Pattern exposure device, device manufacturing method, and exposure device

Abstract

To solve the problem of generation of an XY direction difference in imaging characteristics of an edge part when an intensity distribution formed in a pupil Ep is anisotropic.SOLUTION: A pattern exposure device for projection and exposure of a substrate with light, includes: a spatial light modulation element having a plurality of micromirrors selectively driven on the basis of drawn data; an illumination unit for irradiating the spatial light modulation element with illumination light at a predetermined incident angle; and a projection unit for making reflected light from the spatial light modulation element incident thereon and projecting the incident reflected light on a substrate. The illumination unit includes: a condensing optical member which condenses light from a surface light source having a predetermined shape, and irradiates the spatial light modulation element the with light in a tilted manner, is arranged along an optical axis inclined at an incident angle relative to the optical axis of the projection unit, and optically conjugates the surface light source with the pupil of the projection unit; and a correction optical member which deforms the shape of the contour of the surface light source so as to correct that the contour of the image of the surface light source formed on the pupil of the projection unit is distorted into an oval shape according to the incident angle by reflected light from the micromirrors in an ON state of the spatial light modulation element.SELECTED DRAWING: Figure 31

Description

[Technical field]

[0001] The present invention relates to a pattern exposure apparatus that exposes a pattern for an electronic device, and a method for manufacturing an electronic device using such a pattern exposure apparatus, and an exposure apparatus. This application claims priority based on Japanese Patent Application No. 2021-111450, filed on July 5, 2021, the contents of which are incorporated herein by reference. [Background technology]

[0002] Conventionally, in the lithography process for manufacturing electronic devices (microdevices) such as liquid crystal or organic electroluminescence display panels and semiconductor elements (integrated circuits, etc.), step-and-repeat projection exposure equipment (so-called steppers) or step-and-scan projection exposure equipment (so-called scanning steppers (also called scanners)) have been used. This type of exposure equipment projects and exposes a mask pattern for electronic devices onto a photosensitive layer applied to the surface of an exposed substrate (hereinafter simply referred to as a substrate), such as a glass substrate, semiconductor wafer, printed wiring board, or resin film.

[0003] Since it takes time and money to fabricate a mask substrate on which the mask pattern is fixedly formed, an exposure apparatus using a spatial light modulation element (variable mask pattern generator) such as a digital mirror device (DMD) in which a number of micromirrors that are slightly displaced are regularly arranged instead of a mask substrate is known (see, for example, Patent Document 1). In the exposure apparatus disclosed in Patent Document 1, light from a light source 3 using a semiconductor laser with a wavelength of 405 nm or 365 nm is obliquely irradiated at an incidence angle of 22 to 26° onto a digital mirror device (DMD) as a spatial light modulator 4 via an irradiation optical system 6, and the reflected light from pixel mirrors that are in an on state among a number of pixel mirrors of the spatial light modulator 4 (DMD) is projected and exposed onto an exposure area of ​​an object W via a projection optical system 5.

[0004] In the case of Patent Document 1, the tilt angle of the pixel mirrors (micromirrors) of the DMD is set to 1 / 2 of the incident angle of the illumination light, which is 22 to 26°. Since the multiple pixel mirrors (micromirrors) are arranged in a matrix at a constant pitch, they also function as an optical diffraction grating (blazed diffraction grating). In particular, when projecting and exposing fine patterns for electronic devices, and when the illumination light is obliquely illuminated onto the DMD, the DMD's function as a diffraction grating (the direction in which the diffracted light is generated and the state of its intensity distribution) can degrade the imaging state of the pattern. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2018 / 088550 Summary of the Invention

[0006] According to a first aspect of the present invention, there is provided a pattern exposure apparatus comprising: a spatial light modulation element having a plurality of micromirrors selectively driven based on drawing data; an illumination unit which irradiates illumination light onto the spatial light modulation element at a predetermined angle of incidence; and a projection unit which receives reflected light from selected on-state micromirrors of the spatial light modulation element and projects it onto a substrate, and which projects and exposes a pattern corresponding to the drawing data onto the substrate, wherein the illumination unit collects light from a surface light source of a predetermined shape which serves as a source of the illumination light, and irradiates the spatial light modulation element at an angle, and further comprises a collecting optical element which is arranged along an optical axis inclined at the incident angle with respect to the optical axis of the projection unit and optically conjugates the surface light source with a pupil of the projection unit; and a correction optical element which deforms the shape of the contour of the surface light source so as to correct the contour of the image of the surface light source formed on the pupil of the projection unit by the reflected light from the on-state micromirrors of the spatial light modulation element being elliptical in accordance with the incident angle.

[0007] According to a second aspect of the present invention, there is provided a device manufacturing method for illuminating a spatial light modulation element having a plurality of micromirrors selectively driven based on drawing data of a pattern for an electronic device with illumination light from an illumination unit, and projecting and exposing reflected light from selected on-state micromirrors of the spatial light modulation element onto the substrate via a projection unit, thereby forming a pattern of the electronic device on the substrate, the device manufacturing method including the steps of: concentrating light from a surface light source of a predetermined shape generated in the illumination unit as the illumination light, and irradiating the spatial light modulation element at an oblique angle at a predetermined incidence angle; and deforming the shape of the contour of the surface light source so as to correct the elliptical distortion of the contour of an image of the surface light source formed on the pupil of the projection unit by the reflected light from the on-state micromirrors of the spatial light modulation element according to the incidence angle.

