Magnet assembly for water-cooled screen and water-cooled screen

Abstract

The utility model provides a magnet assembly for a water cooling screen and the water cooling screen. The magnet assembly comprises a permanent magnet which comprises a plurality of sub-magnets, and the plurality of sub-magnets are connected end to end and spliced into an annular structure; the permanent magnets are fixedly connected to the interior of the mounting structure, the sub-magnets are limited and fixed through the mounting structure, and the mounting structure is used for being connected with the water cooling screen body. According to the magnet assembly for the water cooling screen, an original integrated annular permanent magnet is improved into an annular structure formed by splicing a plurality of sub-magnets end to end. The size of each sub-magnet is smaller, the magnetic field intensity of each sub-magnet can be improved by utilizing more energy, and finally, the permanent magnet formed by splicing the sub-magnets is higher in strength, so that the heat convection of silicon liquid is effectively inhibited, and the quality of a crystal bar is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and in particular to a magnet assembly for a water cooling screen and a water cooling screen. Background Art

[0002] In the process of producing single crystal silicon rods by the direct pulling method, with the rapid development of the photovoltaic industry, the demand for high purity and high uniformity of single crystal silicon rods has gradually increased. In order to meet the quality of crystals in the production process of single crystal silicon rods, it is required to reduce crystal defects and impurity content in the growth of single crystal silicon and improve the uniformity of impurities such as oxygen and carbon.

[0003] At present, magnetron crystal pulling devices are usually used to pull crystals through the magnetron crystal pulling method. A magnetic field generating device is set in the single crystal furnace. The magnetic field generated by the magnetic field generating device passes through the silicon liquid in the crucible, so that the silicon liquid interacts with the magnetic field, thereby suppressing the thermal convection of the silicon liquid, thereby reducing the impact of uneven crystal pulling. However, currently most magnetron equipment is installed outside the single crystal furnace body, with a complex and large structure, requiring major modifications to the single crystal furnace and surrounding facilities, with a large amount of engineering work, a long cycle, and high production costs.

[0004] Water cooling screens are commonly used in existing Czochralski single crystal silicon growth equipment to cool down the crystal rods and increase the growth rate of the crystal rods. When in use, cooling water is introduced from the water inlet of the water cooling screen, flows through the water path inside the water cooling screen and is discharged from the water outlet of the water cooling screen, thereby taking away the heat. Due to the circulation of water cooling, the temperature inside the water cooling screen can always be kept low.

[0005] In some related technologies, an integrated annular permanent magnet is placed in a water-cooled screen to act on the silicon liquid when the crystal rod passes through the water-cooled screen, replacing the original magnetic control crystal pulling device to simplify the equipment structure. However, this method has created new problems. When an integrated annular permanent magnet is used, when the permanent magnet is large in size, the magnetic field strength is insufficient, and it is difficult to effectively suppress the thermal convection of the silicon liquid, thereby affecting the quality of the crystal rod. Utility Model Content

[0006] The utility model aims to at least solve the problem of the one-piece annular permanent magnet in the prior art that when the permanent magnet is large in size, the magnetic field strength is insufficient, and it is difficult to effectively suppress the thermal convection of the silicon liquid, thereby affecting the quality of the crystal rod. A magnet assembly and a water-cooled screen are proposed.

[0007] In order to achieve the purpose of the utility model, a magnet assembly for a water-cooled screen is provided, comprising: a permanent magnet, comprising a plurality of sub-magnets, wherein the plurality of sub-magnets are connected end to end and spliced ​​into a ring structure; a mounting structure, wherein the permanent magnet is fixedly connected to the inside of the mounting structure, the sub-magnets are limited and fixed by the mounting structure, and the mounting structure is used to be connected to the water-cooled screen body.

[0008] Optionally, the sub-magnets are arc-shaped structures, and the structures of all the sub-magnets are the same.

[0009] Optionally, in the axial direction of the permanent magnet, each of the sub-magnets has two radial end faces arranged opposite to each other, wherein the magnetic pole of one of the radial end faces is S-type, and the magnetic pole of the other radial end face is N-type, and in all the sub-magnets, the radial end faces with the same magnetic poles also have the same orientation.

[0010] Optionally, a limiting cavity for installing the permanent magnet is provided inside the mounting structure, and the mounting structure fixes the position of the permanent magnet through the limiting cavity; a plurality of flow holes connected to the limiting cavity are provided on the surface of the mounting structure, and the plurality of flow holes are spaced apart and distributed around the axis of the permanent magnet.

[0011] Optionally, the plurality of flow holes are divided into a plurality of groups, the flow holes in the same group are spaced apart around the axis of the permanent magnet, and the flow holes in two adjacent groups are spaced apart axially or radially.

[0012] Optionally, the magnet assembly also includes: a limiting structure, which is arranged on the inner wall of the limiting cavity, the limiting structure is distributed around the axis of the permanent magnet, and the inner wall of the limiting cavity abuts and limits the permanent magnet through the limiting structure, so that a heat exchange channel is formed between the permanent magnet and the inner wall of the limiting cavity, and the flow hole is connected to the heat exchange channel.

[0013] Optionally, the limiting structure includes: a plurality of limiting columns, the plurality of limiting columns are spaced apart and distributed around the axis of the permanent magnet, one end of each limiting column is connected to the inner wall of the limiting cavity, and the other end of the limiting column abuts against the permanent magnet.

