A control valve group applied to a fluid cooling system

Abstract

The utility model discloses a control valve group for fluid cooling system, including base and a plurality of installation on base's single valve, and the single valve is cuboid, and the minimum face of single valve is pasted with the base surface, the utility model discloses with the minimum face of single valve and base connection, and the single valve is set up straight, can more fully utilize vertical space, is favorable to the compact structure design of equipment.

Description

Technical Field

[0001] This utility model relates to the field of fluid pipeline control technology, and more specifically, it relates to a control valve assembly applied to a fluid cooling system. Background Technology

[0002] Many devices are equipped with fluid cooling systems to ensure necessary process conditions. For example, when semiconductor chips are etched on an etching machine, the etching solution in the etching tank generates a large amount of heat when it comes into contact with the workpiece, causing the temperature of the etching solution to rise continuously. This can easily cause some chemical substances in the etching solution to volatilize, resulting in an imbalance in the chemical composition of the etching solution, affecting etching efficiency, quality, and the service life of the equipment. Therefore, etching machines must be equipped with fluid cooling systems for cooling. Control valve assemblies are an important component of fluid cooling systems. In existing control valve assemblies, individual valves are generally installed sideways, which does not make full use of vertical space and is not conducive to the compact design of the equipment structure. Invention patent CN119755381A discloses a three-valve solenoid valve island, in which a valve cover assembly is installed on top of the valve body. The valve cover assembly can adjust whether the valve body is open, the number of outlets open, and the outlet flow rate, reducing the number of valves installed, facilitating centralized management, and providing a wide range of flow rate adjustment, improving the versatility of the valves and allowing them to be used in production scenarios of different scales. However, this invention cannot make the solenoid valve island structure more compact under the same number of valve bodies. Utility Model Content

[0003] In existing fluid cooling systems, individual valves in the control valve assembly are generally installed on their side, which is not conducive to the compact design of the equipment. To overcome this defect, this utility model provides a control valve assembly for fluid cooling systems that can make fuller use of vertical space and is beneficial to the compact design of the equipment.

[0004] The technical solution of this utility model is: a control valve group applied to a fluid cooling system, including a base and several individual valves mounted on the base. The individual valves are cuboids, and one of the smallest faces of the individual valves is in contact with the surface of the base.

[0005] Preferably, the base is two-layered and the two layers are stacked together, and the individual valve is installed on two opposite surfaces of the two-layered base.

[0006] As a preferred option, an insulation board is provided between the two base layers.

[0007] Preferably, the base is a single layer, and the individual valves are installed on two opposite surfaces of the base.

[0008] Alternatively, the individual valve can be a normally open valve.

[0009] Alternatively, the individual valve can be a normally closed valve.

[0010] Preferably, the individual valve is a pneumatic valve.

[0011] Alternatively, the individual valve can be a solenoid valve.

[0012] The beneficial effects of this utility model are:

[0013] This design facilitates a more compact structural design for the equipment. The individual valve is connected to the base at its smallest surface, allowing for a vertically mounted valve that makes better use of vertical space and promotes a more compact structural design. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of one structure of the present utility model.

[0015] Figure 2 This is a structural schematic diagram from another perspective of the present invention.

[0016] Figure 3 This is a schematic diagram of a pipeline in the cooling mode of Embodiment 1 of this utility model.

[0017] Figure 4 This is a schematic diagram of a pipeline in the heating mode of Embodiment 1 of this utility model.

[0018] Figure 5 This is a schematic diagram of a normally open single-unit valve in this utility model.

[0019] Figure 6 This is a schematic diagram of a normally closed single-unit valve in this utility model.

