Reflection type wavelength conversion device and fluorescent color wheel
By combining an inorganic fluorescent layer, a glass layer, a sintered silver reflective layer, a transition layer, and a thermally conductive substrate, the problem of poor thermal conductivity of reflective fluorescent color wheels under high laser power is solved, achieving a fluorescent color wheel with efficient heat dissipation and high laser power resistance.
Patent Information
- Application Number
- CN202423237779.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Existing reflective fluorescent color wheels have poor thermal conductivity at high laser power and are prone to thermal quenching, which cannot meet the application requirements of high laser power laser sources.
The structure consists of an inorganic fluorescent layer, a glass layer, a sintered silver reflective layer, a transition layer, and a thermally conductive substrate. The sintered silver reflective layer serves as both a reflective and adhesive layer, the transition layer enhances interfacial bonding strength, the glass layer isolates corrosion, and the thermally conductive substrate improves heat dissipation.
The thermal conductivity and heat dissipation of the wavelength conversion device have been improved, the ability to withstand extreme laser power has been enhanced, the interfacial thermal resistance has been reduced, and the reliability and wavelength conversion efficiency of the device have been improved.
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Figure CN223526582U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wavelength conversion device technical field, more specifically, it relates to a reflection type wavelength conversion device and fluorescent color wheel. BACKGROUND
[0002] At present, the fluorescent color wheel device on the market is mainly divided into two kinds, one is transmission type fluorescent color wheel, one is reflection type fluorescent color wheel, and the reflection type fluorescent color wheel has the advantages of higher wavelength conversion effect and better heat conduction effect compared with the transmission type fluorescent color wheel, so it is more widely used. The reflection type fluorescent color wheel is mostly composed of metal oxide particles and inorganic glass powder or organic silicone glue, in order to ensure the reflectivity of the diffuse reflection layer, the diffuse reflection layer is usually made thicker, but the thicker the diffuse reflection layer is, the worse the heat conduction effect is, and the probability of thermal quenching of the fluorescent wavelength conversion layer is greater, resulting in that most fluorescent color wheels cannot meet the application requirements of high laser power laser light source. Therefore, a reflection type wavelength conversion device with higher limit laser power resistance, better heat conduction and heat dissipation effect needs to be sought. SUMMARY
[0003] The utility model aims at overcoming at least one of the above-mentioned prior art defects, providing a reflection type wavelength conversion device, which has good heat conduction, good heat dissipation effect, high wavelength conversion efficiency, high limit laser power resistance and good reliability.
[0004] Another purpose of the utility model is to provide a fluorescent color wheel.
[0005] The technical scheme adopted by the utility model is:
[0006] A reflection type wavelength conversion device, comprising inorganic fluorescent layer, glass layer, sintered silver reflection layer, transition layer and heat conduction substrate arranged in order from top to bottom, the side surface of the sintered silver reflection layer is wrapped by the glass layer and / or the inorganic fluorescent layer and / or the transition layer, the transition layer is titanium layer, nickel layer or chromium layer, the thickness of the inorganic fluorescent layer is 40-120 mu m, the thickness of the glass layer is 1-2 mu m, the thickness of the sintered silver reflection layer is 10-30 mu m, the thickness of the transition layer is 100-500 nm, and the thickness of the heat conduction substrate is 0.5-3 mm.
