Roller structure of vacuum coating equipment and conveying device

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a roller structure of vacuum coating equipment and a conveying device, and aims to solve the problem that the coating quality and the service life of a support plate are influenced by the abrasion of the support plate caused by the friction between a flange of the conventional roller and the support plate. The utility model provides a roller structure of vacuum coating equipment. The roller structure comprises a roller body and a guide component, the plurality of guide assemblies are uniformly distributed around the axis of the roller body; the guide assembly comprises a guide wheel, and the guide wheel can rotate around the axis of the guide wheel; the axis of the guide wheel is perpendicular to the axis of the roller body. According to the utility model, the guide assemblies which are annularly and uniformly distributed are used for replacing flanges, and the guide wheels rotate to generate rolling friction with the side edges of the carrier plate, so that the sliding friction between the carrier plate and the flanges is avoided, and the abrasion degree of the carrier plate is reduced; and the guide wheels are in linear contact with the carrier plate, so that compared with surface contact of flanges, the contact area is smaller, the abrasion area is correspondingly reduced, and the abrasion of the carrier plate is further relieved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a roller structure and a conveying device of vacuum coating equipment. Background Art

[0002] At present, the vacuum coating carrier is mainly driven in each cavity by rollers placed in the cavity. Specifically, the silicon wafer is placed on the carrier, and the carrier is mainly moved by the rotation of the roller to complete the movement in each cavity. However, in the actual high-speed rotation process, due to repeated friction between the outer side of the carrier frame and the retaining edge of the roller, the side of the carrier frame will be severely worn, and even the carrier will shake, causing the silicon wafer to shift, and then causing coating abnormalities or silicon wafer damage, which not only seriously affects the production rhythm, but also damages the structural flatness and service life of the carrier. Utility Model Content

[0003] The utility model aims to provide a roller structure and a conveying device for vacuum coating equipment to solve the problem that friction between the retaining edge of the existing roller and the carrier causes wear of the carrier, thereby affecting the coating quality and the life of the carrier.

[0004] In order to solve the above technical problems, the technical solution provided by the utility model is:

[0005] The utility model provides a roller structure of vacuum coating equipment, comprising a roller body and a guide assembly;

[0006] The plurality of guide assemblies are evenly distributed around the axis of the roller body;

[0007] The guide assembly includes a guide wheel, and the guide wheel can rotate around its own axis;

[0008] The axis of the guide wheel is perpendicular to the axis of the roller body.

[0009] Furthermore, the guide assembly also includes a pin shaft, the pin shaft is connected to the roller body, and the guide wheel is sleeved on the pin shaft and rotatably connected to the pin shaft.

[0010] Furthermore, the guide assembly also includes a gasket, which is sleeved on the pin shaft and arranged between the guide wheel and the roller body.

[0011] Furthermore, the roller body is provided with a mounting hole, and a plurality of the mounting holes are arranged around the axis of the roller body;

[0012] The pin shaft is inserted into the mounting hole.

[0013] Furthermore, the guide assembly also includes a protective sleeve, which is sleeved on the pin shaft and arranged at an end of the pin shaft away from the roller body.

[0014] Furthermore, the roller structure of the vacuum coating equipment further includes a protective frame, and the protective frame is sleeved on the roller body;

[0015] One end of the pin shaft away from the roller body is inserted into the protective frame.

[0016] Furthermore, the roller structure of the vacuum coating equipment also includes a sleeve, which is sleeved on the pin shaft and inserted into the mounting hole, and one end of the gasket away from the guide wheel abuts against the sleeve.

[0017] Furthermore, the guide assembly includes at least two guide wheels, and the two guide wheels are coaxially arranged.

[0018] Furthermore, the guide assembly also includes a spacer sleeve, which is arranged between two adjacent guide wheels and coaxially with the guide wheels.

[0019] Another aspect of the present invention provides a conveying device for vacuum coating equipment, comprising the roller structure of the vacuum coating equipment mentioned above.

[0020] Based on the above technical solutions, the technical effects that can be achieved by the utility model are:

[0021] The roller structure of the vacuum coating equipment provided by the utility model comprises a roller body and a guide assembly; a plurality of guide assemblies are evenly distributed around the axis of the roller body; the guide assembly comprises a guide wheel, and the guide wheel can rotate around its own axis; the axis of the guide wheel is perpendicular to the axis of the roller body.