[0008] According to a third aspect of the present invention, there is provided an exposure apparatus comprising: a spatial light modulation element having a plurality of micromirrors; an illumination unit which irradiates illumination light onto the spatial light modulation element; and a projection unit which projects reflected light from the micromirrors of the spatial light modulation element in an on-state, wherein the illumination unit comprises a cylindrical lens and a focusing optical element which focuses light that has passed through the cylindrical lens and illuminates the spatial light modulation element. [Brief description of the drawings]

[0009] [Figure 1] 1 is a perspective view showing an outline of the external configuration of a pattern exposure apparatus EX according to the present embodiment. [Diagram 2] 13 is a diagram showing an example arrangement of projection areas IAn of the DMD 10 projected onto the substrate P by each projection unit PLU of a plurality of exposure module groups MU. [Diagram 3] 3 is a diagram for explaining the state of continuous exposure by each of four specific projection areas IA8, IA9, IA10, and IA27 in FIG. 2. FIG. [Figure 4] This is an optical layout diagram showing a specific configuration of two exposure modules MU18 and MU19 aligned in the X direction (scanning exposure direction) as viewed in the XZ plane. [Diagram 5] 1 is a diagram showing a schematic diagram of a state in which the DMD 10 and the illumination unit PLU are tilted by an angle θk in the XY plane. [Figure 6] 11A and 11B are diagrams for explaining in detail the imaging state of the micromirrors of the DMD 10 by the projection unit PLU. [Figure 7] 1 is a schematic diagram of an MFE lens 108A serving as an optical integrator 108, viewed from the light exit surface side. [Figure 8] 8 is a diagram showing a schematic example of the positional relationship between a point light source SPF formed on the exit surface side of a lens element EL of the MFE lens 108A in FIG. 7 and the exit ends of optical fiber bundles FBn. [Figure 9] 7 is a diagram showing a schematic view of a light source image formed on a pupil Ep of the projection unit PLU shown in FIG. 6. [Figure 10] FIG. 7 is a simplified optical path diagram of FIG. 6. [Figure 11] 2 is a diagram showing a schematic diagram of a light source image Ips formed on a pupil Ep by a component equivalent to zero-order light of an imaging light flux Sa from a DMD 10. FIG. [Figure 12] 7, this is a schematic diagram of an elliptical light source surface when MFE lens 108A of optical integrator 108 is viewed from the emission surface side. [Figure 13] 7 is a diagram showing a schematic diagram of the behavior of the imaging light beam Sa on the optical path from the pupil Ep of the projection unit PLU shown in FIG. 6 to the substrate P. FIG. [Figure 14] 1 is an enlarged perspective view showing the state of a micromirror Ms in a portion of the DMD 10 when the power supply to the drive circuit of the DMD 10 is turned off. [Figure 15] 1 is a perspective view showing an enlarged view of a portion of the mirror surface of the DMD 10 when the micromirror Ms of the DMD 10 is in the on state and the off state. [Figure 16] 1 shows a part of the mirror surface of DMD 10 as viewed in the X'Y' plane, illustrating a case where only one row of micromirrors Ms aligned in the Y' direction are in the ON state. [Figure 17] 17 is a diagram showing the mirror surface of DMD 10 of FIG. 16 as viewed along arrow aa' in the X'Z plane. [Figure 18] FIG. 17 is a diagram showing a schematic representation of an imaging state by a projection unit PLU of reflected light (imaging light beam) Sa from an isolated micromirror Msa as shown in FIG. 16, in the X'Z plane. [Figure 19] 1 is a graph showing a schematic point spread function Iea of ​​a diffraction image in a pupil Ep caused by regular reflected light Sa from an isolated micromirror Msa. [Figure 20] FIG. 13 is a diagram showing a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane, illustrating a case where multiple micromirrors Ms adjacent in the X' direction are simultaneously turned on. [Figure 21] 21 is a diagram showing the mirror surface of DMD 10 of FIG. 20 viewed along arrow aa' in the X'Z plane. [Figure 22] 22 is a graph showing an example of the distribution of angles θj of diffracted light Idj generated from the DMD 10 in the state shown in FIGS. 20 and 21. [Figure 23] 23 is a diagram showing a schematic representation of the intensity distribution of the imaging light beam at the pupil Ep when diffracted light is generated as in FIG. 22. FIG. [Figure 24] 1 is a diagram showing a state of a part of the mirror surface of DMD 10 when a line and space pattern is projected, as viewed in the X'Y' plane. [Diagram 25] Fig. 25 is a diagram showing the aa' arrow portion of the mirror surface of DMD 10 in Fig. 24 as viewed in the X'Z plane. Fig. 25 is a diagram showing a modified example of the distributor of the present embodiment. [Figure 26] 26 is a graph showing an example of the distribution of angles θj of diffracted light Idj generated from the DMD 10 in the state shown in FIGS. 24 and 25. [Figure 27] 27 is a diagram showing a schematic representation of the intensity distribution of the imaging light beam at the pupil Ep when diffracted light is generated as in FIG. 26. FIG. [Figure 28] 13 is a graph showing the results of a simulation of the contrast of an aerial image of a line and space pattern having a line width of 1 μm on the image plane. [Figure 29] 1 is a graph showing the relationship between wavelength λ and telecentric error Δθt obtained based on equation (2). [Diagram 30]7 is a diagram showing a specific configuration of an optical path from an optical fiber bundle FBn in the illumination unit ILU shown in FIG. 4 or FIG. 6 to an MFE 108A. FIG. [Diagram 31] 7 is a diagram showing a specific configuration of an optical path from an MFE 108A to a DMD 10 in the illumination unit ILU shown in FIG. 4 or FIG. 6. [Diagram 32] 13 is an exaggerated view showing the state of a point light source SPF formed on the exit surface side of MFE 108A when illumination light ILm incident on MFE 108A is tilted within the X'Z plane. FIG. [Diagram 33] FIG. 13 is a diagram showing a modified example of an illumination unit ILU in which a diffractive optical element (DOE) is used to make the surface light source formed on the exit surface side of MFE 108A elliptical. [Diagram 34] 13 is a diagram showing an optical arrangement according to a second modified example for forming an elliptical surface light source on the exit surface side of MFE 108A. FIG. [Diagram 35] 1 is a diagram showing a collection (surface light source) of multiple point light sources SPF formed on the exit surface side of MFE 108A as viewed in the +Z direction. [Diagram 36] 36 is a diagram showing a schematic arrangement of four fan-shaped regions of a surface light source when quadrupole illumination is performed by modifying the elliptical annular aperture of FIG. 35. FIG. [Figure 37] 1 is a diagram showing a schematic distribution of diffracted light generated by the array pitch of micromirrors Ms of DMD 10 on the plane of the pupil Ep of projection unit PLU. [Figure 38] 38 is a diagram showing a schematic representation of diffracted light that appears on the plane of the pupil Ep of the projection unit PLU when the wavelength λ and the maximum numerical aperture of the pupil Ep are changed as explained in FIG. 37. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] A pattern exposure apparatus (pattern forming apparatus) according to an aspect of the present invention will be described in detail below with reference to the accompanying drawings, showing preferred embodiments. Note that the aspects of the present invention are not limited to these embodiments, and include various modifications or improvements. That is, the components described below include those that a person skilled in the art can easily imagine, and those that are substantially the same, and the components described below can be combined as appropriate. Also, various omissions, substitutions, or modifications of the components can be made without departing from the gist of the present invention. Note that the same reference symbols are used for members and components that achieve the same or similar functions throughout the drawings and the following detailed description.

