the atomizing device, and the first air outlet is connected to the interior of the inner cylinder.

[0008] Furthermore, the atomizing device includes a second injector, an air compressor, and a water tank. The inlet of the second injector is connected to the air compressor, the outlet of the second injector is connected to the first air inlet, and the liquid inlet of the second injector is connected to the water tank.

[0009] Furthermore, the liquid conveying device includes a first injector, the top plate is provided with a second air inlet, the second air inlet is connected to the inside of the inner cylinder, the inlet of the first injector is connected to the first air outlet, the outlet of the first injector is connected to the second air inlet, and the liquid inlet of the first injector is connected to the inside of the housing.

[0010] Furthermore, the liquid delivery device also includes two three-way valves, which are connected by a pipe. The pipe connecting the two three-way valves is connected in parallel with the first injector. The two three-way valves are respectively connected to the first air outlet and the second air inlet. The three-way valve connected to the first air outlet is connected to the inlet of the first injector, and the three-way valve connected to the second air inlet is connected to the outlet of the first injector.

[0011] Furthermore, the reaction cylinder also includes a spiral plate located inside the heat insulation cavity. The inner side of the spiral plate is attached to the outer side of the inner cylinder, and the outer side of the spiral plate is attached to the inner side of the outer cylinder. An air duct is formed between the outer cylinder, the inner cylinder, and the spiral plate, and the air duct is connected to the first air inlet and the first air outlet, respectively.

[0012] Furthermore, it also includes a catalyst tube, which is located inside the inner cylinder and fixed in position relative to the inner cylinder. The catalyst tube has multiple first through holes and is filled with a solid catalyst. The heating rod is located between the inner cylinder and the catalyst tube. The exhaust gas inlet pipe is fixedly connected to and communicates with the top plate, the heating rod is fixedly connected to the top plate, and the heating rod is evenly arranged around the catalyst cylinder in a circular pattern. It also includes a top cover, which is located above the catalyst cylinder and fixedly connected to the catalyst cylinder. The top cover and the catalyst cylinder form an annular gap. The top cover is a cone with a high center and low perimeter. The second air inlet of the top plate is located above the center of the top cover.

[0013] Furthermore, the second cooling device also includes a second pipe, an air outlet pipe, and a water suction pipe. The second pipe is fixedly installed inside the cooling cavity of the box body. The second pipe is connected to the second water inlet pipe and the second water outlet pipe respectively. The upper part of the box body is connected to the interior of the inner cylinder. The lower part of the box body is fixedly connected to the air outlet pipe. The air outlet pipe is connected to the adsorption cylinder. The upper and lower parts of the cooling cavity are connected to the interior of the inner cylinder and the air outlet pipe respectively. The water suction pipe passes through the box body and is fixedly connected to the box body. The water suction pipe is connected to the cooling cavity.

[0014] Furthermore, it also includes a first cooling device, which is located between the reaction cylinder and the second cooling device and is fixedly connected to the reaction cylinder and the second cooling device respectively. The first cooling device includes a cooling cylinder and a first pipe. The first pipe is located inside the cooling cylinder. A first cold water chamber is formed between the cooling cylinder and the first pipe. The first cold water chamber is independent of the interior of the first pipe. The first cold water chamber is connected to a first water inlet pipe and a first water outlet pipe respectively. The space above the first pipe in the inner cavity of the cooling cylinder is connected to the interior of the inner cylinder and to the side of the first air inlet pipe. The first air inlet pipe is connected to a cooling air source. The lower opening of the first pipe is connected to the upper part of the interior of the box.

[0015] Furthermore, the adsorption cylinder includes an adsorption cylinder body and a sealing cap. The upper part of the adsorption cylinder body is fixedly and detachably connected to the sealing cap. At least two second mesh plates are fixedly arranged inside the adsorption cylinder body, and filler is arranged between the two second mesh plates. The adsorption cylinder body is fixedly connected to the air inlet pipe, and the air inlet pipe forms a first cooling air pipe. The first cooling air pipe is connected to a cooling air source. The air inlet pipe is connected to the interior of the adsorption cylinder body and the first cooling air pipe respectively. The sealing cap is fixedly connected to the air outlet pipe.