[0022] The utility model replaces the retaining edge with a circular evenly distributed guide component, and utilizes the rotation of the guide wheel to generate rolling friction with the side of the carrier plate, thereby avoiding sliding friction between the carrier plate and the retaining edge and reducing the wear degree of the carrier plate; and the guide wheel and the carrier plate are in line contact, and compared with the surface contact of the retaining edge, the contact area is smaller, and the wear area is correspondingly reduced, further slowing down the wear of the carrier plate. The setting of the guide wheel not only ensures the limit of the carrier plate, but also reduces the wear of the carrier plate, ensures the structural flatness of the carrier plate, reduces the replacement frequency of the carrier plate, effectively guarantees the production rhythm, improves the service life of the carrier plate, and ensures the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic diagram of a roller structure of a vacuum coating device provided by an embodiment of the utility model;

[0025] Figure 2 A cross-sectional view of a roller structure of a vacuum coating device provided by an embodiment of the utility model;

[0026] Figure 3 A schematic diagram of a roller structure of another vacuum coating device provided by an embodiment of the utility model;

[0027] Figure 4 A cross-sectional view of a roller structure of another vacuum coating device provided by an embodiment of the utility model;

[0028] Figure 5 A schematic diagram of a roller structure of another vacuum coating device provided by an embodiment of the utility model;

[0029] Figure 6 A cross-sectional view of a roller structure of another vacuum coating device provided by an embodiment of the utility model;

[0030] Figure 7 A front view of a roller structure of another vacuum coating device provided by an embodiment of the utility model;

[0031] Figure 8 It is a structural schematic diagram of an existing carrier conveying method;

[0032] Fig. 9 It is a three-dimensional schematic diagram of an existing carrier conveying method.

[0033] Icon: 100- roller body; 200- guide assembly; 300- protective frame; 400- sleeve; 110- mounting hole; 210- guide wheel; 220- pin shaft; 230- gasket; 240- protective sleeve; 250- spacer; 10- carrier plate. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0035] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0036] During the actual high-speed rotation process, frictional contact of varying degrees will repeatedly occur between the outer side of the carrier 10 frame and the guard edge of the roller, resulting in severe wear on the side of the carrier 10 frame, and even causing the carrier 10 to shake, resulting in the position of the silicon wafer shifting, and further causing coating abnormalities or silicon wafer damage, which not only seriously affects the production rhythm, but also damages the structural flatness and service life of the carrier.

[0037] In view of this, the utility model provides a roller structure of a vacuum coating equipment, including a roller body 100 and a guide assembly 200; a plurality of guide assemblies 200 are evenly distributed around the axis of the roller body 100; the guide assembly 200 includes a guide wheel 210, and the guide wheel 210 can rotate around its own axis; the axis of the guide wheel 210 is perpendicular to the axis of the roller body 100.

[0038] The utility model replaces the ribs with the circularly evenly distributed guide assembly 200, and utilizes the rotation of the guide wheel 210 to generate rolling friction with the side of the carrier 10, thereby avoiding the sliding friction between the carrier 10 and the ribs and reducing the wear degree of the carrier 10; and the guide wheel 210 and the carrier 10 are in line contact, and compared with the surface contact of the ribs, the contact area is smaller, and the wear area is correspondingly reduced, further slowing down the wear of the carrier 10. The setting of the guide wheel 210 not only ensures the position limitation of the carrier 10, but also reduces the wear of the carrier 10, ensures the structural flatness of the carrier 10, reduces the replacement frequency of the carrier 10, effectively guarantees the production rhythm, improves the service life of the carrier 10, and ensures the coating quality.

[0039] The following combination Figure 1-Figure 9 , the roller structure of the vacuum coating equipment provided in this embodiment is described in detail.

[0040] The roller structure of the vacuum coating equipment provided in this embodiment includes a roller body 100 and a guide assembly 200. Figure 1As shown, a plurality of guide assemblies 200 are evenly distributed around the axis of the roller body 100. The guide assembly 200 includes a guide wheel 210 and a pin 220, the pin 220 is connected to the roller body 100, the guide wheel 210 is sleeved on the pin 220 and can rotate around its own axis to achieve line contact and rolling friction with the side of the carrier 10, and the axis of the guide wheel 210 is perpendicular to the axis of the roller body 100. Specifically, the axes of the plurality of guide wheels 210 are in the same plane so that the guide wheels 210 form a guiding plane.

