Vacuum gate valve of friction-free structure

Abstract

The utility model discloses a vacuum gate valve of a friction-free structure, which comprises a valve body, a valve core, a valve core and a valve core, the elastic valve plate assembly is arranged in the valve body, at least four first inner grooves are formed in the elastic valve plate assembly, and the first inner grooves are formed at intervals; one end of the valve rod is movably connected with the elastic valve plate assembly, at least four second inner grooves are formed in the valve rod, and the second inner grooves correspond to the first inner grooves one to one; the at least four rolling pieces are arranged at the first inner groove and the second inner groove in a one-to-one manner and are arranged between the elastic valve plate assembly and the valve rod; therefore, the technical problems that the valve plate and the valve body are abraded due to friction, the service life is shortened, and particles generated by abrasion pollute a vacuum system are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, in particular to a vacuum plug-in valve with a frictionless structure. Background Art

[0002] In a vacuum system, valves are needed to control the flow of gas to achieve system control and operation;

[0003] Among them, vacuum gate valves are commonly used in vacuum systems. They link the valve stem to reciprocating position through the actuator, thereby linking the valve plate to reciprocating position, so that the valve plate and the internal channel of the valve body are staggered or aligned with each other, thereby realizing the opening or closing of the vacuum gate valve;

[0004] Since the vacuum gate valve needs to continuously reciprocate the valve plate when opening and closing, sliding friction will continuously occur between the sealing layer on the surface of the valve plate and the valve body wall or sealing surface. After long-term use, the valve plate and the valve body will wear due to friction, which reduces the service life of the vacuum gate valve. At the same time, the particles generated by wear will pollute the vacuum system. Utility Model Content

[0005] In view of the above-mentioned shortcomings in the related art, the purpose is to provide a vacuum gate valve with a frictionless structure to solve the technical problems in the related art that the valve plate and valve body will wear due to friction, reducing the service life, and the particles generated by wear will pollute the vacuum system;

[0006] The technical solution to achieve the purpose is: a vacuum gate valve with a frictionless structure, comprising:

[0007] a valve body, wherein the valve body has an inner space and an inner channel;

[0008] An elastic valve plate assembly is disposed in the valve body, wherein the elastic valve plate assembly has at least four first inner grooves, and the first inner grooves are spaced apart from each other;

[0009] a valve stem, one end of which is movably connected to the elastic valve plate assembly, the valve stem having at least four second inner grooves, the second inner grooves corresponding to the first inner grooves one by one;

[0010] and at least four rolling elements, which are arranged one-to-one at the first inner groove and the second inner groove, and are arranged between the elastic valve plate assembly and the valve stem;

[0011] When closing the inner passage, the valve stem moves, and the elastic valve plate assembly and the rolling element move in a straight line along the inner space toward the inner passage. The elastic valve plate assembly is aligned with the inner passage, and the valve stem continues to move, and the rolling element rolls along the first inner groove and the second inner groove. The rolling element drives the elastic valve plate assembly to open toward the valve body, and the elastic valve plate assembly closes the inner passage.

[0012] When the inner channel is opened, the valve stem moves, the valve stem, the rolling element and the elastic valve plate assembly become loose, the elastic valve plate assembly retracts in the opposite direction of the valve body, the rolling element rolls along the first inner groove and the second inner groove, the valve stem continues to move, and the elastic valve plate assembly and the rolling element are linked together to move along the inner space and in a straight line away from the inner channel, and the elastic valve plate assembly opens the inner channel.

[0013] Further: the valve body includes: a first part;

[0014] a second part connected to one end of the first part, having the inner passage and forming the inner space together with the first part;

[0015] at least one first sealing member disposed between the first portion and the second portion;

[0016] and at least one second sealing member disposed in the inner space and between the first portion and the valve stem.

[0017] Furthermore: the first sealing member or the second sealing member is an O-ring.

[0018] Further: the elastic valve plate assembly includes: a valve plate, arranged on one side of the valve stem, and having two of the first inner grooves;

[0019] a support plate, arranged on the other side of the valve stem, spaced apart from the valve plate, and having another two of the first inner grooves;

[0020] a leaf spring connected between the valve plate and the support plate;

[0021] at least one third sealing member connected to the valve plate and configured to form a seal between the valve plate and the valve body when closing the inner passage;

[0022] and a plurality of nut assemblies, connecting the leaf spring and the valve plate, and connecting the leaf spring and the support plate.

[0023] Furthermore: the third sealing member is an O-ring.

