A piezoelectric sensor

Abstract

The embodiment of the present application provides a piezoelectric sensor, which comprises a first pressing plate, a second pressing plate, a fixing assembly and a plurality of piezoelectric components. The second pressing plate is located on one side of the first pressing plate along a first direction, the piezoelectric components are arranged between the first pressing plate and the second pressing plate, and at least two piezoelectric components are located in the same plane perpendicular to the first direction. The fixing assembly is connected with the first pressing plate, the piezoelectric components and the second pressing plate respectively. The piezoelectric sensor can greatly improve the range.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and in particular to a piezoelectric sensor. Background Technology

[0002] In fields such as industrial production, large-scale equipment monitoring, and building structural safety inspection, accurate measurement of pressure parameters is a core element in ensuring stable system operation and safe monitoring. With the trend towards heavier industrial loads and larger equipment, the demand for the measuring range of planar pressure sensors is constantly increasing, especially in high-tonnage pressure measurement scenarios, where sensor performance directly determines the reliability of monitoring data. At the same time, the complex measurement environment also places higher demands on the structural stability and signal output efficiency of the sensors.

[0003] In related technologies, piezoelectric sensors are single sensing units that use a large piece of quartz material for pressure measurement. However, due to limitations in the size and cost of quartz raw materials, the range of piezoelectric sensors in these technologies is relatively small, making it difficult to meet the needs of high-tonnage pressure measurement. Utility Model Content

[0004] In view of this, the main objective of the embodiments of this application is to provide a piezoelectric sensor that can greatly improve the measurement range.

[0005] To achieve the above objectives, the technical solution of this application embodiment is implemented as follows: This application provides a piezoelectric sensor, including: First pressure plate; The second pressure plate is located on one side of the first pressure plate along the first direction; Multiple piezoelectric components are disposed between the first pressure plate and the second pressure plate, and at least two of the piezoelectric components are located in the same plane perpendicular to the first direction; A fixing component is provided, which is connected to the first pressure plate, the piezoelectric component, and the second pressure plate, respectively.

[0006] In one embodiment, at least two of the piezoelectric components are arranged in an array in the same plane perpendicular to the first direction.

[0007] In one embodiment, the piezoelectric sensor includes a plurality of the fixing components, and the fixing components are connected to the piezoelectric components one by one.

[0008] In one embodiment, the fixing component includes a connecting ring and a fixing post. The piezoelectric component has a first through hole, the first pressure plate has multiple connecting holes, the second pressure plate has multiple second through holes, the second through holes, the first through holes and the connecting holes are connected in a one-to-one correspondence, the connecting rings are disposed in the first through holes, and the fixing posts are sequentially inserted into the second through holes, the connecting rings and the connecting holes.

[0009] In one embodiment, the connecting hole is closed on the side opposite to the second pressure plate.

[0010] In one embodiment, the end of the fixing post facing away from the first pressure plate is housed in the second through hole; and / or, The connecting ring is an insulating ring.

[0011] In one embodiment, the second through hole includes a first sub-hole and a second sub-hole. The first sub-hole is located between the connecting ring and the second sub-hole. The end of the second sub-hole facing away from the first sub-hole is open. The diameter of the second sub-hole is larger than the diameter of the first sub-hole to form a first limiting step. The end of the fixing post facing away from the first pressure plate has a second limiting step. The first limiting step and the second limiting step abut against each other.

[0012] In one embodiment, the fixing post is threadedly connected to the first pressure plate, and the connecting ring has a third through hole for the fixing post to pass through, the walls of the third through hole and the second through hole being smooth.

[0013] In one embodiment, the piezoelectric component includes an electrode sheet and at least two quartz plates, the electrode sheet being disposed between the two quartz plates.

[0014] In one embodiment, the piezoelectric sensor further includes a radio frequency head, and each of the piezoelectric components is connected in parallel and electrically connected to the radio frequency head.

