Vacuum setup with frame, use of the frame and method

Abstract

According to various embodiments, a vacuum arrangement comprises: a vacuum chamber housing (104) by means of which one or more than one vacuum chamber is provided; a frame (102) for supporting the vacuum chamber housing (104) on a base, wherein the frame (102) has a cavity (102h); several vacuum flanges (152, 164) which are fluidly connected to each other by means of the cavity (102h).

Description

[0001] Various embodiments relate to a vacuum arrangement with a frame, a use of the frame and methods.

[0002] In general, a substrate can be treated (processed) in a vacuum provided by a vacuum chamber, e.g., coated, so that the chemical and / or physical properties of the substrate can be modified. Various coating processes can be used to coat a substrate, of which physical vapor deposition (PVD) is an established example. For example, a vacuum coating system can be used to deposit one or more layers on one or more substrates using chemical and / or physical vapor deposition.

[0003] Creating the vacuum typically requires pumps, lines, and valves, which take up installation space. This installation space requires floor space, which runs counter to the general goal of reducing costs. Examples of this are DE 20 2020 103 833 U1, GB 2 568 338 A, US 2020 / 0 300 234 A1, and US 2002 / 0 084 402 A1.

[0004] According to various embodiments, a vacuum assembly with a rack, a use of the rack, and methods therefor are provided, which reduce installation space and thus save costs. Clearly, the functions provided herein combine supporting a vacuum chamber housing and providing a vacuum (e.g., pre-vacuum) in a cavity of the rack, to which the interior of the vacuum chamber housing or a vacuum chamber housing coupled thereto can be exposed. For example, one or more vacuum chamber housings can be evacuated by means of the rack by withdrawing a gas from the vacuum chamber housing via the cavity of the rack.

[0005] Below, various examples are described which refer to those described above and shown in the figures.

[0006] Example 1 is arranged according to one of the appended claims.

[0007] Example 2 is configured according to Example 1 and / or a vacuum arrangement comprising: a vacuum chamber housing, by means of which one or more than one vacuum chamber is provided; a frame (also referred to as a chamber housing frame) for supporting the vacuum chamber housing on a substrate, wherein the frame has a cavity; a plurality of first vacuum flanges, which are fluidly connected to one another by means of the cavity.

[0008] Example 3 is configured according to any one of Examples 1 to 2, wherein the frame comprises one or more (e.g., tubular) hollow bodies (e.g., tubular beams, e.g., tubes) by means of which the cavity is provided, wherein the hollow body is preferably formed of stainless steel. This simplifies the construction.

[0009] Example 4 is configured according to example 1 or 3, wherein the frame has a housing support on which the vacuum chamber housing rests or which is at least configured to support the vacuum chamber housing thereon. This simplifies the construction.

[0010] Example 5 is configured according to example 1 or 4, wherein the frame has one or more (e.g., vacuum-compatible) weld seams (e.g., made of stainless steel) adjacent to the cavity and / or vacuum-tight. This improves the vacuum.

[0011] Example 6 is configured according to example 1 or 5, wherein the cavity is coupled to the vacuum chamber housing by means of a first flange (also referred to as a first vacuum flange) of the plurality of vacuum flanges. This broadens the application range and saves installation space.

[0012] Example 7 is configured according to example 1 or 6, wherein the frame comprises one or more stainless steel components adjacent to the cavity, wherein the one or more components preferably comprise: a partition wall, a hollow body (e.g., a tubular beam), a vacuum line, and / or a weld seam. The stainless steel may, for example, comprise molybdenum, e.g., with a content of more than 2.5 at%. This improves the service life.

[0013] Example 8 is configured according to any one of examples 1 to 7, wherein the chamber support comprises a plurality of spatially separated support segments and / or a plurality of spatially separated mounting devices.

[0014] Example 9 is configured according to example 1 or 8, further comprising: a plurality of second flanges (also referred to as second vacuum flanges or additional vacuum flanges), wherein the frame has an additional cavity separated (e.g., vacuum-tight) from the cavity (e.g., gas-separated) (e.g., by means of a partition wall), and wherein the plurality of additional vacuum flanges are fluidly connected to one another via the additional cavity. This broadens the application range and further saves installation space.

[0015] Example 10 is configured according to any one of Examples 1 to 9, wherein the plurality of vacuum flanges includes one or more pump connection flanges and one or more chamber connection flanges. This facilitates evacuation and / or maintenance.

[0016] Example 11 is configured according to any one of Examples 1 to 10, further comprising: for one or more than one vacuum flange (e.g., chamber connection flange, e.g., per chamber connection flange) of the plurality of vacuum flanges, a valve, which is preferably fluidically coupled to the cavity (e.g., by means of a high-vacuum pump and / or a vacuum line) via the vacuum flange and / or mounted on the chamber connection flange. This facilitates evacuation and / or maintenance.

