Insulating carbon black storage device for photoresist

Abstract

The utility model relates to photoresist production auxiliary equipment technical field, concretely relates to an insulating carbon black storage device for photoresist, including storage box, the top of storage box is connected with feed inlet, the first solenoid valve is installed in the communication of feed inlet and storage box, the output port department of storage box bottom is provided with the second solenoid valve, still including fixed mounting on the turbine molecular pump of storage box outer side wall, the output end of turbine molecular pump is connected with the air cylinder of fixed mounting in the outer side wall of storage box, the top lift sliding of air cylinder is inserted with nitrogen tube, the output end of nitrogen tube is inserted to storage box, and is equipped with one -way exhaust valve, the utility model discloses nitrogen tube height is adjusted dynamically through lift cylinder, makes it always close carbon black material surface, and nitrogen fills the space not being occupied by material directly, and replacement efficiency improves 30% or more, and nitrogen consumption reduces 20%-40%, and turbine molecular pump provides high -purity nitrogen delivery, prevents the back flow in combination one -way exhaust valve, ensures the inert environment of fast establishment.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary equipment for photoresist production, specifically to an insulating carbon black storage device for photoresist. Background Technology

[0002] Photoresist is a key material in semiconductor manufacturing, and its performance directly affects the processing precision of chips. Insulating carbon black is an important additive in photoresist, used to adjust conductivity and optical properties. However, insulating carbon black is prone to reacting with oxygen and moisture in the air during storage, leading to agglomeration, oxidation, or performance degradation, which in turn affects the uniformity and stability of the photoresist.

[0003] In existing technologies, insulating carbon black is often stored in sealed containers, and nitrogen is injected into the container through a nitrogen injection pipe at a fixed height to replace the air. However, this method has the following drawbacks:

[0004] Low nitrogen filling efficiency: The fixed-height nitrogen injection pipe cannot adapt to spatial changes under different storage volumes. When the amount of carbon black in the storage tank is small, nitrogen needs to replace the air from the top down, resulting in a slow filling speed and easy residue in dead corners; when the amount of carbon black is large, nitrogen may be directly discharged at close range, resulting in waste.

[0005] Insufficient monitoring and control: Traditional devices lack real-time nitrogen concentration monitoring functions and rely solely on timed gas filling, which may lead to insufficient nitrogen concentration or excessive gas filling, increasing costs.

[0006] The operation is cumbersome: manual intervention is required to adjust the inflation parameters, making it difficult to achieve automated storage management.

[0007] Therefore, there is an urgent need for an insulating carbon black storage device that can dynamically adjust the nitrogen filling position, monitor the nitrogen concentration in real time, and automatically control the filling process. Utility Model Content

[0008] The purpose of this invention is to provide an insulating carbon black storage device for photoresist, which solves the problems of low nitrogen filling efficiency, serious waste and insufficient automation in the prior art through the design of a liftable nitrogen pipe and closed-loop control of nitrogen concentration.

[0009] To achieve the above objectives, this utility model provides the following technical solution:

[0010] This utility model provides a storage device for insulating carbon black for photoresist, including a storage box. The top of the storage box is connected to a feed hopper, and a first solenoid valve is installed at the connection between the feed hopper and the storage box. A second solenoid valve is provided at the output port at the bottom of the storage box. The device also includes a turbomolecular pump fixedly installed on the outer wall of the storage box. The output end of the turbomolecular pump is connected to an air cylinder fixedly installed on the outer wall of the storage box. A nitrogen pipe is slidably inserted into the top of the air cylinder. The output end of the nitrogen pipe extends into the storage box and is equipped with a one-way exhaust valve. An exhaust pipe is fixedly installed on the top of the storage box. A third solenoid valve is installed at the connection between the exhaust pipe and the storage box. A nitrogen concentration sensor with a detection end extending into the exhaust pipe is fixedly installed on the top of the exhaust pipe.

[0011] Furthermore, a hopper is installed at the bottom of the storage box, and a second solenoid valve is installed at the bottom output port of the hopper.

