System for storing mixed liquid

Abstract

The utility model provides a system for storing mixed liquid, and relates to the technical field of semiconductor processing, and the system comprises a liquid mixing tank used for containing the mixed liquid; the shaft body is rotationally arranged in the liquid mixing tank, and the rotating axis is arranged in the vertical direction; the water spray nozzle is mounted on the circumferential side wall of the shaft body and is used for spraying a water source to clean the outer wall of the shaft body and the inner wall of the liquid mixing tank; and the water supply device is used for supplying water to the water spray nozzles. And the self-cleaning effect on the mixed liquid storage system is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing, and in particular, to a system for storing a mixed liquid. Background Art

[0002] Semiconductor polishing equipment is a kind of equipment for polishing and grinding semiconductor chips, which can remove pollution, oxide layer and shallow marks on the surface of semiconductor chips. Polishing equipment needs to use mixed liquid during the polishing process, and the mixed liquid used has the characteristics of high viscosity and strong adhesion.

[0003] Traditional semiconductor polishing equipment usually includes a mixing tank and a stirring device. The mixed liquid is stored in the mixing tank, and the mixed liquid is continuously stirred by the stirring device. On the one hand, the uniformity of the mixed liquid can be improved, and on the other hand, the substances in the mixed liquid are not easy to settle.

[0004] The mixing tank and stirring device need to be cleaned regularly by the staff. However, during the current cleaning work, the mixing tank needs to be manually disassembled and then manually cleaned, which involves the disassembly of fixing screws, detection sensors, inlet and outlet pipes, etc. The process is very complicated and time-consuming, which in turn causes inconvenience to the cleaning work of the staff. Utility Model Content

[0005] The purpose of the present application is to provide a system for storing mixed liquids, aiming to solve the defect of the related art that the cleaning work of the staff is inconvenient.

[0006] Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

[0007] According to a first aspect of the present application, a system for storing a mixed liquid is provided, comprising:

[0008] A mixing tank, used for holding the mixed liquid;

[0009] The shaft body is rotatably arranged inside the liquid mixing tank, and the rotation axis is arranged along the vertical direction;

[0010] A water spray nozzle is connected to a water supply device and is used for spraying cleaning liquid to clean the outer wall of the shaft body and the inner wall of the mixing tank.

[0011] In an exemplary embodiment of the present application, the shaft body is a hollow shaft, the water spray nozzle is connected to the interior of the shaft body, and the water supply device is connected to the interior of the shaft body.

[0012] In an exemplary embodiment of the present application, the water spray nozzle is a fan-shaped water spray nozzle, and a plurality of the water spray nozzles are provided, and the plurality of water spray nozzles are symmetrically arranged with the axis as the center.

[0013] In an exemplary embodiment of the present application, the water supply device is included, and the water supply device includes:

[0014] A rotary joint, rotatably connected to the top of the shaft body and communicated with the interior of the shaft body;

[0015] One end of the water delivery pipe is connected to the interior of the rotary joint.

[0016] In an exemplary embodiment of the present application, the water supply device further includes:

[0017] Water tank, used to store water;

[0018] A water pump has one end connected to the inside of the water tank and the other end connected to the water delivery pipe.

[0019] In an exemplary embodiment of the present application, a water pressure regulating valve is installed on the pipe wall of the water delivery pipe to control the pressure of water sprayed by the water spray nozzle.

[0020] In an exemplary embodiment of the present application, the maximum water pressure regulated by the water pressure regulating valve is not less than 0.3 MPa.

[0021] In an exemplary embodiment of the present application, a drain pipe is connected to the bottom of the mixing tank, and a drain valve is installed on the wall of the drain pipe.

[0022] In an exemplary embodiment of the present application, it further includes:

[0023] A driving device, used for outputting rotational power, wherein the driving device is located on a horizontal side of the liquid mixing tank;

[0024] The transmission device is used to transmit the rotational power output by the driving device to the shaft body and drive the shaft body to rotate. The transmission device is connected between the driving device and the shaft body.

[0025] In an exemplary embodiment of the present application, it further includes:

[0026] A sliding base, located below the liquid mixing tank, and the liquid mixing tank is placed on the sliding base;

[0027] The fixed base is located below the sliding base and is slidably connected with the sliding base in a horizontal direction.

[0028] The exemplary embodiments of the present application may have some or all of the following beneficial effects:

[0029] 1. In the system for storing mixed liquid provided in the exemplary embodiment of the present application, it is only necessary to transport water to the water nozzle through the water supply device, and then the water nozzle sprays the water source on the outer wall of the shaft and the inner wall of the mixing tank, so as to achieve the cleaning of the mixing tank and the shaft. This cleaning method does not require the staff to disassemble, greatly saving time and energy, and providing great convenience for the cleaning work of the staff.

