Vacuum pipe support structure

JP2024168278AInactive Publication Date: 2024-12-05YOKOGAWA ELECTRIC CORP

Patent Information

Application Number
JP2023084819
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-05-23
Publication Date
2024-12-05
Estimated Expiration
Not applicable · inactive patent

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  • Figure 2024168278000001_ABST
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Abstract

To provide a vacuum pipe support structure in which a temperature in an inner part is hardly increased.SOLUTION: A vacuum pipe support structure includes: a vacuum pipe; a cover that covers the vacuum pipe; and a support member that supports the vacuum pipe and the cover. The cover includes: a fluid introduction part that passes the cover in order to introduce a fluid into the cover; and a fluid exhaust part that passes the cover in order to exhaust the fluid from the cover. The fluid introduced from the fluid introduction part comes into contact with the vacuum pipe and is exhausted via the fluid exhaust part.SELECTED DRAWING: Figure 3
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Description

[Technical field]

[0001] The present invention relates to a vacuum tube support structure. [Background technology]

[0002] 2. Description of the Related Art A vacuum tube support structure for housing and supporting a vacuum tube is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6704100 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-described vacuum tube support structure, the temperature inside the vacuum tube support structure rises due to heat generated by the vacuum tubes, accelerating deterioration of the vacuum tubes.

[0005] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a vacuum tube support structure in which the internal temperature is less likely to rise. [Means for solving the problem]

[0006] One aspect of the present invention is as follows.

[0007] [1] Vacuum tubes and A cover for covering the vacuum tube; a support member for supporting the vacuum tube and the cover; the cover has a fluid inlet portion through which a fluid passes to introduce the fluid into the cover, and a fluid outlet portion through which the fluid passes to discharge the fluid from within the cover, A vacuum tube support structure, wherein the fluid introduced from the fluid inlet portion comes into contact with the vacuum tube and is discharged through the fluid outlet portion.

[0008] [2] The vacuum tube support structure according to [1], wherein the fluid discharge section allows wiring of the vacuum tube to pass through.

[0009] [3] A fluid supply device is provided. The vacuum tube support structure according to [1] or [2], wherein the fluid supply device supplies the fluid to the fluid introduction portion.

[0010] [4] the fluid supply device has a pipe connected to the fluid introduction portion, The vacuum tube support structure according to [3], wherein the piping supplies the fluid to the fluid inlet portion.

[0011] [5] The vacuum tube support structure according to [3] or [4], wherein the fluid supply device has a fan for supplying the fluid.

[0012] [6] The vacuum tube support structure according to any one of [3] to [5], wherein the fluid supply device has a cooling device capable of cooling the fluid.

[0013] [7] The vacuum tube support structure according to any one of [3] to [5], wherein the fluid supply device has a temperature adjustment device capable of adjusting a temperature of the fluid.

[0014] [8] A fluid ejection device is provided. The vacuum tube support structure according to any one of [1] to [7], wherein the fluid discharge device discharges the fluid from the fluid discharge portion.

[0015] [9] The fluid discharge device has a pipe connected to the fluid discharge portion, The vacuum tube support structure described in [8], wherein the piping discharges the fluid from the fluid discharge portion.

[0016]

[10] The vacuum tube support structure according to [8] or [9], wherein the fluid discharge device has a fan for supplying the fluid.

[0017]

[11] The vacuum tube support structure according to any one of [1] to

[10] , A sensor that measures a physical quantity of an object to be measured by receiving electromagnetic waves irradiated from the vacuum tube to the object to be measured.

[0018]

[12]

[11] A sensor according to the present invention, a moving device that moves the sensor in a direction intersecting the moving direction of the object to be measured. Effect of the Invention

[0019] According to the present invention, it is possible to provide a vacuum tube support structure in which the internal temperature is less likely to rise. [Brief description of the drawings]

[0020] [Figure 1] 1 is an external view of a measurement device according to an embodiment of the present invention; [Diagram 2] FIG. 2 is an external view showing a sensor of the measuring device shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view showing a vacuum tube support structure of the sensor shown in FIG. 2. [Figure 4] 4 is a cross-sectional view showing another example of the vacuum tube support structure shown in FIG. 3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0022] As shown in Figures 1 to 3, in one embodiment of the present invention, a vacuum tube support structure 1 has a vacuum tube 2, a cover 3 covering the vacuum tube 2, and a support member 4 supporting the vacuum tube 2 and the cover 3, and the cover 3 has a fluid inlet portion 5 that passes through the cover 3 to introduce a fluid into the cover 3, and a fluid outlet portion 6 that passes through the cover 3 to discharge the fluid from within the cover 3, and the fluid introduced from the fluid inlet portion 5 comes into contact with the vacuum tube 2 and is discharged through the fluid outlet portion 6.

