A diffusion preventer fixing device for preventing deformation of a diffuser for micro-hole processing

Abstract

The utility model relates to a kind of diffusion preventer anti-deformation fixing device for micro-hole processing in the field of diffuser micro-hole processing technology, including support fixed platform and edge fixed component, support fixed platform is used to support the bottom surface of diffuser from the lower part of diffuser fixed diffuser, prevent diffuser from downward deformation or upward deformation, edge fixed component is used to compress the edge part of fixed diffuser, prevent the edge part of diffuser from upward or lateral deformation, the diffuser to be carried out micro-hole processing is compressed and fixed by support fixed platform and edge fixed component, by pressing the deformation of diffuser in micro-hole processing process, and then eliminate the influence of residual stress in diffuser processing on micro-hole processing, simple operation and less time-consuming.

Description

Technical Field

[0001] This utility model relates to the field of diffuser micro-hole processing technology, specifically to a diffuser anti-deformation fixing device for micro-hole processing. Background Technology

[0002] The diffuser (DF) is one of the main components of a CVD (chemical vapor deposition) system. Its uses include: ensuring that gas flows uniformly into the chamber, acting as an electrode to introduce RF into the chamber, and serving as the upper plate of a parallel plate capacitor.

[0003] Inside the chamber, the diffuser operates in a high-temperature, high-pressure, and corrosive gas environment, with temperatures typically ranging from 300 to 400 degrees Celsius, and in some processes reaching as high as 450 degrees Celsius. To ensure the diffuser's functionality and the uniformity of the plasma flowing into the chamber, special processing and heat treatment techniques are employed for the diffuser's vents. These primarily involve machining cone-shaped holes and dome-shaped arc surfaces.

[0004] During diffuser processing, non-uniform residual stress and plastic deformation are generated inside the material. Subsequent stress release and redistribution can cause diffuser warping or twisting, which in turn affects subsequent micro-hole processing in the following ways: failure of micro-hole position accuracy, deterioration of micro-hole morphology quality, and abnormal tool wear during processing. Utility Model Content

[0005] 1. The problem to be solved To address the problem that residual stress during diffuser processing in existing technologies causes diffuser deformation and affects micro-hole processing, this invention provides a diffuser anti-deformation fixing device for micro-hole processing, which can prevent diffuser deformation and avoid affecting micro-hole processing.

[0006] 2. Technical Solution To solve the above problems, the technical solution adopted by this utility model is as follows: A diffuser anti-deformation fixing device for micro-hole processing includes: A support mounting platform is provided, which has a support surface, a fixed mounting position, and fasteners; wherein, the support surface is used to support the diffuser, the fixed mounting position and the fasteners are used to fix the diffuser, and the fasteners are arranged between the support mounting platform and the diffuser.

[0007] Edge fixing components are configured to surround the edge of the diffuser and are used to press and fix the edge portions on each side of the diffuser.

[0008] As a preferred embodiment of this utility model, the fixed installation position includes multiple fixing holes that penetrate the support fixing platform, and the multiple fixing holes are configured to match the group of lifting holes on the bottom surface of the diffuser. The fasteners are set as fixing screws, which are configured to connect the fixing mounting position and the group of lifting holes via the bottom surface of the supporting mounting platform.

[0009] As a preferred embodiment of this utility model, the edge fixing component includes a pressure plate and a pressure plate fastener. The pressure plate is used to press the edge of the diffuser, and the pressure plate fastener provides a pressing force to the pressure plate.

[0010] As a preferred embodiment of this utility model, the pressure plate fastener includes a locking screw fixedly disposed on the support surface and a locking nut threadedly connected to the locking screw, and the pressure plate is sleeved on the locking screw.

[0011] As a preferred embodiment of this utility model, the pressure plate is also provided with a side pressure surface for pressing the side of the diffuser.

[0012] As a preferred embodiment of the present invention, the edge fixing component further includes a pressure block, which is separately disposed from the pressure plate. The pressure block is disposed on the side of the pressure plate near the diffuser. The lower pressure surface of the pressure block is used to press the upper surface of the diffuser, and the side pressure surface of the pressure block is used to press the side of the diffuser.

