A reaction chamber for a photovoltaic tubular high temperature apparatus

Abstract

The utility model discloses a kind of reaction chambers of photovoltaic tubular high-temperature equipment, belong to photovoltaic cell piece manufacturing equipment technical field, the reaction chamber includes carrier boat unit, inner cavity unit, heater unit, heat insulation unit and outer cavity unit, the inner cavity unit, heater unit, heat insulation unit and outer cavity unit are all cavity structure, the carrier boat unit, inner cavity unit, heater unit, heat insulation unit, outer cavity unit are sequentially distributed from inside to outside, the inner cavity unit is surrounded by the heater unit, the cross section of the heater unit and inner cavity unit is rectangle, oval or approximate oval, the inner cavity unit is non-enclosed structure, the outer cavity unit is sealing structure, the utility model is set through inner cavity, reduce process gas to flow to inner cavity outside, promote temperature and airflow uniformity, can effectively improve process quality.

Description

Technical Field

[0001] This utility model belongs to the technical field of photovoltaic cell manufacturing equipment, and in particular relates to a reaction chamber of a photovoltaic tube-type high-temperature equipment. Background Technology

[0002] Solar energy is the cleanest, safest, and most reliable energy source for the future, and it has the advantage of being inexhaustible, thus receiving widespread attention.

[0003] In terms of solar cell manufacturing equipment, tubular and plate-type equipment are currently the main types. Plate-type equipment features silicon wafers placed horizontally on a tray, resulting in a smaller wafer capacity. Tubular equipment, on the other hand, inserts many silicon wafers into a wafer carrier boat and stacks them, allowing for a much larger wafer capacity. However, tubular equipment also suffers from low space utilization around the tube walls. Currently, tubular high-temperature equipment mainly includes: tubular diffusion, tubular oxidation, tubular annealing, and tubular LPCVD.

[0004] Furthermore, current tubular high-temperature equipment uses a cylindrical quartz tube inside, surrounded by a cylindrical furnace body. After the quartz tube is sealed at one end, it forms an independent vacuum-sealed space. The furnace body uses electrically heated metal heating wires and is wrapped with insulation material. As the demand for wafers increases, the diameter and length of the quartz tubes also increase, leading to insufficient strength and easy breakage. Traditional tubular high-temperature equipment can only disassemble and install the quartz tubes on the loading platform side. Because the quartz tubes are large and heavy, and easily broken during disassembly and installation, coupled with the numerous loading mechanisms on the loading platform side resulting in limited space, the disassembly and replacement of quartz tubes is difficult, impacting production efficiency and becoming one of the problems with tubular high-temperature equipment.

[0005] In traditional tubular high-temperature equipment, once the quartz tube is damaged, it often results in large-scale damage to the furnace tube during production, which is difficult to predict and avoid. This can lead to the scrapping of the entire furnace product, resulting in significant economic losses, and there is also a safety hazard of toxic gas leakage.

[0006] The above analysis clearly shows that the current tubular high-temperature equipment reaction chamber structure suffers from low space utilization, low production capacity, and gas waste. In addition, when the quartz tube is damaged, there are problems such as difficulty in replacement and leakage of toxic gas. To address these issues, developing a new reaction chamber for photovoltaic tubular high-temperature equipment has significant practical implications. Utility Model Content

[0007] In view of the above-mentioned problems, this utility model discloses a reaction chamber for a photovoltaic tube-type high-temperature device.

[0008] The present invention adopts the following technical solution:

[0009] A reaction chamber for a photovoltaic tube-type high-temperature device includes a wafer carrier boat unit, an inner cavity unit, a heater unit, a heat insulation unit, and an outer cavity unit. All of these units are cavity structures. The wafer carrier boat unit, inner cavity unit, heater unit, heat insulation unit, and outer cavity unit are distributed sequentially from the inside out. The wafer carrier boat unit is located inside the inner cavity unit, which is surrounded by the heater unit. The heat insulation unit is located around the heater unit, and the outer cavity unit is located outside the heat insulation unit. The heater unit and the inner cavity unit have rectangular, elliptical, or approximately elliptical cross-sections. The inner cavity unit is a non-enclosed structure, while the outer cavity unit is a sealed structure.

