Inverted swing type air flotation vibration isolator

Abstract

The utility model relates to the technical field of air flotation vibration isolators, and particularly discloses an inverted swing type air flotation vibration isolator which comprises an air spring. The hollow cylinder is fixedly mounted at the bottom in the air spring, and the hollow cylinder is filled with second damping liquid; the inverted pendulum extends into the second damping liquid from the upper end of the air spring, and the second damping liquid is used for reducing the swing amplitude of the inverted pendulum to a balance recovery position; a damping liquid groove is vertically formed in the inverted pendulum, and the damping liquid groove is filled with first damping liquid; the movable rod is vertically inserted into the first damping liquid, the bottom end of the movable rod is supported by the bottom of the inverted pendulum in the mode that the movable rod is allowed to swing relative to the groove bottom of the damping liquid groove, and the first damping liquid is used for maintaining the balance state of the movable rod and the inverted pendulum; and the bearing plate is fixed above the movable rod, and equipment needing vibration isolation is installed on the bearing plate. The vibration isolation device has a good vibration isolation effect in the horizontal direction and the vertical direction, and the damping ratio can be flexibly adjusted, so that the requirements of different actual conditions are met.

Description

Technical Field

[0001] This application relates to the technical field of air-floating vibration isolators, and in particular to an inverted pendulum type air-floating vibration isolator. Background Technology

[0002] Air-bearing vibration isolators are devices used to reduce the interference of vibration on a system. They utilize the pressure of compressed gas to generate supporting force and isolate vibration, thereby reducing the interference of vibration on the system and improving the system's operating accuracy and stability. Air-bearing vibration isolators are widely used in industrial manufacturing, laboratory and medical equipment, consumer electronics, and shipbuilding and aircraft.

[0003] In related technologies, air springs, due to their low vertical stiffness, are widely used in various vertical vibration isolation mechanisms, while pendulums, due to their low horizontal stiffness, are widely used in various horizontal vibration isolation mechanisms. A vibration isolator that uses an air spring and a pendulum in series achieves a horizontal stiffness approximately equal to that of the pendulum and a vertical stiffness approximately equal to that of the air spring, allowing the isolator to achieve low stiffness in both the vertical and horizontal directions simultaneously.

[0004] However, in actual use, it has been found that the vibration isolation effect of the vibration isolator in the horizontal direction has certain limitations. Utility Model Content

[0005] To improve the horizontal vibration isolation effect of the vibration isolator, this application provides an inverted pendulum air-float vibration isolator.

[0006] This application provides an inverted pendulum type air-float vibration isolator, which adopts the following technical solution:

[0007] An inverted pendulum air-bearing vibration isolator includes:

[0008] An air spring, fixed to the ground, may be filled with compressed gas;

[0009] A hollow cylinder is fixedly installed at the bottom inside the air spring, and the hollow cylinder is filled with a second damping fluid;

[0010] The pendulum extends from the upper end of the air spring into the second damping fluid, which is used to reduce the swing amplitude of the pendulum to restore the equilibrium position; the pendulum has a vertically formed damping fluid groove, which is filled with the first damping fluid;

[0011] A movable rod is vertically inserted into a first damping fluid. The bottom end of the movable rod is supported by the bottom of the inverted pendulum in a manner that allows the movable rod to swing relative to the bottom of the damping fluid tank. The first damping fluid is used to maintain the balance between the movable rod and the inverted pendulum.

[0012] A support plate is fixed above the movable rod, and the equipment requiring vibration isolation is installed on the support plate; when the air spring is not filled with compressed gas, the support plate abuts against the air spring; when the air spring is filled with compressed gas, the support plate is lifted and disengaged from the upper end of the air spring.

[0013] By adopting the above technical solution, when vertical vibration is transmitted to the inverted pendulum air-float vibration isolator, the air spring adjusts the pressure of the compressed gas in the air chamber to achieve the effect of vibration isolation in the vertical direction; when horizontal vibration is transmitted to the inverted pendulum air-float vibration isolator, the pendulum swings around the bottom end of the movable rod, and the first damping fluid and the second damping fluid consume kinetic energy and convert it into heat energy, so that the swing of the pendulum is reduced until it returns to the equilibrium position, so that the movable rod remains vertical, that is, the bearing plate remains stationary, thereby achieving the effect of vibration isolation in the horizontal direction.