[0013] As a preferred embodiment of the present invention, the edge fixing assembly further includes a support column for supporting the pressure plate, and the support column is located on the side of the pressure plate away from the diffuser.

[0014] As a preferred embodiment of this utility model, the two surfaces that abut against each other in the support column and the pressure plate are set as parallel inclined surfaces, so that the support column can support the pressure plate when the pressure plate presses and fixes diffusers of different thicknesses.

[0015] As a preferred embodiment of this utility model, a support stepped surface is provided on the side of the support column near the pressure plate, and a pressure plate stepped surface is provided on the side of the pressure plate near the support column; when the pressure plate presses and fixes diffusers of different thicknesses, the support stepped surface can engage with the pressure plate stepped surface.

[0016] As a preferred embodiment of this utility model, it also includes an MCT processing platform, which is provided with multiple adsorption channels that penetrate the MCT processing platform for adsorbing and fixing the support fixing table onto the MCT processing platform; the support fixing table is a support plate with both the top and bottom surfaces being flat, and the surface of the MCT processing platform used to support the support fixing table is flat.

[0017] 3. Beneficial effects Compared with the prior art, the beneficial effects of this utility model are as follows: (1) A support fixing platform and an edge fixing component are set up. Through the synergistic effect of the two, the diffuser is prevented from deforming during the processing, thereby eliminating the influence of residual stress in the processing of the diffuser on the micro-hole processing. The operation is simple and time-saving.

[0018] (2) When fixing the diffuser, the group of lifting holes of the diffuser itself is cleverly utilized. The diffuser is firmly fixed to the support surface by screws, saving the fixture and not obstructing the dome arc surface of the diffuser, which is convenient for micro-hole processing. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the diffuser manufacturing process. The red lines in the diagram indicate the location of each manufacturing step. Figure 2 A schematic diagram of the lifting hole group on the diffuser; Figure 3 A schematic diagram of the structure after the diffuser has been processed with pores; Figure 4 for Figure 3 Enlarged schematic diagram of the mesopores; Figure 5 This is a schematic diagram of the fixing device; Figure 6 A schematic diagram of one embodiment of an edge fixing component; Figure 7 This is a schematic diagram of another implementation of the edge fixing component.

[0020] Explanation of the labels in the diagram: 1. Supporting platform; 11. Supporting surface; 12. Fixed mounting position; 13. Fasteners; 2. Edge fixing assembly; 21. Locking screw; 22. Locking nut; 23. Pressure plate; 231. Stepped surface of pressure plate; 24. Pressure block; 241. Lower pressure surface; 242. Side pressure surface; 25. Support column; 251. Stepped surface of support; 3. Diffuser; 31. Hoisting hole group; 32. Dome arc surface; 33. Vent; 331. Micropore; 4. MCT processing platform; 41. Adsorption channel. Detailed Implementation

[0021] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings and embodiments.

[0022] The structures, proportions, and sizes illustrated in the accompanying drawings are solely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of the invention, should still fall within the scope of the technical content disclosed herein. Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity and not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0023] like Figure 1 As shown, the processing of pores on the diffuser mainly includes the processing of conical holes and dome-shaped arc surfaces. The dome shape of the diffuser body makes the depth and size of the holes on the diffuser vary uniformly from the periphery to the center. This method of adjusting the uniformity of plasma by controlling the depth and size of the pores allows for uniform evaporation on the glass.

[0024] The diffusion process can lead to non-uniform residual stress and plastic deformation within the material. Subsequent stress release and redistribution can cause product warping or twisting, which in turn affects the processing of micropores (micropore diameter 0.4 mm, length 1-2 mm) in step 8 in the following ways: (1) Failure of micro-orifice positioning accuracy Orifice position misalignment: Residual stress release causes the diffuser to warp or twist, deviating the pre-designed micro-orifice positions from their theoretical coordinates. The concave structure, due to uneven stress distribution, is more prone to amplifying these deviations, resulting in uneven distribution of the micro-orifice array.

[0025] Misaligned gas flow distribution: Misalignment of micropore positions directly affects the uniformity of reactant gases in the CVD process, which may lead to uneven film thickness or defects.

