Resonance deflection instrument

Abstract

The utility model belongs to the technical field of vacuum drying, and relates to a resonance deflection instrument which comprises a resonance shaft, a lens and a driving assembly, the lens is arranged on the resonance shaft, and the driving assembly is used for driving the resonance shaft so that the resonance shaft can drive the lens to deflect; wherein the driving assembly comprises a shell, a magnet, a coil and a stator, the magnet, the coil and the stator are arranged in the shell, the stator is sleeved with the magnet, the coil is arranged on the magnet, the resonance shaft is connected with the stator, and the resonance shaft is flexibly fixed to the shell through a flexible part. The resonance shaft is flexibly fixed on the shell through the flexible part, the structure is simple and compact, compared with a mechanical matching mode directly adopted in the prior art, the flexible fixing mode can prevent generated resonance from being absorbed by the shell and the stator, resonance can be transmitted to the lens through the resonance shaft, current consumption and heat productivity are reduced, and the service life of the lens is prolonged. The response speed and the deflection frequency of the resonance deflection instrument are remarkably improved, rapid and accurate optical path adjustment can be achieved, and the long-term stability is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of resonant wobble instrument, and particularly to a resonant wobble instrument. BACKGROUND

[0002] The resonant wobble instrument is a precision instrument for measuring and correcting optical element wobble error, and the core component thereof is a galvanometer motor. The galvanometer motor adjusts the light path by controlling the wobble angle and frequency of the mirror. However, the galvanometer motor on the market has the following technical problems: slow resonant speed, large current, complex internal structure, large volume, and high heat generation, resulting in poor long-term stability.

[0003] Therefore, the prior art still needs to be improved and developed. CONTENT OF THE INVENTION

[0004] Therefore, the present application provides a resonant wobble instrument, which adopts the technical scheme as follows:

[0005] A resonant wobble instrument comprises

[0006] a resonant shaft;

[0007] a mirror, which is arranged on the resonant shaft;

[0008] a driving assembly, which is used to drive the resonant shaft to drive the mirror to wobble;

[0009] The driving assembly comprises a housing, a magnet, a coil and a stator arranged in the housing, the magnet is sleeved on the stator, the coil is arranged on the magnet, the resonant shaft is connected with the stator, and the resonant shaft is flexibly fixed on the housing through a flexible piece.

[0010] Further, the resonant shaft is provided with a first connecting part for fixing with the housing, and the flexible piece is configured as a rubber ring arranged on the first connecting part.

[0011] Further, the housing is provided with a connecting groove for the resonant shaft to extend into, the first connecting part is provided with a mounting groove for the flexible piece to be mounted, and the flexible piece is respectively abutted against the bottom wall of the mounting groove and the side wall of the connecting groove.

[0012] Further, the resonant shaft is provided with a second connecting part for connecting with the stator, and the second connecting part is provided with a second clamping groove for the stator to be clamped into.

[0013] Further, the magnet is provided with a clamping groove for the stator and / or the second connecting part to be inserted into; and / or,

[0014] The magnet is in the shape of “T”.

[0015] Further, the resonant shaft is further provided with a third connecting part for connecting with the lens, the diameter of the first connecting part is larger than the diameter of the second connecting part and the third connecting part, the diameter of the second connecting part is larger than the diameter of the third connecting part, and the distance between the third connecting part and the first connecting part is larger than the distance between the second connecting part and the first connecting part.

[0016] Further, the coil is provided in two strands, and the two strands of the coil are wound on the magnet in a cross shape.

[0017] Further, the resonant pendulum instrument further comprises a wire rack and a circuit board arranged in the shell, the wire rack is arranged between the coil and the magnet, and the coil is electrically connected with the circuit board.

[0018] Further, the lens is in a symmetrical structure.

[0019] Further, the lens is provided with a groove formed by inwardly recessing on both sides, and the groove is in a “V” shape.

