Single crystal furnace thermal field lifting unit, lifting device and single crystal furnace

Abstract

The utility model provides a single crystal furnace thermal field lifting unit, a single crystal furnace thermal field lifting device and a single crystal furnace, and aims to solve the technical problem that the thermal field cooling time is long after the existing single crystal furnace is shut down. The single crystal furnace thermal field lifting device comprises a plurality of single crystal furnace thermal field lifting units installed on a furnace bottom plate, and each single crystal furnace thermal field lifting unit comprises a lifting mechanism arranged at the bottom of a single crystal furnace; one end of the supporting rod is connected with the lifting mechanism, and the other end penetrates through the furnace bottom plate, the bottom felt and the lower thermal insulation cylinder to be connected with the middle thermal insulation cylinder; wherein the lifting mechanism is in driving connection with the supporting rod, and the supporting rod can be driven by the lifting mechanism to move upwards, so that a heat dissipation gap is formed between the middle heat preservation barrel and the lower heat preservation barrel. According to the single crystal furnace thermal field lifting device, the thermal field heat preservation structure is changed after production shutdown, the thermal field is prompted to be rapidly cooled, the thermal field cooling time is effectively shortened, and the single crystal production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace thermal field lifting unit, a lifting device and a single crystal furnace. Background Art

[0002] In the single crystal ingot drawing industry, the primary function of the single crystal furnace heat exchanger is to maintain a constant temperature during single crystal silicon growth, ensuring growth quality and production efficiency. The single crystal furnace heat exchanger is a complex system comprised of multiple components, including a pressure ring, insulation cover, insulation structure, graphite crucible, crucible support rod, crucible tray, graphite electrodes, heaters, flow guide tubes, and graphite bolts. These components work together to provide a stable thermal environment for single crystal silicon growth. The insulation structure, wrapped in graphite carbon felt, consists of upper, middle, and lower insulation tubes. These tubes minimize heat loss and maintain a stable furnace temperature. Due to the heat exchanger's high insulation performance, after production is shut down, the furnace must cool down before it can be opened for cleaning. During this process, argon purges can dissipate some heat, but the cooling time required to achieve the required cleaning time is still significant, impacting production efficiency. Summary of the Invention

[0003] In view of the above situation, in order to overcome the defects of the existing technology, the purpose of this utility model is to provide a single crystal furnace thermal field lifting unit, a lifting device and a single crystal furnace, which solves the technical problem of long thermal field cooling time after the existing single crystal furnace is shut down.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] A single crystal furnace thermal field lifting unit includes: a lifting mechanism, which is arranged at the bottom of the single crystal furnace; a support rod, one end of which is connected to the lifting mechanism, and the other end passes through the furnace bottom plate, the bottom felt and the lower insulation tube and is connected to the middle insulation tube; wherein, the lifting mechanism is driven by the support rod, and the support rod can move upward under the drive of the lifting mechanism to form a heat dissipation gap between the middle insulation tube and the lower insulation tube.

[0006] The utility model relates to a single crystal furnace thermal field lifting device. After the production is stopped, the thermal field insulation structure is changed, so that the thermal field is cooled quickly, the thermal field cooling time is effectively reduced, and the single crystal production efficiency is improved. Moreover, the use of argon gas can be reduced, which is conducive to reducing costs. Specifically, the support rod is lifted upward by the lifting mechanism, so that the middle insulation tube is stably lifted upward under the action of the support rod, thereby forming a heat-dissipating gap between the middle insulation tube and the lower insulation tube to accelerate the cooling of the single crystal furnace. Moreover, the single crystal furnace thermal field lifting unit is easy to install and can be directly modified and added on the furnace bottom plate of the existing single crystal furnace to improve the quality of single crystal pulling.

[0007] Optionally, all or part of the support rods have cavities for introducing cooling medium. By arranging a flowing cooling medium in the support rods, the temperature around the support rods can be reduced, further accelerating the cooling of the single crystal furnace.

[0008] Optionally, a support seat is provided at the lower end of the support rod, a power output end of the lifting mechanism is connected to the support seat, and the lifting mechanism drives the support seat to move.

[0009] Optionally, a guide rod with two through ends is provided in the cavity of the support rod, and a connecting channel, as well as a cooling inlet and a cooling outlet connected to the connecting channel are opened on the support seat; one end of the guide rod is connected to the connecting channel, and the other end extends toward one end of the cavity and forms a gap with the inner wall of the cavity.