[0041] In contrast, Figure 8 , Fig. 9 As shown, the existing roller adopts a rib structure, and two groups of rollers are symmetrically arranged and respectively located on both sides of the carrier 10 to transport the carrier 10 and limit the carrier 10. During the rolling process of the rollers, the side of the carrier 10 will collide and rub with the rib of the roller, and the contact form is surface contact, which will cause more serious wear and even cause shaking during use; at the same time, the wear of the material of the carrier 10 itself will cause the strength of the carrier 10 to decrease and cause deformation, thereby affecting the flatness of the carrier 10 and the coating quality. The roller structure of the vacuum coating equipment provided in this embodiment replaces the rib with a guide wheel 210 that can rotate around its own axis, realizes the reduction of the contact area and replaces the sliding friction with rolling friction, significantly reduces the wear speed and the frequency of severe wear and even shaking of the carrier 10, ensures the structural flatness of the carrier 10, thereby improving the service life of the carrier 10, greatly extending the replacement cycle of the carrier 10, and ensuring the coating quality and production rhythm.

[0042] In an optional solution of this embodiment, the guide wheel 210 is mounted on the pin 220 and is rotatably connected to the pin 220, and the pin 220 is inserted into the roller body 100. Figure 2 As shown, the roller body 100 is provided with a mounting hole 110, and a plurality of mounting holes 110 are arranged around the axis of the roller body 100, and the pin 220 is inserted into the mounting hole 110. Optionally, the mounting hole 110 is set as a threaded hole, and the pin 220 is inserted into the mounting hole 110 and threadedly connected to the mounting hole 110. In addition, the pin 220 can also be connected to the roller body 100 by welding.

[0043] In the optional solution of this embodiment, the guide wheel 210 can be set as a rolling bearing, specifically, a ball bearing can be selected. In addition, the guide wheel 210 can also be set as a structure in which a bearing sleeve and a rolling bearing cooperate, that is, the rolling bearing is sleeved on the pin 220, and the bearing sleeve is sleeved on the bearing. When rotating, the bearing sleeve and the outer ring of the rolling bearing rotate together. At this time, the bearing sleeve can be made of nylon, polyurethane and other materials to ensure strength and reduce wear on the carrier 10. In addition, the bearing sleeve can also be set as a steel wheel or a steel wheel outer circle with rubber.

[0044] In this embodiment, in order to avoid direct contact between the guide wheel 210 and the roller body 100, which causes wear and affects the smooth rotation of the guide wheel 210, the guide assembly 200 further includes a gasket 230, which is sleeved on the pin 220 and arranged between the guide wheel 210 and the roller body 100. Specifically, the gasket 230 is an annular structure and can be made of nylon, steel, copper and other materials.

[0045] In this embodiment, in order to prevent the guide wheel 210 from being disengaged from the pin shaft 220, the guide assembly 200 further includes a protective sleeve 240, which is sleeved on the pin shaft 220 and disposed at one end of the pin shaft 220 away from the roller body 100. Figure 2 Specifically, the protective sleeve 240 can be set as an elastic retaining ring for the shaft, and the pin shaft 220 is provided with a corresponding slot to prevent the guide wheel 210 from falling out. Further, in order to prevent the guide wheel 210 from axially moving and causing sliding friction with the carrier plate 10, as well as unstable operation and noise caused by the movement, the protective sleeve 240 abuts against the guide wheel 210, thereby cooperating with the gasket 230 to axially position the guide wheel 210.

[0046] In an optional solution of this embodiment, to ensure the stability of the pin 220, the roller structure of the vacuum coating equipment further includes a sleeve 400, which is sleeved on the pin 220, one end of which is inserted into the mounting hole 110, and the other end abuts against the gasket 230. Accordingly, the mounting hole 110 is set as a stepped hole. The setting of the sleeve 400 can increase the limit of the pin 220. When the pin 220 is connected to the roller body 100 through a threaded connection, the gap of the threaded connection can be eliminated to ensure that the axis of the pin 220 is perpendicular to the axis of the roller body 100. At this time, the mounting hole 110 is divided into a light hole section and a threaded section, and the sleeve 400 is inserted into the light hole section; when the pin 220 is inserted into the mounting hole 110, the use of the sleeve 400 can make the pin 220 more firmly installed. At this time, the sleeve 400 and the mounting hole 110 are transition fit or interference fit to eliminate the gap between the pin 220 and the mounting hole 110 and increase the friction between the various parts to prevent the pin 220 from coming out. In addition, the use of the sleeve 400 can reduce the loss of the pin 220, and only the sleeve 400 needs to be replaced when replacing.