[0014] Optionally, the two axial ends of the permanent magnet are respectively abutted with at least one group of the limiting posts, and / or the radial inner and outer sides of the permanent magnet are respectively abutted with at least one group of the limiting posts.

[0015] Optionally, the mounting structure includes: a shell having an annular groove arranged around the axis of the permanent magnet, and the permanent magnet is arranged in the annular groove; a cover body, which is arranged on the annular groove and is detachably connected to the shell, and the cover body and the shell enclose the limiting cavity.

[0016] Optionally, the limiting structure includes: a plurality of first reinforcing ribs connected to the cover body, each of the first reinforcing ribs extending radially of the permanent magnet, a plurality of the first reinforcing ribs being spaced apart around the axis of the permanent magnet, and the cover body abutting against the permanent magnet through the first reinforcing ribs; a plurality of second reinforcing ribs connected to the inner wall of the annular groove, a plurality of the second reinforcing ribs being spaced apart along the axis around the permanent magnet, and the shell abutting against the permanent magnet through the second reinforcing ribs, and the plurality of the first reinforcing ribs and the plurality of the second reinforcing ribs being staggered in the circumferential direction.

[0017] Optionally, the second reinforcing rib includes: a first rib connected to the groove wall of the annular groove located on the outside of the permanent magnet, and the first rib extends along the axial direction of the permanent magnet; a second rib connected to the groove wall of the annular groove located on the inside of the permanent magnet, and the second rib extends along the axial direction of the permanent magnet, and the second rib is arranged in a one-to-one correspondence with the first rib; a third rib connected to the groove bottom of the annular groove, and the two ends of the third rib are respectively connected to the first rib and the second rib to form an integrated structure.

[0018] Optionally, a plurality of the flow holes are respectively arranged on the cover body and the shell; on the cover body, at least one flow hole is arranged between each adjacent two of the first reinforcing ribs; on the shell, at least one flow hole is arranged between each adjacent two of the second reinforcing ribs.

[0019] Optionally, the magnet assembly further includes: a connecting portion fixedly connected to the mounting structure, wherein the connecting portion is used to connect to the water-cooling screen body so as to form a flow channel between an outer wall of the mounting structure and the water-cooling screen body.

[0020] According to a second aspect of the utility model, a water-cooling screen is also disclosed, comprising the above-mentioned magnet assembly and a water-cooling screen body, wherein the water-cooling screen body has a heat exchange cavity inside, and the magnet assembly is arranged in the heat exchange cavity.

[0021] The utility model is used for the magnet assembly of the water-cooled screen, by improving the original one-piece annular permanent magnet into an annular structure formed by connecting multiple sub-magnets end to end. Each sub-magnet has a smaller volume. During the manufacturing process, the sub-magnet can be magnetized with a smaller magnetizing device, which not only reduces the difficulty of magnetization, but also, due to the small volume of each sub-magnet, more energy can be used to improve the magnetic field strength of each sub-magnet, and finally the permanent magnet formed by the splicing of multiple sub-magnets has a higher strength, thereby effectively suppressing the thermal convection of silicon liquid and improving the quality of the crystal rod. Moreover, due to the smaller volume of the sub-magnet, it is more convenient to transport and install. During transportation or installation, even if a sub-magnet is subjected to a large impact and loses magnetism, it does not affect the assembly and use of other sub-magnets, and the demagnetized sub-magnet can be replaced separately. In addition, after the permanent magnets are spliced, the magnetic fields of the sub-magnets will interact with each other to make the overall magnetic field more stable, reducing the risk of demagnetization of individual sub-magnets. In addition, by arranging the permanent magnet inside the mounting structure, the connection between the permanent magnet and the water-cooled screen can be made more convenient and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic structural diagram of a magnet assembly according to Embodiment 1 of the present utility model;

[0023] Figure 2 It is a top view of the permanent magnet of the magnet assembly of the first embodiment of the utility model;

[0024] Figure 3 It is a side view of a permanent magnet of a magnet assembly according to Embodiment 1 of the present utility model;

[0025] Figure 4 This is a schematic diagram of the internal structure of the installation structure of the magnet assembly of the first embodiment of the utility model;

[0026] Figure 5 It is a three-dimensional diagram of the installation structure of the magnet assembly of the first embodiment of the utility model;

[0027] Figure 6 This is a schematic structural diagram of the limiting cavity of the magnet assembly of the second embodiment of the utility model;

[0028] Figure 7 This is a schematic diagram of the matching relationship between the first reinforcing rib and the second reinforcing rib of the magnet assembly of the third embodiment of the utility model;

[0029] Figure 8 It is a top view of the installation structure of the magnet assembly of the third embodiment of the utility model;

[0030] Fig. 9 This is an assembly diagram of a permanent magnet and a housing of a magnet assembly according to Embodiment 3 of the present utility model;

[0031] Fig.10This is a schematic structural diagram of the second reinforcing rib of the magnet assembly of the third embodiment of the utility model;

[0032] Fig.11 This is a schematic diagram of an application scenario of the magnet assembly of the first embodiment of the utility model;

[0033] List of reference numerals:

[0034] 10. Permanent magnet; 11. Sub-magnet; 20. Mounting structure; 21. Shell; 211. Annular groove; 22. Cover; 23. Flow hole; 30. Limiting cavity; 40. Limiting structure; 41. Limiting column; 42. First reinforcing rib; 43. Second reinforcing rib; 431. First rib; 432. Second rib; 433. Third rib; 50. Heat exchange channel; 51. First heat exchange flow channel; 52. Second heat exchange flow channel; 53. Third heat exchange flow channel; 60. Connecting part; 61. Long connecting plate; 62. Short connecting plate; 70. Water cooling screen; 71. Water cooling screen body; 711. Heat exchange cavity; 712. Cooling channel; 72. Water inlet pipeline; 73. Water outlet pipeline. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solution of the present invention, the magnet assembly for a water-cooled screen and the water-cooled screen provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0036] In the process of producing single crystal silicon rods by the direct pulling method, with the rapid development of the photovoltaic industry, the demand for high purity and high uniformity of single crystal silicon rods has gradually increased. In order to meet the quality of crystals in the production process of single crystal silicon rods, it is required to reduce crystal defects and impurity content in the growth of single crystal silicon and improve the uniformity of impurities such as oxygen and carbon.

[0037] At present, magnetron crystal pulling devices are usually used to pull crystals through the magnetron crystal pulling method. A magnetic field generating device is set in the single crystal furnace. The magnetic field generated by the magnetic field generating device passes through the silicon liquid in the crucible, so that the silicon liquid interacts with the magnetic field, thereby suppressing the thermal convection of the silicon liquid, thereby reducing the impact of uneven crystal pulling. However, currently most magnetron equipment is installed outside the single crystal furnace body, with a complex and large structure, requiring major modifications to the single crystal furnace and surrounding facilities, with a large amount of engineering work, a long cycle, and high production costs.

[0038] Water cooling screens are commonly used in existing Czochralski single crystal silicon growth equipment to cool the crystal rods and increase the growth rate of the crystal rods. When in use, cooling water is introduced from the water inlet of the water cooling screen, flows through the water path inside the water cooling screen and is discharged from the water outlet of the water cooling screen, thereby taking away the heat. Due to the circulation of water cooling, the inside of the water cooling screen can always maintain a relatively low temperature.

[0039] In order to simplify the equipment structure and reduce production costs, in some related technologies, permanent magnets are set in a water-cooling screen. By acting on the silicon liquid when the crystal rod passes through the water-cooling screen, the purpose of suppressing the convection of the silicon liquid can be achieved, and impurities such as oxygen and carbon entering the silicon rod can be reduced.

[0040] However, this approach creates new problems:

[0041] First, in the manufacturing process of permanent magnets, it is generally necessary to magnetize the permanent magnets through magnetizing equipment. The larger the size of the permanent magnet, the larger the magnetizing equipment used. The larger the magnetizing equipment, the more energy is required to produce the same magnetic field. Therefore, the larger the size of the integrated permanent magnet, the more energy is consumed during its magnetization. A permanent magnet that is too large will be limited by the magnetizing equipment and cannot produce a strong enough magnetic field strength. Therefore, it is difficult to effectively suppress the thermal convection of the silicon liquid, thereby affecting the quality of the crystal rod.

[0042] Secondly, the integrated permanent magnet is relatively inconvenient to transport and install due to its large size. Especially during transportation, due to the characteristics of the permanent magnet, there is a risk of demagnetization when it is subjected to a strong impact, thus affecting subsequent use.

[0043] Finally, the permanent magnets in the water cooling screen will also absorb the heat of the crystal rods, causing the temperature to rise. For permanent magnets, long-term exposure to high temperatures can easily cause the magnetic force to fade, so timely cooling with cooling water is required. Therefore, the problem of heat dissipation of permanent magnets inside the water cooling screen must also be considered.

[0044] like Figure 1 and Figure 2 As shown, in order to solve the above problems, the first embodiment of the present utility model discloses a magnet assembly for a water-cooled screen, including: a permanent magnet 10 and a mounting structure 20. Figure 2 As shown, the permanent magnet 10 includes a plurality of sub-magnets 11, which are connected end to end and spliced ​​into a ring structure; the permanent magnet 10 is fixedly connected to the inside of the mounting structure 20, and the sub-magnets 11 are limited and fixed by the mounting structure 20, and the mounting structure 20 is used to connect to the water-cooled screen body 71.

[0045] When in use, multiple sub-magnets 11 can be connected end to end and spliced ​​into a ring structure and fixedly connected to the inside of the mounting structure 20, and fixedly installed inside the water-cooled screen 70 through the mounting structure 20, so as to achieve a reliable connection. The mounting structure 20 can be connected and fixed to the inner wall of the heat exchange cavity 711 of the water-cooled screen body 71 by welding or threaded connection, riveting, etc., so as to fix the permanent magnet 10 in the heat exchange cavity 711. By adopting welding, threaded connection, riveting and other connection methods, a reliable connection between the mounting structure 20 and the inner wall of the heat exchange cavity 711 of the water-cooled screen body 71 can be achieved. Since the permanent magnet 10 is located inside the mounting structure 20, on the one hand, the mounting structure 20 can bear most of the impact of cooling water, thereby reducing the impact of water flow on the permanent magnet 10. In addition, the permanent magnet 10 can be limited by the mounting structure 20, so as to achieve the reliability and stability of the connection between the permanent magnet 10 and the water-cooled screen body 71.

