A clean room dynamic airflow purification system

Abstract

The present application relates to the technical field of clean room, and discloses a clean room dynamic air flow purification system, which comprises a clean room and an air treatment assembly, the clean room is divided into a return air cavity and a clean cavity by a partition plate, the bottom of the partition plate is provided with a plurality of groups of ventilation grilles for connecting the return air cavity and the clean cavity, so that the air flow in the return air cavity and the clean cavity circulates and flows; the top of the inside of the clean cavity is provided with a plurality of groups of air supply pipes, the air supply pipes are connected with air supply pipelines, the top of the inside of the return air cavity is provided with a plurality of groups of return air pipes, and the return air pipes are connected with return air pipelines for conveying the return air in the return air cavity to the air treatment assembly for purification. The design of the double-side return air cavity expands the return air collection range, and the directional air supply function of the louvered air outlet is matched, so that the air flow uniformity in the clean cavity is improved, and the air flow dead angle is effectively eliminated.

Description

Technical Field

[0001] This invention relates to the field of cleanroom technology, specifically to a dynamic airflow purification system for cleanrooms. Background Technology

[0002] A cleanroom is a well-sealed space where parameters such as air cleanliness, temperature, humidity, pressure, and noise are controlled as needed. In high-precision manufacturing fields such as pharmaceuticals, electronics, and biology, cleanrooms serve as core production environments with extremely high requirements for air cleanliness and temperature and humidity stability.

[0003] In existing technologies, cleanroom purification systems typically employ a single return air path combined with a fixed filtration process to meet the cleanliness requirements of high-precision production environments. However, this approach has several drawbacks in practical applications: the single return air design can easily create dead air zones, leading to the accumulation of local pollutants and significant fluctuations in cleanliness; filter replacement requires disassembling the piping, which is complex, and the integrated design of the filter components and frame results in high consumable costs. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this application provides a dynamic airflow purification system for cleanrooms.

[0005] To solve the above problems, this application provides the following technical solution: a cleanroom dynamic airflow purification system, including a cleanroom and an air handling unit, wherein the cleanroom is divided into a return air chamber and a clean chamber by a partition, and the bottom of the partition is provided with several sets of ventilation grilles to connect the return air chamber and the clean chamber, so that the airflow in the return air chamber and the clean chamber circulates. The clean chamber is equipped with several sets of air supply pipes at the top, and the air supply pipes are connected to air supply pipelines for supplying purified air into the clean chamber. The return air chamber is equipped with several sets of return air pipes at the top, and the return air pipes are connected to return air pipelines for supplying return air from the return air chamber to the air handling unit for purification. The air handling unit is provided with an air inlet, a return air inlet, and an air supply inlet. The air inlet is located on the side of the air handling unit and is used to introduce air into the air handling unit. The return air inlet is connected to the end of the return air duct and is used to transport the return airflow inside the return air chamber to the air handling unit for purification. The air supply inlet is connected to the end of the supply air duct and is used to supply purified air into the clean air chamber, so that the airflow inside the return air chamber and the clean air chamber circulates.

[0006] Preferably, there are two partitions located on both sides inside the cleanroom, dividing the cleanroom into two return air chambers. The two return air chambers are connected by a return air duct and are connected to the return air vent on the air handling unit.

[0007] Preferably, the air supply duct is provided with a louvered air outlet at its end inside the clean chamber, and the louvered air outlet is used to adjust the angle of the airflow entering the clean chamber.

[0008] Preferably, the air handling unit includes a first filter component, a second filter component, and a third filter component. The first filter component is located behind the air inlet and is used to perform preliminary filtration of the air entering the air handling unit. The second filter component is located behind the first filter component. The return air inlet is located between the first filter component and the second filter component and is used to perform secondary filtration of the return air and the incoming air. The third filter component is located in front of the air supply inlet.

[0009] Preferably, the air handling unit further includes a temperature and humidity component, which includes a surface cooler, a heater, and a humidifier. The surface cooler is used for cooling, the heater is used for heating, and the humidifier is used for humidifying. The surface cooler, heater, and humidifier are controlled by a controller for use in different scenarios.