[0047] In an optional solution of this embodiment, the guide assembly 200 includes at least two guide wheels 210, and the two guide wheels 210 are coaxially arranged. Figure 3 , Figure 4 By setting a plurality of guide wheels 210, the height of the guide wheels 210 can be increased to ensure the adaptation to the thickness of the carrier 10 and the stability of the contact; in addition, the plurality of guide wheels 210 are arranged at intervals along their own axis direction to further reduce the contact area between the guide assembly 200 and the carrier 10.

[0048] In this embodiment, when multiple guide wheels 210 are provided, the guide assembly 200 further includes a spacer 250, which is provided between two adjacent guide wheels 210 and coaxially with the guide wheels 210, so as to avoid mutual interference between the two guide wheels 210 and increase the spacing between the guide wheels 210. Compared with using one guide wheel 210, using multiple guide wheels 210 arranged at intervals can further reduce the contact area between the side of the carrier 10 and the guide wheel 210, while ensuring stable operation, thereby further reducing wear.

[0049] In an optional solution of this embodiment, the roller structure of the vacuum coating equipment further includes a protective frame 300, and the protective frame 300 is mounted on the roller body 100. Figure 5 , Figure 6 As shown, the end of the pin 220 away from the roller body 100 is inserted into the protective frame 300. The pin 220 is supported at two points by the protective frame 300, so that the pin 220 is prevented from forming a cantilever structure, and the stability of the pin 220 is ensured, thereby ensuring that the axis of the guide wheel 210 is located in the same vertical plane to ensure the stability of the guide. The protective frame 300 can be connected to the roller body 100 through the pin 220 to achieve axial positioning to prevent the protective frame 300 from falling out, and can also be connected by welding, screw connection, etc.

[0050] Specifically, Figure 7 As shown, the protection frame 300 is provided with mounting grooves evenly distributed around its own axis, the mounting grooves are in a fan-shaped structure, and the guide wheel 210 is arranged in the mounting grooves.

[0051] Based on the roller structure of the vacuum coating equipment provided in this embodiment, a conveying device of the vacuum coating equipment is proposed, including the roller structure of the vacuum coating equipment and a conveying shaft. Specifically, an axial hole is provided on the roller body 100, and the conveying shaft is inserted into the axial hole and connected to the roller body 100. When working, the conveying shaft rotates around its own axis to drive the roller body 100 to rotate. The roller structures of the two groups of vacuum coating equipment are symmetrically arranged on both sides of the carrier 10, and the roller structures of each group of vacuum coating equipment include a plurality of roller structures of the vacuum coating equipment arranged at intervals along the conveying direction.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A roller structure of a vacuum coating device, characterized in that: It includes a roller body and a guide assembly; The plurality of guide assemblies are evenly distributed around the axis of the roller body; The guide assembly includes a guide wheel, and the guide wheel can rotate around its own axis; The axis of the guide wheel is perpendicular to the axis of the roller body.

2. The roller structure of the vacuum coating equipment according to claim 1, characterized in that: The guide assembly also includes a pin shaft, which is connected to the roller body, and the guide wheel is sleeved on the pin shaft and rotatably connected to the pin shaft.

3. The roller structure of the vacuum coating equipment according to claim 2, characterized in that: The guide assembly also includes a gasket, which is sleeved on the pin shaft and arranged between the guide wheel and the roller body.

4. The roller structure of the vacuum coating equipment according to claim 3, characterized in that: The roller body is provided with mounting holes, and a plurality of the mounting holes are arranged around the axis of the roller body; The pin shaft is inserted into the mounting hole.

5. The roller structure of the vacuum coating equipment according to claim 4, characterized in that: It also includes a sleeve, which is sleeved on the pin shaft and inserted into the mounting hole, and one end of the gasket away from the guide wheel abuts against the sleeve.

6. The roller structure of the vacuum coating equipment according to claim 3, characterized in that: The guide assembly also includes a protective sleeve, which is sleeved on the pin shaft and arranged at an end of the pin shaft away from the roller body.

7. The roller structure of the vacuum coating equipment according to claim 2, characterized in that: It also includes a protective frame, which is sleeved on the roller body; One end of the pin shaft away from the roller body is inserted into the protective frame.

8. The roller structure of the vacuum coating equipment according to claim 1, characterized in that: The guide assembly includes at least two guide wheels, and the two guide wheels are coaxially arranged.

9. The roller structure of the vacuum coating equipment according to claim 8, characterized in that: The guide assembly also includes a spacer sleeve, which is arranged between two adjacent guide wheels and coaxially with the guide wheels.

10. A conveying device for vacuum coating equipment, characterized in that: A roller structure comprising the vacuum coating equipment as described in any one of claims 1 to 9.

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