Protective cover, furnace tube base and furnace tube equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a protective cover, a furnace tube base and furnace tube equipment. The protection body is made of a non-metal material; the protection body is provided with a protection surface, and the protection surface is used for being attached to the side face, located in the process cavity, of the base body. Optionally, a through hole is formed in the protection body, and the through hole is formed in a penetrating mode in the direction perpendicular to the protection face. The protective cover is used for covering the base body and isolating the base body from cleaning gas during cleaning, so that the phenomenon that the base body of the furnace tube is corroded is improved, the situation that a process cavity is polluted by metal ions, so that a product is scrapped due to electrical abnormality is prevented, and large economic loss is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a protective cover, a furnace tube base and furnace tube equipment. Background Art

[0002] In semiconductor manufacturing, furnace tubes are commonly used process equipment. For example, furnace tubes are used in doping processes, oxidation processes, or vapor deposition processes.

[0003] Existing furnace tubes usually include a wafer boat, a base (cap) and a tube body, wherein the wafer boat is installed on the base, and one end of the tube body is open. The wafer boat carries the semiconductor device through the open end of the tube body and then enters the tube body, and the open end of the tube body is sealed by the base to form a sealed process chamber. Process gas is introduced into the process chamber of the furnace tube through a nozzle, for example, oxygen or doping gas is introduced through the nozzle to react with the wafers in the process chamber.

[0004] During long-term use, deposits often form on the inner walls of the process chamber of a furnace tube. Therefore, the chamber needs to be cleaned regularly. Common cleaning methods include wet cleaning and dry cleaning. Dry cleaning involves introducing a cleaning gas (such as ClF3) into the process chamber to react with the deposits, removing them through a chemical reaction.

[0005] Based on process requirements, existing bases are usually made of metal. As the dry cleaning time and the number of cleanings accumulate, one side of the base located in the process chamber will be gradually corroded by the cleaning gas, which can easily produce metal ions that contaminate the process chamber. This pollution can easily lead to electrical abnormalities in the product and cause the product to be scrapped, which can easily cause large economic losses.

[0006] To this end, the utility model provides a protective cover, a furnace tube base and a furnace tube device. The protective cover is used to cover the base body to isolate the base body from the cleaning gas during furnace tube cleaning, improve the corrosion of the furnace tube base body, and prevent metal ions from contaminating the process chamber, resulting in electrical abnormalities and scrapping of the product, thereby avoiding large economic losses. Utility Model Content

[0007] The purpose of the utility model is to provide a protective cover, a furnace tube base and a furnace tube device. The protective cover is used to cover the base body to isolate the base body from the cleaning gas during furnace tube cleaning, improve the corrosion of the furnace tube base body, and prevent the electrical abnormality of the product caused by metal ion contamination of the process chamber, thereby avoiding large economic losses.

[0008] The utility model provides a protective cover comprising: a protective body; the protective body is made of a non-metallic material; the protective body has a protective surface, and the protective surface is used to fit on a side of the base body located in the process chamber. The protective cover is made of a non-metallic material and can adaptively cover the upper surface of the base body to block the gas inside the process chamber and the base body, prevent the base body from contacting the gas inside the process chamber, thereby improving the corrosion of the base body, and preventing the electrical abnormality of the product caused by metal ion contamination of the process chamber, thereby avoiding large economic losses; in addition, the protective cover uses the protective surface to fit on the base body to achieve gas isolation. This setting method is conducive to reducing the space occupied by the protective cover, so that the protective cover can be adapted to the existing furnace tube, that is, the addition of the protective cover does not affect the structure of the existing furnace tube, so the addition of the protective cover will not lead to improvements in the remaining structures of the furnace tube, which is conducive to reducing the cost of equipment improvement and also helps to make the protective cover more applicable.

[0009] Optionally, a through hole is provided on the protective body, and the through hole is provided through the protective body in a direction perpendicular to the protective surface.

[0010] Optionally, the protective cover further includes a protective enclosure connected to the protective body, the protective enclosure is made of non-metallic material, the protective enclosure is arranged around the through hole, and the protective enclosure extends in a direction perpendicular to the protective surface toward a side away from the protective surface.

