Double-station film sticking machine

Abstract

The utility model relates to the technical field of wafer production equipment, in particular to a double-station film sticking machine which comprises a working platform, a film sticking table installed on the end face of the working platform in a sliding mode, a film sticking mechanism arranged on the film sticking table and a control table arranged on one side of the working platform and electrically connected with the working platform. A rotating platform is arranged between the film pasting mechanism and the working opening, a film pasting station and a preparation station are arranged on the end face of the rotating platform, the rotating platform can rotationally drive the film pasting station and the preparation station to be alternately changed, and the film pasting table can slidably drive the film pasting mechanism to the top of the film pasting station. A feeding reel used for feeding a film to the film pasting station and a waste film collecting reel used for collecting backing paper are further arranged on the side, back on to the rotating platform, of the film pasting table, and a film separating assembly used for separating the film from the backing paper is further arranged between the feeding reel and the film pasting mechanism. The utility model aims to solve the problem of manual film pasting errors and improve the film pasting efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production equipment, in particular to a double-station film laminating machine. Background Art

[0002] Wafers are core materials in semiconductor manufacturing and are mainly used in the production of integrated circuits (ICs) and other microelectronic components. The surface of the wafer is easily contaminated, scratched or physically damaged, and a film needs to be applied to the surface of the wafer to prevent these hazards.

[0003] Currently, wafer lamination is mostly done manually, which has low production efficiency and is prone to cause bubbles, wrinkles or loose fitting between the film and the wafer, affecting the subsequent quality of semiconductor chips. Utility Model Content

[0004] In order to solve the problems in the above-mentioned background technology, the utility model provides a double-station film laminating machine.

[0005] The solution adopted by the utility model to solve its technical problems is: a double-station film pasting machine, comprising a working platform, a film pasting table slidably mounted on the end surface of the working platform, a film pasting mechanism arranged on the film pasting table and a control console arranged on one side of the working platform and electrically connected to the working platform, wherein one end of the working platform is provided with a working port for feeding and discharging materials, a rotating platform is provided between the film pasting mechanism and the working port, a film pasting station for cooperating with the film pasting mechanism to automatically paste films is provided on the end surface of the rotating platform close to the film pasting mechanism, a preparation station is provided on the end surface of the rotating platform close to the working port, the rotating platform can rotatably drive the film pasting station and the preparation station to alternately change positions, the film pasting table can slidably drive the film pasting mechanism to the top of the film pasting station, a feeding reel for feeding the film to the film pasting station and a waste film collecting reel for collecting bottom paper are also provided on the film pasting table on the side facing away from the rotating platform, and a film separation component for separating the film from the bottom paper is also provided between the feeding reel and the film pasting mechanism.

[0006] By adopting the above technical solutions, the rotating platform driven by the control console can rotate automatically, so that the film laminating station and the preparation station are alternated, so that the film laminating process can be carried out continuously without stopping, which greatly shortens the material processing time and improves production efficiency. The film laminating table can be driven by the control console to slide to the top of the film laminating station to ensure the precise docking of the film laminating mechanism and the wafer, cooperate with automatic lamination, reduce the error caused by human operation, and improve the quality of film laminating. The feeding reel, film separation assembly and waste film collection reel ensure the continuous supply of film materials and the timely recovery of the base paper.

[0007] Furthermore, the film laminating table includes a sliding plate for sliding back and forth along the Y-axis toward the film laminating station and a side plate vertically fixed to one side of the sliding plate. A Y-axis sliding seat is provided at the bottom of the sliding plate, and a Y-axis slide rail is provided on the end surface of the working platform for being embedded in the Y-axis sliding seat and sliding back and forth.

[0008] By adopting the above technical solution, the sliding plate can slide smoothly in the sliding rail to enable the film sticking table to move along the Y-axis direction.

[0009] Furthermore, the membrane separation assembly includes a stripping plate fixedly mounted on the inner wall of the side plate and a plasma blower disposed above the stripping plate and fixedly mounted on the inner wall of the side plate.

[0010] By adopting the above technical solution, the peeling plate can separate the film material from the backing paper before lamination. The plasma blower releases plasma gas to effectively eliminate static electricity on the film surface and effectively improve the cleanliness of the film.