[0020] In the diagram, 1-base, 2-individual valve, 3-insulation board, 4-valve body, 5-energy storage ring, 6-wave spring, 7-V-shaped sealing ring, 8-sealing gasket, 9-valve stem, 10-piston, 11-first input port, 12-first output port, 13-second input port, 14-second output port, 15-third input port, 16-third output port, 17-first cooling device, 18-second cooling device, 19-etching machine, 20-separator fixing seat. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] Example 1:

[0023] like Figures 1 to 6As shown, a control valve assembly for a fluid cooling system consists of two valve assembly units. Each valve assembly unit includes a base 1 and three individual valves 2. The three individual valves 2 are arranged in an L-shape and mounted on the base 1 with screws. Each individual valve 2 is a cuboid with a top surface, a bottom surface, and four side surfaces. The top and bottom surfaces are formed by the length and width sides, while the side surfaces are formed by four side edges and the length and width sides respectively. The length side is the length of the individual valve 2, the width side is the width of the individual valve 2, and the side edge is the height of the individual valve 2. The height of the individual valve 2 is greater than its length, and the length is greater than its width; therefore, the area of ​​the top and bottom surfaces is smaller than the area of ​​each side surface. The bottom surface of the individual valve 2 is in contact with the surface of the base 1. An air inlet is provided on the bottom surface of the individual valve 2, and a valve docking interface is provided on the base 1. The air inlet of the individual valve is connected to the valve docking interface. The single-unit valve 2 includes a valve body 4, an accumulator ring 5, a wave spring 6, a V-shaped sealing ring 7, a sealing gasket 8, a valve stem 9, a piston 10, and a partition fixing seat 20. The valve body 4 is the main frame of the single-unit valve 2, with a rectangular external shape and a cylindrical internal cavity. The partition fixing seat 20 is fixed to the inner cavity wall and divides the inner cavity into two chambers. The valve stem 9 slides through the center of the partition fixing seat 20. The piston 10 is fixed to the valve stem 9 by a locating pin and is slidably connected to the inner cavity wall of the valve body 4. The accumulator ring 5 is installed on the piston 10 and is used for sealing the cylinder piston. The accumulator ring 5 is made of polytetrafluoroethylene. The wave spring 6 and the V-shaped sealing ring 7 are installed on the partition fixing seat 20. The wave spring 6 provides continuous tension to the V-shaped sealing ring 7, maintaining a certain opening angle, which can prevent the deformation of the V-shaped sealing ring 7 after long-term use, which would reduce the clamping force with the valve stem 9 and thus cause sealing failure. The V-shaped sealing ring 7, made of polytetrafluoroethylene (PTFE), is used for sealing the cylinder piston rod. The sealing gasket 8, also made of PTFE, is installed on the end of the valve stem 9 facing the inlet of the individual valve, for sealing the inlet of the individual valve of the valve body 4.

[0024] The base 1 is a rectangular plate-shaped structure with square top and bottom surfaces. It is made of high-strength aluminum alloy, a material known for its high strength and lightweight. The base 1 consists of two layers, upper and lower, stacked together. Individual valves 2 are installed on opposite surfaces of the two base layers, namely the top surface of the upper base and the bottom surface of the lower base. The three individual valves 2 on the upper base are numbered V1, V2, and V3, while those on the lower base are numbered V4, V5, and V6. V1, V2, and V6 are normally open pneumatic valves, while V3, V4, and V5 are normally closed pneumatic valves. One end of the upper base has a first input port 11 and a first output port 12, and the other end has a second input port 13 and a second output port 14. One end of the lower base has a third input port 15 and a third output port 16. An insulation board 3 is provided between the two base layers 1. The insulation board 3 is made of polyurethane foam, which gives it good heat insulation performance. It can effectively reduce heat transfer between the two base layers and avoid affecting the performance of the individual valve and the accuracy of coolant temperature control due to heat conduction.