[0010] Optionally, the support rod includes a first rod body and a second rod body, a cavity is opened in the first rod body, a connecting port is provided at one end of the cavity, the connecting port is connected to the support seat, the end of the first rod body away from the support seat is connected to one end of the second rod body, and the other end of the second rod body is connected to the middle insulation tube.

[0011] Optionally, the support rod includes a first rod body, a second rod body and a third rod body from bottom to top, a cavity is opened in the first rod body, a connecting port is provided at one end of the cavity, the connecting port is connected to the support seat, the end of the first rod body away from the support seat is connected to one end of the second rod body, the other end of the second rod body is connected to one end of the third rod body, and the other end of the third rod body is connected to the middle insulation cylinder.

[0012] Optionally, the first rod body is an internally cooled support rod body; the second rod body and the third rod body are carbon-carbon support rod bodies.

[0013] Optionally, the lifting mechanism includes: a cylinder disposed below the furnace floor, with its movable end connected to the support base; and a connecting plate connected to the furnace floor. A plurality of guide rods are disposed between the cylinder and the connecting plate, and the cylinder drives the support base to move along the guide rods. When the cylinder drives the support base upward, the support base moves upward or downward along the guide rods, facilitating smooth movement of the support rod.

[0014] Optionally, the single crystal furnace thermal field lifting unit further includes a bellows, which is sleeved on the support rod between the connecting plate and the support seat, with the upper end of the bellows sealed to the connecting plate and the lower end sealed to the support seat.

[0015] A single crystal furnace thermal field enhancement device comprises a plurality of single crystal furnace thermal field enhancement units mounted on a furnace bottom plate, wherein the single crystal furnace thermal field enhancement units are any of the single crystal furnace thermal field enhancement units described above.

[0016] A single crystal furnace comprises the above-mentioned single crystal furnace thermal field enhancing device.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] The utility model relates to a thermal field lifting device for a single crystal furnace. After the production is stopped, the thermal field insulation structure is changed, so that the thermal field is cooled quickly, the thermal field cooling time is effectively reduced, and the single crystal production efficiency is improved. Moreover, the use of argon gas can be reduced, which is beneficial to reducing costs. Specifically, the support rod is lifted upward by a lifting mechanism, so that the middle insulation tube is stably lifted upward under the action of the support rod, thereby forming a heat-dissipating gap between the middle insulation tube and the lower insulation tube, that is, a heat-dissipating gap is formed on the periphery of the crucible, so as to accelerate the cooling of the single crystal furnace. Moreover, a flowing cooling medium is also provided in the support rod, which can cool the area around the support rod, further accelerating the cooling of the single crystal furnace. At the same time, the thermal field lifting unit of the single crystal furnace is easy to install and can be directly modified and added on the furnace bottom plate of the existing single crystal furnace to improve the quality of single crystal pulling. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] Figure 1 This is a structural diagram of the thermal field lifting device for a single crystal furnace in the present utility model.

[0021] Figure 2 for Figure 1 Middle AA section view.

[0022] Figure 3 for Figure 1 A magnified view of the structure in the middle.

[0023] Figure 4 for Figure 2 A magnified view of the structure at B in the middle.

[0024] Figure 5 Schematic diagram of the three-dimensional structure of the thermal field lifting device of the single crystal furnace in the present invention.

[0025] Figure 6 This is a diagram showing the usage status of the thermal field lifting device for a single crystal furnace in the present utility model.

[0026] Figure 7 It is a schematic diagram of the three-dimensional structure of the thermal field lifting unit of the single crystal furnace in this utility model.

[0027] Figure 8 This is a cross-sectional view of the thermal field enhancement unit of the single crystal furnace in this utility model.

[0028] Reference numerals:

[0029] 1. Single crystal furnace thermal field lifting unit; 11. Lifting mechanism; 111. Cylinder; 112. Connecting plate; 113. Guide rod; 12. Support rod; 12a. Cavity; 121. First rod; 1211. Connecting port; 122. Second rod; 123. Third rod; 13. Support seat; 131. Connecting channel; 132. Cooling inlet; 133. Cooling outlet; 14. Guide rod; 15. Bellows;

[0030] 21. Furnace bottom plate;

[0031] 31. Bottom felt; 32. Lower insulation tube; 33. Middle insulation tube; 34. Upper insulation tube. DETAILED DESCRIPTION

[0032] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

[0033] In the description of the embodiments of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "end", "side", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this utility model application, "plurality" means two or more, unless otherwise specifically defined.