[0011] Furthermore, the film laminating mechanism includes a fixed plate fixed on the inner wall of the side plate, a lifting plate slidably connected to the fixed plate close to the rotating platform, and a pressing rubber roller fixed at the bottom of the lifting plate. A film sensing component is provided on the side of the fixed plate away from the lifting plate.

[0012] By adopting the above technical solution, the fixed plate provides a supporting infrastructure, and the lifting plate moves vertically on the vertical plate. When the film sensing component senses the film material entering, the film can be pressed and mounted in cooperation with the pressing rubber roller.

[0013] Furthermore, the lifting plate is vertically provided with a sliding groove, and the fixed plate is provided with a sliding block adapted to the sliding groove on one side of the lifting plate, and the sliding block is embedded in the sliding groove and can slide up and down in the sliding groove.

[0014] Furthermore, a transverse platform is provided between the working platform and the rotating platform, an X-axis sliding seat is provided at the bottom of the transverse platform, and an X-axis slide rail is provided on the end surface of the working platform for being embedded in the X-axis sliding seat and sliding back and forth.

[0015] By adopting the above technical solution, when the wafer is offset, the transverse platform can be moved laterally for fine-tuning and correction, thereby realizing automatic correction of the film offset.

[0016] Furthermore, the film laminating station and the preparation station are provided with a heating plate for heating the station to soften the film and a vacuum adsorption component for adsorbing the wafer to prevent displacement.

[0017] By adopting the above technical solution, the heating plate can continuously heat the workstation to soften the film, making it easier to mount firmly without bubbles, while the vacuum adsorption component adsorbs the wafer through the vacuum holes on the workstation to prevent the product from shifting during operation.

[0018] Furthermore, an upper guide roller group is provided between the feed reel and the film laminating mechanism, a lower guide roller group is provided between the waste film collection reel and the film laminating mechanism, and a film pulling roller is provided around the lower guide roller group.

[0019] By adopting the above technical solutions, the upper guide roller group can ensure that the film material is smoothly and wrinkle-freely introduced from the feeding reel to the film laminating mechanism to improve the laminating accuracy. The lower guide roller group accurately guides the base paper into the film receiving reel to keep it neatly collected. The film pulling roller is set on the side of the lower guide roller group, which can adjust the film tension and control the film tension through appropriate pulling force to avoid excessive tension or looseness, ensuring that there is no excessive stretching and contraction during laminating, and keeping the laminating flat.

[0020] To sum up, the beneficial effects of the utility model are as follows: the utility model realizes efficient alternation of the film laminating station and the preparation station through the alternating double stations of the rotating platform and the automatic sliding of the film laminating mechanism, which is precisely controlled by the control console, realizes continuous and uninterrupted material processing, significantly improves production efficiency and avoids manual errors.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the overall structure of this embodiment;

[0023] Figure 2 is an internal side view of this embodiment;

[0024] Figure 3 is a schematic diagram of a rotating platform of this embodiment;

[0025] Figure 4 This is an interior view of the rotating platform of this embodiment;

[0026] Figure 5 This is an enlarged front view of the film sticking mechanism of this embodiment;

[0027] Figure 6 It is an enlarged view of the back side of the film sticking mechanism of this embodiment.

[0028] In the figure: 1. working platform; 11. Y-axis slide rail; 12. X-axis slide rail; 2. film pasting table; 21. sliding plate; 211. Y-axis sliding seat; 22. side plate; 3. film pasting mechanism; 31. fixed plate; 311. sliding block; 32. lifting plate; 321. sliding groove; 33. pressing rubber roller; 34. film sensing element; 4. control console; 5. working port; 6. rotating platform; 61. film pasting station; 62. preparation station; 63. heating plate; 64. vacuum adsorption element; 7. feeding reel; 71. upper guide roller group; 8. waste material collection reel; 81. lower guide roller group; 82. film pulling roller; 9. film separation assembly; 91. peeling plate; 92. plasma fan; 10. transverse platform; 101. X-axis sliding seat. DETAILED DESCRIPTION

[0029] In order to make the content of the utility model more clearly understood, the utility model is further described below based on specific embodiments in combination with the accompanying drawings.

[0030] It should be noted that the terms "center", "upper", "lower", "front", "back", "left", "right", "inner", "outer" and the like used herein to indicate directions or positional relationships are based on directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. Unless otherwise specified, "plurality" means two or more.

