A magnetron sputtering coating device

Abstract

The utility model provides a kind of magnetron sputtering coating equipment, comprising: vacuum chamber, placing box, movable frame, two extruded parts, two moving assemblies, motor, connecting frame, rotating disc, movable device and magnetron target;Placing box is set in the bottom of inner wall of vacuum chamber, movable frame is set in the top of placing box, two extruded parts are respectively set in the two sides of movable frame;Two moving assemblies are respectively set between placing box and movable frame;Motor is installed in the center position of the top of inner wall of vacuum chamber, connecting frame is connected in one end of motor, rotating disc is connected in the bottom of connecting frame;Magnetron target is set below movable device.The utility model provides a kind of magnetron sputtering coating equipment, this device can be installed when object is passed through two extruded parts, movable frame can be pulled to the outside of placing box to carry out the fixing operation of object, and this mode can increase the convenience and security of entire operation.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering, and in particular to a magnetron sputtering coating device. Background Technology

[0002] Currently, magnetron sputtering technology is a surface modification technology that is widely used in experiments and production in the fields of physical science and materials science. Magnetron sputtering coating is a technology that uses energetic particles to bombard the surface of a target in a vacuum, so that the bombarded particles are deposited on a substrate.

[0003] The prior art patent application with publication number CN220812600U, by setting a rotation and movement mechanism and a clamping assembly in a vacuum chamber, makes it easier and more convenient to clamp workpieces, reducing the amount of manual labor required to align the clamping plates. Multiple teeth on the clamping blocks ensure a more secure clamping of the workpiece and allow for free adjustment of the position of the magnetron target, thus accommodating workpieces of different models and sizes. This ensures the magnetron target can surround the workpiece for processing. Simultaneously, the rotating ring can be fixed to the turntable by a fixing rod, and the motor provides secondary fixation to the turntable, preventing damage to the connection points after prolonged use. Furthermore, the heat dissipation holes and filter screen on the housing facilitate motor operation.

[0004] However, the current device automatically clamps and secures the object by placing it between two electrically operated telescopic rods with clamping blocks inside the collection box. The current device is fixed in the center inside the device, so the operator has to operate it from inside the device when installing the object. This method can lead to inconvenience and collisions if not operated properly.

[0005] Therefore, it is necessary to provide a magnetron sputtering coating device to solve the above-mentioned technical problems. Utility Model Content

[0006] This utility model provides a magnetron sputtering coating equipment, which solves the problem that the current device is fixed in the center of the device, so the operator has to operate inside the device when installing the object. This method can cause inconvenience and collisions if not operated properly.

[0007] To solve the above-mentioned technical problems, this utility model provides a magnetron sputtering coating equipment, comprising:

[0008] Vacuum chamber, placement box, movable frame, two extrusion parts, two moving components, motor, connecting frame, rotating disk, moving device and magnetron target;

[0009] The placement box is located at the bottom of the inner wall of the vacuum chamber, the movable frame is located at the top of the placement box, and the two extrusion members are respectively located on both sides of the movable frame;

[0010] The two movable components are respectively disposed between the placement box and the movable frame. Each movable component includes a fixed rod, a movable sleeve, a circular rod, a movable sleeve, and a fixing bolt. The movable sleeve is fitted onto the surface of the fixed rod, the circular rod is connected to the surface of the movable sleeve, the movable sleeve is fitted onto the surface of the circular rod, the movable sleeve is connected to the movable frame through a connecting block, and the fixing bolt is disposed between the movable sleeve and the fixed rod.

[0011] The motor is installed at the center of the top of the inner wall of the vacuum chamber, the connecting frame is connected to one end of the motor, and the rotating disk is connected to the bottom of the connecting frame;

[0012] The magnetron target is positioned below the movable device.

[0013] Preferably, both ends of the fixing rod are connected to fixing blocks, one end of the two fixing blocks is connected to the side of the movable frame, and the top of the circular rod is connected to a stop block.

[0014] Preferably, the movable device includes a telescopic component, a U-shaped connecting rod, a movable frame, and a movable slot. The U-shaped connecting rod is connected to one end of the telescopic component, the movable frame is connected to one end of the U-shaped connecting rod, and the movable slot is located at the center of the surface of the rotating disk.