[0026] (2) Decreased quality of micropore morphology Areas with concentrated residual tensile stress (such as abrupt changes in the curvature of a concave surface) are prone to microcracks or plastic deformation of the hole wall during micro-hole machining, resulting in burrs or excessive ellipticity.

[0027] Hole diameter fluctuation: Stress rebalancing causes local material shrinkage or expansion, causing the actual diameter of the microhole to deviate from the design value. (3) Abnormal tool wear during machining process Tool chipping and accelerated wear: Localized hardened areas of material caused by residual stress (such as work-hardened layers) can accelerate the wear of micro drill bits and even lead to tool breakage.

[0028] Cutting force fluctuation: The slight deformation of the workpiece caused by stress release makes the cutting force unstable during machining, affecting the surface roughness and perpendicularity of micro-hole machining.

[0029] Existing technologies generally employ the following methods to eliminate the influence of residual stress during diffuser processing on micro-hole machining: (1) After the diffuser is processed to step 7, place the diffuser for a few days to allow the stress to be released before proceeding with the micro-hole processing; (2) During the micro-hole machining in step 8, the depth of the micro-hole drill bit descent is adjusted to accommodate the deformation of the diffuser; (3) The diffuser is shaped by cold pressing and then micropores are processed.

[0030] The methods described above for eliminating the effects of residual stress all require a significant amount of additional time, extending the overall processing time of the diffuser and impacting production capacity.

[0031] Example 1 like Figure 5 As shown, this embodiment provides a diffuser anti-deformation fixing device for micro-hole processing, including a support fixing platform 1 and an edge fixing component 2; the support fixing platform 1 is used to support the bottom surface of the diffuser 3 and fix the diffuser 3 from below to prevent the diffuser 3 from deforming downward or upward; the edge fixing component 2 is used to press and fix the edge part of the diffuser 3 to prevent the edge part of the diffuser 3 from deforming upward or to the side.

[0032] Processed to Figure 1 In step 8, the diffuser 3 is pressed and fixed by the support fixing platform 1 and the edge fixing assembly. By suppressing the deformation of the diffuser 3 during the processing of the micro-hole 331, the influence of residual stress in the processing of the diffuser 3 on the processing of the micro-hole 331 is eliminated. The operation is simple and time-saving.

[0033] In one embodiment, the support fixing platform 1 is provided with a support surface 11 for supporting the bottom surface of the diffuser 3. The support surface 11 is preferably a continuous and complete plane, which provides all-round support for the bottom surface of the diffuser 3 to prevent the diffuser 3 from deforming downward.

[0034] The support mounting platform 1 is also provided with a fixed mounting position 12 and a fastener 13 for fixing the diffuser 3. The fastener 13 is configured between the support mounting platform 1 and the diffuser 3. After the diffuser 3 is fixed, it can generate a tensile force to resist upward deformation and prevent the diffuser 3 from deforming upward.

[0035] It should be noted that, as Figure 1 As shown, the depth of the hole on one side of the back of the dome arc surface 32 is much greater than the depth of the hole on one side of the dome arc surface 32. When the diffuser 3 is fixed on the support surface 11, its dome arc surface 32 is the side away from the support fixing table 1, which facilitates the processing of the micro-hole 331.

[0036] In one embodiment, the edge fixing component 2 is disposed around the edge of the diffuser 3 to press and fix the edge portions of the diffuser 3 on each side to prevent the edge of the diffuser 3 from deforming upward or laterally.

[0037] Preferably, at least one edge fixing component 2 is provided on each side of the diffuser 3 so that the edge portion of each side of the diffuser 3 can be pressed and fixed.

[0038] More preferably, multiple edge fixing components 2 can be provided on each side of the diffuser 3 to press and fix the edges of the diffuser 3 in all directions, resulting in better resistance to deformation.

[0039] In one implementation, such as Figure 5 As shown, the fixed mounting position 12 includes multiple fixing holes that penetrate the support fixing platform 1. The multiple fixing holes are configured to correspond one-to-one with the multiple lifting holes in the lifting hole group 31. The lifting hole group 31 existing in the diffuser 3 itself is fully utilized to fix the diffuser 3, without the need to open additional holes on the diffuser 3, which is efficient and time-saving. Furthermore, no additional clamps are needed to fix it from the bottom surface of the diffuser 3, which will not obstruct the dome arc surface of the diffuser 3, making it convenient for micro-hole processing.

