Thermal field structure and single crystal furnace

Abstract

The utility model provides a thermal field structure and a single crystal furnace, and relates to the technical field of crystal preparation equipment. The thermal field structure comprises a base, a first separator, a heat preservation cylinder, a first heater and a crucible; the first separator is arranged on the base; the insulating cylinder is arranged at one end of the first separator away from the base; the first heater is arranged in the heat preservation cylinder; one end of the first heater away from the base has a heating part; the crucible is arranged in the first heater and corresponds to the heating part. The single crystal furnace comprises a thermal field structure. According to the thermal field structure, sparking caused by the fact that the distance between the first heater and the heat preservation barrel is too close or material blocking occurs between the first heater and the heat preservation barrel can be reduced.

Description

Technical Field

[0001] The present application relates to the technical field of crystal preparation equipment, and in particular to a thermal field structure and a single crystal furnace. Background Art

[0002] The thermal field is the core component of the single crystal furnace. At present, since the single crystal furnace adopts a continuous re-feeding crystal pulling process to prepare crystals, multiple re-feeding is required during the production process; during the feeding process, the material may splash out of the crucible and get stuck between the insulation tube and the heater, causing the heater and the insulation tube to ignite; on the other hand, when the distance between the heater and the insulation tube is too close, it will also cause the heater and the insulation tube to ignite. The ignition between the heater and the insulation tube will not only affect the efficiency of the melt, but also easily lead to production accidents such as furnace stewing or silicon leakage. Utility Model Content

[0003] In order to overcome the deficiencies in the prior art, the present application provides a thermal field structure and a single crystal furnace.

[0004] This application provides the following technical solutions:

[0005] In a first aspect, the present application provides a thermal field structure, comprising:

[0006] Base;

[0007] A first isolation member, disposed on the base;

[0008] A heat preservation tube, arranged at one end of the first isolating member away from the base;

[0009] A first heater is disposed in the heat preservation tube; the first heater has a heating portion at one end away from the base;

[0010] The crucible is disposed in the first heater and corresponds to the heating part.

[0011] In a possible implementation manner, a mounting groove is formed at one end of the first isolating member away from the base; and one end of the heat preservation tube is disposed in the mounting groove.

[0012] In a possible implementation, the heat-insulating cylinder includes a first cylinder body and a second cylinder body that are detachably connected; an end of the first cylinder body away from the second cylinder body is arranged in the installation groove; and the second cylinder body corresponds to the heating part.

[0013] In a possible implementation, the heat preservation cylinder further includes a third cylinder and a connecting piece; one end of the connecting piece is connected to an end of the second cylinder away from the first cylinder; and an end of the connecting piece away from the second cylinder is connected to the third cylinder.

[0014] In a possible implementation manner, the diameter of the third cylinder is smaller than the diameter of the second cylinder.

[0015] In a possible implementation manner, the thermal field structure further includes:

[0016] a second heater, disposed in the first heater;

[0017] A tow rod, wherein the first end of the tow rod is inserted through the base and the second heater; the first end is rotatably matched with the base and the second heater respectively;

[0018] A crucible support connected to the first end;

[0019] A crucible bang, one end of which is connected to an end of the crucible support away from the drag rod, and the interior of the crucible bang is used to carry the crucible; the crucible bang corresponds to the heating part.

[0020] In a possible implementation manner, the thermal field structure further includes a second isolation member, and the second isolation member is disposed between the crucible support and the first end.

[0021] In a possible implementation manner, a fixing groove is formed at one end of the second isolating member away from the drag rod; a protrusion is formed at one end of the crucible support away from the crucible; and the protrusion is disposed in the fixing groove.

[0022] In a possible implementation manner, a fixing hole is formed at one end of the second isolating member away from the crucible support, and a fixing block is formed on the first end; the fixing block is disposed in the fixing hole.

[0023] In a second aspect, the present application also provides a single crystal furnace, comprising the above-mentioned thermal field structure.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The thermal field structure provided in the present application, by arranging a first isolation piece between the insulation tube and the base to insulate the insulation tube from the base, effectively reduces the sparking phenomenon caused by the first heater being too close to the insulation tube, or the material being stuck between the first heater and the insulation tube, thereby ensuring the power stability of the first heater when it is working, improving the melting efficiency, and preventing the occurrence of production accidents.