[0011] [Overall Configuration of Pattern Exposure Apparatus] FIG. 1 is a perspective view showing an outline of the external configuration of a pattern exposure apparatus (hereinafter, also simply referred to as an exposure apparatus) EX of this embodiment. The exposure apparatus EX is an apparatus that projects an exposure light, the intensity distribution of which is dynamically modulated in space by a spatial light modulation element (digital mirror device: DMD), onto an exposed substrate. In a specific embodiment, the exposure apparatus EX is a step-and-scan projection exposure apparatus (scanner) that uses a rectangular (square) glass substrate used in a display device (flat panel display) or the like as an exposure target. The glass substrate is a substrate P for a flat panel display, the length of at least one side or diagonal length of which is 500 mm or more, and the thickness of which is 1 mm or less. The exposure apparatus EX exposes a projected image of a pattern made by the DMD onto a photosensitive layer (photoresist) formed with a certain thickness on the surface of the substrate P. The substrate P that is carried out of the exposure apparatus EX after exposure is sent to a predetermined process step (film formation step, etching step, plating step, etc.) after a development step.

[0012] The exposure apparatus EX includes a stage device including a pedestal 2 mounted on active vibration isolation units 1a, 1b, 1c, and 1d (1d is not shown), a base plate 3 mounted on the pedestal 2, an XY stage 4A movable two-dimensionally on the base plate 3, a substrate holder 4B that holds a substrate P on a flat surface by suction on the XY stage 4A, and laser length measuring interferometers (hereinafter also simply referred to as interferometers) IFX, IFY1 to IFY4 that measure the two-dimensional movement position of the substrate holder 4B (substrate P). Such a stage device is disclosed, for example, in U.S. Patent Publication No. 2010 / 0018950 and U.S. Patent Publication No. 2012 / 0057140.

[0013] In FIG. 1, the XY plane of the Cartesian coordinate system XYZ is set parallel to the flat surface of the base 3 of the stage device, and the XY stage 4A is set so as to be able to move in translation within the XY plane. In this embodiment, the direction parallel to the X axis of the coordinate system XYZ is set as the scanning movement direction of the substrate P (XY stage 4A) during scanning exposure. The movement position of the substrate P in the X-axis direction is successively measured by the interferometer IFX, and the movement position in the Y-axis direction is successively measured by at least one (preferably two or more) of the four interferometers IFY1 to IFY4. The substrate holder 4B is configured so as to be able to move slightly in the Z-axis direction perpendicular to the XY plane relative to the XY stage 4A, and to be able to be slightly tilted in any direction relative to the XY plane, and focus adjustment and leveling (parallelism) adjustment between the surface of the substrate P and the imaging plane of the projected pattern are actively performed. Furthermore, the substrate holder 4B is configured to be capable of slight rotation (θz rotation) about an axis parallel to the Z axis in order to actively adjust the inclination of the substrate P in the XY plane.