[0014] Optionally, a rigid pad is installed on the bottom of the damping fluid tank, and a rigid steel ball is installed at the bottom of the movable rod, with the rigid steel ball abutting against the rigid pad to form a rotating pair.

[0015] By adopting the above technical solution, when the pendulum swings, the rigid steel column rolls on the rigid pad, and the friction between the two is small, thus allowing the pendulum to swing flexibly.

[0016] Optionally, the air spring includes:

[0017] The body has a hollow structure, and openings are formed at both the top and bottom ends of the body;

[0018] The base plate is fixed to the bottom of the main body;

[0019] A top plate is fixed above the main body; a first mounting hole is provided on the top plate, and the swing arm and movable rod extend into the space surrounding the main body through the first mounting hole;

[0020] A rubber diaphragm seals the first mounting hole to form the air chamber of the air spring; the inverted pendulum passes through the center of the rubber diaphragm and is fixedly connected to the inner edge of the rubber diaphragm.

[0021] A pressure ring is used to fix the outer edge of the rubber diaphragm to the top plate, and a movable part is provided between the inner edge and the outer edge of the rubber diaphragm.

[0022] By adopting the above technical solution, the body, bottom plate, top plate, rubber diaphragm, and inverted pendulum together form the air chamber of the air spring, which is filled with compressed gas. When vertical vibration is transmitted to the inverted pendulum air-bearing vibration isolator, the rubber diaphragm deforms, the volume of the compressed gas in the air chamber changes, and thus the pressure changes. At the same time, the compressed gas absorbs and releases vibration energy, which can effectively buffer the vibration, thereby achieving the effect of vibration isolation in the vertical direction.

[0023] Optionally, the pressure ring has a threaded hole in the vertical direction for inserting a screw, and there are multiple threaded holes, which are evenly distributed along the circumference of the pressure ring.

[0024] By adopting the above technical solution, multiple threaded holes can make the force on the pressure ring more uniform, and at the same time make the rubber diaphragm more firmly fixed.

[0025] Optionally, the inverted pendulum includes a pendulum rod, an inverted pendulum plate, and a piston plate. The inverted pendulum plate is fixed to the top of the pendulum rod, and the piston plate is sleeved around the pendulum rod and located at the lower end of the inverted pendulum plate. The damping fluid groove passes through the inverted pendulum plate and extends to the bottom of the pendulum rod. The inner edge of the rubber diaphragm is fixed between the inverted pendulum plate and the piston plate.

[0026] By adopting the above technical solution, the inner edge of the rubber diaphragm is fixed between the swing plate and the piston plate, effectively maintaining the pressure of the compressed gas inside the air spring; the swing causes the rubber diaphragm to sway, and because the rubber diaphragm has a certain elasticity, it can absorb some of the vibration energy and play a buffering role.

[0027] Optionally, the movable part is an upwardly convex arc-shaped structure.

[0028] By adopting the above technical solution, the movable part is an upwardly convex arc-shaped structure, which increases the contact area between the movable part and the inverted swing plate, allowing the inverted swing plate to better compress the movable part, achieve the effect of elastic buffering, and achieve vibration isolation.

[0029] Optionally, the body, top plate, bottom plate, rubber diaphragm, pressure ring, swing rod, inverted swing plate, piston plate, and hollow cylinder are all coaxially mounted.

[0030] By adopting the above technical solution, coaxial installation enables the inverted pendulum air-float vibration isolator to work better, thereby achieving a better vibration isolation effect.

[0031] Optionally, the first damping fluid and the second damping fluid can be selected to have different viscosities.

[0032] By adopting the above technical solution, the first and second damping fluids with different viscosities have different viscous resistances, which can flexibly adjust the damping ratio of the inverted pendulum air flotation vibration isolator, thereby meeting the needs of different actual situations.

[0033] In summary, this application includes at least one of the following beneficial technical effects:

[0034] 1. When vertical vibration is transmitted to the inverted pendulum air-float vibration isolator, the air spring adjusts the pressure of the compressed gas in the air chamber to achieve the effect of vibration isolation in the vertical direction. When horizontal vibration is transmitted to the inverted pendulum air-float vibration isolator, the pendulum swings around the bottom end of the movable rod. The first damping fluid and the second damping fluid consume kinetic energy and convert it into heat energy, which reduces the swing of the pendulum until it returns to the equilibrium position, keeping the movable rod in the vertical direction, that is, keeping the bearing plate stationary, thereby achieving the effect of vibration isolation in the horizontal direction.

