A silicon wafer transport mechanism

Abstract

The utility model relates to a silicon wafer conveying mechanism, including frame, is provided with first conveying belt and second conveying belt, first conveying belt with second conveying belt is along same linear direction arrangement, first conveying belt with second conveying belt's head and tail end portion is close to each other and has the gap that gives out, sorting frame is arranged in the top of frame, be provided with third conveying belt and sucking disc towards the frame on sorting frame, wherein, third conveying belt parallels first conveying belt, third conveying belt with first conveying belt is same direction setting, in vertical direction, third conveying belt coincides with the tail of first conveying belt and the head of second conveying belt simultaneously. The utility model discloses through the sucking disc adsorption or stop adsorbing silicon wafer, carries out the sorting to silicon wafer. The sorting mode is simple, and will not influence the conveying of silicon wafer on first conveying belt and second conveying belt, thereby guarantees the working efficiency of entire silicon wafer conveying mechanism.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production technology, and in particular to a silicon wafer conveying mechanism. Background Technology

[0002] After the silicon wafers are manufactured, they need to be tested to remove defective products.

[0003] During silicon wafer inspection, individual wafers are placed on a conveyor belt and fed into the inspection equipment one by one for testing. After inspection, the wafers are then transported out of the equipment one by one along the conveyor belt. Defective wafers are then picked out based on the inspection results. Current wafer sorting methods use a telescopic mechanism to lift or push the wafers off the conveyor belt. However, in this method, the extension and retraction of the telescopic mechanism interferes with the subsequent transport of wafers, reducing sorting efficiency.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a silicon wafer conveying mechanism to improve the efficiency of silicon wafer sorting.

[0006] The technical solution of this utility model is as follows:

[0007] The silicon wafer conveying mechanism includes:

[0008] The frame is equipped with a first conveyor belt and a second conveyor belt; the first conveyor belt and the second conveyor belt are arranged in the same straight direction, and the beginning and end ends of the first conveyor belt and the second conveyor belt are close to each other with a gap;

[0009] A sorting rack is disposed above the frame; the sorting rack is provided with a third conveyor belt and suction cups facing the frame;

[0010] The third conveyor belt is parallel to the first conveyor belt and is arranged in the same direction as the first conveyor belt; in the vertical direction, the third conveyor belt coincides with the tail of the first conveyor belt and the head of the second conveyor belt.

[0011] A further technical solution includes a support frame; the support frame includes a column disposed on the mounting plane and a crossbeam connecting the column; the crossbeam is disposed above the support frame; and the sorting rack is disposed on the crossbeam.

[0012] A further technical solution is that the column and the beam are made of channel steel; the column and the beam are connected by angle steel thread.

[0013] A further technical solution is that a horizontal plate is threadedly connected to the crossbeam, and two vertical plates are threadedly connected to the horizontal plate; the sorting rack is arranged between the two vertical plates.

[0014] A further technical solution is that three third conveyor belts are arranged side by side; a gap is left between adjacent third conveyor belts.

[0015] A further technical solution is that the suction cup is near the surface of the frame and is higher than the surface of the third conveyor belt near the frame.

[0016] A further technical solution is that at least two rollers are arranged in parallel on the sorting rack; the third conveyor belt is wound around the rollers; and the rollers are connected to a motor.

[0017] A further technical solution is that three screws are provided at the end of the suction cup away from the frame; the suction cup is threadedly connected to the sorting rack through the screws.

[0018] A further technical solution is that a waste box is also provided on the frame; the waste box is located between the first conveyor belt and the second conveyor belt; the opening of the waste box faces upward.

[0019] A further technical solution is that a support rod is provided on the surface of the waste box near the frame; the support rod supports the waste box, causing the bottom surface of the waste box to be inclined.

[0020] The beneficial technical effects of this utility model are as follows:

[0021] (1) In the silicon wafer conveying mechanism of this utility model, the third conveyor belt passes through the gap between the first and second conveyor belts. For unqualified silicon wafers, the suction cups stop adsorbing the wafers only when the wafers move above the gap between the first and second conveyor belts. The wafers no longer adsorbed by the suction cups fall off the third conveyor belt and do not move onto the second conveyor belt, thus completing the wafer sorting process. The sorting method is simple. Furthermore, when the suction cups stop adsorbing the wafers on the third conveyor belt, it does not affect the conveying of wafers on the first and second conveyor belts, thereby ensuring the overall working efficiency of the silicon wafer conveying mechanism.

[0022] (2) Furthermore, the columns and beams are made of channel steel. When the threaded fixing bracket is on the columns and beams, the position of the threaded fasteners only needs to be adjusted along the slots to fix the sorting rack in different positions on the bracket, thus improving the flexibility of sorting rack assembly.

