Ion source mounting flange and cooling system component

Abstract

The utility model discloses an ion source mounting flange, which relates to the technical field of cooling and comprises a flange body, a cooling groove is arranged at the top of the flange body, circulating cooling liquid is arranged in the cooling groove, a cover plate is arranged on the cooling groove, a liquid inlet is arranged at one end of the cover plate, and a liquid outlet is arranged at the other end of the cover plate. A liquid inlet is formed in one end of the cover plate, a liquid outlet is formed in one end, far away from the liquid inlet, of the cover plate, the liquid inlet and the liquid outlet are both communicated with the cooling tank, the cooling tank is arranged, circulating cooling liquid is arranged in the cooling tank, the cooling liquid injected from the liquid inlet flows to the liquid outlet through the cooling tank, and in the link, the cooling liquid is cooled to the liquid outlet through the cooling tank. Heat generated by the ion source is transmitted to the flange body and then absorbed by the circulating cooling liquid to be taken away, the ion source can be effectively cooled so as to protect the internal structure of the ion source from being damaged, the cooling effect is good, the structure is simple and reasonable, the manufacturing cost is low, and the practicability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of cooling, in particular to an ion source mounting flange and cooling system components. Background Art

[0002] For the ion source itself, cooling is very important to prevent the internal structure of the ion source from being damaged. However, the existing mechanism for cooling the ion source is complex and costly, so a cooling ion source mounting flange is needed.

[0003] An existing patent (publication number: CN218735703U) proposes a novel instrument ion source cooling structure, comprising an ion source, a cooling body disposed around the ion source, and a cooling cavity with a serpentine cross-section extending along the circumference of the ion source. This invention effectively alleviates the problem of water easily accumulating within the annular cooling cavity, resulting in a slow flow rate of cold water within the cavity and poor cooling effect.

[0004] The above-mentioned ion source cooling structure adopts a technical solution to solve the cooling problem by arranging a cooling body around the ion source, and opening a cooling cavity with a serpentine cross-section in the cooling cavity; the cooling cavity is opened along the circumference of the ion source. Although this solution can solve the cooling problem of the ion source, the process of opening a serpentine cooling cavity on the cooling body is more complicated and its manufacturing cost will be higher. Therefore, we propose an ion source mounting flange to solve the above problem. Utility Model Content

[0005] The utility model provides an ion source mounting flange, which solves the technical problems of the current ion source cooling structure having complex process and high production cost.

[0006] In order to solve the above technical problems, the ion source mounting flange provided by the utility model includes a flange body, a cooling groove is provided on the top of the flange body, a cooling liquid is circulated in the cooling groove, a cover plate is provided on the cooling groove, a liquid inlet is provided at one end of the cover plate, and a liquid outlet is provided at the end of the cover plate away from the liquid inlet, and the liquid inlet and the liquid outlet are both connected to the cooling groove.

[0007] Preferably, the cooling groove and the cover plate are both C-shaped, and the cover plate and the cooling groove are the same size.

[0008] The above technical solution is adopted: the cooling groove and the cover plate are both C-shaped, so that the flange body has a cooling function with good effect. The cover plate and the cooling groove are the same size, which facilitates the installation between the cover plate and the cooling groove and ensures that the subsequent welding is tight.

[0009] Preferably, the cover plate is welded to the notch of the cooling groove.

[0010] The above technical solution is adopted: by welding the cover plate to the notch of the cooling groove, the cover plate can be firmly fixed on the cooling groove, and then by polishing the welding point, the top surface of the flange body looks smoother.

[0011] Preferably, a positioning groove is provided at the bottom of the cooling groove, and a positioning block is fixed on the inner surface of the cover plate, and the positioning block is clamped in the positioning groove.

[0012] The above technical solution is adopted: a positioning groove is opened through the bottom of the cooling trough, and a positioning block is fixed on the inner surface of the cover plate. The positioning block is clamped in the positioning groove, which makes it convenient to set the cover plate on the cooling trough, and can be clamped more accurately and quickly. At the same time, the positioning block has a supporting function, which facilitates the welding between the cover plate and the cooling trough.

