A polycrystalline silicon electrode polishing device

CN224643194UActive Publication Date: 2026-08-18GANTRY LAB
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Patent Information

Application Number
CN202521874073.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-01
Publication Date
2026-08-18
Estimated Expiration
2035-09-01

AI Technical Summary

Technical Problem

该装置虽然提升了清灰效率并减轻了人工负担,但仍存在明显不足:第一,该装置未针对电极与陶瓷环间0.3-0.5mm的微小间隙设计有效防尘或清灰结构,即清理过程中仍可能导致粉尘侵入引发绝缘失效;第二,其收尘系统未采用全封闭负压控制结构,无法有效抑制粉尘扩散,在清理过程中仍存在高温粉尘与有害气体外逸的风险,导致操作人员依旧暴露于职业危害环境中,职业健康风险未能从根本上消除

Benefits of technology

1本实用新型通过自动化打磨、同步吹扫与吸尘一体化作业,将传统4-6小时的人工清炉时间缩短至1-1.5小时,维护效率提升4-6倍,设备稼动率提高至90%以上。

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a kind of polycrystalline silicon electrode polishing device, it is related to polycrystalline silicon production technical field, including operation cover, polishing disc and polishing brush, the operation cover top side is equipped with dust suction connector, the dust suction connector is connected with negative pressure machine, for negative pressure dust collection, operation cover side wall is connected with multiple upper blow-off connector and lower blow-off connector, for inlet compressed air;The polishing disc is installed in operation cover, and the polishing disc is connected with external power source by the transmission rod that passes through operation cover, and a plurality of polishing brushes are fixedly connected below the polishing disc, and the polishing brush is driven by external power source to polish electrode under the polishing disc.The utility model can effectively improve the dust removal efficiency of polycrystalline silicon reduction furnace electrode, reduce the health risk and equipment failure risk brought by manual operation.
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Description

Technical Field

[0001] This utility model belongs to the field of polycrystalline silicon production technology, and in particular relates to a polycrystalline silicon electrode polishing device. Background Technology

[0002] In the current polysilicon reduction furnace production process, after each production cycle, the silicon rod needs to be removed from the chassis, and the chassis, electrode components and related structures inside the reduction furnace need to be thoroughly cleaned to remove deposited silicon powder, graphite debris and reaction byproducts.

[0003] Currently, furnace cleaning operations are generally carried out manually. Operators need to open the furnace body and use tools such as brushes, lint-free cloths, and vacuum cleaners to clean and wipe the chassis, electrode surfaces, and furnace inner walls item by item. However, because the electrodes and furnace body of the reduction furnace use a ceramic ring insulation sealing structure with a gap of 0.3-0.5mm, fine dust can easily penetrate into this narrow gap during manual cleaning, leading to insulation failure or operational malfunctions such as arc discharge. At the same time, traditional manual furnace cleaning takes 4-6 hours per operation, with equipment downtime accounting for 12%-15%, severely limiting production line uptime. In addition, the high-temperature dust containing SiO2 and HCl gas generated during the operation do not meet the requirements of the national standard GBZ2.1-2019 "Occupational Exposure Limits for Hazardous Factors in the Workplace - Part 1: Chemical Hazardous Factors", posing occupational health risks to operators.

[0004] To address the aforementioned issues, a utility model patent with authorization announcement number CN212264034U, entitled "A Cleaning Device for Electrode Nest Ash in a Reduction Furnace," proposes using a mobile mechanical device to clean the electrode nest and ash guide trough. While this device improves cleaning efficiency and reduces manual labor, it still has significant shortcomings: First, the device lacks an effective dustproof or cleaning structure for the tiny 0.3-0.5mm gap between the electrode and the ceramic ring, meaning dust intrusion during cleaning can still lead to insulation failure. Second, its dust collection system does not employ a fully enclosed negative pressure control structure, failing to effectively suppress dust diffusion. The risk of high-temperature dust and harmful gases escaping during cleaning remains, exposing operators to occupational hazards and failing to fundamentally eliminate occupational health risks. Utility Model Content