[0023] (3) Furthermore, a waste box is provided between the first conveyor belt and the second conveyor belt to collect silicon wafers falling from the third conveyor belt. Collecting silicon wafers falling from the third conveyor belt through the waste box facilitates the collection of fallen silicon wafers. Attached Figure Description

[0024] Figure 1 A three-dimensional structural schematic diagram of a silicon wafer transport mechanism according to an embodiment of the present disclosure is shown.

[0025] Figure 2 A cross-sectional view of the sorting rack at point A is shown in a silicon wafer conveying mechanism according to an embodiment of the present disclosure.

[0026] Marked in the attached diagram:

[0027] 1. Frame; 11. First conveyor belt; 12. Second conveyor belt; 2. Support frame; 21. Column; 211. Angle steel; 22. Crossbeam; 23. Slot; 3. Horizontal plate; 31. Threaded fastener; 4. Vertical plate; 5. Sorting rack; 51. Third conveyor belt; 52. Suction cup; 521. Screw; 53. Roller; 54. Motor; 6. Waste box; 61. Support rod. Detailed Implementation

[0028] To make the objectives, features, and advantages of this utility model more apparent and understandable, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the content disclosed herein. They are not intended to limit the implementation conditions of this utility model and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0029] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] The silicon wafer conveying mechanism includes a frame 1, on which a first conveyor belt 11 and a second conveyor belt 12 are mounted. The first conveyor belt 11 and the second conveyor belt 12 are arranged in the same straight direction, with their ends close to each other and separated by a gap. The gap between the first conveyor belt 11 and the second conveyor belt 12 is wider than the silicon wafer. A sorting rack 5 is mounted above the frame 1. The sorting rack 5 is equipped with a third conveyor belt 51 facing the frame 1 and suction cups 52. Along the conveying path of the third conveyor belt 51, the sorting rack 5 is equipped with multiple suction cups 52 to prevent silicon wafers on the third conveyor belt 51 from accidentally falling off the third conveyor belt 51 due to unstable suction. In this embodiment, the suction cups 52 can be ANILA's MBN non-contact suction cups 52.

[0031] The third conveyor belt 51 is parallel to the first conveyor belt 11, and both are arranged in the same direction. Vertically, the third conveyor belt 51 coincides with the tail end of the first conveyor belt 11 and the head end of the second conveyor belt 12. To sort defective silicon wafers, the suction cup 52 stops adsorbing the wafers only when they move above the gap between the first and second conveyor belts 11 and 12. The wafers no longer adsorbed by the suction cup 52 fall off the third conveyor belt 51 without moving onto the second conveyor belt 12, thus completing the wafer sorting process. This simple sorting method ensures efficient operation of the entire wafer conveying mechanism. Furthermore, the cessation of suction cup 52's adsorption of wafers on the third conveyor belt 51 does not affect the conveying of wafers on the first and second conveyor belts 11 and 12.

[0032] It also includes a support frame 2. The support frame 2 includes a column 21 mounted on the mounting plane and a crossbeam 22 connecting the column 21. The crossbeam 22 is positioned above the support frame 2. The sorting rack 5 is mounted on the crossbeam 22. The column 21 and the crossbeam 22 are made of channel steel. When the sorting rack is fixed to the column 21 and the crossbeam 22 by threads, the position of the threaded fastener 31 can be adjusted along the slot 23 to fix the sorting rack 5 in different positions on the support frame 2, improving the assembly flexibility of the sorting rack 5.

[0033] Preferably, the column 21 and the crossbeam 22 are connected by an angle steel 211 via a threaded connection. Specifically, a threaded fastener 31 passes through the angle steel 211 and is screwed into the column 21 or the crossbeam 22. At least two threaded fasteners 31 are provided on the angle steel 211, and the two threaded fasteners 31 are screwed into the column 21 and the crossbeam 22 respectively to connect the column 21 and the crossbeam 22 by thread.

[0034] More preferably, a horizontal plate 3 is threaded onto the crossbeam 22, and two vertical plates 4 are threaded onto the horizontal plate 3. The sorting rack 5 is positioned between the two vertical plates 4. By adjusting the position of the threaded fasteners 31 along the slots 23 on the column 21 and the crossbeam 22, the horizontal plate 3 can be fixed at different positions on the crossbeam 22.

[0035] In this embodiment, the threaded fastener 31 can be a bolt, stud, or screw 521.

[0036] Three third conveyor belts 51 are arranged side by side. A gap is left between adjacent third conveyor belts 51 to facilitate the suction cups 52 to attract silicon wafers.