[0024] Further: the first inner groove includes: a first concave area;

[0025] and a second concave region, the second concave region being connected to the first concave region, and the concave depth of the second concave region being smaller than the concave depth of the first concave region.

[0026] Further: the valve stem includes: a round rod section;

[0027] and a flat rod segment connected to one end of the round rod segment and having the second inner groove.

[0028] Further: the second inner groove includes: a third inner concave area;

[0029] and a fourth concave region, wherein the fourth concave region is connected to the third concave region, and a concave depth of the fourth concave region is smaller than a concave depth of the third concave region.

[0030] Furthermore, when the inner channel is opened, the first concave area and the third concave area are provided with the rolling elements, and a first distance A is defined between the two rolling elements. The first distance A is the distance between the centers of the two rolling elements.

[0031] When the inner channel is closed, the second concave area and the fourth concave area are provided with the rolling elements, and a second distance B is provided between the two rolling elements, where the second distance B is the distance between the centers of the two rolling elements;

[0032] The first distance A is smaller than the second distance B.

[0033] Furthermore: the rolling element is a ball.

[0034] The above technical solution has the following beneficial effects: a vacuum gate valve with a frictionless structure, compared with the related art, is provided with a valve body, an elastic valve plate assembly, a valve stem and a rolling element;

[0035] When the inner channel is closed, the valve stem moves, and the elastic valve plate assembly and the rolling element move along the inner space and in a straight line toward the inner channel. The elastic valve plate assembly is aligned with the inner channel, and the valve stem continues to move, and the rolling element rolls along the first inner groove and the second inner groove. The rolling element drives the elastic valve plate assembly to open toward the valve body, and the elastic valve plate assembly closes the inner channel.

[0036] When the inner channel is opened, the valve stem moves, the valve stem, the rolling element and the elastic valve plate assembly become loose, the elastic valve plate assembly retracts in the opposite direction of the valve body, the rolling element rolls along the first inner groove and the second inner groove, the valve stem continues to move, and the elastic valve plate assembly and the rolling element move together along the inner space and in a straight line away from the inner channel, and the elastic valve plate assembly opens the inner channel;

[0037] It achieves no sliding friction between the elastic valve plate assembly and the valve body, prolongs the service life, does not generate particles, and does not pollute the vacuum system;

[0038] This overcomes the technical problems that the valve plate and the valve body will wear out due to friction, which reduces the service life, and the particles generated by the wear will pollute the vacuum system. The technical effect of no sliding friction between the valve plate and the valve body is achieved, which extends the service life, does not generate particles, and does not pollute the vacuum system. It is practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is a schematic diagram of the structure when the inner channel is opened;

[0040] Figure 2 This is a structural diagram when the inner channel is closed;

[0041] Figure 3 It is a schematic diagram of the structure after the elastic valve plate assembly, valve stem and rolling element are connected;

[0042] Figure 4 for Figure 1 A local enlarged schematic diagram in FIG.

[0043] Figure 5 It is a structural diagram of the valve stem;

[0044] Figure 6 It is a partial cross-sectional view of the valve stem;

[0045] In the figure: 10. Valve body, 11. Inner space, 12. Inner channel, 10-1. First part, 10-2. Second part, 10-3. First sealing member, 10-4. Second sealing member, 20. Elastic valve plate assembly, 21. First inner groove, 20-1. Valve plate, 20-2. Support plate, 20-3. Leaf spring, 20-4. Third sealing member, 20-5. Nut assembly, 21-1. First concave area, 21-2. Second concave area, 30. Valve stem, 31. Second inner groove, 30-1. Round rod segment, 30-2. Flat rod segment, 31-1. Third concave area, 31-2. Fourth concave area, 40. Rolling member. DETAILED DESCRIPTION

[0046] In order to make the content easier to understand, the following is a further detailed description based on specific embodiments and in conjunction with the accompanying drawings;

[0047] A frictionless vacuum gate valve solves the technical problems in related technologies such as wear of the valve plate and valve body due to friction, which reduces the service life, and particles generated by wear pollute the vacuum system. It can be manufactured and used to achieve the positive effects of no sliding friction between the valve plate and the valve body, extending the service life, and no particles are generated, which does not pollute the vacuum system. The overall idea is as follows:

[0048] Implementation Method

[0049] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown; A vacuum gate valve with a frictionless structure, comprising:

[0050] A valve body 10 having an inner space 11 and an inner channel 12;

