Heater device and deposition apparatus

Abstract

The embodiment of the utility model provides a heater device and deposition equipment. The heater device comprises a heater, and the heater is provided with a bearing surface for bearing a substrate; the balance plate and the heater are arranged in parallel, and the balance plate is connected with the side, back to the bearing surface, of the heater; the adjusting assembly comprises a fixing part and an adjusting part, the fixing part extends in the vertical direction, the fixing part is fixedly connected with the balance plate through the adjusting part, and the adjusting part moves relative to the fixing part in the extending direction of the fixing part so as to adjust the horizontal state of the heater; and the position detection sensor detects the relative position of the fixing part and the adjusting part so as to determine the horizontal state of the heater. The embodiment of the utility model is at least beneficial to reducing the difficulty of adjusting the horizontal state of the heater.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor equipment technology, and in particular to a heater device and a deposition device. Background Art

[0002] Thin film deposition technology is used to manufacture thin films for microelectronic devices. Common thin film deposition technologies include physical vapor deposition, chemical vapor deposition and other technologies. The deposition equipment is used to form deposits on a substrate. The deposition equipment usually includes a reaction chamber, in which a heater is provided for supporting and heating the substrate.

[0003] Currently, after maintenance of deposition equipment and replacement of accessories, it is difficult to adjust the horizontal state of the reinstalled heater to the same state as before. Utility Model Content

[0004] The embodiments of the present application provide a heater device and a deposition apparatus, which at least help to reduce the difficulty of adjusting the horizontal state of the heater.

[0005] On the one hand, an embodiment of the present application provides a heater device, comprising: a heater, the heater having a bearing surface for bearing a substrate; a balance plate, the balance plate is arranged parallel to the heater, and the balance plate is connected to a side of the heater that is opposite to the bearing surface; an adjustment component, the adjustment component includes a fixing portion and an adjustment portion, the fixing portion extends in a vertical direction, the fixing portion is fixedly connected to the balance plate through the adjustment portion, and the adjustment portion moves relative to the fixing portion along an extension direction of the fixing portion to adjust the horizontal state of the heater; and a position detection sensor, the position detection sensor detects the relative position of the fixing portion and the adjustment portion to determine the horizontal state of the heater.

[0006] In some embodiments, the position detection sensor includes a first component and a second component, the first component is disposed at the fixing portion, and the second component is disposed at the adjusting portion, and the horizontal state of the heater is determined according to the relative position of the first component and the second component.

[0007] In some embodiments, one of the first component and the second component is a signal transmitting device, and the other of the first component and the second component is a signal receiving device.

[0008] In some embodiments, one of the first component and the second component includes a signal transmitting portion and a signal receiving portion, and the other of the first component and the second component is a signal reflecting portion.

[0009] In some embodiments, the heater is connected to the balancing board via a fixed connection.

[0010] In some embodiments, the heater device comprises at least two adjustment components, and the connection points between different adjustment components and the balancing board point to different directions of the center of the balancing board.

[0011] In some embodiments, the adjustment assembly includes two adjustment parts, the fixing part is a bolt, and the adjustment part is a nut. The bolt penetrates the balance plate along the thickness direction of the balance plate. The two nuts are respectively located on opposite sides of the balance plate, and the nuts are screwed onto the outer ring of the bolt.

[0012] In some embodiments, the position detection sensor includes a first component and a second component, the first component is disposed on the fixing portion, and the second component is disposed on at least one adjusting portion.

[0013] In some embodiments, a side surface of the fixing portion that contacts the adjusting portion has a scale, and the horizontal state of the heater is determined according to the value indicated by the adjusting portion on the scale.

[0014] Another aspect of an embodiment of the present application provides a deposition device, comprising the heater device described in any one of the above embodiments.

[0015] The technical solution provided by the embodiment of the present application has at least the following advantages: the heater device has an adjustment component for adjusting the horizontal state of the heater, and position detection sensors are arranged on the fixed part and the adjustment part of the adjustment component. By detecting the distance between the fixed part and the adjustment part, the current horizontal state of the heater is obtained. In this way, equipment maintenance personnel or maintenance personnel can determine the current horizontal state of the heater through the position detection sensor, which is convenient for the equipment maintenance personnel or maintenance personnel to adjust the level of the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0017] Figure 1 A cross-sectional view of a heater device provided in an embodiment of the present application in a first usage scenario;

[0018] Figure 2 A cross-sectional view of a heater device provided in an embodiment of the present application in a second usage scenario;

[0019] Figure 3 A cross-sectional view of a balancing plate and an adjustment assembly of a heater device provided in an embodiment of the present application;

[0020] Figure 4 A top view of a balancing plate and an adjustment assembly of a heater device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0021] As known from the background technology, it is difficult to adjust the horizontal state of the heater.

