Replaceable probe four-probe probe

Abstract

The utility model relates to a four-probe probe head with replaceable probes, specifically refers to a four-probe probe head composed of probes, probe sleeves, insulating probe bases, probe sleeve fixing pieces, elastic washers, mounting seats, waterproof joints and four-core cables, wherein the probes can be quickly replaced through simple pulling and inserting. The utility model can be widely used in the process monitoring and online detection of the research and development testing and production process of semiconductor materials and devices.

Description

Technical Field

[0001] This utility model relates to a four-probe probe with replaceable probes, specifically a four-probe probe consisting of a probe, a probe sleeve, an insulating probe base, a probe sleeve fixing piece, an elastic washer, a mounting base, a waterproof connector, and a four-core cable, wherein the probes can be quickly replaced by simple plugging and unplugging. Background Technology

[0002] The four-probe probe is a key tool in materials science, the semiconductor industry, and other fields used to test the resistivity and sheet resistance of materials. Its core principle involves connecting the four-probe probe to a low-resistance tester. The four probes contact the sample surface at a specific interval, utilizing the four-probe method to eliminate the influence of contact resistance and lead resistance, achieving high-precision measurement. The four-probe probe is widely used in semiconductor research and production, such as testing the resistivity and doping uniformity of semiconductor materials like silicon wafers, gallium arsenide, and silicon carbide; testing the conductivity of transparent conductive materials; and for process monitoring and online detection during the production of semiconductor materials and devices.

[0003] During the use of four-probe probes, factors such as the electrochemical reaction between the probe material and the test material, the frequency of use, and the operating environment can lead to problems such as corrosion, wear, and deformation of the probe portion. Probe replacement is a crucial step in using four-probe probes, especially those used for process monitoring and online detection in production.

[0004] However, in existing four-probe designs, replacing a probe often requires disassembling the entire four-probe probe, which is complex, requires highly skilled operators, and is time-consuming. Designing and developing a four-probe probe that allows for quick probe replacement in a simple manner has become an urgent problem to be solved in the application field of four-probe probes. Summary of the Invention

[0005] To address the aforementioned problems encountered in practical applications of four-probe probes, this invention provides a four-probe probe with replaceable probes. This four-probe probe with replaceable probes consists of probes, probe sleeves, insulating probe holders, probe sleeve fixing plates, elastic washers, mounting bases, waterproof connectors, and a four-core cable. The probes can be quickly replaced via simple plugging and unplugging.

[0006] The technical solution adopted by this utility model to solve its technical problem is: a four-probe probe with replaceable probes. The four-probe probe with replaceable probes consists of probes, probe sleeves, insulating probe bases, probe sleeve fixing pieces, elastic washers, mounting bases, waterproof connectors and four-core cables. The probes can be quickly replaced by simple plugging and unplugging.

[0007] The four probes of this replaceable probe four-probe test probe are arranged in a straight line at equal intervals or in a square arrangement. The probes are one of the following: round-headed probes, pointed probes, conical probes, or flat-headed probes.

[0008] The probe fixing end of this replaceable probe four-probe probe is embedded inside the probe sleeve. The probe can be replaced by simple pull and plugging. The probe sleeve has a retaining ring that is integrated with the probe sleeve to prevent the probe sleeve from sliding inside the insulating probe base.

[0009] The probe sleeve retainer of the replaceable four-probe probe is an insulating plastic sheet or a bakelite board with a solder pad. The mounting holes on the probe sleeve retainer are aligned with the center of the probe sleeve mounting holes on the insulating probe holder. The feet of the probe sleeve are fixed to the probe sleeve retainer by insulating adhesive or solder.

[0010] The insulated probe holder of this replaceable four-probe probe is made of insulating plastic or insulating ceramic.

[0011] The insulated probe holder and the mounting base of this replaceable probe four-probe probe are connected by threads, and the probe sleeve fixing plate is fixed by an elastic washer between the insulated probe holder and the mounting base.

[0012] The beneficial effects of this utility model are as follows:

[0013] 1) The embedded structure between the probe and the probe sleeve of the replaceable probe four-probe probe reduces the contact resistance between the probe and the probe sleeve, while making the probe of the replaceable probe four-probe probe an independent component, which can be quickly replaced by simple plugging and unplugging.

[0014] 2) The insulating probe holder of the replaceable four-probe probe is made of insulating plastic or insulating ceramic material to ensure electrical insulation between the four probes or four probe sleeves.