[0013] Preferably, the width of the positioning groove is smaller than the width of the cooling groove.

[0014] The above technical solution is adopted: by making the width of the positioning groove smaller than the width of the cooling groove, the cover plate can be accurately positioned and fixed on the cooling groove, while the coolant can flow smoothly in the cooling groove.

[0015] Preferably, the positioning blocks are welded to the inner surface of the cover plate, and three positioning blocks are provided and distributed at both ends and the middle of the cover plate.

[0016] The above technical solution is adopted: by welding the positioning blocks to the bottom of the cover plate, three positioning blocks are set and distributed at both ends and the middle of the cover plate, so that the cover plate is placed more stably in the cooling tank and is convenient for welding.

[0017] Preferably, a threaded mounting hole is provided on the flange body.

[0018] The above technical solution is adopted: a threaded mounting hole is opened on the flange body, the ion source is arranged on the upper surface of the ion source mounting flange body, and the threaded mounting hole is used to fix the ion source.

[0019] The present application also provides a cooling system component, which includes the ion source mounting flange.

[0020] Compared with the related art, the present invention has the following beneficial effects:

[0021] 1. Compared with the traditional ion source mounting flange, the utility model is provided with a cooling groove, the cooling groove is provided with a circulating coolant, a cover plate is provided on the cooling groove, a liquid inlet is provided at one end of the cover plate, and a liquid outlet is provided at the end of the cover plate away from the liquid inlet. The ion source is arranged on the upper surface of the ion source mounting flange, and the coolant filled from the liquid inlet circulates to the liquid outlet through the cooling groove. In this link, the heat generated by the ion source is transferred to the flange body, and then the heat is absorbed and taken away by the circulating coolant, which can effectively cool the ion source to protect the internal structure of the ion source from damage. The cooling effect is good, the structure is simple and reasonable, and the economy and practicality are strong. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the top view of the ion source mounting flange;

[0023] Figure 2 This is a structural diagram of the separation of the flange body and the cover plate in the ion source mounting flange;

[0024] Figure 3 This is a top view of the flange body and cover plate separated from the ion source mounting flange;

[0025] Figure 4 This is a bottom view of the ion source mounting flange with the flange body and cover separated.

[0026] Numbers in the figure: 1. Flange body; 2. Cover plate; 3. Threaded mounting hole; 4. Cooling groove; 5. Liquid inlet; 6. Liquid outlet; 7. Positioning groove; 8. Positioning block. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0028] Example 1

[0029] like Figure 1-Figure 4 As shown, the ion source mounting flange includes a flange body 1, a cooling groove 4 is provided on the top of the flange body 1, the cooling groove 4 is formed by milling, a coolant is circulated in the cooling groove 4, a cover plate 2 is provided on the cooling groove 4, a liquid inlet 5 is provided at one end of the cover plate 2, and a liquid outlet 6 is provided on the end of the cover plate 2 away from the liquid inlet 5, and the liquid inlet 5 and the liquid outlet 6 are both connected to the cooling groove 4;

[0030] A cooling groove 4 is provided on the top of the flange body 1, and a circulating coolant is provided in the cooling groove 4. A cover plate 2 is provided on the cooling groove 4, and a liquid inlet 5 is provided at one end of the cover plate 2. A liquid outlet 6 is provided on the end of the cover plate 2 away from the liquid inlet 5. The liquid inlet 5 and the liquid outlet 6 are both connected to the cooling groove 4. The ion source is set on the upper surface of the ion source mounting flange, and the coolant filled from the liquid inlet 5 flows through the cooling groove 4 to the liquid outlet 6. In this link, the heat generated by the ion source is transferred to the flange body 1, and then the circulating coolant absorbs the heat and takes it away, which can effectively cool the ion source to protect the internal structure of the ion source from damage, and the cooling effect is good.

