A method and apparatus for determining an fHV scan trajectory
Patent Information
- Application Number
- CN202610950173.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-06-29
- Publication Date
- 2026-10-02
AI Technical Summary
然而由于比例信号越远离扫描中心，强度越小（梯形状函数），尽管将扫描固长度固定在某个范围内，但依然只采用靠近中心部分的数据进行计算，边缘扫描得到的光强数据不参计算
[0021]本申请实施例提供的一种FHV扫描轨迹的确定方法及装置，该方法包括：根据目标部件的粗扫描数据，确定使用目标探测器对所述目标部件进行扫描时的扫描中心以及扫描空间尺寸；根据所确定的扫描中心及扫描空间尺寸，设置扫描层数以及每个扫描层的采样点数；其中，靠近扫描中心的扫描层中的采样点数多于远离扫描中心的扫描层中的采样点数；针对每个扫描层，根据扫描空间尺寸中该扫描层的扫描范围、目标探测器的设备参数以及预设扫描移动相关参数，规划该扫描层的初始单层扫描轨迹；根据该扫描层中的采样点数，按预设设置方式，对所述初始单层扫描轨迹进行设置，得到目标单层扫描轨迹；将所有目标单层扫描轨迹按序拼接，得到所述目标部件对应的FHV扫描轨迹。
Smart Images
Figure CN122872083A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and in particular to a method and apparatus for determining FHV scan trajectories. Background Technology
[0002] FHV scanning employs a multi-layered serpentine scanning trajectory, performing X, Y, or diagonal (D) scans on multiple Z-planes. The scaling signal is a trapezoidal function, decreasing in intensity further away from the scan center. When the TIS grating signal is normalized (divided by the scaling signal), this can amplify peak values at certain locations, leading to incorrect alignment. Therefore, to avoid this problem, the scan length for this type of scanning is fixed within a certain range.
[0003] However, in existing FHV scanning, for a fixed scan length, the FHV scanning method uses the same number of scan points per layer. More sample points result in a larger amount of light intensity data acquired during scanning, leading to more accurate alignment. However, because the proportional signal intensity decreases further away from the scan center (trapezoidal function), even with a fixed scan length, only data from the central region is used for calculation, ignoring light intensity data from edge scans. Furthermore, in the existing calculation method, setting the number of sample points too densely per layer improves the accuracy of alignment calculation but increases scan time; conversely, setting the number of sample points sparsely reduces scan time but decreases alignment accuracy. Summary of the Invention
[0004] In view of this, the purpose of this application is to provide a method and apparatus for determining the FHV scanning trajectory. By setting the number of scanning points for different scanning layers to be not necessarily the same, the accuracy of the alignment position calculation is guaranteed, and the scanning speed is improved.
[0005] This application provides a method for determining the FHV scan trajectory, the method comprising: Based on the coarse scan data of the target component, determine the scanning center and scanning space size when using the target detector to scan the target component; Based on the determined scanning center and scanning space dimensions, set the number of scanning layers and the number of sampling points in each scanning layer; wherein, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; For each scanning layer, the initial single-layer scanning trajectory is planned based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and the preset scanning movement related parameters. Based on the number of sampling points in the scanning layer, the initial single-layer scanning trajectory is set according to a preset setting method to obtain the target single-layer scanning trajectory; By sequentially stitching together all the single-layer scan trajectories of the target, the FHV scan trajectory corresponding to the target component is obtained.
[0006] Optionally, setting the number of scanning layers and the number of sampling points per scanning layer based on the determined scanning center and scanning space size includes: The number of scanning layers for scanning the target component is set according to the scanning height in the scanning space. For each scanning layer, the number of sampling points for that scanning layer is determined based on the scanning range of that scanning layer within the scanning space size and the height of the interval between that scanning layer and the scanning center.
[0007] Optionally, setting the number of scanning layers for scanning the target component based on the scanning height within the scanning space includes: The number of scanning layers for scanning the target component is determined by dividing the scanning height in the scanning space dimension by the preset interval height and rounding up to the nearest integer.
[0008] Optionally, determining the number of sampling points for each scanning layer based on the scanning range of that layer within the scanning space and the height interval between that scanning layer and the scanning center includes: For each scan layer, the importance of that scan layer is determined based on the height of that scan layer from the scan center. The number of sampling points for a scanning layer is determined based on its scanning range and its importance.
[0009] Optionally, the step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: The scan length of the scan layer is determined based on the initial single-layer scan trajectory. Based on the scanning length of the scanning layer and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of equal interval distance to obtain the target single-layer scanning trajectory of the scanning layer.