[0010] Furthermore, the inner cavity unit is composed of four square side plates, including an upper side plate, a lower side plate, a left side plate, and a right side plate. The upper and lower side plates form the top and bottom of the inner cavity, and the left and right side plates form the left and right side walls of the inner cavity. The upper, lower, left, and right side plates form the cavity structure, and the side plates are either arc-shaped plates or flat plates.

[0011] Furthermore, the upper side plate, lower side plate, left side plate, and right side plate are provided with bosses and grooves on their sides, and the upper side plate, lower side plate, left side plate, and right side plate are connected by the bosses and grooves, and the connection is a detachable connection.

[0012] Furthermore, the heater in the heater unit is a graphite heater, an infrared heater, a silicon carbide heater, or a ceramic heater, and the components of the heater are coated. The coating material includes silicon carbide, ceramic, pyrolytic carbon, and tantalum carbide.

[0013] Furthermore, the graphite heater includes a graphite heating element, a connector, and an electrode. The connector connects one or more of the graphite heating elements or electrodes. The graphite heating element is graphite or a carbon-carbon composite material, and the graphite heating element is block-shaped, plate-shaped, or rod-shaped.

[0014] Furthermore, the heater unit is composed of three or more temperature zones, and the temperature of each temperature zone is independently controlled; each temperature zone is composed of an upper heating surface, a lower heating surface, a left heating surface, and a right heating surface, and the temperatures of the upper heating surface, the lower heating surface, the left heating surface, and the right heating surface are independently controlled.

[0015] Furthermore, the slide carrier unit includes multiple small boats and two parallel paddles. Two boss support rods are provided on the outer sides of the two sides of each small boat. The multiple small boats are placed sequentially on the two parallel paddles via the boss support rods.

[0016] Furthermore, two or more of the aforementioned slide carrier units are simultaneously arranged within the inner cavity, and the multiple slide carrier units are arranged side by side inside the inner cavity, including either vertical arrangement or horizontal arrangement.

[0017] Furthermore, alternatives to the inner cavity unit include: without changing the original positions of the four side plates, the inner cavity unit is composed of any one, any two, or any three of the four side plates.

[0018] Furthermore, the outer cavity unit includes an outer cavity, a furnace tail cover plate, and a furnace door. One end of the outer cavity is sealed by the furnace tail cover plate, and the other end of the outer cavity is provided with the furnace door. An air inlet pipe is provided at the furnace door position, and a gas supply port is provided at the middle position of the outer cavity. The air inlet pipe is a straight pipe or a spray pipe.

[0019] Beneficial effects:

[0020] The present invention discloses a reaction chamber for a photovoltaic tube-type high-temperature device. It eliminates the use of a sealed quartz tube and changes the previous circular reaction chamber cross-section to a non-circular cross-section, which is more conducive to the rational use of the reaction chamber space, facilitates the placement of the carrier boat, reduces space waste, and helps to reduce gas consumption and energy consumption.

[0021] The inner cavity unit features a detachable side panel design, facilitating easy assembly and disassembly and making it easier to replace the inner cavity. The inner cavity is assembled using a splicing method, and an outer cavity is added to ensure a vacuum-sealed space within the reaction chamber. Disassembly and assembly of the inner cavity can be performed on the opposite side of the loading platform, ensuring that maintenance of one tube's reaction chamber does not affect the normal production of other tubes.

[0022] The design of both the outer and inner cavities is more conducive to improving process quality. The functions of the non-sealed inner cavity include: reducing the flow of process gas to the outside of the inner cavity, which helps to reduce gas loss; improving temperature and airflow uniformity by adjusting the number of side plates and setting the wall thickness, thereby improving process quality; and the sealed outer cavity forms a sealed environment required for process preparation, avoiding the leakage of toxic gases and ensuring product quality.