[0014] The exposure apparatus EX further includes an optical base 5 that holds a plurality of exposure (drawing) module groups MU(A), MU(B), and MU(C), and main columns 6a, 6b, 6c, and 6d (6d is not shown) that support the optical base 5 from the pedestal 2. Each of the plurality of exposure module groups MU(A), MU(B), and MU(C) includes an illumination unit ILU that is attached to the +Z direction side of the optical base 5 and that receives illumination light from an optical fiber unit FBU, and a projection unit PLU that is attached to the -Z direction side of the optical base 5 and has an optical axis parallel to the Z axis. Each of the exposure module groups MU(A), MU(B), and MU(C) further includes a digital mirror device (DMD) 10 that serves as a light modulation unit that reflects illumination light from the illumination unit ILU in the -Z direction and causes it to enter the projection unit PLU. A detailed configuration of the exposure module group including the illumination unit ILU, the DMD 10, and the projection unit PLU will be described later.

[0015] A plurality of alignment systems (microscopes) ALG for detecting alignment marks formed at a plurality of predetermined positions on the substrate P are attached to the -Z direction side of the optical base 5 of the exposure apparatus EX. In order to confirm (calibrate) the relative positional relationship in the XY plane of each detection field of the alignment system ALG, to confirm (calibrate) the baseline error between each projection position of the pattern image projected from each projection unit PLU of the exposure module groups MU(A), MU(B), and MU(C) and the position of each detection field of the alignment system ALG, or to confirm the position and image quality of the pattern image projected from the projection unit PLU, a calibration reference unit CU is provided at the end of the substrate holder 4B in the -X direction. Although a part of the exposure module groups MU(A), MU(B), and MU(C) are not shown in FIG. 1, in this embodiment, nine modules are arranged at regular intervals in the Y direction, but the number of modules may be less than or more than nine.

[0016] 2 is a diagram showing an example of the arrangement of projection areas IAn of a digital mirror device (DMD) 10 projected onto a substrate P by each projection unit PLU of the exposure module groups MU(A), MU(B), and MU(C), and the orthogonal coordinate system XYZ is set to be the same as in FIG. 1. In this embodiment, the first row of exposure module groups MU(A), the second row of exposure module groups MU(B), and the third row of exposure module groups MU(C), which are spaced apart in the X direction, each comprise nine modules aligned in the Y direction. The exposure module group MU(A) comprises nine modules MU1 to MU9 arranged in the +Y direction, the exposure module group MU(B) comprises nine modules MU10 to MU18 arranged in the -Y direction, and the exposure module group MU(C) comprises nine modules MU19 to MU27 arranged in the +Y direction. The modules MU1 to MU27 all have the same configuration, and when the exposure module group MU(A) and the exposure module group MU(B) are opposed to each other in the X direction, the exposure module group MU(B) and the exposure module group MU(C) are opposed to each other in the X direction.

[0017] 2, the shape of the projection areas IA1, IA2, IA3, ..., IA27 (sometimes represented as IAn, where n is 1 to 27) by each of the modules MU1 to MU27 is, as an example, a rectangle extending in the Y direction with an aspect ratio of approximately 1:2. In this embodiment, as the substrate P is scanned and moved in the +X direction, seamless exposure is performed at the -Y direction end of each of the projection areas IA1 to IA9 in the first row and the +Y direction end of each of the projection areas IA10 to IA18 in the second row. Then, the areas on the substrate P that are not exposed by each of the projection areas IA1 to IA18 in the first and second rows are seamlessly exposed by each of the projection areas IA19 to IA27 in the third row. The center point of each of the projection areas IA1 to IA9 in the first row is located on a line k1 parallel to the Y axis, the center point of each of the projection areas IA10 to IA18 in the second row is located on a line k2 parallel to the Y axis, and the center point of each of the projection areas IA19 to IA27 in the third row is located on a line k3 parallel to the Y axis. The distance in the X direction between lines k1 and k2 is set to a distance XL1, and the distance in the X direction between lines k2 and k3 is set to a distance XL2.

[0018] Here, when the joint between the end of the projection area IA9 in the -Y direction and the end of the projection area IA10 in the +Y direction is OLa, the joint between the end of the projection area IA10 in the -Y direction and the end of the projection area IA27 in the +Y direction is OLb, and the joint between the end of the projection area IA8 in the +Y direction and the end of the projection area IA27 in the -Y direction is OLc, the state of the joint exposure will be described with reference to FIG. 3. In FIG. 3, the orthogonal coordinate system XYZ is set to be the same as in FIG. 1 and FIG. 2, and the coordinate system X'Y' in the projection areas IA8, IA9, IA10, IA27 (and all other projection areas IAn) is set to be inclined by an angle θk with respect to the X-axis and Y-axis (lines k1 to k3) of the orthogonal coordinate system XYZ. That is, the entire DMD10 is inclined by an angle θk in the XY plane so that the two-dimensional arrangement of the multiple micromirrors of the DMD10 becomes the coordinate system X'Y'.

