Surface defect detection device for electron microscope

Abstract

The utility model discloses a surface defect detection device for an electron microscope. The surface defect detection device comprises a conveyor belt I; the two smearing rollers are symmetrically arranged up and down, and the two smearing rollers are located at the output end of the first conveying belt; the second conveying belt is located at the output ends of the two smearing rollers; the number of the wiping rollers is two, the wiping rollers are vertically symmetrical, and the two wiping rollers are located at the output end of the second conveying belt; the bearing table is located at the output ends of the two wiping rollers; a mounting hole is formed in the bearing table, and the transparent part is mounted in the mounting hole. The lens surface defect detection device is provided with the first conveying belt, the smearing roller, the second conveying belt and the wiping roller which are matched with one another, so that whether defects exist on the surface of a lens or not can be simply, conveniently and quickly judged, the detection efficiency is improved in the detection process, and the detection result is relatively accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of electron microscope detection, in particular to an electron microscope surface defect detection device. Background Art

[0002] Electron microscopes are advanced microscopes that use electron beams instead of light to observe the microscopic structure of a sample. Compared to traditional optical microscopes, electron microscopes have higher resolution and magnification, and can observe smaller details and structures.

[0003] When using an electron microscope, the surface quality of the eyepiece lens is crucial to obtaining clear microscopic images. Therefore, before use, it is necessary to check the surface of the eyepiece lens to ensure that there are no obvious defects or dirt on the surface to avoid affecting the observation results. Utility Model Content

[0004] The utility model aims at solving the problems existing in the prior art and proposes the following technical solutions:

[0005] Electron microscope surface defect detection device, comprising:

[0006] Conveyor belt 1;

[0007] A coating roller, wherein two coating rollers are provided and are symmetrical up and down, and the two coating rollers are located at the output end of the conveyor belt 1;

[0008] Conveyor belt 2, said conveyor belt 2 being located at the output end of the two coating rollers;

[0009] Wiping rollers, wherein two wiping rollers are provided and are symmetrical up and down, and the two wiping rollers are located at the output end of the conveyor belt 2;

[0010] A receiving platform, which is located at the output ends of the two wiping rollers;

[0011] A transparent part, wherein a mounting hole is provided on the receiving platform, and the transparent part is installed in the mounting hole.

[0012] As a preferred embodiment of the above technical solution, an observation mirror is provided on the upper extension line of the transparent member.

[0013] As a preferred embodiment of the above technical solution, a fill light is provided on the extension line below the transparent member.

[0014] As a preferred embodiment of the above technical solution, a telescopic part is symmetrically installed on the top of the receiving platform corresponding to one side of the wiping roller, a push plate is installed on the output end of the telescopic part, and the push plate faces the direction of the transparent part, and a guide groove is symmetrically inclined on the side surface of the other side of the receiving platform, and the direction of the telescopic part is parallel to and coincides with the direction of the guide groove.

[0015] As a preferred embodiment of the above technical solution, nozzles are evenly and horizontally arranged on the outside of one side of the conveyor belt.

[0016] As a preferred embodiment of the above technical solution, grooves are evenly formed on the two surfaces of the conveyor belt, and the grooves match the nozzles.

[0017] As a preferred embodiment of the above technical solution, the top of the conveyor belt 1 is flush with the top of the lowest smear roller, and the top of the conveyor belt 2 is flush with the tops of the lowest smear roller and the lowest wiping roller.

[0018] As a preferred embodiment of the above technical solution, connecting plates are provided between the conveyor belt 1 and the lowest smear roller, between the conveyor belt 2 and the lowest smear roller, and between the conveyor belt 2 and the lowest wiping roller.

[0019] The beneficial effects of the utility model are:

[0020] The utility model is provided with a conveyor belt 1, a smear roller, a conveyor belt 2 and a wiping roller, through which they cooperate with each other, it is possible to simply, conveniently and quickly determine whether there are defects on the surface of the lens, such a detection process improves the detection efficiency, and the detection result is also more accurate;

[0021] The utility model is provided with a nozzle and a groove, and through the cooperation of the nozzles, most of the powder on the upper and lower surfaces of the lens can be blown off, so that the lens can be wiped more cleanly when entering the wiping roller for wiping, thereby improving the detection effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 It is a partial structural schematic diagram of the utility model;

[0024] Figure 3 It is a schematic diagram of the structure between the conveyor belt and the roller.