[0010] Preferably, the air handling assembly further includes a fan assembly to provide power for air delivery, so that the treated air is delivered into the clean chamber.

[0011] Preferably, the fan assembly includes a fan, the air outlet of the fan is connected to a shroud, the air outlet of the shroud is divided into several equal-division chambers, and each equal-division chamber is provided with a conical block for evenly distributing the airflow within the air handling assembly.

[0012] Preferably, the air handling assembly has an installation groove on its side, and the first filter assembly, the second filter assembly, and the third filter assembly are all installed in the installation groove for replacing the filter elements of the first filter assembly, the second filter assembly, and the third filter assembly.

[0013] Preferably, the first filter assembly, the second filter assembly, and the third filter assembly all include a mounting frame. The mounting frame is slidably installed in a mounting groove. The mounting frame is configured in a "door" shape. A filter screen mounting groove is provided on the inner side of the mounting frame. A filter screen is slidably installed in the filter screen mounting groove. A handle is provided on the outer side of the mounting frame. A buckling mechanism is provided on both sides of the mounting frame for engaging the mounting frame inside the mounting groove.

[0014] Preferably, the latching mechanism includes a latching block, which is slidably connected in a groove opened on the side of the mounting frame. A spring is provided inside the groove. The upper and lower sides of the mounting groove are provided with latching slots, which are adapted to the latching block. The latching block is spherical, and the latching slot is arc-shaped. During the installation of the mounting frame, the latching block is latched into the latching slot.

[0015] Compared with the prior art, this application provides a cleanroom dynamic airflow purification system, which has the following beneficial effects: This cleanroom dynamic airflow purification system adopts a double-sided return air chamber design, which expands the return air collection range. Combined with the directional air supply function of the louvered air outlets, it improves the uniformity of airflow in the clean chamber and effectively eliminates dead air zones.

[0016] This cleanroom dynamic airflow purification system features a modular design for the filter and mounting frame, allowing only the filter to be replaced without replacing the entire filter assembly. The combination of the mounting slide and the snap-fit ​​mechanism enables quick assembly and disassembly of the filter assembly, shortening filter replacement time, reducing downtime losses due to maintenance, and lowering operation and maintenance costs.

[0017] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the structure of a cleanroom dynamic airflow purification system according to this application; Figure 2 This is a schematic diagram of the structure of a cleanroom using a dynamic airflow purification system, as described in this application. Figure 3 This is a schematic diagram of the air handling component of a cleanroom dynamic airflow purification system according to this application; Figure 4 This is a schematic diagram of the installation slide of a cleanroom dynamic airflow purification system according to this application; Figure 5 This is a schematic diagram of the structure of the fan assembly of a cleanroom dynamic airflow purification system according to this application; Figure 6 This is a schematic diagram of the installation frame of a cleanroom dynamic airflow purification system according to this application; Figure 7 For this application Figure 6 Enlarged structural diagram at point A in the middle.