[0025] This invention connects two cooling devices and one etching machine 19. The two cooling devices are a first cooling device 17 and a second cooling device 18. A first input port 11 and a first output port 12 are connected to the first cooling device 17, a second input port 13 and a second output port 14 are connected to the etching machine 19, and a third input port 15 and a third output port 16 are connected to the second cooling device 18. This invention can control the cooling devices and the etching machine to switch between two operating modes: cooling mode and heating mode. In cooling mode, V1, V2, and V6 are on, while V3, V4, and V5 are off. The first cooling device 17 is in external circulation mode, outputting -65℃ coolant. The coolant output from the first cooling device 17 enters the base 1 through the first input port 11, then enters the etching machine 19 via V2 to cool the etching machine 19. The coolant flowing out of the etching machine 19 is then output through the first output port 12 via V1 and returns to the first cooling device 17. In cooling mode, the second cooling device 18 operates in internal circulation, outputting 20°C coolant that circulates only internally and has no effect on the etching machine 19. The coolant output from the second cooling device 18 enters the base 1 through the third inlet 15, then flows directly out through the third outlet 16 via V6, returning to the second cooling device 18. In heating mode, V1, V2, and V6 are closed, while V3, V4, and V5 are open. The second cooling device 18 operates in external circulation, outputting 20°C coolant. The coolant output from the second cooling device 18 enters the base 1 through the third inlet 15, then flows through V5 into the etching machine 19, heating it. The coolant flowing out of the etching machine 19 then flows through V4 and out through the third outlet 16, returning to the second cooling device 18. In cooling mode, the first cooling device 17 operates in internal circulation, outputting -65°C coolant that circulates only internally and has no effect on the etching machine 19. The coolant output from the first cooling device 17 enters the base 1 through the first inlet 11, and is directly output from the first outlet 12 via V3, returning to the first cooling device 17.

[0026] Example 2:

[0027] A control valve assembly for a fluid cooling system comprises two valve assembly units. Each valve assembly unit includes a base 1 and three individual valves 2. The three individual valves 2 are arranged in an L-shape and mounted on the base 1 with screws. Each individual valve 2 is a cuboid with a top surface, a bottom surface, and four side surfaces. The top and bottom surfaces are formed by the length and width sides, while the side surfaces are formed by four side edges and the length and width sides respectively. The length side is the length of the individual valve 2, the width side is the width of the individual valve 2, and the side edge is the height of the individual valve 2. The height of the individual valve 2 is greater than its length, and the length is greater than its width; therefore, the area of ​​the top and bottom surfaces is smaller than the area of ​​each side surface. The bottom surface of the individual valve 2 is in contact with the surface of the base 1. An air inlet is provided on the bottom surface of the individual valve 2, and a valve docking port is provided on the base 1. The air inlet of the individual valve is connected to the valve docking port. The single-unit valve 2 includes a valve body 4, an accumulator ring 5, a wave spring 6, a V-shaped sealing ring 7, a sealing gasket 8, a valve stem 9, a piston 10, and a partition fixing seat 20. The valve body 4 is the main frame of the single-unit valve 2, with a rectangular external shape and a cylindrical internal cavity. The partition fixing seat 20 is fixed to the inner cavity wall and divides the inner cavity into two chambers. The valve stem 9 slides through the center of the partition fixing seat 20. The piston 10 is fixed to the valve stem 9 by a locating pin and is slidably connected to the inner cavity wall of the valve body 4. The accumulator ring 5 is installed on the piston 10 and is used for sealing the cylinder piston. The accumulator ring 5 is made of polytetrafluoroethylene. The wave spring 6 and the V-shaped sealing ring 7 are installed on the partition fixing seat 20. The wave spring 6 provides continuous tension to the V-shaped sealing ring 7, maintaining a certain opening angle, which can prevent the deformation of the V-shaped sealing ring 7 after long-term use, which would reduce the clamping force with the valve stem 9 and thus cause sealing failure. The V-shaped sealing ring 7, made of polytetrafluoroethylene (PTFE), is used for sealing the cylinder piston rod. The sealing gasket 8, also made of PTFE, is installed on the end of the valve stem 9 facing the inlet of the individual valve, for sealing the inlet of the individual valve of the valve body 4.