[0030] 2. In the system for storing mixed liquid provided in the exemplary embodiment of the present application, the angle of the water mist sprayed out by the water nozzle can be adjusted through the water pressure regulating valve. The staff can adjust it according to actual needs, which can save water resources and improve the cleaning effect. This method is convenient and fast, and has high flexibility and practicality.

[0031] 3. In the system for storing mixed liquid provided in the exemplary embodiment of the present application, by adding a drain pipe and a drain valve, the cleaned sewage can be easily discharged from the mixed liquid tank door. The staff only needs to open the drain valve to easily complete the discharge process, which greatly improves the work efficiency. This method is not only convenient and fast, but also reduces the labor intensity of the staff and creates better working conditions for them.

[0032] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 A schematic diagram of a system for storing a mixed liquid in an embodiment of the present application is shown;

[0035] Figure 2 A cross-sectional view showing the internal structure of the liquid mixing tank in an embodiment of the present application is shown;

[0036] Figure 3 A cross-sectional view of the internal structure of a system for storing mixed liquid in an embodiment of the present application is shown.

[0037] Description of reference numerals:

[0038] 1. Mixing tank; 11. Connecting pipe; 2. Shaft; 21. Stirring rod; 3. Driving device; 31. Motor; 32. Reducer; 4. Transmission device; 41. Driving wheel; 42. Driven wheel; 43. Synchronous belt; 5. Water nozzle; 6. Water supply device; 61. Water pipe; 611. Water pressure regulating valve; 62. Rotary joint; 7. Drain pipe; 71. Drain valve; 8. Sliding base; 81. Positioning piece; 9. Fixed base; 91. Sliding track; 10. Top cover; 101. Funnel. DETAILED DESCRIPTION

[0039] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that the present application will be comprehensive and complete and fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their detailed descriptions will be omitted. In addition, the drawings are only schematic illustrations of the present application and are not necessarily drawn to scale.

[0040] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of the diagram to another component, these terms are used in this specification only for convenience, such as according to the direction of the examples in the drawings. It is understood that if the device of the diagram is turned upside down, the component described as "upper" will become the component "lower". When a structure is "on" other structures, it may mean that the structure is formed integrally on the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.

[0041] The terms "a", "an", "the" and "at least one" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express an open-ended inclusive meaning and mean that additional elements / components / etc. may exist in addition to the listed elements / components / etc.; the terms "first" and "second" are used merely as labels and are not intended to limit the quantity of their objects.

[0042] like Figure 1 and Figure 2 As shown, as an exemplary embodiment of the present application, a system for storing a mixed liquid includes:

[0043] A mixing tank 1, used for containing the mixed liquid;

[0044] The shaft body 2 is rotatably arranged inside the liquid mixing tank 1, and the rotation axis is arranged along the vertical direction;

[0045] The water spray nozzle 5 is connected to the water supply device 6 and is used to spray water to clean the outer wall of the shaft body 2 and the inner wall of the mixing tank 1 .

[0046] like Figure 2 and Figure 3 As shown, further, a driving device 3 is provided on one side of the mixing tank 1 for outputting rotational power; a transmission device 4 is also provided between the driving device 3 and the shaft body 2 for transmitting the rotational power output by the driving device 3 to the shaft body 2 and driving the shaft body 2 to rotate.

[0047] Furthermore, in the embodiment of the present application, the driving device 3 includes: a motor 31 and a reducer 32, the motor 31 and the reducer 32 are distributed in the vertical direction, and the motor 31 is located directly below the reducer 32, the output shaft of the motor 31 is connected to the reducer 32, the motor 31 generates rotational power and transmits the rotational power to the reducer 32, and after receiving the rotational power, the reducer 32 decelerates the rotational power and increases the torque before outputting it.

[0048] Further, in the embodiment of the present application, the transmission device 4 is arranged above the reducer 32 and the rotating shaft, and the transmission device 4 includes: a driving wheel 41, a driven wheel 42 and a synchronous belt 43. The driving wheel 41 is located directly above the reducer 32, and the output shaft of the reducer 32 is connected and fixed to the center of the driving wheel 41, the shaft body 2 is arranged along the axial direction of the driven wheel 42 and is connected and fixed to the driven wheel 42, and the synchronous belt 43 is wrapped around the driving wheel 41 and the driven wheel 42. The reducer 32 transmits the rotational power to the driving wheel 41, driving the driving wheel 41 to rotate, and the driving wheel 41 then drives the driven wheel 42 to rotate through the synchronous belt 43, and the driven wheel 42 then drives the shaft body 2 to rotate, thereby achieving the effect of providing rotational power for the shaft body 2.

