An ultrapure water nitrogen bubble separation sampling and detecting device

Abstract

An ultrapure water nitrogen bubble separation sampling detection device, including a separation tank, the separation tank is provided with annular cavity, the axial direction of annular cavity is parallel to the height direction of separation tank, annular cavity is provided with spiral pipe, the middle part of spiral pipe is communicated with water inlet pipe, the lower end of spiral pipe is communicated with the first end of a lower sampling pipe, the second end of lower sampling pipe is communicated with the first end of a first three-way diaphragm valve, the second end of first three-way diaphragm valve is communicated with a particle size analyzer, the first end of a second three-way diaphragm valve is communicated with the third end of first three-way diaphragm valve. The principle of nitrogen density is less than water, the water flow containing bubbles rises to the top, enters various bubble-insensitive instruments through the upper sampling pipe, the bubble-free water flow sinks to the bottom, passes through the lower sampling pipe, the first three-way diaphragm valve and leads to the particle size analyzer, so as to eliminate the bubble interference in the sampling of particle size analyzer.

Description

Technical Field

[0001] This utility model relates to the field of physics, and in particular to water quality monitoring technology, specifically a device for separating and sampling ultrapure water nitrogen bubbles. Background Technology

[0002] In semiconductor and photovoltaic manufacturing industries, the quality of ultrapure water directly affects product yield and performance. Therefore, online, real-time monitoring of ultrapure water quality is crucial, with particle size analysis being a key testing item. Current technology involves sampling through branch pipes leading from the main ultrapure water pipeline to various analytical instruments. However, this process presents a problem: ultrapure water contains saturated nitrogen dissolved in the high-pressure main pipeline (typically around 4 bar). When the water flows from the high-pressure sampling point to the atmospheric-pressure analytical instrument, the sudden pressure drop causes the dissolved nitrogen to rapidly supersaturate and precipitate, forming numerous bubbles. These bubbles, when flowing through the particle size analyzer, are misidentified as solid particles, leading to severe deviations in the test results. The actual false alarm rate exceeds 50%, seriously affecting the accuracy and reliability of the monitoring data and failing to accurately reflect the water quality status of the ultrapure water. Utility Model Content

[0003] The purpose of this invention is to provide an ultrapure water nitrogen bubble separation, sampling and detection device to solve the technical problem that nitrogen bubbles affect the monitoring accuracy of particle size analyzers in the prior art.

[0004] This utility model provides an ultrapure water nitrogen bubble separation, sampling, and detection device, including a separation tank. The separation tank has an annular cavity, the axis of which is parallel to the height direction of the separation tank. A spiral pipe is arranged within the annular cavity, with an inlet pipe connected to the middle of the spiral pipe. The lower end of the spiral pipe is connected to the first end of a lower sampling pipe, the second end of which is connected to the first end of a first three-way diaphragm valve. The second end of the first three-way diaphragm valve is connected to a particle size analyzer, and the third end of the first three-way diaphragm valve is connected to the first end of a second three-way diaphragm valve. The second end of the second three-way diaphragm valve is set as a spare point and is connected to an ultrapure water tank. The upper end of the spiral pipe is connected to the first end of an upper sampling pipe, the second end of which is connected to the first end of a diaphragm valve. The second end of the diaphragm valve is connected to the ultrapure water tank. The upper sampling pipe and the diaphragm valve are connected to the first end of at least one ball valve, and the second end of any ball valve is connected to a bubble-insensitive instrument.

[0005] Furthermore, the separation tank is made of a transparent material.

[0006] Furthermore, the separation tank is cylindrical, with a height-to-diameter ratio of 2.5:1, and the spiral pipe has fifteen layers.

[0007] Furthermore, the separation tank has a cylindrical cavity formed in the middle of the annular cavity, and the cylindrical cavity extends axially.

[0008] Furthermore, the separation tank is provided with a top cover.

[0009] Furthermore, a back pressure valve is provided between the third end of the second three-way diaphragm valve and the ultrapure water tank.

[0010] Furthermore, the bubble-insensitive instruments mentioned above are each a TOC analyzer, a silicon meter, a dissolved oxygen meter, or a resistivity meter.