[0019] The circular area including each of the projection areas IA8, IA9, IA10, and IA27 (and all other projection areas IAn) in FIG. 3 represents the circular image field PLf' of the projection unit PLU. At the joint OLa, the projection image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA9 in the -Y' direction is set to overlap with the projection image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA10 in the +Y' direction. At the joint OLb, the projection image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA10 in the -Y' direction is set to overlap with the projection image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA27 in the +Y' direction. Similarly, at the joint OLc, the projected images of the micromirrors arranged diagonally (at an angle θk) at the +Y'-direction end of the projection area IA8 and the projected images of the micromirrors arranged diagonally (at an angle θk) at the -Y'-direction end of the projection area IA27 are set to overlap.

[0020] [Configuration of lighting unit] FIG. 4 is an optical layout diagram of the specific configuration of the module MU18 in the exposure module group MU(B) and the module MU19 in the exposure module group MU(C) shown in FIG. 1 and FIG. 2, viewed in the XZ plane. The orthogonal coordinate system XYZ in FIG. 4 is set to be the same as the orthogonal coordinate system XYZ in FIG. 1 to FIG. 3. As is clear from the arrangement of each module in the XY plane shown in FIG. 2, the module MU18 is shifted by a certain distance in the +Y direction with respect to the module MU19, and is installed back-to-back. Since each optical member in the module MU18 and each optical member in the module MU19 are made of the same material and configured in the same way, the optical configuration of the module MU18 will be mainly described in detail here. The optical fiber unit FBU shown in FIG. 1 is composed of 27 optical fiber bundles FB1 to FB27 corresponding to each of the 27 modules MU1 to MU27 shown in FIG. 2.

[0021] The illumination unit ILU of the module MU18 is composed of a mirror 100 that reflects illumination light ILm traveling in the -Z direction from the output end of the optical fiber bundle FB18, a mirror 102 that reflects the illumination light ILm from the mirror 100 in the -Z direction, an input lens system 104 that acts as a collimator lens, an illuminance adjustment filter 106, an optical integrator 108 including a micro fly's eye (MFE) lens and a field lens, a condenser lens system 110, and an inclined mirror 112 that reflects the illumination light ILm from the condenser lens system 110 toward the DMD 10. The mirror 102, the input lens system 104, the optical integrator 108, the condenser lens system 110, and the inclined mirror 112 are arranged along an optical axis AXc that is parallel to the Z axis.

[0022] The optical fiber bundle FB18 is composed of one optical fiber line or a bundle of multiple optical fiber lines. The illumination light ILm irradiated from the output end of the optical fiber bundle FB18 (each of the optical fiber lines) is set to a numerical aperture (NA, also called a spread angle) such that the illumination light ILm is incident on the input lens system 104 at the subsequent stage without being vignetted. The position of the front focal point of the input lens system 104 is designed to be the same as the position of the output end of the optical fiber bundle FB18. Furthermore, the position of the back focal point of the input lens system 104 is set so that the illumination light ILm from a single or multiple point light sources formed at the output end of the optical fiber bundle FB18 is superimposed on the incident surface side of the MFE lens 108A of the optical integrator 108. Therefore, the incident surface of the MFE lens 108A is Koehler illuminated by the illumination light ILm from the output end of the optical fiber bundle FB18. In the initial state, the geometric center point of the output end of the optical fiber bundle FB18 in the XY plane is located on the optical axis AXc, and the chief ray (center line) of the illumination light ILm from the point light source at the output end of the optical fiber line is parallel to (or coaxial with) the optical axis AXc.

[0023] The illumination light ILm from the input lens system 104 is attenuated by an arbitrary value in the range of 0% to 90% by the illumination adjustment filter 106, and then passes through the optical integrator 108 (MFE lens 108A, field lens, etc.) and enters the condenser lens system 110. The MFE lens 108A is a two-dimensional array of rectangular microlenses with a side length of several tens of μm, and its overall shape is set to be approximately similar to the overall shape of the mirror surface of the DMD 10 (aspect ratio is approximately 1:2) in the XY plane. In addition, the position of the front focal point of the condenser lens system 110 is set to be approximately the same as the position of the exit surface of the MFE lens 108A. Therefore, each of the illumination lights from the point light sources formed on the exit side of each of the multiple microlenses of the MFE lens 108A is converted into approximately parallel light beams by the condenser lens system 110, reflected by the inclined mirror 112, and then superimposed on the DMD 10 to form a uniform illuminance distribution.

[0024] Since a surface light source in which a plurality of point light sources (light condensing points) are densely arranged two-dimensionally is generated on the exit surface of the MFE lens 108A, the MFE lens 108A functions as a surface light source member. As disclosed in Japanese Patent Application Laid-Open No. 2004-045885, for example, the MFE lens 108A may be configured by arranging two cylindrical micro fly's eye lens elements, each formed by arranging a plurality of cylindrical lenses, in the optical axis direction on each of the entrance surface side and exit surface side of the illumination light.