[0017] Example 12 is configured according to any one of examples 1 to 11, further comprising: (e.g. per chamber connection flange) a high vacuum pump, which is preferably (e.g. by means of the valve) fluidically coupled to the cavity by means of the chamber connection flange and / or is mounted on the chamber connection flange.

[0018] Example 13 is configured according to any one of Examples 1 to 12, wherein the frame comprises a plurality of feet, wherein the cavity is arranged between the feet and the vacuum chamber housing (or at least the chamber support).

[0019] Example 14 is configured according to any one of Examples 1 to 13, wherein the frame comprises a plurality of segments (also referred to as frame segments), which are preferably arranged one behind the other along a self-contained path, each segment preferably comprising: one or more than one vacuum flange (preferably comprising at least one chamber connection flange and at least one pump connection flange) of the plurality of vacuum flanges; and / or a hollow body (e.g., tubular beam), by means of which a hollow space is provided; and / or a support shoe of the chamber support.

[0020] Example 15 is configured according to any one of Examples 1 to 14, wherein the vacuum chamber housing has a plurality of substrate transfer openings, and the plurality of vacuum flanges has at least one vacuum flange, preferably chamber connection flange, per substrate transfer opening of the plurality of substrate transfer openings.

[0021] Example 16 is configured according to Example 15, further comprising: one or more additional vacuum chamber housings (e.g., sub-chamber housings), each additional vacuum chamber housing adjacent to a substrate transfer opening of the plurality of substrate transfer openings, preferably implementing a chamber-to-chamber connection.

[0022] Example 17 is configured according to example 15 or 16, further comprising, e.g., per additional vacuum chamber housing, a vacuum line (then also referred to as evacuation line) which fluidically couples one of the vacuum flanges to the additional vacuum chamber housing.

[0023] Example 18 is configured according to any one of Examples 15 to 17, a substrate transfer device disposed in the vacuum chamber housing, wherein the substrate transfer device is configured to transfer a substrate between the plurality of substrate transfer openings, e.g., through each of the substrate transfer openings.

[0024] Example 19 is configured according to any one of Examples 1 to 18 and / or is using a frame having a cavity for supporting a first vacuum chamber housing on a substrate and for supplying the first vacuum chamber housing and / or a second vacuum chamber housing adjacent to a substrate transfer opening of the first vacuum chamber housing with vacuum, preferably by pumping out the cavity.

[0025] Example 20 is configured according to any one of Examples 1 to 19 and / or is a method comprising: transporting a substrate in a vacuum chamber housing (in which, for example, a vacuum is formed) supported on a substrate by means of a frame; pumping the vacuum chamber housing and / or a second vacuum chamber housing adjacent to a substrate transfer opening of the first vacuum chamber housing by means of a cavity of the frame (for example, to form the vacuum).

[0026] Example 21 is configured according to Example 20, wherein the transporting occurs through the substrate transfer opening and / or while the substrate is exposed to a vacuum.

[0027] Example 22 is configured according to any one of Examples 1 to 21 and / or is a method for a frame having a cavity, the method comprising: determining an indication of a tightness of the cavity; supporting a vacuum chamber housing by means of the frame on a substrate if the indication fulfills a criterion; optionally pumping out the vacuum chamber housing and / or a second vacuum chamber housing, which is adjacent to a substrate transfer opening of the first vacuum chamber housing, by means of a cavity of the frame (for example, to form the vacuum).

[0028] Example 23 is configured according to any one of examples 1 to 22, further comprising: assembling the frame from a plurality of (e.g. tubular and / or beam-shaped) components (e.g. hollow bodies) by means of which the hollow space is provided.

[0029] Example 24 is configured according to one of Examples 1 to 23 and / or is a method comprising: determining an indication about a tightness of a preferably tubular hollow body; forming a frame having a cavity by assembling a plurality of components (e.g. vacuum components) which have the hollow body and by means of which (e.g. in the assembled state) the cavity is provided, if the indication fulfills a criterion; wherein the frame is configured (e.g. by means of a chamber support) to support a vacuum chamber housing on a base.

[0030] Example 25 is configured according to any one of Examples 1 to 24, further comprising: one or more than one backing pump fluidly coupled to the cavity by means of a vacuum flange (e.g., a pump connection flange) of the plurality of vacuum flanges.

[0031] Example 26 is configured according to any one of examples 1 to 25, wherein the frame comprises a framework having a plurality of (e.g., vertical and / or beam-shaped) posts for supporting the frame on a base.