[0012] Furthermore, the outer wall of the storage box has a strip-shaped hole extending through the inner cavity, and a glass strip, which is opposite to the position of the one-way exhaust valve, is embedded and fixedly installed in the strip-shaped hole. Two support seats are vertically fixedly installed at the bottom of the storage box.

[0013] Furthermore, an air inlet pipe is connected between the output end of the turbomolecular pump and the air cylinder, and a lifting cylinder is vertically fixedly installed on the outer wall of the storage tank. An L-shaped lifting rod is connected to the output end of the lifting cylinder, and the end of the L-shaped lifting rod away from the lifting cylinder is vertically fixedly connected to the outer wall of the nitrogen pipe.

[0014] Furthermore, a fixing seat is fixedly installed between the outer wall of the exhaust pipe and the outer wall of the storage box, and a flange mounting plate is fixedly installed at the end of the exhaust pipe away from the storage box.

[0015] The technical solution provided by this utility model has the following advantages compared with the known prior art:

[0016] High-efficiency nitrogen filling:

[0017] The height of the nitrogen pipe is dynamically adjusted by a lifting cylinder to keep it close to the surface of the carbon black material. Nitrogen directly fills the space not occupied by the material, improving the replacement efficiency by more than 30% and reducing nitrogen consumption by 20%-40%. A turbomolecular pump provides high-purity nitrogen delivery, and a one-way exhaust valve prevents backflow, ensuring the rapid establishment of an inert environment.

[0018] Security and Visualization:

[0019] The glass strip design allows operators to visually confirm the material height and nitrogen distribution. Combined with the fine-tuning function of the lifting cylinder, the filling path can be further optimized. The sealing flange design of the exhaust pipe meets environmental protection requirements and prevents carbon black dust from leaking out. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a first-view structural diagram of an insulating carbon black storage device for photoresist according to the present invention.

[0022] Figure 2 This is a schematic diagram of the overall second-view structure of an insulating carbon black storage device for photoresist according to the present invention;

[0023] Figure 3 This is a schematic diagram of the nitrogen pipe connection structure of an insulating carbon black storage device for photoresist according to this utility model.

[0024] The labels in the diagram represent:

[0025] 1. Storage tank; 11. Feed hopper; 12. First solenoid valve; 13. Discharge hopper; 14. Second solenoid valve; 15. Glass strip; 16. Support base;

[0026] 21. Turbomolecular pump; 22. Gas cylinder; 23. Inlet pipe; 24. Nitrogen pipe; 25. One-way exhaust valve; 26. Lifting cylinder; 27. L-shaped lifting rod;

[0027] 31. Exhaust pipe; 32. Nitrogen concentration sensor; 33. Mounting base; 34. Flange mounting plate. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0029] The present invention will be further described below with reference to the embodiments.

[0030] Example 1

[0031] Reference Figure 1-3This is the first embodiment of the present invention, which discloses an insulating carbon black storage device for photoresist, including a storage box 1, a feeding hopper 11 connected to the top of the storage box 1, a first solenoid valve 12 installed at the connection between the feeding hopper 11 and the storage box 1, a second solenoid valve 14 provided at the output port at the bottom of the storage box 1, and a turbomolecular pump 21 fixedly installed on the outer wall of the storage box 1. The output end of the turbomolecular pump 21 is connected to an air cylinder 22 fixedly installed on the outer wall of the storage box 1. A nitrogen pipe 24 is slidably inserted into the top of the air cylinder 22. The output end of the nitrogen pipe 24 extends through into the storage box 1 and is equipped with a one-way exhaust valve 25. An exhaust pipe 31 is fixedly installed on the top of the storage box 1. A third solenoid valve is installed at the connection between the exhaust pipe 31 and the storage box 1. A nitrogen concentration sensor 32 with its detection end extending into the exhaust pipe 31 is fixedly installed on the top of the exhaust pipe 31.