[0028] The base 1 is a rectangular plate-shaped structure with square top and bottom surfaces. It is made of high-strength aluminum alloy, a material known for its high strength and lightweight. The base 1 consists of two layers, upper and lower, stacked together. Individual valves 2 are installed on opposite surfaces of the two base layers, namely the top surface of the upper base and the bottom surface of the lower base. The three individual valves 2 on the upper base are numbered V1, V2, and V3, while those on the lower base are numbered V4, V5, and V6. V1, V2, and V6 are normally open pneumatic valves, while V3, V4, and V5 are normally closed pneumatic valves. One end of the upper base has a first input port 11 and a first output port 12, and the other end has a second input port 13 and a second output port 14. One end of the lower base has a third input port 15 and a third output port 16. An insulation board 3 is provided between the two base layers 1. Unlike embodiment 1, the insulation board 3 in this embodiment is made of insulation cotton with low thermal conductivity, which gives the insulation board 3 good heat insulation performance. It can effectively reduce heat transfer between the two base layers and avoid affecting the performance of the individual valve and the accuracy of coolant temperature control due to heat conduction.

[0029] This invention connects two cooling devices and one etching machine 19. The two cooling devices are a first cooling device 17 and a second cooling device 18. A first input port 11 and a first output port 12 are connected to the first cooling device 17, a second input port 13 and a second output port 14 are connected to the etching machine 19, and a third input port 15 and a third output port 16 are connected to the second cooling device 18. This invention can control the cooling devices and the etching machine to switch between two operating modes: cooling mode and heating mode. In cooling mode, V1, V2, and V6 are on, while V3, V4, and V5 are off. The first cooling device 17 is in external circulation mode, outputting -65℃ coolant. The coolant output from the first cooling device 17 enters the base 1 through the first input port 11, then enters the etching machine 19 via V2 to cool the etching machine 19. The coolant flowing out of the etching machine 19 is then output through the first output port 12 via V1 and returns to the first cooling device 17. In cooling mode, the second cooling device 18 operates in internal circulation, outputting 20°C coolant that circulates only internally and has no effect on the etching machine 19. The coolant output from the second cooling device 18 enters the base 1 through the third inlet 15, then flows directly out through the third outlet 16 via V6, returning to the second cooling device 18. In heating mode, V1, V2, and V6 are closed, while V3, V4, and V5 are open. The second cooling device 18 operates in external circulation, outputting 20°C coolant. The coolant output from the second cooling device 18 enters the base 1 through the third inlet 15, then flows through V5 into the etching machine 19, heating it. The coolant flowing out of the etching machine 19 then flows through V4 and out through the third outlet 16, returning to the second cooling device 18. In cooling mode, the first cooling device 17 operates in internal circulation, outputting -65°C coolant that circulates only internally and has no effect on the etching machine 19. The coolant output from the first cooling device 17 enters the base 1 through the first inlet 11, and is directly output from the first outlet 12 via V3, returning to the first cooling device 17.

[0030] Example 3:

[0031] A control valve assembly for a fluid cooling system includes a base 1 and four individual valves 2. The four individual valves 2 are arranged in a square and mounted on the base 1 with screws. Each individual valve 2 is a cuboid with a top surface, a bottom surface, and four side surfaces. The top and bottom surfaces are formed by a length side and a width side, while the side surfaces are formed by four side edges and the length and width sides respectively. The length side is the length of the individual valve 2, the width side is the width of the individual valve 2, and the side edge is the height of the individual valve 2. The height of the individual valve 2 is greater than its length, and the length is greater than its width; therefore, the area of ​​the top and bottom surfaces is smaller than the area of ​​each side surface. The bottom surface of the individual valve 2 is in contact with the surface of the base 1. An air inlet is provided on the bottom surface of the individual valve 2, and an interface is provided on the base 1. The air inlet of the individual valve is connected to the interface. The single-unit valve 2 includes a valve body 4, an accumulator ring 5, a wave spring 6, a V-shaped sealing ring 7, a sealing gasket 8, a valve stem 9, a piston 10, and a partition fixing seat 20. The valve body 4 is the main frame of the single-unit valve 2, with a rectangular external shape and a cylindrical internal cavity. The partition fixing seat 20 is fixed to the inner cavity wall and divides the inner cavity into two chambers. The valve stem 9 slides through the center of the partition fixing seat 20. The piston 10 is fixed to the valve stem 9 by a locating pin and is slidably connected to the inner cavity wall of the valve body 4. The accumulator ring 5 is installed on the piston 10 and is used for sealing the cylinder piston. The accumulator ring 5 is made of polytetrafluoroethylene. The wave spring 6 and the V-shaped sealing ring 7 are installed on the partition fixing seat 20. The wave spring 6 provides continuous tension to the V-shaped sealing ring 7, maintaining a certain opening angle, which can prevent the deformation of the V-shaped sealing ring 7 after long-term use, which would reduce the clamping force with the valve stem 9 and thus cause sealing failure. The V-shaped sealing ring 7 is made of polytetrafluoroethylene (PTFE) plastic and is used for sealing the cylinder piston rod. The sealing gasket 8 is also made of PTFE and is installed on the end of the valve stem 9 facing the air inlet of the individual valve, for sealing the air inlet of the individual valve of the valve body 4. The base 1 is a plate-shaped cuboid with a square top and bottom surface. The base 1 is made of high-strength aluminum alloy, which is strong and lightweight. Unlike Embodiment 1, in this embodiment, the base 1 is a single layer, and the individual valves 2 are mounted on two opposite surfaces of the base 1. All individual valves 2 are normally closed pneumatic valves.