[0023] This invention places the small boat for holding silicon wafers directly on the paddle, eliminating the boat support. During the manufacturing process, the part of the paddle that carries the small boat is placed in the reaction chamber and does not leave the reaction chamber. This structural design greatly simplifies the reaction chamber structure and is beneficial to the uniformity of reaction gases and temperature in the reaction chamber, thereby reducing costs and improving quality.

[0024] Inside the reaction chamber, due to factors such as the structure of the slide boat unit and airflow, the actual temperature and gas concentration will vary at different positions on the top, bottom, left, and right sides. Therefore, by adjusting the presence and thickness of the side plates on the four sides of the inner cavity unit, the temperature uniformity and gas uniformity can be improved, which is more conducive to improving product quality. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the cross-sectional structure of the reaction chamber of a photovoltaic tube-type high-temperature device according to this utility model;

[0027] Figure 2 This is a schematic diagram of the internal cavity unit structure of this utility model;

[0028] Figure 3 This is a schematic diagram of the subdivided temperature zone structure of the heater unit of this utility model;

[0029] Figure 4 This is a schematic diagram of the structure of some components of the heater unit of this utility model;

[0030] Figure 5 This is a schematic diagram of the arrangement of the carrier boat units in the inner cavity unit of this utility model. Figure 1 ;

[0031] Figure 6 This is a schematic diagram of the arrangement of the carrier boat units in the inner cavity unit of this utility model. Figure 2 ;

[0032] Figure 7 This is a schematic diagram of the structure of the slide carrier unit of this utility model;

[0033] Figure 8 This is a schematic diagram of the external cavity unit structure of this utility model.

[0034] Illustration: Carrier boat unit-1, inner cavity unit-2, heater unit-3, insulation unit-4, outer cavity unit-5, paddle-11, small boat-12, upper side plate-21, lower side plate-22, left side plate-23, right side plate-24, groove and boss position-25, first temperature zone section-311, second temperature zone section-312, third temperature zone section-313, fourth temperature zone section-314, upper heating surface-321, lower heating surface-322, left heating surface-323, right heating surface-324, graphite heating element-33, connector-34, electrode-35, furnace door-51, furnace tail cover plate-52. Detailed Implementation

[0035] To better understand the technical solution of this utility model, the embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0036] It should be understood that the described embodiments are merely some embodiments of this utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0037] Example 1

[0038] like Figure 1 As shown, a reaction chamber for a photovoltaic tube-type high-temperature device includes a wafer carrier boat unit 1, an inner cavity unit 2, a heater unit 3, a heat insulation unit 4, and an outer cavity unit 5. All of these components are cavity structures. The wafer carrier boat unit 1, inner cavity unit 2, heater unit 3, heat insulation unit 4, and outer cavity unit 5 are distributed sequentially from the inside out. The wafer carrier boat unit 1 is located inside the inner cavity unit 2, which is surrounded by the heater unit 3. The heat insulation unit 4 is located around the heater unit 3, and the outer cavity unit 5 is located outside the heat insulation unit 4. The heater unit 3 and the inner cavity unit 2 have rectangular, elliptical, or approximately elliptical cross-sections. The inner cavity unit 2 is a non-enclosed structure, while the outer cavity unit 5 is a sealed structure. The wafer carrier boat unit 1 includes a small boat and a paddle. (See also...) Figure 7 The design of the inner cavity unit with a rectangular, elliptical, or approximately elliptical cross-section solves the problem of low space utilization in the reaction chamber, is more conducive to the placement of the slide boat, and also reduces the amount of reaction gas required, thus reducing gas waste.

[0039] Furthermore, such as Figure 2As shown, the inner cavity unit 2 is composed of four square side plates, including an upper side plate 21, a lower side plate 22, a left side plate 23, and a right side plate 24. The upper side plate 21 and the lower side plate 22 form the top and bottom of the inner cavity, and the left side plate 23 and the right side plate 24 form the left and right side walls of the inner cavity. The upper side plate 21, the lower side plate 22, the left side plate 23, and the right side plate 24 form the cavity structure. The side plates are either arc-shaped plates or flat plates.