[0031] Unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood by specific circumstances.

[0032] like Figures 1 to 6As shown, a double-station film laminating machine is designed to improve production efficiency and ensure the accuracy of the film laminating process, wherein this embodiment includes a working platform 1, a film laminating table 2 slidably mounted on the end surface of the working platform 1, a film laminating mechanism 3 arranged on the film laminating table 2, and a control console 4 arranged on one side of the working platform 1 and electrically connected to the working platform 1, one end of the working platform 1 is provided with a working port 5 for feeding and discharging materials, a rotating platform 6 is provided between the film laminating mechanism 3 and the working port 5, and a film laminating mechanism 3 is provided on the end surface of the rotating platform 6 on the side close to the film laminating mechanism 3 for cooperating with the film laminating mechanism 3 to automatically laminating the film. There is a film laminating station 61, and a preparation station 62 with the same structure as the film laminating station 61 is arranged on the end surface of the rotating platform 6 near the working port 5, and the rotating platform 6 can rotate to drive the film laminating station 61 and the preparation station 62 to alternately change positions, and the film laminating table 2 can slide to drive the film laminating mechanism 3 to the top of the film laminating station 61, and the film laminating table 2 is also provided with a feeding reel 7 for delivering the film to the film laminating station 61 and a waste film collecting reel for collecting the base paper on the side facing away from the rotating platform 6, and a film separating component 9 for separating the film and the base paper is also provided between the feeding reel 7 and the film laminating mechanism 3.

[0033] The main body of this embodiment is an electric control box, the upper end surface of which is a working platform 1, and a protective cover is arranged on the top of the working platform 1 to cover the entire working platform 1 to prevent dust from affecting the film application, and the protective cover at one end of the working platform 1 is arranged to be removable, and the protective cover at this end can be opened and this end is used as a working port 5. In the direction close to the working port 5, a rotating platform 6 and a film application table 2 that can slide back and forth on the working platform 1 driven by a moving motor are arranged in sequence on the end surface of the working platform 1, and a film application mechanism 3 is arranged on the side of the film application table 2 close to the rotating platform 6 for automatic film application. The rotating platform 6 can be driven by the rotating motor to rotate around the central axis. Two material placement stations are arranged on the top of the rotating platform 6, namely the film pasting station 61 and the preparation station 62. Their structures are consistent and their positions are opposite. They are respectively arranged on the opposite sides of the center of the rotating shaft of the rotating platform 6. Among them, the film pasting station 61 is adjacent to the film pasting mechanism 3 to form a film pasting area, and at this time, the preparation station 62 is located at the working port 5. The staff or the robot can place the wafer material to be pasted on the preparation station 62, and wait until the wafer on the film pasting station 61 is film pasted; the film pasting table 2 is driven by the moving motor to move backward, and the rotating platform 6 is driven by the rotating motor to rotate one circle, so that the preparation station 62 and the film pasting station 61 are alternately positioned, and the staff or the robot removes the wafer on which the film has been pasted on the film pasting station 61 and replaces it with the wafer to be pasted. At the same time, the film pasting table 2 moves forward and the preparation station 62 automatically pastes the film in the film pasting area. This cycle can achieve continuous operation and greatly improve production efficiency. On the back side of the film sticking station 2, that is, on the other side of the film sticking mechanism 3 relative to the rotating platform 6, a feeding reel 7 is provided to continuously pull the film material to the film sticking mechanism 3 for film sticking, and a film separation component 9 is provided between the film sticking mechanism 3 and the feeding reel 7 to separate the whole film into the mounting film and the base paper, and a waste collection reel 8 is provided at the lower end of the feeding reel 7 to collect the peeled base paper to keep the working area clean. On one side of the working platform 1, a control console 4 is provided, which is composed of a PLC and a touch screen, and a sensor sheet is provided on the side where the film sticking station 2 and the rotating platform 6 are close to each other to ensure that the movement of the film sticking station 2 and the rotation of the rotating platform 6 can be accurately controlled by the control console 4.

[0034] like Figure 2 As shown, the film laminating table 2 of this embodiment includes a sliding plate 21 for sliding back and forth along the Y axis toward the film laminating station 61 and a side plate 22 vertically fixed to one side of the sliding plate 21. A Y axis sliding seat 211 is provided at the bottom of the sliding plate 21, and a Y axis slide rail 11 is provided on the end surface of the working platform 1 for being embedded in the Y axis slide seat 211 and sliding back and forth. When the film laminating table 2 needs to move along the Y axis direction, the sliding plate 21 will slide smoothly in the slide rail.