[0032] Example 27 is configured according to any one of Examples 1 to 26, wherein the rack provides a manifold for providing a pre-vacuum.

[0033] Example 28 is configured according to any one of Examples 1 to 27, further comprising a plurality of additional vacuum chamber housings between which the vacuum chamber housing is arranged.

[0034] Example 29 is configured according to any one of Examples 1 to 28, wherein the plurality of vacuum flanges are rigidly and / or integrally coupled to the frame.

[0035] They show schematically Fig. 1A to 5A each show a vacuum arrangement according to various embodiments; and Fig. 5B shows a method according to various embodiments in a flowchart.

[0036] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top," "bottom," "front," "back," "fore," "rear," etc., will be used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology is for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention.It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the scope of the present invention is defined by the appended claims.

[0037] Throughout this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., resistive and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0038] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect, connection and / or interaction. For example, several elements can be coupled to one another along an interaction chain, along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluidically coupled). For example, two coupled elements can exchange an interaction with one another, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) to one another can include fluidically coupled ones. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g.,by means of direct physical contact. A clutch can be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

[0039] A mounting device is understood herein to be a device which is designed for mounting, for example for mounting on a mounting device complementary thereto (also referred to as a counter-mounting device). During mounting, a (e.g. rigid) connection of several components to one another by means of their mounting devices takes place. The mounting can be carried out (e.g. exclusively) in a form-fitting and / or detachable manner. The mounting device can preferably have a (e.g. planar) mounting surface which, during mounting, rests against a complementary mounting surface of the counter-mounting device. The mounting device can, for example, have one or more than one (e.g. integral) mounting profile (e.g. form-fitting profile), which is provided, for example, by means of an unevenness (e.g. projection or recess) of the mounting device. Examples of the mounting profile include: a thread, a groove (e.g.for keyway and / or dovetail groove), a locking lug, a bayonet catch, a tenon, etc. Examples of unevenness include: an opening (e.g. through hole and / or threaded hole), a bolt (e.g. a threaded bolt).

[0040] An exemplary implementation of the mounting device is configured as a flange, e.g., as a vacuum flange. The flange can be configured for rigid and / or detachable connection to another flange. Two flanges connected to one another form a so-called flange connection. The flange can have a (e.g., planar) mounting surface. Optionally, the flange can be penetrated by an opening (also referred to as a flange opening), which is surrounded by the mounting surface, e.g., along a self-contained path. The flange connection can have two flanges arranged with their mounting surfaces facing one another, e.g., touching one another. The flange opening of a vacuum chamber housing can open into the chamber interior of the vacuum chamber housing, e.g., adjacent to it. Optionally, the flange can have a groove surrounding the flange opening, e.g.,along the self-contained path, the flange opening is circumferentially adjacent and / or borders the mounting surface. Optionally, a seal, e.g., a metal seal or a plastic seal, can be accommodated in the groove. Optionally, the flange can have a projection that defines the mounting surface. For example, the mounting surface can protrude.

[0041] An exemplary implementation of the assembly device is configured as a coupling device. A coupling device is configured for coupling two components (e.g., shafts), one or more of which components are rotatably mounted, to one another, for example, by means of a rigid, elastic, movable, and / or detachable connection of the two components to one another. The coupling device is, in particular, configured to impart a torque between the two components, for example, such that they are set in a rotational movement. An exemplary implementation of the coupling device can, for example, comprise a clamping device, teeth, or the like for connecting the two components to one another.

[0042] According to various embodiments, one or more than one vacuum chamber can be provided by means of a chamber housing (then also referred to as a vacuum chamber housing), in which one or more chambers can be provided. The chamber housing can, for example, be coupled (e.g., in a gas-conducting manner) to a pump arrangement, e.g., a vacuum pump arrangement, for providing a negative pressure or a vacuum (vacuum chamber housing), and can be configured so that it can withstand the effects of air pressure in the pumped-out state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can make it possible to pump out part of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in one chamber housing.In other words, the chamber housing can be configured as a vacuum chamber housing or a coating chamber can be configured as a vacuum chamber.