[0016] The present invention has the following advantages: 1. By using an atomizing device to first turn water into small droplets, the air carries the small droplets into the heat insulation cavity. The small droplets use the heat radiated outward from the inner cylinder to evaporate and absorb heat to turn into water vapor, which facilitates the subsequent reaction with the exhaust gas and further reduces the temperature on the outside of the outer cylinder. 2. The waste liquid in the tank is transported to the inner cylinder by the liquid conveying device. The waste liquid is evaporated at high temperature and small bubbles are released, which avoids production stoppage caused by excessive waste liquid in the tank. Some of the gas generated in the waste liquid reacts in the high temperature environment inside the inner cylinder to generate harmless products, which reduces the amount of harmful gas adsorbed by the adsorption cylinder and improves the service life of the packing in the adsorption cylinder. 3. The second injector first draws in clean water, and then the small droplets evaporate into water vapor in the heat-insulated cavity. The gas expands in the closed air duct, which increases the airflow velocity entering the inlet of the first injector. The first injector mixes the waste liquid with the air thoroughly through the Venturi effect and then delivers it into the inner cylinder. The liquid conveying device and atomizing device have simple structure and good mixing effect. 4. By using a stream of cold nitrogen gas and cooling water that does not come into direct contact with the high-temperature gas to cool the high-temperature gas, no waste liquid is generated, reducing post-processing work; the first cooling device first introduces cold nitrogen gas to mix with the reacted gas for cooling, and then the mixed gas exchanges heat with the first cold water chamber for cooling, realizing rapid cooling of the gas in a small volume. 5. When the temperature inside the adsorption cylinder is too high, cooling gas is introduced into the first cooling gas pipe to mix with the gas after the high-temperature reaction, thereby reducing the temperature of the packing material inside the adsorption cylinder and preventing the packing material from absorbing harmful components due to excessive temperature. Using identical adsorption cylinders for backup reduces the types of accessories, facilitates interchangeability, and saves costs. After the controller detects that the temperature is higher than the preset value by the second temperature sensor, it sends low-temperature gas into the second cooling gas pipe to prevent the temperature of the final discharged gas from being too high and affecting the blower, thus extending the service life of the blower. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0018] Figure 1 : A top view of the structure of the present invention (the blower is not shown); Figure 2 :exist Figure 1 Schematic diagram of the cross-sectional structure at point AA; Figure 3 :exist Figure 2 A magnified schematic diagram of the local structure at point B; Figure 4 One of the three-dimensional structural schematic diagrams of the present invention; Figure 5 : A second three-dimensional structural schematic diagram of the present invention; Figure 6 : Side sectional view of the first cooling device and the second cooling device; Figure 7 : A three-dimensional structural diagram of the first cooling device and the second cooling device; Figure 8 : Schematic diagram of the cross-sectional structure of the adsorption device. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and examples: Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0021] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Example 1: like Figures 1 to 8 As shown, this embodiment provides a circulating heating wastewater-free tail gas treatment device, including: a reaction cylinder 1, a second cooling device 3, an adsorption cylinder 4, a liquid conveying device, and an atomizing device. The reaction cylinder 1, the second cooling device 3, and the adsorption cylinder 4 are connected in sequence. The reaction cylinder 1 includes an inner cylinder 12, a tail gas inlet pipe 15, and a heating rod 16. A solid catalyst is placed inside the inner cylinder 12, and the heating rod 16 is located inside the inner cylinder 12. The tail gas inlet pipe 15 is connected to the inside of the inner cylinder 12. The second cooling device 3 includes a housing 31. The liquid conveying device is connected to both the inside of the inner cylinder 12 and the inside of the housing 31. The outlet of the atomizing device is connected to the inside of the inner cylinder 12. The tail gas undergoes a high-temperature catalytic reaction with air and water vapor, reacting harmful components in the tail gas. Finally, the adsorption cylinder 4 adsorbs the gas after the high-temperature reaction. The entire process does not use water washing or spraying, and no waste liquid is discharged externally, simplifying the subsequent treatment of waste. It is suitable for small-scale pilot production in semiconductor factories or experiments in laboratories.

[0022] Because water vapor is introduced into the inner cylinder 12, the housing 31 inevitably receives the waste liquid input from the inner cylinder 12. When there is too much waste liquid in the housing 31, in order to prevent the waste liquid from overflowing, operating institutions without wastewater treatment qualifications or capabilities must suspend production or experiments. The waste liquid temporarily stored in the housing 31 is transported to the inner cylinder 12 by a liquid conveying device. The waste liquid is evaporated at high temperature, releasing small bubbles. Some of the gases generated in the waste liquid (such as ammonia) react in the high-temperature environment inside the inner cylinder 12 to generate harmless products, and some of the gases generated in the waste liquid are adsorbed in the subsequent adsorption tank 4. This avoids the shutdown of the device caused by excessive waste liquid in the housing 31 and the inability to discharge it, ensuring the continuous and stable operation of the device.

[0023] The exhaust gas may contain PFC gas, in which case the solid catalyst includes Al2O3. The solid catalyst is granular, and after being stacked, channels for gas flow can be formed between the particles.

[0024] like Figure 2 and Figure 5 As shown, the reaction cylinder 1 also includes an outer cylinder 11, a top plate 13, and a bottom plate 14. The upper and lower ends of the outer cylinder 11 and the inner cylinder 12 are fixedly connected to the top plate 13 and the bottom plate 14, respectively. The inner cylinder 12 is located inside the outer cylinder 11. A heat insulation cavity 10 is formed between the outer cylinder 11 and the inner cylinder 12. The outer cylinder 11 has a first air inlet 111 and a first air outlet 112. The first air inlet 111 and the first air outlet 112 are respectively connected to the heat insulation cavity 10. The first air inlet 111 is connected to the outlet of the atomizing device, and the first air outlet 112 is connected to the inside of the inner cylinder 12. The atomizing device turns liquid (such as water) into small droplets. The air carrying the small droplets evaporates and absorbs heat in the heat insulation cavity 10, turning the small droplets into water vapor and reducing the temperature of the outer cylinder 11, preventing the temperature of the outer cylinder 11 from becoming too high and affecting other equipment in the machine.