[0025] In the figure:

[0026] 1. Conveyor belt 1; 2. Coating roller; 3. Conveyor belt 2; 31. Groove; 4. Wiping roller; 5. Receiving platform; 51. Transparent part; 6. Nozzle; 7. Fill light; 8. Observation mirror; 9. Telescopic part; 91. Push plate; 10. Guide groove; 11. Connecting plate. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solution of the present utility model will be clearly and completely described below in conjunction with the embodiments.

[0028] Example

[0029] like Figure 1-2 As shown;

[0030] The device for detecting surface defects of an electron microscope comprises a conveyor belt 1, which is connected to an external driving mechanism; a coating roller 2 is symmetrically arranged on one side corresponding to the output end of the conveyor belt 1, and the two coating rollers 2 are connected to the external driving mechanism, wherein the surfaces of the coating rollers 2 are coated with powder, and the two coating rollers 2 can coat the surface of the lens with powder, thereby facilitating the subsequent detection of surface defects of the lens; a conveyor belt 2 3 is arranged on one side corresponding to the output end of the two coating rollers 2, and the conveyor belt 2 3 is connected to the external driving mechanism; a wiping roller 4 is symmetrically arranged on one side corresponding to the output end of the conveyor belt 2 3, and the two wiping rollers 4 are connected to the external driving mechanism, wherein the wiping roller 4 can wipe the lens after rotating. The powder on the surface of the lens is wiped off. If there are defects on the lens surface, such as scratches, bubbles, etc., the powder will still adhere to the corresponding position, so as to facilitate the judgment of whether the lens surface has defects. At the same time, the wiping roller 4 can wipe off the dirt on the lens surface, effectively preventing these dirt from affecting the final detection result; the output end of the two wiping rollers 4 corresponds to one side with a receiving platform 5, the receiving platform 5 is connected to the external mounting frame, the receiving platform 5 is used to receive the wiped lens, and whether the lens surface has defects is detected on the receiving platform 5; wherein the above-mentioned driving mechanism matches the corresponding structure, that is, a mechanism that can drive the conveyor belt to operate, a mechanism that can drive the roller to rotate, etc., such as a motor;

[0031] Furthermore, a mounting hole is provided on the receiving platform 5, and a transparent member 51 is installed in the mounting hole. The transparent member 51 can be transparent glass, so that it is convenient to check whether there is powder on the surface of the lens through the transparent member 51, thereby judging whether there is a defect on the surface of the lens, and improving the detection efficiency;

[0032] Furthermore, an observation mirror 8 is provided on the upper extension line of the transparent member 51. The observation mirror 8 can be a common microscope or a magnifying glass. The surface of the lens can be viewed more clearly through the observation mirror 8, so that the detection result can be obtained more accurately.

[0033] Furthermore, a fill light 7 is provided on the extension line below the transparent member 51, and the fill light 7 fills light on the lens through the transparent member 51, so that the condition of the lens surface can be viewed more clearly, thereby improving the detection efficiency;

[0034] When in use, the lens to be tested is placed on the conveyor belt 1, and is conveyed between two coating rollers 2 via the conveyor belt 1. The surface of the lens passing through the coating roller 2 is coated with powder. The lens coated with powder is transported to the conveyor belt 2 3, and then conveyed between two wiping rollers 4 via the conveyor belt 2 3. The powder on the surface of the lens passing through the wiping roller 4 is wiped off. Finally, the transparent part 51 on the conveyor belt receiving platform 5 is illuminated by the fill light 7, and the surface of the lens is observed through the observation mirror 8. If there is still powder on the surface of the lens, it means that there is a defect on the surface of the lens. If there is no powder, it means that there is no defect on the surface of the lens and it can be used normally. Such a detection process improves the detection efficiency and the detection result is also more accurate.

[0035] like Figure 2 As shown;

[0036] A telescopic member 9 is symmetrically installed on one side of the receiving platform 5 corresponding to the wiping roller 4 on the top of the receiving platform 5. The telescopic member 9 can be a cylinder. A push plate 91 is installed on the output end of the telescopic member 9, and the push plate 91 faces the direction of the transparent member 51. The side surface of the other side of the receiving platform 5 is symmetrically inclined with a guide groove 10. The direction of the telescopic member 9 is parallel to and coincides with the direction of the guide groove 10, wherein the two guide grooves 10 face different receiving platforms, one is an unqualified receiving platform, and the other is a qualified receiving platform. When the lens after inspection is unqualified, the telescopic member 9 at the corresponding position will extend, and the lens will be pushed into the guide groove 10 in the same direction through the push plate 91, and moved to the unqualified receiving platform. When the lens after inspection is qualified, the telescopic member 9 relative to the above-mentioned telescopic member 9 will extend, and the lens will be pushed into the guide groove 10 in the same direction through the corresponding push plate 91, and moved to the qualified receiving platform, which is convenient for classified storage of qualified lenses and unqualified lenses.