[0019] Reference numerals: 100, Cleanroom; 101, Partition; 102, Return air chamber; 103, Clean chamber; 104, Ventilation grille; 200, Supply air duct; 201, Supply air duct; 202, Louvered air outlet; 300, Return air duct; 301, Return air duct; 400, Air handling unit; 401, Air inlet; 402, Return air outlet; 403, Supply air outlet; 404, Mounting slide; 405, Slot; 410, First filter assembly ; 420, Second filter assembly; 430, Third filter assembly; 440, Fan assembly; 441, Fan; 442, Fan shroud; 443, Dividing chamber; 444, Conical block; 450, Temperature and humidity assembly; 451, Surface cooler; 452, Heater; 453, Humidifier; 500, Mounting frame; 501, Handle; 502, Filter mounting slot; 503, Spring; 504, Slide groove; 505, Locking block; 600, Filter screen. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0022] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Please see Figures 1-7 This application provides a new technical solution: a cleanroom dynamic airflow purification system, including a cleanroom 100 and an air handling unit 400. The cleanroom 100 is divided into a return air chamber 102 and a clean chamber 103 by a partition 101. The bottom of the partition 101 is provided with several sets of ventilation grilles 104 for connecting the return air chamber 102 and the clean chamber 103, so that the airflow in the return air chamber 102 and the clean chamber 103 circulates. The clean chamber 103 has several sets of air supply pipes 200 at the top, and the air supply pipes 200 are connected to air supply ducts 201 for supplying purified air into the clean chamber 103. The return air chamber 102 has several sets of return air pipes 300 at the top, and the return air pipes 300 are connected to return air ducts 301 for supplying return air from the return air chamber 102 to the air handling unit 400 for purification. The air handling unit 400 is provided with an air inlet 401, a return air inlet 402, and an air supply inlet 403. The air inlet 401 is located on the side of the air handling unit 400 and is used to introduce air into the air handling unit 400. The return air inlet 402 is connected to the end of the return air duct 301 and is used to transport the return airflow inside the return air chamber 102 to the air handling unit 400 for purification. The air supply inlet 403 is connected to the end of the air supply duct 201 and is used to supply purified air into the clean air chamber 103, so that the airflow inside the return air chamber 102 and the clean air chamber 103 circulates.

[0025] During operation, fresh air enters from the air inlet 401 on the side of the air handling unit 400, and return air from the return air chamber 102 flows into the air handling unit 400 through the return air duct 301. Inside the air handling unit 400, the fresh air and return air are mixed and then subjected to purification and temperature and humidity regulation. The treated clean air enters the supply air duct 201 through the supply air outlet 403, and is then sent to the clean chamber 103 through the supply air duct 200. The air in the clean chamber 103 flows into the return air chamber 102 through the ventilation grille 104 at the bottom of the partition 101, and is then collected by the return air duct 300 and sent back to the air handling unit 400 through the return air duct 301. This cycle repeats continuously to maintain the air purification and temperature and humidity stability of the clean room. An air circulation path is constructed by setting up supply air duct 201, return air duct 301, and air handling unit 400. The mixed treatment of fresh air and return air can utilize some of the energy of the return air to reduce energy consumption, while ensuring continuous indoor air purification. The return air chamber 102 and the clean air chamber 103 are separated by a partition 101, which promotes directional and orderly airflow, effectively avoids airflow short-circuiting and turbulence, improves purification efficiency, and provides a stable and clean indoor air environment.

[0026] In some embodiments, there are two partitions 101 located on both sides of the cleanroom 103, dividing the cleanroom 103 into two return air chambers 102. The two return air chambers 102 are connected via return air ducts 301 and to return air inlets 402 on the air handling unit 400. The two partitions 101 separate the cleanroom 103 into independent return air chambers 102. Air from the cleanroom 103 flows into the corresponding return air chambers 102 from both sides. The return air from both return air chambers 102 is then collected via return air ducts 301 and uniformly delivered to the return air inlets 402 of the air handling unit 400. After treatment, it is then sent back into the cleanroom 103, forming a dual-sided return air circulation. This dual-sided return air design expands the return air collection range, making the airflow distribution within the cleanroom 103 more uniform, reducing dead zones, and improving the purification effect.

[0027] In some embodiments, a louvered air vent 202 is provided at the end of the air supply duct 200 inside the clean chamber 103. The louvered air vent 202 is used to adjust the angle of the airflow entering the clean chamber 103. When the purified air reaches the louvered air vent 202 at the end of the air supply duct 200, the airflow direction can be changed by adjusting the angle of the louvered air vent 202 blades, such as horizontally or tilted downwards, so that the airflow can accurately cover different areas within the clean chamber 103. The airflow direction can be flexibly adjusted according to the actual needs such as the equipment layout and personnel activity areas within the clean chamber 103, effectively preventing the airflow from directly blowing onto sensitive equipment or personnel and reducing interference with the working environment.