[0040] The diffuser 3 originally had a ring-shaped group of lifting holes 31 at the center of its bottom surface, such as... Figure 2 As shown, the original function of the hoisting hole group 31 is to hoist the diffuser 3 above the tray in the CVD equipment.

[0041] Preferably, both the fixing hole and the lifting hole are threaded holes. The fastener 13 is a fixing screw. The fixing screw is threaded into the fixing hole first, and then threaded into the lifting hole, through the bottom surface of the support fixing platform 1, to firmly fix the diffuser 3 to the support surface 11 of the support fixing platform 1. Alternatively, only the lifting hole is a threaded hole, and the fixing hole is a through hole without threads. The fixing screw passes through the fixing hole first, through the bottom surface of the support fixing platform 1, and then threaded into the lifting hole, to firmly fix the diffuser 3 to the support surface 11 of the support fixing platform 1.

[0042] Example 2 Based on Embodiment 1, the edge fixing component 2 includes a pressure plate 23 and a pressure plate fastener. The pressure plate fastener provides a clamping force to the pressure plate 23, so that the pressure plate 23 clamps the edge of the diffuser 3.

[0043] In one implementation, such as Figure 6The pressure plate fastener includes a locking screw 21 fixedly disposed on the support surface 11 and a locking nut 22 threadedly connected to the locking screw 21. The locking screw 21 can be welded and fixed to the support fixing platform 1, or a threaded hole can be opened on the support fixing platform 1 so that the locking screw 21 is tightened and fixed to the threaded hole.

[0044] The pressure plate 23 is sleeved on the locking screw 21, and the pressure plate 23 is located between the locking nut 22 and the support surface 11. When the diffuser 3 is pressed and fixed, the diffuser 3 is positioned between the pressure plate 23 and the support surface 11. By rotating the locking nut 22, the locking nut 22 moves downward, pressing the pressure plate 23 tightly on the upper surface of the diffuser 3. That is, the clamping force is transmitted to the upper surface of the diffuser 3 through the locking nut 22 and the pressure plate 23.

[0045] Since the locking nut 22 can be rotated to any position on the locking screw 21, and the pressure plate 23 is simply sleeved on the locking screw 21, the edge fixing assembly 2 composed of the locking nut 22, the locking screw 21 and the pressure plate 23 can be used to fix diffusers 3 of different thicknesses.

[0046] To further improve the fastening effect on the diffuser 3, this embodiment provides an implementation method in which two edge fixing components 2 simultaneously press and fix the upper surface and side of the edge portion of the diffuser 3.

[0047] The first type has a side pressing surface 242 on the pressure plate 23 for pressing the side of the diffuser 3, which can simultaneously press and fix the upper surface and side of the edge of the diffuser 3.

[0048] The second type, such as Figure 7 As shown, the edge fixing assembly 2 also includes a pressure block 24. When the diffuser 3 is pressed and fixed, the pressure block 24 is disposed between the pressure plate 23 and the diffuser 3. The lower pressure surface 241 of the pressure block 24 presses the upper surface of the diffuser 3, and the side pressure surface 242 of the pressure block 24 contacts the side of the diffuser 3. While pressing and fixing the upper side of the edge of the diffuser 3, it can also press the side of the diffuser 3 to a certain extent to suppress the lateral deformation of the diffuser 3.

[0049] The first embodiment described above is equivalent to integrating the pressure plate 23 and the pressure block 24 into one unit, while the second embodiment is equivalent to separating the pressure plate 23 and the pressure block 24.

[0050] Since there is no connection between the pressure block 24 and the pressure plate 23, when pressing and fixing the diffuser 3, the pressure block 24 can act as an extension of the pressure plate 23. When the length of the pressure plate 23 is insufficient to cover the edge of the diffuser 3, or when the pressure plate 23 covers the edge of the diffuser 3 too shortly, the position of the pressure block 24 can be moved horizontally to increase the overall length of the pressure plate 23 and the pressure block 24.