[0051] The elastic valve plate assembly 20 is disposed in the valve body 10 , and the elastic valve plate assembly 20 has at least four first inner grooves 21 , and the first inner grooves 21 are spaced apart from each other;

[0052] A valve stem 30, one end of which is movably connected to the elastic valve plate assembly 20, and the valve stem 30 has at least four second inner grooves 31, and the second inner grooves 31 correspond to the first inner grooves 21 one by one;

[0053] and at least four rolling elements 40 , which are arranged one-to-one at the first inner groove 21 and the second inner groove 31 , and are arranged between the elastic valve plate assembly 20 and the valve stem 30 ;

[0054] When closing the inner passage 12, the valve stem 30 moves, and the elastic valve plate assembly 20 and the rolling element 40 are linked together to move along the inner space 11 along a straight line toward the inner passage 12. The elastic valve plate assembly 20 is aligned with the inner passage 12. The valve stem 30 continues to move, and the rolling element 40 is linked to roll along the first inner groove 21 and the second inner groove 31. The rolling element 40 links the elastic valve plate assembly 20 to open toward the valve body 10, and the elastic valve plate assembly 20 closes the inner passage 12.

[0055] When the inner passage 12 is opened, the valve stem 30 moves, the valve stem 30, the rolling member 40 and the elastic valve plate assembly 20 are loose, the elastic valve plate assembly 20 is retracted in the opposite direction of the valve body 10, the rolling member 40 rolls along the first inner groove 21 and the second inner groove 31, the valve stem 30 continues to move, and the elastic valve plate assembly 20 and the rolling member 40 are linked to move along a straight line away from the inner passage 12, and the elastic valve plate assembly 20 opens the inner passage 12;

[0056] The elastic valve plate assembly 20 and the valve body 10 are not in sliding friction, the service life is prolonged, no particles are generated, and the vacuum system is not polluted;

[0057] Another embodiment is provided.

[0058] As shown in Figure 1 , Figure 2 , Figure 4 ; the valve body 10 comprises a first part 10-1, a second part 10-2 connected to one end of the first part 10-1, having the inner passage 12, and having the inner space 11 together with the first part 10-1, at least one first sealing member 10-3 arranged between the first part 10-1 and the second part 10-2, and at least one second sealing member 10-4 arranged at the inner space 11 and arranged between the first part 10-1 and the valve stem 30;

[0059] The first part 10-1 and the second part 10-2 are arranged, which is beneficial to arrange the inner space 11 and the inner passage 12, and forms a reliable support structure, which is beneficial to arrange the elastic valve plate assembly 20, the valve stem 30 and the rolling member 40;

[0060] The first sealing member 10-3 or the second sealing member 10-4 is an O-shaped sealing ring, which ensures the sealing;

[0061] Another embodiment is provided.

[0062] As shown in Figure 1 , Figure 2 , Figure 3 , Figure 4As shown; in implementation, the elastic valve plate assembly 20 includes: a valve plate 20-1, which is arranged on one side of the valve stem 30 and has two first inner grooves 21; a support plate 20-2, which is arranged on the other side of the valve stem 30, spaced apart from the valve plate 20-1, and has another two first inner grooves 21; a leaf spring 20-3, which is connected between the valve plate 20-1 and the support plate 20-2; at least one third sealing member 20-4, which is connected to the valve plate 20-1 and is used to form a seal between the valve plate 20-1 and the valve body 10 when the inner channel 12 is closed; and a plurality of nut assemblies 20-5, which connect the leaf spring 20-3 and the valve plate 20-1, and connect the leaf spring 20-3 and the support plate 20-2;

[0063] The valve plate 20-1 is a circular plate structure;

[0064] The support plate 20-2 is a circular plate structure;

[0065] The leaf spring 20-3 is a common structure in the prior art. It not only connects the valve plate 20-1 and the support plate 20-2, playing a limiting role, but also has elasticity and can expand and retract, which is conducive to the expansion or return of the linkage valve plate 20-1 and the support plate 20-2.

[0066] The third sealing member 20 - 4 is an O-ring, which ensures the sealing between the valve plate 20 - 1 and the valve body 10 when the inner channel 12 is closed;

[0067] The nut assembly 20-5 is a common structure in the prior art, such as a combination of a screw and a nut, which is conducive to connecting the leaf spring 20-3 and the valve plate 20-1, and connecting the leaf spring 20-3 and the support plate 20-2. The connection reliability is relatively good and the assembly is relatively convenient.