[0011] Optionally, the protective body is provided with a positioning structure, and the positioning structure is used to position the protective body along a direction parallel to the protective surface when the protective surface is attached to the base body.

[0012] Optionally, the protective body includes a first protective member and a second protective member, and the first protective member and the second protective member are detachably connected;

[0013] When a through hole is provided on the protective body, the through hole is located at the joint surface of the first protective member and the second protective member.

[0014] Optionally, the first protection member and the second protection member are plate-type structures, the first protection member has a first side surface and a second side surface opposite to each other, and the second protection member has a first side surface and a second side surface opposite to each other;

[0015] After the first protective member and the second protective member are spliced together, the first side surface of the first protective member and the first side surface of the second protective member are coplanar and form the protective surface;

[0016] And / or, after the first protective member and the second protective member are spliced together, the second side surface of the first protective member and the second side surface of the second protective member are coplanar.

[0017] Optionally, at least one of the first protective member and the second protective member has a slot on its joint surface, and the other has a protrusion on its joint surface, and the protrusion is snapped into the slot;

[0018] And / or, a first groove is provided on the first protective member at its splicing surface, and a second groove is provided on the second protective member at its splicing surface, and after the first protective member and the second protective member are spliced together, the first groove and the second groove enclose the through hole;

[0019] And / or, when the protective cover includes a protective enclosure, the protective enclosure includes a first protective enclosure and a second protective enclosure, the first protective enclosure is arranged on the first protective member, and the second protective enclosure is arranged on the second protective member, after the first protective member and the second protective member are spliced together, the first protective enclosure and the second protective enclosure are combined to form the protective enclosure.

[0020] The utility model also provides a furnace tube base, comprising a base body and the above-mentioned protective cover, wherein the protective surface of the protective cover is fitted to one side of the base body located in the process chamber.

[0021] Optionally, the furnace tube base further includes a support platform and a connecting piece, one end of the connecting piece is connected to the support platform, and the other end is connected to a side of the base body located in the process chamber;

[0022] When a through hole is provided on the protective body, the connecting member passes through the through hole;

[0023] When the protective cover includes a protective enclosure, the protective enclosure is placed outside the connecting piece.

[0024] The utility model also provides a furnace tube device, which includes the furnace tube base described above.

[0025] In summary, the protective cover provided by the present invention includes: a protective body; the protective body is made of non-metallic material; the protective body has a protective surface, and the protective surface is used to fit a side surface of the base body located in the process chamber.

[0026] With such a configuration, the protective cover in the present invention is made of a non-metallic material and can adaptively cover the upper surface of the base body to block the gas inside the process chamber from coming into contact with the base body, thereby improving the corrosion of the base body and preventing the electrical abnormality of the product caused by metal ion contamination of the process chamber, thereby avoiding large economic losses.

[0027] In addition, the protective cover achieves gas isolation by having its protective surface fit into the base body. This setting method is conducive to reducing the space occupied by the protective cover so that the protective cover can be adapted for use with existing furnace tubes. That is, the addition of the protective cover does not affect the structure of the existing furnace tubes. Therefore, the addition of the protective cover will not lead to improvements in the remaining structures of the furnace tubes, which is conducive to reducing the cost of equipment improvement and also helps to make the protective cover more applicable. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a structural schematic diagram of a furnace tube base according to an embodiment of the present invention;

[0029] Figure 2 This is a schematic structural diagram of a protective cover according to an embodiment of the present invention;

[0030] Figure 3 This is a side structural schematic diagram of a protective cover according to an embodiment of the present invention;

[0031] Figure 4 The figure is a schematic diagram of the explosion structure of the protective cover according to one embodiment of the present invention.

[0032] Among them, in the accompanying drawings:

[0033] 100-base body;

[0034] 200-protective cover;

[0035] 10-protective body; 101-first protective element; 102-second protective element; 103-first groove; 104-second groove; 105a-first slot; 105b-second slot; 106a-first protrusion; 106b-second protrusion;

[0036] 11-protective surface; 12-through hole; 13-positioning hole;

[0037] 20-protective enclosure; 21-first protective enclosure; 22-second protective enclosure;

[0038] 300-support table;

[0039] 400-Connector. DETAILED DESCRIPTION

[0040] The following is a detailed description of the protective cover, furnace tube base, and furnace tube equipment proposed in the present invention, with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention.