[0040] Furthermore, the upper side plate 21, lower side plate 22, left side plate 23, and right side plate 24 are provided with bosses and grooves on their sides. The locations of the bosses and grooves are shown in [reference needed]. Figure 2 At position 25, the upper side plate 21, lower side plate 22, left side plate 23, and right side plate 24 are connected by the boss and groove, and the connection is detachable. These side plates are assembled into an inner cavity, which has open ends and is a non-sealed structure. This detachable structure of the inner cavity unit solves the problem of difficulty in replacing a broken quartz tube.

[0041] Furthermore, the heater in the heater unit 3 is a graphite heater, an infrared heater, a silicon carbide heater, or a ceramic heater, and the components of the heater are coated. The coating material includes silicon carbide, ceramic, pyrolytic carbon, and tantalum carbide.

[0042] Furthermore, the graphite heater includes a graphite heating element, a connector, and an electrode. The connector connects one or more graphite heating elements or electrodes. The graphite heating element is made of graphite or a carbon-carbon composite material, and its shape is block-shaped, plate-shaped, or rod-shaped. See also Figure 4 , Figure 4 A schematic diagram of some components of a graphite heater, namely graphite heating element 33, connector 34 and electrode 35, is shown.

[0043] Furthermore, the heater unit 3 is composed of three or more temperature zones, each with independently controlled temperature. Each temperature zone consists of an upper heating surface, a lower heating surface, a left heating surface, and a right heating surface, with the temperatures of these surfaces also independently controlled. This heating chamber structure design is more conducive to temperature control in the reaction chamber, ensuring temperature uniformity and stability during production and improving product quality.

[0044] Furthermore, the wafer carrier boat unit includes multiple small boats and two parallel propellers. Two protruding support rods are provided on the outer sides of each small boat. The multiple small boats are sequentially placed on the two parallel propellers via these support rods. The lateral width of each small boat matches the distance between the two parallel propellers. The small boats holding the silicon wafers are placed directly on the propellers. During the manufacturing process, the portion of the propeller carrying the small boats remains within the reaction chamber and does not exit the chamber. This structural design significantly simplifies the reaction chamber structure, improves the uniformity of the reaction gases and temperature within the chamber, and increases gas utilization, thereby reducing costs and improving quality.

[0045] Furthermore, two or more of the aforementioned slide carrier units are simultaneously arranged within the inner cavity, and the multiple slide carrier units are arranged side by side inside the inner cavity, including either vertical arrangement or horizontal arrangement.

[0046] Furthermore, alternatives to the inner cavity unit include: without changing the original positions of the four side plates, the inner cavity unit can be composed of any one, any two, or any three of the four side plates. Due to factors such as the structure of the carrier boat unit and airflow, the actual temperature and gas concentration at different positions (top, bottom, left, and right) will vary. Therefore, by adjusting the presence and thickness of the side plates on the four sides, the inner cavity unit can improve temperature uniformity and gas uniformity, which is more conducive to improving product quality.

[0047] Furthermore, the outer cavity unit includes an outer cavity, a furnace tail cover, and a furnace door. One end of the outer cavity is sealed by the furnace tail cover, and the other end of the outer cavity is provided with the furnace door. An air inlet pipe is located at the furnace door, and a gas supply port is located in the middle of the outer cavity. The air inlet pipe is a straight pipe or a spray pipe. The sealing structure design of the outer cavity not only creates the vacuum sealing environment required by the process but also solves the problem of toxic gas leakage when the quartz tube is damaged in traditional devices.

[0048] Example 2

[0049] The purpose of this invention is to provide a reaction chamber for a photovoltaic tube-type high-temperature equipment. Structurally, it eliminates the use of a sealed quartz tube and replaces the traditional circular reaction chamber cross-section with a non-circular one, facilitating modular design and improving ease of assembly and disassembly, while also increasing production capacity. Simultaneously, an interlocking method is used to form the inner cavity, and an outer cavity is added to ensure vacuum formation within the reaction chamber. Furthermore, the inner cavity can be disassembled and assembled from the opposite side of the loading platform, ensuring that maintenance of one tube reaction chamber does not affect the normal production of other tubes.