[0022] To solve the above problems, an embodiment of the present application provides a heater device and a deposition device. The heater device has an adjustment component for adjusting the horizontal state of the heater. Position detection sensors are arranged on the fixed part and the adjustment part of the adjustment component. By detecting the distance between the fixed part and the adjustment part, the current horizontal state of the heater is obtained. In this way, equipment repair or maintenance personnel can determine the current horizontal state of the heater through the position detection sensor, which is convenient for equipment repair or maintenance personnel to adjust the level of the heater.

[0023] The following will be described in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present application, many technical details are provided in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can be implemented. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0024] Figure 1 A cross-sectional view of a heater device provided in an embodiment of the present application in a first usage scenario; Figure 2 A cross-sectional view of a heater device provided in an embodiment of the present application in a second usage scenario; Figure 3 A cross-sectional view of a balancing plate and an adjustment assembly of a heater device provided in an embodiment of the present application; Figure 4 A top view of a balancing plate and an adjustment assembly of a heater device provided in an embodiment of the present application.

[0025] refer to Figures 1 to 4 In one aspect, an embodiment of the present application provides a heater device, comprising: a heater 100, wherein the heater 100 has a bearing surface for bearing a substrate 10; a balancing plate 110, wherein the balancing plate 110 is arranged parallel to the heater 100, and the balancing plate 110 is connected to a side of the heater 100 that is opposite to the bearing surface; an adjusting component 130, wherein the adjusting component 130 comprises a fixing portion 131 and an adjusting portion 132, wherein the fixing portion 131 extends in a vertical direction, wherein the fixing portion 131 is fixedly connected to the balancing plate 110 via the adjusting portion 132, and wherein the adjusting portion 132 moves relative to the fixing portion 131 along an extending direction of the fixing portion 131 to adjust a horizontal state of the heater 100; and a position detection sensor 140, wherein the position detection sensor 140 detects a relative position between the fixing portion 131 and the adjusting portion 132 to determine a horizontal state of the heater 100.

[0026] It should be noted that the deposition device usually includes a heater 100 arranged in the reaction chamber and a shower plate 11 arranged opposite to the heater 100. The distance between the shower plate 11 and the heater 100 has a great influence on the properties of the film layer deposited on the substrate 10. The reason is that the distance between the shower plate 11 and the heater 100 may affect the distribution of plasma ion clusters and the density of the reaction gas on the surface of the substrate 10. Therefore, it is usually necessary to adjust the horizontal state of the shower plate 11 or the distance between the shower plate 11 and the heater 100, so that the properties of the film layer deposited on the substrate 10 meet the requirements. However, since the deposition device may need to remove the heater 100 during maintenance or fault repair, and then install it back to its original position after maintenance or repair, it is usually hoped that It is hoped that the properties of the film layer deposited by the deposition equipment after repair or maintenance are stable compared to those before maintenance or maintenance. In this way, the uniformity of the products manufactured by the deposition equipment can be guaranteed to be high. However, it is difficult to ensure that the horizontal state of the heater 100 after installation is completely consistent with the horizontal state of the heater 100 before maintenance or repair. If the level of the heater 100 cannot be completely consistent with the horizontal state of the heater 100 before maintenance or repair, it may cause the properties of the film layer deposited by the deposition equipment after maintenance or repair to change, affecting the performance of the products produced by the deposition equipment. Alternatively, after installation, the horizontal state of the heater 100 needs to be adjusted multiple times according to the properties of the deposited film layer on the sample, resulting in increased workload and low efficiency of maintenance or repair.

[0027] The heater 100 device provided in the embodiment of the present application has an adjustment component 130 for adjusting the horizontal state of the heater 100. A position detection sensor 140 is arranged on the adjustment component. By detecting the relative position of the fixing part 131 and the adjustment part 132, the current horizontal state of the heater 100 is obtained. In this way, equipment maintenance or repair personnel can obtain the current horizontal state of the heater 100 through the position detection sensor 140 before maintenance or repair. After maintenance or repair, the level of the heater 100 can be adjusted according to the horizontal state of the heater 100 detected by the position detection sensor 140, thereby avoiding multiple adjustments to the horizontal state of the heater 100 according to the properties of the deposited film layer on the sample, which leads to increased workload, and is beneficial to improving the efficiency of maintenance or repair.

[0028] In the adjustment component 130, the fixing portion 131 is a structure that remains fixed during the process of adjusting the level of the heater 100. The adjustment portion 132 is adjusted to positions at different heights on the fixing portion 131, thereby adjusting the height of the connection between the balancing plate 110 and the fixing portion 131, thereby adjusting the horizontal state of the balancing plate 110. Since the heater 100 and the balancing plate 110 are parallel to each other, the horizontal state of the heater 100 changes with the change of the horizontal state of the balancing plate 110, thereby adjusting the horizontal state of the heater 100.