[0041] As used in the present invention, the singular forms "a", "an", and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are generally used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element is "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as they are shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0042] During dry cleaning of existing furnace tubes, a highly oxidizing gas, such as ClF3, is introduced. Due to its strong oxidizing properties, this cleaning gas is highly corrosive, not only removing debris from the process chamber but also corroding the base. However, since the furnace tube body is typically made of quartz, this cleaning gas does not damage the tube itself. After prolonged corrosion by this gas, the base can develop spider-web-like defects on the side of the base located within the process chamber. The probability of developing these defects in the base of a furnace tube cleaned with ClF3 is much higher than when the base is not cleaned with this cleaning gas. Therefore, in this embodiment, improvements are made to the furnace tube base to mitigate this corrosion while ensuring proper dry cleaning.

[0043] In this embodiment, a furnace tube base is provided; it includes a base body 100 and a protective cover 200, and the protective surface 11 of the protective cover 200 is attached to the side of the base body 100 located in the process chamber. The side located in the process chamber here is based on the reference to the working condition scenario where the base body 100 is sealed on the open end of the tube body.

[0044] Please refer to Figure 1 As shown, in this embodiment, the base body 100 is disc-shaped. The shape of the base body 100 is adapted to the shape of the open end of the furnace tube to ensure that the base body 100 can be sealed against the open end of the tube. To ensure a good sealing effect, a sealing strip or other structure can also be provided at the edge of the base body 100. In other alternative embodiments, the shape of the base body 100 can be adaptively adjusted based on the shape of the open end of the tube and the matching method between the two.

[0045] Combine Figure 1 As shown, when the base body 100 is sealed on the open end of the tube, Figure 1 The upper surface of the base body 100 corresponds to the interior of the process chamber. Therefore, the upper surface of the base body 100 is located within the process chamber and is potentially at risk of corrosion. Therefore, the upper surface of the base body 100 requires protection. Therefore, the protective cover 200 adaptively covers the upper surface of the base body 100. The protective cover 200 blocks the gas inside the process chamber from the base body 100, preventing contact between the base body 100 and the gas inside the process chamber. This reduces corrosion of the base body 100 and prevents metal ion contamination of the process chamber, which could lead to electrical abnormalities and product scrapping, thus avoiding significant economic losses.

[0046] In addition, the protective cover achieves gas isolation by having its protective surface 11 fit against the base body. This setting method is conducive to reducing the space occupied by the protective cover so that the protective cover can be adapted for use with existing furnace tubes. That is, the addition of the protective cover does not affect the structure of the existing furnace tubes. Therefore, the addition of the protective cover will not lead to improvements in the remaining structures of the furnace tubes, which is conducive to reducing the cost of equipment improvement and also helps to make the protective cover more widely applicable.

[0047] Please continue to refer to Figure 1 As shown, the furnace tube base further includes a support platform 300 and a connector 400, one end of the connector 400 is connected to the support platform 300, and the other end is connected to one side of the base body 100 located in the process chamber;

[0048] The support platform 300 is a disc-shaped structure, which is coaxially arranged with the base body 100. The connecting member 400 is a cylindrical shaft-shaped structure, with the upper end of the connecting member 400 connected to the lower end of the support platform 300, and the lower end of the connecting member 400 connected to the upper end of the base body 100. The connecting member 400 is coaxially arranged with the base body 100 and the support platform 300.

[0049] The support platform 300 is used to support the wafer boat. When the wafer boat is placed on the support platform 300, the wafer boat and the support platform 300 are arranged coaxially, so that the wafers in the wafer boat are arranged coaxially with the support platform 300. When the furnace tube base covers the open end of the tube body, the furnace tube base is also coaxial with the tube body, ultimately positioning the wafers coaxially with the tube body, that is, the wafers are positioned in the center of the process chamber. This arrangement ensures uniform contact between the wafers and the process gas in the furnace tube, ensuring better process results.

[0050] In other alternative embodiments, the shapes of the support platform 300 and the connecting member 400, as well as the relative positions of the base body 100, the support platform 300 and the connecting member 400 can be adaptively adjusted based on the actual requirements of the furnace tube.