[0051] Furthermore, the side pressing surface 242 of the pressure block 24 is set as a contoured surface that can conform to the irregular side of the diffuser 3, so that the side pressing surface 242 of the pressure block 24 can completely conform to the irregular side of the diffuser 3, resulting in a better fixing effect. At this time, when fixing the diffuser 3 using the edge fixing component 2, firstly, the pressure block 24 is pressed against the edge of the diffuser 3, then the diffuser 3 and the pressure block 24 are placed together on the support fixing platform 1, then the pressure plate 23 is fitted onto the locking screw 21, and finally the locking screw is tightened, so that the clamping force is transmitted to the diffuser 3 through the pressure plate 23 and the pressure block 24.

[0052] It should be noted that during the processing of diffuser 3, since the drilling part is located in the middle of diffuser 3, the residual stress concentration part is the middle part of diffuser 3. The possible lateral deformation of the edge of diffuser 3 is relatively small. When the pressure block 24 is pressed on diffuser 3 by pressure plate 23, the static friction between pressure block 24 and pressure plate 23 is sufficient to resist the possible lateral deformation of the edge of diffuser 3.

[0053] Example 3 Based on Example 2, such as Figure 6 and Figure 7 As shown, a support column 25 is provided on one side of the pressure plate 23 to support the pressure plate 23. When the diffuser 3 is pressed and fixed, the support column 25 is arranged between the pressure plate 23 and the support surface 11 to improve the stability of the pressure plate 23 in the working state.

[0054] The aforementioned support column 25 is located on the side of the pressure plate 23 away from the diffuser 3 during use; that is, the support column 25 and the diffuser 3 are located on different sides of the pressure plate 23. Figure 7 In the middle, the support column 25 and the diffuser 3 are located on opposite sides of the locking screw 21.

[0055] In one embodiment, the aforementioned pressure plate 23 is sleeved on the locking screw 21, and the source of the clamping force is the locking nut 22 on the locking screw 21, so it can be applied to diffusers 3 of different thicknesses; in order to maintain this characteristic, the present invention makes the following design for the support column 25 and the pressure plate 23: Option 1 involves setting the two contacting surfaces of the support column 25 and the pressure plate 23 as parallel inclined surfaces, such as... Figure 6 As shown: when pressing and fixing a diffuser 3 with a larger thickness, the part where the pressure plate 23 and the support column 25 abut against each other is located at the upper part of the inclined surface of the support column 25; when pressing and fixing a diffuser 3 with a smaller thickness, the part where the pressure plate 23 and the support column 25 abut against each other is located at the lower part of the inclined surface of the support column 25; when the pressure plate 23 presses and fixes diffusers 3 of different thicknesses, the support column 25 can provide support for the pressure plate 23.

[0056] When the inclined surface of the aforementioned support column 25 is subjected to the pressure of the pressure plate 23, the horizontal component of its force is less than the static friction between the bottom surface of the support column 25 and the support surface 11, so that the support column 25 can maintain a stable position when supporting the pressure plate 23. Specifically, the horizontal component of the force can be reduced by decreasing the slope of the inclined surface, and the static friction between the support column 25 and the support surface 11 can be increased by increasing the friction coefficient of the bottom surface of the support column 25.

[0057] Option 2: In this embodiment, the two surfaces that abut against each other in the support column 25 and the pressure plate 23 are respectively set as the support stepped surface 251 and the pressure plate stepped surface 231, as follows: Figure 7 As shown, both the support stepped surface 251 and the pressure plate stepped surface 231 are inclined. The pressure plate stepped surface 231 is configured to engage with any step on the support stepped surface 251, so that the support column 25 can provide support for the pressure plate 23 when the pressure plate 23 presses and fixes diffusers 3 of different thicknesses.

[0058] Whether using Scheme 1 or Scheme 2, you can first pre-tighten the pressure plate 23 by tightening the locking nut 22, and then move the support column 25 horizontally so that the inclined surface of the support column 25 abuts against the inclined surface of the pressure plate 23, or the support step surface 251 of the support column 25 engages with the step surface 231 of the pressure plate, and then continue to tighten the locking nut 22.