[0025] In the module MU18 shown in FIG. 4, the optical axis AXc, which is parallel to the Z axis and passes through the condenser lens system 110, is bent by the tilted mirror 112 and reaches the DMD 10, and the optical axis between the tilted mirror 112 and the DMD 10 is defined as the optical axis AXb. In this embodiment, the neutral plane including the center points of each of the multiple micromirrors of the DMD 10 is set parallel to the XY plane. Therefore, the angle between the normal to the neutral plane (parallel to the Z axis) and the optical axis AXb is the incident angle θα of the illumination light ILm to the DMD 10. The DMD 10 is attached to the lower side of a mount 10M fixed to a support column of the illumination unit ILU. In order to finely adjust the position and attitude of the DMD 10, for example, a fine movement stage that combines a parallel link mechanism and an expandable piezoelectric element as disclosed in International Patent Publication No. 2006 / 120927 is provided on the mount 10M.

[0026] Illumination light ILm irradiated to micromirrors in the On state among the micromirrors of DMD 10 is reflected in the X direction in the XZ plane so as to head towards the projection unit PLU. On the other hand, illumination light ILm irradiated to micromirrors in the Off state among the micromirrors of DMD 10 is reflected in the Y direction in the YZ plane so as not to head towards the projection unit PLU. As will be described in more detail later, the DMD 10 in this embodiment is of a roll and pitch drive type that switches between the On state and the Off state by tilting the micromirrors in the roll direction and the pitch direction.

[0027] A movable shutter 114 is removably provided in the optical path between the DMD 10 and the projection unit PLU to block reflected light from the DMD 10 during a non-exposure period. As shown on the module MU19 side, the movable shutter 114 is rotated to an angular position where it is removed from the optical path during an exposure period, and is rotated to an angular position where it is inserted obliquely into the optical path during a non-exposure period, as shown on the module MU18 side. A reflecting surface is formed on the DMD 10 side of the movable shutter 114, and the light from the DMD 10 reflected thereon is irradiated onto the light absorber 115. The light absorber 115 absorbs light energy in the ultraviolet wavelength range (wavelength of 400 nm or less) without re-reflecting it and converts it into heat energy. For this reason, the light absorber 115 is also provided with a heat dissipation mechanism (heat dissipation fins and a cooling mechanism). Although not shown in FIG. 4, the reflected light from the micromirrors of DMD 10, which are in the Off state during the exposure period, is absorbed by a similar light absorber (not shown in FIG. 4) installed in the Y direction (a direction perpendicular to the plane of the paper in FIG. 4) with respect to the optical path between DMD 10 and projection unit PLU.

[0028] [Configuration of the projection unit] The projection unit PLU attached to the underside of the optical base 5 is configured as a double-telecentric imaging projection lens system composed of a first lens group 116 and a second lens group 118 arranged along an optical axis AXa parallel to the Z axis. The first lens group 116 and the second lens group 118 are each configured to translate by a micro-movement actuator in a direction along the Z axis (optical axis AXa) relative to a support column fixed to the underside of the optical base 5. The projection magnification Mp of the imaging projection lens system composed of the first lens group 116 and the second lens group 118 is determined by the relationship between the array pitch Pd of the micromirrors on the DMD 10 and the minimum line width (minimum pixel dimension) Pg of the pattern projected into the projection area IAn (n=1 to 27) on the substrate P.

[0029] As an example, when the required minimum line width (minimum pixel dimension) Pg is 1 μm and the micromirror array pitch Pd is 5.4 μm, the projection magnification Mp is set to approximately 1 / 6, taking into consideration the tilt angle θk in the XY plane of the projection area IAn (DMD 10) described above in Figure 3. The imaging projection lens system consisting of lens groups 116 and 118 inverts / reverses a reduced image of the entire mirror surface of DMD 10 and images it on the projection area IA18 (IAn) on the substrate P.

[0030] The first lens group 116 of the projection unit PLU can be moved slightly in the direction of the optical axis AXa by an actuator to fine-tune (on the order of ±several tens of ppm) the projection magnification Mp, and the second lens group 118 can be moved slightly in the direction of the optical axis AXa by an actuator to quickly adjust the focus. Furthermore, in order to measure the position change in the Z-axis direction of the surface of the substrate P with an accuracy of submicron or less, a plurality of focus sensors 120 of the oblique incidence type are provided below the optical table 5. The plurality of focus sensors 120 measure the overall position change in the Z-axis direction of the substrate P, the position change in the Z-axis direction of partial areas on the substrate P corresponding to each of the projection areas IAn (n=1 to 27), or a partial tilt change of the substrate P, etc.

[0031] As explained above in FIG. 3, the illumination unit ILU and projection unit PLU described above require that the projection area IAn be tilted by an angle θk in the XY plane, so the DMD 10 and illumination unit PLU in FIG. 4 (at least the optical path portion from mirror 102 to mirror 112 along the optical axis AXc) are positioned so that they are tilted overall by an angle θk in the XY plane.