[0051] Please refer to Figure 1 and Figure 2 As shown, the protective cover comprises: a protective body 10;

[0052] The protective body 10 is made of a non-metallic material. In this embodiment, the protective body 10 is preferably made of quartz. Quartz has the advantages of high hardness, high wear resistance, high corrosion resistance, and anti-pollution, which can meet the requirements of furnace tube use. In other alternative embodiments, the protective body 10 can also be made of graphite, ceramic, or other known non-metallic materials. The material of the protective body 10 can be selected based on factors such as the protection requirements and temperature requirements of the furnace tube.

[0053] The protective body 10 has a protective surface 11, and the protective surface 11 is used to fit on a side of the base body 100 located in the process chamber. Figure 1 and Figure 3 As shown, the protective surface 11 is Figure 3 The lower surface of the middle protection body 10 is in contact with the upper surface of the base body 100 to effectively protect the upper surface of the base body 100 .

[0054] In this embodiment, the protective body 10 is an overall disc-shaped structure, with an outer diameter slightly smaller than that of the base body 100. This structure creates an annular exposed area at the edge of the upper surface of the base body 100, which can be used to contact the edge of the tube's open end to form a seal. Furthermore, the pattern defects caused by corrosion in the existing base body 100 are generally located in the center of the upper surface of the base body 100. In this embodiment, by covering the center of the upper surface of the base body 100 with the protective body 10, the defects caused by corrosion of the base body 100 can be significantly improved.

[0055] In other alternative embodiments, the protective body 10 may be configured to have the same diameter as the base body 100 , thereby completely covering the upper surface of the base body 100 .

[0056] Please continue to combine Figure 2 As shown, a through hole 12 is provided on the protective body 10 , and the through hole 12 is provided through the protective surface 11 in a direction perpendicular to the protective surface 11 .

[0057] The through hole 12 is provided to avoid the connecting piece 400. In this embodiment, the through hole 12 is a circular hole structure, and its aperture is adapted to the outer diameter of the connecting piece 400, so that the inner wall of the through hole 12 is tightly fitted with the outer wall of the connecting piece 400, which can effectively prevent the cleaning gas in the process chamber of the furnace tube from passing through the gap between the inner wall of the through hole 12 and the outer wall of the connecting piece 400 into the protective body 10 and the base body 100, thereby effectively preventing the cleaning gas from contacting the upper surface of the base body 100.

[0058] In other alternative embodiments, the shape of the through hole 12 can be adaptively adjusted based on the structure of the actual connector 400. Preferably, the shape of the through hole 12 is adapted to the connector 400 so that the inner wall of the through hole 12 fits tightly with the outer wall of the connector 400.

[0059] Furthermore, the protective body 10 is provided with a positioning structure, and the positioning structure is used to position the protective body 10 relative to the base body 100 along a direction parallel to the protective surface 11 when the protective surface 11 is attached to the base body 100 .

[0060] Please continue to refer to Figure 1 As shown, in this embodiment, the positioning structure is a positioning hole 13 opened on the protective body 10, which is used in conjunction with the positioning pin during positioning. At this time, a pin hole can be opened on the upper surface of the base body 100, and a part of the positioning pin is inserted into the positioning hole 13, and the other part is inserted into the hole on the base body 100.

[0061] Since the protective body 10 cooperates with the connecting member 400 through the through hole 12 , the positioning structure can limit the rotation of the protective body 10 relative to the base body 100 , thereby limiting the movement of the protective body 10 relative to the base body 100 in a direction parallel to the protective surface 11 .

[0062] In other alternative embodiments, the positioning pins may be integrated into the upper surface of the base body 100 , and during the assembly of the protective body 10 , it is sufficient to ensure that the positioning pins are inserted into the positioning holes 13 .

[0063] In other alternative embodiments, if the cross-section of the connecting member 400 is a non-circular structure, for example, when the connecting member 400 is a rectangular rod-shaped structure, the through hole 12 is adaptively opened into a rectangle. At this time, the connecting member 400 cooperates with the through hole 12 to position the protective body 10 in a direction parallel to the protective surface 11. At this time, no positioning structure may be provided on the protective body 10.