[0010] Optionally, the step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: Based on the initial single-layer scanning trajectory, determine the time variation curve when the target detector walks along the initial single-layer scanning trajectory; Based on the determined time variation curve and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of the same time interval to obtain the target single-layer scanning trajectory of the scanning layer.
[0011] Optionally, when the scanned layer is not the first layer, the determination method further includes the following when planning the initial single-layer scan trajectory for that scanned layer: The projection point of the end point of the previous scan layer onto the current scan layer is determined as the starting point of the current scan layer; Starting from the determined starting point of the scanning layer, path planning is performed to obtain the initial single-layer scanning trajectory of the scanning layer.
[0012] This application embodiment also provides an apparatus for determining the FHV scan trajectory, the apparatus comprising: The determination module is used to determine the scanning center and scanning space size when scanning the target component using the target detector, based on the coarse scan data of the target component. The first setting module is used to set the number of scanning layers and the number of sampling points in each scanning layer according to the determined scanning center and scanning space size; wherein, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; The planning module is used to plan the initial single-layer scanning trajectory for each scanning layer based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and preset scanning movement-related parameters. The second setting module is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory. The stitching module is used to stitch together all target single-layer scan trajectories in sequence to obtain the FHV scan trajectory corresponding to the target component.
[0013] Optionally, when the first setting module is used to set the number of scanning layers and the number of sampling points per scanning layer according to the determined scanning center and scanning space size, the first setting module is used to: The number of scanning layers for scanning the target component is set according to the scanning height in the scanning space. For each scanning layer, the number of sampling points for that scanning layer is determined based on the scanning range of that scanning layer within the scanning space size and the height of the interval between that scanning layer and the scanning center.
[0014] Optionally, when the first setting module is used to set the number of scanning layers for scanning the target component based on the scanning height in the scanning space, the first setting module is used to: The number of scanning layers for scanning the target component is determined by dividing the scanning height in the scanning space dimension by the preset interval height and rounding up to the nearest integer.
[0015] Optionally, when the first setting module determines the number of sampling points for each scanning layer based on the scanning range of that scanning layer within the scanning space size and the height of the interval between the scanning layer and the scanning center, the first setting module is used to: For each scan layer, the importance of that scan layer is determined based on the height of that scan layer from the scan center. The number of sampling points for a scanning layer is determined based on its scanning range and its importance.
[0016] Optionally, when the second setting module is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory, the second setting module is used to: The scan length of the scan layer is determined based on the initial single-layer scan trajectory. Based on the scanning length of the scanning layer and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of equal interval distance to obtain the target single-layer scanning trajectory of the scanning layer.
[0017] Optionally, when the second setting module is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory, the second setting module is used to: Based on the initial single-layer scanning trajectory, determine the time variation curve when the target detector walks along the initial single-layer scanning trajectory; Based on the determined time variation curve and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of the same time interval to obtain the target single-layer scanning trajectory of the scanning layer.
[0018] Optionally, when the scanned layer is not the first layer, the determining device is further configured to: The projection point of the end point of the previous scan layer onto the current scan layer is determined as the starting point of the current scan layer; Starting from the determined starting point of the scanning layer, path planning is performed to obtain the initial single-layer scanning trajectory of the scanning layer.
[0019] This application also provides an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the determination method described above are performed.
[0020] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the determination method described above.
[0021] This application provides a method and apparatus for determining an FHV scanning trajectory. The method includes: determining the scanning center and scanning space size when scanning the target component using a target detector based on coarse scanning data of the target component; setting the number of scanning layers and the number of sampling points in each scanning layer based on the determined scanning center and scanning space size; wherein the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; for each scanning layer, planning an initial single-layer scanning trajectory based on the scanning range of the scanning layer in the scanning space size, the device parameters of the target detector, and preset scanning movement related parameters; setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain a target single-layer scanning trajectory; and sequentially splicing all target single-layer scanning trajectories to obtain the FHV scanning trajectory corresponding to the target component. Thus, as can be seen from the technical solution provided in this application, by setting multiple scanning layers for the target component, with a dense number of sampling points in the middle scanning layer and a sparse number of points in the edge scanning layer, the scanning time is shorter. This is because the spatial image data after sampling only takes the central part for calculation. Therefore, the FHV scanning trajectory determined by the scanning method provided in this solution ensures both the accuracy of the alignment position calculation and the improvement of the scanning speed.