[0020] Compared with the prior art, the present application has the following beneficial effects:

[0021] The resonant shaft is flexibly fixed on the shell through a flexible member, and the structure is simple and compact. Compared with the mechanical matching mode of the prior art, the flexible fixing mode can avoid the resonant vibration being absorbed by the shell and the stator, is conducive to the transmission of the resonant vibration to the lens through the resonant shaft, reduces the current consumption and the heat generation, and significantly improves the response speed and the pendulum frequency of the resonant pendulum instrument, so that the long-term stability is improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the scheme of the present application, the drawings needed in the following embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Figure 1 is one of the structure schematic diagrams of the resonant pendulum instrument of the embodiment of the present application;

[0024] Figure 2 is the second structure schematic diagram of the resonant pendulum instrument of the embodiment of the present application;

[0025] Figure 3 is an exploded view of the resonant pendulum instrument of the embodiment of the present application;

[0026] Figure 4is a sectional view of a resonance pendulum of the embodiment of the present application;

[0027] Figure 5 is Figure 4 is an enlarged schematic view of A in the middle;

[0028] Figure 6 is a structural schematic view of the resonance shaft;

[0029] Figure 7 is a structural schematic view of the lens;

[0030] Figure 8 is a structural schematic view of the magnet.

[0031] Reference signs: 1, resonance shaft; 11, first connecting part; 111, mounting groove; 12, second connecting part; 121, second clamping groove; 13, third connecting part; 131, third clamping groove; 2, lens; 21, groove; 100, driving assembly; 3, shell; 31, connecting groove; 4, magnet; 41, insertion groove; 5, coil; 6, stator; 7, flexible piece; 9, circuit board. DETAILED DESCRIPTION

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application; the present application will be described with reference to the drawings and detailed description, and will be apparent from the drawings and detailed description. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application. The terms "comprising", "having", "including", and "containing" used in the detailed description and the claims herein are used in their open-ended, non-limiting sense. The terms "first", "second", and the like used in the description and the claims herein are used to distinguish between similar objects, and are not used to designate a particular order or sequence.

[0033] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase that the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of other embodiments. It is explicitly contemplated that embodiments described herein can be combined with each other.

[0034] The technical solutions in the embodiments of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application. In addition, it should be understood that the specific embodiments described herein are only used to illustrate and explain the present application, and are not used to limit the present application.

[0035] In the present application, the orientation words such as "upper" and "lower" used herein generally refer to the upper and lower in the actual use or working state of the device, specifically the drawing surface direction in the drawings, and "inner" and "outer" refer to the contour of the device. In addition, in the description of the present application, the term "comprising" means "including but not limited to". The terms first, second, third, etc. are only used as labels and do not impose numerical requirements or establish an order.

[0036] In the present application, "and / or" describes the association relationship of the associated objects, which means that there can be three kinds of relationships, for example, A and / or B can represent the following cases: A exists alone, A and B exist together, and B exists alone. Wherein A and B can be singular or plural.

[0037] In the present application, "at least one" means one or more, and "multiple" means two or more. "At least one", "at least one of the following" or the like means any combination of these items, including any combination of single item or multiple items. For example, "at least one of a, b, or c", or "at least one of a, b, and c", can represent a, b, c, a-b (i.e. a and b), a-c, b-c, or a-b-c, wherein a, b, and c can be single or multiple.

[0038] Various embodiments of the present application can exist in the form of a range; it should be understood that the description in the form of a range is only for the convenience and brevity, and should not be understood as a hard limit on the scope of the present application; therefore, it should be considered that the described range has been specifically disclosed all possible sub-ranges and single values within the range. For example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges, such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., as well as single numbers within the range, such as 1, 2, 3, 4, 5, and 6, regardless of the range. In addition, whenever a numerical range is indicated in the present application, it refers to any cited number (fraction or integer) within the indicated range.

[0039] In order for those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings.

[0040] As shown in the accompanying Figure 1 to the accompanying Figure 8 The embodiment of the present application provides a resonance pendulum, which adopts the technical solutions described as follows:

[0041] A resonance pendulum comprises

[0042] resonance shaft 1;

[0043] a lens 2, which is arranged on the resonance shaft 1;

[0044] a driving assembly 100, which is used for driving the resonance shaft 1 to drive the lens 2 to swing;

[0045] The driving assembly 100 comprises a shell 3, a magnet 4, a coil 5 and a stator 6 arranged in the shell 3, the magnet 4 is sleeved on the stator 6, the coil 5 is arranged on the magnet 4, the resonance shaft 1 is connected with the stator 6, and the resonance shaft 1 is flexibly fixed on the shell 3 through a flexible piece 7.