[0031] Example 2

[0032] like Figure 1-Figure 4 As shown, the cooling groove 4 and the cover plate 2 are both C-shaped, the cover plate 2 and the cooling groove 4 are the same size, the cover plate 2 is welded to the notch of the cooling groove 4, a positioning groove 7 is provided at the bottom of the cooling groove 4, a positioning block 8 is fixed to the inner surface of the cover plate 2, the positioning block 8 is clamped in the positioning groove 7, the width of the positioning groove 7 is smaller than the width of the cooling groove 4, the positioning block 8 is welded to the inner surface of the cover plate 2, three positioning blocks 8 are provided and distributed at both ends and the middle of the cover plate 2, a threaded mounting hole 3 is provided on the flange body 1, the ion source is provided on the upper surface of the ion source mounting flange body 1, and the threaded mounting hole 3 is used to fix the ion source;

[0033] The cooling groove 4 and the cover plate 2 are both C-shaped, so that the flange body 1 has a cooling function with good effect. The cover plate 2 is the same size as the cooling groove 4, which facilitates the installation between the cover plate 2 and the cooling groove 4 and ensures that the subsequent welding is tight. The cover plate 2 is welded to the notch of the cooling groove 4 to ensure the firmness of the cover plate 2 on the cooling groove 4. Then, by polishing the welding point, the top surface of the flange body 1 looks smoother.

[0034] A positioning groove 7 is provided at the bottom of the cooling groove 4, and a positioning block 8 is fixed on the inner surface of the cover plate 2. The positioning block 8 is clamped in the positioning groove 7, which makes it convenient to set the cover plate 2 on the cooling groove 4, and can be clamped more accurately and quickly. At the same time, the positioning block 8 has a supporting function, which facilitates the welding between the cover plate 2 and the cooling groove 4. The width of the positioning groove 7 is smaller than the width of the cooling groove 4, which facilitates the accurate positioning and fixing of the cover plate 2 on the cooling groove 4, and allows the coolant to flow smoothly in the cooling groove 4. It is welded to the inner surface of the cover plate 2 through the positioning block 8. Three positioning blocks 8 are provided and distributed at both ends and the middle of the cover plate 2, so that the cover plate 2 is placed more stably in the cooling groove 4 and is convenient for welding.

[0035] Example 3

[0036] Based on Example 1 or Example 2

[0037] This embodiment further provides a cooling system component, which includes the ion source mounting flange of embodiment one or embodiment two.

[0038] Working principle: Figure 1-4 As shown, the ion source is set on the upper surface of the ion source mounting flange, and the coolant added from the liquid inlet 5 flows through the cooling groove 4 to the liquid outlet 6. In this link, the heat generated by the ion source is transferred to the flange body 1, and then the heat is absorbed and taken away by the circulating coolant, which can effectively cool the ion source to protect the internal structure of the ion source from damage. The cooling effect is good, the structure is simple and reasonable, and the economy and practicality are strong.

[0039] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ion source mounting flange, comprising a flange body (1), characterized in that: A cooling groove (4) is provided on the top of the flange body (1), and a circulating coolant is provided in the cooling groove (4). A cover plate (2) is provided on the cooling groove (4), and a liquid inlet (5) is provided at one end of the cover plate (2). A liquid outlet (6) is provided at the end of the cover plate (2) away from the liquid inlet (5). Both the liquid inlet (5) and the liquid outlet (6) are connected to the cooling groove (4); a positioning groove (7) is provided at the bottom of the cooling groove (4), and a positioning block (8) is fixed on the inner surface of the cover plate (2), and the positioning block (8) is clamped in the positioning groove (7); The width of the positioning groove (7) is smaller than the width of the cooling groove (4); the positioning block (8) is welded to the inner surface of the cover plate (2), and three positioning blocks (8) are provided and distributed at both ends and the middle of the cover plate (2).

2. The ion source mounting flange according to claim 1, characterized in that: The cooling groove (4) and the cover plate (2) are both C-shaped, and the cover plate (2) and the cooling groove (4) are of the same size.

3. The ion source mounting flange according to claim 1, wherein: The cover plate (2) is welded to the notch of the cooling groove (4).

4. The ion source mounting flange according to claim 1, wherein: A threaded mounting hole (3) is provided on the flange body (1).

5. Cooling system components, characterized in that, The cooling system component comprises the ion source mounting flange according to any one of claims 1 to 4.

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