[0007] The technical scheme is characterized in that a transition layer is designed on the surface of the heat-conducting substrate, so that the interfacial bonding strength between the heat-conducting substrate and the sintered silver reflective layer is improved. The valence bond of the sintered silver reflective layer is mainly a metal bond. The titanium layer, the nickel layer or the chromium layer is used as the transition layer, and the activity of the transition layer is relatively high, so that the oxygen in the sintered silver reflective layer is captured to form an oxide covalent bond. In addition, the material structure of the surface layer of the heat-conducting substrate usually has defects, which is beneficial to the enrichment of oxygen molecules, so that an oxide layer is formed on the surface of the heat-conducting substrate. The oxygen in the oxide layer is easily captured by the high-activity titanium, nickel or chromium to form an oxide covalent bond. Under the combined action of the two, the active metal oxide and alloy transition layer is formed between the heat-conducting substrate and the sintered silver reflective layer, and the bonding strength between the heat-conducting substrate and the sintered silver reflective layer is improved. The sintered silver reflective layer has higher temperature resistance, can be adapted to the inorganic fluorescent layer with high thermal conductivity and good temperature resistance, and makes the wavelength conversion device have higher laser power resistance. In addition, compared with the diffuse reflection layer, the sintered silver reflective layer has higher thermal conductivity, and the heat conduction and heat dissipation effect of the wavelength conversion device is better. The better the heat quenching performance of the fluorescent layer of the prepared wavelength conversion device is, the higher the laser power density is. Compared with the silver plating layer, the sintered silver reflective layer can be adapted to the ceramic substrate or inorganic material substrate with higher thermal conductivity, and has better high-temperature resistance. Moreover, the sintered silver reflective layer can be used as the fluorescent reflection part and the bonding layer of the inorganic fluorescent layer and the heat-conducting substrate, and the bonding layer does not need to be designed additionally, so that the number of interfaces is reduced, and the interfacial thermal resistance is reduced. The side surface of the sintered silver reflective layer is wrapped by the glass layer and / or the inorganic fluorescent layer and / or the transition layer, so that the corrosion of water, oxygen and sulfur substances in the air on the sintered silver reflective layer is prevented, and the use reliability of the light-emitting device is improved. The glass layer can prevent the silver layer from migrating to the wavelength conversion layer, so that the influence of the migration of the metal silver on the luminous efficiency of the wavelength conversion layer is eliminated. Compared with the organic fluorescent layer, the inorganic fluorescent layer has better high-temperature resistance and heat dissipation. The reflective wavelength conversion device has good heat conduction, good heat dissipation effect, high wavelength conversion efficiency, high limit laser power resistance and good reliability.
[0008] In one embodiment, the heat-conducting substrate is a ceramic substrate or an inorganic substrate.
[0009] In one embodiment, the ceramic substrate is a silicon nitride substrate, an aluminum nitride substrate or a sapphire substrate.
[0010] In one embodiment, the inorganic substrate is a single crystal silicon substrate or a diamond substrate.
[0011] In one embodiment, the inorganic fluorescent layer is a fluorescent glass layer or a fluorescent ceramic layer.
[0012] In one embodiment, the glass layer is a low-refractive glass layer with a refractive index less than 1.55.
[0013] In one embodiment, the sintered silver reflective layer is a high reflectivity silver layer with reflectivity greater than 90% in the visible light band.
[0014] In one embodiment, the sintered silver reflective layer is a silver layer with density greater than 98%.
[0015] In one embodiment, the reflective wavelength conversion device is a circular ring.
[0016] A fluorescent color wheel comprising a fan wheel, a wavelength conversion device disposed on the fan wheel, and a motor for driving the fan wheel to rotate, wherein the wavelength conversion device is the reflective wavelength conversion device.
[0017] Compared with the prior art, the technical scheme has the advantages that: the sintered silver reflective layer is used as the reflective layer of the wavelength conversion device, has high reflectivity, good thermal conductivity and high temperature resistance, and can improve the conversion efficiency and the extreme laser power resistance of the wavelength conversion device; the sintered silver reflective layer can be used as the adhesive layer between the heat-conducting substrate and the wavelength conversion layer, so that the adhesive layer does not need to be designed additionally, the number of interfaces can be reduced, the interface thermal resistance can be reduced, and the thermal stability of the wavelength conversion device can be improved; the side surface of the sintered silver reflective layer is wrapped by the glass layer and / or the inorganic fluorescent layer and / or the transition layer, so that the corrosion of water, oxygen and sulfur substances in the air on the sintered silver reflective layer can be prevented, and the use reliability of the light-emitting device can be improved; the glass layer can prevent the silver layer from migrating to the wavelength conversion layer, so that the influence of the migration of the metal silver on the light-emitting efficiency of the wavelength conversion layer can be eliminated; the transition layer can improve the interface adhesion strength between the heat-conducting substrate and the sintered silver reflective layer, and ensure the reliability of the device; compared with the organic fluorescent layer, the inorganic fluorescent layer has better high temperature resistance and better heat dissipation; the good thermal conductivity, the good heat dissipation effect, the high wavelength conversion efficiency, the high extreme laser power resistance and the good reliability of the reflective wavelength conversion device are realized through the cooperation of the layers. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 FIG. 1 is a structural schematic diagram of the embodiment 1 of the present application.
[0019] Figure 2 FIG. 4 is a structural schematic diagram of the embodiment 4 of the present application.
[0020] Figure 3 FIG. 6 is a structural schematic diagram of the comparative example 1 of the present application.
