Single crystal furnace with heat preservation assembly for monocrystalline silicon production

Abstract

The utility model discloses a single crystal furnace with a heat preservation component for producing monocrystalline silicon, which relates to the technical field of single crystal furnaces and comprises a furnace body, a feed hopper communicated with the top of the furnace body, a crucible bracket mounted in an inner cavity of the furnace body, a quartz crucible arranged on the crucible bracket, and a stirring component arranged between the quartz crucible and the bottom wall of the inner cavity of the furnace body. The stirring part comprises two rotating rods, the two rotating rods are rotationally connected to an inner cavity of the quartz crucible, multiple stirring blades are installed on the outer walls of the two rotating rods, a heat conduction layer is arranged on the outer side face of the crucible bracket, a heater is installed on the outer side of the heat conduction layer, and a heat preservation assembly is arranged on the inner wall of the furnace body. The stirring component drives the multiple groups of stirring blades on the two groups of rotating rods to rotate, so that the monocrystalline silicon in the quartz crucible is mixed and stirred, the heating effect on the monocrystalline silicon is improved by matching with the work of the heater, the heat preservation component has a heat preservation effect, heat loss in the single crystal furnace is avoided, and the use effect of the single crystal furnace for producing the monocrystalline silicon is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace technical field, concretely is single crystal furnace for single crystal silicon production with heat preservation subassembly. BACKGROUND

[0002] Single crystal furnace is the key equipment of producing single crystal silicon. It melts polycrystalline silicon in inert gas environment with graphite heater, and grows out dislocation-free single crystal through the vertical pulling method. Single crystal furnace has the characteristics of high purity, high productivity, strong stability and high degree of automation, and is widely used in the fields of semiconductor manufacturing, optical device manufacturing and the like.

[0003] For example, the prior art disclosed in CN215209690U proposes a single crystal furnace for single crystal silicon production. The utility model can heat the sidewall and bottom of the crucible assembly at the same time during heating, ensuring the quality of the single crystal silicon wafer.

[0004] The above-mentioned prior art is improved according to the actual use condition, because the single crystal silicon is placed in the quartz crucible for heating, but the quartz crucible is fixedly connected with the inner wall of the furnace body through the crucible supporting rod, and it is inconvenient to mix and stir the single crystal silicon inside when the quartz crucible heats the single crystal silicon, so that the single crystal silicon cannot be fully contacted with the heat, and the single crystal silicon is not heated uniformly. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a single crystal furnace for single crystal silicon production with heat preservation subassembly to solve the problems proposed in the above background.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] A single crystal furnace for single crystal silicon production with heat preservation subassembly, comprising a furnace body, a feed hopper is arranged in communication on the top of the furnace body, a crucible support is installed in the inner cavity of the furnace body, a quartz crucible is arranged on the crucible support, a stirring part is arranged between the quartz crucible and the inner cavity bottom wall of the furnace body, the stirring part comprises two groups of rotating rods, the rotating rods are rotatably connected to the inner cavity of the quartz crucible, and a plurality of stirring blades are installed on the outer wall of the rotating rods.

[0008] The outer side of the crucible support is provided with a heat conduction layer, the heat conduction layer is provided with a heater on the outer side, and the inner wall of the furnace body is provided with a heat preservation subassembly.

[0009] Further, the stirring part further comprises a fixing box, two groups of supporting seats are arranged on the lower surface of the fixing box, the bottom of the supporting seats is connected with the inner cavity bottom wall of the furnace body, and a connecting seat is arranged on the upper surface of the fixing box, and the top of the connecting seat is connected with the bottom of the crucible support.

[0010] Further, the middle part of the lower surface of the fixed box is provided with a servo motor, the output end of the servo motor is connected with a rotating shaft, a driving gear is sleeved on the rotating shaft, and the outer walls on the two sides of the driving gear are both connected with driven gears, and the bottoms of the two groups of rotating rods are connected with the two groups of driven gears.

[0011] Further, the heat preservation assembly comprises an outer heat preservation layer mounted on the inner wall of the furnace body, and an inner heat preservation layer is arranged between the outer heat preservation layer and the heater.

