High-purity phosphine storage tank

Abstract

The utility model belongs to the field of semiconductor manufacturing, and particularly relates to a high-purity phosphine storage tank which comprises a tank body and a connector, an induction box is installed on the connector in a sealed mode, a filling agent cavity is formed in the induction box, gas adsorbents are filled in the filling agent cavity, and vent holes are formed in the bottom of the filling agent cavity in a clamped mode. A gas sensor is installed at the end, close to the opening direction of the filling agent cavity, in the induction box and connected with the gate valve. If gas leakage occurs at the connector and leaked phosphine gas diffuses into the induction box, when the gas sensor on the opening of the filling agent cavity detects the phosphine gas in the induction box, the gas sensor controls the gate valve to be closed, and at the moment, the phosphine gas can be prevented from continuously leaking; the leaked phosphine gas in the induction box is adsorbed by the gas adsorbent in the filling agent cavity, and the rest of harmless gas is discharged through the vent hole, so that the leaked phosphine gas can be effectively prevented from threatening the body health of workers.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor manufacturing, and in particular relates to a high-purity phosphine storage tank. Background Art

[0002] Phosphine is widely used in the field of semiconductor manufacturing, where high-purity phosphine is used as a dopant to introduce impurity atoms into silicon wafers to form N-type semiconductors. Phosphine is a colorless, highly toxic, and flammable liquefied compressed gas stored in cylinders, so the prepared phosphine gas needs to be transferred to a gas storage tank for storage.

[0003] After phosphine is prepared from the synthesis reactor, the phosphine gas is concentrated and poured into the designated gas storage tank for storage to prevent the colorless phosphine from leaking into the air and causing harm to the surrounding environment and personnel. Since the pipeline and the storage tank are connected by a seal, in actual use, the connection head between the pipeline and the storage tank is prone to leakage. If the gas leaks, the leakage of the colorless phosphine gas is not easy to be found, and the leakage cannot be found in time when the pressure gauge and capacity gauge index decrease, resulting in the slow leakage of phosphine gas in the air. After the staff inhales the air containing phosphine, it will cause harm to the body. Utility Model Content

[0004] The utility model aims to solve the technical problem of phosphine gas leakage in the prior art by providing a high-purity phosphine storage tank with a simple structure and capable of processing leaked phosphine in view of the deficiencies of the prior art.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A high-purity phosphine storage tank comprises a tank body and a connector, wherein a sensing box is sealedly installed on the connector, a filling cavity is provided in the sensing box, a gas adsorbent is filled in the filling cavity, a vent is provided on the filling cavity, a gas sensor is installed at one end of the sensing box close to the opening direction of the filling cavity, and the gas sensor is connected to a gate valve.

[0007] As a further optimization or improvement of the present solution, a partition plate is installed in the induction box, the partition plate divides the induction box into a liquid storage chamber and a leakage chamber, the partition plate is connected to the induction box via a partition membrane, and the adsorption liquid is injected into the liquid storage chamber.

[0008] As a further optimization or improvement of this solution, a sealing gasket is installed on the connector, the bottom of the induction box is connected to the connector via a thread, the sealing gasket is squeezed by the bottom of the induction box, and the top of the induction box is connected to the connector via a locking hoop.

[0009] As a further optimization or improvement of this solution, the gas adsorbent is activated carbon or silica gel, or may be a composite metal oxide adsorbent.

[0010] As a further optimization or improvement of this solution, the adsorption liquid is an alkaline solution or a polar base, and can also be a hypophosphite solution or an organic solvent.

[0011] As a further optimization or improvement of this solution, a fixing frame for supporting the tank body is installed at the bottom of the tank body.

[0012] As a further optimization or improvement of this solution, the separation membrane is a gas selective permeable membrane.

[0013] Beneficial effects of the utility model:

[0014] (1) In this scheme, if gas leakage occurs at the connector, since the induction box is sealed and installed at the connector, the leaked phosphine gas diffuses into the induction box. When the gas sensor on the opening of the filling chamber detects the phosphine gas leaking from the induction box, the gas sensor controls the gate valve to close, thereby preventing the phosphine gas from continuing to leak. The phosphine gas leaking from the induction box is adsorbed by the gas adsorbent in the filling chamber, and the remaining harmless gas is discharged through the vent hole, thereby effectively preventing the leaked phosphine gas from polluting the environment and threatening the health of the workers.

[0015] (2) In this scheme, if a gas leak occurs at the connector, the leaked phosphine gas will first enter the leakage chamber. Since phosphine gas is heavier than air, the phosphine gas is deposited at the bottom of the leakage chamber. At this time, the phosphine gas enters the liquid storage chamber through the partition membrane at the bottom of the sensing box. The phosphine gas generates bubbles through the adsorption liquid. The staff can observe the leakage status of the phosphine gas by observing the intensity of the bubble generation. At the same time, after the phosphine gas enters the adsorption liquid, the adsorption liquid will react chemically with the phosphine gas, thereby preventing the phosphine gas from diffusing outside the sensing box.

