Water flow guide structure of tail gas treatment device

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to a water flow guide structure of a tail gas treater. The device comprises a vertically-arranged shell, the top of the shell is open, an annular flow guide disc is arranged on the peripheral face of the top of the shell, and the flow guide disc is communicated with a water inlet pipe; the shell comprises a first straight plate, a second straight plate and an arc-shaped sealing plate, the first straight plate is vertically arranged, the upper end face of the first straight plate is connected with the periphery of the lower end of the flow guide disc, the arc-shaped sealing plate is bent downwards in an arc shape, the upper end of the arc-shaped sealing plate is connected with the first straight plate, and the second straight plate which is vertically and downwards arranged is arranged at the lower end of the arc-shaped sealing plate. The arc-shaped sealing plate is bent in an arc-shaped transition mode and connected with the second straight plate, so that the middle of the shell is bent inwards, and the distance between the upper portion of the shell and the lower portion of the shell is smaller than that between the upper portion of the shell and the lower portion of the shell. The device solves the problem that an internal coating of equipment can be damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, specifically to a water flow guiding structure of a tail gas processor. Background Art

[0002] Semiconductor tail gas contains a large amount of polluting gases and dust. If these tail gases are directly discharged without treatment, it will cause serious pollution problems. Therefore, semiconductor tail gas must be purified and treated to meet the atmospheric pollutant discharge standards before being discharged.

[0003] In the equipment for semiconductor tail gas treatment, the gas inside the shell is in a high-temperature state, which will damage the internal coating of the equipment and thus affect the service life of the equipment. Summary of the Utility Model

[0004] The utility model provides a water flow guiding structure of a tail gas processor to solve the problems in related technologies, and this device solves the problem of damaging the internal coating of the equipment.

[0005] To solve the above problems, the following technical solutions are provided:

[0006] The water flow guiding structure of the tail gas processor of the utility model includes a vertically arranged shell, the top of the shell is open, an annular guide plate is arranged on the outer peripheral surface of the top of the shell, and a water inlet pipe is communicated with the guide plate; the shell includes a first straight plate, a second straight plate and an arc-shaped sealing plate, the first straight plate is vertically arranged, the upper end surface of the first straight plate is connected to the periphery of the lower end of the guide plate, the arc-shaped sealing plate is bent downward in an arc shape, the upper end of the arc-shaped sealing plate is connected to the first straight plate, the lower end of the arc-shaped sealing plate is provided with a vertically downward arranged second straight plate, and the arc-shaped sealing plate is connected to the second straight plate through an arc-shaped transition bend, so that the middle part of the shell is arranged in an inwardly curved shape, and the distance between the upper part of the shell is less than the distance between the lower part of the shell.

[0007] In the above solution, through the setting of the shell, after water is introduced into the guide plate from the water inlet pipe and then flows to the shell, the water flow forms a vortex-shaped water curtain attached to the inner wall of the shell. The water curtain rotates evenly on the inner surface of the product, and most of the heat and dust of the passing gas will be carried away by the water curtain, playing a role in protecting the equipment and extending the service life of the equipment, thus solving the problem of damaging the internal coating of the equipment.

[0008] The guide plate includes a first annular ring and a second annular ring. The first annular ring is located on the side close to the shell, and the second annular ring is located on the side far from the shell. The height of the first annular ring is lower than the height of the second annular ring, and the side of the first annular ring close to the shell is inclined inward and connected to the inner wall of the shell.

[0009] In the above solution, through the arrangement of the flow guide plate, after water enters the flow guide plate, since the height of the first annular ring is lower than that of the second annular ring and the side surface of the first annular ring is inclined, the water flow can flow through the first annular ring and into the shell.

[0010] The lower surface of the flow guide plate is connected with a mounting bracket, and the mounting bracket is provided with a protruding portion extending outwards.

[0011] In the above solution, through the arrangement of the mounting bracket, it is convenient for installation.

[0012] There are two water inlet pipes, and the water inlet pipes are symmetrically arranged along the central axis of the shell.

[0013] In the above solution, through the arrangement of the water inlet pipes, they are used for water to enter the shell.

[0014] Teflon coatings are sprayed on both the inner and outer surfaces of the shell and the flow guide plate.