[0037] Preferably, the suction cup 52 is positioned near the surface of the frame 1, higher than the surface of the third conveyor belt 51 near the frame 1. This prevents the silicon wafer from contacting the suction cup 52, as the friction between the silicon wafer and the suction cup 52 would interfere with the third conveyor belt 51's transport of the silicon wafer. Three screws 521 are provided at the end of the suction cup 52 furthest from the frame 1. The suction cup 52 is threadedly connected to the sorting rack 5 via the screws 521.

[0038] More preferably, at least two rollers 53 are arranged in parallel on the sorting rack 5. A third conveyor belt 51 is wound around the rollers 53. A motor 54 is connected to the rollers 53. The motor 54 drives the rollers 53 to rotate, which in turn drives the third conveyor belt 51 to rotate to transport silicon wafers.

[0039] A waste container 6 is also installed on the frame 1. The waste container 6 is located between the first conveyor belt 11 and the second conveyor belt 12. The waste container 6 has an upward-facing opening and can collect silicon wafers falling from the third conveyor belt 51. Collecting silicon wafers falling from the third conveyor belt 51 through the waste container 6 facilitates the collection of falling silicon wafers.

[0040] Preferably, a support rod 61 is provided on the surface of the waste box 6 near the frame 1. The support rod 61 supports the waste box 6, causing the bottom surface of the waste box 6 to tilt. This prevents the silicon wafers inside the waste box 6 from sliding out of the waste box 6.

[0041] The specific workflow of this utility model is as follows:

[0042] The first conveyor belt 11 transports inspected silicon wafers to the second conveyor belt 12. When the silicon wafers reach the end of the first conveyor belt 11, the suction cup 52 attracts them onto the third conveyor belt 51. The motor 54 drives the third conveyor belt 51 to rotate, transporting the silicon wafers along the rotation direction of the third conveyor belt 51. If the silicon wafers on the third conveyor belt 51 are qualified, the suction cup 52 continues to hold them on the third conveyor belt 51 until the silicon wafers reach the end of the third conveyor belt 51, where they fall onto the second conveyor belt 12 and then move along the second conveyor belt 12 to the next process. If the silicon wafers on the third conveyor belt 51 are unqualified, when they reach above the waste bin 6, the suction cup 52 stops working and no longer holds them, and the silicon wafers on the third conveyor belt 51 fall into the waste bin 6 under gravity, completing the silicon wafer sorting.

[0043] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0044] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A silicon wafer conveying mechanism, characterized in that, The silicon wafer conveying mechanism includes: The frame is equipped with a first conveyor belt and a second conveyor belt; the first conveyor belt and the second conveyor belt are arranged in the same straight direction, and the beginning and end ends of the first conveyor belt and the second conveyor belt are close to each other with a gap; A sorting rack is disposed above the frame; the sorting rack is provided with a third conveyor belt and suction cups facing the frame; The third conveyor belt is parallel to the first conveyor belt and is arranged in the same direction as the first conveyor belt; in the vertical direction, the third conveyor belt coincides with the tail of the first conveyor belt and the head of the second conveyor belt.

2. The silicon wafer conveying mechanism as described in claim 1, characterized in that: It also includes a support frame; the support frame includes a column set on the mounting plane and a crossbeam connecting the column; the crossbeam is set above the support frame; the sorting rack is set on the crossbeam.

3. The silicon wafer conveying mechanism as described in claim 2, characterized in that: The columns and beams are made of channel steel; the columns and beams are connected by angle steel thread.

4. The silicon wafer conveying mechanism as described in claim 3, characterized in that: A horizontal plate is threaded onto the crossbeam, and two vertical plates are threaded onto the horizontal plate; the sorting rack is positioned between the two vertical plates.

5. The silicon wafer conveying mechanism as described in claim 1, characterized in that: The third conveyor belts are arranged in three parallel rows; a gap is left between adjacent third conveyor belts.

6. The silicon wafer conveying mechanism as described in claim 1, characterized in that: The suction cup is located near the surface of the frame, above the surface of the third conveyor belt near the frame.

7. The silicon wafer conveying mechanism as described in claim 1, characterized in that: At least two rollers are arranged in parallel on the sorting rack; the third conveyor belt is wound around the rollers; and the rollers are connected to a motor.

8. The silicon wafer conveying mechanism as described in claim 1, characterized in that: The suction cup is secured with three screws at one end away from the frame; the suction cup is threadedly connected to the sorting rack via these screws.

9. The silicon wafer conveying mechanism as described in claim 1, characterized in that: The frame is also equipped with a waste box; the waste box is located between the first conveyor belt and the second conveyor belt; the opening of the waste box faces upward.

10. The silicon wafer conveying mechanism as described in claim 9, characterized in that: A support rod is provided on the surface of the waste box near the frame; the support rod supports the waste box, causing the bottom surface of the waste box to be inclined.

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