[0015] This application provides a piezoelectric sensor comprising multiple piezoelectric components disposed between a first pressure plate and a second pressure plate, with at least two piezoelectric components located in the same plane perpendicular to a first direction. Therefore, by arranging multiple piezoelectric components, the measurement range of the piezoelectric sensor can be extended, significantly increasing its range and reducing its dependence on large-sized piezoelectric materials. Simultaneously, by arranging at least two piezoelectric components in the same plane perpendicular to the first direction, the components can be arranged along the extension direction of this plane, effectively reducing the size of the piezoelectric sensor along the first direction. Furthermore, by connecting fixing components to the first pressure plate, the piezoelectric components, and the second pressure plate respectively, the first pressure plate, the piezoelectric components, and the second pressure plate can be effectively fixed, improving the connection stability among the three components. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a piezoelectric sensor according to an embodiment of this application; Figure 2 for Figure 1 A schematic diagram of the structure of the medium-voltage electric sensor with the first pressure plate hidden; Figure 3 for Figure 1 Exploded view of a medium-voltage electrical sensor; Figure 4 for Figure 1 Cross-sectional view of the medium-voltage electric sensor AA; Figure 5 for Figure 4 A magnified view of a section at point B in the middle; Figure 6 for Figure 5 A schematic diagram of the structure of the medium-voltage electric sensor after the fixing column is hidden.

[0017] Explanation of reference numerals in the attached figures 10. First pressure plate; 10a. Connecting hole; 20. Second pressure plate; 21. First limiting step; 20a. Second through hole; 20aa. First sub-hole; 20ab. Second sub-hole; 30. Piezoelectric assembly; 31. Electrode plate; 32. Quartz plate; 40. Fixing assembly; 41. Connecting ring; 41a. Third through hole; 42. Fixing post; 50. RF head; 60. Adjusting screw; 70. Adjusting screw; 80. Grip part. Detailed Implementation

[0018] In this application, the "first direction" orientation or positional relationship is based on the appendix. Figure 3 The orientation or positional relationship shown is for illustrative purposes only and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application.

[0019] In the description of the embodiments of this application, technical terms such as "first," "second," and "third" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0020] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0021] A piezoelectric sensor is a sensor based on the piezoelectric effect, capable of converting mechanical energy (such as pressure, vibration, and impact) into an electrical signal and outputting it. When the piezoelectric layer inside the sensor is subjected to an external force, the internal crystal lattice structure deforms, causing an electric charge to be generated on the surface of the piezoelectric layer. Once the external force is removed, the charge disappears, thus enabling the conversion of mechanical energy into electrical energy.

[0022] The piezoelectric sensor in this embodiment extends the measurement range of the piezoelectric sensor by deploying multiple piezoelectric components 30, significantly increasing its range. Compared to piezoelectric sensors in related technologies, it reduces the dependence on large-size piezoelectric materials. This makes the piezoelectric sensor well-suited for high-tonnage pressure measurement scenarios, such as automobile assembly, press-fitting equipment, automated production lines, and welding force testing. It is also suitable for measurement environments under complex conditions. For example, in robotics, it can be used for joint torque feedback and precision clamping force monitoring of end effectors. In the biomedical field, it can be used for force feedback of minimally invasive surgical instruments, mechanical analysis of implantable devices, and force control of drug delivery systems. In precision manufacturing and testing, it can be used for force monitoring in semiconductor packaging processes, microelectromechanical systems (MEMS) testing, and force control in the assembly of micro-components. In the aerospace field, it can be used for health monitoring of lightweight structures and thrust measurement of micro-thrusters. For example, in the field of basic scientific research, this includes characterizing the micromechanical properties of materials and measuring surface / interfacial forces.