[0032] 5 is a diagram showing a schematic diagram of the state in which the DMD 10 and the illumination unit PLU are tilted by an angle θk in the XY plane. In FIG. 5, the Cartesian coordinate system XYZ is the same as the coordinate systems XYZ in FIG. 1 to FIG. 4, and the array coordinate system X'Y' of the micromirrors Ms of the DMD 10 is the same as the coordinate system X'Y' shown in FIG. 3. The circle containing the DMD 10 is the image field PLf on the object side of the projection unit PLU, and the optical axis AXa is located at the center of the circle. On the other hand, the optical axis AXb obtained by bending the optical axis AXc that passes through the condenser lens system 110 of the illumination unit ILU by the tilt mirror 112 is arranged so as to be tilted by an angle θk from the line Lu parallel to the X-axis when viewed in the XY plane.

[0033] [Imaging optical path using DMD] Next, the imaging state of the micromirror Ms of the DMD 10 by the projection unit PLU (imaging projection lens system) will be described in detail with reference to Fig. 6. The Cartesian coordinate system X'Y'Z in Fig. 6 is the same as the coordinate system X'Y'Z shown in Figs. 3 and 5, and Fig. 6 illustrates the optical path from the condenser lens system 110 of the illumination unit ILU to the substrate P. Illumination light ILm from the condenser lens system 110 travels along the optical axis AXc, is totally reflected by the inclined mirror 112, and reaches the mirror surface of the DMD 10 along the optical axis AXb. Here, the micromirror Ms located at the center of the DMD 10 is Msc, and the micromirrors Ms located on the periphery are Msa, and it is assumed that these micromirrors Msc and Msa are in the On state.

[0034] If the tilt angle of the micromirror Ms in the On state is, for example, 17.5° as a standard value with respect to the X'Y' plane (XY plane), the incidence angle θα (angle from the optical axis AXb to the optical axis AXa) of the illumination light ILm irradiated to the DMD 10 is set to 35.0° in order to make the chief rays of the reflected light Sc and Sa from each of the micromirrors Msc and Msa parallel to the optical axis AXa of the projection unit PLU. Therefore, in this case, the reflecting surface of the tilted mirror 112 is also disposed tilted by 17.5° (=θα / 2) with respect to the X'Y' plane (XY plane). The chief ray Lc of the reflected light Sc from the micromirror Msc is coaxial with the optical axis AXa, the chief ray La of the reflected light Sa from the micromirror Msa is parallel to the optical axis AXa, and the reflected light Sc and Sa enter the projection unit PLU with a predetermined numerical aperture (NA).

[0035] The reflected light Sc forms a telecentric image ic of the micromirror Msc at the projection magnification Mp of the projection unit PLU on the substrate P at the position of the optical axis AXa. Similarly, the reflected light Sa forms a telecentric image ia of the micromirror Msa at a position away from the reduced image ic in the +X' direction on the substrate P at the projection magnification Mp of the projection unit PLU. As an example, the first lens system 116 of the projection unit PLU is composed of three lens groups G1, G2, and G3, and the second lens system 118 is composed of two lens groups G4 and G5. An exit pupil (also simply called a pupil) Ep is set between the first lens system 116 and the second lens system 118. At the position of the pupil Ep, a light source image of the illumination light ILm (a collection of multiple point light sources formed on the exit surface side of the MFE lens 108A) is formed, forming a Koehler illumination configuration. The pupil Ep is also called the aperture of the projection unit PLU, and the size (diameter) of the aperture is one of the factors that determine the resolving power of the projection unit PLU.

[0036] The specularly reflected light from the micromirror Ms of the DMD10 in the On state is set to pass through without being blocked at the maximum aperture (diameter) of the pupil Ep, and the numerical aperture NAi on the image side (substrate P side) in the equation R=k1·(λ / NAi), which expresses the resolution R, is determined by the maximum aperture of the pupil Ep and the distance of the rear (image side) focal point of the projection unit PLU (lens group G1-G5 as an imaging projection lens system). In addition, the numerical aperture NAo on the object surface (DMD10) side of the projection unit PLU (lens group G1-G5) is expressed as the product of the projection magnification Mp and the numerical aperture NAi, and when the projection magnification Mp is 1 / 6, NAo=NAi / 6.

[0037] In the configuration of the illumination unit ILU and projection unit PLU shown in FIG. 6 and FIG. 4, the exit end of the optical fiber bundle FBn (n=1 to 27) connected to each module MUn (n=1 to 27) is set to an optically conjugate relationship with the exit end side of the MFE lens 108A of the optical integrator 108 by the input lens system 104, and the entrance end side of the MFE lens 108A is set to an optically conjugate relationship with the center of the mirror surface (neutral surface) of the DMD 10 by the condenser lens system 110. As a result, the illumination light ILm irradiated onto the entire mirror surface of the DMD 10 has a uniform illuminance distribution (for example, intensity unevenness within ±1%) due to the action of the optical integrator 108. In addition, the exit end side of the MFE lens 108A and the surface of the pupil Ep of the projection unit PLU are set to an optically conjugate relationship with the condenser lens system 110 and the lens groups G1 to G3 of the projection unit PLU.