[0046] The magnet assembly for the water-cooled screen 70 of the utility model is improved by improving the original integrated annular permanent magnet 10 into an annular structure formed by connecting multiple sub-magnets 11 end to end. Each sub-magnet 11 is smaller in size. During the manufacturing process, the sub-magnet 11 can be magnetized with a smaller magnetizing device, which not only reduces the difficulty of magnetization, but also, due to the small size of each sub-magnet 11, more energy can be used to improve the magnetic field strength of each sub-magnet 11, and finally the permanent magnet 10 spliced ​​by multiple sub-magnets 11 is stronger, thereby effectively suppressing the thermal convection of silicon liquid and improving the quality of the crystal rod. Moreover, due to the smaller size of the sub-magnet 11, it is more convenient to transport and install. During transportation or installation, even if a sub-magnet 11 is subjected to a large impact and loses magnetism, it does not affect the assembly and use of other sub-magnets 11, and the demagnetized sub-magnet 11 can be replaced separately. In addition, after the permanent magnet 10 is spliced, the magnetic fields of the sub-magnets 11 interact with each other to make the overall magnetic field more stable, reducing the risk of demagnetization of a single sub-magnet 11. In addition, by arranging the permanent magnet 10 inside the mounting structure 20 , the connection between the permanent magnet 10 and the water-cooling shield 70 can be made more convenient and reliable.

[0047] like Figure 2 As shown, in this embodiment, the sub-magnets 11 are arc-shaped structures, and the structures of all sub-magnets 11 are the same. In this way, in the manufacturing process of the sub-magnets 11, molds of the same specifications can be used, which not only reduces production costs, but also facilitates later maintenance and replacement, and improves the versatility between the sub-magnets 11.

[0048] In the axial direction of the permanent magnet 10, that is, Figure 3In the vertical direction, each sub-magnet 11 has two radial end faces arranged opposite to each other, one of which has an S-shaped magnetic pole and the other has an N-shaped magnetic pole. In all sub-magnets 11, the radial end faces with the same magnetic poles have the same orientation. Figure 3 As shown, in this embodiment, the axis of the permanent magnet 10 extends in the vertical direction, the magnetic pole at the top is N-type, and the magnetic pole at the bottom is S-type. The direction of the magnetic field is from N-type to S-type. In a possible embodiment, the magnetic field strength is required to be 500 Gauss. Through the convection between the permanent magnet 10 and the silicon melt, impurities are not easy to flow to the center of the single crystal furnace and enter the single crystal silicon rod, thereby improving the quality of the single crystal silicon rod.

[0049] It should be noted that in this embodiment, the number of sub-magnets 11 cannot be too small. If the number of sub-magnets 11 is too small, the volume of a single sub-magnet 11 is still large. Therefore, according to the size requirements of the final permanent magnet, the number of sub-magnets 11 ranges from 12 to 100.

[0050] like Figure 4 As shown, the interior of the mounting structure 20 is provided with a limiting cavity 30 for mounting the permanent magnet 10. The mounting structure 20 fixes the position of the permanent magnet 10 through the limiting cavity 30. The limiting cavity 30 is an annular structure matching the permanent magnet 10. The surface of the mounting structure 20 is provided with a plurality of flow holes 23 connected to the limiting cavity 30. The plurality of flow holes 23 are spaced around the axis of the permanent magnet 10. By making the plurality of flow holes 23 spaced around the axis of the permanent magnet 10, the cooling water can enter the limiting cavity 30 at a plurality of positions on the circumference, thereby improving the heat dissipation effect of the permanent magnet 10.

[0051] The magnet assembly for the water-cooled screen 70 of the utility model is provided with a plurality of flow holes 23 on the surface of the mounting structure 20. The cooling water can enter the limiting cavity 30 through the flow holes 23 to exchange heat with the permanent magnet 10 and cool the permanent magnet 10. Thus, the heat dissipation effect of the permanent magnet 10 is taken into consideration while ensuring the connection reliability of the permanent magnet 10, so as to reduce the risk of demagnetization of the permanent magnet 10.

[0052] It is understandable that, in this embodiment, in order to prevent the installation structure 20 from interfering with the magnetic field, the material of the installation structure can be a material that has less interference with the magnetic field, such as resin, glass, metal, etc.

[0053] In this embodiment, if Figure 5 As shown, the plurality of flow holes 23 are divided into a plurality of groups. The flow holes 23 in the same group are spaced apart around the central axis of the limiting cavity 30 , and the flow holes 23 in two adjacent groups are spaced apart axially or radially.

[0054] Specifically, if Figure 4 and Figure 5In the illustrated embodiment 1, the mounting structure 20 includes: a housing 21 and a cover 22. The housing 21 has an annular groove 211 arranged around the axis of the permanent magnet 10; the cover 22 is covered on the annular groove 211 and is detachably connected to the housing 21, and the cover 22 and the housing 21 form a limiting cavity 30. Through the detachable connection between the housing 21 and the cover 22, during assembly, the permanent magnet 10 can be placed in the annular groove 211 of the housing 21, and then the cover 22 is covered on the housing 21 to form the limiting cavity 30, so that the permanent magnet 10 is limited in the limiting cavity 30, making installation more convenient. When it is necessary to maintain or adjust the strength of the permanent magnet 10, the cover 22 can be separated from the housing 21, and the permanent magnet 10 can be taken out for maintenance or replacement, making the operation more convenient and flexible.