[0026] In order to make the above-mentioned objects, features and advantages of the present application more obvious and understandable, preferred embodiments are given below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 An internal schematic diagram of a thermal field structure according to an embodiment of the present application is shown;

[0029] Figure 2 A schematic diagram of a first isolation member according to an embodiment of the present application is shown;

[0030] Figure 3 A schematic diagram of a second isolation member according to an embodiment of the present application is shown.

[0031] Description of main component symbols:

[0032] 100-thermal field structure; 110-insulation cylinder; 111-first cylinder; 112-second cylinder; 113-third cylinder; 114-connecting piece; 120-base; 130-first isolating piece; 131-installing groove; 140-first heater; 150-crucible; 151-crumb support; 152-crumb support; 160-second isolating piece; 161-fixing groove; 162-fixing hole; 170-drag rod; 171-sheath; 180-second heater; 190-electrode. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0036] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] Embodiment 1

[0039] See also Figures 1 to 3 In one embodiment of the present application, a thermal field structure 100 is provided. The thermal field structure 100 can generate a high temperature environment to melt, purify and crystallize materials at high temperatures.

[0040] See also Figure 1 The thermal field structure 100 includes a base 120, a first isolation member 130, a heat preservation tube 110, a first heater 140 and a crucible 150; the first isolation member 130 is arranged between the base 120 and the heat preservation tube 110; the first heater 140 is arranged in the heat preservation tube 110; the first heater 140 has a heating part at one end away from the base 120; the crucible 150 is arranged in the first heater 140 and corresponds to the heating part.

[0041] The crucible 150 is used to hold materials. The heating part on the first heater 140 can dissipate heat in the heat preservation tube 110 to melt the materials in the crucible 150 and ensure that the heat preservation tube 110 has a high temperature to meet the growth requirements of the crystal. The heat preservation tube 110 is used to reduce heat loss. The first isolation member 130 is used to insulate and isolate the heat preservation tube 110 from the base 120.

[0042] At present, since the base, insulation tube and heater in the existing thermal field are all made of conductive materials, and the base is grounded when working; therefore, when the distance between the heater and the insulation tube is too close, or material is stuck between the heater and the insulation tube, sparks will occur between the heater and the insulation tube, causing heater power fluctuations or abnormalities, affecting the melting efficiency; when the spark phenomenon is serious, it will also cause production accidents such as furnace stewing or silicon leakage.

[0043] The thermal field structure 100 provided in this embodiment is provided with the first isolating member 130 between the insulation tube 110 and the base 120 to insulate and isolate the insulation tube 110 from the base 120, thereby effectively reducing the sparking phenomenon caused by the first heater 140 being too close to the insulation tube 110 or the material being stuck between the first heater 140 and the insulation tube 110, thereby ensuring the power stability of the first heater 140 when it is working, improving the melting efficiency and preventing the occurrence of production accidents.

[0044] In some embodiments, see Figure 1 and Figure 2 The first isolating member 130 is disposed on the base 120 ; a mounting groove 131 is formed at one end of the first isolating member 130 away from the base 120 ; one end of the thermal insulation tube 110 is disposed in the mounting groove 131 so that the thermal insulation tube 110 is connected to the first isolating member 130 .

[0045] In some embodiments, the shape of the insulation cylinder 110 is roughly cylindrical; the installation groove 131 is an annular groove, and the shape of the installation groove 131 is adapted to the shape of one end of the insulation cylinder 110 close to the first isolation piece 130, so as to facilitate the connection between the insulation cylinder 110 and the first isolation piece 130.

[0046] Exemplarily, a slot is formed at one end of the base 120 close to the heat-insulating cylinder 110 , and one end of the first isolating member 130 away from the heat-insulating cylinder 110 is snapped into the slot, so that the first isolating member 130 is fixed to the base 120 .

[0047] In some embodiments, the first isolation member 130 is an integral structure; in other embodiments, the first isolation member 130 is composed of a plurality of separate parts, so that a damaged separate part can be replaced separately.

[0048] For example, see Figure 2 The first isolation member 130 is composed of two symmetrical parts.