[0046] The resonance shaft 1 is flexibly fixed on the shell 3 through the flexible piece 7, which is simple and compact in structure, compared with the mechanical matching mode in the prior art, the flexible fixing mode can avoid the resonance generated being absorbed by the shell 3 and the stator 6, is conducive to the resonance being transmitted to the lens 2 through the resonance shaft 1, reduces current consumption and heat generation, significantly improves the response speed and swing frequency of the resonance swing instrument, and can realize rapid and accurate optical path adjustment and improve long-term stability.

[0047] Further, the resonance swing instrument can make the swing frequency of the lens 2 reach 12KHz, and can realize rapid and accurate optical path adjustment.

[0048] As shown in Figs. 1 to 3, Figure 3 Figs. 4 to 6, Figure 4 Figs. 7 to 9, and Figure 6 Figs. 10 to 12, further, the resonance shaft 1 is provided with a first connecting part 11 for fixing with the shell 3, and the flexible piece 7 is arranged as a rubber ring of the first connecting part 11. The resonance shaft 1 is fixed with the shell 3 through the rubber ring, avoids the resonance generated being absorbed by the shell 3 and the stator 6, is conducive to the resonance being transmitted to the lens 2 through the resonance shaft 1, reduces current consumption and heat generation, significantly improves the response speed and swing frequency of the resonance swing instrument, can realize rapid and accurate optical path adjustment, and improves long-term stability.

[0049] As shown in Figs. 1 to 3, Figure 3 Figs. 4 to 6, Figure 5 Figs. 7 to 9, and Figs. 10 to 12, further, the shell 3 is provided with a connecting groove 31 for the resonance shaft 1 to extend into, the first connecting part 11 is provided with a mounting groove 111 for mounting the flexible piece 7, and the flexible piece 7 is respectively abutted against the bottom wall of the mounting groove 111 and the side wall of the connecting groove 31. The mounting of the flexible piece 7 is facilitated, the flexible piece 7 is prevented from falling off, the flexible fixing of the resonance shaft 1 and the shell 3 is ensured, and long-term stability is improved.

[0050] As shown in Figure 3 to the accompanying Figure 6 Further, the resonance shaft 1 is provided with a second connecting part 12 for connecting with the stator 6, and the second connecting part 12 is provided with a second clamping groove 121 for clamping the stator 6. The installation of the stator 6 is facilitated, so that the resonance generated by the stator 6 is transmitted to the lens 2 through the resonance shaft 1, which significantly improves the response speed and the yaw frequency of the resonance yaw instrument.

[0051] Furthermore, the stator 6 and the second connecting part 12 are connected by tin, that is, a low-melting-point tin-based alloy solder is used, which is melted by heating and then infiltrates and fills the gap between the second clamping groove 121 and the stator 6, so that the stator 6 and the second connecting part 12 are welded together, the connection is stable, and the resonance generated by the stator 6 is transmitted to the lens 2 through the resonance shaft 1.

[0052] As shown in Figure 3 to the accompanying Figure 5 and the accompanying Figure 8 Further, the magnet 4 is provided with a slot 41 for inserting the stator 6 and / or the second connecting part 12. The magnetic field generated by the magnet 4 can act on the force generated in the stator 6 to drive the stator 6 to produce resonance, which is transmitted to the lens 2 through the resonance shaft 1, so that fast and accurate optical path adjustment can be achieved.

[0053] As shown in Figure 3 to the accompanying Figure 5 and the accompanying Figure 8 Further, the magnet 4 is in the shape of "T". The installation of the magnet 4 and the coil 5 is facilitated, the movement of the magnet 4 is prevented, and the magnetic field generated by the magnet 4 drives the stator 6 to produce vibration with a fixed frequency, while the resonance can be transmitted to the lens 2 through the resonance shaft 1.

[0054] As shown in Figure 3 to the accompanying Figure 6 Further, the resonance shaft 1 is provided with a third connecting part 13 for connecting with the lens 2, the first connecting part 11 is arranged between the second connecting part 12 and the third connecting part 13, the diameter of the first connecting part 11 is greater than the diameter of the second connecting part 12 and the third connecting part 13, the diameter of the second connecting part 12 is greater than the diameter of the third connecting part 13, and the distance between the third connecting part 13 and the first connecting part 11 is greater than the distance between the second connecting part 12 and the first connecting part 11. The resonance shaft 1 is provided with a specific size, which facilitates the transmission of resonance to the lens 2 and improves the transmission efficiency.