[0028] In some embodiments, the air handling assembly 400 includes a first filter assembly 410, a second filter assembly 420, and a third filter assembly 430. The first filter assembly 410 is located behind the air inlet 401 and is used to perform preliminary filtration of the air entering the air handling assembly 400. The second filter assembly 420 is located behind the first filter assembly 410. The return air inlet 402 is located between the first filter assembly 410 and the second filter assembly 420 and is used to perform secondary filtration of the return air and the incoming air. The third filter assembly 430 is located in front of the air supply outlet 403. After fresh air enters through the air inlet 401, it is first pre-filtered by the first filter assembly 410 to remove larger particulate pollutants from the air. Subsequently, the return air enters from the return air inlet 402 and mixes with the fresh air that has undergone preliminary filtration between the first filter component 410 and the second filter component 420. Then, they both enter the second filter component 420 for secondary filtration to further improve air cleanliness. Finally, the air undergoes deep filtration through the third filter component 430 to remove pollutants such as fine particles and microorganisms, and is output from the air outlet 403 to the clean chamber 103.

[0029] In some embodiments, the air handling unit 400 further includes a temperature and humidity component 450, which includes a surface cooler 451, a heater 452, and a humidifier 453. The surface cooler 451 is used for cooling, the heater 452 for heating, and the humidifier 453 for humidifying. The surface cooler 451, heater 452, and humidifier 453 are controlled by a controller for use according to different scenarios. When the temperature is too high, the surface cooler 451 is activated, using a low-temperature refrigerant to exchange heat with the air, lowering the air temperature and simultaneously dehumidifying. When the temperature is too low, the heater 452 is activated to heat the air. If the humidity is below a set value, the humidifier 453 starts working, replenishing moisture to the air, thereby achieving precise control of air temperature and humidity. The air temperature and humidity can be flexibly adjusted according to different usage scenarios and needs, providing suitable environmental conditions for production, experiments, and other activities within the cleanroom.

[0030] In some embodiments, the air handling assembly 400 further includes a fan assembly 440 to provide power for the delivery of air, so that the treated air is delivered into the clean chamber 103.

[0031] In this embodiment, the fan assembly 440 includes a fan 441, the air outlet of which is connected to a shroud 442. The air outlet of the shroud 442 is divided into several equal-distribution chambers 443, each of which is equipped with a conical block 444 for evenly distributing the airflow within the air handling assembly 400. Under the action of the fan 441, the purified and temperature / humidity regulated air within the air handling assembly 400, discharged by the high-speed airflow from the fan 441, first enters the shroud 442. The shroud 442 acts as a converging and initial guide, directing the airflow into the several equal-distribution chambers 443. Within the equal-distribution chambers 443, the airflow impacts the conical blocks 444, which evenly distribute the concentrated airflow in various directions, ensuring uniform airflow distribution within the air handling assembly 400 and preventing localized excessively high or low airflow velocities.

[0032] In some embodiments, the air handling unit 400 has a mounting groove 404 on its side. The first filter assembly 410, the second filter assembly 420, and the third filter assembly 430 are all installed in the mounting groove 404 for replacing the filter elements of the first filter assembly 410, the second filter assembly 420, and the third filter assembly 430. The first filter assembly 410, the second filter assembly 420, and the third filter assembly 430 are all inserted into the mounting groove 404 on the side of the air handling unit 400. When the filter element needs to be replaced, the operator only needs to pull out the corresponding filter assembly along the mounting groove 404 to replace the filter element. After replacement, the filter assembly is pushed back into its original position to complete the maintenance process. This simplifies the filter element replacement process, eliminates the need to disassemble complex piping and system structures, and reduces the difficulty and time cost of maintenance work.