[0023] In related technologies, strain gauge sensors are also used to measure high-tonnage pressures. However, the core principle of strain gauge sensors is to sense pressure changes through the deformation of a metal strain gauge and convert mechanical signals into electrical signals. Their rated range is limited by the strain range of the metal material, making it difficult to withstand long-term exposure to large or even extremely large tonnage pressures. In heavy-duty scenarios, measurement accuracy can drop sharply or even the sensor can be damaged. Furthermore, the deformation sensitivity of strain gauges is greatly affected by environmental factors such as temperature and humidity, resulting in significant zero-point drift and poor stability after long-term use.

[0024] One embodiment of this application provides a piezoelectric sensor; please refer to [link / reference]. Figures 1 to 4The piezoelectric sensor includes a first pressure plate 10, a second pressure plate 20, a fixing component 40, and multiple piezoelectric components 30.

[0025] The second pressure plate 20 is located on one side of the first pressure plate 10 along the first direction.

[0026] The piezoelectric component 30 is disposed between the first pressure plate 10 and the second pressure plate 20, and at least two piezoelectric components 30 are located in the same plane perpendicular to the first direction.

[0027] The fixing component 40 is connected to the first pressure plate 10, the piezoelectric component 30, and the second pressure plate 20, respectively.

[0028] Specifically, the piezoelectric component 30 is capable of generating and transmitting electric charge after being subjected to an external force. In fact, the piezoelectric component 30 includes a piezoelectric layer and an electrode plate 31, wherein the piezoelectric layer is a piezoelectric material layer with a piezoelectric effect, and the electrode plate 31 is used to transmit the electric charge generated by the piezoelectric material layer.

[0029] For example, please refer to Figures 1 to 4 The piezoelectric component 30 includes an electrode plate 31 and at least two quartz plates 32, with the electrode plate 31 disposed between the two quartz plates 32. The quartz plates 32, as piezoelectric materials, generate a piezoelectric effect when compressed, while the electrode plate 31, located between the two quartz plates 32, collects and outputs the charge signal generated by the quartz plates 32. This results in better measurement performance.

[0030] The first pressure plate 10 and the second pressure plate 20 are located on opposite sides of the piezoelectric assembly 30 along the first direction. Thus, external force can be transmitted to the piezoelectric assembly 30 by acting on the first pressure plate 10 and the second pressure plate 20.

[0031] The first direction is the orientation in which the first pressure plate 10 and the second pressure plate 20 are set.

[0032] Each piezoelectric component 30 is located between the first pressure plate 10 and the second pressure plate 20. Furthermore, at least two piezoelectric components 30 are arranged along the surface direction of the first pressure plate 10 and the second pressure plate 20.

[0033] The arrangement of each piezoelectric component 30 between the first pressure plate 10 and the second pressure plate 20 can be set according to the actual situation.

[0034] For example, all the piezoelectric components 30 are arranged in the same plane perpendicular to the first direction. That is, only one layer of piezoelectric components 30 is arranged between the first pressure plate 10 and the second pressure plate 20.

[0035] Of course, it is also possible that only a portion of the piezoelectric components 30 are arranged in the same plane perpendicular to the first direction.

[0036] For example, between the first pressure plate 10 and the second pressure plate 20, multiple layers of piezoelectric components 30 are arranged along the first direction, and each layer of piezoelectric components 30 includes at least two piezoelectric components 30 arranged in a plane perpendicular to the first direction.

[0037] The fixing component 40 is a structure that can play a fixing role. It can fix the first pressure plate 10, the piezoelectric component 30 and the second pressure plate 20 well by connecting to the first pressure plate 10, the piezoelectric component 30 and the second pressure plate 20 respectively.

[0038] It should be noted that the specific type of the fixing component 40 is not limited. It can be a snap-fit, fastener, plug-in, or other structure that can achieve a fixed connection effect.