[0037] like Figure 2 As shown;

[0038] The outside of one side of the conveyor belt 23 is evenly and horizontally provided with nozzles 6, which are pneumatic and connected to an external air supply device. The surface of the conveyor belt 23 is evenly provided with grooves 31, which match the nozzles 6. When the lens coated with powder moves on the conveyor belt 23, the nozzles 6 can be used to blow off most of the powder on the upper and lower surfaces of the lens, so that the lens can be wiped more cleanly when it enters the wiping roller 4 for wiping, thereby improving the detection effect.

[0039] like Figure 1 and Figure 3 As shown;

[0040] The top of the conveyor belt 1 is flush with the top of the lowest smear roller 2, and the top of the conveyor belt 2 3 is flush with the top of the lowest smear roller 2 and the top of the lowest wiping roller 4, so as to ensure that the lens moves more smoothly and the detection process is smooth;

[0041] Furthermore, a connecting plate 11 is provided between the conveyor belt 1 and the bottom smear roller 2, between the conveyor belt 2 3 and the bottom smear roller 2, and between the conveyor belt 2 3 and the bottom wiping roller 4. The connecting plate 11 can ensure that the lens can smoothly enter between the two smear rollers 2 or the two wiping rollers 4, and can also smoothly move out from the two smear rollers 2 or the two wiping rollers 4, further ensuring a smooth detection process. The above embodiments are only used to illustrate the technical solution of the utility model, but not to limit it.

Claims

1. An electron microscope surface defect detection device, characterized in that: include: Conveyor belt one (1); A coating roller (2), wherein two coating rollers (2) are provided and are symmetrical in upper and lower directions, and the two coating rollers (2) are located at the output end of the conveyor belt (1); Conveyor belt 2 (3), said conveyor belt 2 (3) being located at the output end of the two smear rollers (2); Wiping rollers (4), wherein two wiping rollers (4) are provided and are symmetrical in upper and lower directions, and the two wiping rollers (4) are located at the output end of the conveyor belt 2 (3); A receiving platform (5), wherein the receiving platform (5) is located at the output ends of the two wiping rollers (4); A transparent member (51), wherein a mounting hole is provided on the receiving platform (5), and the transparent member (51) is installed in the mounting hole.

2. The electron microscope surface defect detection device according to claim 1, characterized in that: An observation mirror (8) is provided on the upper extension line of the transparent member (51).

3. The electron microscope surface defect detection device according to claim 2, characterized in that: A fill light (7) is provided on the extension line below the transparent member (51).

4. The electron microscope surface defect detection device according to claim 3, characterized in that: A telescopic member (9) is symmetrically mounted on one side of the top of the receiving platform (5) corresponding to the wiping roller (4); a push plate (91) is mounted on the output end of the telescopic member (9), and the push plate (91) faces the direction of the transparent member (51); a guide groove (10) is symmetrically inclined on the side surface of the other side of the receiving platform (5); the direction of the telescopic member (9) is parallel to and coincides with the direction of the guide groove (10).

5. The electron microscope surface defect detection device according to claim 1, characterized in that: The outside of one side of the second conveyor belt (3) is evenly and horizontally provided with nozzles (6).

6. The electron microscope surface defect detection device according to claim 5, characterized in that: The surface of the conveyor belt (3) is evenly provided with grooves (31), and the grooves (31) match the nozzles (6).

7. The electron microscope surface defect detection device according to claim 1, characterized in that: The top of the conveyor belt 1 (1) is flush with the top of the lowest smear roller (2), and the top of the conveyor belt 2 (3) is flush with the top of the lowest smear roller (2) and the top of the lowest wiping roller (4).

8. The electron microscope surface defect detection device according to claim 7, characterized in that: A connecting plate (11) is provided between the conveyor belt 1 (1) and the bottom smear roller (2), between the conveyor belt 2 (3) and the bottom smear roller (2), and between the conveyor belt 2 (3) and the bottom wiping roller (4).

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