Vacuum coating device

Abstract

The utility model provides a vacuum coating device which comprises a vacuum cavity, electrode rings, a tungsten filament funnel and a sample tray are arranged in the vacuum cavity, two electrode rings are coaxially fixed in the vacuum cavity up and down, a gap is reserved between the two electrode rings, and the two electrode rings are respectively and electrically connected with two electrodes of a power supply; more than two tungsten filament funnels are uniformly arranged along the inner circumference of the electrode rings, each tungsten filament funnel is of a funnel-shaped structure formed by winding tungsten filaments, each tungsten filament funnel is provided with two terminals, and the two terminals of each tungsten filament funnel are electrically connected with the two electrode rings respectively; the sample tray is located on the central axis of the electrode ring and does not make contact with the electrode ring, and when a to-be-coated product is placed on the sample tray, the tungsten filament funnels are just evenly distributed on the periphery of the to-be-coated product. According to the device, the plurality of evaporation sources are annularly arranged through the plurality of tungsten filament funnels arranged on the two electrode rings, so that a product to be coated is uniformly coated under the surrounding of the plurality of evaporation sources.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field especially relates to a vacuum coating device. BACKGROUND

[0002] Vacuum coating refers to the method that under the condition of high vacuum, heating coating raw material, making it evaporate and condense on the surface of the product to be plated and form a thin film. The existing vacuum coating machine structure is relatively simple, mainly by vacuum chamber and evaporation source. The evaporation source is mostly resistance heating type, which generates heat by passing current through high resistance material, and then the coating raw material is heated and evaporated, and then attached to the surface of the product to be plated placed in the vacuum chamber. However, such equipment has only one evaporation source, and the storage of coating raw material is limited. When encountering large or irregular products to be plated, it may lead to uneven evaporation of the product, which needs to be reworked or produces defective products. SUMMARY

[0003] The utility model provides a kind of vacuum coating device, which is arranged on the multiple tungsten funnel of two electrode rings to realize the circumferential arrangement of multiple evaporation sources, ensuring that the product to be plated is uniformly coated under the surrounding of multiple evaporation sources, while the sample tray can be rotatably arranged to realize the rotation of the product to be plated during coating, further ensuring uniform coating of the product.

[0004] The technical scheme adopted by the utility model to achieve the above-mentioned purposes is as follows:

[0005] A vacuum coating device, at least comprising a vacuum chamber, the vacuum chamber is installed with:

[0006] An electrode ring is coaxially fixed in the vacuum chamber, two electrode rings are left with a gap between them and are respectively connected with two poles of the power supply;

[0007] A tungsten funnel is arranged on the inner circumference of the electrode ring, more than two tungsten funnels are arranged uniformly, the tungsten funnel is a funnel-shaped structure formed by winding tungsten wire, and two wiring ends are arranged on the tungsten funnel, the two wiring ends of the tungsten funnel are respectively connected with the two electrode rings;

[0008] A sample tray is located on the central axis of the electrode ring and has no contact with the electrode ring, when the product to be plated is placed on the sample tray, the tungsten funnel is evenly distributed around the product to be plated.

[0009] The inner circumference of the two electrode rings is staggered with electrode rods, the two wiring ends of the tungsten funnel are respectively connected with the electrode rods on the two electrode rings.

[0010] The inner circumference of the two electrode rings is staggered with conductive blocks, the conductive blocks are provided with mounting holes, and the electrode rods are fixed in the mounting holes.

[0011] The electrode rod is a threaded rod, two nuts and two conductive gaskets are connected to the electrode rod, the two conductive gaskets are located between the two nuts, and the wiring end of the tungsten wire funnel is fixed between the two conductive gaskets and locked by the two nuts.

[0012] Corresponding internal threads are arranged in the mounting holes, and the electrode rod is locked on the internal threads of the mounting holes.

[0013] The electrode ring is fixed in the vacuum cavity through the fixing rod.

[0014] The sample tray is installed in the vacuum cavity through the rotating rod assembly, and the rotating rod assembly drives the sample tray to rotate.