[0029] The adjusting portion 132 is movable along the extending direction of the fixing portion 131 . In some embodiments, the extending direction of the fixing portion 131 may be a vertical direction.

[0030] The heater 100 is used to carry the substrate 10 and heat the substrate 10 during the film deposition process. The carrying surface of the heater 100 is usually provided with a carrying area recessed into the heater 100, and the carrying area is used to place the substrate 10, and the carrying surface faces the spray plate 11, so that the reaction gas flowing out of the spray hole of the spray plate 11 reacts on the substrate 10 on the carrying surface, thereby forming a film layer.

[0031] In some embodiments, reference Figure 3 The position detection sensor includes a first component 141 and a second component 142. The first component 141 is arranged on the fixing portion 131, and the second component 142 is arranged on the adjusting portion 132. The horizontal state of the heater 100 is determined according to the relative position of the first component 141 and the second component 142. The position of the adjusting portion 132 relative to the fixing portion 131 can represent the horizontal state of the heater 100. Therefore, the first component 141 and the second component 142 are respectively installed on the fixing portion 131 and the positioning portion. According to the relative position of the first component 141 and the second component 142, the relative position of the adjusting portion 132 and the fixing portion 131 is obtained, and then the horizontal state of the heater 100 is obtained.

[0032] In some embodiments, the value detected by the position detection sensor 140 can be transmitted to the computer of the deposition device, and the maintenance personnel or users can view the data fed back by the position detection sensor 140 for characterizing the horizontal state of the heater 100 on the computer in real time.

[0033] In some embodiments, one of the first component 141 and the second component 142 is a signal transmitting device, and the other of the first component 141 and the second component 142 is a signal receiving device. In this way, the relative position of the adjusting portion 132 and the fixing portion 131 is determined by the strength of the signal sent by the signal transmitting device received by the signal receiving device, and the horizontal state of the heater 100 is further calculated.

[0034] In some embodiments, one of the first component 141 and the second component 142 includes a signal transmitting part and a signal receiving part, and the other of the first component 141 and the second component 142 is a signal reflecting part. In this way, the signal emitted by the signal transmitting part is transmitted to the signal receiving part through the signal reflecting part, and the relative position of the adjusting part 132 and the fixing part 131 is determined by judging the strength of the signal received by the signal receiving part, thereby calculating the horizontal state of the heater 100.

[0035] In some embodiments, reference Figure 3 and Figure 4 The heater 100 device includes at least two adjustment components 130, and the connection points of different adjustment components 130 and the balance board 110 point to different directions of the center A of the balance board 110. Specifically, the direction in which the connection point of the first adjustment component 130 and the balance board 110 points to the center A of the balance board 110 is the first direction X, and the direction in which the connection point of the second adjustment component 130 and the balance board 110 points to the center A of the balance board 110 is the second direction Y. The first direction X intersects with the second direction Y, so that the horizontal state of the heater can be adjusted by the two adjustment components.

[0036] In some embodiments, the heater 100 device includes at least two adjustment components 130 , and each adjustment component 130 is provided with a position detection sensor 140 .

[0037] In some embodiments, the heater 100 is connected to the balance plate 110 via a fixed connector 120. In some embodiments, the fixed connector 120 is retractable in a direction perpendicular to the bearing surface. In some examples, one end of the fixed connector 120 passes through the balance plate 110 and is fixedly connected to the base, and the other end of the fixed connector 120 is fixedly connected to the heater 100. The end of the fixed connector 120 fixedly connected to the heater 100 is retractable, so that the position of the heater 100 in the vertical direction can be adjusted, thereby achieving effective adjustment of the distance between the heater 100 and the spray plate 11.

[0038] In some embodiments, the adjustment assembly 130 includes two adjustment parts 132, the fixing part 131 is a bolt, and the adjustment part 132 is a nut. The bolt penetrates the balance board 110 along the thickness direction of the balance board 110, and the two nuts are respectively located on opposite sides of the balance board 110, and the nuts are screwed on the outer ring of the bolt. Figure 3 The balance plate 110 has two opposite surfaces, and the two nuts are in contact with the two opposite surfaces of the balance plate 110 respectively to fix the balance plate 110 on the bolt.

[0039] In some embodiments, the position detection sensor includes a first component 141 and a second component 142, wherein the first component 141 is disposed on the fixing portion 131, and the second component 142 is disposed on at least one adjusting portion 132. In some examples, the second component 142 may be disposed on the adjusting portion 132 located on the side of the balancing board 110 away from the heater 100; in other examples, the second component 142 may also be disposed on the adjusting portion 132 located on the side of the balancing board 110 close to the heater 100.