[0050] like Figure 1As shown, a reaction chamber of a photovoltaic tube-type high-temperature device includes a wafer carrier unit 1, an inner cavity unit 2, a heater unit 3, a heat insulation unit 4, and an outer cavity unit 5, arranged sequentially from the inside to the outside as follows: wafer carrier unit 1, inner cavity unit 2, heater unit 3, heat insulation unit 4, and outer cavity unit 5. The heater unit 3 and the heat insulation unit 4 have rectangular, elliptical, or approximately elliptical cross sections. The inner cavity unit 2 is a non-enclosed structure, and the outer cavity unit 5 is a vacuum-sealed structure. The wafer carrier unit 1 includes a wafer carrier 12 and a paddle 11.

[0051] The heater unit 3 includes a graphite heater, an infrared heater, a silicon carbide heater, or a ceramic heater. The components of the heater unit are coated with materials including silicon carbide, ceramic, pyrolytic carbon, and tantalum carbide. The components refer to the various parts constituting the heater unit, such as the heating element 33, the electrode 35, and the connector 34. The heater unit 3 is divided into three or more temperature zones along its length, i.e., the cavity axial direction. Each temperature zone can be controlled independently. Each temperature zone is further subdivided into 1 to 4 sub-temperature zones on its four sides in the upper, lower, left, and right directions. See [reference needed]. Figure 3 , 4 The first temperature zone 311, the second temperature zone 312, the third temperature zone 313, and the fourth temperature zone 314 correspond to the four temperature zones respectively. Figure 3 The upper heating surface 321, lower heating surface 322, left heating surface 323, and right heating surface 324 correspond to the four subdivided temperature zones within each temperature segment. Their temperatures can be controlled individually or through parallel or series connection. The graphite heater includes graphite heating elements, electrodes, and connectors. The connectors connect one or more graphite heating elements or electrodes. See [reference needed]. Figure 4 , Figure 4 A schematic diagram of some components of the graphite heater, namely the graphite heating element 33, the connector 34, and the electrode 35, is shown. The graphite heating element is made of graphite or carbon-carbon composite material, and its shape is block-shaped, plate-shaped, or rod-shaped. The slide carrier units are arranged inside the inner cavity. Two or more slide carrier units 1 are arranged in an array on the cross-section of the reaction chamber, i.e., arranged side-by-side horizontally or vertically, such as... Figure 5 , 6 As shown; the wafer carrier boat unit is equipped with two propellers, one on each side of the wafer carrier boat; the small boats containing the silicon wafers in the wafer carrier boat unit are placed directly on the propellers, as shown. Figure 7As shown, the boat support is eliminated. During the process preparation, the part of the paddle that carries the small boat is placed in the reaction chamber and does not leave the reaction chamber. In the inner cavity unit 2, the four surfaces (upper, lower, left, and right) that make up the inner cavity are not limited to being completely enclosed by plates; the selection of the four surfaces can be arbitrary, including one, two, three, or all four surfaces. Grooves, bosses, and other guiding sliding structures are provided on the plates forming the four surfaces. The locations of the grooves and bosses are described in [reference needed]. Figure 2 The central groove and boss position 25 are used for splicing and assembly of the four sides.

[0052] A reaction chamber for a photovoltaic tubular high-temperature device, see [link / reference] Figure 8 The air intake is located at furnace opening 51, supplemented by either filling the middle of the furnace or spraying air. There are two methods for installing the air intake pipe: inserting it from the outer wall of the outer cavity or from the tail end face of the reaction chamber. The reaction chamber is a sealed cavity formed by the outer cavity, the tail cover plate 52, and the furnace door 51. During normal production, the tail cover plate 52 is fixed to the outer cavity and does not need to be moved, while the furnace door 51 needs to be moved to open and close. Material can be loaded and unloaded, and the furnace door can also be used for sealing. The side of the furnace door is generally referred to as the furnace opening side.