[0015] In the above solution, through the arrangement of the Teflon coating, the Teflon coating has non-stick properties, which can reduce the adhesion of substances on its surface, and the Teflon coating has good wear resistance, which increases the service life of this structure.

[0016] Adopting the above solution, there are the following specific advantages:

[0017] 1. Since the water flow guiding structure of the tail gas processor of the present utility model includes a vertically arranged shell with an open top, an annular flow guide plate is arranged on the outer peripheral surface of the top of the shell, a water inlet pipe is communicated with the flow guide plate, the shell contains a first straight plate, a second straight plate and an arc-shaped sealing plate, the first straight plate is vertically arranged, the upper end surface of the first straight plate is connected to the periphery of the lower end of the flow guide plate, the arc-shaped sealing plate is bent downward in an arc shape, the upper end of the arc-shaped sealing plate is connected to the first straight plate, the lower end of the arc-shaped sealing plate is provided with a vertically downward arranged second straight plate, and the arc-shaped sealing plate is connected to the second straight plate through an arc-shaped transition bend, so that the middle part of the shell is bent inward, the distance between the upper part of the shell is less than the distance between the lower part of the shell. After water is introduced from the water inlet pipe to the flow guide plate and then flows to the shell, the water flow forms a vortex-shaped water curtain attached to the inner wall of the shell. The water curtain rotates evenly on the inner surface of the product, and the passing gas will be taken away most of the heat and dust by the water curtain, which plays a role in protecting the equipment, prolonging the service life of the equipment, and reducing the damage to the inner coating of the equipment.

[0018] 2. The flow guide plate includes a first annular ring and a second annular ring. The side of the first annular ring close to the housing is arranged to incline inward and is connected to the inner wall of the housing. After water enters the flow guide plate, due to the height of the first annular ring being lower than that of the second annular ring and the side surface of the first annular ring being inclined, the water flow can flow through the first annular ring and into the housing. The lower surface of the flow guide plate is connected with a mounting bracket for easy installation. There are two water inlet pipes for water to enter the housing. The inner and outer surfaces of the housing and the flow guide plate are both sprayed with a Teflon coating. The Teflon coating has non-stick properties, which can reduce the adhesion of substances on its surface, and the Teflon coating has good wear resistance, which increases the service life of this structure. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of the water flow guiding structure of the tail gas processor;

[0020] Figure 2 It is a top view of the water flow guiding structure of the tail gas processor;

[0021] Figure 3 It is the water flow guiding structure of the tail gas processor Figure 2 The sectional view taken along A-A in;

[0022] Figure 4 It is a front view of the water flow guiding structure of the tail gas processor;

[0023] Description of the reference numerals: 1. Housing; 101. First straight plate; 102. Second straight plate; 103. Arc-shaped sealing plate; 2. Flow guide plate; 201. First annular ring; 202. Second annular ring; 3. Water inlet pipe; 4. Mounting bracket; 401. Protruding part. Detailed Embodiment

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] Such as Figures 1 to 4As shown in the figure, the water flow guiding structure of the tail gas processor of the present utility model includes a vertically arranged housing 1 with an open top. An annular diversion plate 2 is provided on the outer peripheral surface of the top of the housing 1. There are two water inlet pipes 3 connected to the diversion plate 2, and the water inlet pipes 3 are symmetrically arranged along the central axis of the housing 1. The housing 1 includes a first straight plate 101, a second straight plate 102, and an arc-shaped sealing plate 103. The first straight plate 101 is vertically arranged, and the upper end surface of the first straight plate 101 is connected to the periphery of the lower end of the diversion plate 2. The arc-shaped sealing plate 103 is bent downward in an arc shape, the upper end of the arc-shaped sealing plate 103 is connected to the first straight plate 101, and the lower end of the arc-shaped sealing plate 103 is provided with a vertically downward arranged second straight plate 102. The arc-shaped sealing plate 103 is connected to the second straight plate 102 through an arc-shaped transition bend, so that the middle part of the housing 1 is bent inward, and the distance between the upper part and the lower part of the housing 1 is smaller. After the water is introduced into the diversion plate 2 through the water inlet pipe 3, it then flows to the housing 1, and the water flow forms a vortex-shaped water curtain attached to the inner wall of the housing 1. The water curtain rotates evenly on the inner surface of the product, and most of the heat and dust of the passing gas are carried away by the water curtain, which protects the equipment and extends the service life of the equipment, and is beneficial to protecting the inner coating of the equipment.