[0035] In the embodiments of the present invention, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection, indirect connection through an intermediate medium, or internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on the specific circumstances.

[0036] In the embodiments of the present utility model application, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being "above", "above", and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below", and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0037] The disclosure below provides many different embodiments or examples for implementing different structures of the embodiments of the present invention. In order to simplify the disclosure of the embodiments of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the embodiments of the present invention. In addition, the embodiments of the present invention may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0038] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0039] Due to the high-efficiency thermal insulation performance of the hot field, after the production is stopped, it is necessary to wait for the hot field to cool down before the furnace can be opened for dismantling and cleaning. In this process, part of the heat energy can also be cooled and consumed by purging with argon gas. However, for the hot field to cool down to meet the dismantling and cleaning requirements, the cooling time is still very long, and the planned shutdown time cannot be reached. The manual dismantling and cleaning is intensive, which not only wastes production hours, but also wastes the use of argon gas, which is not conducive to reducing costs and increasing efficiency.

[0040] Example 1

[0041] like Figures 1 to 8As shown, the embodiment of the present invention provides a single crystal furnace thermal field lifting unit for a single crystal furnace thermal field lifting device to solve the above-mentioned problems. The single crystal furnace thermal field lifting unit includes a lifting mechanism 11 and a support rod 12. The lifting mechanism 11 is driven and connected to the support rod 12. The support rod 12 performs vertical lifting movement under the drive of the lifting mechanism 11. During assembly, the lifting mechanism 11 is installed below the furnace bottom plate 21 of the single crystal furnace. The power output end of the lifting mechanism 11 is driven and connected to the lower end of the support rod 12. The upper end of the support rod 12 passes through the furnace bottom plate 21, the bottom felt 31, and the lower insulation tube 32 in sequence and is connected to the middle insulation tube 33. The support rod 12 is placed in the thick wall of the insulation tube. During use, the lifting mechanism 11 is started, and the lifting mechanism 11 lifts the support rod 12 upward, so that the middle insulation tube 33 rises upward under the action of the support rod 12. The middle insulation tube 33 is away from the lower insulation tube 32, and a heat dissipation gap is formed between the two to accelerate the cooling of the single crystal furnace.

[0042] In one embodiment, all or part of the support rod 12 has a cavity 12a for introducing a cooling medium. By introducing the cooling medium into the internal cavity 12a of the support rod 12, the cooling speed inside the single crystal furnace can be further increased.

[0043] Optionally, a support seat 13 is provided at the bottom of the support rod 12, the lower end of the support rod is connected to the support seat 13, the power output end of the lifting mechanism 11 is connected to the support seat 13, the lifting mechanism 11 drives the support seat 13 to move, and the support seat 13 drives the support rod 12 to move.

[0044] Optionally, a guide rod 14 with two through-holes is provided within the cavity 12a of the support rod 12; a connecting channel 131 is provided on the support base 13; one end of the guide rod 14 is connected to and communicates with the connecting channel 131, and the other end extends toward one end of the cavity 12a, forming a gap therebetween; cooling water can be used as the cooling medium, and the support base 13 is further provided with a cooling inlet 132 and a cooling outlet 133 that communicate with the connecting channel 131 and the cavity 12a. The cooling medium is introduced into the guide rod 14 through the cooling inlet 132, then flows through the guide rod 14 to the cavity 12a before exiting through the cooling outlet 133. When the cooling medium flows through the support rod 12, heat exchange is generated, thereby further accelerating the cooling rate of the single crystal furnace. After exiting the cooling outlet, the cooling medium can be cooled by a heat exchange device and then recirculated into the furnace.

[0045] In one embodiment, the support rod 12 adopts a segmented structure, and the support rod 12 has at least two sections. As an implementation scenario, in this scenario, the support rod 12 includes a first rod body 121 and a second rod body 122. The first rod body 121 defines a cavity 12a, and one end of the cavity 12a defines a connecting port 1211. One end of the first rod body 121 is connected to the support base 13 through the connecting port 1211. One end of the second rod body 122 is connected to one end of the first rod body 121, and the other end is connected to the middle insulation cylinder 33. As another implementation scenario, in this scenario, the support rod 12 includes a first rod body 121, a second rod body 122 and a third rod body 123 from bottom to top. A cavity 12a is provided in the first rod body 121, and a connecting port 1211 is provided at one end of the cavity 12a. The first rod body 121 is connected to the support seat 13 through the connecting port 1211, one end of the second rod body 122 is connected to one end of the first rod body 121, and the other end is connected to one end of the third rod body 123, and the other end of the third rod body 123 is connected to the middle insulation tube 33.