[0064] In other alternative embodiments, the positioning structure may also be a protrusion provided on the lower surface of the protective body 10, which cooperates with a hole on the upper surface of the base body 100 to achieve positioning. The positioning structure can be adaptively adjusted based on actual needs.

[0065] The existing connecting member 400 is usually made of metal material. Therefore, in this embodiment, the protective cover 200 also adds a protective function to the connecting member 400 .

[0066] Please continue to refer to Figure 2 and Figure 3 As shown, the protective cover further includes a protective enclosure 20 connected to the protective body 10. The protective enclosure 20 is also made of non-metallic material. The protective enclosure 20 is arranged around the through hole 12 and extends in a direction perpendicular to the protective surface 11 toward a side away from the protective surface 11 ( Figure 3 The protective enclosure 20 is provided to wrap the surface of the connector 400 to prevent the surface of the connector 400 from contacting the cleaning gas in the process chamber, thereby preventing the connector 400 from being corroded.

[0067] In this embodiment, the protective enclosure 20 is a thin-walled sleeve structure as a whole. The protective enclosure 20 is coaxially arranged with the through hole 12, and the inner diameter of the protective enclosure 20 is equal to the aperture of the through hole 12. The inner diameter of the protective enclosure 20 is adapted to the outer diameter of the connecting member 400, so that the inner wall of the protective enclosure 20 can fit tightly against the outer wall of the connecting member 400, thereby forming a better protective effect.

[0068] In this embodiment, the protective enclosure 20 is adaptively configured as a thin-walled sleeve structure to fit the cylindrical shaft structure of the connecting member 400. In other alternative embodiments, the specific shape of the protective enclosure 20 can be adaptively adjusted based on the specific shape of the connecting member 400.

[0069] Please continue to refer to Figures 1 to 4 As shown, the protective body 10 includes a first protective member 101 and a second protective member 102 , and the first protective member 101 and the second protective member 102 are detachably connected.

[0070] Please refer to Figures 2 to 4 As shown, the first protective member 101 and the second protective member 102 are both semicircular structures as a whole. The first protective member 101 and the second protective member 102 are plate structures, and the two are spliced to form a disc-shaped structure.

[0071] Combine Figure 3 As shown, the first protective member 101 has opposite first side surfaces ( Figure 3 the lower surface of the first protective member 101) and the second side surface ( Figure 3The second protective member 102 has an opposite first side surface ( Figure 3 the lower surface of the second protective member 102) and the second side surface ( Figure 3 the upper surface of the second protective member 102);

[0072] After the first protective member 101 and the second protective member 102 are spliced together, the first side surface of the first protective member 101 and the first side surface of the second protective member 102 are coplanar and form the protective surface 11; the protective surface 11 formed by the splicing of the first protective member 101 and the second protective member 102 is relatively flat as a whole, so as to adapt to the upper surface of the base body 100, thereby forming a better covering and isolation effect on the upper surface of the base body 100.

[0073] After the first protective member 101 and the second protective member 102 are spliced together, the second side surface of the first protective member 101 and the second side surface of the second protective member 102 are coplanar (i.e. Figure 3 The upper surface of the first protective member 101 and the upper surface of the second protective member 102 are coplanar. This configuration allows the upper surface of the entire protective body 10 to be relatively flat and have better overall consistency.

[0074] In other alternative embodiments, the relative relationship between the second side surface of the first protective member 101 and the second side surface of the second protective member 102 may be adjusted based on actual needs.

[0075] In this embodiment, to accommodate the planar structure of the base body 100 as the top surface, the first side surface of the first protective member 101 and the first side surface of the second protective member 102 are arranged to be coplanar. In alternative embodiments, the relative relationship between the first side surface of the first protective member 101 and the first side surface of the second protective member 102 can be adaptively adjusted based on the actual structure of the base body 100 as the top surface. The structural adjustment of the first side surface should be based on the fact that the protective surface 11 can effectively cover and isolate the top surface of the base body 100.

[0076] Please combine Figure 2 and Figure 4 As shown, the through hole 12 is located at the joint surface of the first protective member 101 and the second protective member 102. The first protective member 101 is provided with a semicircular first groove 103 at the joint surface, and the second protective member 102 is provided with a semicircular second groove 104 at the joint surface. After the first and second protective members 101, 102 are joined, the first and second grooves 103, 104 together form the through hole 12.