[0025] like Figure 1 As shown, the atomizing device includes a second injector 7, an air compressor 8, and a water tank 71. The inlet of the second injector 7 is connected to the air compressor 8, the outlet of the second injector 7 is connected to the first air inlet 111, and the liquid suction port of the second injector 7 is connected to the water tank 71. Water is drawn from the water tank 71 using the Venturi effect, resulting in a simple structure.

[0026] Preferably, the first air inlet 111 is connected in series with a one-way valve to prevent the gas after the insulation cavity 10 has expanded from returning through the first air inlet 111.

[0027] In another embodiment, the atomizing device is an ultrasonic atomizer, which vibrates water into small droplets and disperses them into the passing air.

[0028] like Figure 1As shown, the liquid conveying device includes a first ejector 6, a second air inlet 131 on the top plate 13, the second air inlet 131 being connected to the interior of the inner cylinder 12, the inlet of the first ejector 6 being connected to the first air outlet 112, the outlet of the first ejector 6 being connected to the second air inlet 131, and the liquid inlet of the first ejector 6 being connected to the interior of the housing 31. The first ejector 6 draws in waste liquid within the housing 31 through the Venturi effect, has a simple structure, and can be made of corrosion-resistant materials; compared to other embodiments using pumps (magnetic pumps, diaphragm pumps) as liquid conveying devices, the first ejector 6 has a lower cost.

[0029] In another embodiment, the inlet of the first injector 6 is directly supplied with compressed air by the air compressor 8, and the inlet is connected to the second air inlet 131; the first air outlet 112 is not connected to the inlet of the first injector 6, but is directly connected to the second air inlet 131.

[0030] like Figure 1 As shown, the liquid conveying device also includes two three-way valves 61, which are connected by a pipe. The pipe connecting the two three-way valves 61 is connected in parallel with the first injector 6. The two three-way valves 61 are respectively connected to the first air outlet 112 and the second air inlet 131. The three-way valve 61 connected to the first air outlet 112 is connected to the inlet of the first injector 6, and the three-way valve 61 connected to the second air inlet 131 is connected to the outlet of the first injector 6. A sensor for detecting the waste liquid level is installed inside the housing 31. When the liquid level is low, the controller controls the two three-way valves 61 to connect, preventing waste liquid from being drawn from the housing 31. When the liquid level is high, the controller controls the two three-way valves 61 to disconnect, allowing the first injector 6 to draw waste liquid from the housing 31. In this case, the three-way valves 61 are electrically operated.

[0031] like Figure 2 and Figure 3 As shown, the reaction cylinder 1 also includes a spiral plate 19, which is located inside the heat insulation cavity 10. The inner side of the spiral plate 19 is in contact with the outer side of the inner cylinder 12, and the outer side of the spiral plate 19 is in contact with the inner side of the outer cylinder 11. An air duct is formed between the outer cylinder 11, the inner cylinder 12, and the spiral plate 19, and the air duct is connected to the first air inlet 111 and the first air outlet 112, respectively. The air duct is used to increase the airflow path and rectify the gas.

[0032] Preferably, the spiral plate 19 is fixedly connected to the inner cylinder 12, serving as a heat dissipation fin for the inner cylinder 12 and increasing the heat exchange efficiency.

[0033] like Figure 2 and Figure 3As shown, it also includes a catalyst cylinder 17, which is located inside the inner cylinder 12 and fixed in position relative to the inner cylinder 12. The catalyst cylinder 17 has a plurality of first through holes 170 and is filled with a solid catalyst. The heating rod 16 is located between the inner cylinder 12 and the catalyst cylinder 17.

[0034] Furthermore, the catalyst cartridge 17 includes a first cylinder 171 and a first mesh plate 172. The first cylinder 171 has multiple first through holes formed on its side. The first cylinder 171 is fixed to and detachably connected to the first mesh plate 172 at its lower end, facilitating the replacement of the internal solid catalyst. The first mesh plate 172 is lower than the first through holes, and the solid catalyst is placed between the first cylinder 171 and the first mesh plate 172. Air carrying water vapor mixes with the exhaust gas and passes through the first through holes and the annular gap into the interior of the first cylinder 171. Then, the gas comes into contact with the solid catalyst and reacts under high-temperature conditions. After the reaction is complete, the reacted gas flows downwards through the first mesh plate 172 and exits the catalyst cartridge 17.

[0035] like Figure 1 and Figure 2 As shown, the exhaust gas inlet pipe 15 is fixedly connected to and communicates with the top plate 13, and the heating rod 16 is fixedly connected to the top plate 13. The heating rod 16 is evenly arranged around the catalyst cylinder 17, so that the heating rod 16 heats the solid catalyst in the catalyst cylinder 17 more evenly.

