Modular probe card

CN224695959UActive Publication Date: 2026-08-28SHANGHAI IND U TECH RES INST
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Patent Information

Application Number
CN202521894772.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-03
Publication Date
2026-08-28
Estimated Expiration
2035-09-03

AI Technical Summary

Technical Problem

通过外协定制探针卡,定制周期需要3~5工作日,准备周期长,费用高,灵活性差;使用普通探针卡加转接外延板卡手工制板,但外延板卡因测试距离偏长引起线容性干扰大,还会存在使用外延板卡错误的可能,导致样品测试损坏等质量问题,无法进行电容或小量程项目测试,也无法将调试用探针卡直接转量产

Benefits of technology

[0015]所述转接板设有飞线连接区与元件增补区,所述飞线连接区设有飞线焊盘,用于外接飞线;所述元件增补区设有元件焊盘,用于元件增补安装。飞线连接区和元件增补区能够实现快速外接线路或增补元件,适配不同测试需求;可通过飞线和元件扩展功能无需重新制作转接板,降低开发成本。与现有技术相比,本实用新型的有益效果是:基板设计为通用底板,配备可拆卸转接板适配不同样品测试,不需定制高精度探针卡;转接板采用防呆接口设计,防止误接导致电路异常;连续环形焊接区形成完整的接地回路,有效抑制信号串扰和电磁干扰;通过等长弯曲上下层布线降低线阻和感性容性干扰;转接板支持飞线和元件扩展,满足外围电路测试需求,显著降低测试成本与周期;同时缩小试验调试用的探针卡与量产探针卡的数据误差,使试验用探针卡趋向于量产探针卡结构,节约成本。

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Abstract

The utility model discloses a modularization probe card, including substrate and adapter plate, substrate one end is provided with test machine lead line row and inserts one end, and the other end is provided with detection window, and is equipped with the pad area around detection window for welding blade probe and probe lead-out wire, the adapter plate detachably installed between test machine lead line row and inserts one end and pad area, be equipped with wiring network on the substrate, and the input of wiring network is electrically connected with test machine lead line row and inserts one end, and the output is connected to pad area through adapter plate. The substrate is designed as general bottom plate, and is equipped with detachable adapter plate and is adapted to different sample test, and high-precision probe card need not to be customized, meanwhile, the adapter plate adopts foolproof interface design, prevents the circuit abnormality caused by mistake.
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