[0049] In the embodiment of the present application, a beam arm shell is provided on the outer side of the transmission device 4 to protect the transmission device 4; a top cover 10 is provided above the mixing tank 1 to protect the mixed liquid in the mixing tank 1 so that impurities are not easily dropped into the mixing tank 1.

[0050] In order to further supply water to the water spray nozzle 5, the shaft body 2 is designed as a hollow shaft, and a stirring rod 21 is fixed at the bottom of the shaft body. The stirring rod 21 is used to stir the liquid in the mixing tank 1, and the shaft body 2 is connected to the inside of the water spray nozzle 5. The number and structure of the water spray nozzle 5 are not fixed. In the embodiment of the present application, a 180° fan-shaped nozzle is preferably used, and two water spray nozzles 5 are symmetrically installed on both sides of the shaft body 2 with the shaft body 2 as the center, and are both connected to the inside of the shaft body 2.

[0051] In the embodiment of the present application, the water supply device 6 includes a rotary joint 62 and a water pipe 61. The rotary joint 62 is installed and fixed above the beam arm shell. The top of the shaft body 2 passes through the top of the beam arm shell and is rotatably connected to the rotary joint 62. The other end of the water pipe 61 is connected to the rotary joint 62. The other end of the water pipe 61 can be directly connected to a water outlet device. The water outlet device is not restrictive, such as a water pipe 61, a faucet, etc. When cleaning, the water source is provided by the water outlet device, transported to the rotary joint 62 through the water pipe 61, and then introduced into the shaft body 2 by the rotary joint 62, and transported to the water nozzle 5 through the shaft body 2. The water is atomized by the water nozzle 5 to form a spray of a certain angle and area, and sprayed to the mixing tank 1 and the side wall of the shaft body 2 for cleaning. At the same time, the shaft body 2 is slowly rotated by the driving device 3 and the transmission device 4 to improve the cleaning effect.

[0052] In another embodiment of the present application, the water supply device 6 is additionally provided with a water tank and a water pump. The water pump is connected between the water tank and the water pipe 61, and the staff can store water in the water tank in advance. When cleaning work is required, the water pump can be turned on to pump water from the water tank and introduce it into the water pipe 61, and then the cleaning work can be carried out. This method improves the cleaning efficiency and provides more convenience for the cleaning work.

[0053] Furthermore, in order to improve the cleaning effect of the mixing tank 1 and the shaft body 2, a water pressure regulating valve 611 is installed on the pipe wall of the water supply pipe 61. The water pressure regulating valve 611 is used to adjust the pressure of water supplied to the water nozzle 5 to adjust the size of the water mist sprayed by the water nozzle 5. It can not only achieve a good cleaning effect, but also save water.

[0054] In the embodiment of the present application, the water pressure regulating valve 611 plays an important role in the embodiment of the present application, and can adjust the cleaning effect of the mixing tank 1 and the shaft body 2. Specifically, the water pressure regulating valve 611 can adjust the pressure of the water supplied to the water nozzle 5, so as to adjust the size of the water mist area sprayed by the water nozzle 5. According to different cleaning requirements, the staff can adjust the water pressure regulating valve 611, and adjust the water pressure range value to 0.1Mpa-0.3Mpa to achieve different degrees of cleaning of the mixing tank 1 and the shaft body 2. Specifically, when the water pressure value is 0.1Mpa, the angle of the water mist area sprayed by the water nozzle 5 is 90°; when the water pressure value is 0.15Mpa, the angle of the water mist area sprayed by the water nozzle 5 is 105°; when the water pressure value is 0.3Mpa, the angle of the water mist area sprayed by the water nozzle 5 is 115°. In this way, a good cleaning effect can be achieved, and the purpose of saving water can be achieved.

[0055] Furthermore, in order to facilitate the staff to drain the waste liquid in the mixing tank 1, a drain pipe 7 is connected to the bottom of the mixing tank 1, and a drain valve 71 is connected to the pipe wall of the drain pipe 7. When the cleaning is completed, the staff only needs to open the drain valve 71, and the waste liquid can be discharged through the drain pipe 7.

[0056] Furthermore, in order to facilitate the staff to know the remaining amount of the mixed liquid in the mixing tank 1, a connecting pipe 11 is provided on one side of the mixing tank 1, the bottom of the connecting pipe 11 is connected to the bottom of the mixing tank 1, and the top of the connecting pipe 11 is connected to the top of the mixing tank 1; according to the communicating vessel principle, the liquid level in the connecting pipe 11 is consistent with the liquid level in the mixing tank 1. In this way, the staff only needs to observe the liquid level in the connecting pipe 11 to know the liquid level of the mixed liquid in the mixing tank 1, so as to conveniently judge when it is necessary to add or replace the mixed liquid.