[0036] like Figure 2 and Figure 3 As shown, it also includes a top cover 18, which is located above and fixedly connected to the catalyst cylinder 17. The top cover 18 and the catalyst cylinder 17 form an annular gap. The top cover 18 is a cone with a high center and low periphery. The second air inlet 131 of the top plate 13 is located above the center of the top cover 18. Air containing water vapor enters the inner cylinder 12 through the second air inlet 131, first contacting the top cover 18, and then dispersed around it under the guidance of the cone surface of the top cover 18. After fully mixing with the exhaust gas entering from the exhaust gas inlet pipe 15, it then enters the catalyst cylinder 17 through the annular gap and the first through hole. The top cover 18 blocks the top of the catalyst cylinder 17, preventing air from entering the catalyst cylinder 17 directly without mixing with the exhaust gas. The top cover 18 also prevents the waste liquid from directly contacting the solid catalyst, thus serving to heat and evaporate the waste liquid and guide excess waste liquid to the surrounding area.

[0037] like Figure 2 , Figure 6 and Figure 7The second cooling device 3 also includes a second pipe 34, an air outlet pipe 35, and a water suction pipe 38. The second pipe 34 is fixedly installed inside the cooling cavity 30 of the box 31. The second pipe 34 is connected to the second water inlet pipe 311 and the second water outlet pipe 312 respectively. The upper part of the box 31 is connected to the inside of the inner cylinder 12, and the lower part of the box 31 is fixedly connected to the air outlet pipe 35. The air outlet pipe 35 is connected to the adsorption cylinder 4. The upper and lower parts of the cooling cavity 30 are connected to the inside of the inner cylinder 12 and the air outlet pipe 35 respectively. The water suction pipe 38 passes through the box 31 and is fixedly connected to the box 31. The water suction pipe 38 is connected to the cooling cavity 30.

[0038] like Figure 2 As shown, the second cooling device 3 also includes a second partition 33, which is located inside a water cavity 300 and divides the water cavity 300 into two independent water distribution chambers 301 and water collection chambers 302. The second partition 33 is fixedly connected to the housing 31 and the first partition 32 corresponding to the water cavity 300 it is located in. The water distribution chambers 301 and water collection chambers 302 are respectively connected to the second water inlet pipe 311 and the second water outlet pipe 312. The cooling water flow direction is as follows: Figure 2 As indicated by the hollow arrow, cooling water enters the distribution chamber 301 of the right-side water chamber 300 from the second inlet pipe 311. The distribution chamber 301 distributes the cooling water from the second inlet pipe 311 to multiple lower second pipes 34. The cooling water then flows along the second pipes 34 into the left-side water chamber 300. After moving upwards in the left-side water chamber 300, the cooling water enters the upper multiple second pipes 34 and flows along them until it reaches the collecting chamber 302 where it converges. Finally, it is discharged from the second outlet pipe 312. During its flow through the second pipes 34, the cooling water exchanges heat with the mixed gas, further reducing the gas temperature.

[0039] like Figure 6 As shown, the second cooling device 3 also includes a first baffle 36 and a second baffle 37. The first baffle 36 and the second baffle 37 are located inside the cooling cavity 30 and are fixedly connected to the housing 31. The first baffle 36 is located above the space between the two second baffles 37. Second pipes 34 are respectively provided on the upper and lower sides of the first baffle 36 and the upper and lower sides of the second baffle 37. The first baffle 36 and the second baffle 37 cause the airflow in the cooling cavity 30 to change direction multiple times, thereby extending the gas path and improving the cooling effect.

[0040] like Figure 2 , Figure 6 and Figure 7It also includes a first cooling device 2, which is located between the reaction cylinder 1 and the second cooling device 3 and is fixedly connected to the reaction cylinder 1 and the second cooling device 3 respectively. The first cooling device 2 includes a cooling cylinder 21 and a first pipe 24. The first pipe 24 is located inside the cooling cylinder 21. A first cold water chamber 20 is formed between the cooling cylinder 21 and the first pipe 24. The first cold water chamber 20 is independent of the interior of the first pipe 24. The first cold water chamber 20 is connected to the first water inlet pipe 211 and the first water outlet pipe 212 respectively. The space above the first pipe 24 in the inner cavity of the cooling cylinder 21 is connected to the interior of the inner cylinder 12 and to the side of the first air inlet pipe 213. The first air inlet pipe 213 is connected to the cooling air source. The lower opening of the first pipe 24 is connected to the upper part of the interior of the box 31. The cooling gas source first introduces cooling gas (such as cold nitrogen) to mix with the reacted gas to lower the temperature, and then the mixed gas exchanges heat with the first cold water chamber 20 to lower the temperature, thus achieving rapid cooling of the gas in a small volume.