[0023] According to the above configuration, the cover 3 that covers the vacuum tubes 2 can protect the surroundings from the high voltage applied to the vacuum tubes 2. In addition, the fluid introduced into the cover 3 from the fluid inlet 5 comes into contact with the vacuum tubes 2, thereby removing the heat generated by the vacuum tubes 2 and discharging it from inside the cover 3 through the fluid outlet 6, thereby suppressing an increase in temperature inside the cover 3. Therefore, a vacuum tube support structure 1 in which the internal temperature is less likely to increase can be realized, and as a result, deterioration of the vacuum tubes 2 can be suppressed, and for example, the work of replacing the vacuum tubes 2 can be reduced.

[0024] The fluid discharge portion 6 passes through the wiring 7 of the vacuum tube 2. According to the above configuration, the fluid discharge portion 6 can also be used as a passage portion for the wiring 7 of the vacuum tube 2, so that the vacuum tube support structure 1 can be simplified.

[0025] The vacuum tube support structure 1 has a fluid supply device 8, which supplies fluid to the fluid inlet portion 5. According to the above configuration, the fluid can be easily introduced into the cover 3 by the fluid supply device 8.

[0026] The fluid supply device 8 has a pipe 8a connected to the fluid introduction part 5, and the pipe 8a supplies the fluid to the fluid introduction part 5. According to the above configuration, the fluid can be introduced into the fluid introduction part 5 from a desired location by using the pipe 8a.

[0027] 4, the fluid supply device 8 may be configured to have a fan 8b for sending the fluid. According to the above configuration, the fluid can be sent to the fluid introduction part 5 by the fan 8b, so that the structure of the fluid supply device 8 can be simplified.

[0028] 4, the fluid supply device 8 may have a cooling device 8c capable of cooling the fluid. According to the above configuration, the fluid cooled by the cooling device 8c can be supplied, so that the vacuum tube support structure 1 in which the internal temperature is more unlikely to rise can be realized.

[0029] Although not shown, the fluid supply device 8 may be configured to have a temperature adjustment device that can adjust the temperature of the fluid. According to the above configuration, since the fluid that is appropriately cooled by the temperature adjustment device can be supplied, the temperature inside the vacuum tube support structure 1 can be appropriately controlled.

[0030] Although not shown, the vacuum tube support structure 1 may have a fluid discharge device, which may be configured to discharge the fluid from the fluid discharge portion 6. According to the above configuration, the fluid can be easily discharged from inside the cover 3 by the fluid discharge device.

[0031] Although not shown, the fluid discharge device may have a pipe 8a connected to the fluid discharge portion 6, and the pipe 8a may be configured to discharge the fluid from the fluid discharge portion 6. According to the above configuration, the fluid can be discharged from the fluid discharge portion 6 to a desired location by utilizing the pipe 8a.

[0032] Although not shown, the fluid discharge device may have a configuration including a fan 8b for sending the fluid. According to the above configuration, the fluid can be discharged from the fluid discharge portion 6 by the fan 8b, so that the structure of the fluid discharge device can be simplified.

[0033] The cover 3 has a peripheral wall member 3a having one end supported by the support member 4, and an end member 3b provided at the other end of the peripheral wall member 3a. According to the above configuration, the cover 3 can be realized with a simple structure.

[0034] The fluid inlet 5 and the fluid outlet 6 are located in the peripheral wall member 3a. According to the above-mentioned configuration, the heat generated by the vacuum tubes 2 can be efficiently removed, and the rise in temperature inside the cover 3 can be further suppressed.

[0035] The vacuum tube 2 is an X-ray tube that emits X-rays. According to the above configuration, since X-ray tubes are particularly susceptible to deterioration due to heat generation, deterioration can be significantly suppressed by using the vacuum tube support structure 1 in which the internal temperature is less likely to rise. Note that the vacuum tube 2 is not limited to being an X-ray tube, and may be configured to emit electromagnetic waves other than X-rays.

[0036] The vacuum tube support structure 1 has an electromagnetic wave passing section 9 that allows electromagnetic waves emitted by the vacuum tubes 2 to pass through the vacuum tube support structure 1 so as to be emitted from within the vacuum tube support structure 1. According to the above configuration, the electromagnetic waves can be emitted through the electromagnetic wave passing section 9. As shown in Figs. 3 and 4, the support member 4 has the electromagnetic wave passing section 9, but is not limited to this.