[0021] Figure 4 FIG. 8 is a structural schematic diagram of the fluorescent color wheel of the embodiment 5.
[0022] Explanation of reference signs: 1, inorganic fluorescent layer; 2, glass layer; 3, sintered silver reflective layer; 4, transition layer; 5, heat-conducting substrate; 10, wavelength conversion device; 20, impeller fan; 30, motor. DETAILED DESCRIPTION
[0023] The drawings of the utility model are only used for example explanation, and cannot be understood as the limitation of the utility model. In order to better explain the following embodiments, some components of the drawings can be omitted, enlarged or reduced, and the size of actual products is not represented; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings can be omitted.
[0024] The technical scheme provides a reflective wavelength conversion device, which comprises inorganic fluorescent layer 1, glass layer 2, sintered silver reflective layer 3, transition layer 4 and heat-conducting substrate 5 arranged from top to bottom, and the side surface of the sintered silver reflective layer 3 is wrapped by the glass layer 2 and / or the inorganic fluorescent layer 1 and / or the transition layer 4.
[0025] The inorganic fluorescent layer 1 receives laser and converts the laser into excited light at least partially, and the thickness is 40-120 μm. The inorganic fluorescent layer 1 can be selected from fluorescent glass layer or fluorescent ceramic layer, the fluorescent glass layer is prepared by sintering inorganic glass powder and fluorescent powder particles, and the fluorescent ceramic layer is prepared by high-temperature sintering of ceramic powder particles and fluorescent powder particles. The inorganic fluorescent layer 1 can also contain a certain amount of alumina, titanium oxide, silicon oxide, zinc oxide, magnesium oxide, zirconium oxide and other additive particles. Compared with the wavelength conversion layer composed of organic silicon or inorganic silicon and fluorescent powder, the inorganic fluorescent layer 1 has better high-temperature resistance, better heat dissipation and is not easy to cause fluorescence quenching.
[0026] The glass layer 2 can prevent silver in the sintered silver reflective layer from migrating into the inorganic fluorescent layer 1, so as to avoid that silver reduces the light-emitting efficiency of the inorganic fluorescent layer 1. The glass layer 2 is a sintered layer of low-refractive glass powder, and the thickness is 1-2 μm. Specifically, the glass layer 2 is a low-refractive glass layer with a refractive index less than 1.55, so that the extraction efficiency of fluorescence in the inorganic fluorescent layer can be improved, and the light output of the inorganic fluorescent layer 1 can be increased.
[0027] The sintered silver reflective layer 3 serves as a reflective layer, and reflects the incident laser and the stimulated laser, so that the stimulated laser and the laser that is not converted are emitted in the direction opposite to the incident direction of the incident laser. The thickness of the sintered silver reflective layer 3 is 10-30 μm. Specifically, the sintered silver reflective layer 3 is a high reflectivity silver layer with a visible light band reflectivity greater than 90%. The sintered silver reflective layer 3 is a silver layer with a density greater than 99%, which sufficiently guarantees the reflectivity of the sintered silver reflective layer 3, and further sufficiently guarantees the wavelength conversion efficiency of the wavelength conversion device. In addition, the sintered silver reflective layer 3 has higher temperature resistance, and can be adapted to the inorganic fluorescent layer with high thermal conductivity and good temperature resistance, so that the wavelength conversion device has higher laser power resistance. In addition, compared with the diffuse reflective layer, the sintered silver reflective layer 3 has higher thermal conductivity, and the wavelength conversion device has better heat dissipation effect, the prepared wavelength conversion device has better thermal quenching resistance of the fluorescent layer, and has higher laser power density resistance. In addition, the sintered silver reflective layer 3 can serve as a fluorescent reflective part, and can also serve as an adhesive layer between the wavelength conversion layer and the heat-conducting substrate 5, without the need to additionally design an adhesive layer, thereby reducing the number of interfaces and the interface thermal resistance. The side surface of the sintered silver reflective layer 3 is wrapped by the glass layer 2 and / or the inorganic fluorescent layer 1 and / or the transition layer 4, so as to isolate the corrosion of water, oxygen and sulfur substances in the air on the sintered silver reflective layer 3, and improve the use reliability of the light-emitting device.