[0026] The diversion plate 2 includes a first annular ring 201 and a second annular ring 202. The first annular ring 201 is located on the side close to the housing 1, and the second annular ring 202 is located on the side far from the housing 1. The height of the first annular ring 201 is lower than that of the second annular ring 202, and the side surface of the first annular ring 201 close to the housing 1 is inclined inward and connected to the inner wall of the housing 1. Through the setting of the diversion plate 2, after the water enters the diversion plate 2, due to the fact that the height of the first annular ring 201 is lower than that of the second annular ring 202 and the side surface of the first annular ring 201 is inclined, the water flow can flow through the housing 1 from the first annular ring 201.

[0027] The lower surface of the diversion plate 2 is connected with a mounting bracket 4, and the mounting bracket 4 is provided with a protruding part 401 extending outward for easy installation.

[0028] The inner and outer surfaces of the housing 1 and the diversion plate 2 are both sprayed with a Teflon coating. The Teflon coating has non-stick properties, which can reduce the adhesion of substances on its surface, and the Teflon coating has good wear resistance, which increases the service life of this structure.

[0029] During operation, water is introduced into the diversion plate 2 through the water inlet pipe 3. The height of the first annular ring 201 is lower than that of the second annular ring 202, and the water flows downward along the side wall of the first annular ring 201 and flows into the housing 1. The water flow forms a vortex-shaped water curtain attached to the inner wall of the housing 1. The water curtain rotates evenly on the inner surface of this water flow guiding structure, and the water curtain will carry away most of the heat and dust in the high-temperature dust gas.

[0030] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In the description of the present utility model, unless otherwise specified and defined, it should be noted that the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the communication inside two elements. It can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0031] The above are only the preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. The water flow guiding structure of the exhaust gas processor is characterized by: The invention comprises a shell (1) arranged in a vertical manner, the top of the shell (1) being open, an annular guide plate (2) being arranged on the outer peripheral surface of the top of the shell (1), and a water inlet pipe (3) being connected to the guide plate (2); the shell (1) comprising a first straight plate (101), a second straight plate (102) and an arc-shaped sealing plate (103), the first straight plate (101) being arranged vertically, the upper end surface of the first straight plate (101) and the lower end periphery of the guide plate (2) being connected to each other. The arc-shaped sealing plate (103) is connected to the first straight plate (101), the arc-shaped sealing plate (103) is bent downward in an arc shape, the upper end of the arc-shaped sealing plate (103) is connected to the first straight plate (101), and the lower end of the arc-shaped sealing plate (103) is provided with a second straight plate (102) arranged vertically downward, and the arc-shaped sealing plate (103) is connected to the second straight plate (102) in an arc-shaped transition bend, so that the middle part of the shell (1) is arranged inwardly curved, and the distance of the upper part of the shell (1) is smaller than the distance of the lower part of the shell (1).

2. The water flow guide structure of the exhaust gas processor according to claim 1, characterized in that: The guide plate (2) comprises a first annular ring (201) and a second annular ring (202); the first annular ring (201) is located on a side close to the shell (1), and the second annular ring (202) is located on a side away from the shell (1); the height of the first annular ring (201) is lower than the height of the second annular ring (202).

3. The water flow guide structure of the exhaust gas processor according to claim 2, characterized in that: The first annular ring (201) is arranged inwardly inclined close to the side surface of the shell (1) and is connected to the inner wall of the shell (1).

4. The water flow guide structure of the exhaust gas processor according to claim 1, characterized in that: The lower surface of the guide plate (2) is connected to a mounting bracket (4), and the mounting bracket (4) is provided with a protruding portion (401) extending outwards.

5. The water flow guide structure of the exhaust gas processor according to claim 1, characterized in that: There are two water inlet pipes (3), and the water inlet pipes (3) are symmetrically arranged along the central axis of the shell (1).

6. The water flow guide structure of the exhaust gas processor according to claim 1, characterized in that: The inner and outer surfaces of the shell (1) and the guide plate (2) are sprayed with Teflon coating.

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