[0040] In some embodiments, the side surface of the fixing portion 131 in contact with the adjusting portion has a scale, and the horizontal state of the heater 100 is determined according to the value indicated on the scale by the adjusting portion 132. On the basis of detecting the horizontal state of the heater 100 by the position detection sensor 140, the position of the adjusting portion 132 relative to the fixing portion 131 can also be determined by the scale, so as to realize a double judgment on the horizontal state of the heater 100, and the position detection sensor 140 can also be calibrated according to the value indicated on the scale by the adjusting portion 132.

[0041] The heater 100 device provided in the embodiment of the present application has an adjustment component 130 for adjusting the horizontal state of the heater 100. A position detection sensor 140 is arranged on the adjustment component. By detecting the relative position of the fixing part 131 and the adjustment part 132, the current horizontal state of the heater 100 is obtained. In this way, equipment maintenance or repair personnel can obtain the current horizontal state of the heater 100 through the position detection sensor 140 before maintenance or repair. After maintenance or repair, the level of the heater 100 can be adjusted according to the horizontal state of the heater 100 detected by the position detection sensor 140, thereby avoiding multiple adjustments to the horizontal state of the heater 100 according to the properties of the deposited film layer on the sample, which leads to increased workload, and is beneficial to improving the efficiency of maintenance or repair.

[0042] Another aspect of an embodiment of the present application provides a deposition device, comprising the heater device described in any one of the above embodiments.

[0043] In some embodiments, the deposition apparatus may be at least one of a plasma enhanced chemical vapor deposition apparatus, an atmospheric pressure chemical vapor deposition apparatus, a high density plasma chemical vapor deposition apparatus, or the like.

[0044] In some embodiments, the deposition equipment may further include a radio frequency controller, a remote plasma controller, a shower plate, a vacuum pump, a ceramic reaction kit, etc. The shower plate is arranged opposite to the heater, and the reaction gas is introduced into the reaction chamber through the air inlet of the shower plate, thereby forming a film on the substrate carried by the heater.

[0045] Those skilled in the art can understand that the above-mentioned embodiments are specific examples of the present invention, and in practical applications, various changes can be made to the embodiments in form and detail without departing from the spirit and scope of the present invention. Any person skilled in the art can make their own changes and modifications without departing from the spirit and scope of the present invention, so the protection scope of the present invention shall be based on the scope defined in the claims.

Claims

1. A heater device, characterized in that: include: A heater having a bearing surface for bearing the substrate; A balancing plate, the balancing plate is arranged parallel to the heater, and the balancing plate is connected to a side of the heater facing away from the bearing surface; an adjusting component, the adjusting component comprising a fixing portion and an adjusting portion, the fixing portion extending in a vertical direction, the fixing portion being fixedly connected to the balancing plate through the adjusting portion, and the adjusting portion moving relative to the fixing portion along an extending direction of the fixing portion to adjust a horizontal state of the heater; A position detection sensor detects a relative position between the fixing portion and the adjusting portion to determine a horizontal state of the heater.

2. The heater device according to claim 1, characterized in that The position detection sensor includes a first component and a second component, the first component is disposed at the fixing portion, and the second component is disposed at the adjusting portion, and the horizontal state of the heater is determined according to the relative position of the first component and the second component.

3. The heater device according to claim 2, characterized in that One of the first component and the second component is a signal transmitting device, and the other of the first component and the second component is a signal receiving device.

4. The heater device according to claim 2, characterized in that One of the first component and the second component includes a signal transmitting portion and a signal receiving portion, and the other of the first component and the second component is a signal reflecting portion.

5. The heater device according to claim 1, wherein The heater is connected to the balancing plate via a fixed connection piece.

6. The heater device according to claim 1, wherein The heater device comprises at least two adjusting components, and the connection points between different adjusting components and the balancing board point to different directions of the center of the balancing board.

7. The heater device according to claim 1 or 6, characterized in that The adjustment assembly includes two adjustment parts, the fixing part is a bolt, and the adjustment part is a nut. The bolt penetrates the balance plate along the thickness direction of the balance plate. The two nuts are respectively located on opposite sides of the balance plate, and the nuts are screwed on the outer ring of the bolt.

8. The heater device according to claim 7, characterized in that The position detection sensor includes a first component and a second component, the first component is disposed on the fixing portion, and the second component is disposed on at least one of the adjusting portions.

9. The heater device according to claim 1, wherein The side surface of the fixing portion contacting the adjusting portion has a scale, and the horizontal state of the heater is determined according to the value indicated by the adjusting portion on the scale.

10. A deposition device, characterized in that: The invention comprises a heater device as claimed in any one of claims 1 to 9.

Images