[0059] In one implementation, such as Figure 5 As shown, the diffuser anti-deformation fixing device for micropore 331 processing also includes an MCT processing platform 4. The support fixing table 1 is a support plate with both the top and bottom surfaces being flat. The surface of the MCT processing platform 4 used to support the support fixing table 1 is flat. The MCT processing platform 4 is provided with multiple adsorption channels 41 that penetrate the MCT processing platform 4. The adsorption channels 41 are connected to a vacuum pump for adsorbing and fixing the support fixing table 1 onto the MCT processing platform 4.

[0060] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A diffuser anti-deformation fixing device for micro-hole processing, characterized in that, include: A support fixing platform (1) is provided with a support surface (11), a fixed mounting position (12) and a fastener (13); wherein, the support surface (11) is used to support the diffuser (3), the fixed mounting position (12) and the fastener (13) are used to fix the diffuser (3) on the support surface (11), and the fastener (13) is disposed between the support fixing platform (1) and the diffuser (3); Edge fixing component (2) is configured to surround the edge of diffuser (3) for pressing and fixing the edge portions on each side of diffuser (3).

2. The diffuser anti-deformation fixing device for micro-hole processing according to claim 1, characterized in that: The fixed mounting position (12) includes multiple mounting holes through the support mounting platform (1), and the multiple mounting holes are configured to fit the group of lifting holes (31) on the bottom surface of the diffuser (3); The fastener (13) is configured to connect the mounting position (12) and the group of lifting holes (31) via the bottom surface of the support mounting base (1).

3. The diffuser anti-deformation fixing device for micro-hole processing according to claim 1, characterized in that: The edge fixing assembly (2) includes a pressure plate (23) and a pressure plate fastener. The pressure plate (23) is used to press the edge of the diffuser (3), and the pressure plate fastener is used to provide a pressing force to the pressure plate (23).

4. The diffuser anti-deformation fixing device for micro-hole processing according to claim 3, characterized in that: The pressure plate fastener includes a locking screw (21) fixedly installed on the support surface (11) and a locking nut (22) connected to the locking screw (21). The pressure plate (23) is sleeved on the locking screw (21).

5. The diffuser anti-deformation fixing device for micro-hole processing according to claim 3, characterized in that: The pressure plate (23) is also provided with a side pressure surface for pressing the side of the diffuser (3).

6. The diffuser anti-deformation fixing device for micro-hole processing according to claim 3, characterized in that: The edge fixing component (2) also includes a pressure block (24), which is separately disposed from the pressure plate (23). The pressure block (24) is disposed on the side of the pressure plate (23) near the diffuser (3); The lower pressing surface (241) of the pressing block (24) is used to press the upper surface of the diffuser (3), and the side pressing surface (242) of the pressing block (24) is used to press the side of the diffuser (3).

7. The diffuser anti-deformation fixing device for micro-hole processing according to any one of claims 3-6, characterized in that: The edge fixing assembly (2) also includes a support column (25) for supporting the pressure plate (23), and the support column (25) is located on the side of the pressure plate (23) away from the diffuser (3).

8. The diffuser anti-deformation fixing device for micro-hole processing according to claim 7, characterized in that: The two surfaces that abut against each other in the support column (25) and the pressure plate (23) are set as parallel inclined surfaces. When the pressure plate (23) presses and fixes diffusers (3) of different thicknesses, the support column (25) can support the pressure plate (23).

9. The diffuser anti-deformation fixing device for micro-hole processing according to claim 7, characterized in that: The support column (25) has a support stepped surface (251) on the side near the pressure plate (23), and the pressure plate (23) has a pressure plate stepped surface (231) on the side near the support column (25). When the pressure plate (23) presses and fixes diffusers (3) of different thicknesses, the support stepped surface (251) can engage with the pressure plate stepped surface (231).

10. The diffuser anti-deformation fixing device for micro-hole processing according to claim 1, characterized in that: It also includes an MCT processing platform (4), which has multiple through adsorption channels (41) for adsorbing and fixing the support fixing table (1) onto the MCT processing platform (4).

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