[0005] This invention provides a polycrystalline silicon electrode polishing device, which can effectively improve the dust removal efficiency of polycrystalline silicon reduction furnace electrodes and reduce the health risks and equipment failure risks caused by manual operation.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a polycrystalline silicon electrode polishing device, comprising a working hood, a polishing disc, and polishing brushes. A dust suction pipe is provided on one side of the top of the working hood, which is connected to a negative pressure machine for negative pressure dust suction. Multiple upper and lower blowing pipes are connected to the side wall of the working hood for introducing compressed air. The polishing disc is installed inside the working hood and is connected to an external power source through a transmission rod that passes through the working hood. Multiple polishing brushes are fixedly connected below the polishing disc. The polishing disc rotates under the drive of the external power source, driving the polishing brushes to polish the electrode.

[0007] Furthermore, the suction tube is made of stainless steel and has an overall arc-shaped structure that fits the hand grip, so it can be used as a handle.

[0008] Furthermore, there are 2-10 upper purging pipes and 2-10 lower purging pipes, both of which are evenly arranged along the circumference of the working hood and are staggered in the circumferential direction.

[0009] Furthermore, the blowing direction of the upper purging pipe is obliquely downward, with an angle range of 0°-45°, and the blowing direction of the lower purging pipe (15) is obliquely upward, with an angle range of 0°-45°.

[0010] Furthermore, a positioning screw is installed on the side of the working cover, with one end of the positioning screw extending into the working cover to support the lower surface of the grinding disc to define the lowest grinding position of the grinding brush.

[0011] Furthermore, the polishing brushes are made of flexible metal or non-metal, and there are 2-6 of them.

[0012] Furthermore, the grinding disc is provided with dust suction holes, and the number of dust suction holes is 2-10.

[0013] Furthermore, the transmission rod has a diameter of 8mm and is used to match the chuck of a hand drill.

[0014] Furthermore, the contact area between the working hood and the reduction furnace is provided with a suitable gasket to prevent dirt and dust from entering the working hood.

[0015] Furthermore, the pressure of the compressed air is 0.4-0.6 MPa, and the vacuum degree of the negative pressure dust collection is not lower than -0.06 MPa.

[0016] Based on the above technical solution, the beneficial effects of this utility model are as follows: This utility model reduces the traditional 4-6 hour manual furnace cleaning time to 1-1.5 hours by integrating automated grinding, synchronous blowing and dust collection, improving maintenance efficiency by 4-6 times and increasing equipment uptime to over 90%.

[0017] 2. This invention can effectively control dust emission, with the dust emission level at a distance of 1 meter from the work hood being less than 0.3 mg / m³. 3 It is far below the requirements of the national standard GBZ2.1-2019 "Occupational Exposure Limits for Hazardous Factors in the Workplace - Part 1: Chemical Hazardous Factors", which can effectively reduce the situation where operators are exposed to high concentrations of high-temperature dust and harmful gases such as HCl for a long time, thus achieving a green and safe cleaning operation environment.

[0018] 3. This utility model adopts a precision grinding and purging combined technology, which can effectively remove micro dust in the electrode-ceramic ring gap, prevent insulation failure and arc discharge, and effectively extend the life of the device; at the same time, the modular design facilitates quick assembly and replacement, reduces reliance on professional personnel, and can effectively reduce labor costs. Attached Figure Description

[0019] Fig. 1 This is a cross-sectional view of the present invention; Fig. 2 This is a schematic diagram of the work cover; Fig. 3 This is a schematic diagram of a grinding disc.