[0035] 2. By setting rigid shims and rigid steel balls, when the pendulum swings, the rigid steel ball rolls on the rigid shims, resulting in low friction between the two and allowing the pendulum to swing flexibly.

[0036] 3. By selecting first and second damping fluids of different viscosities, the damping ratio of the inverted pendulum air-float vibration isolator can be flexibly adjusted to meet the needs of different actual situations. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application;

[0038] Figure 2 This is a cross-sectional view of an embodiment of this application;

[0039] Figure 3 yes Figure 2 A magnified view of area A in the middle.

[0040] Reference numerals: 1. Air spring; 11. Body; 111. Air supply hole; 12. Base plate; 13. Top plate; 131. First mounting hole; 14. Rubber diaphragm; 141. Moving part; 15. Pressure ring; 151. Threaded hole; 16. Air chamber; 2. Hollow cylinder; 21. Second damping fluid; 3. Inverted swing; 31. Damping fluid tank; 32. First damping fluid; 33. Inverted swing plate; 34. Swing rod; 35. Piston plate; 36. Hard gasket; 4. Moving rod; 41. Hard steel ball; 5. Bearing plate. Detailed Implementation

[0041] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0042] This application discloses an inverted pendulum type air-float vibration isolator, referring to... Figure 1 and Figure 2The system includes an air spring 1, a hollow cylinder 2, an inverted pendulum 3, a movable rod 4, and a support plate 5. The inverted pendulum 3 has a vertically formed damping liquid groove 31. The movable rod 4 is vertically inserted into the damping liquid groove 31, and the bottom end of the movable rod 4 is supported by the bottom of the inverted pendulum 3 in a manner that allows the movable rod 4 to swing relative to the bottom of the damping liquid groove 31. A gap is left between the movable rod 4 and the wall of the damping liquid groove 31, and the gap is filled with a first damping liquid 32. The air spring 1 is fixed to the ground and can be filled with compressed gas. Hollow cylinder 2 is fixedly connected to the bottom of air spring 1. Inverted swing 3 and movable rod 4 extend from the upper end of air spring 1 into hollow cylinder 2. Second damping fluid 21 is filled between inverted swing 3 and the side wall of hollow cylinder 2. Bearing plate 5 is fixed on movable rod 4. Equipment that needs to be isolated from vibration is installed on bearing plate 5. When air spring 1 is not filled with compressed gas, bearing plate 5 abuts against the upper part of air spring 1. When air spring 1 is filled with compressed gas, bearing plate 5 disengages from the upper part of air spring 1.

[0043] During operation, the air spring 1 is filled with compressed gas. When vibration is transmitted to the inverted pendulum air-float vibration isolator, the vertical vibration causes the compressed gas in the air spring 1 chamber to reciprocate, thereby achieving the effect of elastic buffering and vertical vibration isolation. The horizontal vibration causes the inverted pendulum 3 to swing around the bottom of the movable rod 4. The first damping fluid 32 and the second damping fluid 21 consume kinetic energy and convert it into heat energy, causing the inverted pendulum 3 to reduce its swing amplitude until it returns to the equilibrium position, thereby keeping the movable rod 4 vertical, that is, keeping the bearing plate 5 on the movable rod 4 stationary, thus achieving the effect of horizontal vibration isolation.

[0044] The inverted pendulum 3 includes an inverted pendulum plate 33, a pendulum rod 34, and a piston plate 35. The inverted pendulum plate 33 is integrally formed and fixed to the top of the pendulum rod 34. The piston plate 35 is fitted around the pendulum rod 34 and located at the lower end of the inverted pendulum plate 33. The damping fluid groove 31 passes through the inverted pendulum plate 33 and extends to the bottom of the pendulum rod 34. The inverted pendulum plate 33, the pendulum rod 34, the piston plate 35, and the damping fluid groove 31 are coaxially arranged. A rigid gasket 36 is installed on the bottom of the damping fluid groove 31. The movable rod 4 is integrally formed with the bearing plate 5, and the movable rod 4 is coaxially arranged with the pendulum rod 34. A rigid steel ball 41 is installed at the bottom of the movable rod 4. The rigid steel ball 41 abuts against the rigid gasket 36 to form a rotating pair. When the pendulum rod 34 swings, the friction between the rigid steel ball 41 and the rigid gasket 36 is small, thereby allowing the inverted pendulum 3 to swing flexibly.