[0033] In some embodiments, the first filter assembly 410, the second filter assembly 420, and the third filter assembly 430 each include a mounting frame 500. The mounting frame 500 is slidably installed within a mounting groove 404. The mounting frame 500 is shaped like a "door." A filter screen mounting groove 502 is provided on the inner side of the mounting frame 500. A filter screen 600 is slidably installed within the filter screen mounting groove 502. A handle 501 is provided on the outer side of the mounting frame 500. Clamping mechanisms are provided on both sides of the mounting frame 500 to engage it within the mounting groove 404. The mounting frame 500 is "door-shaped" and has structures on both sides that adapt to the mounting groove 404. It can be easily slidably inserted or removed along the mounting groove 404 using the handle 501. The filter screen 600 is slidably installed within the filter screen mounting groove 502 inside the mounting frame 500, facilitating disassembly and replacement.

[0034] In some embodiments, the latching mechanism includes a latching block 505, which is slidably connected within a slide groove 504 opened on the side of the mounting frame 500. A spring 503 is provided inside the slide groove 504. Slots 405 are opened on the upper and lower sides of the mounting slide groove 404. The slots 405 are adapted to the latching block 505. The latching block 505 is spherically shaped, and the slots 405 are arc-shaped. During the installation of the mounting frame 500, the latching block 505 is latched into the slots 405. During the insertion of the mounting frame 500 into the mounting groove 404, the locking block 505 inside the side groove 504 of the mounting frame 500 is squeezed by the inner wall of the mounting groove 404, overcoming the elastic force of the spring 503, and retracts into the groove 504. When the locking block 505 moves to the position of the locking slot 405 on the upper and lower sides of the mounting groove 404, the spring 503 restores its deformation, pops the locking block 505 out, and makes it lock into the locking slot 405, thereby achieving a tight engagement between the mounting frame 500 and the mounting groove 404. During disassembly, by pulling the handle 501, the mounting frame 500 is subjected to an outward pulling force. Under the action of the pulling force, the locking block 505 compresses the spring 503 and disengages from the locking slot 405, so that the mounting frame 500 can be pulled out from the mounting groove 404. The spherical locking block 505 is compatible with the arc-shaped locking groove 405. During installation, the locking block 505 can slide better along the mounting slide 404 and engage with the locking groove 405, reducing the alignment difficulty during installation and improving installation efficiency. The elastic cushioning provided by the spring 503 reduces the hard impact during installation and disassembly, effectively extending the service life of the component.

[0035] Working principle: In use, a cleanroom dynamic airflow purification system allows outdoor fresh air to enter the system through the air inlet 401 of the air handling unit 400. First, large particulate impurities are removed by the first filter component 410. The air in the cleanroom 103 flows into the return air chambers 102 on both sides through the ventilation grille 104 at the bottom of the partition 101. After being collected by the return air duct 300, it is gathered through the return air duct 301 to the return air outlet 402 of the air handling unit 400. The fresh air and return air are mixed between the first filter component 410 and the second filter component 420, and both pass through the second filter component 420 to remove particulates. The mixed airflow continues to flow through the third filter component 430. The airflow is then delivered to the top of the cleanroom 103 through the air outlet 403, the air supply duct 201, and the air supply pipe 202, and finally into the cleanroom 103 through the louvered air outlet 202.

[0036] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0037] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cleanroom dynamic airflow purification system, characterized in that, The system includes a cleanroom (100) and an air handling unit (400). The cleanroom (100) is divided into a return air chamber (102) and a clean chamber (103) by a partition (101). The bottom of the partition (101) is provided with several sets of ventilation grilles (104) to connect the return air chamber (102) and the clean chamber (103) so that the airflow in the return air chamber (102) and the clean chamber (103) can circulate. The clean chamber (103) has several sets of air supply pipes (200) at the top, and the air supply pipes (200) are connected to air supply pipelines (201) for supplying purified air into the clean chamber (103). The return air chamber (102) has several sets of return air pipes (300) at the top, and the return air pipes (300) are connected to return air pipelines (301) for supplying return air from the return air chamber (102) to the air handling unit (400) for purification. The air handling unit (400) is provided with an air inlet (401), a return air inlet (402), and an air supply outlet (403). The air inlet (401) is located on the side of the air handling unit (400) and is used to introduce air into the air handling unit (400). The return air inlet (402) is connected to the end of the return air duct (301) and is used to transport the return air flow inside the return air chamber (102) to the air handling unit (400) for purification. The air supply outlet (403) is connected to the end of the air supply duct (201) and is used to supply purified air into the clean chamber (103) so that the airflow inside the return air chamber (102) and the clean chamber (103) circulates.