[0032] Storage tank 1: Made of 304 stainless steel, with a volume of 500L, a design pressure of 0.6MPa, and a wall thickness of 5mm;

[0033] Feed hopper 11: Conical structure, inclined at 60°, connected to the top flange of storage tank 1;

[0034] First solenoid valve 12: DN50 diameter, working pressure 0.8MPa, response time ≤0.5s;

[0035] Second solenoid valve 14: DN65 diameter, equipped with pneumatic actuator, leakage class Class VI;

[0036] Turbomolecular pump 21: Pumping speed 300 L / s, ultimate vacuum 5 × 10⁻ 4 Pa, power 3kW;

[0037] Air cylinder 22: 50L capacity, 1.2MPa working pressure, with safety relief valve;

[0038] Nitrogen pipe 24: outer diameter 25mm, lifting stroke 0-800mm, lifting speed 10mm / s;

[0039] One-way exhaust valve 25: opening pressure 0.05MPa, flow rate 30m³ / h;

[0040] Exhaust pipe 31: DN80 stainless steel pipe, equipped with PTFE sealing gasket;

[0041] Nitrogen concentration sensor 32: Measurement range 0-100%, accuracy ±0.5%, 4-20mA output.

[0042] The turbomolecular pump 21 is controlled in conjunction with the gas storage tank 22 via a frequency converter (ABB ACS550, 3.7kW). When the pressure inside the tank is lower than 0.3MPa, it automatically starts to replenish gas and switches to standby mode when the pressure reaches 0.5MPa. The intake pipe 23 is equipped with a buffer chamber (15L volume, with a built-in sintered metal filter and a pore size of 5μm) to stabilize the airflow pulsation.

[0043] Example 2

[0044] Reference Figure 1-3 This is the second embodiment of the present utility model. The difference between this embodiment and the first embodiment is that: a feeding hopper 13 is installed at the bottom of the storage box 1, a second solenoid valve 14 is installed at the bottom output port of the feeding hopper 13, a strip-shaped hole is opened through the inner cavity on the outer side wall of the storage box 1, a glass strip 15 is embedded and fixedly installed in the strip-shaped hole, which is opposite to the position of the one-way exhaust valve 25, and two support seats 16 are vertically fixedly installed at the bottom of the storage box 1.

[0045] An air inlet pipe 23 is connected between the output end of the turbomolecular pump 21 and the air cylinder 22. A lifting cylinder 26 is also vertically fixedly installed on the outer wall of the storage tank 1. An L-shaped lifting rod 27 is connected to the output end of the lifting cylinder 26. The end of the L-shaped lifting rod 27 away from the lifting cylinder 26 is vertically fixedly connected to the outer wall of the nitrogen pipe 24. A fixing seat 33 is fixedly installed between the outer wall of the exhaust pipe 31 and the outer wall of the storage tank 1. A flange mounting plate 34 is fixedly installed on the end of the exhaust pipe 31 away from the storage tank 1.

[0046] Feed hopper 13: cone angle 45°, volume 30L, inner wall polished (Ra≤0.8μm);

[0047] Second solenoid valve 14: DN50 pneumatic ball valve with position feedback signal;

[0048] Glass strip 15: Tempered borosilicate glass, 12mm thick, pressure resistant 0.8MPa;

[0049] Support base 16: Q235 steel, 500mm high, with M20 anchor bolts;

[0050] Intake pipe 23: DN40 stainless steel corrugated pipe, pressure resistant 1.6MPa;

[0051] Lifting cylinder 26: Stroke 800mm, thrust 1500N, repeatability ±0.1mm;

[0052] L-shaped lifting rod: 27: 304 stainless steel, cross-section size 50×30mm;

[0053] Fixture 33: Welded structure, 10mm thick, fixed with M12 hex bolts;

[0054] Flange mounting plate 34: DN80 PN16 flange, sealing surface type RF.

[0055] Technical Specifications

[0056] Implementation Instructions

[0057] Installation requirements:

[0058] Storage box 1 should be installed horizontally, with a levelness deviation of ≤2mm / m;

[0059] Flange connections must be sealed with spiral wound gaskets;

[0060] The nitrogen gas pipe 24 lifting mechanism requires monthly lubrication and maintenance.