[0055] Further, the lens 2 and the resonance shaft 1 are connected by tin, specifically, the third connecting part 13 is provided with a third clamping groove 131 for clamping the lens 2, and the low-melting-point tin-based alloy solder is used to fill the gap between the third clamping groove 131 and the lens 2 after being melted by heating, so that the lens 2 and the third connecting part 13 are welded together, the connection is stable, and the resonance generated by the stator 6 is transmitted to the lens 2 through the resonance shaft 1.

[0056] As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 3 to the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 5 As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape.

[0057] As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 2 to the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 4 As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape.

[0058] Further, the resonance biasing instrument further comprises a signal generator, the signal generator is electrically connected with the circuit board 9, the signal generator transmits two strands of analog signals to the coil 5 through the circuit board 9, and the coil 5 generates two strands of interaction forces for the magnet 4 after being electrified, so that the resonance shaft 1 and the lens 2 generate vibration with a fixed frequency under the action of the electromagnetic force of the two strands of the coil 5, and the amplitude can be adjusted by adjusting the signal generator.

[0059] As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 1 to the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 4 As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 7 As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape.

[0060] As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 1 to the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 4 As shown in the accompanying drawings, further, the coil 5 is provided in two strands, and the two strands of the coil 5 are wound on the magnet 4 in a cross shape. Figure 7As shown, further, two sides of the lens 2 are provided with recesses 21 formed by inwardly recessing, the recesses 21 being in the shape of a "V". The lens 2 is conveniently prepared in a symmetrical structure, so that the lens 2 is lightened, thereby making the lens 2 better in vibration.

[0061] Obviously, the above-described embodiments are only some of the embodiments of the present application, but not all the embodiments. The preferred embodiments of the present application are shown in the drawings, but do not limit the patent scope of the present application. The present application can be implemented in many different forms, and contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive. Although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments, or equivalently replace some of the technical features. Any equivalent structure made by using the content of the specification and drawings, directly or indirectly applied to other related technical fields, is also within the patent protection scope of the present application.

Claims

1. A resonant pendulum apparatus, characterized by, The resonant shaft (1) is provided with a first connecting portion (11) for fixing with the shell (3), and the flexible member (7) is configured as a rubber ring arranged at the first connecting portion (11). The shell (3) is provided with a connecting groove (31) for the resonant shaft (1) to extend into, and the first connecting portion (11) is provided with a mounting groove (111) for mounting the flexible member (7), and the flexible member (7) abuts against the bottom wall of the mounting groove (111) and the side wall of the connecting groove (31) respectively. The resonant shaft (1) is provided with a second connecting portion (12) for connecting with the stator (6), and the second connecting portion (12) is provided with a second clamping groove (121) for clamping the stator (6). The magnet (4) is provided with a slot (41) for inserting the stator (6) and / or the second connecting portion (12); and / or, The magnet (4) is in a "T" shape.

2. The resonant nutation machine of claim 1, wherein The resonant shaft (1) is further provided with a third connecting portion (13) for connecting with the lens (2), the diameter of the first connecting portion (11) is greater than the diameters of the second connecting portion (12) and the third connecting portion (13), the diameter of the second connecting portion (12) is greater than the diameter of the third connecting portion (13), and the distance between the third connecting portion (13) and the first connecting portion (11) is greater than the distance between the second connecting portion (12) and the first connecting portion (11).

3. The resonant nutation machine of claim 2, wherein, The coil (5) is provided in two strands, and the two strands of the coil (5) are wound on the magnet (4) in a cross shape.

4. The resonant nutation machine of claim 3, wherein The resonant yaw instrument further comprises a wire rack and a circuit board (9) arranged in the shell (3), the wire rack is arranged between the coil (5) and the magnet (4), and the coil (5) is electrically connected with the circuit board (9).

5. The resonant nutation machine of claim 4, wherein, The lens (2) is in a symmetrical structure. The lens (2) is provided with a groove (21) formed by inwardly recessing on both sides, and the groove (21) is in a "V" shape.

6. The resonant nutation machine of claim 5, wherein, ​ 7. The resonant nutation machine of claim 5, wherein ​ 8. The resonant nutation machine of claim 7, wherein, ​ 9. The resonant pendulum of any of claims 1-8, wherein, ​ 10. The resonant nutation apparatus of claim 9, wherein, ​

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