[0041] Furthermore, the first cooling device 2 also includes an upper end plate 22 and a lower end plate 23. The lower end plate 23 is fixedly connected to the cooling cylinder 21. The upper end plate 22 is located inside the cooling cylinder 21 and is fixedly connected to the cooling cylinder 21. The upper end plate 22 is located above the lower end plate 23. Multiple first pipes 24 pass through the upper end plate 22 and the lower end plate 23 and are fixedly connected to the upper end plate 22 and the lower end plate 23 respectively. The multiple first pipes 24 increase the contact area and disperse the gas into multiple airflows, which quickly reduces the temperature of the gas. The first cold water chamber 20 is located between the inner wall of the cooling cylinder 21, the upper end plate 22, the lower end plate 23 and the outer wall of the first pipes 24. The first water inlet pipe 211 and the first water outlet pipe 212 are fixedly connected to the cooling cylinder 21 respectively.

[0042] like Figure 7 As shown, the cooling cylinder 21 is fixedly connected to the first air inlet pipe 213. The axis of the first air inlet pipe 213 is parallel to the tangent of the cooling cylinder 21, and the axis of the first air inlet pipe 213 is located between the tangent parallel to it and the radius parallel to it. There is more than one first air inlet pipe 213, and the first air inlet pipes 213 are evenly arranged in a circle around the axis of the cooling cylinder 21. The tangential flow of cold nitrogen gas forms a cyclone, which makes the nitrogen gas and the high-temperature gas mix more evenly, and makes the temperature of the mixed gas more uniform throughout.

[0043] like Figure 7 As shown, the base plate 14 is located above the cooling cylinder 21 and is coaxial with the cooling cylinder 21. The base plate 14 is fixed to the cooling cylinder 21. The base plate 14 covers part of the area above the inner cavity of the cooling cylinder 21, so that nitrogen gas leaks upward as little as possible and mixes as much nitrogen gas as possible with the high-temperature gas after the reaction.

[0044] like Figure 5As shown, the exhaust pipe 35 has a second air inlet pipe 351, and the second air inlet pipe 351 and the first air inlet pipe 213 are respectively connected to a cooling gas source; the first water inlet pipe 211 and the first water outlet pipe 212 are respectively connected to a cold water source. The cooling gas source can be a nitrogen cylinder, and the temperature of the nitrogen gas output is lower than the temperature of the gas after the reaction.

[0045] Furthermore, the cold water source is a heat exchanger, and the second inlet pipe 311 and the second outlet pipe 312 are respectively connected to the cold water source. The hot water discharged from the cooling device is cooled down in the heat exchanger and then sent to a cooling device 2 and a second cooling device 3.

[0046] like Figure 4 , Figure 5 and Figure 8 As shown, the adsorption cylinder 4 includes an adsorption cylinder body 41 and a sealing cap 42. The upper part of the adsorption cylinder body 41 is fixed to the sealing cap 42 and is detachably connected to facilitate the disassembly and replacement of the packing. At least two second mesh plates 43 are fixedly arranged inside the adsorption cylinder body 41, and packing is arranged between the two second mesh plates 43. The adsorption cylinder body 41 is fixedly connected to the air inlet pipe 411, and the air inlet pipe 411 forms a first cooling air pipe 413. The first cooling air pipe 413 is connected to a cooling air source. The air inlet pipe 411 is connected to the inside of the adsorption cylinder body 41 and the first cooling air pipe 413 respectively. The sealing cap 42 is fixedly connected to the air outlet pipe 421.

[0047] Furthermore, it also includes a first temperature sensor (not shown in the figure) and a controller. A first sensor connector 412 is fixedly installed on the adsorption cylinder 41, and the first temperature sensor is installed in the first sensor connector 412. The controller is electrically connected to the first temperature sensor and to a first electric valve for connecting the cooling gas source and the first cooling gas pipe 413. The controller controls the opening and closing of the first electric valve based on the data from the first temperature sensor. The first electric valve is normally closed, and the cooling gas source does not normally supply low-temperature gas to the first cooling gas pipe 413. After the first temperature sensor detects a temperature greater than a preset value, the controller opens the first electric valve to connect the cooling gas source and the first cooling gas pipe, sending the low-temperature gas into the first cooling gas pipe 413. The reacted high-temperature gas mixes with the low-temperature gas below the first cooling gas pipe 413 and the lowermost second mesh plate 43, reducing the temperature of the mixed gas.

[0048] like Figure 8 As shown, the height of the second mesh plate 43 is lower than that of the outlet pipe 421 and higher than that of the inlet pipe 411. The second mesh plate 43 is fixed to the adsorption cylinder 41 and can be detachably connected, thereby ensuring that the gas after the reaction must pass through the gaps in the packing between the second mesh plates 43.

[0049] like Figure 4 and Figure 5As shown, it also includes an observation window 44, which passes through the side of the adsorption cylinder 41 and is fixedly connected to it. The height of the observation window 44 is between the uppermost and lowermost second mesh plates 43, and multiple observation windows 44 are arranged in a straight line perpendicular to the second mesh plates 43. Color-changing balls are provided in the packing material, which change color according to the pH level. Workers use the observation windows 44 to determine whether the adsorption cylinder 41 is saturated. When the color-changing balls are observed to change color in the highest observation window 44, the packing material needs to be replaced.