[0032] This invention relates to mold temperature control in injection molding machines. Each individual valve 2 is used to control the temperature of different areas in the mold, and they operate independently under the control of the injection molding machine's PLC.

[0033] Example 4:

[0034] A control valve assembly for a fluid cooling system includes a base 1 and four individual valves 2. The four individual valves 2 are arranged in a square and mounted on the base 1 with screws. Each individual valve 2 is a cuboid with a top surface, a bottom surface, and four side surfaces. The top and bottom surfaces are formed by a length side and a width side, while the side surfaces are formed by four side edges and the length and width sides respectively. The length side is the length of the individual valve 2, the width side is the width of the individual valve 2, and the side edge is the height of the individual valve 2. The height of the individual valve 2 is greater than its length, and the length is greater than its width; therefore, the area of ​​the top and bottom surfaces is smaller than the area of ​​each side surface. The bottom surface of the individual valve 2 is in contact with the surface of the base 1. An air inlet is provided on the bottom surface of the individual valve 2, and an interface is provided on the base 1. The air inlet of the individual valve is connected to the interface. The single-unit valve 2 includes a valve body 4, an accumulator ring 5, a wave spring 6, a V-shaped sealing ring 7, a sealing gasket 8, a valve stem 9, a piston 10, and a partition fixing seat 20. The valve body 4 is the main frame of the single-unit valve 2, with a rectangular external shape and a cylindrical internal cavity. The partition fixing seat 20 is fixed to the inner cavity wall and divides the inner cavity into two chambers. The valve stem 9 slides through the center of the partition fixing seat 20. The piston 10 is fixed to the valve stem 9 by a locating pin and is slidably connected to the inner cavity wall of the valve body 4. The accumulator ring 5 is installed on the piston 10 and is used for sealing the cylinder piston. The accumulator ring 5 is made of polytetrafluoroethylene. The wave spring 6 and the V-shaped sealing ring 7 are installed on the partition fixing seat 20. The wave spring 6 provides continuous tension to the V-shaped sealing ring 7, maintaining a certain opening angle, which can prevent the deformation of the V-shaped sealing ring 7 after long-term use, which would reduce the clamping force with the valve stem 9 and thus cause sealing failure. The V-shaped sealing ring 7 is made of polytetrafluoroethylene (PTFE) plastic and is used for sealing the cylinder piston rod. The sealing gasket 8 is also made of PTFE and is installed on the end of the valve stem 9 facing the air inlet of the individual valve, for sealing the air inlet of the individual valve of the valve body 4. The base 1 is a plate-shaped cuboid with a square top and bottom surface. The base 1 is made of high-strength aluminum alloy, which is strong and lightweight. The base 1 is a single layer, and the individual valves 2 are mounted on two opposite surfaces of the base 1. Unlike embodiment 3, all individual valves 2 in this embodiment are normally open pneumatic valves.

[0035] This invention relates to mold temperature control in injection molding machines. Each individual valve 2 is used to control the temperature of different areas in the mold, and they operate independently under the control of the injection molding machine's PLC.