[0020] The markings in the diagram are: 1. Working cover, 11. Transmission hole, 12. Dust suction pipe, 13. Positioning screw, 14. Upper blowing pipe, 15. Lower blowing pipe, 16. Gasket, 2. Grinding disc, 21. Transmission rod, 22. Dust suction hole, 23. Grinding brush fixing rod, 24. Grinding brush, 3. Electrode, 4. Ceramic ring. Detailed Implementation

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0022] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0023] It should also be noted that, unless otherwise stated, "multiple" refers to two or more, and the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Changes or adjustments to the relative relationships, without substantially altering the technical content, should also be considered as within the scope of implementation of this utility model.

[0024] like Figs. 1-3 As shown, a polycrystalline silicon electrode polishing device includes a working cover 1, a polishing disc 2, and polishing brushes 24. The working cover 1 serves as the main outer shell of the polishing device, providing a cavity for the polishing disc 2 and polishing brushes 24. Multiple polishing brushes 24 are fixedly connected below the polishing disc 2. The polishing disc 2 rotates under power, driving the polishing brushes 24 to move synchronously. A dust suction pipe 12 is provided on one side of the top of the working cover 1. The dust suction pipe 12 is connected to a negative pressure machine for negative pressure dust suction. The negative pressure machine can be a commercially available vacuum cleaner. The dust suction pipe 12 is made of stainless steel and has an arc-shaped structure that fits the hand grip, serving as a handle. An upper blowing pipe 14 and a lower blowing pipe 15 are connected to the side wall of the working cover 1 for introducing compressed air. The polishing disc 2 is installed inside the working cover 1 and is connected to an external power source through a transmission rod 21 that passes through the working cover 1.

[0025] A positioning screw 13 is installed on the side of the working cover 1. One end of the positioning screw 13 extends into the working cover 1 to support the lower surface of the grinding disc 2 and limit the lowest grinding position of the grinding brush 24 to prevent damage to the electrode head. The grinding brush 24 is connected to the grinding disc 2 via a grinding brush fixing rod 23. The number of grinding brushes 24 is generally 2-6. The grinding brushes 24 are made of flexible metal or non-metal materials, and their material and number can be adjusted according to different grinding intensity requirements to meet diverse electrode cleaning requirements. In this embodiment, four grinding brushes 24 and four grinding brush fixing rods 23 are provided. The grinding disc 2 rotates under the drive of an external power source, driving the grinding brushes 24 to grind and clean the electrode 3, removing the deposited silicon powder. A matching gasket 16 is provided at the contact part between the working cover 1 and the reduction furnace to prevent dirt and dust from entering the working cover 1.

[0026] In specific implementation, 2-10 upper purging pipes 14 and lower purging pipes 15 are each provided, and both are evenly arranged around the circumference of the working cover 1 and staggered in the circumferential direction. In this embodiment, there are 4 upper purging pipes 14 and 4 lower purging pipes 15, evenly arranged around the circumference of the working cover 1 and staggered in the circumferential direction. To further improve the purging effect, the purging direction of the upper purging pipe 14 is diagonally downward with an angle range of 0°-45°, and the purging direction of the lower purging pipe 15 is diagonally upward with an angle range of 0°-45°. The diagonal angle setting of the upper and lower purging pipes can form a three-dimensional purging path, ensuring that dust on the electrode surface, in gaps, and in all areas inside the working cover can be effectively blown away, avoiding blind spots in cleaning.

[0027] The grinding disc 2 has dust suction holes 22, typically 2-10 in number; in this embodiment, it has 4. These holes, in conjunction with the dust suction connector 12, enhance the suction effect on dust generated during grinding and impurities blown up, thus improving dust removal efficiency. The transmission rod 21 has a diameter of 8mm and is used to match the chuck of a hand drill.