[0049] In some embodiments, the heat preservation tube 110, the base 120 and the first heater 140 are all made of graphite material. However, it is not limited thereto, and it is understandable that in other embodiments, the heat preservation tube 110, the base 120 and the first heater 140 are all made of carbon-carbon composite material.

[0050] In some embodiments, the heat preservation cylinder 110 includes a first cylinder body 111 and a second cylinder body 112 that are detachably connected; one end of the first cylinder body 111 away from the second cylinder body 112 is arranged in the installation groove 131; and the second cylinder body 112 corresponds to the heating part.

[0051] The first cylinder 111 and the second cylinder 112 are detachably connected to facilitate replacement of damaged parts, thereby effectively reducing production costs.

[0052] Exemplarily, the first cylinder 111 and the second cylinder 112 are connected via a mortise and tenon structure.

[0053] In some embodiments, the diameter of the first cylinder 111 is the same as the diameter of the second cylinder 112 ; the length of the first cylinder 111 in the axial direction is smaller than the length of the second cylinder 112 in the axial direction.

[0054] One side of the heating part corresponds to the second cylinder 112, and the other side corresponds to the crucible 150. The heat dissipated by the heating part can cause the material in the crucible 150 to melt.

[0055] When feeding materials into the crucible 150 , the materials may splash between the second cylinder 112 and the first heater 140 . By insulating and isolating the first cylinder 111 from the base 120 , sparking caused by material jamming between the second cylinder 112 and the first heater 140 can be reduced.

[0056] In some embodiments, the thermal insulation cylinder 110 further includes a third cylinder 113 and a connector 114; one end of the connector 114 is connected to an end of the second cylinder 112 away from the first cylinder 111; and one end of the connector 114 away from the second cylinder 112 is connected to the third cylinder 113.

[0057] Furthermore, the diameter of the third cylinder 113 is smaller than the diameter of the second cylinder 112 , so that the opening of the end of the insulation cylinder 110 away from the base 120 is reduced, thereby preventing heat leakage inside the insulation cylinder 110 and effectively ensuring the temperature gradient inside the insulation cylinder 110 .

[0058] In another embodiment, a supporting assembly is disposed at the bottom of the crucible 150 , and the supporting assembly is used to support the crucible 150 and drive the crucible 150 to move up and down in the first heater 140 .

[0059] See also Figure 1 The supporting assembly includes a drag rod 170, a crucible support 152 and a crucible bond 151; the first end of the drag rod 170 is passed through the base 120 and extends into the first heater 140; the crucible support 152 is connected to the first end; one end of the crucible bond 151 is connected to an end of the crucible support 152 away from the drag rod 170; the crucible bond 151 corresponds to the heating portion.

[0060] The crucible 150 is supported inside the crucible 151. The first end of the pull rod 170 is connected to the crucible 151 through the crucible support 152. The pull rod 170 is used to drive the crucible 151 to move up and down in the first heater 140, so that the crucible 150 is driven by the crucible 151 to move.

[0061] In some embodiments, a protrusion is provided at one end of the crucible 151, and a groove corresponding to the protrusion is provided at the end of the crucible support 152 away from the drag rod 170; the protrusion is arranged in the groove to connect the crucible 151 with the crucible support 152.

[0062] In some embodiments, the thermal field structure 100 further includes a second heater 180; the second heater 180 is disposed in the first heater 140 and between the first heater 140 and the crucible support 152. The second heater 180 can increase the temperature in the first heater 140 to ensure the temperature gradient of the thermal field structure 100.

[0063] The temperature near the second heater 180 gradually decreases toward the temperature near the first heater 140 .

[0064] In some embodiments, a plurality of electrodes 190 are disposed on the base 120 , and an end of the first heater 140 away from the heating portion and the second heater 180 are electrically connected to corresponding electrodes 190 , respectively.

[0065] The thermal field structure 100 further includes a second isolating member 160 , which is disposed between the crucible support 152 and the first end. The second isolating member 160 is used to isolate the crucible support 152 from the first end of the towing rod 170 .

[0066] At present, the heater, crucible, crucible support and towing rod of the existing hot field are made of conductive materials. Therefore, when the crucible is stuck between the crucible and the heater, or the crucible is moved too close to the heater, sparks may occur between the crucible and the heater.