[0046] Optionally, the second rod 122 and the third rod 123 are carbon-carbon support rods, and the first rod 121 is an internal cooling support rod. The carbon-carbon support rod is beneficial to improving the high temperature resistance of the support rod, and the internal cooling support rod is beneficial to reducing the thermal field cooling time after the furnace is shut down.

[0047] Optionally, a boss adapted to the connection port 1211 is provided on the top of the support seat 13 , and the boss is docked in the connection port 1211 .

[0048] In one embodiment, the lifting mechanism 11 includes a cylinder 111, a connecting plate 112, and guide rods 113. The connecting plate 112 is connected to the bottom of the furnace floor 21. The cylinder 111 is disposed below the connecting plate 112. A plurality of guide rods 113 are disposed between the cylinder 111 and the connecting plate 112. The support base 13 is provided with guide holes corresponding to the positions of the guide rods 113. The support base 13 slides with the guide rods 113 through the guide holes. The movable end of the cylinder 111 is connected to the bottom of the support base 13. When the cylinder 111 drives the support base 13 upward, the support base 13 moves upward or downward along the guide rods 113, thereby enabling the support rod 12 to move upward smoothly. Optionally, the upper end of the guide rod 113 is connected to the connecting plate 112, and the other end passes through the support base 13 and connects to the cylinder body or cylinder mounting base. If a cylinder mounting base is used, the cylinder 111 is mounted within the cylinder mounting base.

[0049] Optionally, a bellows 15 is also provided on the support rod 12 between the connecting plate 112 and the support seat 13. The upper end of the bellows 15 is sealedly connected to the connecting plate 112, and the lower end is sealedly connected to the support seat 13. In the initial state (when the support seat 13 is away from the connecting plate 112), the bellows 15 is in an extended state. When the cylinder 111 drives the support seat 13 to lift the support rod 12 upward, the bellows 15 is in a contracted state. The provision of the bellows 15 is helpful in preventing the loss of the cooling medium of the support rod 12 located at the bottom of the furnace floor. When provided, the upper and lower ends of the bellows 15 are connected to the connecting plate 112 and the support seat 13 respectively through flanges, and sealing rings are provided between the upper flange and the connecting plate 112, and between the lower flange and the support seat 13.

[0050] During operation, the lifting mechanism 11 is activated, which lifts the support rods 12 upward. As a result, the middle insulation tube 33 rises upward under the action of the support rods 12, moving it away from the lower insulation tube 32. The heat-dissipating gap formed between the middle insulation tube 33 and the lower insulation tube 32 accelerates the cooling of the single crystal furnace. A cooling medium flows within the support rods 12, cooling the area surrounding the support rods. This further accelerates the cooling efficiency of the single crystal furnace and extends the service life of the support rods, the bottom felt, and other components.

[0051] Example 2

[0052] like Figures 1 to 8 As shown, the embodiment of the present invention provides a single crystal furnace thermal field enhancement device, comprising a plurality of single crystal furnace thermal field enhancement units 1 assembled on the single crystal furnace bottom plate 21. The single crystal furnace thermal field enhancement units 1 are the single crystal furnace thermal field enhancement units described in Example 1. A crucible is disposed within the single crystal furnace, and an insulation assembly is disposed between the crucible and the furnace wall. The insulation assembly comprises, from bottom to top, a bottom felt 31, a lower insulation tube 32, a middle insulation tube 33, and an upper insulation tube 34.

[0053] As an implementation scenario, in this scenario, three groups of single crystal furnace thermal field lifting units 1 are used, and the three groups of single crystal furnace thermal field lifting units 1 are distributed at equal intervals, that is, the three groups of single crystal furnace thermal field lifting units 1 are arranged in an equilateral triangle structure, which can achieve a better cooling effect while also ensuring the stability of the lifting. Specifically, three mounting ports that are compatible with the connecting plate 112 are provided on the furnace bottom plate 21, and the bottom felt 31 and the lower insulation tube 32 are both provided with through holes that coincide with the central axis of the mounting ports. The connecting plate 112 is fixed to the bottom of the furnace bottom plate 21 through the mounting port, and the upper end of the support rod 12 passes through the through hole and is connected to the middle insulation tube 33. Of course, in other implementation scenarios, in order to improve the cooling effect, more groups of single crystal furnace thermal field lifting units 1 can be used. In some implementation scenarios, the upper insulation tube 34 can also be lifted by its lifting device to further improve the cooling efficiency.