[0028] The transition layer 4 serves to tightly bond the heat-conducting substrate 5 and the sintered silver reflective layer 3. Specifically, the transition layer 4 is a titanium layer, a nickel layer or a chromium layer, and the thickness is 100-500 nm. The transition layer 4 has high activity, and can extract oxygen in the sintered silver reflective layer 3 to form an oxide covalent bond. In addition, the surface layer of the heat-conducting substrate 5 usually has defects, which is beneficial to the enrichment of oxygen molecules, so that an oxide layer is formed on the surface of the heat-conducting substrate 5. The oxygen in the oxide layer is easy to be extracted by the high-activity titanium, nickel or chromium to form an oxide covalent bond. Under the combined action of the two, an active metal oxide and alloy transition layer is formed between the heat-conducting substrate 5 and the sintered silver reflective layer 3, thereby improving the bonding strength between the heat-conducting substrate 5 and the sintered silver reflective layer 3.
[0029] The heat-conducting substrate 5 serves to quickly conduct heat, and quickly dissipates the heat of the inorganic fluorescent layer 1. Specifically, the heat-conducting substrate 5 is a ceramic substrate or an inorganic substrate, and the thickness is 0.5-3 mm. More specifically, the thermal conductivity of the heat-conducting substrate 5 is greater than 30 w / m·k. The ceramic substrate can be a silicon nitride substrate, an aluminum nitride substrate or a sapphire substrate. The inorganic substrate can be a single crystal silicon substrate or a diamond substrate. The heat-conducting substrate 5 can have a circular ring shape, a circular shape, a square shape, etc., and preferably a circular ring shape or a circular shape. The surface roughness Ra is less than or equal to 0.1 μm.
[0030] The reflective wavelength conversion device of this technical solution uses materials with high thermal conductivity for each layer, resulting in good thermal conductivity. The thickness of the transition layer 4 is only 100-500nm, and the thickness of the glass layer 2 is only 1-2μm. Both of these layers are very thin, and the interfacial thermal resistance is very low and negligible. There are no other solder layers or low-temperature silver bonding layers, reducing the number of longitudinal interfaces in the device. The interfacial thermal resistance can be considered as only the thermally conductive substrate 5 + sintered silver reflective layer 3 + inorganic fluorescent layer 1. The wavelength conversion device has excellent thermal conductivity and heat dissipation effect and higher resistance to laser power density.
[0031] In particular, when it is made into a dynamic fluorescent color wheel, it has a higher tolerance to extreme laser power and better reliability, making it suitable for high-power or even ultra-high-power laser lighting scenarios.
[0032] Specifically, the fluorescent color wheel includes a fan impeller 20, a wavelength conversion device 10 mounted on the fan impeller 20, and a motor 30 for driving the fan impeller 20 to rotate. The wavelength conversion device 10 is a reflective wavelength conversion device and is annular. When the motor 30 rotates, it drives the fan impeller 20 to rotate, which in turn drives the reflective wavelength conversion device 10 to rotate. This ensures that when the fluorescent color wheel is used, the laser does not irradiate the same point of the wavelength conversion device, avoiding heat concentration at one point. Furthermore, the rotation of the fan impeller 20 also disturbs the airflow, accelerating heat dissipation, thereby improving the heat dissipation effect of the wavelength conversion device 10.
[0033] The following description is based on specific embodiments.
[0034] Example 1
[0035] like Figure 1 As shown, this embodiment discloses a reflective wavelength conversion device, comprising, from top to bottom, an inorganic fluorescent layer 1, a glass layer 2, a sintered silver reflective layer 3, a transition layer 4, and a thermally conductive substrate 5. The inorganic fluorescent layer 1 is a fluorescent glass layer, the glass layer 2 is a low-refractive-index glass layer with a refractive index less than 1.55, the sintered silver reflective layer 3 is a high-reflectivity sintered silver layer with a visible light reflectivity greater than 90% and a density greater than 90%, the transition layer 4 is a titanium layer, and the thermally conductive substrate 5 is an aluminum nitride substrate. The sides of the sintered silver reflective layer 3 are wrapped by the glass layer 2 and the transition layer 4. The thickness of the inorganic fluorescent layer 1 is 80 μm, the thickness of the glass layer 2 is 1 μm, the thickness of the sintered silver reflective layer 3 is 20 μm, the thickness of the transition layer 4 is 200 nm, and the thickness of the thermally conductive substrate 5 is 1 mm.