[0037] Sensor 10 has a vacuum tube support structure 1, and measures a physical quantity of object under test 11 by receiving electromagnetic waves irradiated from a vacuum tube 2 to object under test 11. More specifically, sensor 10 has a transmitter 12 that has vacuum tube support structure 1 and irradiates electromagnetic waves from vacuum tube 2 to object under test 11, and a receiver 13 that receives the electromagnetic waves irradiated to object under test 11. With the above configuration, sensor 10 can be realized that has a vacuum tube support structure 1 in which the internal temperature does not easily rise.

[0038] As shown in FIG. 1, the sensor 10 is a transmission type in which the transmitter 12 and the receiver 13 are installed on different sides of the object to be measured 11, but is not limited to this, and may be configured as a reflection type in which the transmitter 12 and the receiver 13 are installed on the same side of the object to be measured 11.

[0039] The sensor 10 has a power supply unit 14 that supplies power to the vacuum tube 2, and the power supply unit 14 is supported by the support member 4. According to the above configuration, the structure of the sensor 10 can be simplified.

[0040] The measuring device 15 has a sensor 10 and a moving device 16 that moves the sensor 10 in a direction intersecting (see the thick double-headed arrow in FIG. 1) with respect to the moving direction (see the thick arrow in FIG. 1) of the object to be measured 11. According to the above configuration, it is possible to realize the measuring device 15 having the vacuum tube support structure 1 in which the internal temperature does not easily rise.

[0041] The measuring device 15 is installed on a production line on which the objects to be measured 11 flow. According to the above configuration, the physical quantity of the objects to be measured 11 can be measured on the production line.

[0042] The measuring device 15 is configured as a thickness gauge such as a basis weight meter that measures the thickness of the object 11 based on the intensity of the electromagnetic wave received by the receiving unit 13. According to the above configuration, a thickness gauge having a vacuum tube support structure 1 in which the internal temperature is unlikely to rise can be realized.

[0043] The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and scope of the present invention. [Explanation of symbols]

[0044] 1 Vacuum tube support structure 2 vacuum tubes 3 Cover 3a Peripheral wall member 3b End member 4 Support member 5 Fluid introduction section 6 Fluid outlet 7 Wiring 8 Fluid supply device 8a Piping 8b Fan 8c cooling device 9 Electromagnetic wave passage section 10 Sensors 11 Object to be measured 12. Transmission Department 13 Receiving section 14 Power supply section 15 Measuring Equipment 16 Mobile Devices

Claims

1. Vacuum tubes and A cover for covering the vacuum tube; a support member for supporting the vacuum tube and the cover; the cover has a fluid inlet portion through which a fluid passes to introduce the fluid into the cover, and a fluid outlet portion through which the fluid passes to discharge the fluid from within the cover, A vacuum tube support structure, wherein the fluid introduced from the fluid inlet portion comes into contact with the vacuum tube and is discharged through the fluid outlet portion.

2. The vacuum tube support structure of claim 1 , wherein the fluid exhaust section allows wiring of the vacuum tube to pass through.

3. A fluid supply device is provided. The vacuum tube support structure of claim 1 , wherein the fluid supply device supplies the fluid to the fluid inlet.

4. the fluid supply device has a pipe connected to the fluid introduction portion, The vacuum tube support structure according to claim 3 , wherein the piping supplies the fluid to the fluid inlet.

5. The vacuum tube support structure of claim 3 , wherein the fluid supply device comprises a fan for pumping the fluid.

6. 4. The vacuum tube support structure of claim 3, wherein the fluid supplying device comprises a cooling device capable of cooling the fluid.

7. 4. The vacuum tube support structure according to claim 3, wherein the fluid supply device has a temperature adjusting device capable of adjusting the temperature of the fluid.

8. A fluid ejection device is provided. The vacuum tube support structure of claim 1 , wherein the fluid ejector ejects the fluid from the fluid ejection portion.

9. The fluid discharge device has a pipe connected to the fluid discharge portion, The vacuum tube support structure of claim 8 , wherein the piping discharges the fluid from the fluid discharge portion.

10. 9. The vacuum tube support structure of claim 8, wherein the fluid ejection device comprises a fan for driving the fluid.

11. The vacuum tube support structure according to claim 1, A sensor that measures a physical quantity of an object to be measured by receiving electromagnetic waves irradiated from the vacuum tube to the object to be measured.

12. A sensor according to claim 11; a moving device that moves the sensor in a direction intersecting the moving direction of the object to be measured.

Citation Information

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