[0045] Reference Figure 2 and Figure 3The air spring 1 includes a body 11, a base plate 12, a top plate 13, a rubber diaphragm 14, and a pressure ring 15. The body 11 is a hollow hexagonal prism with openings at both its upper and lower ends. The base plate 12 is fixedly connected to the lower part of the body 11, and the top plate 13 is fixedly connected to the upper part of the body 11. In this embodiment, the body 11, the base plate 12, and the top plate 13 are integrally formed. A circular first mounting hole 131 is provided in the center of the top plate 13, through which the inverted swing 3 and the movable rod 4 extend into the space surrounding the body 11.

[0046] The rubber diaphragm 14 has a disc-shaped structure, with a circular second mounting hole at its center through which the swing rod 34 passes. The inner edge of the rubber diaphragm 14 is engaged between the inverted swing plate 33 and the piston plate 35, and the outer edge of the rubber diaphragm 14 is fixedly connected to the top plate 13 by a pressure ring 15. An air chamber 16 for the air spring 1 is formed between the body 11, the bottom plate 12, the top plate 13, the rubber diaphragm 14, and the piston plate 35. The air chamber 16 is filled with compressed gas. An air supply hole 111 is provided on the side wall of the body 11 for connecting to an air valve to fill the air chamber 16 with compressed gas.

[0047] When the air chamber 16 is not filled with compressed gas, the support plate 5 abuts against the pressure ring 15 above; when the air chamber 16 is filled with compressed gas, the compressed gas lifts the rubber diaphragm 14, and the swing rod 34 drives the movable rod 4 to move upward, so that the support plate 5 is disengaged from the pressure ring 15. At this time, there is a certain space between the support plate 5 and the rubber diaphragm 14, and the inverted swing plate 33 can squeeze the rubber diaphragm 14. The swing rod 34 swings in the second damping fluid 21.

[0048] A movable part 141 is provided between the inner and outer edges of the rubber diaphragm 14. The movable part 141 is an upwardly convex arc-shaped structure, which makes the contact area between the movable part 141 and the inverted swing plate 33 larger, thereby enabling better compression of the movable part 141, achieving the effect of elastic buffering and vibration isolation.

[0049] The pressure ring 15 has multiple threaded holes 151 in the vertical direction, which are evenly distributed around the circumference of the pressure ring 15. The threaded holes 151 are used to insert screws to securely fix the outer edge of the rubber diaphragm 14 to the top plate 13. Furthermore, the inner diameter of the pressure ring 15 is equal to the diameter of the first mounting hole 131.

[0050] The hollow cylinder 2 is coaxially arranged with the first mounting hole 131, and the end of the swing rod 34 away from the inverted swing plate 33 is close to the bottom plate 12, so that the contact area between the swing rod 34 and the second damping fluid 21 in the hollow cylinder 2 is larger, thereby improving the damping effect of the inverted swing air flotation vibration isolator in the horizontal direction.

[0051] Because the damping fluid has a certain viscosity, it generates viscous resistance during vibration, which can convert the mechanical energy in the vibration system into heat energy, allowing the system to quickly dissipate the vibration energy. This enables the inverted pendulum air-float vibration isolator to quickly return to equilibrium and maintain strong stability. The first damping fluid 32 and the second damping fluid 21 can be selected with damping fluids of different viscosities to obtain different levels of viscous resistance, flexibly adjusting the damping ratio of the inverted pendulum air-float vibration isolator to meet the needs of different practical situations.

[0052] The implementation principle of the inverted pendulum air-float vibration isolator disclosed in this application embodiment is as follows: the device is fixed on the bearing plate 5, at which time the bearing plate 5 abuts against the pressure ring 15; when the device starts to work, the air valve fills the air chamber 16 with compressed gas through the air supply hole 111 (the air pressure of the compressed gas is selected according to the actual situation), and the compressed gas lifts the rubber diaphragm 14, the inverted pendulum 3, the movable rod 4, the bearing plate 5 and the device, so that the bearing plate 5 is disengaged from the pressure ring 15;

[0053] When vertical vibration is transmitted to the inverted pendulum air-float vibration isolator, the rubber diaphragm 14 deforms, and the air spring 1 adjusts the pressure of the compressed gas in the air chamber 16 to achieve the effect of vibration isolation in the vertical direction. When horizontal vibration is transmitted to the inverted pendulum air-float vibration isolator, the pendulum rod 34 swings around the bottom end of the movable rod 4, and the inverted pendulum plate 33 squeezes the rubber diaphragm 14 to deform. The first damping fluid 32 and the second damping fluid 21 act on the pendulum rod 34 to reduce the swing of the pendulum rod 34 until it returns to the equilibrium position, and keep the movable rod 4 in the vertical direction, that is, keep the bearing plate 5 stationary, reduce the interference of vibration on the system, and thus achieve the effect of vibration isolation in the horizontal direction.