[0015] Preferably, the placement box is provided with a collection box inside.

[0016] Preferably, a fastener is provided between the placement box and the movable frame.

[0017] Preferably, a movable door is provided on one side of the vacuum chamber.

[0018] Preferably, an adjustment device is provided between the vacuum chamber and the motor. The adjustment device includes a hydraulic telescopic component, a circular block, and a movable through hole. The hydraulic telescopic component is installed on the top of the vacuum chamber, the circular block is connected to the bottom end of the hydraulic telescopic component, the movable through hole is opened on the top of the vacuum chamber, and the bottom end of the circular block is connected to the motor.

[0019] Compared with related technologies, the magnetron sputtering coating equipment provided by this utility model has the following beneficial effects:

[0020] This utility model provides a magnetron sputtering coating device. A movable frame is set on the top of the placement box, which works in conjunction with a fixed rod, a movable sleeve, a circular rod, a movable sleeve, and a fixing bolt. When an object is installed by two extrusion parts, the movable frame can be pulled to the outside of the placement box to fix the object. This method can increase the convenience and safety of the entire operation. Attached Figure Description

[0021] Figure 1 A schematic diagram of the structure of a first embodiment of a magnetron sputtering coating device provided by this utility model;

[0022] Figure 2 for Figure 1 The enlarged schematic diagram of part A shown below;

[0023] Figure 3 for Figure 1 The enlarged schematic diagram of section B is shown below;

[0024] Figure 4 for Figure 1 A schematic diagram of the internal structure of the coating equipment shown;

[0025] Figure 5 for Figure 4 The enlarged schematic diagram of section C is shown below;

[0026] Figure 6 for Figure 1 The diagram shows a three-dimensional structure of the coating equipment.

[0027] Figure 7 for Figure 1 A schematic diagram of the external three-dimensional structure of the coating equipment shown;

[0028] Figure 8 A schematic diagram of the structure of a second embodiment of a magnetron sputtering coating apparatus provided by this utility model;

[0029] Figure 9 for Figure 8 The enlarged schematic diagram of part D shown

[0030] The diagram labels are: 1. Vacuum chamber; 2. Placement box; 3. Movable frame; 4. Extrusion component;

[0031] 5. Moving component; 51. Fixed rod; 52. Moving sleeve; 53. Round rod; 54. Movable sleeve; 55. Fixing bolt; 56. Fixing block; 57. Stop block;

[0032] 6. Collection box; 7. Motor; 8. Connecting frame; 9. Rotating disc;

[0033] 10. Movable device; 101. Telescopic component; 102. U-shaped connecting rod; 103. Movable frame; 104. Movable slot;

[0034] 11. Magnetically controlled target; 12. Fixture; 13. Movable door;

[0035] 14. Adjustment device; 141. Hydraulic telescopic component; 142. Circular block; 143. Movable through hole. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0037] First Embodiment

[0038] Please refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 ,in, Figure 1 A schematic diagram of the structure of a first embodiment of a magnetron sputtering coating device provided by this utility model; Figure 2 for Figure 1 The enlarged schematic diagram of part A shown below; Figure 3 for Figure 1 The enlarged schematic diagram of section B is shown below; Figure 4 for Figure 1 A schematic diagram of the internal structure of the coating equipment shown; Figure 5 for Figure 4 The enlarged schematic diagram of section C is shown below;

[0039] Figure 6 for Figure 1 The diagram shows a three-dimensional structure of the coating equipment. Figure 7 for Figure 1 A three-dimensional structural diagram of the external structure of the coating equipment is shown. A magnetron sputtering coating equipment includes:

[0040] Vacuum chamber 1, placement box 2, movable frame 3, two extrusion parts 4, two moving components 5, motor 7, connecting frame 8, rotating disk 9, movable device 10 and magnetron target 11;

[0041] The placement box 2 is located at the bottom of the inner wall of the vacuum chamber 1, the movable frame 3 is located at the top of the placement box 2, and the two extrusion members 4 are respectively located on both sides of the movable frame 3;

[0042] Two movable components 5 are respectively disposed between the placement box 2 and the movable frame 3. Each movable component 5 includes a fixed rod 51, a movable sleeve 52, a circular rod 53, a movable sleeve 54, and a fixing bolt 55. The movable sleeve 52 is sleeved on the surface of the fixed rod 51, the circular rod 53 is connected to the surface of the movable sleeve 52, the movable sleeve 54 is sleeved on the surface of the circular rod 53, the movable sleeve 54 is connected to the movable frame 3 through a connecting block, and the fixing bolt 55 is disposed between the movable sleeve 54 and the fixed rod 51.