[0061] Operating parameters:

[0062] Nitrogen purity ≥ 99.999%, inflation pressure 0.3-0.5 MPa;

[0063] Replacement time (500L volume): 15-20min;

[0064] Operating ambient temperature: 10-40℃.

[0065] Safety measures:

[0066] Air cylinder 22 is equipped with a 1.5MPa safety valve;

[0067] A protective fence is installed on the outside of the glass strip 15;

[0068] The system is equipped with a pressure interlock device, which automatically shuts down the machine in case of overpressure.

[0069] This device, through adjustable nitrogen tube height (±5mm positioning accuracy) and real-time concentration monitoring, enables a 500L storage tank to reach 99.5% nitrogen purity within 18 minutes, saving more than 30% energy compared to traditional fixed designs.

[0070] The remaining structure is the same as that in Example 1.

[0071] This utility model relates to a storage device for insulating carbon black used in photoresist. Its core feature is the dynamic adjustment of the nitrogen filling height, combined with real-time monitoring of nitrogen concentration, ensuring that the insulating carbon black is always in a high-purity nitrogen protective environment, preventing oxidation and moisture absorption. The detailed working process of this device is as follows:

[0072] 1. Feeding stage

[0073] Step 1: Open the first solenoid valve 12 of the feed hopper 11, and the insulating carbon black enters the storage tank 1 through the feed hopper 11.

[0074] Step 2: After feeding is completed, close the first solenoid valve 12 to ensure that the inside of the storage tank 1 is sealed.

[0075] 2. Nitrogen filling stage

[0076] 2.1 Nitrogen pipe height adjustment 24

[0077] Step 3: Based on the amount of insulating carbon black filled in storage box 1, the control system automatically calculates the optimal inflation height of nitrogen pipe 24.

[0078] If there is little carbon black in the storage box 1, the lifting cylinder 26 drives the L-shaped lifting rod 27 to raise the nitrogen pipe 24 to a higher position to ensure that the nitrogen can cover a larger space.

[0079] If there is a lot of carbon black in storage box 1, nitrogen pipe 24 will descend to near the surface of carbon black to reduce the nitrogen diffusion path and improve filling efficiency.

[0080] Step 4: The operator can observe the carbon black accumulation height through the transparent glass strip 15 on the side wall of the storage tank 1, and manually fine-tune the position of the nitrogen pipe 24 if necessary.

[0081] 2.2 Nitrogen Injection and Air Replacement

[0082] Step 5: Start the turbomolecular pump 21, and compress nitrogen gas enters the gas cylinder 22 through the intake pipe 23.

[0083] Step 6: Nitrogen gas enters storage tank 1 through nitrogen gas pipe 24 and one-way exhaust valve 25. Since the density of nitrogen gas is close to that of air, it will gradually diffuse downwards, while driving the air upwards.

[0084] Step 7: Keep the exhaust pipe 31 on top of storage tank 1 open to allow the mixture of air and a small amount of residual nitrogen to be expelled.

[0085] 3. Nitrogen concentration monitoring and closed-loop control

[0086] Step 8: The nitrogen concentration sensor 32 inside the exhaust pipe 31 detects the nitrogen concentration of the exhaust gas in real time.

[0087] If the nitrogen concentration is lower than the set value, nitrogen filling continues and turbomolecular pump 21 continues to run.

[0088] If the nitrogen concentration reaches the set value, the control system closes the second solenoid valve 14, stops the nitrogen injection, and a stable inert environment is formed inside the storage tank 1.

[0089] 4. Discharge stage

[0090] Step 9: When insulating carbon black is needed, open the second solenoid valve 14 of the feed hopper 13, and the carbon black flows out under gravity.

[0091] Step 10: If the amount of carbon black remaining in storage box 1 decreases after material removal, the system can automatically readjust the height of nitrogen pipe 24 and replenish nitrogen if necessary to maintain an inert environment inside the box.

[0092] 5. Troubleshooting and Maintenance

[0093] Nitrogen leak detection: If the nitrogen concentration sensor 32 detects a continuous decrease in concentration, a leak may occur, and the system can issue an alarm.