[0022] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1This application provides a schematic diagram of an FHV scanning movement method; Figure 2 A flowchart illustrating a method for determining an FHV scan trajectory provided in an embodiment of this application; Figure 3 An example of a target single-layer scanning trajectory provided in this application; Figure 4 A schematic diagram of an FHV scan trajectory provided in this application; Figure 5 An example of point cloud data obtained by scanning using the scanning trajectory determined in this scheme; Figure 6 A schematic diagram of the structure of an FHV scanning trajectory determination device provided in an embodiment of this application; Figure 7 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.
[0026] FHV scanning employs a multi-layered serpentine scanning trajectory, performing X, Y, or diagonal (D) scans across multiple Z-planes. For an example, please refer to [link / reference]. Figure 1 , Figure 1 This application provides a schematic diagram of an FHV scanning movement method, as shown below. Figure 1 As shown, the provided FHV scan uses a diagonal serpentine scanning motion. The scaling signal is a trapezoidal function; its intensity decreases further away from the scan center. When the TIS grating signal is normalized (divided by the scaling signal), this can amplify peak values at certain locations, leading to incorrect alignment. Therefore, to avoid this problem, the scan length for this type of scan is fixed within a certain range.
[0027] However, in existing FHV scanning, for a fixed scan length, the FHV scanning method uses the same number of scan points per layer. More sample points result in a larger amount of light intensity data acquired during scanning, leading to more accurate alignment. However, because the proportional signal intensity decreases further away from the scan center (trapezoidal function), even with a fixed scan length, only data from the central region is used for calculation, ignoring light intensity data from edge scans. Furthermore, in the existing calculation method, setting the number of sample points too densely per layer improves the accuracy of alignment calculation but increases scan time; conversely, setting the number of sample points sparsely reduces scan time but decreases alignment accuracy.
[0028] Based on this, the embodiments of this application provide a method for determining the FHV scanning trajectory. By setting the number of scanning points for different scanning layers to be not necessarily the same, the accuracy of the alignment position calculation is guaranteed, and the scanning speed is improved.
[0029] Please see Figure 2 , Figure 2 This is a flowchart illustrating a method for determining an FHV scan trajectory provided in an embodiment of this application. This method can be used in the field of optics, such as... Figure 2 As shown in the embodiments of this application, the determination method includes: S101. Based on the coarse scan data of the target component, determine the scanning center and scanning space size when using the target detector to scan the target component.
[0030] S102. Based on the determined scanning center and scanning space size, set the number of scanning layers and the number of sampling points for each scanning layer.
[0031] S103. For each scanning layer, based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and the preset scanning movement related parameters, plan the initial single-layer scanning trajectory of the scanning layer.
[0032] S104. Based on the number of sampling points in the scanning layer, the initial single-layer scanning trajectory is set according to a preset setting method to obtain the target single-layer scanning trajectory.
[0033] S105. All target single-layer scanning trajectories are stitched together in sequence to obtain the FHV scanning trajectory corresponding to the target component.
[0034] It should be noted that the FHV scan trajectory refers to the trajectory required for fine scanning of a target component.
[0035] The following provides a detailed description of each step in the implementation of this application.
[0036] For step S101, this step may include: acquiring coarse scan data of the target component, analyzing the coarse scan data of the target component, and determining the scanning center position and scanning space size when performing fine scanning of the target component using a target detector (TIS).
[0037] Here, the scanning space size can be determined based on the outer contour size of the target component. The scanning space size can be a regular shape size, such as the smallest rectangle determined based on the outer contour size of the target component; the scanning space size can also be an irregular shape size. For example, when the target component is irregular in shape, the scanning space size is the size of the target component determined by the coarse scan.
[0038] Regarding step S102, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center. Therefore, the sampling point count is set to be dense in the middle scanning layer and sparse in the outer scanning layer.
[0039] Regarding step S102, in one embodiment provided in this application, setting the number of scanning layers and the number of sampling points for each scanning layer based on the determined scanning center and scanning space size includes: S1021. Set the number of scanning layers to scan the target component according to the scanning height in the scanning space.
[0040] S1022. For each scanning layer, determine the number of sampling points for that scanning layer based on the scanning range of that scanning layer in the scanning space size and the distance between that scanning layer and the scanning center.
[0041] Regarding step S1021, in this step, based on the scanning height of the target component determined by the coarse scan, the number of layers required to scan when using the target detector to scan the target component is determined according to a preset segmentation principle, that is, the number of scanning layers is determined.