[0035] like Figure 6As shown, the film separation assembly 9 of this embodiment includes a stripping plate 91 fixed on the inner wall of the side plate 22 and a plasma fan 92 arranged above the stripping plate 91 and fixed on the inner wall of the side plate 22. The film material and the base paper can be separated before laminating by the stripping plate 91 fixed on the inner wall of the side plate 22. A plasma fan 92 is arranged above the stripping plate 91, and a plurality of air holes are arranged below the fan to release plasma gas. These active gases can effectively eliminate or neutralize static electricity on the surface of the material, reduce the static attraction that may occur during the stripping and laminating process of the film, and at the same time, plasma can also clean the surface, remove tiny dust particles, and improve the cleanliness of the film.

[0036] like Figure 5 and Figure 6 As shown, the film pasting mechanism 3 of this embodiment includes a fixed plate 31 fixed on the inner wall of the side plate 22, a lifting plate 32 slidably connected to the fixed plate 31, and a pressing rubber roller 33 fixed to the bottom of the lifting plate 32. A film sensor 34 is provided on the side of the fixed plate 31 away from the lifting plate 32. Two sliding grooves 321 are vertically provided on the lifting plate 32, and two sliding blocks 311 adapted to the sliding grooves 321 are provided on the side of the fixed plate 31 facing the lifting plate 32. The sliding blocks 311 are embedded in the sliding grooves 321 and can slide up and down in the sliding grooves 321. The fixed plate 31 is installed on the inner wall of the side plate 22, providing a stable supporting infrastructure, and the lifting plate 32 is connected by the sliding blocks 311 embedded in the sliding grooves 321, and can move vertically. The film can be pressed and pasted in cooperation with the film sensor and the pressing rubber roller 33.

[0037] like Figure 2 As shown, a transverse platform 10 is further provided between the working platform 1 and the rotating platform 6 of this embodiment, and an X-axis sliding seat 101 is provided at the bottom of the transverse platform 10, and an X-axis slide rail 12 for being embedded in the X-axis sliding seat 101 and sliding back and forth is provided on the end surface of the working platform 1. When the program recognizes that the product is misaligned, the transverse platform 10 can respond quickly, and the X-axis sliding seat 101 cooperates with the X-axis slide rail 12 to achieve fine-tuning correction in the horizontal direction, and realize automatic correction of the misalignment during the film application process.

[0038] like Figure 4 As shown, the film attaching station and the preparation station 62 of this embodiment are provided with a heating plate 63 for heating the station to soften the film and a vacuum adsorbent 64 for adsorbing the wafer to prevent displacement. The heating plate 63 at the bottom of the station can continuously heat the station to soften the film, making it easier to attach more firmly without bubbles, while the vacuum adsorbent 64 adsorbs the wafer through the vacuum hole on the station to prevent the product from shifting during operation.

[0039] like Figure 2As shown, an upper guide roller group 71 is further provided between the feed reel 7 and the film laminating mechanism 3 of this embodiment, a lower guide roller group 81 is further provided between the waste film collection reel and the film laminating mechanism 3, and a film drawing roller 82 is provided around the lower guide roller group 81. The upper guide roller group 71 can ensure that the film material is smoothly, accurately and wrinkle-freely introduced from the feed reel 7 into the film laminating mechanism 3 to reduce the offset and improve the laminating accuracy. The lower guide roller group 81 accurately guides in front of the film collection reel to avoid confusion of waste film sheets and keep them neatly collected. The film drawing roller 82 is arranged on the side of the lower guide roller group 81, and its function is to adjust the film tension, control the film tension through appropriate pulling force, avoid being too tight or loose, ensure that there is no excessive stretching and contraction during laminating, and keep the laminating flat.