[0050] Furthermore, the lower part of the adsorption cylinder 41 is connected to multiple casters 48.

[0051] like Figure 4 As shown, it also includes a second valve 46 and a first valve 45. The second valve 46 and the first valve 45 are used to cut off the connection between the adsorption cylinder 41 and the outside world, so as to seal the inside of the adsorption cylinder 41 during transportation and replacement, and prevent the packing from absorbing external gas or releasing gas to the outside. The exhaust pipe 421 is fixedly connected to the second valve 46 and is in communication with it. The inlet pipe 411 is fixedly connected to the first valve 45 and is in communication with it.

[0052] like Figure 4 As shown, it also includes a third valve 47, which is fixedly connected to and communicates with the end of the first valve 45 away from the intake pipe 411. The third valve 47 is an electric valve.

[0053] like Figure 4 and Figure 5 As shown, it also includes a blower 5 and a multi-port fitting 53. There are at least two adsorption cylinders 4. The air outlet pipe 421 of each adsorption cylinder 4 is connected to the multi-port fitting 53, and the multi-port fitting 53 is connected to the air inlet of the blower 5.

[0054] Preferably, the second valves 46 are all fixed to and detachably connected to the multi-port fitting 53.

[0055] During operation, only one adsorption cylinder 4 is used, meaning that only the first valve 45, second valve 46, and third valve 47 of one adsorption cylinder 4 are open, while the first valve 45, second valve 46, and third valve 47 of the remaining adsorption cylinder 4 are closed as backups. When the packing material in the adsorption cylinder 4 in use is detected to be saturated, the first valve 45, second valve 46, and third valve 47 of the backup adsorption cylinder 4 are opened first, and then the first valve 45, second valve 46, and third valve 47 of the adsorption cylinder in use are closed, completing the switching of adsorption cylinder 4 without requiring the exhaust gas treatment device to be shut down. Using identical adsorption cylinders 4 for mutual backup reduces the types of accessories, facilitates interchangeability, and saves costs.

[0056] When the exhaust gas treatment volume suddenly increases, a single adsorption cylinder 4 cannot guarantee that all the exhaust gas and its reaction gas will be adsorbed and then discharged. At this time, the first valve 45, the second valve 46 and the third valve 47 corresponding to the two adsorption cylinders 4 are all opened, and the two adsorption cylinders 4 simultaneously adsorb and process the exhaust gas from the two outlet pipes 35 respectively.

[0057] Furthermore, it also includes a connecting pipe 52, which is respectively provided with a second cooling air pipe 521 and a second temperature connector 522. The second cooling air pipe 521 and the second temperature connector 522 are connected to the interior of the connecting pipe 52. The second cooling air pipe 521 is connected to a cooling air source. A first temperature sensor is installed inside the second temperature connector 522. The first temperature sensor and a second electric valve for connecting the second cooling air pipe 521 and the cooling air source are electrically connected to the controller. The connecting pipe 52 is connected to the multi-port fitting 53 and the air inlet of the blower 5. After the controller detects that the temperature is higher than a preset value by the second temperature sensor, it opens the second electric valve to connect the cooling air source to the second cooling air pipe 521, and sends low-temperature gas into the second cooling air pipe 521 to prevent the temperature of the finally discharged gas from being too high and affecting the blower 5.

[0058] Working principle: Compressed air generated by air compressor 8 enters the inlet of second ejector 7, drawing liquid from water tank 71 into the second ejector 7 through the venturi effect. After the compressed air and liquid mix, they are ejected from the outlet of second ejector 7. At this time, the liquid is in the form of small droplets dispersed in the airflow.

[0059] Air carrying liquid droplets enters the insulation cavity 10 through the first air inlet 111 and flows along the air duct within the insulation cavity 10. The air duct increases the path length of the air within the insulation cavity 10, enhancing heat exchange with the inner cylinder 12. This not only raises the overall temperature of the air but also causes the liquid droplets to absorb heat during evaporation, turning the liquid into water vapor, which facilitates subsequent reaction with the exhaust gas. After evaporation, the water vapor expands in volume within the closed air duct connected only to the first air inlet 111 and the first air outlet 112, moving forward and pushing against the gas in front, increasing the airflow velocity leaving the first air outlet 112.

[0060] When there is little or no liquid in the cooling chamber 30 of the housing 31, both three-way valves 61 disconnect from the first injector 6. Air passes directly through the pipe connected in parallel with the first injector 6 between the two three-way valves 61, without passing through the first injector 6. Air carrying water vapor enters the inner cylinder 12 from the second air inlet 131, and exhaust gas enters the inner cylinder 12 from the exhaust gas inlet pipe 15. The exhaust gas, air, and water vapor are catalyzed by the solid catalyst in the catalyst cylinder 17 under high temperature conditions.