[0015] The rotating rod assembly is a rotatable and liftable rotating and lifting mechanism, an electric heating jacket is installed below the two electrode rings in the vacuum cavity, and the rotating and lifting mechanism drives the sample tray to descend into the electric heating jacket for heating or ascend to the electrode ring.

[0016] The electric heating jacket is matched with a heat preservation cover, and the heat preservation cover is located on one side of the upper surface of the electric heating jacket and can be rotated to cover the electric heating jacket.

[0017] The vacuum cavity is formed by a base and a vacuum cover sealingly connected above the base, the vacuum cover is liftable, and the vacuum cover is connected with a vacuum pump through a suction pipe.

[0018] Compared with the prior art, the vacuum coating device has the following advantages: 1. The vacuum coating device provided by the utility model realizes the circumferential arrangement of multiple evaporation sources through the multiple tungsten wire funnels arranged on the two electrode rings, ensures that the products to be coated are uniformly coated under the surrounding of multiple evaporation sources, and the sample tray can be rotatably arranged to rotate the products to be coated during the coating process, thereby further ensuring uniform coating of the products.

[0019] 2. The lower part of the electrode ring is provided with an electric heating jacket, and the sample tray is liftable, so that the products to be coated on the sample tray can be lowered into the electric heating jacket for heating or raised into the electrode ring and the tungsten wire funnel for coating; meanwhile, the electric heating jacket is matched with a heat preservation cover, so that the products to be coated can be heated uniformly and sufficiently. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The structure diagram of the vacuum coating device provided by the utility model is shown in the figure;

[0021] Figure 2 The structure diagram of the driving knob in the utility model is shown in the figure;

[0022] Figure 3 The partial view of the vacuum coating device provided by the utility model is shown in the figure;

[0023] Figure 4 The partial explosion schematic view of the vacuum coating device is provided in the utility model;

[0024] In the drawing: 11 - base, 12 - vacuum cover, 13 - sealing gasket, 21 - electric heating sleeve, 22 - heat preservation cover, 3 - mounting table, 41 - driving knob, 411 - rotating positioning groove, 412 - positioning pin, 42 - driving gear one, 43 - driving gear two, 44 - driving rod, 5 - fixed bottom plate, 61 - electrode ring, 62 - fixed rod, 63 - electrode block, 71 - tungsten funnel, 72 - electrode rod, 73 - nut, 74 - conductive gasket, 81 - sample tray, 82 - rotating lifting mechanism, 9 - product to be coated. DETAILED DESCRIPTION

[0025] The utility model will be described in detail below in combination with the drawings.

[0026] The vacuum coating device structure provided by the embodiment is shown as Figure 1 The base and the vacuum cover are connected with the sealing gasket 13 at the connecting position, so as to ensure the sealing property of the connecting position. Specifically, the vacuum cover is arranged to be liftable, for example, the lifting of the vacuum cover is realized by the lifting cylinder. When the product to be coated is needed to be put into the vacuum cavity, the vacuum cover is lifted to be opened. When the product to be coated is put in place, the vacuum cover is lowered and pressed on the base. The vacuum cover is connected with the vacuum pump (not shown in the drawing) through the air exhaust pipe. When the vacuum coating device works, the vacuum pump is first operated to exhaust the vacuum cavity. After the vacuum is exhausted, the subsequent coating work is carried out. After the vacuum is exhausted, the vacuum cover is tightly covered on the base under the action of the internal and external pressure difference.