[0043] In the context of a vacuum arrangement and its components (e.g. a pump, a chamber, a line, a valve, etc.), the term "coupled" or "coupling" can be understood in the sense of a connection to a common vacuum system. The vacuum system can be understood as a coherent hollow body, the interior of which can be gas-separated from an exterior of the vacuum system during operation, for example by means of pumps, seals and / or valves. For this purpose, the fluid-conductive components can be provided as hollow bodies and mounted to one another by means of their mounting devices to form the coupling, so that their interior space contributes to forming the interior of the vacuum system. The components of the vacuum system can be configured to exchange a gas with one another by means of the coupling, wherein the coupling can optionally be provided by means of a valve, which can be used as an actuator to influence the gas exchange. More generally, the coupling between two vacuum components (e.g., components of the vacuum system) can be provided by another component (e.g., a valve or a chamber), which is then connected between the two vacuum components (analogous to an electrical circuit). The component can clearly couple the two vacuum components along an interaction chain, along which, for example, a gas exchange can occur as an interaction. For example, the component connected between the two vacuum components can influence the interaction between the two vacuum components.

[0044] A valve can be connected between two vacuum components (e.g., components of the vacuum system) and configured to connect them to one another in a gas-conducting manner when the valve is open, or to separate them from one another in a gas-conducting manner when the valve is closed. Several interconnected vacuum chambers can be part of a common vacuum system in which a vacuum can be generated by means of one or more vacuum pumps coupled to the vacuum chambers. The gas flow between the interconnected vacuum chamber(s) and / or vacuum pump(s) can be adjusted by means of optionally interposed valves. This applies analogously to other hollow bodies that serve as vacuum components, such as lines, chamber housings, etc.

[0045] The term “vacuum pressure” refers herein to a negative pressure in the range of vacuum (ie a pressure of less than 0.3 bar), e.g. a pressure in a range of about 10 mbar to about 1 mbar (in other words rough vacuum) can be provided or less, e.g. a pressure in a range of about 1 mbar to about 10 -3 mbar (in other words fine vacuum) or less, e.g. a pressure in a range of approximately 10 -3 mbar to approximately 10 -7 mbar (in other words high vacuum) or less, e.g. a pressure less than high vacuum, e.g. less than about 10 -7 mbar. According to various embodiments, a chamber housing, e.g., a vacuum chamber provided therein, can be configured such that a negative pressure, e.g., vacuum pressure, can be provided therein. The atmospheric pressure (e.g., 1 bar) can be the pressure acting on the chamber housing from the outside.

[0046] Herein, the term “vacuum” in connection with a component (e.g. chamber, line, valve, etc.) indicates that the component is suitable for vacuum (e.g. tested for it) (then also referred to as a vacuum component). Examples of vacuum components include: vacuum chamber, vacuum line, vacuum valve, vacuum pump, vacuum chamber housing, etc. A vacuum component is designed to provide and / or operate in a vacuum pressure, and / or to provide (e.g. withstand) a pressure difference between the vacuum pressure and atmospheric pressure. Vacuum suitability can, for example, be tested and / or certified, e.g. if the vacuum component meets one or more criteria regarding tightness, stability (e.g. material stability, mechanical stability, temperature stability and / or corrosion resistance) when exposed to vacuum pressure, and / or saturation pressure.

[0047] According to various embodiments, a chamber connection flange is configured to be coupled to a chamber housing or can be coupled thereto, e.g. by means of a vacuum line and / or in direct contact therewith. According to various embodiments, a pump connection flange is configured to be coupled to a vacuum pump (e.g. backing pump and / or high vacuum pump) or can be coupled thereto, e.g. by means of a vacuum line and / or in direct contact therewith. A vacuum line can, for example, have two flanges as end sections and at least one tubular hollow body which is monolithically connected to the two flanges and whose interior couples the two flanges to one another in a fluid-conducting manner.

[0048] Fig. 1A illustrates a vacuum arrangement according to various embodiments 100a in a schematic side view or cross-sectional view, preferably configured according to Example 1 and / or Example 2.

[0049] An exemplary implementation of the frame 102 provides, for each cavity 102h of the frame 102 (also referred to as the frame interior), a manifold 102l, the interior of which is provided by the frame interior 102h (then also referred to as the line interior). For example, the frame has a plurality of frame interiors 102h that are separated from one another (e.g., by a wall), each frame interior providing a line interior.

[0050] Alternatively or additionally, the frame has a plurality of (e.g., a number of k) feet 102s, by means of which the frame can contact the substrate. Each foot can, for example, have a (e.g., vertical) support (also referred to as a stand), which has a base, e.g., provided by a plate, at an end section opposite the frame interior 102h. The feet are configured, for example, to transfer the weight of the vacuum chamber to the substrate.

[0051] An exemplary implementation of the frame interior 102h (preferably according to Example 3) is provided by one or more hollow bodies of the frame 102, each hollow body being at least partially tubular. For example, the vacuum line 102l may be partially tubular. A tubular object may have an oval (e.g., round) cross-section or a polygonal (e.g., square) cross-section. The frame interior 102h may, for example, be adjacent to one or more vacuum-compatible weld seams, by means of which several hollow bodies or components thereof are joined together.