[0061] When there is a large amount of liquid in the cooling chamber 30 of the housing 31, both three-way valves 61 are connected to the first injector 6, and the connection between the two three-way valves 61 is disconnected. The expanded and accelerated air enters the inlet of the first injector 6, and through the Venturi effect, the waste liquid in the cooling chamber 30 is drawn into the first injector 6 through the suction pipe 38. Finally, the air mixed with small droplets of waste liquid and water vapor enters the inner cylinder 12 from the second air inlet 131. The small droplets of waste liquid evaporate into gas after being sprayed onto the top cover 18, preventing too much waste liquid in the housing 31. The exhaust gas treatment device stops working due to the lack of discharge of waste liquid. The exhaust gas enters the inner cylinder 12 from the exhaust gas inlet pipe 15, and the exhaust gas, air and water vapor are catalyzed by the solid catalyst in the catalyst cylinder 17 under high temperature conditions. At the same time, the gases (such as ammonia) generated by the evaporation of waste liquid and the tail gas bubbles released from the waste liquid react again at high temperature inside the inner cylinder 12, further removing harmful components from the tail gas, reducing the adsorption capacity of the packing in the adsorption cylinder 4, and increasing the service life of the packing in the adsorption cylinder 4.

[0062] After the high-temperature reaction, the gas flows from top to bottom through the middle of the base plate 14 into the inner cavity of the cooling cylinder 21. Nitrogen gas, at a temperature lower than the gas, is blown out from the first air inlet pipe 213. The gas mixes with the first air inlet pipe 213 above the upper end plate 22, lowering the gas temperature. Then, the gas flows downwards through the first pipe 24. During its passage through the first pipe 24, the gas comes into contact with the inner wall of the first pipe 24 and exchanges heat with the cooling water in the first cold water chamber 20, further reducing the gas temperature.

[0063] like Figure 6 As shown in the diagram, the solid arrows represent the airflow direction. After leaving the first pipe 24, the gas continues to move downwards into the chamber 31. Within the chamber 31, the gas moves and comes into contact with the second pipe 34, exchanging heat and lowering its temperature. After cooling, the gas is discharged from the outlet pipe 35. A temperature sensor (not shown in the diagram) is installed inside the outlet pipe 35. If the gas temperature is higher than a preset value, the second inlet pipe 351 will blow cooling gas (such as cold nitrogen) into the outlet pipe 35 to further reduce the gas temperature below the preset value.

[0064] The cooled gas enters the adsorption cylinder 41 through the inlet pipe 411, then passes upward through the second mesh plate 43. Harmful components in the gas (such as HF) are adsorbed by the solid block packing material between the second mesh plates 43 or react chemically with the packing material. The adsorbed or reacted gas then passes upward through the uppermost second mesh plate 43 and exits the adsorption cylinder 41 through the outlet pipe 421. When the temperature inside the adsorption cylinder 41 is too high, cooling gas is introduced through the first cooling gas pipe 413 to mix with the gas after the high-temperature reaction, lowering the temperature of the mixed gas and consequently reducing the temperature of the packing material inside the adsorption cylinder 41. This prevents excessively high temperatures from affecting the packing material's absorption of harmful components and also prevents the gas discharged through the outlet pipe 421 from being too hot.

[0065] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A circulating heating wastewater-free exhaust gas treatment device, characterized in that, include: The reaction cylinder (1), the second cooling device (3), the adsorption cylinder (4), the liquid conveying device and the atomizing device are connected in sequence. The reaction cylinder (1) includes an inner cylinder (12), a tail gas inlet pipe (15) and a heating rod (16). A solid catalyst is provided inside the inner cylinder (12). The heating rod (16) is located inside the inner cylinder (12). The tail gas inlet pipe (15) is connected to the inside of the inner cylinder (12). The second cooling device (3) includes a box (31). The liquid conveying device is connected to the inside of the inner cylinder (12) and the inside of the box (31) respectively. The outlet of the atomizing device is connected to the inside of the inner cylinder (12).

2. The circulating heating wastewater-free tail gas treatment device according to claim 1, characterized in that: The reaction cylinder (1) also includes an outer cylinder (11), a top plate (13) and a bottom plate (14). The upper and lower ends of the outer cylinder (11) and the inner cylinder (12) are fixedly connected to the top plate (13) and the bottom plate (14) respectively. The inner cylinder (12) is located inside the outer cylinder (11). A heat insulation cavity (10) is formed between the outer cylinder (11) and the inner cylinder (12). The outer cylinder (11) has a first air inlet (111) and a first air outlet (112). The first air inlet (111) and the first air outlet (112) are respectively connected to the heat insulation cavity (10). The first air inlet (111) is connected to the outlet of the atomizing device. The first air outlet (112) is connected to the inside of the inner cylinder (12).

3. The circulating heating wastewater-free tail gas treatment device according to claim 2, characterized in that: The atomizing device includes a second injector (7), an air compressor (8), and a water tank (71). The inlet of the second injector (7) is connected to the air compressor (8), the outlet of the second injector (7) is connected to the first air inlet (111), and the liquid suction port of the second injector (7) is connected to the water tank (71).