[0042] Furthermore, the step of setting the number of scanning layers for scanning the target component based on the scanning height in the scanning space dimension includes: dividing the scanning height in the scanning space dimension by a preset interval height and rounding up to the nearest integer to determine the number of scanning layers for scanning the target component.
[0043] Here, the preset interval height is the height movement step of the target detector. When the number of scanning layers is determined, the height value of each scanning layer, i.e., the z-axis coordinate, is also determined.
[0044] For example, the method for determining the number of scanning layers is explained through the following steps. Assuming the preset interval height is 3mm and the scanning height in the determined scanning space is 25mm, then the determined number of scanning layers is 7 layers.
[0045] Regarding step S1022, in this step, the number of sampling points of the scanning layer closer to the scanning center can be set to be more, and the number of sampling points of the scanning layer farther from the scanning center can be set to be less.
[0046] Here, in order to improve efficiency, the number of sampling points for each scanning layer can be determined in parallel when determining the number of sampling points for each scanning layer.
[0047] Furthermore, in one embodiment provided in this application, determining the number of sampling points for each scanning layer based on the scanning range of that scanning layer within the scanning space size and the height interval between the scanning layer and the scanning center includes: S10221. For each scan layer, determine the importance of the scan layer based on the distance between the scan layer and the scan center.
[0048] S10222. Determine the number of sampling points for the scanning layer based on its scanning range and importance.
[0049] Here, for step S10221, a mapping relationship between interval height and importance can be preset. Then, based on the determined mapping relationship and the interval height between each scanning layer and the scanning center, the importance of the scanning layer can be determined.
[0050] Specifically, the importance of scanning layers closer to the scanning center can be set to be higher, while the importance of scanning layers farther from the scanning center can be set to be lower.
[0051] For step S10222, this step may include substituting the scanning range of the scanning layer and the importance of the scanning layer into a preset point calculation formula to determine the number of sampling points of the scanning layer.
[0052] The preset point calculation formula can be a linear formula or a non-linear formula. The principle for determining the preset point calculation formula is to initially determine that the scanning layer closer to the scanning center has more sampling points and the scanning layer farther from the scanning center has fewer sampling points.
[0053] For step S103, the device parameters of the target detector may include the maximum WS acceleration and jerk, and the preset scan movement related parameters may include the movement direction (e.g., moving along the X-axis, moving along the Y-axis, moving along the diagonal).
[0054] Furthermore, in one embodiment provided in this application, when the scanning layer is not the first layer, the determination method further includes: determining the projection point of the end point of the previous scanning layer on the scanning layer as the starting point of the scanning layer; starting from the determined starting point of the scanning layer, performing path planning to obtain the initial single-layer scanning trajectory of the scanning layer.
[0055] When the scanning layer is the first layer, the starting point of the scanning layer can be determined by the current position of the target detector, which is the closest corner point in the first scanning layer.
[0056] For step S104, the target single-layer scanning trajectory is generally a serpentine scanning trajectory.
[0057] In one embodiment provided in this application, the step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: determining the scanning length of the scanning layer according to the initial single-layer scanning trajectory; and uniformly distributing the sampling points according to the scanning length of the scanning layer and the number of sampling points in the scanning layer, based on the principle of equal interval distance, to obtain the target single-layer scanning trajectory of the scanning layer.
[0058] In this embodiment, sampling points are evenly distributed according to length.
[0059] In another embodiment provided in this application, the step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: determining the time change curve when the target detector walks along the initial single-layer scanning trajectory according to the initial single-layer scanning trajectory; and uniformly distributing the sampling points according to the principle of the same time interval based on the determined time change curve and the number of sampling points in the scanning layer to obtain the target single-layer scanning trajectory of the scanning layer.
[0060] In this implementation, sampling points are evenly distributed according to the movement time.
[0061] like Figure 3 As shown, Figure 3 An example of a target single-layer scanning trajectory provided in this application. For example... Figure 3 As shown, the single-layer scanning trajectory of the target includes 7 sampling points.
[0062] For step S105, this step includes determining the target single-layer scanning trajectory of each scanning layer, and then splicing the end point of the target single-layer scanning trajectory of the previous scanning layer with the starting point of the target single-layer scanning trajectory of the next scanning layer to obtain the FHV scanning trajectory corresponding to the target component.
[0063] The FHV scan trajectory is a serpentine scan trajectory.