[0027] The base is fixed with an electric heating jacket 21 for heating the products to be plated in the embodiment. Specifically, a mounting table 3 is suspended and fixed above the base by a screw rod, and the electric heating jacket is fixed on the mounting table. In actual setting, the electric wire of the electric heating jacket is routed from the base, and the heating of the electric heating jacket and the temperature of the heating are controlled by a power supply and a switch. The electric heating jacket is provided with a heat preservation cover 22, which covers the electric heating jacket to form a heating and heat preservation area in the electric heating jacket. Specifically, the heat preservation cover is located on one side of the upper surface of the electric heating jacket and can be rotatably covered on the electric heating jacket. Further, the heat preservation cover is installed on the base by a rotary driving mechanism, which includes a driving knob 41, a driving gear one 42, a driving gear two 43, and a driving rod 44. The driving knob is installed outside the base, the driving gear one is connected with the driving knob and rotates with the driving knob, the driving gear two is connected with the driving gear one in engagement and rotates synchronously with the driving gear one, the driving rod is fixed with the driving gear two and rotates with the driving gear two, the driving rod passes through the base and extends above the base, and the driving rod is movably connected with the base. The heat preservation cover is fixed on the top of the driving rod and located on one side of the upper surface of the electric heating jacket. When the products to be plated need to be heated, the driving knob outside the base is manually rotated to drive the heat preservation cover on the driving rod to rotate, so that the heat preservation cover covers the electric heating jacket to ensure that the temperature in the electric heating jacket is uniform, thereby ensuring that the products to be plated are uniformly heated. When the heating is completed, the driving knob outside the base is manually rotated in the reverse direction to rotate the heat preservation cover away from one side of the electric heating jacket. Further, the base is placed on a fixed base plate 5, and the driving knob is installed on the fixed base plate. The bottom of the driving knob is provided with a rotary positioning groove 411, as shown in Figure 2 , a positioning pin 412 is arranged on the rotary positioning groove, the bottom of the positioning pin is fixed on the fixed base plate, when the positioning pin is located at one end of the rotary positioning groove, the heat preservation cover covers the electric heating jacket, and when the positioning pin is located at the other end of the rotary positioning groove, the heat preservation cover is located on one side of the electric heating jacket.

[0028] In the embodiment, an electrode ring 61 is fixed above the electric heating jacket on the base, as shown in Figure 3 and Figure 4 , two electrode rings are coaxially fixed above and below the electrode ring, and a gap is left between the two electrode rings and is electrically connected with two poles of a power supply; specifically, the electrode ring is fixed on the base by a fixed rod 62. Specifically, an electrode block 63 is connected with the fixed rod, and the electrode block is connected with the electrode ring. The external power supply is routed from the base and connected with the electrode block.

[0029] Two or more tungsten wire funnels 71 are evenly arranged along the inner circumference of the electrode ring in this embodiment. Each tungsten wire funnel is a funnel-shaped structure formed by winding tungsten wire, and two connecting terminals are arranged on each tungsten wire funnel. Specifically, five tungsten wire funnels are arranged, and five conductive blocks (to ensure that the electrode rods connected to the two electrode rings do not contact) are arranged on the inner circumferences of the two electrode rings. There are a total of 10 conductive blocks on the two electrode rings. Mounting holes are arranged on the conductive blocks, and electrode rods 72 are mounted in the mounting holes, that is, a total of 10 electrode rods are arranged, and the two connecting terminals of the tungsten wire funnels are connected to the electrode rods on the two electrode rings. Further, the electrode rods are threaded rods, and internal threads are arranged in the mounting holes. The electrode rods are locked on the internal threads of the mounting holes. In this embodiment, two nuts 73 and two conductive washers 74 are connected to the electrode rods, and the two conductive washers are located between the two nuts. The connecting terminals of the tungsten wire funnels are fixed between the two conductive washers, and the two conductive washers are locked by the two nuts. Specifically, the electrode ring, the electrode block, the electrode rod, and the conductive washer are all made of red copper material with good conductivity. During the coating preparation stage, the solid coating material to be evaporated is placed on the tungsten wire funnel, the external power supply is powered on, the two connecting terminals of the tungsten wire funnel are conducted, the tungsten wire funnel is powered on and heated, and the solid coating material placed thereon is melted, evaporated, and dissipated into the surrounding space.

[0030] In this embodiment, a sample tray 81 is mounted on the base plate and located on the central axis of the electrode ring without contacting the electrode ring. When the product to be coated 9 is placed on the sample tray, the tungsten wire funnels are evenly distributed around the product to be coated, thereby uniformly coating the product to be coated. Specifically, the sample tray is mounted in the vacuum chamber through a rotating rod assembly. During the coating process, the rotating rod assembly drives the sample tray to rotate, ensuring more uniform coating. Further, the rotating rod assembly is a rotatable and liftable rotating and lifting mechanism 82. The rotating and lifting mechanism drives the sample tray to descend into the heating jacket for heating or ascend to the electrode ring for coating operation. The detailed structure of the rotating and lifting mechanism is not shown in the figure. The rotating and lifting mechanism can use the existing mechanical structure in the art that can realize lifting and rotation. The rotating and lifting mechanism will not be described in detail here.