[0055] In this embodiment, the detachable connection between the housing 21 and the cover 22 is a threaded connection, the inner side of the cover 22 is provided with an internal thread, and the outer side of the housing 21 is provided with an external thread. The housing 21 and the cover 22 are connected by the internal and external threads. When in use, the cover 22 is connected and separated by rotating relative to the housing 21. However, this is not restrictive. In some other embodiments not shown in the figure, the connection between the housing 21 and the cover 22 can also be fixed by pinning or fixing by bolts, etc. As long as the detachable connection between the two can be achieved, it is within the protection scope of the present utility model.

[0056] like Figure 5 As shown, in the first embodiment, both the cover 22 and the shell 21 are provided with flow holes 23. The flow holes 23 on the cover 22 are divided into three groups, and each group of flow holes 23 is distributed in an annular shape. In the radial direction, the three groups of flow holes 23 are distributed from the inside to the outside at intervals. The shell 21 is also provided with multiple groups of flow holes 23. Multiple groups of flow holes 23 distributed in an annular shape are provided on the bottom and two groove walls of the annular groove 211 of the shell 21. Among them, on the bottom of the annular groove 211, multiple groups of flow holes 23 are distributed from the inside to the outside at intervals in the radial direction; and on the groove wall, multiple groups of flow holes 23 are distributed at intervals in the axial direction. In this embodiment, there are three groups of flow holes 23 on the bottom of the groove, and in some other embodiments, there may be one group, two groups, or three groups of flow holes 23 on the bottom of the groove. Similarly, in this embodiment, there are two groups of flow holes 23 on the groove wall of the annular groove 211, and in some other embodiments, there may be one group or three groups of flow holes 23 on the groove wall of the annular groove 211. In the same group, the number of flow holes 23 may be 8 to 20.

[0057] The magnet assembly for the water-cooled screen 70 of the utility model is provided with a plurality of groups of flow holes 23. The cooling water in the water-cooled screen 70 can enter the limiting cavity 30 through different flow holes 23, and then flow out from other flow holes 23 after heat exchange with the permanent magnet 10, so that the cooling water directly contacts the permanent magnet 10, thereby improving the cooling effect of the cooling water on the permanent magnet 10 and reducing the risk of demagnetization of the permanent magnet 10.

[0058] like Figure 1 As shown, in this embodiment, the magnet assembly also includes: a connecting portion 60, the connecting portion 60 is fixedly connected to the mounting structure 20, and the connecting portion 60 is used to connect to the inner wall of the heat exchange cavity 711 of the water-cooled shield 70, so that a flow space is formed between the outer wall of the mounting structure 20 and the inner wall of the heat exchange cavity 711 of the water-cooled shield 70. In this embodiment, the connecting portion 60 is a plurality of connecting plates welded to the bottom of the mounting structure 20, and the plurality of connecting plates are distributed at intervals in the circumferential direction. By providing the connecting portion 60, the mounting structure 20 can be fixedly connected to the inner wall of the heat exchange cavity 711 through the connecting portion 60, and at the same time, a flow channel is formed between the outer wall of the mounting structure 20 and the inner wall of the heat exchange cavity 711 of the water-cooled shield 70, so as to improve the fluidity of the cooling water and thus improve the heat exchange efficiency.

[0059] In a possible embodiment, the connection part 60 includes an inner long connection plate 61 and an outer short connection plate 62, and the long connection plate 61 and the short connection plate 62 are welded to the bottom of the water-cooling shield 70, so as to achieve a fixed connection between the mounting structure 20 and the water-cooling shield 70. Since the bottom of the water-cooling shield 70 is an inclined structure, the short connection plate 62 and the long connection plate 61 are used to make the mounting structure 20 still in a horizontal state after the connection part 60 is connected to the bottom of the water-cooling shield 70, so that the magnetic flux lines act vertically on the silicon melt, and the convection suppression capacity is maximized.

[0060] In some possible embodiments, the magnet assembly also includes: a limiting structure 40, which is arranged on the inner wall of the limiting cavity 30, and the limiting structure 40 is distributed around the axis of the permanent magnet 10, and the inner wall of the limiting cavity 30 is abutted and limitedly matched with the permanent magnet 10 through the limiting structure 40, so that a heat exchange channel is formed between the permanent magnet 10 and the inner wall of the limiting cavity 30, and the flow hole 23 is connected to the heat exchange channel 50.

[0061] The magnet assembly for the water-cooled screen 70 of the utility model can be installed with a limiting structure 40 arranged in the limiting cavity 30 and distributed around the axis of the permanent magnet 10. The structure 20 can be abutted and restricted by the limiting structure 40 with the permanent magnet 10, thereby fixing the position of the permanent magnet 10, so that a heat exchange channel 50 connected to the flow hole 23 is formed between the permanent magnet 10 and the inner wall of the limiting cavity 30. Cooling water can flow in the heat exchange channel 50 and exchange heat with the permanent magnet 10, thereby improving the heat exchange efficiency of the permanent magnet 10.