[0077] In addition, a first protective enclosure 21 is provided around the first groove 103 on the first protective member 101, and a second protective enclosure 22 is provided around the second groove 104 on the second protective member 102. The first protective enclosure 21 and the second protective enclosure 22 both have a tile-like structure. After the first protective member 101 and the second protective member 102 are spliced together, the first protective enclosure 21 and the second protective enclosure 22 together form a protective enclosure 20 with a cylindrical sleeve structure.

[0078] Combine Figures 2 to 4 As shown, in this embodiment, after the first protective member 101 and the second protective member 102 are joined, the first groove 103 and the second groove 104 are symmetrical along their joining surface. Similarly, the first protective enclosure 21 and the second protective enclosure 22 are also symmetrical along their joining surface. In other alternative embodiments, the first groove 103 and the second groove 104 can be configured as an asymmetrical structure, and the first protective enclosure 21 and the second protective enclosure 22 can also be configured as an asymmetrical structure. The structural relationship between the first groove 103 and the second groove 104 and the structural relationship between the first protective enclosure 21 and the second protective enclosure 22 can be adaptively adjusted based on actual usage requirements.

[0079] Furthermore, at least one of the first protective member 101 and the second protective member 102 has a slot on its joint surface, and the other has a protrusion on its joint surface, and the protrusion is mounted in the slot.

[0080] Please combine Figure 2 and Figure 4 As shown, in this embodiment, there are two slots and two protrusions, the two slots are respectively a first slot 105a and a second slot 105b, and the two protrusions are respectively a first protrusion 106a and a second protrusion 106b.

[0081] The first protective member 101 is provided with a first slot 105a and a first protrusion 106a at the splicing surface, and the first slot 105a and the first protrusion 106a are respectively located on both sides of the first protective enclosure 21; the second protective member 102 is provided with a second slot 105b and a second protrusion 106b at the splicing surface, and the second slot 105b and the second protrusion 106b are respectively located on both sides of the second protective enclosure 22.

[0082] In this embodiment, the first latching slot 105a and the second protrusion 106b cooperate to form one set of latching structures, and the second latching slot 105b and the first protrusion 106a cooperate to form another set of latching structures, thus forming two sets of latching structures. In other alternative embodiments, the specific number of latching structures can be adaptively adjusted based on actual usage requirements, for example, one, three, or more sets can be provided.

[0083] like Figure 2As shown, in this embodiment, when the first protective member 101 and the second protective member 102 are assembled, the two sets of snap-fit structures are centrally symmetrical, with a central symmetry angle of 180°. In other alternative embodiments, the two snap-fit structures can be configured as non-centrally symmetrical structures, and the specific distribution of the two sets of snap-fit structures can be adaptively adjusted based on actual usage requirements.

[0084] In this embodiment, the first card slot 105a and the second card slot 105b have the same shape, both of which are circular grooves. The grooves are arranged to pass through in a direction perpendicular to the protective surface 11. The axial directions of the first card slot 105a and the second card slot 105b are parallel to the axial direction of the protective body 10, and the central angle of the first card slot 105a and the second card slot 105b is greater than 180°. The shapes of the first protrusion 106a and the second protrusion 106b are adapted to the shapes of the first card slot 105a and the second card slot 105b. The shapes of the first protrusion 106a and the second protrusion 106b are also semicircular. The axial directions of the first protrusion 106a and the second protrusion 106b are parallel to the axial direction of the protective body 10, and the central angle between the two is also greater than 180°. The setting of the central angle ensures that when the second protrusion 106b is located in the first card slot 105a, it will not fall out of the first card slot 105a in a direction parallel to the protective surface 11, or when the first protrusion 106a is located in the second card slot 105b, it will not fall out of the second card slot 105b in a direction parallel to the protective surface 11, so as to achieve a better clamping effect.

[0085] In other alternative embodiments, the first protective member 101 and the second protective member 102 can also be spliced and fixed by other forms of snap-fit structures, such as by snap-fitting of a dovetail groove and a dovetail block or by snap-fitting of a T-slot and a T-block.

[0086] In other alternative embodiments, the first protective member 101 and the second protective member 102 may be detachably connected by other connection methods. For example, the two may be connected by bolts or other existing detachable connection methods. Detailed descriptions are omitted here.