[0067] The thermal field structure 100 of this embodiment can effectively prevent sparks from occurring between the crucible 151 and the first heater 140 by disposing the second isolation member 160 between the crucible support 152 and the first end.

[0068] In some embodiments, see Figure 1 and Figure 3 A fixing groove 161 is formed at one end of the second isolating member 160 away from the drag rod 170 ; a protrusion is formed at one end of the crucible support 152 away from the crucible bond 151 ; the protrusion is arranged in the fixing groove 161 to connect the crucible bond 151 with the second isolating member 160 .

[0069] In some embodiments, please refer to Figure 1 and Figure 3 A fixing hole 162 is formed at one end of the second isolating member 160 away from the crucible support 152 , and a fixing block is formed on the first end; the fixing block is disposed in the fixing hole 162 so that the first end of the drag rod 170 is connected to the second isolating member 160 .

[0070] Furthermore, the fixing hole 162 is communicated with the fixing groove 161 .

[0071] See also Figure 1 The first end of the drag rod 170 passes through the base 120 and the second heater 180 , and the first end is rotatably matched with the base 120 and the second heater 180 , so that the drag rod 170 can indirectly drive the crucible 150 to rotate.

[0072] The thermal field structure 100 further includes a sheath 171. The sheath 171 is disposed on a side of the base 120 away from the first heater 140, and the tow rod 170 is inserted into the sheath 171. The sheath 171 is used to prevent the tow rod 170 from breaking due to collision impact.

[0073] Embodiment 2

[0074] The present application also provides a single crystal furnace, comprising the thermal field structure 100 of any of the above embodiments.

[0075] The single crystal furnace is used to prepare crystals.

[0076] In some embodiments, the single crystal furnace is capable of producing single crystal silicon by a Czochralski method.

[0077] The single crystal furnace provided in this embodiment has the thermal field structure 100 provided in any of the above embodiments, and therefore has all the beneficial effects of the thermal field structure 100 provided in any of the above embodiments, which will not be described in detail here.

[0078] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0079] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A thermal field structure, characterized in that: include: Base; A first isolation member, disposed on the base; A heat preservation tube, arranged at one end of the first isolating member away from the base; A first heater is disposed in the heat preservation cylinder; The first heater has a heating portion at one end away from the base; The crucible is disposed in the first heater and corresponds to the heating part.

2. The thermal field structure according to claim 1, characterized in that: An installation groove is formed at one end of the first isolating member away from the base; one end of the heat preservation tube is arranged in the installation groove.

3. The thermal field structure according to claim 2, characterized in that: The heat preservation cylinder comprises a first cylinder body and a second cylinder body which are detachably connected; one end of the first cylinder body away from the second cylinder body is arranged in the installation groove; and the second cylinder body corresponds to the heating part.

4. The thermal field structure according to claim 3, characterized in that: The heat preservation cylinder also includes a third cylinder and a connecting piece; one end of the connecting piece is connected to an end of the second cylinder away from the first cylinder; and one end of the connecting piece away from the second cylinder is connected to the third cylinder.

5. The thermal field structure according to claim 4, characterized in that: The diameter of the third cylinder is smaller than the diameter of the second cylinder.

6. The thermal field structure according to any one of claims 1 to 5, characterized in that: The thermal field structure also includes: a second heater, disposed in the first heater; A tow rod, wherein the first end of the tow rod is inserted through the base and the second heater; the first end is rotatably matched with the base and the second heater respectively; A crucible support connected to the first end; A crucible bang, one end of which is connected to an end of the crucible support away from the drag rod, and the interior of the crucible bang is used to carry the crucible; the crucible bang corresponds to the heating part.

7. The thermal field structure according to claim 6, characterized in that: The thermal field structure further includes a second isolating member, and the second isolating member is disposed between the crucible support and the first end.

8. The thermal field structure according to claim 7, characterized in that: A fixing groove is formed at one end of the second isolating member away from the drag rod; a convex block is formed at one end of the crucible support away from the crucible; and the convex block is arranged in the fixing groove.

9. The thermal field structure according to claim 7, characterized in that: A fixing hole is formed at one end of the second isolating member away from the crucible support, and a fixing block is formed on the first end; the fixing block is arranged in the fixing hole.

10. A single crystal furnace, characterized in that: The thermal field structure comprises any one of claims 1 to 9.

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