[0053] A reaction chamber for a photovoltaic tubular high-temperature device, see [link / reference] Figure 8 The reaction chamber is formed by the outer cavity 5, the furnace tail cover 52, and the furnace door 51, creating a sealed cavity. During normal production, the furnace tail cover 52 is fixed to the outer cavity 5 and does not need to be moved. The furnace door 51, however, needs to be moved to open and close. When the furnace door 51 is open, material can be loaded and unloaded; when the furnace door 51 is closed, the reaction chamber is sealed. The air inlet is located on the furnace opening side, which refers to the side of the furnace door. Air can be supplied through the middle of the furnace or by spray pipes. There are two ways to install the air inlet pipe: inserting it from the outer wall of the outer cavity or from the furnace tail end face of the reaction chamber.

[0054] Example 3

[0055] A reaction chamber for a photovoltaic tubular high-temperature device, such as Figure 1 As shown, the device includes a slide carrier unit 1, an inner cavity unit 2, a heater unit 3, a heat insulation unit 4, and an outer cavity unit 5, arranged sequentially from the inside to the outside as follows: slide carrier unit 1, inner cavity unit 2, heater unit 3, heat insulation unit 4, and outer cavity unit 5. The heater unit 3 and the heat insulation unit 4 have rectangular, elliptical, or approximately elliptical cross-sections. The inner cavity unit 2 is a non-enclosed structure, and the outer cavity unit 5 is a vacuum-sealed structure. The slide carrier unit 1 includes a slide carrier 12 and a paddle 11.

[0056] Currently used slide carriers have rectangular or similar rectangular cross-sections. Therefore, the commonly used circular cavities result in wasted space on the outer side of the slide carrier, leading to wasted reaction gas and energy. Changing the cross-sections of both the inner and outer cavities to rectangular allows for more efficient use of space, and this optimized space management helps save on gas and energy consumption.

[0057] Heater unit: Includes graphite heater, infrared heater, silicon carbide heater, or ceramic heater. In practical applications, graphite heaters or silicon carbide heaters are preferred. Graphite has good thermal conductivity, electrical resistance, and corrosion resistance, and graphite heaters also have advantages such as fast heating speed, uniform heating, and good corrosion resistance. Silicon carbide heaters have high operating temperatures and advantages such as high temperature resistance, oxidation resistance, corrosion resistance, rapid heating, long service life, small high-temperature deformation, and convenient installation and maintenance.

[0058] Furthermore, carbon materials will oxidize at temperatures above 350°C if oxygen is present, resulting in pores and powder shedding on the surface of the graphite heater. Therefore, the heater components are coated, with coating materials including silicon carbide, ceramics, pyrolytic carbon, and tantalum carbide.

[0059] Along the length of the reaction chamber, i.e. the axial direction, the actual temperature will vary at different locations due to factors such as the low temperature on both sides of the furnace body and the structure of the carrier boat unit. For example, the temperature is often lowest near the furnace door. Therefore, the heater unit is divided into three or more temperature zones along its length, and each temperature zone can be controlled independently.

[0060] Meanwhile, within each temperature zone, the actual temperature varies at different locations (up, down, left, and right) due to factors such as the structure of the carrier boat unit and airflow. Therefore, each temperature zone is further subdivided into 1 to 4 sub-temperature zones in the up, down, left, and right directions. Each sub-temperature zone can be controlled independently or through parallel or series connection. This design allows for more flexible temperature control and achieves higher quality.

[0061] Each temperature zone is equipped with a temperature sensor to detect the temperature of the reaction chamber, thereby achieving precise temperature control. There are usually two types of sensor structures: one is to insert the temperature sensor into the flange on the outer wall of the outer cavity, and the other is to insert a long tube with the temperature sensor inside the tube from the tail end face or the mouth end face of the reaction chamber.

[0062] like Figure 4As shown, surrounding the inner cavity unit 2 is the heater unit, which is a graphite heater. It includes a graphite heating element, electrodes, and connectors. The connectors connect one or more graphite heating elements or electrodes. The graphite heating element is made of graphite or a carbon-carbon composite material. The connectors include insulating materials and graphite, etc. During operation, energizing the system allows current to flow through the graphite electrodes to the heating element. The graphite itself also heats up, thus converting electrical energy into heat energy, achieving the heating purpose. (See also...) Figure 4 , Figure 4 A schematic diagram of some components of a graphite heater, namely graphite heating element 33, connector 34 and electrode 35, is shown.