[0028] In use, the polycrystalline silicon electrode polishing device is first assembled. First, the polishing brush 24 is inserted into the polishing brush fixing rod 23 and secured with screws. Second, the transmission rod 21 of the polishing disc 2 extends out of the working cover 1 through the transmission hole 11 and is clamped in place by a hand drill. Third, the positioning screw is screwed into the working cover 1 and adjusted to the lowest limit position of the polishing disc 2. Fourth, the dust suction pipe 12 is connected to the vacuum cleaner. Fifth, the upper blowing pipe 14 and the lower blowing pipe 15 are connected to the compressed air pipeline.

[0029] Next, the assembled polycrystalline silicon electrode polishing device is placed stably on the bottom of the reduction furnace, and a suitable gasket 16 is placed between the two to prevent dirt and dust from entering the working hood 1.

[0030] Finally, after holding the vacuum nozzle 12 firmly, open the valves of the upper blow-through nozzle 14 and the lower blow-through nozzle 15, as well as the vacuum cleaner. Utilize the coordinated action of airflow to blow-through the surface and gaps of the polycrystalline silicon electrode 3 and the ceramic ring 4, and under the action of negative pressure suction, concentrate and suck up the blown dust and dirt to prevent the spread of particulate matter. At the same time, start the pistol drill to drive the grinding disc 2 to rotate and clean the surface of the electrode assembly. According to the actual situation on site, manually adjust the position of the grinding brush 24, and through micro-motion control of its up-down and left-right movements, ensure that all parts of the electrode are evenly and thoroughly ground to improve the cleaning quality.

[0031] It should be noted that the above embodiments are only used to illustrate the present utility model, but the present utility model is not limited to the above embodiments. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall fall within the protection scope of the present utility model.

Claims

1. A polycrystalline silicon electrode polishing device, comprising a working cover (1), a polishing disc (2), and a polishing brush (24), characterized in that: The top side of the working cover (1) is provided with a dust suction pipe (12), which is connected to a negative pressure machine for negative pressure dust suction. Multiple upper blowing pipes (14) and lower blowing pipes (15) are connected to the side wall of the working cover (1) for introducing compressed air. The grinding disc (2) is installed inside the working cover (1). The grinding disc (2) is connected to an external power source through a transmission rod (21) that passes through the working cover (1). Multiple grinding brushes (24) are fixedly connected below the grinding disc (2). The grinding disc (2) rotates under the drive of the external power source, driving the grinding brushes (24) to grind the electrode (3).

2. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The vacuum tube (12) is made of stainless steel and has an overall arc-shaped structure that fits the hand grip, and can be used as a handle.

3. The polycrystalline silicon electrode polishing device according to claim 2, characterized in that: The upper purging pipe (14) and the lower purging pipe (15) are each provided with 2-10 units, and both are evenly arranged along the circumference of the working cover (1) and are staggered in the circumference.

4. A polycrystalline silicon electrode polishing device according to claim 1 or 3, characterized in that: The upper purging pipe (14) is purging in a downward direction with an angle range of 0°-45°, and the lower purging pipe (15) is purging in a upward direction with an angle range of 0°-45°.

5. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The working cover (1) is equipped with a positioning screw (13) on its side. One end of the positioning screw (13) extends into the working cover (1) to support the lower surface of the grinding disc (2) to limit the lowest grinding position of the grinding brush (24).

6. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The polishing brush (24) is made of flexible metal or non-metal and there are 2-6 of them.

7. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The grinding disc (2) has dust suction holes (22), and the number of dust suction holes (22) is 2-10.

8. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The transmission rod (21) has a diameter of 8mm and is used to match the chuck of the electric drill.

9. The polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The working cover (1) is provided with a suitable gasket (16) at the contact part with the reduction furnace to prevent dirt and dust from entering the working cover (1).

10. A polycrystalline silicon electrode polishing device according to claim 1, characterized in that: The pressure of the compressed air is 0.4-0.6MPa, and the vacuum degree of the negative pressure dust collection is not lower than -0.06MPa.

Citation Information

Patent Citations

  • Furnace ash cleaning device for reduction furnace electrode nest

    CN212264034U