[0062] The structure of the limiting structure 40 is described in detail below in conjunction with a specific embodiment:

[0063] like Figure 6 The second embodiment of the utility model shown also discloses a magnet assembly for a water-cooled screen 70, and its structure is basically the same as that of the first embodiment, except that, in this embodiment, the limiting structure 40 includes: a plurality of limiting columns 41, and the plurality of limiting columns 41 are spaced apart and distributed around the axis of the permanent magnet 10, one end of each limiting column 41 is connected to the inner wall of the limiting cavity 30, and the other end of the limiting column 41 is abutted against the permanent magnet 10.

[0064] like Figure 6 As shown, in this embodiment, a plurality of limiting posts 41 are divided into a plurality of groups, and two groups of limiting posts 41 are arranged on the inner wall of the cover body 22, and the two groups of limiting posts 41 are arranged at intervals in the radial direction, and the limiting posts 41 on the cover body 22 are all in contact with the top of the permanent magnet 10. Two groups of limiting posts 41 are arranged at the bottom of the annular groove 211, and the two groups of limiting posts 41 are arranged at intervals in the radial direction, and the limiting posts 41 on the bottom of the annular groove 211 are all in contact with the bottom of the permanent magnet 10. Two groups of limiting posts 41 are arranged on the groove wall of the annular groove 211 located on the outer peripheral side of the permanent magnet 10, and the two groups of limiting posts 41 are arranged at intervals in the axial direction, and the limiting posts 41 on the groove wall are all in contact with the outer peripheral wall of the permanent magnet 10. Two groups of limiting posts 41 are arranged on the groove wall of the annular groove 211 located on the inner circumference of the permanent magnet 10 . The two groups of limiting posts 41 are arranged at intervals in the axial direction. The limiting posts 41 on the groove wall are all in contact with the inner circumference of the permanent magnet 10 .

[0065] By arranging the limiting posts 41 on the inner wall of the limiting cavity 30, the mounting structure 20 abuts against the top, bottom, inner circumference and outer circumference of the permanent magnet 10 through the limiting posts 41, thereby ensuring the stability of the abutment in each direction. At the same time, sufficient space can be ensured between the limiting posts 41 for the cooling water to flow, thereby ensuring the heat exchange efficiency between the cooling water and the permanent magnet 10.

[0066] It should be noted that, in the present embodiment, although two groups of limiting posts 41 are provided in each direction, this is not restrictive, and in some other embodiments not shown in the figure, at least one group of limiting posts 41 may be provided in each direction, or three or four groups of limiting posts 41 may be provided. In other words, as long as the two ends of the permanent magnet 10 in the axial direction are respectively abutted with at least one group of limiting posts 41, and / or the inner and outer sides of the permanent magnet 10 in the radial direction are respectively abutted with at least one group of limiting posts 41, they are within the protection scope of the present utility model.

[0067] like Figures 7 to 10The third embodiment of the utility model shown also discloses a magnet assembly for a water-cooled screen 70 , the structure of which is basically the same as that of the second embodiment, except that, in this embodiment, the limiting structure 40 includes: a plurality of first reinforcing ribs 42 and a plurality of second reinforcing ribs 43 .

[0068] like Figure 7 As shown, the first reinforcing rib 42 is connected to the inner wall of the cover body 22, as shown in FIG. Figure 8 As shown, each first reinforcing rib 42 extends in the radial direction of the permanent magnet 10 , and a plurality of first reinforcing ribs 42 are spaced apart and distributed around the axis of the permanent magnet 10 , and the first reinforcing ribs 42 abut against the top of the permanent magnet 10 .

[0069] like Figure 8 As shown, multiple second reinforcing ribs 43 are connected to the inner wall of the annular groove 211, and the multiple second reinforcing ribs 43 are spaced around the axis of the permanent magnet 10. The shell 21 abuts against the permanent magnet 10 through the second reinforcing ribs 43, and the multiple first reinforcing ribs 42 and the multiple second reinforcing ribs 43 are staggered with each other.

[0070] It should be noted that, combined with Figures 7 to 10 It can be seen that the positions of the first reinforcing rib 42 and the second reinforcing rib 43 are staggered. Figure 7 As shown, the first heat exchange channel 51 located on both sides of the first reinforcing rib 42 and the second heat exchange channel 52 located between the second reinforcing rib 43 can be connected through the third heat exchange channel 53 on the inner and outer sides of the permanent magnet 10 (see Fig. 9 ) so that the cooling water flows in from the top of the cover body 22 and can be discharged from the bottom of the shell body 21, thereby improving the heat exchange efficiency.

[0071] Moreover, since the permanent magnet 10 is a ring structure formed by splicing a plurality of arc-shaped sub-magnets 11, during assembly, the position of the second reinforcing rib 43 is the position where two adjacent sub-magnets 11 are butted together, that is, Figure 7 and Fig. 9 As shown, the opposite ends of two adjacent sub-magnets 11 are located on the same second reinforcing rib 43. At the same time, the two ends of the same sub-magnet 11 are respectively clamped on the two adjacent second reinforcing ribs 43. After the cover 22 is assembled, please combine Figure 7 There is a first reinforcing rib 42 above each sub-magnet 11, and the first reinforcing rib 42 presses the sub-magnet 11 onto the two second reinforcing ribs 43 to prevent the position of the sub-magnet 11 from shifting. Through this setting, the relative positions of the sub-magnets 11 can be kept unchanged, the permanent magnet 10 can be prevented from disintegrating, and the reliability of the connection can be improved.