[0036] Example 5:

[0037] A control valve assembly for a fluid cooling system includes a base 1 and four individual valves 2. The four individual valves 2 are arranged in a square and mounted on the base 1 with screws. Each individual valve 2 is a cuboid with a top surface, a bottom surface, and four side surfaces. The top and bottom surfaces are formed by a length side and a width side, while the side surfaces are formed by four side edges and the length and width sides respectively. The length side is the length of the individual valve 2, the width side is the width of the individual valve 2, and the side edge is the height of the individual valve 2. The height of the individual valve 2 is greater than its length, and the length is greater than its width; therefore, the area of ​​the top and bottom surfaces is smaller than the area of ​​each side surface. The bottom surface of the individual valve 2 is in contact with the surface of the base 1. An air inlet is provided on the bottom surface of the individual valve 2, and an interface is provided on the base 1. The air inlet of the individual valve is connected to the interface. The single-unit valve 2 includes a valve body 4, an accumulator ring 5, a wave spring 6, a V-shaped sealing ring 7, a sealing gasket 8, a valve stem 9, a piston 10, and a partition fixing seat 20. The valve body 4 is the main frame of the single-unit valve 2, with a rectangular external shape and a cylindrical internal cavity. The partition fixing seat 20 is fixed to the inner cavity wall and divides the inner cavity into two chambers. The valve stem 9 slides through the center of the partition fixing seat 20. The piston 10 is fixed to the valve stem 9 by a locating pin and is slidably connected to the inner cavity wall of the valve body 4. The accumulator ring 5 is installed on the piston 10 and is used for sealing the cylinder piston. The accumulator ring 5 is made of polytetrafluoroethylene. The wave spring 6 and the V-shaped sealing ring 7 are installed on the partition fixing seat 20. The wave spring 6 provides continuous tension to the V-shaped sealing ring 7, maintaining a certain opening angle, which can prevent the deformation of the V-shaped sealing ring 7 after long-term use, which would reduce the clamping force with the valve stem 9 and thus cause sealing failure. The V-shaped sealing ring 7 is made of polytetrafluoroethylene (PTFE) plastic and is used for sealing the cylinder piston rod. The sealing gasket 8 is also made of PTFE and is installed on the end of the valve stem 9 facing the air inlet of the individual valve, for sealing the air inlet of the individual valve of the valve body 4. The base 1 is a plate-shaped cuboid with a square top and bottom surface. The base 1 is made of high-strength aluminum alloy, which is strong and lightweight. The base 1 is a single layer, and the individual valves 2 are mounted on two opposite surfaces of the base 1. Unlike embodiment 3, all individual valves 2 in this embodiment are normally closed solenoid valves.

[0038] This invention relates to mold temperature control in injection molding machines. Each individual valve 2 is used to control the temperature of different areas in the mold, and they operate independently under the control of the injection molding machine's PLC.

Claims

1. A control valve assembly for a fluid cooling system, comprising a base (1) and a plurality of individual valves (2) mounted on the base (1), characterized in that, The single valve (2) is a cuboid, and one of the smallest faces of the single valve (2) is in contact with the surface of the base (1).

2. The control valve assembly for a fluid cooling system according to claim 1, characterized in that, The base (1) is two-layered and the two layers are stacked together. The single valve (2) is installed on two opposing surfaces on the two-layer base (1).

3. The control valve assembly for a fluid cooling system according to claim 2, characterized in that, An insulation board (3) is provided between the two base layers (1).

4. The control valve assembly for a fluid cooling system according to claim 1, characterized in that, The base (1) is a single layer, and the individual valves (2) are installed on two opposite surfaces of the base (1).

5. The control valve assembly for a fluid cooling system according to claim 1, characterized in that, The unit valve (2) is a normally open valve.

6. The control valve assembly for a fluid cooling system according to claim 1, characterized in that, The unit valve (2) is a normally closed valve.

7. The control valve assembly for a fluid cooling system according to any one of claims 1 to 6, characterized in that, The individual valve (2) is a pneumatic valve.

8. The control valve assembly for a fluid cooling system according to any one of claims 1 to 6, characterized in that, The individual valve (2) is a solenoid valve.

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