[0054] Example 3

[0055] The embodiment of the present utility model application provides a single crystal furnace, including the single crystal furnace thermal field enhancement device described in Example 2.

[0056] Parts not described in detail in this embodiment are well-known technologies in the art.

[0057] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope of protection of the claims.

Claims

1. A single crystal furnace thermal field enhancement unit, characterized in that: include: A lifting mechanism (11) is arranged at the bottom of the single crystal furnace; A support rod (12), one end of which is connected to the lifting mechanism (11), and the other end of which passes through the furnace bottom plate (21), the bottom felt (31) and the lower insulation tube (32) and is connected to the middle insulation tube (33); The lifting mechanism (11) is drivingly connected to the support rod (12), and the support rod (12) can move upward under the drive of the lifting mechanism (11) to form a heat dissipation gap between the middle heat-insulating tube (33) and the lower heat-insulating tube (32).

2. The single crystal furnace thermal field enhancement unit according to claim 1, characterized in that: The support rod (12) is entirely or partially provided with a cavity (12a) for introducing a cooling medium.

3. The single crystal furnace thermal field enhancement unit according to claim 2, characterized in that: A support seat (13) is provided at the lower end of the support rod (12), a power output end of the lifting mechanism (11) is connected to the support seat (13), and the lifting mechanism (11) drives the support seat (13) to move.

4. The single crystal furnace thermal field enhancement unit according to claim 3, characterized in that: A guide rod (14) with two ends extending therethrough is provided in the cavity of the support rod (12); a connecting channel (131) and a cooling inlet (132) and a cooling outlet (133) communicating with the connecting channel (131) are provided on the support seat (13); one end of the guide rod (14) is connected to and communicates with the connecting channel (131), and the other end extends toward one end of the cavity (12a) and forms a gap with the inner wall of the cavity.

5. The single crystal furnace thermal field enhancement unit according to claim 3 or 4, characterized in that: The support rod (12) comprises a first rod body (121) and a second rod body (122), wherein a cavity (12a) is provided in the first rod body (121), and one end of the cavity (12a) is provided with a connecting port (1211), and the connecting port (1211) is connected to the support seat (13), and an end of the first rod body (121) away from the support seat (13) is connected to one end of the second rod body (122), and the other end of the second rod body (122) is connected to the middle heat-insulating cylinder (33); or, The support rod (12) comprises, from bottom to top, a first rod body (121), a second rod body (122), and a third rod body (123); a cavity (12a) is provided in the first rod body (121); one end of the cavity (12a) is provided with a connecting port (1211); the connecting port (1211) is connected to the support seat (13); one end of the first rod body (121) away from the support seat (13) is connected to one end of the second rod body (122); the other end of the second rod body (122) is connected to one end of the third rod body (123); and the other end of the third rod body (123) is connected to the middle heat-insulating cylinder (33).

6. The single crystal furnace thermal field enhancement unit according to claim 5, characterized in that: The second rod body (122) and the third rod body (123) are carbon-carbon support rod bodies, and the first rod body (121) is an internal cooling support rod body.

7. The single crystal furnace thermal field enhancement unit according to claim 3, characterized in that: The lifting mechanism (11) comprises: A cylinder (111) is disposed below the furnace bottom plate (21), and a movable end thereof is connected to the support seat (13); A connecting plate (112) connected to the furnace bottom plate (21); A plurality of guide rods (113) are provided between the cylinder (111) and the connecting plate (112), and the cylinder (111) drives the support seat (13) to move along the guide rods (113).

8. The single crystal furnace thermal field enhancement unit according to claim 7, characterized in that: The single crystal furnace thermal field lifting unit further comprises a bellows (15), wherein the bellows (15) is sleeved on the support rod (12) between the connecting plate (112) and the support seat (13), wherein the upper end of the bellows (15) is sealedly connected to the connecting plate (112), and the lower end is sealedly connected to the support seat (13).

9. A single crystal furnace thermal field enhancement device, characterized in that: It comprises a plurality of single crystal furnace thermal field enhancement units installed on the furnace bottom plate, and the single crystal furnace thermal field enhancement units are the single crystal furnace thermal field enhancement units according to any one of claims 1 to 8.

10. A single crystal furnace, characterized in that: It includes a single crystal furnace thermal field lifting device as described in claim 9.

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