[0072] Specifically, if Figure 8 and Fig.10As shown, the second reinforcing rib 43 includes: a first rib 431, a second rib 432 and a third rib 433. The first rib 431 is connected to the groove wall of the annular groove 211 located outside the permanent magnet 10, and the first rib 431 extends along the axial direction of the permanent magnet 10 to abut against the outer peripheral wall of the permanent magnet 10. The second rib 432 is connected to the groove wall of the annular groove 211 located inside the permanent magnet 10, and the second rib 432 extends along the axial direction of the permanent magnet 10. The second rib 432 is arranged one-to-one with the first rib 431 to abut against the inner peripheral wall of the permanent magnet 10; the third rib 433 is connected to the groove bottom of the annular groove 211, and the two ends of the third rib 433 are respectively connected to the first rib 431 and the second rib 432 to form an integrated structure. By forming the first rib 431, the second rib 432 and the third rib 433 into an integrally formed structure, the strength of the shell 21 can be improved, and the connection strength between the bottom of the annular groove 211 and the two groove walls can be improved, thereby effectively preventing the shell 21 from deforming due to water flow impact, and improving the reliability of the shell 21 in limiting the permanent magnet 10.

[0073] The magnet assembly for the water-cooled screen 70 of the utility model can not only strengthen the overall structure of the cover body 22 and the shell body 21 and improve the overall strength of the mounting structure 20 by setting the first reinforcing rib 42 and the second reinforcing rib 43, but also limit and fix the permanent magnet 10 by the first reinforcing rib 42 and the second reinforcing rib 43, and form a heat exchange channel 50 between the permanent magnet 10 and the inner wall of the limiting cavity 30, thereby improving the heat exchange efficiency between the permanent magnet 10 and the cooling water. It is a typical one-piece with multiple uses.

[0074] like Figure 7 As shown, a plurality of flow holes 23 are respectively arranged on the cover 22 and the shell 21; on the cover 22, at least one flow hole 23 is arranged between each two adjacent first reinforcing ribs 42; on the shell 21, at least one flow hole 23 is arranged between each two adjacent second reinforcing ribs 43. By arranging at least one flow hole 23 between each two adjacent first reinforcing ribs 42, and at least one flow hole 23 between each two adjacent second reinforcing ribs 43, the first heat exchange flow channel 51 and the second heat exchange flow channel can be connected with the flow hole 23, making it easier for cooling water to enter and exit the heat exchange flow channel, thereby improving the heat exchange efficiency between the permanent magnet 10 and the cooling water.

[0075] like Fig.11As shown, the utility model also discloses a water-cooled shield 70, including the above-mentioned magnet assembly, a water-cooled shield body 71, a water inlet pipeline 72 and a water outlet pipeline 73. The water-cooled shield body 71 is an annular structure, and a cooling channel 712 for passing silicon rods is formed inside the water-cooled shield body 71. An annular heat exchange cavity 711 is formed between the inner peripheral wall of the cooling channel 712 and the outer peripheral wall of the water-cooled shield body 71. The magnet assembly is arranged in the heat exchange cavity 711, and the cooling water inlet pipeline 72 and the water outlet pipeline 73 are respectively connected to the heat exchange cavity 711. When in use, the cooling water enters the heat exchange cavity 711 through the water inlet pipeline 72, and reduces the surrounding temperature to cool the silicon rod. The magnet assembly is immersed in the cooling water to achieve cooling. The cooling water after heat exchange flows out of the heat exchange cavity 711 through the water delivery pipeline to take away the heat.

[0076] like Figure 1 As shown, the mounting structure 20 is fixedly connected to the bottom of the heat exchange cavity 711 through the connecting portion 60, and the permanent magnet 10 is a ring structure formed by an array of multiple sub-magnets 11. In this embodiment, in the vertical direction, the top of the permanent magnet 10 is an N-type pole, and the bottom is an S-type pole. The direction of the magnetic field is from the N-type pole to the S-type pole. The magnetic field strength is required to be 500 Gauss. The main function is to suppress the convection of the silicon melt, so that impurities are not easy to flow to the center of the single crystal furnace and enter the single crystal silicon rod. And by replacing the permanent magnet 10, the magnetic field strength is adjusted to meet the purpose of suppressing the convection of the silicon liquid.

[0077] The water-cooled screen 70 of the utility model can ensure that the cooling water quickly enters the limiting cavity 30 from the flow hole 23 and cools the permanent magnet 10 by arranging the flow hole 23 on the mounting structure 20, and promptly and evenly takes away the heat so that the permanent magnet 10 always maintains a suitable working temperature. Moreover, by arranging the limiting structure 40, the permanent magnet 10 can always be kept in the middle of the limiting cavity 30, preventing the permanent magnet 10 from blocking the flow hole 23 under the action of water pressure, thereby greatly improving the heat exchange efficiency.

[0078] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A magnet assembly for a water-cooled screen, characterized in that: include: The permanent magnet (10) comprises a plurality of sub-magnets (11), wherein the plurality of sub-magnets (11) are connected end to end and spliced ​​into a ring structure; The mounting structure (20) is configured such that the permanent magnet (10) is fixedly connected inside the mounting structure (20), the sub-magnets (11) are fixed in position by the mounting structure (20), and the mounting structure (20) is used to be connected to a water-cooled screen body (71).