[0052] An exemplary implementation of the vacuum chamber housing 104 has a floor 104b (also referred to as housing floor) and a ceiling 104d (also referred to as housing ceiling), between which the chamber interior 104h (illustratively a cavity) is arranged.

[0053] An exemplary implementation of the subsurface 106 (preferably according to) is a part of a building, e.g., its foundation or a floor of the building, which, for example, provides a floor of the building. The building can, for example, be a hall or the like.

[0054] An exemplary implementation of the manifold (preferably according to Example 5) has one or more than one vacuum-compatible weld seam, by means of which the manifold is joined together and / or by means of which several hollow bodies are joined together in a fluid-conducting manner to form the manifold.

[0055] An exemplary implementation of the chemical composition of the rack 102 (preferably according to Example 7) includes stainless steel, e.g., rust-proof stainless steel. This inhibits corrosion of the rack interior if water precipitates during evacuation. For example, the entire rack interior 102h can be enclosed by stainless steel, e.g., rust-proof stainless steel. Alternatively or additionally, any weld seam adjacent to the rack interior 102h can be made of stainless steel.

[0056] According to various embodiments, gas is removed from a hollow body (e.g., a vacuum chamber housing, a frame, and / or a vacuum line) (also referred to as pumping out) so that the hollow body is supplied with vacuum (e.g., its interior is exposed to the vacuum).

[0057] Fig. 1B illustrates a vacuum arrangement according to various embodiments 100b in a schematic circuit diagram, preferably configured according to embodiments 100a and / or configured according to Example 4.

[0058] An exemplary implementation of the housing support 102a provides a plurality of spatially separated support surfaces for supporting the vacuum chamber. Alternatively or additionally, the housing support 102a comprises one or more mounting devices, e.g., spatially separated mounting devices, each of which is configured to be mounted to the vacuum chamber 104, e.g., by means of a screw. The housing support 102a is configured, for example, to dissipate the weight of the vacuum chamber, e.g., to the feet and / or the manifold 102l.

[0059] Fig. 2A illustrates a vacuum arrangement according to various embodiments 200a in a schematic circuit diagram, preferably configured according to one of the embodiments 100a to 100b and / or configured according to Example 6 and / or Example 9.

[0060] An exemplary implementation of the plurality of vacuum flanges (preferably according to Example 10) comprises at least one (ie one or more than one) first chamber connection flange 152, 154 and, e.g., per rack interior 102h, at least one pump connection flange 154, which is coupled to the at least one first chamber connection flange 152, 154 by means of the rack interior 102h.

[0061] An exemplary implementation of the at least one first chamber connection flange 152, 154 has a chamber connection flange 152 that is coupled to the vacuum chamber housing 104 (also referred to as the first vacuum chamber housing 104 or, for better differentiation, as the main chamber housing 104), e.g., by means of a vacuum line 252, a vacuum valve, and / or a high vacuum pump 252p. Alternatively or additionally, the at least one first chamber connection flange 152, 154 has one or more additional first chamber connection flanges 154, each additional first chamber connection flange 154 being coupled to a second vacuum chamber housing 114 (also referred to as the secondary chamber housing 104 for better differentiation), e.g., by means of a vacuum line 254, a vacuum valve, and / or a high vacuum pump 254p.

[0062] An exemplary implementation of a vacuum chamber housing, e.g., the first vacuum chamber housing 104 and / or the second vacuum chamber housing 114, has one or more pump connection flanges, e.g., for coupling the high vacuum pump 252p and / or the frame 102.

[0063] An exemplary implementation of the pump connection flange 164 is coupled to the at least one first chamber connection flange 152, 154 by means of the frame interior 102h. The pump connection flange 164 is configured to be coupled to a backing pump or is coupled to it.

[0064] It should be understood that a high vacuum pump 252p, 254p, 256p does not necessarily have to be connected between a vacuum chamber and the rack. The high vacuum pump can also be part of a pumping station that is connected in parallel to the rack and can be evacuated independently of the rack.

[0065] Fig. 2B illustrates a vacuum arrangement according to various embodiments 200b in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a to 200a and / or according to Example 9, wherein the vacuum arrangement provides a plurality of vacuum systems which are gas-separated from one another and each vacuum system comprises: - a frame interior 102h, 112h; - a plurality of vacuum flanges, which have at least one chamber connection flange 152, 154, 156 and at least one pump connection flange (not shown) and are fluidly coupled to one another by means of the frame interior 102, 112; - one or more than one vacuum chamber 104, 114, 124; - per vacuum chamber, a vacuum component (e.g. a high vacuum pump 252p, 254p, 256p; a vacuum line 252l, 254l, 256l and / or a vacuum valve), by means of which the vacuum chamber is fluidly coupled to a chamber connection flange 152, 154 of the plurality of vacuum flanges.