[0087] In this embodiment, the protective body 10 is composed of a two-half structure of a first protective part 101 and a second protective part 102, which are detachably spliced and arranged, and the through hole 12 and the protective enclosure 20 are also adaptively arranged as a two-half structure. The above-mentioned splicing structure ensures that the protective cover does not affect other structures during the disassembly and assembly process, which is conducive to simplifying the disassembly and assembly process of the protective cover and reducing the difficulty of maintenance during regular maintenance and replacement.

[0088] During the installation process of the two-part protective cover structure described above, first install the positioning pins on the base body 100. Then, install and splice the first protective member 101 and the second protective member 102 below the support platform 300, so that the first groove 103 and the second groove 104 together form the through hole 12, and the first protective enclosure 21 and the second protective enclosure 22 together form the protective enclosure 20. During the splicing process, the connecting member 400 should be passed through the through hole 12 and the protective enclosure 20. After the splicing is completed, rotate the entire protective cover so that the positioning hole 13 is aligned with the positioning pin. Then, move the protective cover downward so that its protective surface 11 is in contact with the base body 100 and the positioning pin passes through the positioning hole 13 to achieve the positioning of the protective cover.

[0089] In this embodiment, the protective body 10 and protective enclosure 20 are integrally formed, both made of quartz. This ensures the overall consistency of the protective cover. In other alternative embodiments, the protective body 10 and protective enclosure 20 can also be configured as separate structures, and the materials of the two can be selected based on actual needs.

[0090] In this embodiment, the protective body 10 is configured as a disc-shaped plate structure as a whole, which can better cover the upper surface of the base body 100, and the protective body 10 as a whole does not occupy a large space. On the one hand, it is beneficial for the protective cover to be adapted to the existing furnace tube structure and increase its scope of application. On the other hand, when the protective cover of this structure is added to the existing furnace tube, it will not affect the structure of the existing furnace tube because it occupies a small space. Therefore, the addition of the protective cover will not lead to improvements in the remaining structures of the furnace tube, which is beneficial to reducing the cost of equipment improvement and also helps to further increase the scope of application of the protective cover.

[0091] In other alternative embodiments, the protective body 10 may also be configured in other shapes, such as a box-shaped structure to entirely cover the upper surface of the base body 100 and the connector 400 to achieve effective isolation. The overall structure of the protective body 10 may be adaptively adjusted based on actual usage requirements.

[0092] In summary, the protective cover provided by the present invention includes: a protective body; the protective body is made of non-metallic material; the protective body has a protective surface, and the protective surface is used to fit a side surface of the base body located in the process chamber.

[0093] With such a configuration, the protective cover in the present invention is made of a non-metallic material and can adaptively cover the upper surface of the base body to block the gas inside the process chamber from coming into contact with the base body, thereby improving the corrosion of the base body and preventing the electrical abnormality of the product caused by metal ion contamination of the process chamber, thereby avoiding large economic losses.

[0094] In addition, the protective cover achieves gas isolation by having its protective surface fit into the base body. This setting method is conducive to reducing the space occupied by the protective cover so that the protective cover can be adapted for use with existing furnace tubes. That is, the addition of the protective cover does not affect the structure of the existing furnace tubes. Therefore, the addition of the protective cover will not lead to improvements in the remaining structures of the furnace tubes, which is conducive to reducing the cost of equipment improvement and also helps to make the protective cover more applicable.

[0095] This embodiment also provides a furnace tube device, which can be used as a doping device, an oxidation device, a vapor deposition device, etc.

[0096] The furnace tube equipment includes the furnace tube base described above.

[0097] In addition, the furnace tube equipment also includes a tube body and a crystal boat.

[0098] The tube, made of high-purity quartz, is the core of the thermal oxidation furnace. It can withstand high temperatures and remains chemically inert, so the chemical properties of the tube itself are not affected by the gases introduced. The wafer boat is mounted on a support platform 300. One end (usually the lower end) of the tube is open. The wafer boat carries the semiconductor devices through the open end of the tube and then enters the tube. The base seals the open end of the tube to form a sealed process chamber. Process gases, such as oxygen or dopant gases, are introduced into the process chamber through nozzles to react with the wafers in the process chamber.