[0057] like Figure 1 As shown, further, in order to facilitate the staff to add the mixed liquid into the mixing tank 1, a funnel 101 is provided above the top cover 10, and the funnel 101 passes through the top cover 10 and is connected to the inside of the mixing tank 1. When the staff adds the mixed liquid into the mixing tank 1, they can add it directly through the funnel 101 without opening the top cover 10, which effectively simplifies the work of the staff to add the mixed liquid.

[0058] In order to further facilitate the staff to add the mixed liquid, in the embodiment of the present application, the semiconductor mixed liquid storage system also includes a fixed base 9 and a sliding base 8, the mixed liquid tank 1 is placed above the sliding base 8, the fixed base 9 is located below the sliding base 8, the fixed base 9 is fixedly connected to the bottom plate in the polishing equipment, and a sliding track 91 is installed between the inner wall of the sliding base 8 and the outer wall of the fixed base 9, which is used for the sliding base 8 and the fixed base 9 to be slidably connected; of course, the sliding mode of the sliding base 8 and the fixed base 9 is not restrictive, and the lower surface of the sliding base 8 can also be slidably connected to the upper surface of the fixed base 9. It can be understood that as long as it can satisfy the sliding base 8 to slide out from the top of the fixed base 9 in the horizontal direction. When the staff needs to add the mixed liquid to the mixed liquid tank 1, the sliding base 8 can be slid outward, and the mixed liquid tank 1 can be moved to the outside of the polishing equipment, so that there is no obstacle above the mixed liquid tank 1, which further provides convenience for the staff to add the mixed liquid to the mixed liquid tank 1.

[0059] Those skilled in the art will easily think of other embodiments of the present application after considering the specification and practicing the embodiments of the present application. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that the present application does not apply for. The specification and embodiments are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the appended claims.

Claims

1. A system for storing a mixed liquid, characterized in that: include: A liquid mixing tank (1), used for containing the mixed liquid; A shaft body (2) is rotatably arranged inside the liquid mixing tank (1), and the rotation axis is arranged along the vertical direction; The water spray nozzle (5) is connected to the water supply device (6) and is used to spray cleaning liquid to clean the outer wall of the shaft body (2) and the inner wall of the mixing tank (1).

2. A system for storing a mixed liquid according to claim 1, characterized in that: The shaft body (2) is a hollow shaft, the water spray nozzle (5) is connected to the interior of the shaft body (2), and the water supply device (6) is connected to the interior of the shaft body (2).

3. A system for storing a mixed liquid according to claim 1, characterized in that: The water spray nozzle (5) is a fan-shaped water spray nozzle (5), and a plurality of the water spray nozzles (5) are provided. The plurality of water spray nozzles (5) are symmetrically arranged with the shaft body (2) as the center.

4. A system for storing a mixed liquid according to claim 1, characterized in that: The water supply device (6) comprises: A rotary joint (62) is rotatably connected to the top of the shaft body (2) and is communicated with the interior of the shaft body (2); One end of the water delivery pipe (61) is connected to the interior of the rotary joint (62).

5. A system for storing mixed liquid according to claim 4, characterized in that: The water supply device (6) further comprises: Water tank, used to store water; The water pump has one end connected to the inside of the water tank and the other end connected to the water delivery pipe (61).

6. A system for storing mixed liquid according to claim 4, characterized in that: A water pressure regulating valve (611) is installed on the wall of the water delivery pipe (61) for controlling the pressure of water sprayed by the water spray nozzle (5).

7. A system for storing a mixed liquid according to claim 6, characterized in that: The maximum water pressure regulated by the water pressure regulating valve (611) is not less than 0.3 MPa.

8. A system for storing a mixed liquid according to claim 1, characterized in that: The bottom of the liquid mixing tank (1) is connected to a drainage pipe (7), and a drainage valve (71) is installed on the pipe wall of the drainage pipe (7).

9. A system for storing a mixed liquid according to claim 1, characterized in that: Also includes: A driving device (3) for outputting rotational power, wherein the driving device (3) is located on a horizontal side of the liquid mixing tank (1); The transmission device (4) is used to transmit the rotational power output by the driving device (3) to the shaft body (2) and drive the shaft body (2) to rotate. The transmission device (4) is connected between the driving device (3) and the shaft body (2).

10. A system for storing a mixed liquid according to claim 1, characterized in that: Also includes: A sliding base (8) is located below the liquid mixing tank (1), and the liquid mixing tank (1) is placed on the sliding base (8); The fixed base (9) is located below the sliding base (8) and is slidably connected to the sliding base (8) in a horizontal direction.

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