[0063] Tablet carrier unit 1: Two or more tablet carrier units 1 are arranged on the cross section of the reaction chamber; the arrangement of two or more tablet carrier units can increase the equipment capacity many times over, bringing greater economic value to customers.

[0064] The small boat 12 for placing silicon wafers is placed directly on the paddle 11, eliminating the need for a boat support. During the fabrication process, the portion of the paddle 11 that carries the small boat 12 remains within the reaction chamber and does not exit the chamber. Currently, most high-temperature tubular equipment in the industry adopts a soft-landing approach, meaning the paddle is outside the reaction chamber during fabrication. Structurally, silicon wafers are typically arranged and placed in small boats, which are then arranged on boat supports, and finally one or two boat supports are placed on the paddle. This invention places the small boat 12 for placing silicon wafers directly on the paddle 11, eliminating the need for a boat support. During fabrication, the portion of the paddle that carries the small boat remains within the reaction chamber and does not exit the chamber. This significantly simplifies the reaction chamber structure, improving the uniformity of reactant gases and temperature within the reaction chamber, thereby reducing costs and improving quality.

[0065] In addition, on the four sides of the inner cavity unit 2, such as Figure 4 As shown, the equipment is not limited to having all four sides enclosed by plates; the choice of which of the four sides to include can be arbitrary, and can include one, two, three, or four sides. Grooves, bosses, or other guiding and sliding structures are provided on the plates forming the four sides. The locations of the grooves and bosses are shown in [reference needed]. Figure 2 At position 25, grooves and bosses are used for splicing and assembling the four sides.

[0066] Inside the reaction chamber, the actual temperature and gas concentration at different positions (up, down, left, right) will vary due to factors such as the structure of the carrier boat unit and airflow. Therefore, by adjusting the presence or absence of the plates on the four sides and the thickness of the plates, the temperature uniformity and gas uniformity can be improved to a certain extent, thereby improving product quality.

[0067] A reaction chamber for a photovoltaic tubular high-temperature device, see [link / reference] Figure 8The air intake is located on the furnace opening side, supplemented by either the middle of the furnace or by a spray pipe. There are two methods for installing the air intake pipe: inserting it from the outer wall of the outer cavity or from the tail end face of the reaction chamber. The reaction chamber is a sealed cavity formed by the outer cavity, the tail cover plate 52, and the furnace door. During normal production, the tail cover plate 52 is fixed to the outer cavity and does not need to be moved, while the furnace door needs to be moved to open and close. Material can be loaded and unloaded, and sealing can also be achieved through the furnace door side. The furnace opening side refers to the side of the furnace door.

[0068] This utility model's sealing structure design features a sealing structure on the outer cavity end face, eliminating the need for a front-end boss on the inner cavity. Therefore, the inner cavity can be removed from the furnace tail side, allowing for easy assembly and disassembly of the reaction chamber from the furnace tail side. Simultaneously, the outer cavity end face is far from the heat source, facilitating the construction of heat insulation structures. For example, a boss can be installed on the outside of the sealing ring groove to reduce damage to the sealing ring from hot air and extend the maintenance cycle.

[0069] Two rows of guide vanes are axially arranged on the upper and lower sidewalls of the insulation unit. The two rows of guide vanes on the upper sidewall are arranged in parallel, and the two rows of guide vanes on the lower sidewall are arranged in parallel. Each row of guide vanes consists of three rectangular strips arranged in a straight line along the sidewall. The length and width of the rectangular strips on both sides of a row of guide vanes are equal, and the width of the rectangular strips on both sides is 4-6 cm. The length and width of the rectangular strip in the middle of a row of guide vanes are half the length and width of the rectangular strips on both sides, respectively. The distance between the middle rectangular strip and the rectangular strips on both sides is equal to the length of the middle rectangular strip. The middle rectangular strip is located at the middle position along the length of the sidewall. The distance between the two ends of the guide vanes and the two ends of the insulation layer axially is 30-40 cm. Experiments have shown that this structure of guide vanes significantly improves the uniformity of gas in the cavity, reduces the loss of reaction gas, and helps to improve the product quality of the reaction chamber.