[0015] 3) The fixing ring structure on the probe sleeve, the connection structure of the probe sleeve fixing piece, and the elastic washer structure between the insulating probe base and the mounting base of the four-probe replaceable probe are conducive to ensuring the positional stability of the probe sleeve on the four-probe probe, thereby improving the test accuracy and precision.

[0016] 4) The probes of this replaceable probe four-probe probe are one of the following: round-headed probes, pointed probes, conical probes, or flat-headed probes, to meet the performance requirements of probes for different materials and testing conditions. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1This is a schematic diagram of the structure of the four-probe sensor with replaceable probes according to this utility model.

[0019] Figure 2 This is a schematic diagram showing the arrangement of the four probes in the replaceable probe four-probe probe of this utility model.

[0020] Figure 3 This is a schematic diagram of the available probes of the four-probe replaceable probe of this utility model.

[0021] Figure 4 This is an exploded view of the structure of the four-probe replaceable probe of this utility model (excluding the four-core cable).

[0022] Figure 5 This is a schematic diagram of the probe sleeve structure of the four-probe replaceable probe of this utility model.

[0023] Figure 6 This is a schematic diagram of the probe and probe sleeve nesting structure of the four-probe replaceable probe of this utility model.

[0024] Figure 7 This is a schematic diagram of the optional mounting base structure for the four-probe replaceable probe of this utility model.

[0025] Figure 8 , Figure 9 This is a schematic diagram of the appearance of the four-probe sensor with replaceable probes according to this utility model.

[0026] Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 Each part uses a unified numbering system. Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9The same number corresponds to the same part or the same part. 1. Probe, 2. Probe sleeve, 3. Insulating probe holder, 4. Probe sleeve retaining plate, 5. Elastic washer, 6. Mounting base, 7. Waterproof connector, 8. Four-core cable, 21. Probe movable end, 22. Probe fixed end, 23. Retaining ring on the probe sleeve, 24. Probe sleeve mounting hole, 25. Connecting thread on the insulating probe holder, 26. Solder pad on the probe sleeve retaining plate, 27. Connecting thread on the mounting base, 28. Four-probe probe mounting thread, 29. Internal thread on the mounting base, 30. Probe sleeve fixing material, 31. Connecting material between the probe sleeve and the four-core cable. Detailed Implementation

[0027] The following is a detailed description of the four-probe sensor with replaceable probes of this utility model, with reference to the accompanying drawings.

[0028] This utility model's replaceable four-probe probe consists of a probe 1, a probe sleeve 2, an insulating probe base 3, a probe sleeve fixing piece 4, an elastic washer 5, a mounting base 6, a waterproof connector 7, and a four-core cable 8. Figure 1 and Figure 4 As shown. The probe fixing end 22 of probe 1 is nested within the probe sleeve 2. Probe 1 can be quickly replaced by simple plugging and unplugging, as... Figure 6 As shown.

[0029] The four probes of this utility model's replaceable probe four-probe test probe are arranged in a straight line at equal intervals or in a square arrangement, such as... Figure 2 As shown. Probe 1 is one of a round-tipped probe, a pointed probe, a tapered probe, or a flat-tipped probe, such as... Figure 3 As shown. The probe 1 has a small spring inside, and the movable end 21 of the probe can extend and retract inside the fixed end 22 of the probe.

[0030] The four-probe replaceable probe of this invention has a retaining ring 23 integral with the probe sleeve 2 to prevent the probe sleeve 2 from sliding within the insulating probe base 3. Figure 5 As shown.

[0031] The probe sleeve fixing plate 4 of this utility model, which features a replaceable four-probe sensor, is made of insulating plastic or bakelite board with a solder pad. The mounting holes on the probe sleeve fixing plate 4 are aligned with the center of the probe sleeve mounting holes 24 on the insulating probe base 3. The feet of the probe sleeve 2 are fixed to the probe sleeve fixing plate 4 with adhesive or solder. Figure 1 and Figure 4 As shown. Figure 1 In the process, the probe sleeve fixing material 30 is an adhesive or solder that fixes the foot of the probe sleeve 2 to the probe sleeve fixing piece 4, and the insulating probe base 3 is made of insulating plastic or insulating ceramic.

[0032] The insulating probe base 3 and the mounting base 6 of this utility model are connected by a connecting thread 25 on the insulating probe base and a connecting thread 27 on the mounting base. An elastic washer 5 is provided between the insulating probe base 3 and the mounting base 6, and the probe sleeve fixing piece 4 is fixed by the elastic washer 5. Figure 1 As shown.