[0068] The first inner groove 21 includes a first concave area 21-1 and a second concave area 21-2. The second concave area 21-2 is connected to the first concave area 21-1, and the concave depth of the second concave area 21-2 is less than the concave depth of the first concave area 21-1. The combination of the first concave area 21-1 and the second concave area 21-2 forms a structure that is roughly "teardrop-shaped" or "half peanut shell-shaped" (the shapes here are merely analogous descriptions, and those skilled in the art can directly and unambiguously understand them with reference to the accompanying drawings).

[0069] Another embodiment:

[0070] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5、 Figure 6 As shown; when implemented, the valve stem 30 includes: a round rod segment 30-1; and a flat rod segment 30-2, connected to one end of the round rod segment 30-1, having the second inner groove 31;

[0071] A valve stem 30 is provided, one end of which is movably connected to the elastic valve plate assembly 20, and the other end is connected to the actuator, and is linked to the actuator to move along a straight line;

[0072] The actuator is a common structure in the prior art and is not the inventive point of the present invention. It is only used to better describe the present invention and facilitate understanding of the technical solution of the present invention.

[0073] The second inner groove 31 includes a third concave area 31-1 and a fourth concave area 31-2. The fourth concave area 31-2 is connected to the third concave area 31-1, and the concave depth of the fourth concave area 31-2 is less than the concave depth of the third concave area 31-1. The combination of the third concave area 31-1 and the fourth concave area 31-2 forms a structure that is roughly "teardrop" or "half peanut shell" (the shapes here are merely analogous descriptions, and those skilled in the art can directly and unambiguously understand them by referring to the accompanying drawings).

[0074] The shape of the second inner groove 31 is the same as that of the first inner groove 21;

[0075] When the inner channel 12 is open, the rolling elements 40 are located at the first concave area 21-1 and the third concave area 31-1, and a first distance A is defined between the two rolling elements 40, which is the distance between the centers of the two rolling elements 40. When the inner channel 12 is closed, the rolling elements 40 are located at the second concave area 21-2 and the fourth concave area 31-2, and a second distance B is defined between the two rolling elements 40, which is the distance between the centers of the two rolling elements 40. The first distance A is smaller than the second distance B. By virtue of the rolling elements 40 rolling along the first inner groove 21 and the second inner groove 31, the elastic valve plate assembly 20 is linked to the valve stem 30 for expansion or return. There is no sliding friction between the elastic valve plate assembly 20 and the valve body 10, thereby extending the service life, generating no particles, and causing no pollution to the vacuum system.

[0076] Another embodiment:

[0077] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4The rolling member 40 is a ball, which is beneficial to rolling along the first inner groove 21 and the second inner groove 31, and has relatively small frictional resistance and smooth movement;

[0078] When the inner passage 12 is closed, the valve rod 30 moves to align the elastic valve plate assembly 20 with the inner passage 12, and the valve rod 30 continues to move to drive the rolling member 40 to roll along the first inner groove 21 and the second inner groove 31, and drive the elastic valve plate assembly 20 to open the inner passage 12.

[0079] When the inner passage 12 is opened, the valve rod 30 moves to loosen the connection between the valve rod 30, the rolling member 40 and the elastic valve plate assembly 20, and the elastic valve plate assembly 20 is retracted to open the inner passage 12.

[0080] In the description, it should be understood that the terms "upper", "lower", "left", "right", "front", "back" and the like indicate the positional or spatial relationship based on the position relationship described in the drawings, and are only for the convenience of description or simplification of description, and do not indicate a specific orientation that must be had; the operation process described in the embodiments is not an absolute use step, and in actual use, corresponding adjustments can be made;

[0081] Unless defined individually, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art; the "first", "second" and similar words used in the specification and claims do not indicate any order, quantity or importance, but are used to distinguish different components; similarly, "one" or "a" and the like do not indicate a quantity limit, but indicate the presence of at least one, which should be determined according to the content of the embodiments;

[0082] The above is only a preferred specific embodiment, but the protection scope is not limited thereto, and any person skilled in the art can make equivalent replacements or changes to the technical solutions and the inventive concept within the disclosed technical scope, which should be covered within the protection scope.