2. The cleanroom dynamic airflow purification system according to claim 1, characterized in that, There are two partitions (101), which are located on both sides inside the clean chamber (103) and divide the two sides of the clean chamber (103) into two return air chambers (102). The two return air chambers (102) are connected through return air ducts (301) and are connected to the return air inlets (402) on the air handling unit (400).

3. The cleanroom dynamic airflow purification system according to claim 1, characterized in that, The air supply duct (200) is provided with a louvered air outlet (202) at the end inside the clean chamber (103). The louvered air outlet (202) is used to adjust the angle of the airflow entering the clean chamber (103).

4. The cleanroom dynamic airflow purification system according to claim 1, characterized in that, The air handling unit (400) includes a first filter assembly (410), a second filter assembly (420), and a third filter assembly (430). The first filter assembly (410) is located behind the air inlet (401) and is used to perform preliminary filtration of the air entering the air handling unit (400). The second filter assembly (420) is located behind the first filter assembly (410). The return air inlet (402) is located between the first filter assembly (410) and the second filter assembly (420) and is used to perform secondary filtration of the return air and the incoming air. The third filter assembly (430) is located in front of the air outlet (403).

5. A cleanroom dynamic airflow purification system according to claim 1, characterized in that, The air handling unit (400) also includes a temperature and humidity unit (450), which includes a surface cooler (451), a heater (452), and a humidifier (453). The surface cooler (451) is used for cooling, the heater (452) is used for heating, and the humidifier (453) is used for humidifying. The surface cooler (451), heater (452), and humidifier (453) are controlled by a controller and used according to different scenarios.

6. A cleanroom dynamic airflow purification system according to claim 4, characterized in that, The air handling unit (400) also includes a fan assembly (440) to provide power for the air transport, so that the treated air is transported into the clean chamber (103).

7. A cleanroom dynamic airflow purification system according to claim 6, characterized in that, The fan assembly (440) includes a fan (441), the air outlet of the fan (441) is connected to a shroud (442), the air outlet of the shroud (442) is divided into several equal-division chambers (443), and each equal-division chamber (443) is provided with a conical block (444) for evenly distributing the airflow in the air handling assembly (400).

8. A cleanroom dynamic airflow purification system according to claim 6, characterized in that, The air handling unit (400) has an installation groove (404) on its side. The first filter assembly (410), the second filter assembly (420) and the third filter assembly (430) are all installed in the installation groove (404) for replacing the filter elements of the first filter assembly (410), the second filter assembly (420) and the third filter assembly (430).

9. A cleanroom dynamic airflow purification system according to claim 8, characterized in that, The first filter assembly (410), the second filter assembly (420), and the third filter assembly (430) all include a mounting frame (500). The mounting frame (500) is slidably installed in the mounting groove (404). The mounting frame (500) is arranged in a "door" shape. A filter screen mounting groove (502) is opened on the inner side of the mounting frame (500). A filter screen (600) is slidably installed in the filter screen mounting groove (502). A handle (501) is provided on the outer side of the mounting frame (500). A buckling mechanism is provided on both sides of the mounting frame (500) for engaging the mounting frame (500) inside the mounting groove (404).

10. A cleanroom dynamic airflow purification system according to claim 9, characterized in that, The buckling mechanism includes a buckle block (505), which is slidably connected in a slide groove (504) opened on the side of the mounting frame (500). A spring (503) is provided inside the slide groove (504). Buckle slots (405) are opened on the upper and lower sides of the mounting slide groove (404). The buckle slots (405) are adapted to the buckle block (505). The buckle block (505) is spherical and the buckle slots (405) are arc-shaped. During the installation of the mounting frame (500), the buckle block (505) is snapped into the buckle slots (405).

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