[0033] Assembly steps for the replaceable probe four-probe probe (four probes arranged in a straight line at equal distances) of this utility model:

[0034] Step 1: Insert the four probe sleeves 2 into the probe sleeve mounting holes 24 of the insulating probe holder 3, so that the retaining rings 23 on the probe sleeves are locked into the probe sleeve mounting holes 24, and the outer ends of the probe sleeves 2 are flush with the ends of the insulating probe holder 3. Figure 1 , Figure 4 and Figure 5 As shown.

[0035] Step 2: Place the probe sleeve retaining plate 4 onto the feet of the probe sleeve 2, and solder the feet of the probe sleeve 2 onto the solder pads 26 on the probe sleeve retaining plate 4 to secure the feet of the probe sleeve 2. Alternatively, use insulating adhesive to fix the feet of the probe sleeve 2 to the probe sleeve retaining plate 4, such as... Figure 1 The middle probe sleeve is fixed with material 30 as shown.

[0036] Step 3: The elastic washer 5 is pressed tightly against the probe sleeve fixing piece 4, the waterproof connector 7 is screwed onto the internal thread 29 on the mounting base 6, the four-core cable 8 passes through the round hole in the center of the waterproof connector 7, and is connected to the foot of the probe sleeve 2 through the probe sleeve and four-core cable connecting material 31. The probe sleeve and four-core cable connecting material 31 can be solder or terminal block, such as DuPont wiring electronics, etc.

[0037] Step 4: Align and tighten the connecting thread 25 on the insulating probe holder 3 with the connecting thread 27 on the mounting base 6, and press the elastic washer 5 to secure the probe sleeve fixing piece 4. Figure 1 and Figure 4 As shown.

[0038] Step 5: Tighten the fastening nut on the waterproof connector 7 to secure the four-core cable 8 and prevent it from twisting or falling off.

[0039] Step 6: Insert the four probes 1 into the four probe sleeves 2 respectively to obtain the four-probe probe with replaceable probes of this utility model. Figure 8 As shown.

[0040] The four-core cable 8-connection tester can be used to perform tests using the four-probe replaceable probe of this invention. The replaceable probe of this invention can be connected to the lifting support via the four-probe mounting thread 28.

[0041] Mounting base 6 can also be Figure 7 The pattern shown indicates that the four-probe replaceable probe of this invention is as follows: Figure 9 As shown. Figure 9 The four-probe replaceable probe of this utility model can be connected to the lifting support via a clamp.

[0042] The probe 1 of the four-probe replaceable probe of this utility model can be quickly replaced by simple plugging and unplugging without disassembling the four-probe probe.

[0043] The assembly steps of the four-probe replaceable probe of this invention, in which the four probes are arranged in a square, are the same as those of the four probes arranged in a straight line at equal distances.

Claims

1. A four-probe probe with replaceable probes, characterized in that: The replaceable probe four-probe system consists of probes, probe sleeves, insulating probe holders, probe sleeve retaining plates, elastic washers, mounting bases, waterproof connectors, and a four-core cable. The probes can be quickly replaced by simple plugging and unplugging.

2. The four-probe probe with replaceable probes according to claim 1, characterized in that: The four probes of this replaceable probe four-probe test probe are arranged in a straight line at equal intervals or in a square arrangement. The probes are one of the following: round-headed probes, pointed probes, conical probes, or flat-headed probes.

3. The four-probe probe with replaceable probes according to claim 1, characterized in that: The probe fixing end of this replaceable probe four-probe probe is embedded inside the probe sleeve. The probe can be replaced by simple pull and plugging. The probe sleeve has a retaining ring that is integrated with the probe sleeve to prevent the probe sleeve from sliding inside the insulating probe base.

4. The four-probe probe with replaceable probes according to claim 1, characterized in that: The probe sleeve retainer of the replaceable four-probe probe is an insulating plastic sheet or a bakelite board with a solder pad. The mounting holes on the probe sleeve retainer are aligned with the center of the probe sleeve mounting holes on the insulating probe holder. The feet of the probe sleeve are fixed to the probe sleeve retainer by insulating adhesive or solder.

5. The four-probe probe with replaceable probes according to claim 1, characterized in that: The insulated probe holder of this replaceable four-probe probe is made of insulating plastic or insulating ceramic.

6. The four-probe probe with replaceable probes according to claim 1, characterized in that: The insulated probe holder and the mounting base of this replaceable probe four-probe probe are connected by threads, and the probe sleeve fixing plate is fixed by an elastic washer between the insulated probe holder and the mounting base.

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