Claims

1. A vacuum gate valve with a frictionless structure, characterized in that: include: A valve body (10), wherein the valve body (10) has an inner space (11) and an inner channel (12); An elastic valve plate assembly (20) is arranged in the valve body (10), and the elastic valve plate assembly (20) has at least four first inner grooves (21), and the first inner grooves (21) are arranged at intervals; A valve stem (30), one end of which is movably connected to the elastic valve plate assembly (20), and the valve stem (30) has at least four second inner grooves (31), and the second inner grooves (31) correspond one-to-one to the first inner grooves (21); and at least four rolling elements (40), which are arranged one-to-one at the first inner groove (21) and the second inner groove (31), and are arranged between the elastic valve plate assembly (20) and the valve stem (30); When the inner channel (12) is closed, the valve stem (30) moves, and the elastic valve plate assembly (20) and the rolling element (40) are linked together to move along the inner space (11) along a straight line toward the inner channel (12). The elastic valve plate assembly (20) is aligned with the inner channel (12). The valve stem (30) continues to move, and the rolling element (40) is linked to roll along the first inner groove (21) and the second inner groove (31). The rolling element (40) links the elastic valve plate assembly (20) to open toward the valve body (10), and the elastic valve plate assembly (20) closes the inner channel (12). When the inner channel (12) is opened, the valve stem (30) moves, the valve stem (30), the rolling element (40) and the elastic valve plate assembly (20) become loose, the elastic valve plate assembly (20) retracts in the opposite direction of the valve body (10), the rolling element (40) rolls along the first inner groove (21) and the second inner groove (31), the valve stem (30) continues to move, and the elastic valve plate assembly (20) and the rolling element (40) move together along the inner space (11) and in a straight line away from the inner channel (12), and the elastic valve plate assembly (20) opens the inner channel (12).

2. The frictionless vacuum gate valve according to claim 1, characterized in that: The valve body (10) comprises: a first part (10-1); a second part (10-2), connected to one end of the first part (10-1), having the inner channel (12), and together with the first part (10-1), having the inner space (11); At least one first sealing member (10-3) is arranged between the first portion (10-1) and the second portion (10-2); and at least one second sealing member (10-4) disposed in the inner space (11) and between the first portion (10-1) and the valve stem (30).

3. The frictionless vacuum gate valve according to claim 2, characterized in that: The first sealing member (10-3) or the second sealing member (10-4) is an O-ring.

4. The frictionless vacuum gate valve according to claim 1, characterized in that: The elastic valve plate assembly (20) comprises: a valve plate (20-1) arranged on one side of the valve stem (30) and having two first inner grooves (21); a support plate (20-2), arranged on the other side of the valve stem (30), spaced apart from the valve plate (20-1), and having another two of the first inner grooves (21); a leaf spring (20-3), connected between the valve plate (20-1) and the support plate (20-2); at least one third sealing member (20-4) connected to the valve plate (20-1) and used to form a seal between the valve plate (20-1) and the valve body (10) when closing the inner channel (12); and a plurality of nut assemblies (20-5) connecting the leaf spring (20-3) and the valve plate (20-1), and connecting the leaf spring (20-3) and the support plate (20-2).

5. The frictionless vacuum gate valve according to claim 4, characterized in that: The third sealing member (20-4) is an O-ring.

6. The frictionless vacuum gate valve according to claim 1, characterized in that: The first inner groove (21) comprises: a first inner concave area (21-1); and a second concave area (21-2), wherein the second concave area (21-2) is connected to the first concave area (21-1), and the concave depth of the second concave area (21-2) is smaller than the concave depth of the first concave area (21-1).

7. The frictionless vacuum gate valve according to claim 1, characterized in that: The valve stem (30) comprises: a round rod section (30-1); and a flat rod segment (30-2) connected to one end of the round rod segment (30-1) and having the second inner groove (31).

8. The frictionless vacuum gate valve according to claim 6, characterized in that: The second inner groove (31) comprises: a third inner concave area (31-1); and a fourth concave area (31-2), wherein the fourth concave area (31-2) is connected to the third concave area (31-1), and the concave depth of the fourth concave area (31-2) is smaller than the concave depth of the third concave area (31-1).

9. The frictionless vacuum gate valve according to claim 8, characterized in that: When the inner channel (12) is open, the rolling elements (40) are located at the first concave area (21-1) and the third concave area (31-1), and a first distance A is located between the two rolling elements (40), the first distance A being the distance between the centers of the two rolling elements (40); When the inner channel (12) is closed, the second concave area (21-2) and the fourth concave area (31-2) are provided with the rolling elements (40), and a second distance B is provided between the two rolling elements (40), wherein the second distance B is the distance between the centers of the two rolling elements (40); The first distance A is smaller than the second distance B.

10. The frictionless vacuum gate valve according to claim 1, characterized in that: The rolling element (40) is a ball.

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