4. The circulating heating wastewater-free tail gas treatment device according to claim 3, characterized in that: The liquid conveying device includes a first injector (6), the top plate (13) is provided with a second air inlet (131), the second air inlet (131) is connected to the inside of the inner cylinder (12), the inlet of the first injector (6) is connected to the first air outlet (112), the outlet of the first injector (6) is connected to the second air inlet (131), and the liquid inlet of the first injector (6) is connected to the inside of the box (31).

5. The circulating heating wastewater-free tail gas treatment device according to claim 4, characterized in that: The liquid delivery device also includes two three-way valves (61), which are connected by a pipe. The pipe connecting the two three-way valves (61) is connected in parallel with the first injector (6). The two three-way valves (61) are connected to the first air outlet (112) and the second air inlet (131) respectively. The three-way valve (61) connected to the first air outlet (112) is connected to the inlet of the first injector (6), and the three-way valve (61) connected to the second air inlet (131) is connected to the outlet of the first injector (6).

6. The circulating heating wastewater-free tail gas treatment device according to claim 2, characterized in that: The reaction cylinder (1) also includes a spiral plate (19), which is located inside the heat insulation cavity (10). The inner side of the spiral plate (19) is attached to the outer side of the inner cylinder (12), and the outer side of the spiral plate (19) is attached to the inner side of the outer cylinder (11). An air duct is formed between the outer cylinder (11), the inner cylinder (12), and the spiral plate (19). The air duct is connected to the first air inlet (111) and the first air outlet (112) respectively.

7. The circulating heating wastewater-free tail gas treatment device according to claim 1, characterized in that: It also includes a catalyst cylinder (17), which is located inside the inner cylinder (12) and is fixed in position relative to the inner cylinder (12). The catalyst cylinder (17) has a plurality of first through holes (170) and is provided with a solid catalyst inside. The heating rod (16) is located between the inner cylinder (12) and the catalyst cylinder (17). The exhaust gas inlet pipe (15) is fixedly connected to the top plate (13) and communicates with it. The heating rod (16) is fixedly connected to the top plate (13). The heating rod (16) is evenly arranged around the catalyst cylinder (17). It also includes a top cover (18), which is located above the catalyst cylinder (17) and fixedly connected to the catalyst cylinder (17). The top cover (18) and the catalyst cylinder (17) form an annular gap. The top cover (18) is a cone with a high center and low periphery. The second air inlet (131) of the top plate (13) is located above the center of the top cover (18).

8. The circulating heating wastewater-free tail gas treatment device according to claim 1, characterized in that: The second cooling device (3) also includes a second pipe (34), an air outlet pipe (35), and a water suction pipe (38). The second pipe (34) is fixedly installed inside the cooling cavity (30) of the box body (31). The second pipe (34) is connected to the second water inlet pipe (311) and the second water outlet pipe (312) respectively. The upper part of the box body (31) is connected to the inside of the inner cylinder (12). The lower part of the box body (31) is fixedly connected to the air outlet pipe (35). The air outlet pipe (35) is connected to the adsorption cylinder (4). The upper and lower parts of the cooling cavity (30) are connected to the inside of the inner cylinder (12) and the air outlet pipe (35) respectively. The water suction pipe (38) passes through the box body (31) and is fixedly connected to the box body (31). The water suction pipe (38) is connected to the cooling cavity (30).

9. The circulating heating wastewater-free tail gas treatment device according to claim 1, characterized in that: It also includes a first cooling device (2), which is located between the reaction cylinder (1) and the second cooling device (3) and is fixedly connected to the reaction cylinder (1) and the second cooling device (3) respectively. The first cooling device (2) includes a cooling cylinder (21) and a first pipe (24). The first pipe (24) is located inside the cooling cylinder (21). A first cold water chamber (20) is formed between the cooling cylinder (21) and the first pipe (24). Independent of the interior of the first pipe (24), the first cold water chamber (20) is connected to the first water inlet pipe (211) and the first water outlet pipe (212) respectively. The space above the first pipe (24) in the inner cavity of the cooling cylinder (21) is connected to the interior of the inner cylinder (12) and the side is connected to the first air inlet pipe (213). The first air inlet pipe (213) is connected to the cooling air source. The opening below the first pipe (24) is connected to the upper part of the interior of the box (31).

10. The circulating heating wastewater-free tail gas treatment device according to claim 1, characterized in that: The adsorption cylinder (4) includes an adsorption cylinder body (41) and a sealing cap (42). The upper part of the adsorption cylinder body (41) is fixedly and detachably connected to the sealing cap (42). At least two second mesh plates (43) are fixedly arranged inside the adsorption cylinder body (41). A packing material is arranged between the two second mesh plates (43). The adsorption cylinder body (41) is fixedly connected to the air inlet pipe (411). The air inlet pipe (411) forms a first cooling air pipe (413). The first cooling air pipe (413) is connected to a cooling air source. The air inlet pipe (411) is connected to the inside of the adsorption cylinder body (41) and the first cooling air pipe (413) respectively. The sealing cap (42) is fixedly connected to the air outlet pipe (421).

Images