[0070] The embodiments of this utility model have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A reaction chamber for a photovoltaic tubular high-temperature device, characterized in that, The reaction chamber includes a slide carrier unit, an inner cavity unit, a heater unit, a heat insulation unit, and an outer cavity unit. All of these units are cavity structures. The slide carrier unit, inner cavity unit, heater unit, heat insulation unit, and outer cavity unit are distributed sequentially from the inside out. The slide carrier unit is located inside the inner cavity unit, which is surrounded by the heater unit. The heat insulation unit is located around the heater unit, and the outer cavity unit is located outside the heat insulation unit. The heater unit and the inner cavity unit have rectangular, elliptical, or approximately elliptical cross-sections. The inner cavity unit is a non-enclosed structure, while the outer cavity unit is a sealed structure.

2. The reaction chamber of the photovoltaic tubular high-temperature equipment according to claim 1, characterized in that, The inner cavity unit is composed of four square side plates, including an upper side plate, a lower side plate, a left side plate, and a right side plate. The upper and lower side plates form the top and bottom of the inner cavity, and the left and right side plates form the left and right side walls of the inner cavity. The upper, lower, left, and right side plates form the cavity structure. The side plates are either arc-shaped or flat.

3. The reaction chamber of a photovoltaic tubular high-temperature apparatus according to claim 2, characterized in that, The upper side plate, lower side plate, left side plate, and right side plate are provided with bosses and grooves on their sides. The upper side plate, lower side plate, left side plate, and right side plate are connected by the bosses and grooves, and the connection is a detachable connection.

4. The reaction chamber of a photovoltaic tubular high-temperature apparatus according to claim 1, characterized in that, The heater in the heater unit is a graphite heater, an infrared heater, a silicon carbide heater, or a ceramic heater, and the components of the heater are coated.

5. The reaction chamber of a photovoltaic tubular high-temperature apparatus according to claim 4, characterized in that, The graphite heater includes a graphite heating element, a connector, and an electrode. The connector connects one or more graphite heating elements or electrodes. The graphite heating element is graphite or a carbon-carbon composite material, and the graphite heating element is block-shaped, plate-shaped, or rod-shaped.

6. The reaction chamber of the photovoltaic tubular high-temperature equipment according to claim 4, characterized in that, The heater unit is composed of three or more temperature zones, and the temperature of each temperature zone is independently controlled; each temperature zone is composed of an upper heating surface, a lower heating surface, a left heating surface, and a right heating surface, and the temperature of the upper heating surface, the lower heating surface, the left heating surface, and the right heating surface is independently controlled.

7. The reaction chamber of the photovoltaic tubular high-temperature equipment according to claim 1, characterized in that, The slide carrier unit includes multiple small boats and two parallel paddles. Two protruding support rods are provided on the outer sides of the two sides of each small boat. The multiple small boats are placed sequentially on the two parallel paddles through the protruding support rods.

8. The reaction chamber of the photovoltaic tubular high-temperature equipment according to claim 7, characterized in that, Two or more of the aforementioned slide carrier units are simultaneously arranged within the inner cavity, and the multiple slide carrier units are arranged side by side inside the inner cavity, including either vertical arrangement or horizontal arrangement.

9. The reaction chamber of the photovoltaic tubular high-temperature equipment according to claim 2, characterized in that, The alternative to the inner cavity unit includes: without changing the original four side plates, the inner cavity unit is composed of any one, any two, or any three of the four side plates.

10. The reaction chamber of a photovoltaic tubular high temperature apparatus according to claim 1, characterized in that, The outer cavity unit includes an outer cavity, a furnace tail cover plate, and a furnace door. One end of the outer cavity is sealed by the furnace tail cover plate, and the other end of the outer cavity is provided with the furnace door. An air inlet pipe is provided at the furnace door position, and a gas supply port is provided at the middle position of the outer cavity. The air inlet pipe is a straight pipe or a spray pipe.

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