[0012] Further, the heat preservation assembly further comprises a carbon-carbon plate, the carbon-carbon plate is mounted on the bottom wall of the inner cavity of the furnace body, and the upper surface of the carbon-carbon plate is provided with a bottom heat preservation layer.

[0013] Further, the outer side of the servo motor is provided with a protective shell, and the protective shell is made of heat insulation material.

[0014] Compared with the prior art, the utility model has the advantages that:

[0015] The utility model discloses a single crystal furnace, which comprises a furnace body, a feeding hopper, a crucible support, a quartz crucible, a heat conduction layer and a heater. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is the structure schematic diagram of the utility model;

[0017] Fig. 2 It is the front structure cross section schematic diagram of the utility model;

[0018] Fig. 3 It is the quartz crucible and stirring part connecting structure schematic diagram of the utility model.

[0019] In the drawing: 1, furnace body;2, feeding hopper;3, crucible support;4, quartz crucible;5, heat conduction layer;6, heater;7, outer heat preservation layer;8, inner heat preservation layer;9, stirring part;900, fixed box;901, servo motor;902, driving gear;903, driven gear;904, rotating rod;905, stirring blade;10, bottom heat preservation layer;11, carbon-carbon plate;12, support seat;13, connecting seat. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of the present application.

[0021] Embodiment 1:

[0022] Please refer to Figs. 1-3 The utility model provides a technical scheme: a single crystal furnace with heat preservation assembly for monocrystalline silicon production, including furnace body 1, the top of furnace body 1 is equipped with the feeding hopper 2 of intercommunication, the inner chamber of furnace body 1 is installed with crucible bracket 3, be equipped with quartz crucible 4 on crucible bracket 3, be equipped with stirring part 9 between quartz crucible 4 and the inner chamber bottom wall of furnace body 1, stirring part 9 includes two groups of rotating rods 904, two groups of rotating rods 904 are rotatably connected in the inner chamber of quartz crucible 4, and the outer wall of two groups of rotating rods 904 is installed with multiple stirring blades 905, before use, the electrical end of each electrical equipment is electrically connected with the electrical end of external power supply, controller through wire, monocrystalline silicon is poured into quartz crucible 4 from feeding hopper 2, through the work of stirring part 9, can drive multiple stirring blades 905 fixedly connected on the outer wall of two groups of rotating rods 904 to rotate, realizes the mixed stirring treatment of monocrystalline silicon in quartz crucible 4,

[0023] The outer side of crucible bracket 3 is equipped with heat conducting layer 5, the outer side of heat conducting layer 5 is installed with heater 6, and the inner wall of furnace body 1 is equipped with heat preservation assembly, heater 6 generates heat after working, heat conducting layer 5 has good heat conduction effect, can quickly conduct heat to monocrystalline silicon in quartz crucible 4, cooperates the effect of stirring part 9, realizes the mixed stirring heating of monocrystalline silicon in quartz crucible 4, improves the heating effect of monocrystalline silicon, heat preservation assembly plays the heat preservation effect, avoids the heat loss in single crystal furnace, improves the use effect of single crystal furnace for monocrystalline silicon production.

[0024] Preferably, stirring part 9 further includes fixed box 900, the lower surface of fixed box 900 is equipped with two groups of support seats 12, the bottom of two groups of support seats 12 is connected with the inner chamber bottom wall of furnace body 1, and the upper surface middle part of fixed box 900 is equipped with connecting seat 13, the top of connecting seat 13 is connected with the bottom of crucible bracket 3, fixed box 900 is connected with the inner wall of furnace body 1 through two groups of support seats 12, and fixed box 900 is connected with crucible bracket 3 and quartz crucible 4 through connecting seat 13.

[0025] Preferably, the middle part of the lower surface of the fixed box 900 is provided with a servo motor 901, the output end of the servo motor 901 is connected with a rotating shaft, and the rotating shaft is sleeved with a driving gear 902, and the outer walls on both sides of the driving gear 902 are both connected with driven gears 903 (the lower surfaces of the two groups of driven gears 903 are both rotatably connected with the inner wall of the fixed box 900 through bearings), and the bottoms of the two groups of rotating rods 904 are respectively connected with the two groups of driven gears 903; the working of the servo motor 901 can drive the driving gear 902 on the rotating shaft to rotate, and since the driving gear 902 is connected with the two groups of driven gears 903, the two groups of fixedly connected rotating rods 904 can rotate, that is, drive a plurality of stirring blades 905 to rotate.