[0064] For an example, please refer to Figure 4 , Figure 4 This is a schematic diagram of an FHV scan trajectory provided in this application. Figure 4 As shown, a three-layer scan overlay is displayed, with each layer being a set of serpentine scan trajectories. The number of sampling points for each layer's trajectory can be set individually.
[0065] Furthermore, to verify the advantages of this solution, relevant experiments were conducted. For examples, please refer to [link / reference needed]. Figure 5 , Figure 5 This is an example of point cloud data obtained by scanning using the scanning trajectory determined in this scheme. For example... Figure 5 As shown, the 13-layer FHV scan trajectory is displayed. It can be seen that the number of sampling points in each layer is different, with denser sampling in the middle and sparser sampling in the outer layers. The fewer the number of sampling points, the shorter the scan time. Because the sampled spatial image data only takes the central part for calculation, this scanning method ensures both the accuracy of alignment calculation and the improvement of scanning speed.
[0066] Thus, as can be seen from the technical solution provided in this application, by setting multiple scanning layers for the target component, with a dense number of sampling points in the middle scanning layer and a sparse number of points in the edge scanning layer, the scanning time is shorter. This is because the spatial image data after sampling only takes the central part for calculation. Therefore, the FHV scanning trajectory determined by the scanning method provided in this solution ensures both the accuracy of the alignment position calculation and the improvement of the scanning speed.
[0067] Based on the same inventive concept, this application also provides a determining device corresponding to the determining method. Since the principle of the device in this application is similar to the determining method described above, the implementation of the device can refer to the implementation of the method, and the repeated parts will not be described again.
[0068] Please see Figure 6 , Figure 6 This is a schematic diagram of the structure of an FHV scan trajectory determination device provided in an embodiment of this application. Figure 6 As shown, the determining device 600 includes: The determining module 610 is used to determine the scanning center and scanning space size when scanning the target component using the target detector, based on the coarse scan data of the target component. The first setting module 620 is used to set the number of scanning layers and the number of sampling points in each scanning layer according to the determined scanning center and scanning space size; wherein, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; The planning module 630 is used to plan the initial single-layer scanning trajectory of each scanning layer based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and preset scanning movement-related parameters. The second setting module 640 is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory. The stitching module 650 is used to stitch together all target single-layer scanning trajectories in sequence to obtain the FHV scanning trajectory corresponding to the target component.
[0069] Optionally, when the first setting module 620 is used to set the number of scanning layers and the number of sampling points per scanning layer according to the determined scanning center and scanning space size, the first setting module 620 is used to: The number of scanning layers for scanning the target component is set according to the scanning height in the scanning space. For each scanning layer, the number of sampling points for that scanning layer is determined based on the scanning range of that scanning layer within the scanning space size and the height of the interval between that scanning layer and the scanning center.
[0070] Optionally, when the first setting module 620 is used to set the number of scanning layers for scanning the target component according to the scanning height in the scanning space, the first setting module 620 is used to: The number of scanning layers for scanning the target component is determined by dividing the scanning height in the scanning space dimension by the preset interval height and rounding up to the nearest integer.
[0071] Optionally, when the first setting module 620 determines the number of sampling points for each scanning layer based on the scanning range of the scanning layer in the scanning space size and the height of the scanning layer from the scanning center, the first setting module 620 is used to: For each scan layer, the importance of that scan layer is determined based on the height of that scan layer from the scan center. The number of sampling points for a scanning layer is determined based on its scanning range and its importance.
[0072] Optionally, when the second setting module 640 is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory, the second setting module 640 is used to: The scan length of the scan layer is determined based on the initial single-layer scan trajectory. Based on the scanning length of the scanning layer and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of equal interval distance to obtain the target single-layer scanning trajectory of the scanning layer.
[0073] Optionally, when the second setting module 640 is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory, the second setting module 640 is used to: Based on the initial single-layer scanning trajectory, determine the time variation curve when the target detector walks along the initial single-layer scanning trajectory; Based on the determined time variation curve and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of the same time interval to obtain the target single-layer scanning trajectory of the scanning layer.
[0074] Optionally, when the scanning layer is not the first layer, the determining device 600 is further configured to: The projection point of the end point of the previous scan layer onto the current scan layer is determined as the starting point of the current scan layer; Starting from the determined starting point of the scanning layer, path planning is performed to obtain the initial single-layer scanning trajectory of the scanning layer.
[0075] Please see Figure 7 , Figure 7 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 7 As shown, the electronic device 700 includes a processor 710, a memory 720, and a bus 730.