[0036] Example 2
[0037] This embodiment discloses a reflective wavelength conversion device, comprising, from top to bottom, an inorganic fluorescent layer 1, a glass layer 2, a sintered silver reflective layer 3, a transition layer 4, and a thermally conductive substrate 5. The inorganic fluorescent layer 1 is a fluorescent glass layer, the glass layer 2 is a low-refractive-index glass layer with a refractive index less than 1.55, the sintered silver reflective layer 3 is a high-reflectivity sintered silver layer with a visible light reflectivity greater than 90% and a density greater than 90%, the transition layer 4 is a titanium layer, and the thermally conductive substrate 5 is an aluminum nitride substrate. The sides of the sintered silver reflective layer 3 are wrapped by the glass layer 2 and the transition layer 4. The inorganic fluorescent layer 1 has a thickness of 120 μm, the glass layer 2 has a thickness of 2 μm, the sintered silver reflective layer 3 has a thickness of 30 μm, the transition layer 4 has a thickness of 500 nm, and the thermally conductive substrate 5 has a thickness of 3 mm.
[0038] Example 3
[0039] This embodiment discloses a reflective wavelength conversion device, comprising, from top to bottom, an inorganic fluorescent layer 1, a glass layer 2, a sintered silver reflective layer 3, a transition layer 4, and a thermally conductive substrate 5. The inorganic fluorescent layer 1 is a fluorescent glass layer, the glass layer 2 is a low-refractive-index glass layer with a refractive index less than 1.55, the sintered silver reflective layer 3 is a high-reflectivity sintered silver layer with a visible light reflectivity greater than 90% and a density greater than 90%, the transition layer 4 is a titanium layer, and the thermally conductive substrate 5 is an aluminum nitride substrate. The sides of the sintered silver reflective layer 3 are wrapped by the glass layer 2 and the transition layer 4. The inorganic fluorescent layer 1 has a thickness of 40 μm, the glass layer 2 has a thickness of 1 μm, the sintered silver reflective layer 3 has a thickness of 10 μm, the transition layer 4 has a thickness of 100 nm, and the thermally conductive substrate 5 has a thickness of 0.5 mm.
[0040] Example 4
[0041] like Figure 2 As shown, this embodiment discloses a reflective wavelength conversion device, comprising, from top to bottom, an inorganic fluorescent layer 1, a glass layer 2, a sintered silver reflective layer 3, a transition layer 4, and a thermally conductive substrate 5. The glass layer 2 is a low-refractive-index glass layer with a refractive index less than 1.55. The sintered silver reflective layer 3 is a high-reflectivity sintered silver layer with a visible light reflectivity greater than 90% and a density greater than 90%. The inorganic fluorescent layer 1 is a fluorescent glass layer. The transition layer 4 is a chromium layer. The thermally conductive substrate 5 is a single-crystal silicon substrate. The side of the sintered silver reflective layer 3 is wrapped by the glass layer 2, the transition layer 4, and the inorganic fluorescent layer 1. The thickness of the inorganic fluorescent layer 1 is 80 μm, the thickness of the glass layer 2 is 1 μm, the thickness of the sintered silver reflective layer 3 is 20 μm, the thickness of the transition layer 4 is 200 nm, and the thickness of the thermally conductive substrate 5 is 1 mm.
[0042] Comparative Example 1
[0043] As Figure 3 shown, the embodiment discloses a reflective wavelength conversion device, comprising inorganic fluorescent layer 1, glass layer 2, sintered silver reflective layer 3, transition layer 4 and heat-conducting substrate 5 arranged in order from top to bottom, the inorganic fluorescent layer 1 is a fluorescent glass layer, the glass layer 2 is a low refractive index glass layer with a refractive index less than 1.55, the sintered silver reflective layer 3 is a high reflectivity sintered silver layer with a visible light band reflectivity greater than 90% and a density greater than 90%, the transition layer 4 is a titanium layer, and the heat-conducting substrate 5 is an aluminum nitride substrate, the thickness of the inorganic fluorescent layer 1 is 80 μm, the thickness of the glass layer 2 is 1 μm, the thickness of the sintered silver reflective layer 3 is 20 μm, the thickness of the transition layer 4 is 200 nm, and the thickness of the heat-conducting substrate 5 is 1 mm. Compared with the embodiment 1, the side surface of the sintered silver reflective layer 3 of the present example is not wrapped by the glass layer 2 and the transition layer 4, and the rest is the same as the embodiment 1.
[0044] The wavelength conversion devices prepared in the embodiments 1 to 4 and the comparative example 1 are subjected to performance tests, and the test items are as follows:
[0045] (1) Limit blue light power resistance test: the blue light power is adjusted to a lower range, then the blue light power is continuously increased, the light flux change is observed, when the light flux no longer rises or even decreases, the blue light power is recorded, which is the limit value of the blue light power resistance of the wavelength conversion device (i.e. the limit blue light power), and the light flux corresponding to the limit blue light power is the limit light flux.