[0016] (3) In this scheme, a red suspended ball can be placed on the adsorption liquid. When the leaking gas passes through the adsorption liquid to generate bubbles, the bubbles will lift up the red suspended ball, making it easier for the staff to observe the status of the gas leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings.

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0019] Figure 2 This is the assembly diagram of the connector and the induction box.

[0020] Figure 3This is an enlarged view of the structure of the connector and the induction box.

[0021] Figure 4 It is a structural cross-sectional view of the induction box.

[0022] Figure 5 This is a schematic diagram of the working status of the induction box.

[0023] The following are marked in the figure: 1. tank body; 2. fixing frame; 3. connecting head; 4. induction box; 5. locking hoop; 6. vent hole; 7. liquid storage chamber; 8. sealing gasket; 9. partition plate; 10. partition membrane; 11. leakage chamber; 12. gas sensor; 13. adsorption liquid; 14. gas adsorbent; 15. filling chamber. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-Figure 5 A high-purity phosphine storage tank includes a tank body 1 and a connector 3, a sensing box 4 is sealed and installed on the connector 3, a filling cavity 15 is opened in the sensing box 4, the filling cavity 15 is filled with a gas adsorbent 14, a vent 6 is opened on the filling cavity 15, a gas sensor 12 is installed at one end of the sensing box 4 close to the opening direction of the filling cavity 15, and the gas sensor 12 is connected to a gate valve.

[0026] It should be noted that the output end of the synthesis kettle is connected to the connector 3 on the tank body 1 through a pipeline, so that the phosphine gas synthesized in the synthesis kettle can be timely transported to the tank body 1 for storage through the pipeline; a gate valve is installed on the pipeline for transporting phosphine gas from the synthesis kettle to the tank body 1, wherein the gate valve and the gas sensor 12 are connected through an external controller, and when the gas sensor 12 detects a gas leak, the gas sensor 12 controls the gate valve to close through the external controller, thereby blocking the transportation of phosphine gas from the synthesis kettle to the tank body 1, and timely avoiding the diffusion of phosphine gas, wherein the connection method and working principle of the gate valve, the gas sensor 12 and the external controller are all prior arts, and this scheme will not be repeated, and it does not affect the integrity of this scheme.

[0027] Specifically, the gas adsorbent 14 is activated carbon or silica gel, or a composite metal oxide adsorbent. It should be noted that the gas adsorbent 14 uses physical adsorption to treat the leaked phosphine gas, and the gas adsorbent 14 preferably uses a composite metal oxide adsorbent with good adsorption effect; when in use, if the connector 3 leaks, since the induction box 4 is sealed and installed near the connector 3, the leaked phosphine gas diffuses into the induction box 4, and when the gas sensor 12 on the opening of the filling cavity 15 detects the phosphine gas leaking from the induction box 4, the gas sensor 12 controls the gate valve to close, and the phosphine gas can be prevented from continuing to leak. The phosphine gas leaking from the induction box 4 is adsorbed by the gas adsorbent 14 in the filling cavity 15, and the remaining harmless gas is discharged through the vent 6, which can effectively prevent the leaked phosphine gas from polluting the environment and threatening the health of the staff.

[0028] See also Figure 4-Figure 5 A partition plate 9 is installed in the induction box 4 , and the partition plate 9 divides the induction box 4 into a liquid storage chamber 7 and a leakage chamber 11 . The partition plate 9 is connected to the induction box 4 via a partition membrane 10 , and an adsorption liquid 13 is injected into the liquid storage chamber 7 .

[0029] It should be noted that if the gas leaks from the connector 3, the leaked phosphine gas will first enter the leakage chamber 11. Since the phosphine gas is heavier than air, the phosphine gas is deposited at the bottom of the leakage chamber 11. At this time, the phosphine gas enters the liquid storage chamber 7 through the separation membrane 10 at the bottom of the sensing box 4. The phosphine gas generates bubbles through the adsorption liquid 13. The staff can observe the leakage state of the phosphine gas by observing the intensity of the bubbles. At the same time, after the phosphine gas enters the adsorption liquid 13, the adsorption liquid 13 will react chemically with the phosphine gas, thereby preventing the phosphine gas from diffusing outside the sensing box 4.

[0030] It should be noted that the outer wall of the induction box 4 is made of transparent material, which can clearly observe the intensity of the bubbles; under normal conditions, the leakage of phosphine gas is small. In actual use, a red suspension ball can be placed on the adsorption liquid 13. When the leaked gas generates bubbles through the adsorption liquid 13, the bubbles will lift up the red suspension ball, allowing the staff to more easily observe the status of the gas leakage.

[0031] Specifically, the separation membrane 10 is gas selectively permeable. It should be noted that the separation membrane 10 is a gas selective permeable membrane that allows phosphine gas to pass through but does not allow the adsorption liquid 13 to pass through. The separation membrane 10 can be made of materials such as polyvinylidene fluoride (PVDF) membrane and nanoporous ceramic membrane.