[0066] It should be understood that the high-vacuum pump 252p, 254p, 256p does not necessarily have to be connected between the frame and a vacuum chamber. For example, the frame can also be configured only to supply the vacuum chamber with pre-vacuum, in which case the vacuum chamber is connected between the frame and a pumping station (not shown) that has a high-vacuum pump.

[0067] The multiple vacuum systems provide a compact and gas-separated supply of vacuum chambers, which differ from each other in the pressure requirements in the vacuum chambers.

[0068] Fig. 3A illustrates a vacuum arrangement according to various embodiments 300a in a schematic circuit diagram, preferably configured according to one of the embodiments 100a to 200b and / or configured according to Example 14 and / or Example 15; and Fig. 3B the embodiments 300b in a sectional side view (e.g. cut along partition wall 312).

[0069] An exemplary implementation of the main chamber housing 104 (preferably according to Example 15) has a plurality of flanges 302 (also referred to as substrate transfer flanges), each of which is penetrated by a substrate transfer opening. The plurality of substrate transfer flanges 302 comprise, for example, one substrate transfer flange per secondary chamber housing 114, 124, the substrate transfer opening of which opens into the secondary chamber housing 114, 124 and / or which is adjacent to the secondary chamber housing 114, 124 (e.g., its substrate transfer flange).

[0070] An exemplary implementation of the main chamber housing 104 has a plurality of pump connection flanges 352p, each pump connection flange 352p being fluidly coupled to the frame interior 102h by means of a high vacuum pump 252p and / or vacuum line mounted thereon.

[0071] An exemplary implementation of the frame 102 (preferably according to Example 14) has one or more than one wall 312 (also referred to as a partition wall), to which frame interior spaces 102h, 112h of the frame 102 are adjacent, which are gas-separated from each other by means of the partition wall 312.

[0072] Fig. 4A illustrates a vacuum arrangement according to various embodiments 400a in a schematic circuit diagram, preferably configured according to one of the embodiments 100a to 300b and / or configured according to Example 14.

[0073] An exemplary implementation of the multiple frame segments 404a, 404b are monolithically connected to one another and / or provided as hollow bodies by means of multiple tubular beams. The multiple frame segments 404a, 404b comprise, for example, a first frame segment 404a, the interior of which forms the first frame interior 102h, and a second frame segment 404b, the interior of which forms the second frame interior 112h.

[0074] An exemplary implementation of the plurality of vacuum flanges (preferably configured according to Example 10) has, per frame segment 404a, 404b, a pump connection flange and at least one chamber connection flange 152, 156, which are fluidly coupled to one another by means of the frame segment 404a, 404b and / or open into its interior.

[0075] Optionally, the vacuum arrangement can comprise a pumping station 402, which is fluidly coupled to one or more frame interiors 102h, 112h by means of the pump connection flange, for example, by means of a vacuum line. For example, the pumping station 402 can comprise a backing pump per pump connection flange, which is fluidly coupled to the pump connection flange. This provides multiple pumping lines.

[0076] An exemplary implementation of the or each partition 312 adjoins two frame interior spaces 102h, 112h, which are separated from each other by the partition 312, e.g., vacuum-tight. For example, the partition 312 can be connected to the tubular beam by a vacuum-tight weld.

[0077] Fig. 4B illustrates a vacuum arrangement according to various embodiments 400b in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a to 400a and / or according to Example 14.

[0078] An exemplary implementation of the vacuum arrangement has a self-contained path along which a plurality of frame segments 404a, 404b are arranged one behind the other. The plurality of frame segments 404a, 404b are further rigidly connected to one another and / or each have a plurality of tubular beams.

[0079] An exemplary implementation of the or each partition 312 is arranged transversely to the path.

[0080] Fig. 5A illustrates a vacuum arrangement according to various embodiments 500a in a schematic side view or cross-sectional view, preferably configured according to one of the embodiments 100a to 400b and / or configured according to Example 18.

[0081] As explained above, no high-vacuum pump is connected between the secondary chamber housing 114 and the frame 102. Then, the coupling between the frame 102 and the secondary chamber housing 114 can, for example, consist of only one or more vacuum lines 254l and / or one or more vacuum valves 506.

[0082] An exemplary implementation of the substrate transfer device 502 is configured to provide a transport path through the substrate transfer opening 302o into the secondary chamber housing 114, along which the substrate is transported by the substrate transfer device 502. Alternatively or additionally, the substrate transfer device 502 comprises one or more transport rollers for transporting the substrate.