[0043] The motor 7 is installed at the center of the top of the inner wall of the vacuum chamber 1, the connecting frame 8 is connected to one end of the motor 7, and the rotating disk 9 is connected to the bottom of the connecting frame 8;

[0044] The magnetically controlled target 11 is positioned below the movable device 10.

[0045] The fixed rod 51 and the movable sleeve 52 can pull the movable frame 3 outward from the placement box 2. The circular rod 53 and the movable sleeve 54 can adjust the height of the movable frame 3, so that tall objects can be installed inside the movable frame 3. The extrusion component 4 consists of a hydraulic rod and an extrusion block. The motor 7 is a servo motor and is powered by an external power source.

[0046] Both ends of the fixed rod 51 are connected to fixed blocks 56, one end of the two fixed blocks 56 is connected to the side of the movable frame 3, and the top of the circular rod 53 is connected to a stop block 57.

[0047] The movable device 10 includes a telescopic member 101, a U-shaped connecting rod 102, a movable frame 103, and a movable groove 104. The U-shaped connecting rod 102 is connected to one end of the telescopic member 101, the movable frame 103 is connected to one end of the U-shaped connecting rod 102, and the movable groove 104 is located at the center of the surface of the rotating disk 9.

[0048] The telescopic component 101 is mounted on the surface of the rotating disk 9 via a fixing ring. The telescopic rod 101 and the U-shaped connecting rod 102 can adjust the left and right positions of the magnetic target 11 via the movable frame 103 and the movable slot 104. The motor 7 and the connecting frame 8 can drive the rotating disk 9 to rotate, thereby driving the magnetic target 11 to rotate and adjust its position. In use, when adjusting the left and right positions of the magnetic target 11 at the bottom of the rotating disk 9, first start the telescopic component 101 to drive the movable frame 103 to move inside the movable slot 104 via the U-shaped connecting rod 102. When the movable frame 103 moves inside the movable slot 104, it drives the magnetic target 11 at the bottom to adjust its left and right positions. When using the magnetic target 11 to operate on multiple positions of an object, first start the motor 7 to drive the connecting frame 8 to rotate. When the connecting frame 8 rotates, it drives the rotating disk 9 to rotate. When the rotating disk 9 rotates, it drives the magnetic target 11 to rotate and adjust its position.

[0049] The placement box 2 is equipped with a collection box 6 inside.

[0050] A fastener 12 is provided between the placement box 2 and the movable frame 3.

[0051] A movable door 13 is provided on one side of the vacuum chamber 1.

[0052] The working principle of the magnetron sputtering coating equipment provided by this utility model is as follows:

[0053] When using the device, to install an object inside the movable frame 3, first remove the fixing piece 12 between the movable frame 3 and the placement box 2. After removing the fixing piece 12, move the movable frame 3 to the outside of the placement box 2 by pulling it. When the movable frame 3 moves to the outside, the moving sleeve 52 moves on the surface of the fixing rod 51 through the connecting block, the movable sleeve 54 and the circular rod 53. After the movable frame 3 moves to the outside of the placement box 2, place the object between the two pressing pieces 4 and fix it. After fixing the object, return the movable frame 3 to its original position to start the operation.

[0054] Compared with related technologies, the magnetron sputtering coating equipment provided by this utility model has the following beneficial effects:

[0055] This utility model provides a magnetron sputtering coating device. A movable frame 3 is set on the top of the placement box 2, which works in conjunction with a fixed rod 51, a movable sleeve 52, a circular rod 53, a movable sleeve 54, and a fixing bolt 55. When an object is installed by two extrusion parts 4, the movable frame 3 can be pulled to the outside of the placement box 2 to fix the object. This method can increase the convenience and safety of the entire operation.