[0040] In summary, the beneficial effects of this embodiment are as follows: This embodiment realizes efficient alternation between the film pasting station 61 and the preparation station 62 through the alternating double stations of the rotating platform 6 and the automatic sliding of the film pasting mechanism 3, in cooperation with the control console 4 and the induction sheet, to achieve continuous and uninterrupted material processing, significantly improve production efficiency and avoid manual errors. The protective cover on the top of the working platform 1 effectively prevents dust from interfering with the film pasting process and maintains a dust-free film pasting environment. The plasma fan 92 can effectively eliminate static electricity, reduce the electrostatic adhesion between the film pasting sheet and the base paper, improve the separation efficiency, and clean the surface to maintain the cleanliness of the film. The heating plate of the station can heat and soften the film, making the fit tighter and free of bubbles, and the vacuum adsorption part 64 can prevent the wafer from shifting and improve the fitting accuracy. The horizontal movement platform 10 at the bottom of the rotating platform 6 can realize fine-tuning correction and realize automatic correction of deviation during the film pasting process. The feeding reel 7 at the rear side of the film laminating station 2 can deliver the film to the film laminating station 61 and the waste film collecting reel can collect the base paper, and cooperate with the upper and lower guide roller groups 81 to ensure the stable transmission of the film material.

[0041] The embodiments described above are only preferred implementation modes of the present utility model and cannot be used to limit the protection scope of the present utility model. Any non-substantial changes and modifications made by technicians in this field on the basis of the utility model shall fall within the protection scope of the present utility model.

Claims

1. A double-station laminating machine, characterized in that: The invention comprises a working platform, a film pasting table slidably mounted on an end surface of the working platform, a film pasting mechanism arranged on the film pasting table and a control console arranged at one side of the working platform and electrically connected to the working platform, wherein one end of the working platform is provided with a working port for feeding and discharging materials, a rotating platform is provided between the film pasting mechanism and the working port, a film pasting station for cooperating with the film pasting mechanism for automatic film pasting is provided on the end surface of the rotating platform close to the film pasting mechanism, a preparation station is provided on the end surface of the rotating platform close to the working port, the rotating platform can rotatably drive the film pasting station and the preparation station to alternately change positions, the film pasting table can slidably drive the film pasting mechanism to the top of the film pasting station, a feeding reel for feeding the film to the film pasting station and a waste film collecting reel for collecting base paper are also provided on the film pasting table on the side facing away from the rotating platform, and a film separating component for separating the film from the base paper is also provided between the feeding reel and the film pasting mechanism.

2. A double-station laminating machine according to claim 1, characterized in that: The film laminating table includes a sliding plate for sliding back and forth along the Y-axis toward the film laminating station and a side plate vertically fixed to one side of the sliding plate. A Y-axis sliding seat is provided at the bottom of the sliding plate, and a Y-axis slide rail is provided on the end surface of the working platform for being embedded in the Y-axis sliding seat and sliding back and forth.

3. A double-station laminating machine according to claim 2, characterized in that: The membrane separation component comprises a stripping plate fixedly arranged on the inner wall of the side plate and a plasma blower arranged above the stripping plate and fixedly arranged on the inner wall of the side plate.

4. A double-station laminating machine according to claim 3, characterized in that: The film laminating mechanism comprises a fixed plate fixed on the inner wall of the side plate, a lifting plate slidably connected to the fixed plate close to the rotating platform, and a pressing rubber roller fixed at the bottom of the lifting plate. A film sensing component is arranged on the side of the fixed plate away from the lifting plate.

5. A double-station laminating machine according to claim 4, characterized in that: The lifting plate is vertically provided with a sliding groove, and the fixed plate is provided with a sliding block adapted to the sliding groove on one side of the lifting plate. The sliding block is embedded in the sliding groove and can slide up and down in the sliding groove.

6. A double-station laminating machine according to claim 5, characterized in that: A transverse platform is also provided between the working platform and the rotating platform, an X-axis sliding seat is provided at the bottom of the transverse platform, and an X-axis slide rail is provided on the end surface of the working platform for being embedded in the X-axis sliding seat and sliding back and forth.

7. The double-station laminating machine according to claim 1, characterized in that: The film sticking station and the preparation station are provided with a heating plate for heating the station to soften the film and a vacuum adsorption part for adsorbing the wafer to prevent displacement.

8. The double-station laminating machine according to claim 1, characterized in that: An upper guide roller group is also provided between the feeding reel and the film pasting mechanism, a lower guide roller group is also provided between the waste film collecting reel and the film pasting mechanism, and a film drawing roller is provided around the lower guide roller group.

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