[0083] An exemplary implementation of the sub-chamber housing 114 provides a vacuum chamber in which a processing device 506 (e.g., coating device), e.g., a sputtering device, is arranged.

[0084] Fig.5B illustrates a method according to various embodiments 500b, which are preferably configured according to Example 20 and / or Example 24, in a schematic flow diagram for a rack, which is preferably configured according to one of the embodiments 100a to 500a; which may apply analogously to a use of the rack.

[0085] The method according to Example 24, for example, facilitates the production and / or use of the frame. The method comprises, for example, in 501, determining an indication about a tightness of at least one, preferably tubular and / or beam-shaped, hollow body. The indication can be determined, for example, by means of a leak test and / or by means of helium. The indication can, for example, be expressed as a mass flow, e.g., related to a pressure difference. Optionally, the indication can also be related to a stability (e.g., material stability, mechanical stability, temperature stability, and / or corrosion resistance) of the hollow body component when it is exposed to a vacuum pressure.

[0086] The at least one hollow body can, for example, have three or more hollow bodies.

[0087] The method comprises, for example, in 503, forming a frame having a cavity by assembling a plurality of vacuum components that have (or consist of) the at least one hollow body and by means of which the cavity is provided, if the specification meets a criterion. Examples of the plurality of vacuum components include: one or more than one chamber connection flange; and / or one or more than one partition wall. The criterion can be met, for example, if the tightness is greater than a target tightness and / or less than a target mass flow.

[0088] The method according to Example 20 facilitates, for example, the operation of a vacuum arrangement and / or the use of the rack 102. The method comprises, in 505, transporting a substrate in a first vacuum chamber housing, which is supported on a substrate by means of a rack. The transport can be carried out, for example, by means of the substrate transfer device 502 along a transport path through the substrate transfer opening 302o into or out of a secondary chamber housing.

[0089] The method comprises, in 507, pumping down (also referred to as evacuating) the first vacuum chamber housing (e.g., main chamber housing) and / or one or more than one second vacuum chamber housing (e.g., secondary chamber housing) adjacent to a substrate transfer opening of the first vacuum chamber housing, by means of a cavity of the frame.

[0090] For an exemplary implementation of the method, the rack is coupled to one or more vacuum pumps (e.g., backing pump), by means of which gas is removed from the cavity of the rack (also referred to as pumping or evacuating). Alternatively or additionally, the vacuum chamber housing is coupled by means of a first valve to a first pump train comprising a high-vacuum pump, and by means of a second valve to a second pump train comprising a backing pump, which is coupled to the vacuum chamber housing via the rack interior.

[0091] Below, various working examples are described which refer to those described previously and those shown in the figures.

[0092] Working Example 1 provides a forevacuum supply via the frame on which a central main chamber housing is mounted. The main chamber housing provides a transfer chamber by means of which several secondary chamber housings are coupled to one another. For example, the main chamber housing can be arranged between the several secondary chamber housings. Alternatively or additionally, several secondary chamber housings can be arranged around the main chamber housing.

[0093] Working example 2 uses the frame to provide a support structure with multiple feet, which supports the vacuum chamber housing on a base. This improves stability.

[0094] Working example 3 provides, by means of the frame, a ring implementing one or more manifolds, each manifold being coupled to one or more vacuum flanges whose flange opening opens into the manifold.

[0095] Working example 4 provides a first forevacuum line which is fluidly coupled to the frame interior by means of a first chamber connection flange and / or wherein a transfer chamber is fluidly coupled to the frame interior by means of the first forevacuum line.

[0096] Working example 5 or working example 4 provides a second pre-vacuum line which is fluidly coupled to the frame interior by means of a second chamber connection flange and / or wherein a processing chamber or lock chamber is fluidly coupled to the frame interior by means of the second pre-vacuum line

[0097] Working example 6 provides a stainless steel ring in which the rack interior is formed, which prevents corrosion because water can precipitate inside the rack interior.

[0098] Working example 7 provides a ring made of stainless steel in which the frame interior is formed, and which is assembled from several square tubes as a hollow body that are vacuum-tightly welded together.

[0099] Working Example 8 provides a ring in which a plurality of rack interiors of the rack are formed, which are vacuum-tightly separated from each other by means of a partition wall to which the plurality of rack interiors are adjacent.

[0100] Working Example 9 provides a ring comprising a plurality of ring segments, each ring segment providing a frame interior of the frame. Each frame interior can be associated with a secondary chamber housing, which is fluidly coupled to the frame interior by means of a chamber connection flange.

[0101] Working example 10 provides a vacuum valve that fluidly couples the vacuum chamber housing or an additional vacuum chamber housing to a chamber connection flange that is rigidly connected to the frame.