[0054] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A pendulum-type air-float vibration isolator, characterized in that, include: An air spring (1) is fixed to the ground and can be filled with compressed gas; A hollow cylinder (2) is fixedly installed at the bottom inside the air spring (1), and the hollow cylinder (2) is filled with a second damping fluid (21). The inverted pendulum (3) extends from the upper end of the air spring (1) into the second damping fluid (21), which is used to reduce the swing amplitude of the inverted pendulum (3) to restore the equilibrium position; the inverted pendulum (3) has a damping fluid groove (31) vertically opened in the damping fluid groove (31), which is filled with the first damping fluid (32). Movable rod (4), which is vertically inserted into the first damping fluid (32), the bottom end of which is supported by the bottom of the inverted pendulum (3) in a manner that allows the movable rod (4) to swing relative to the bottom of the damping fluid tank (31). The first damping fluid (32) is used to maintain the balance of the movable rod (4) and the inverted pendulum (3). The support plate (5) is fixed above the movable rod (4). The equipment that needs to be isolated from vibration is installed on the support plate (5). When the air spring (1) is not filled with compressed gas, the support plate (5) abuts against the air spring (1). When the air spring (1) is filled with compressed gas, the support plate (5) is lifted and disengaged from the upper end of the air spring (1).

2. The inverted pendulum air-bearing vibration isolator according to claim 1, characterized in that, A hard pad (36) is installed on the bottom of the damping fluid tank (31), and a hard steel ball (41) is installed at the bottom of the movable rod (4). The hard steel ball (41) abuts against the hard pad (36) to form a rotating pair.

3. The inverted pendulum air-bearing vibration isolator according to claim 1, characterized in that, The air spring (1) includes: The body (11) has a hollow structure, and openings are formed at both the top and bottom ends of the body (11); The base plate (12) is fixed below the body (11); The top plate (13) is fixed above the body (11); the top plate (13) is provided with a first mounting hole (131), and the swing (3) and the movable rod (4) extend into the space surrounding the body (11) through the first mounting hole (131); A rubber diaphragm (14) closes the first mounting hole (131) to form the air chamber (16) of the air spring (1); the inverted pendulum (3) passes through the center of the rubber diaphragm (14) and is fixedly connected to the inner edge of the rubber diaphragm (14); A pressure ring (15) is used to fix the outer edge of the rubber diaphragm (14) to the top plate (13), and a movable part (141) is provided between the inner edge and the outer edge of the rubber diaphragm (14).

4. The inverted pendulum air-bearing vibration isolator according to claim 3, characterized in that, The pressure ring (15) has a threaded hole (151) for inserting a screw in the vertical direction. There are multiple threaded holes (151), and the multiple threaded holes (151) are evenly distributed around the circumference of the pressure ring (15).

5. The inverted pendulum air-bearing vibration isolator according to claim 3, characterized in that, The inverted pendulum (3) includes a pendulum rod (34), an inverted pendulum plate (33), and a piston plate (35). The inverted pendulum plate (33) is fixed to the top of the pendulum rod (34), and the piston plate (35) is sleeved around the pendulum rod (34) and located at the lower end of the inverted pendulum plate (33). The damping fluid groove (31) passes through the inverted pendulum plate (33) and extends to the bottom of the pendulum rod (34). The inner edge of the rubber diaphragm (14) is fixed between the inverted pendulum plate (33) and the piston plate (35).

6. The inverted pendulum air-bearing vibration isolator according to claim 5, characterized in that, The movable part (141) is an upwardly protruding arc-shaped structure.

7. The inverted pendulum air-bearing vibration isolator according to claim 3, characterized in that, The main body (11), top plate (13), bottom plate (12), rubber diaphragm (14), pressure ring (15), swing rod (34), inverted swing plate (33), piston plate (35) and hollow cylinder (2) are all coaxially installed.

8. The inverted pendulum air-bearing vibration isolator according to claim 1, characterized in that, The first damping fluid (32) and the second damping fluid (21) can be selected with different viscosities.

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