[0039] In the piezoelectric sensor of this embodiment, the piezoelectric sensor includes multiple piezoelectric components 30, which are disposed between the first pressure plate 10 and the second pressure plate 20. At least two piezoelectric components 30 are located in the same plane perpendicular to the first direction. Therefore, by arranging multiple piezoelectric components 30, the range of the piezoelectric sensor can be extended, greatly increasing the range of the piezoelectric sensor and reducing the dependence of the piezoelectric sensor on large-sized piezoelectric materials. Simultaneously, by arranging at least two piezoelectric components 30 in the same plane perpendicular to the first direction, the at least two piezoelectric components 30 can be arranged along the extension direction of this plane, which can effectively reduce the size of the piezoelectric sensor along the first direction. On the other hand, by connecting the fixing components 40 to the first pressure plate 10, the piezoelectric components 30, and the second pressure plate 20 respectively, the first pressure plate 10, the piezoelectric components 30, and the second pressure plate 20 can be better fixed, improving the connection stability of the three.

[0040] In one embodiment, please refer to Figures 2 to 4 At least two piezoelectric components 30 are arrayed in the same plane perpendicular to the first direction. This allows for better utilization of the space along the extending directions of the first pressure plate 10 and the second pressure plate 20, and effectively reduces the size of the piezoelectric sensor along the first direction.

[0041] It should be noted that the piezoelectric components 30 can be arrayed in a partial array or in a uniform array.

[0042] The specific form of the piezoelectric component array 30 is not limited, depending on the actual situation.

[0043] For example, each piezoelectric component 30 is arranged in a rectangular array.

[0044] For example, each piezoelectric component 30 is arranged in a ring array.

[0045] In one embodiment, please refer to Figure 3 and Figure 4The piezoelectric sensor includes multiple fixing components 40, each of which is connected to a piezoelectric component 30 in a one-to-one correspondence. That is, one fixing component 40 fixes one piezoelectric component 30 to the first pressure plate 10 and the second pressure plate 20. This improves the installation stability of the piezoelectric components 30. Simultaneously, the impact on other piezoelectric components 30 can be reduced when assembling or disassembling a single piezoelectric component 30.

[0046] It should be noted that, since multiple fixing components 40 are provided, the fixing effect of each fixing component 40 on each piezoelectric component 30 should be as similar as possible, so that the force on each piezoelectric component 30 is as consistent as possible.

[0047] The specific structural form of the fixed component 40 is not limited.

[0048] For example, please refer to Figure 5 and Figure 6 The fixing component 40 includes a connecting ring 41 and a fixing post 42. The piezoelectric component 30 has a first through hole. The first pressure plate 10 has multiple connecting holes 10a, and the second pressure plate 20 has multiple second through holes 20a. The second through holes 20a, the first through holes, and the connecting holes 10a are connected in a one-to-one correspondence. The connecting rings 41 are correspondingly disposed in the first through holes. The fixing posts 42 are sequentially inserted into the second through holes 20a, the connecting rings 41, and the connecting holes 10a. This improves the connection stability between the first pressure plate 10, the piezoelectric component 30, and the second pressure plate 20.

[0049] Specifically, the connecting ring 41 is an annular structure with a channel in the middle. The connecting ring 41 is engaged in the first through hole for corresponding connection with the fixing post 42. By setting the connecting ring 41, it is convenient to connect with the fixing post 42, and at the same time, it can reduce the wear of the fixing post 42 on the piezoelectric assembly 30.

[0050] It should be noted that both the first through hole and the second through hole 20a are through holes. The fixing post 42 can pass through the second through hole 20a and the connecting ring 41 sequentially from the side of the second pressure plate 20 away from the first pressure plate 10, and then extend into the connecting hole 10a. In this way, the second pressure plate 20, the piezoelectric assembly 30 and the first pressure plate 10 can be fixed.

[0051] It should be noted that the specific configuration of the connecting hole 10a is not limited. It can be a through hole or a non-through hole.

[0052] For example, please refer to Figure 5 and Figure 6The connecting hole 10a is closed on the side facing away from the second pressure plate 20. In other words, the connecting hole 10a is open on the side closest to the second pressure plate 20, while the side facing away from the second pressure plate 20 is closed. This provides a better positioning effect, allowing operators to know that the fixing post 42 is in place. At the same time, it prevents the fixing post 42 from extending beyond the side of the first pressure plate 10 facing away from the second pressure plate 20, thus improving safety.