[0031] The working steps of the vacuum coating device provided by the embodiment are as follows: first, the vacuum cover is lifted to be separated from the base, the solid coating raw material is placed on the tungsten funnel, and the product to be coated is placed on the sample tray; then, the vacuum cover is lowered to cover the base, and vacuum is drawn; the rotating lifting mechanism drives the sample tray and the product to be coated to be lowered into the electric heating jacket, the heat preservation cover is manually rotated and driven to cover the electric heating jacket, the electric heating jacket is worked to heat, and the product to be coated is heated sufficiently; then, the heat preservation cover is manually rotated and driven to be opened to one side of the electric heating jacket, the rotating lifting mechanism drives the sample tray and the product to be coated to be lifted to the position of the electrode ring and the tungsten funnel, the rotating lifting mechanism stops lifting and drives the sample tray to rotate, meanwhile, the power supply is turned on, the tungsten funnel is electrified to heat, the solid coating raw material is heated to vaporize and adhere to the product to be coated, so that the vacuum coating is realized, and the coating uniformity is high.

Claims

1. A vacuum coating device comprising at least a vacuum chamber, characterized in that: The vacuum cavity is provided with: Two electrode rings coaxially fixed in the vacuum cavity, with a gap between the two electrode rings and electrically connected to two poles of a power supply; Two or more tungsten funnel structures arranged along the inner circumference of the electrode ring, each tungsten funnel structure being a funnel-shaped structure formed by winding tungsten wires, and each tungsten funnel structure being provided with two connection terminals, and the two connection terminals of the tungsten funnel structure being electrically connected to the two electrode rings, respectively; A sample tray located on the central axis of the electrode ring and not in contact with the electrode ring, and when a product to be coated is placed on the sample tray, the tungsten funnel structures are evenly distributed around the product to be coated.

2. The vacuum coating apparatus according to claim 1, characterized in that: The inner circumference of the two electrode rings is staggered with electrode rods, and the two connection terminals of the tungsten funnel structure are connected to the electrode rods on the two electrode rings, respectively.

3. The vacuum coating apparatus according to claim 2, characterized in that: The inner circumference of the two electrode rings is staggered with electrode rods, and the two connection terminals of the tungsten funnel structure are connected to the electrode rods on the two electrode rings, respectively.

4. The vacuum coating apparatus according to claim 3, characterized in that: The inner circumference of the two electrode rings is staggered with electrode rods, and the two connection terminals of the tungsten funnel structure are connected to the electrode rods on the two electrode rings, respectively.

5. The vacuum coating apparatus according to claim 4, characterized in that: The electrode rod is a threaded rod, and the electrode rod is connected with two nuts and two conductive washers, and the two conductive washers are located between the two nuts, and the connection terminals of the tungsten funnel structure are fixed between the two conductive washers and locked by the two nuts.

6. The vacuum coating apparatus of claim 1, wherein: The mounting hole is provided with an internal thread, and the electrode rod is locked on the internal thread of the mounting hole.

7. The vacuum coating apparatus of claim 1, wherein: The electrode ring is fixed in the vacuum cavity by a fixing rod.

8. The vacuum coating apparatus of claim 7, wherein: The sample tray is installed in the vacuum cavity by a rotating rod assembly, and the rotating rod assembly drives the sample tray to rotate.

9. The vacuum coating apparatus of claim 8, wherein: The rotating rod assembly is a rotatable and liftable rotating and lifting mechanism, and an electric heating jacket is installed below the two electrode rings in the vacuum cavity, and the rotating and lifting mechanism drives the sample tray to descend into the electric heating jacket for heating or to rise to the electrode ring.

10. The vacuum coating apparatus of claim 1, wherein: The electric heating jacket is provided with a heat preservation cover, which is located on one side of the upper surface of the electric heating jacket and can be rotated on the electric heating jacket. The vacuum cavity is formed by a base and a vacuum cover sealingly connected above the base, and the vacuum cover is liftable, and the vacuum cover is connected to a vacuum pump through a suction pipe.

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