[0076] The memory 720 stores machine-readable instructions executable by the processor 710. When the electronic device 700 is running, the processor 710 communicates with the memory 720 via the bus 730. When the machine-readable instructions are executed by the processor 710, they can perform the operations described above. Figures 1 to 5 The steps in the method embodiment shown are specifically implemented in the method embodiment and will not be repeated here.
[0077] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figures 1 to 5 The steps in the method embodiment shown are specifically implemented in the method embodiment and will not be repeated here.
[0078] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.
[0079] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.
[0080] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0081] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.
[0082] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0083] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A method for determining an FHV scan trajectory, characterized in that, The determination method includes: Based on the coarse scan data of the target component, determine the scanning center and scanning space size when using the target detector to scan the target component; Based on the determined scanning center and scanning space dimensions, set the number of scanning layers and the number of sampling points in each scanning layer; wherein, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; For each scanning layer, the initial single-layer scanning trajectory is planned based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and the preset scanning movement related parameters. Based on the number of sampling points in the scanning layer, the initial single-layer scanning trajectory is set according to a preset setting method to obtain the target single-layer scanning trajectory; By sequentially stitching together all the single-layer scan trajectories of the target, the FHV scan trajectory corresponding to the target component is obtained.
2. The determination method according to claim 1, characterized in that, The step of setting the number of scanning layers and the number of sampling points for each scanning layer based on the determined scanning center and scanning space size includes: The number of scanning layers for scanning the target component is set according to the scanning height in the scanning space. For each scanning layer, the number of sampling points for that scanning layer is determined based on the scanning range of that scanning layer within the scanning space size and the height of the interval between that scanning layer and the scanning center.
3. The determination method according to claim 2, characterized in that, The step of setting the number of scanning layers for scanning the target component based on the scanning height within the scanning space includes: The number of scanning layers for scanning the target component is determined by dividing the scanning height in the scanning space dimension by the preset interval height and rounding up to the nearest integer.
4. The determination method according to claim 2, characterized in that, For each scanning layer, the number of sampling points for that scanning layer is determined based on the scanning range of that layer within the scanning space and the height of that scanning layer from the scanning center, including: For each scan layer, the importance of that scan layer is determined based on the height of that scan layer from the scan center. The number of sampling points for a scanning layer is determined based on its scanning range and its importance.
5. The determination method according to claim 1, characterized in that, The step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: The scan length of the scan layer is determined based on the initial single-layer scan trajectory. Based on the scanning length of the scanning layer and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of equal interval distance to obtain the target single-layer scanning trajectory of the scanning layer.
6. The determination method according to claim 1, characterized in that, The step of setting the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory includes: Based on the initial single-layer scanning trajectory, determine the time variation curve when the target detector walks along the initial single-layer scanning trajectory; Based on the determined time variation curve and the number of sampling points in the scanning layer, the sampling points are evenly distributed according to the principle of the same time interval to obtain the target single-layer scanning trajectory of the scanning layer.
7. The determination method according to claim 1, characterized in that, When the scanned layer is not the first layer, the determination method further includes the following when planning the initial single-layer scan trajectory for that scanned layer: The projection point of the end point of the previous scan layer onto the current scan layer is determined as the starting point of the current scan layer; Starting from the determined starting point of the scanning layer, path planning is performed to obtain the initial single-layer scanning trajectory of the scanning layer.
8. A device for determining an FHV scanning trajectory, characterized in that, The determining device includes: The determination module is used to determine the scanning center and scanning space size when scanning the target component using the target detector, based on the coarse scan data of the target component. The first setting module is used to set the number of scanning layers and the number of sampling points in each scanning layer according to the determined scanning center and scanning space size; wherein, the number of sampling points in the scanning layer closer to the scanning center is greater than the number of sampling points in the scanning layer farther from the scanning center; The planning module is used to plan the initial single-layer scanning trajectory for each scanning layer based on the scanning range of the scanning layer in the scanning space, the device parameters of the target detector, and preset scanning movement-related parameters. The second setting module is used to set the initial single-layer scanning trajectory according to the number of sampling points in the scanning layer and a preset setting method to obtain the target single-layer scanning trajectory. The stitching module is used to stitch together all target single-layer scan trajectories in sequence to obtain the FHV scan trajectory corresponding to the target component.
9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the memory via the bus, and the machine-readable instructions are executed by the processor to perform the steps of the determination method as described in any one of claims 1 to 7.
10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the determination method as described in any one of claims 1 to 7.