[0032] Specifically, the adsorption liquid 13 is an alkaline solution or a polar base, and may also be a hypophosphite solution or an organic solvent. It should be noted that the adsorption liquid 13 uses chemical adsorption to treat the leaked phosphine gas. This solution uses physical adsorption and chemical adsorption to adsorb the leaked phosphine gas, thereby enhancing the treatment of the phosphine gas.

[0033] See also Figure 3-Figure 5 A sealing gasket 8 is installed on the connector 3, the bottom of the induction box 4 is connected to the connector 3 through a thread, the sealing gasket 8 is squeezed by the bottom of the induction box 4, and the top of the induction box 4 is connected to the connector 3 through a locking hoop 5.

[0034] It should be noted that when installing the induction box 4, first put the induction box 4 on the connecting head 3, and connect it with the internal thread on the bottom of the induction box 4 through the external thread on the connecting head 3, so that the induction box 4 can achieve the sealing of the bottom of the induction box 4 by compressing the sealing gasket 8, and then tighten the bolts on the locking hoop 5 so that the top of the induction box 4 can be clamped on the connecting head 3, thereby achieving the top sealing of the induction box 4; by installing the bottom and top seals, the induction box 4 can be firmly fixed at the connecting head 3 to prevent the leaked phosphine gas from diffusing through the connection of the induction box 4.

[0035] Specifically, a fixing frame 2 for supporting the tank body 1 is installed at the bottom of the tank body 1 .

[0036] The implementation principle of the utility model is as follows: before the device is used, the induction box 4 is installed first, and the induction box 4 is first put on the connector 3, and the external thread on the connector 3 is connected with the internal thread at the bottom of the induction box 4, so that the induction box 4 can be sealed at the bottom of the induction box 4 by pressing the sealing gasket 8, and then the bolts on the locking hoop 5 are screwed so that the top of the induction box 4 can be clamped on the connector 3, thereby realizing the top sealing of the induction box 4. This solution can firmly fix the induction box 4 at the connector 3 by sealing the bottom and top of the induction box 4 respectively, so as to prevent the leaked phosphine gas from diffusing through the connection of the induction box 4;

[0037] When phosphine gas leaks, the leaked phosphine gas will first enter the leakage chamber 11. Since phosphine gas is heavier than air, the phosphine gas is deposited at the bottom of the leakage chamber 11. At this time, the phosphine gas enters the liquid storage chamber 7 through the separation membrane 10 at the bottom of the induction box 4. The phosphine gas generates bubbles through the adsorption liquid 13. The staff can observe the leakage state of the phosphine gas by observing the intensity of the bubbles. At the same time, after the phosphine gas enters the adsorption liquid 13, the adsorption liquid 13 will chemically adsorb the leaked phosphine gas.

[0038] As the phosphine gas leaks, the phosphine gas will overflow the leakage chamber 11. When the gas sensor 12 detects the phosphine gas, the gas sensor 12 controls the gate valve to close, thereby preventing the phosphine gas from continuing to leak. The phosphine gas overflowing the leakage chamber 11 is physically adsorbed by the gas adsorbent 14 in the filling chamber 15, and the remaining harmless gas is discharged through the vent 6. The phosphine gas is adsorbed twice by the adsorption liquid 13 and the gas adsorbent 14, thereby effectively preventing the leaked phosphine gas from polluting the environment and threatening the health of the workers.

[0039] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A high-purity phosphine storage tank, characterized in that: The invention comprises a tank body (1) and a connector (3); a sensing box (4) is sealedly mounted on the connector (3); a filling chamber (15) is provided in the sensing box (4); the filling chamber (15) is filled with a gas adsorbent (14); a vent hole (6) is provided in the filling chamber (15); a gas sensor (12) is mounted at one end of the sensing box (4) close to the opening direction of the filling chamber (15); and the gas sensor (12) is connected to a gate valve.

2. A high-purity phosphine storage tank according to claim 1, characterized in that: A partition plate (9) is installed in the sensing box (4), and the partition plate (9) divides the sensing box (4) into a liquid storage chamber (7) and a leakage chamber (11). The partition plate (9) is connected to the sensing box (4) via a partition membrane (10), and an adsorption liquid (13) is injected into the liquid storage chamber (7).

3. A high-purity phosphine storage tank according to claim 1, characterized in that: A sealing gasket (8) is installed on the connector (3), the bottom of the induction box (4) is connected to the connector (3) via a thread, the bottom of the induction box (4) squeezes the sealing gasket (8), and the top of the induction box (4) is connected to the connector (3) via a locking hoop (5).

4. A high-purity phosphine storage tank according to claim 1, characterized in that: The gas adsorbent (14) is activated carbon or silica gel, or may be a composite metal oxide adsorbent.

5. A high-purity phosphine storage tank according to claim 2, characterized in that: The adsorption liquid (13) is an alkaline solution or a polar base, and may also be a hypophosphite solution or an organic solvent.

6. A high-purity phosphine storage tank according to claim 1, characterized in that: A fixing frame (2) for supporting the tank body (1) is installed at the bottom of the tank body (1).

7. A high-purity phosphine storage tank according to claim 2, characterized in that: The separation membrane (10) is a gas selective permeable membrane.

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