[0011] Compared with existing technologies, this invention offers positive and significant advantages. Utilizing the principle that nitrogen is less dense than water, water containing air bubbles rises to the top, enters the bubble-insensitive instruments through the upper sampling tube, while water without air bubbles sinks to the bottom, passes through the lower sampling pipe and the first three-way diaphragm valve to the particle size analyzer, and finally returns to the ultrapure water tank. This eliminates air bubble interference in the particle size analyzer's sampling, improving the accuracy of particle size detection, with a measured false alarm rate of less than 2%. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of an ultrapure water nitrogen bubble separation, sampling and detection device according to the present invention.

[0013] Figure 2 This is another schematic diagram of an ultrapure water nitrogen bubble separation, sampling and detection device according to the present invention.

[0014] Figure 3 This is a schematic diagram of the separation tank in an ultrapure water nitrogen bubble separation and sampling detection device of this utility model. Detailed Implementation

[0015] The present invention will be further described below with reference to embodiments, but the present invention is not limited to these embodiments. Any similar variations using the present invention should be included in the protection scope of the present invention. The use of directional terms such as up, down, front, back, left, right, middle, inside, and outside in the present invention is only for the convenience of clear description and is not intended to limit the technical solution of the present invention.

[0016] like Figure 1 , Figure 3As shown, this utility model provides an ultrapure water nitrogen bubble separation, sampling, and detection device, including a separation tank 1. The separation tank 1 has an annular cavity 2, the axis of which is parallel to the height direction of the separation tank 1. A spiral pipe 3 is arranged within the annular cavity 2. A water inlet pipe 4 is connected to the middle of the spiral pipe 3. The lower end of the spiral pipe 3 is connected to the first end of a lower sampling pipe 5. The second end of the lower sampling pipe 5 is connected to the first end of a first three-way diaphragm valve 6. The second end of the first three-way diaphragm valve 6 is connected to a particle size analyzer 7. The third end of the first three-way diaphragm valve 6 is connected to a second... The first end of the three-way diaphragm valve 8 is connected, the second end of the second three-way diaphragm valve 8 is set as a spare point, the third end of the second three-way diaphragm valve 8 is connected to an ultrapure water tank 9, the upper end of the spiral pipe 3 is connected to the first end of an upper sampling tube 10, the second end of the upper sampling tube 10 is connected to the first end of a diaphragm valve 11, the second end of the diaphragm valve 11 is connected to the ultrapure water tank 9, the upper sampling tube 10 and the diaphragm valve 11 are connected to the first end of a ball valve 12, and the second end of the ball valve 12 is connected to a bubble-insensitive instrument 13, which is a TOC analyzer.

[0017] like Figure 2 As shown, in a preferred embodiment of this utility model, the upper sampling tube 10 and the diaphragm valve 11 are respectively connected to the first ends of two ball valves 12, and the second ends of the two ball valves 12 are each connected to a bubble-insensitive instrument 13, namely a TOC analyzer and a silicon meter.

[0018] In another preferred embodiment of this utility model, the upper sampling tube 10 and the diaphragm valve 11 are respectively connected to the first end of four ball valves 12, and the second end of each of the four ball valves 12 is connected to a bubble-insensitive instrument 13, namely a TOC analyzer, a silicon meter, a dissolved oxygen meter, and a resistivity meter.

[0019] Specifically, the TOC analyzer is used for total organic carbon detection, the silicon meter is used for silica concentration detection, the dissolved oxygen analyzer is used for dissolved oxygen concentration detection, and the resistivity analyzer is used for dissolved ion concentration detection.

[0020] Working principle: Ultrapure water (4 bar pressure, saturated with dissolved nitrogen) is drawn from the ultrapure water sampling point and enters the spiral pipe 3 through the inlet pipe 4. The pressure decreases, and nitrogen is released, forming bubbles in the water flow. Utilizing the principle that nitrogen is less dense than water, and the relatively long spiral pipe 3, the water flow has a longer residence time, allowing sufficient time for the bubbles to rise. The water containing bubbles rises to the top and enters the bubble-insensitive instruments 13 through the upper sampling pipe 10. The bubble-free water flows down to the bottom and passes through the lower sampling pipe 5 and the first three-way diaphragm valve 6 to the particle size analyzer 7. Finally, the water flows back to the ultrapure water tank 9, thereby eliminating bubble interference in the sampling of the particle size analyzer 7, improving the accuracy of particle size detection, and achieving a measured bubble false alarm rate of <2%.