2. The magnet assembly according to claim 1, characterized in that The sub-magnets (11) are of arc-shaped structure, and all the sub-magnets (11) have the same structure.

3. The magnet assembly according to claim 2, characterized in that: In the axial direction of the permanent magnet (10), each of the sub-magnets (11) has two radial end faces arranged opposite to each other, wherein the magnetic pole of one of the radial end faces is S-shaped and the magnetic pole of the other radial end face is N-shaped, and in all the sub-magnets (11), the radial end faces with the same magnetic poles are oriented in the same direction.

4. The magnet assembly according to claim 1, characterized in that: A limiting cavity (30) for installing the permanent magnet (10) is provided inside the installation structure (20), and the installation structure (20) fixes the position of the permanent magnet (10) through the limiting cavity (30); A plurality of flow holes (23) communicating with the limiting cavity (30) are arranged on the surface of the mounting structure (20), and the plurality of flow holes (23) are spaced apart and distributed around the axis of the permanent magnet (10).

5. The magnet assembly according to claim 4, characterized in that The plurality of flow holes (23) are divided into a plurality of groups, the flow holes (23) in the same group are spaced around the axis of the permanent magnet (10), and the flow holes (23) in two adjacent groups are spaced axially or radially.

6. The magnet assembly according to claim 4, characterized in that The magnet assembly further comprises: A limiting structure (40) is arranged on the inner wall of the limiting cavity (30), the limiting structure (40) is distributed around the axis of the permanent magnet (10), and the inner wall of the limiting cavity (30) abuts against and limits the permanent magnet (10) through the limiting structure (40), so that a heat exchange channel (50) is formed between the permanent magnet (10) and the inner wall of the limiting cavity (30), and the flow hole (23) is connected to the heat exchange channel (50).

7. The magnet assembly according to claim 6, characterized in that The limiting structure (40) comprises: A plurality of limiting columns (41) are arranged at intervals around the axis of the permanent magnet (10), one end of each limiting column (41) is connected to the inner wall of the limiting cavity (30), and the other end of the limiting column (41) is in contact with the permanent magnet (10).

8. The magnet assembly according to claim 7, characterized in that The plurality of limit posts (41) are divided into a plurality of groups, and the two axial ends of the permanent magnet (10) are respectively in abutment with at least one group of the limit posts (41), and / or, The inner and outer sides of the permanent magnet (10) in the radial direction are respectively in abutment with at least one group of the limiting pillars (41).

9. The magnet assembly according to claim 6, characterized in that: The mounting structure (20) comprises: A housing (21) having an annular groove (211) arranged around the axis of the permanent magnet (10), wherein the permanent magnet (10) is arranged in the annular groove (211); A cover body (22) is disposed on the annular groove (211) and is detachably connected to the shell (21); the cover body (22) and the shell (21) enclose the limiting cavity (30).

10. The magnet assembly according to claim 9, characterized in that The limiting structure (40) comprises: a plurality of first reinforcing ribs (42) connected to the cover body (22), each of the first reinforcing ribs (42) extending in the radial direction of the permanent magnet (10), the plurality of first reinforcing ribs (42) being distributed at intervals around the axis of the permanent magnet (10), and the cover body (22) being in contact with the permanent magnet (10) via the first reinforcing ribs (42); A plurality of second reinforcing ribs (43) are connected to the inner wall of the annular groove (211); the plurality of second reinforcing ribs (43) are spaced apart around the axis of the permanent magnet (10); the shell (21) abuts against the permanent magnet (10) through the second reinforcing ribs (43); and the plurality of first reinforcing ribs (42) and the plurality of second reinforcing ribs (43) are staggered in the circumferential direction.

11. The magnet assembly according to claim 10, characterized in that The second reinforcing rib (43) comprises: A first rib (431) connected to a groove wall of the annular groove (211) located outside the permanent magnet (10), the first rib (431) extending along the axial direction of the permanent magnet (10); A second rib (432) connected to a groove wall of the annular groove (211) located on the inner side of the permanent magnet (10), the second rib (432) extending along the axial direction of the permanent magnet (10), and the second rib (432) and the first rib (431) being arranged in a one-to-one correspondence; The third rib (433) is connected to the bottom of the annular groove (211), and two ends of the third rib (433) are respectively connected to the first rib (431) and the second rib (432) to form an integrated structure.

12. The magnet assembly according to claim 10, characterized in that The plurality of flow holes (23) are respectively arranged on the cover body (22) and the shell body (21); On the cover body (22), at least one flow hole (23) is provided between each two adjacent first reinforcing ribs (42); On the housing (21), at least one flow hole (23) is provided between every two adjacent second reinforcing ribs (43).

13. The magnet assembly according to claim 1, characterized in that The magnet assembly further comprises: The connecting portion (60) is fixedly connected to the mounting structure (20), and the connecting portion (60) is used to connect to the water-cooling screen body (71) so as to form a flow passage between the mounting structure (20) and the water-cooling screen body (71).

14. A water cooling screen, characterized in that: include: A water-cooled shield body (71) and a magnet assembly according to any one of claims 1 to 13, wherein the water-cooled shield body (71) has a heat exchange cavity (711) inside, and the magnet assembly is arranged in the heat exchange cavity (711).

Images