[0046] (2) Light flux test under 30w blue light power: the light source is turned on, the light source light outlet is aligned with the entrance of the integrating sphere, so that the light completely enters the integrating sphere, and the light flux of the wavelength conversion device under 30w low blue light power is tested.
[0047] (3) Aging cycle reliability test: the light flux change of the wavelength conversion device before and after aging under high-low temperature cycle is tested, when the light flux after aging decreases to 90% of that before aging, it is the limit aging time that can be tolerated, the cycle number is calculated, so as to evaluate its reliability. High-low temperature test environment: high temperature 85℃, low temperature-40℃. One cycle is 2h.
[0048] The test results are shown in Table 1
[0049] Table 1
[0050]
[0051] Embodiment 5
[0052] The wavelength conversion device can be applied to a dynamic fluorescence color wheel, as Figure 4As shown, a fluorescent color wheel comprises a fan wheel 20, a wavelength conversion device 10 arranged on the fan wheel 20, and a motor 30 for driving the fan wheel 20 to rotate, wherein the wavelength conversion device 10 is the reflective wavelength conversion device, and the reflective wavelength device is a circular ring type. When the motor 30 rotates, the fan wheel 20 is driven to rotate, and then the reflective wavelength conversion device 10 is driven to rotate, so that the laser irradiation does not irradiate the same position of the wavelength conversion device, but presents a periodic annular track on the fluorescent color wheel, thereby avoiding heat concentration on a point of the wavelength conversion device, and the fan wheel 20 also disturbs the airflow during the rotation process, so as to accelerate the heat dissipation, thereby improving the heat dissipation effect of the wavelength conversion device 10.
[0053] Obviously, the above embodiments of the present application are only examples for clearly illustrating the technical scheme of the present application, and are not intended to limit the specific embodiments of the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A reflective wavelength conversion device, characterized by, The reflective wavelength conversion device comprises, from top to bottom, an inorganic fluorescent layer, a glass layer, a sintered silver reflective layer, a transition layer and a heat-conducting substrate, the side surface of the sintered silver reflective layer is wrapped by the glass layer and / or the inorganic fluorescent layer and / or the transition layer, the transition layer is a titanium layer, a nickel layer or a chromium layer, the thickness of the inorganic fluorescent layer is 40-120 μm, the thickness of the glass layer is 1-2 μm, the thickness of the sintered silver reflective layer is 10-30 μm, the thickness of the transition layer is 100-500 nm, and the thickness of the heat-conducting substrate is 0.5-3 mm.
2. The reflective wavelength conversion device of claim 1, wherein The heat-conducting substrate is a ceramic substrate or an inorganic substrate.
3. The reflective wavelength conversion device of claim 2, wherein, The ceramic substrate is a silicon nitride substrate, an aluminum nitride substrate or a sapphire substrate.
4. The reflective wavelength conversion device of claim 2, wherein, The inorganic substrate is a single-crystal silicon substrate or a diamond substrate.
5. The reflective wavelength conversion device of claim 1, wherein, The inorganic fluorescent layer is a fluorescent glass layer or a fluorescent ceramic layer.
6. The reflective wavelength conversion device of claim 1, wherein, The glass layer is a low-refractive glass layer with a refractive index less than 1.
55.
7. The reflective wavelength conversion device of claim 1, wherein, The sintered silver reflective layer is a high-refractive silver layer with a visible light band reflectivity greater than 90%.
8. The reflective wavelength conversion device of claim 1, wherein, The sintered silver reflective layer is a silver layer with a density greater than 98%.
9. The reflective wavelength conversion device of any of claims 1 to 8, wherein, The reflective wavelength conversion device is in a circular ring shape.
10. A fluorescent color wheel characterized in that, The reflective wavelength conversion device comprises a fan wheel, a wavelength conversion device arranged on the fan wheel, and a motor for driving the fan wheel to rotate, and the wavelength conversion device is the reflective wavelength conversion device according to any one of claims 1-8. The reflective wavelength conversion device comprises a fan wheel, a wavelength conversion device arranged on the fan wheel, and a motor for driving the fan wheel to rotate, and the wavelength conversion device is the reflective wavelength conversion device according to any one of claims 1-8.