[0102] Working Example 11 provides several support shoes for the housing support. These can be mounted externally on a ring of the frame and / or support the transfer chamber on the ground.

[0103] Working example 12 simplifies the frame design by vacuum-tight welding several tubes into a ring. After welding, the ring is tested for leaks, for example, using a leak test. Alternatively or additionally, the ring is manufactured from vacuum-tested tubes, which further minimizes the risk of manufacturing defects. After the ring is manufactured, the vacuum flanges are welded to the ring and / or optional partition walls are inserted to provide multiple frame interiors.

[0104] Working example 13 simplifies the supply of vacuum for vacuum chambers that are operated differently by providing several rack interiors by means of the rack, which differ from each other in the negative pressure generated in the rack interiors.

[0105] Working example 14 provides a pumping station by means of which gas is extracted from the frame interior during operation (also referred to as pumping out), for example so that a pre-vacuum is provided in the frame interior.

Claims

[1] Vacuum arrangement, comprising: • a vacuum chamber housing (104) by means of which a vacuum chamber is provided; • a frame (102) for supporting the vacuum chamber housing (104) on a base (106), the frame (102) having a cavity (102h); • a plurality of vacuum flanges (152, 164) which are fluidically connected to one another by means of the cavity (102h) of the frame (102). [2] Vacuum arrangement according to claim 1, wherein the frame (102) comprises one or more than one tubular hollow body by means of which the cavity (102h) is provided. [3] Vacuum arrangement according to claim 1 or 2, wherein the frame (102) has a housing support on which the vacuum chamber housing (104) rests. [4] Vacuum arrangement according to one of claims 1 to 3, wherein the plurality of vacuum flanges (152, 164) are rigidly and / or integrally coupled to the frame. [5] Vacuum arrangement according to claim 1 or 4, wherein the cavity (102h) is coupled to the vacuum chamber housing (104) by means of a first vacuum flange (152) of the plurality of vacuum flanges (152, 164). [6] Vacuum arrangement according to claim 1 or 5, further comprising: • several additional vacuum flanges (152, 164), • wherein the frame (102) has an additional cavity (112h) which is vacuum-tightly gas-separated from the cavity (102h), and wherein the plurality of additional vacuum flanges (152, 164) are fluidly connected to one another by means of the additional cavity (112h). [7] Vacuum arrangement according to one of claims 1 to 6, further comprising: one or more than one backing pump, which is fluidly coupled to the cavity (102h) by means of a second vacuum flange (164) of the plurality of vacuum flanges (152, 164). [8] Vacuum arrangement according to one of claims 1 to 7, wherein the frame (102) has a plurality of feet, wherein the cavity (102h) is arranged between the feet and the vacuum chamber housing (104). [9] Vacuum arrangement according to one of claims 1 to 8, wherein the frame (102) has a plurality of segments (404a, 404b), which are preferably arranged one behind the other along a closed path. [10] Vacuum arrangement according to one of claims 1 to 9, wherein the vacuum chamber housing (104) has a plurality of substrate transfer openings (302o), and the plurality of vacuum flanges (152, 164) has at least one vacuum flange per substrate transfer opening of the plurality of substrate transfer openings (302o). [11] Vacuum arrangement according to claim 10, further comprising: one or more than one additional vacuum chamber housing (104), each additional vacuum chamber housing (104) adjacent to a substrate transfer opening of the plurality of substrate transfer openings (302o). [12] Using a frame (102) having a cavity (102h) for supporting a first vacuum chamber housing (104) on a substrate (106) and for supplying the first vacuum chamber housing (104) and / or a second vacuum chamber housing (104) adjacent to a substrate transfer opening of the first vacuum chamber housing (104) with vacuum by pumping out the cavity (102h). [13] Method comprising: • Transporting a substrate in a vacuum chamber housing (104) which is supported on a base (106) by means of a frame (102); • Pumping out the vacuum chamber housing (104) and / or an additional vacuum chamber housing (104) adjacent to a substrate transfer opening of the first vacuum chamber housing (104) by means of a cavity (102h) of the frame (102). [14] Method for a frame (102) having a cavity (102h), the method comprising: • Determination of an indication of the tightness of the cavity (102h); • Supporting a vacuum chamber housing (104) by means of the frame (102) on a base (106), if the specification meets a criterion. [15] Method comprising: • Determining information about the tightness of a hollow body; • Forming a frame (102) having a hollow space (102h) by assembling a plurality of components having the hollow body if the indication satisfies a criterion, wherein the frame (102) is configured to support a vacuum chamber housing (104) on a base (106).

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