Cover moving device

By designing a rotating mechanism and a positioning mechanism for the cover-shifting device, the automated flipping and cover-shifting operation of the material box is achieved, solving the problem of low efficiency in silicon wafer handling and processing in existing technologies and improving the efficiency of silicon wafer processing.

CN224394025UActive Publication Date: 2026-06-23LAPLACE (WUXI) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202521268102.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-06-19
Publication Date
2026-06-23
Estimated Expiration
2035-06-19

AI Technical Summary

Technical Problem

In existing technologies, silicon wafers require different devices for flipping and opening during loading and unloading from the cassette and during processing, resulting in low efficiency.

Method used

A lid-shifting device is provided, comprising a frame, a rotating mechanism, a first positioning mechanism, a second positioning mechanism, and a lid-shifting mechanism. The rotating mechanism drives the flipping of the material box and the rotation of the positioning mechanism to realize the automated flipping and lid-shifting operation of the material box, thereby improving efficiency.

Benefits of technology

It enables automated flipping and cover shifting of the wafer tray, improving the efficiency of silicon wafer processing, especially in the passivation process, facilitating the handling and orientation changes of silicon wafers.

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Abstract

The utility model provides a cover moving device. The cover moving device comprises a rack, a rotating mechanism, a first positioning mechanism, a second positioning mechanism and a cover moving mechanism. The first positioning mechanism comprises a first positioning table and a first positioning piece. The first positioning table is configured to bear the bottom face of the material box. The first positioning member is configured to position the bottom surface. The second positioning mechanism comprises a second positioning table and a second positioning piece. The second positioning table is configured to bear the assembling side face of the material box. And the second positioning table and the first positioning table face different directions. The second positioning member is configured to position the assembly side. The cover moving mechanism comprises a cover moving fixing piece and a cover moving moving piece. The cover moving fixing piece is arranged on the cover moving piece and is used for taking and placing the box cover. The cover moving piece is configured to drive the cover moving fixing piece to be close to or away from the material box. The rotating mechanism is configured to drive the first positioning mechanism and the second positioning mechanism to rotate so that the bottom face or the assembling side face of the material box can be opposite to the cover moving mechanism.
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