[0053] In one embodiment, please refer to Figure 5 and Figure 6 The end of the fixing post 42 facing away from the first pressure plate 10 is housed in the second through hole 20a.

[0054] In other words, after the fixing post 42 is installed in the first pressure plate 10, the piezoelectric assembly 30, and the second pressure plate 20, the end of the fixing post 42 facing away from the first pressure plate 10 does not extend outside the second through hole 20a. This prevents the end of the fixing post 42 from extending into the side of the second pressure plate 20 facing away from the first pressure plate 10, thus improving safety. Simultaneously, it also reduces the impact of the fixing post 42 on the measurement performance of the piezoelectric sensor.

[0055] The specific material of the connecting ring 41 can be set according to the actual situation.

[0056] For example, the connecting ring 41 is an insulating ring, meaning that the connecting ring 41 is made of insulating material. This prevents the charge generated by the piezoelectric component 30 from being transmitted through the connecting ring 41 and the fixing post 42, thereby improving measurement accuracy.

[0057] It should be noted that the fitting method of the fixing post 42, the second through hole 20a, the connecting ring 41 and the connecting hole 10a is not limited.

[0058] In one embodiment, please refer to Figure 5 and Figure 6 The second through hole 20a includes a first sub-hole 20aa and a second sub-hole 20ab. The first sub-hole 20aa is located between the connecting ring 41 and the second sub-hole 20ab. The end of the second sub-hole 20ab facing away from the first sub-hole 20aa is open, and the diameter of the second sub-hole 20ab is larger than that of the first sub-hole 20aa, forming a first limiting step 21. The end of the fixing post 42 facing away from the first pressure plate 10 has a second limiting step, and the first limiting step 21 and the second limiting step abut against each other. Thus, through the abutment of the first limiting step 21 and the second limiting step, the end of the fixing post 42 facing away from the first pressure plate 10 can be fixedly connected to the second pressure plate 20, which can achieve better connection stability.

[0059] Specifically, the end of the second sub-hole 20ab that is away from the first pressure plate 10 is connected to the outside, while the other end is connected to the connecting hole 10a through the first sub-hole 20aa and the connecting ring 41.

[0060] The second sub-hole 20ab is located outside the first sub-hole 20aa. Due to the larger diameter of the second sub-hole 20ab, a stepped structure (i.e., the first limiting step 21) can be formed between the second sub-hole 20ab and the first sub-hole 20aa. At the same time, a second limiting step corresponding to the first limiting step 21 is formed on the fixing post 42. The first limiting step 21 and the second limiting step abut against each other, thereby enabling the fixing post 42 and the second pressure plate 20 to be fixed.

[0061] For example, the fixing post 42 is threadedly connected to the first pressure plate 10, and the connecting ring 41 has a third through hole 41a for the fixing post 42 to pass through. The walls of the third through hole 41a and the second through hole 20a are smooth.

[0062] In other words, the fixing post 42 is only threaded to the first pressure plate 10, and not threaded to the connecting ring 41 and the second pressure plate 20. Since the walls of the second through hole 20a and the third through hole 41a are smooth, when the piezoelectric sensor is subjected to external force, the limiting effect of the fixing post 42 on the first pressure plate 10 and the second pressure plate 20 can be reduced, thus reducing the influence of the fixing post 42 on the measurement results of the piezoelectric sensor.

[0063] It is understood that the fixing post 42 can restrict the first pressure plate 10 and the second pressure plate 20 from moving in a direction that separates them from each other in the first direction, but does not restrict the first pressure plate 10 and the second pressure plate 20 from moving in a direction that approaches each other in the first direction. Therefore, the effect of the fixing post 42 can be reduced when the piezoelectric sensor is under pressure.

[0064] Of course, in other embodiments, the fixing post 42, the second pressure plate 20 and the connecting ring 41 may also be threaded together.