[0094] Equipment maintenance: Regularly check the sealing of the one-way exhaust valve 25 and the solenoid valve to ensure that nitrogen does not flow back or leak.

[0095] Summary: The core advantages of dynamic nitrogen filling

[0096] Efficient replacement: The nitrogen tube is height-adjustable (24mm), ensuring that nitrogen fills the remaining space via the shortest path, reducing waste.

[0097] Intelligent control: Nitrogen concentration sensor 32 provides real-time feedback, automatically opening and closing the solenoid valve to maintain the optimal storage environment.

[0098] Stable storage: The insulating carbon black is always under the protection of high-purity nitrogen to avoid oxidation and moisture absorption, thereby improving the quality of photoresist production.

[0099] This device is suitable for fields such as semiconductor and photoresist production, and can significantly improve the storage stability and utilization efficiency of insulating carbon black.

[0100] When storage tank 1 is loaded with 200 kg of carbon black (40% filling rate):

[0101] Nitrogen pipe 24 automatically descends to 150mm from the material surface (accuracy ±2mm, based on feedback from a laser rangefinder sensor).

[0102] The turbomolecular pump 21 operates at 80% of its rated power, with the nitrogen flow rate controlled at 25 m³ / h;

[0103] When the nitrogen concentration sensor 32 detects that the concentration at the outlet of the exhaust pipe 31 is ≥99.5%, the third solenoid valve closes, and the whole process takes (16±2) min.

[0104] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of this utility model.

Claims

1. A storage device for insulating carbon black for photoresist, comprising a storage tank (1), wherein a feed hopper (11) is connected to the top of the storage tank (1), a first solenoid valve (12) is installed at the connection between the feed hopper (11) and the storage tank (1), and a second solenoid valve (14) is provided at the output port at the bottom of the storage tank (1), characterized in that, It also includes a turbomolecular pump (21) fixedly installed on the outer wall of the storage tank (1). The output end of the turbomolecular pump (21) is connected to a gas cylinder (22) fixedly installed on the outer wall of the storage tank (1). A nitrogen pipe (24) is inserted into the top of the gas cylinder (22) by sliding and lifting. The output end of the nitrogen pipe (24) extends into the storage tank (1) and is equipped with a one-way exhaust valve (25). An exhaust pipe (31) is fixedly installed on the top of the storage tank (1). A third solenoid valve is installed at the connection between the exhaust pipe (31) and the storage tank (1). A nitrogen concentration sensor (32) with its detection end extending into the exhaust pipe (31) is fixedly installed on the top of the exhaust pipe (31).

2. The insulating carbon black storage device for photoresist according to claim 1, characterized in that, The storage box (1) is equipped with a feeding hopper (13) at the bottom, and a second solenoid valve (14) is installed at the bottom output port of the feeding hopper (13).

3. The insulating carbon black storage device for photoresist according to claim 1, characterized in that, The outer wall of the storage box (1) has a strip-shaped hole through the inner cavity. A glass strip (15) opposite to the position of the one-way exhaust valve (25) is embedded and fixedly installed in the strip-shaped hole. Two support seats (16) are vertically fixedly installed at the bottom of the storage box (1).

4. The insulating carbon black storage device for photoresist according to claim 1, characterized in that, An air inlet pipe (23) is connected between the output end of the turbomolecular pump (21) and the air cylinder (22). A lifting cylinder (26) is also vertically fixed on the outer wall of the storage box (1). An L-shaped lifting rod (27) is connected to the output end of the lifting cylinder (26). The end of the L-shaped lifting rod (27) away from the lifting cylinder (26) is vertically fixed to the outer wall of the nitrogen pipe (24).

5. The insulating carbon black storage device for photoresist according to claim 1, characterized in that, A fixing seat (33) is fixedly installed between the outer wall of the exhaust pipe (31) and the outer wall of the storage box (1), and a flange mounting plate (34) is fixedly installed at the end of the exhaust pipe (31) away from the storage box (1).

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