[0026] Preferably, the heat preservation assembly comprises an outer heat preservation layer 7 installed on the inner wall of the furnace body 1, and an inner heat preservation layer 8 is arranged between the outer heat preservation layer 7 and the heater 6; the outer heat preservation layer 7 and the inner heat preservation layer 8 play a heat preservation role from the side direction.

[0027] Preferably, the heat preservation assembly further comprises a carbon-carbon plate 11, the carbon-carbon plate 11 is installed on the bottom wall of the inner cavity of the furnace body 1, and the upper surface of the carbon-carbon plate 11 is provided with a bottom heat preservation layer 10; the carbon-carbon plate 11 and the bottom heat preservation layer 10 play a heat preservation role from the bottom direction.

[0028] Embodiment 2:

[0029] Referring to Fig. 3 The difference between this embodiment and the first embodiment is that the outer side of the servo motor 901 is provided with a protective shell, and the protective shell is made of heat insulation material; the protective shell made of heat insulation material plays a protection role, avoiding the servo motor 901 from malfunctioning due to high heat.

[0030] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace for producing single crystal silicon having a heat retaining assembly, comprising a furnace body (1), characterized in that: The top of the furnace body (1) is provided with a feeding hopper (2) in communication, the inner cavity of the furnace body (1) is provided with a crucible bracket (3), the crucible bracket (3) is provided with a quartz crucible (4), the quartz crucible (4) and the bottom wall of the inner cavity of the furnace body (1) are provided with a stirring part (9), the stirring part (9) comprises two groups of rotating rods (904), the two groups of rotating rods (904) are rotatably connected in the inner cavity of the quartz crucible (4), and the outer walls of the two groups of rotating rods (904) are provided with a plurality of stirring blades (905). The outer side of the crucible bracket (3) is provided with a heat conducting layer (5), the outer side of the heat conducting layer (5) is provided with a heater (6), and the inner wall of the furnace body (1) is provided with a heat preservation assembly.

2. The single crystal silicon production furnace having a heat retaining assembly according to claim 1, characterized by: The stirring part (9) further comprises a fixed box (900), the lower surface of the fixed box (900) is provided with two groups of supporting seats (12), the bottoms of the two groups of supporting seats (12) are connected with the bottom wall of the inner cavity of the furnace body (1), and the upper surface of the fixed box (900) is provided with a connecting seat (13) in the middle, the top of the connecting seat (13) is connected with the bottom of the crucible bracket (3).

3. The single crystal silicon production furnace having a heat retaining assembly according to claim 2, characterized by: The lower surface of the fixed box (900) is provided with a servo motor (901) in the middle, the output end of the servo motor (901) is connected with a rotating shaft, the rotating shaft is provided with a driving gear (902), the two outer walls of the driving gear (902) are rotatably connected with driven gears (903), and the bottoms of the two groups of rotating rods (904) are connected with the two groups of driven gears (903).

4. The single crystal silicon production furnace having a heat retaining assembly according to claim 1, characterized in that: The heat preservation assembly comprises an outer heat preservation layer (7) mounted on the inner wall of the furnace body (1), and an inner heat preservation layer (8) is arranged between the outer heat preservation layer (7) and the heater (6).

5. The single crystal silicon production furnace having a heat retaining assembly according to claim 1, characterized in that: The heat preservation assembly further comprises a carbon-carbon plate (11), the carbon-carbon plate (11) is mounted on the bottom wall of the inner cavity of the furnace body (1), and the upper surface of the carbon-carbon plate (11) is provided with a bottom heat preservation layer (10).

6. The single crystal silicon production furnace having a heat retaining assembly according to claim 3, characterized in that: The outer side of the servo motor (901) is provided with a protective shell, and the protective shell is made of heat insulation material.

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