[0065] In one embodiment, please refer to Figures 1 to 4 The piezoelectric sensor also includes an RF head 50, with each piezoelectric component 30 connected in parallel and electrically connected to the RF head 50. Therefore, the RF head 50 can effectively output the electrical signals generated and transmitted by each piezoelectric component 30, thereby improving measurement accuracy.

[0066] In one embodiment, please refer to Figures 1 to 4 The piezoelectric sensor also includes an adjusting screw disc 60 and an adjusting screw 70. The adjusting screw 70 is disposed on one of the first pressure plate 10 and the second pressure plate 20. The adjusting screw 60 is movably sleeved within the adjusting screw 70. The piezoelectric sensor also includes a gripping portion 80 disposed at the end of the adjusting screw 70 opposite to the first pressure plate 10. Thus, by providing the gripping portion 80, the piezoelectric sensor can be easily held by the user, thereby allowing adjustment of its position on other structural components.

[0067] In the description of this application, the references to terms such as "in one embodiment," "in some embodiments," "in a specific embodiment," or "exemplary," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the embodiments of this application. In this application, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine the different embodiments or examples described in this application, as well as the features of the different embodiments or examples.

[0068] The above are merely preferred embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application are included within the protection scope of this application.

Claims

1. A piezoelectric sensor, characterized in that, include: First pressure plate; The second pressure plate is located on one side of the first pressure plate along the first direction; Multiple piezoelectric components are disposed between the first pressure plate and the second pressure plate, and at least two of the piezoelectric components are located in the same plane perpendicular to the first direction; A fixing component is connected to the first pressure plate, the piezoelectric component, and the second pressure plate, respectively.

2. The piezoelectric sensor according to claim 1, characterized in that, At least two of the piezoelectric components are arranged in an array in the same plane perpendicular to the first direction.

3. The piezoelectric sensor according to claim 1 or 2, characterized in that, The piezoelectric sensor includes a plurality of the fixing components, and the fixing components are connected to the piezoelectric components one by one.

4. The piezoelectric sensor according to claim 1 or 2, characterized in that, The fixing component includes a connecting ring and a fixing post. The piezoelectric component has a first through hole. The first pressure plate has multiple connecting holes. The second pressure plate has multiple second through holes. The second through holes, the first through holes, and the connecting holes are connected in a one-to-one correspondence. The connecting rings are arranged in the first through holes in a one-to-one correspondence. The fixing posts are sequentially inserted into the second through holes, the connecting rings, and the connecting holes.

5. The piezoelectric sensor according to claim 4, characterized in that, The connecting hole is closed on the side opposite to the second pressure plate.

6. The piezoelectric sensor according to claim 4, characterized in that, The end of the fixing post facing away from the first pressure plate is housed in the second through hole; and / or The connecting ring is an insulating ring.

7. The piezoelectric sensor according to claim 4, characterized in that, The second through hole includes a first sub-hole and a second sub-hole. The first sub-hole is located between the connecting ring and the second sub-hole. The end of the second sub-hole facing away from the first sub-hole is open. The diameter of the second sub-hole is larger than the diameter of the first sub-hole to form a first limiting step. The end of the fixing post facing away from the first pressure plate has a second limiting step. The first limiting step and the second limiting step abut against each other.

8. The piezoelectric sensor according to claim 7, characterized in that, The fixing post is threadedly connected to the first pressure plate, and the connecting ring has a third through hole for the fixing post to pass through. The walls of the third through hole and the second through hole are smooth.

9. The piezoelectric sensor according to claim 1 or 2, characterized in that, The piezoelectric component includes an electrode sheet and at least two quartz plates, with the electrode sheet disposed between the two quartz plates.

10. The piezoelectric sensor according to claim 1 or 2, characterized in that, The piezoelectric sensor also includes a radio frequency head, and each of the piezoelectric components is connected in parallel and electrically connected to the radio frequency head.

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