[0021] Diaphragm valve 11 can regulate flow. The first three-way diaphragm valve 6 and the second three-way diaphragm valve 8 have minimal impact on pipeline pressure, reducing pressure drop and avoiding secondary pressure drops. The backup point of the second three-way diaphragm valve 8 can be used to expand backup instruments.

[0022] Furthermore, the separation tank 1 is made of transparent material to facilitate observation of the exhaust process.

[0023] Furthermore, the separator 1 is cylindrical, with a height-to-diameter ratio of 2.5:1, and the spiral pipe 3 has fifteen layers, allowing water to remain in the spiral pipe 3 for more than 45 seconds.

[0024] Furthermore, the separation tank 1 has a cylindrical cavity 14 formed in the middle of the annular cavity 2. The cylindrical cavity 14 extends axially, which facilitates the observation of the exhaust situation using auxiliary tools such as flashlights.

[0025] Furthermore, the upper end of the separation tank 1 is provided with a top cover 16.

[0026] Furthermore, a back pressure valve 15 is provided between the third end of the second three-way diaphragm valve 8 and the ultrapure water tank 9. The back pressure valve 15 can maintain the system pressure >3.5 bar, keeping the ambient pressure of the water above the critical point of nitrogen saturation precipitation. As the subsequent water flow passes through the entire device, no new bubbles can be generated, thus inhibiting the regeneration of new bubbles and further ensuring that the water sample delivered to the particle size analyzer 7 is stable.

[0027] Specifically, the specific structure and principle of the three-way diaphragm valve, diaphragm valve, particle size analyzer 7, back pressure valve 15 in this utility model, as well as other aspects not described in detail, all adopt well-known solutions in the prior art, which are already understood by those skilled in the art and will not be elaborated here.

Claims

1. An ultrapure water nitrogen gas bubble separation sampling and detecting device, characterized in that, The system includes a separation tank containing an annular cavity. The axis of the annular cavity is parallel to the height direction of the separation tank. A spiral pipe is installed within the annular cavity. A water inlet pipe is connected to the middle of the spiral pipe. The lower end of the spiral pipe is connected to the first end of a lower sampling pipe. The second end of the lower sampling pipe is connected to the first end of a first three-way diaphragm valve. The second end of the first three-way diaphragm valve is connected to a particle size analyzer. The third end of the first three-way diaphragm valve is connected to the first end of a second three-way diaphragm valve. The second end of the second three-way diaphragm valve is set as a spare point and is connected to an ultrapure water tank. The upper end of the spiral pipe is connected to the first end of an upper sampling pipe. The second end of the upper sampling pipe is connected to the first end of a diaphragm valve. The second end of the diaphragm valve is connected to the ultrapure water tank. The upper sampling pipe and the diaphragm valve are connected to the first end of at least one ball valve. The second end of any ball valve is connected to a bubble-insensitive instrument.

2. The apparatus according to claim 1, wherein The separation tank is made of transparent material.

3. The apparatus according to claim 1, wherein, The separation tank is cylindrical, with a height-to-diameter ratio of 2.5:1, and the spiral pipe has fifteen layers.

4. The ultrapure water nitrogen bubble separation, sampling, and detection device according to claim 1, characterized in that, The separation tank has a cylindrical cavity formed in the middle of the annular cavity, which extends axially.

5. The apparatus according to claim 1, wherein The separation tank is equipped with a top cover.

6. The apparatus according to claim 1, wherein, A back pressure valve is installed between the third end of the second three-way diaphragm valve and the ultrapure water tank.

7. The apparatus according to claim 1, wherein, The bubble-insensitive instruments mentioned above are each a TOC analyzer, a silicon meter, a dissolved oxygen meter, or a resistivity meter.

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