[0099] In addition, the furnace tube equipment also includes a heating system, a gas supply system, a temperature control system and an exhaust device.

[0100] The heating system generally includes a heating element (heating coil), which is usually composed of a resistance wire and is located around the pipe body to heat the inside of the pipe body.

[0101] The temperature control system is used to control the heating temperature to ensure that the temperature in the process chamber meets the use requirements and ensure that the semiconductor material is heat treated under specific temperature conditions.

[0102] The gas supply system generally includes a gas supply pump, a gas supply port, a mass flow controller (MFC), and an exhaust port. The gas supply port can be integrated into the tube body or integrated into the base. The gas supply pump is connected to the gas supply port to deliver oxygen or other gases into the process chamber. The MFC is used to control the gas flow inside the process chamber to accurately adjust the required gas volume. The exhaust port is used to exhaust waste gas from the process chamber. The exhaust port is connected to the exhaust device to extract and discharge the gas inside the process chamber to ensure that the gas environment and pressure inside the process chamber are controllable.

[0103] The difference between the furnace tube device in this embodiment and the existing furnace tube device is the addition of the protective cover, and the other structures can be consistent with the structure of the existing furnace tube device. The specific structure and principle of the furnace tube device are existing technology and will not be repeated here.

[0104] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0105] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A protective cover, characterized in that: include: Protective body; The protective body is made of non-metallic material; The protective body has a protective surface, and the protective surface is used to fit on a side surface of the base body located in the process chamber; The protective body is provided with a through hole, and the through hole is penetrated in a direction perpendicular to the protective surface.

2. The protective cover according to claim 1, wherein: The protective cover also includes a protective enclosure connected to the protective body, the protective enclosure is made of non-metallic material, the protective enclosure is arranged around the through hole, and the protective enclosure extends in a direction perpendicular to the protective surface toward a side away from the protective surface.

3. The protective cover according to claim 1, wherein: The protective body is provided with a positioning structure, and the positioning structure is used to position the protective body along a direction parallel to the protective surface when the protective surface is attached to the base body.

4. The protective cover according to any one of claims 1 to 3, characterized in that The protective body includes a first protective part and a second protective part, and the first protective part and the second protective part are detachably connected; The through hole is located at the joint surface of the first protective member and the second protective member.

5. The protective cover according to claim 4, wherein: The first guard member and the second guard member are plate-type structures, the first guard member has a first side surface and a second side surface opposite to each other, and the second guard member has a first side surface and a second side surface opposite to each other; After the first protective member and the second protective member are spliced together, the first side surface of the first protective member and the first side surface of the second protective member are coplanar and form the protective surface; And / or, after the first protective member and the second protective member are spliced together, the second side surface of the first protective member and the second side surface of the second protective member are coplanar.

6. The protective cover according to claim 4, wherein: At least one of the first protective member and the second protective member has a slot on its joint surface, and the other has a protrusion on its joint surface, and the protrusion is mounted in the slot; And / or, a first groove is provided on the first protective member at its splicing surface, and a second groove is provided on the second protective member at its splicing surface, and after the first protective member and the second protective member are spliced together, the first groove and the second groove enclose the through hole; And / or, when the protective cover includes a protective enclosure, the protective enclosure includes a first protective enclosure and a second protective enclosure, the first protective enclosure is arranged on the first protective member, and the second protective enclosure is arranged on the second protective member, after the first protective member and the second protective member are spliced together, the first protective enclosure and the second protective enclosure are combined to form the protective enclosure.

7. A furnace tube base, characterized in that: It comprises a base body and the protective cover according to any one of claims 1 to 6, wherein the protective surface of the protective cover is attached to a side of the base body located in the process chamber.

8. The furnace tube base according to claim 7, characterized in that: The furnace tube base also includes a support platform and a connecting piece, one end of the connecting piece is connected to the support platform, and the other end is connected to the side of the base body located in the process chamber; When a through hole is provided on the protective body, the connecting member passes through the through hole; When the protective cover includes a protective enclosure, the protective enclosure is placed outside the connecting piece.

9. A furnace tube device, characterized in that: The furnace tube equipment includes the furnace tube base according to claim 8.

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