[0056] Second Embodiment

[0057] Please refer to the following: Figure 8 and Figure 9 Based on the magnetron sputtering coating apparatus provided in the first embodiment of this application, the second embodiment of this application proposes another magnetron sputtering coating apparatus. The second embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the separate implementation of the first embodiment.

[0058] Specifically, the second embodiment of this application provides a magnetron sputtering coating equipment that differs in that an adjustment device 14 is provided between the vacuum chamber 1 and the motor 7. The adjustment device 14 includes a hydraulic telescopic component 141, a circular block 142, and a movable through hole 143. The hydraulic telescopic component 141 is installed on the top of the vacuum chamber 1, the circular block 142 is connected to the bottom end of the hydraulic telescopic component 141, the movable through hole 143 is opened on the top of the vacuum chamber 1, and the bottom end of the circular block 142 is connected to the motor 7.

[0059] The opening of the movable through hole 143 facilitates the movement of the hydraulic telescopic rod 141 and the circular block 142.

[0060] The working principle of the magnetron sputtering coating equipment provided by this utility model is as follows:

[0061] In use, when adjusting the height of the motor 7 and the rotating disk 9 with the movable device 10 and the magnetic target 11, first activate the hydraulic telescopic component 141 to push the circular block 142 downward. When the circular block 142 moves downward, it pushes the motor 7 and the rotating disk 9 with the movable device 10 and the magnetic target 11 downward to adjust the height.

[0062] Compared with related technologies, the magnetron sputtering coating equipment provided by this utility model has the following beneficial effects:

[0063] This utility model provides a magnetron sputtering coating equipment, in which a hydraulic telescopic component 141, a circular block 142 and a movable through hole 143 are provided between the vacuum chamber 1 and the motor 7 to facilitate the vertical adjustment of the motor 7 and the rotating disk 9 with the movable device 10 and the magnetron target 11.

[0064] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A magnetron sputtering coating apparatus, characterized in that, include: Vacuum chamber, placement box, movable frame, two extrusion parts, two moving components, motor, connecting frame, rotating disk, moving device and magnetron target; The placement box is located at the bottom of the inner wall of the vacuum chamber, the movable frame is located at the top of the placement box, and the two extrusion members are respectively located on both sides of the movable frame; The two movable components are respectively disposed between the placement box and the movable frame. Each movable component includes a fixed rod, a movable sleeve, a circular rod, a movable sleeve, and a fixing bolt. The movable sleeve is fitted onto the surface of the fixed rod, the circular rod is connected to the surface of the movable sleeve, the movable sleeve is fitted onto the surface of the circular rod, the movable sleeve is connected to the movable frame through a connecting block, and the fixing bolt is disposed between the movable sleeve and the fixed rod. The motor is installed at the center of the top of the inner wall of the vacuum chamber, the connecting frame is connected to one end of the motor, and the rotating disk is connected to the bottom of the connecting frame; The magnetron target is positioned below the movable device.

2. The magnetron sputtering coating equipment according to claim 1, characterized in that, Both ends of the fixed rod are connected to fixed blocks, one end of each fixed block is connected to the side of the movable frame, and a stop block is connected to the top of the circular rod.

3. The magnetron sputtering coating equipment according to claim 1, characterized in that, The movable device includes a telescopic component, a U-shaped connecting rod, a movable frame, and a movable slot. The U-shaped connecting rod is connected to one end of the telescopic component, the movable frame is connected to one end of the U-shaped connecting rod, and the movable slot is located at the center of the surface of the rotating disk.

4. The magnetron sputtering coating equipment according to claim 1, characterized in that, The placement box is equipped with a collection box inside.

5. The magnetron sputtering coating equipment according to claim 1, characterized in that, A fastener is provided between the placement box and the movable frame.

6. The magnetron sputtering coating equipment according to claim 1, characterized in that, A movable door is provided on one side of the vacuum chamber.

7. The magnetron sputtering coating equipment according to claim 1, characterized in that, An adjustment device is provided between the vacuum chamber and the motor. The adjustment device includes a hydraulic telescopic component, a circular block, and a movable through hole. The hydraulic telescopic component is installed on the top of the vacuum chamber, the circular block is connected to the bottom end of the hydraulic telescopic component, the movable through hole is opened on the top of the vacuum chamber, and the bottom end of the circular block is connected to the motor.

Images