[0038] 7 is a schematic diagram of the MFE lens 108A of the optical integrator 108 as viewed from the exit surface side. The MFE lens 108A is configured by closely arranging a plurality of lens elements EL, each having a rectangular cross section extending in the Y' direction in the X'Y' plane, in the X' and Y' directions, whose cross-sectional shape is similar to the shape of the entire mirror surface (image forming area) of the DMD 10. The illumination light ILm from the input lens system 104 shown in FIG. 4 is irradiated onto the entrance surface side of the MFE lens 108A in a substantially circular irradiation area Ef. The irradiation area Ef has a shape similar to each exit end of a single or multiple optical fiber lines of the optical fiber bundle FB18 (FBn) in FIG. 4, and is a circular area centered on the optical axis AXc in terms of design.

[0039] Among the multiple lens elements EL of the MFE lens 108A, on the exit surface side of each lens element EL located within the irradiation area Ef, point light sources SPF created by illumination light ILm from the exit end of the optical fiber bundle FB18 (FBn) are densely distributed within an approximately circular area. Also, the circular area APh in Fig. 7 represents the aperture range when an aperture stop having a circular opening is provided on the exit surface side of the MFE lens 108A. The actual illumination light ILm is created by multiple point light sources SPF scattered within the circular area APh, and light from point light sources SPF outside the circular area APh is blocked.

[0040] Figures 8(A), (B), and (C) are schematic diagrams showing an example of the positional relationship between a point light source SPF formed on the output surface side of the lens element EL of the MFE lens 108A in Figure 7 and the output end of the optical fiber bundle FBn. The coordinate system X'Y' in each of Figures 8(A), (B), and (C) is the same as the coordinate system X'Y' set in Figure 7. Figure 8(A) shows a case where the optical fiber bundle FBn is a single optical fiber line, Figure 8(B) shows a case where two optical fiber lines are arranged in the X' direction as the optical fiber bundle FBn, and Figure 8(C) shows a case where three optical fiber lines are arranged in the X' direction as the optical fiber bundle FBn.

[0041] Since the output end of the optical fiber bundle FBn and the output surface of the MFE lens 108A (lens element EL) are set to have an optically conjugate relationship (imaging relationship), when the optical fiber bundle FBn is a single optical fiber line, a single point light source SPF is formed at the center position of the output surface side of the lens element EL as shown in Fig. 8(A). When two optical fiber lines are bundled in the X' direction as the optical fiber bundle FBn, the geometric center of the two point light sources SPF is formed to be at the center position of the output surface side of the lens element EL as shown in Fig. 8(B). Similarly, when three optical fiber lines are bundled in the X' direction as the optical fiber bundle FBn, the geometric center of the three point light sources SPF is formed to be at the center position of the output surface side of the lens element EL as shown in Fig. 8(C).

[0042] In addition, if the power of the illumination light ILm from the optical fiber bundle FBn is large and the point light source SPF is focused on the exit surface of each lens element EL of the MFE lens 108A as a surface light source member or optical integrator, each lens element EL may be damaged (clouded, burned, etc.). In that case, the focusing position of the point light source SPF may be set in a space slightly shifted outward from the exit surface of the MFE lens 108A (exit surface of the lens element EL). A configuration in which the position of the point light source (light focusing point) is shifted outward from the lens element in this way in an illumination system using a fly's eye lens is disclosed in, for example, U.S. Patent No. 4,939,630.

[0043] Fig. 9 is a schematic diagram showing the state of a light source image Ips formed on the pupil Ep in the second lens system 118 of the projection unit PL in Fig. 6 when the entire mirror surface of the DMD 10 is assumed to be a single plane mirror and the plane mirror is tilted by an angle θα / 2 so as to be parallel to the inclined mirror 112 in Fig. 6. The light source image Ips shown in Fig. 9 is a re-image of a plurality of point light sources SPF (which become a surface light source gathered in a substantially circular shape) formed on the exit surface side of the MFE lens 108A. In this case, no diffracted light or scattered light is generated from the single plane mirror arranged in place of the DMD 10, and only a light source image Ips consisting of only specularly reflected light (zeroth-order light) is generated in the center of the pupil Ep coaxially with the optical axis AXa.

[0044] 9, when the radius corresponding to the maximum aperture of the pupil Ep is re and the radius corresponding to the effective diameter of the light source image Ips as a surface light source is ri, the σ value representing the size (area) of the light source image Ips relative to the size (area) of the pupil Ep is σ=ri / re. The σ value may be changed as appropriate to improve the line width or density of the pattern to be projected and exposed, or the depth of focus (DOF). The σ value can be changed by providing a variable aperture stop at the position on the exit surface side of the MFE lens 108A, or at the position of the pupil Ep between the first lens system 116 and the second lens system 118 (in a conjugate relationship with the circular area APh in FIG. 7).

[0045] In this type of exposure apparatus EX, the pupil Ep of the projection unit PLU is often used at its maximum diameter, so the σ value is changed mainly by a variable aperture diaphragm provided on the exit surface side of the MFE lens 108A. In that case, the radius ri of the light source image Ips is defined by the radius of the circular area APh in Fig. 7. Of course, a variable aperture diaphragm may be provided in the pupil Ep of the projection unit PLU to adjust the σ value and depth of focus (DOF).

[0046] However, when the neutral plane of the DMD 10 is made perpendicular to the optical axis AXa of the projection unit PLU and the illumination light ILm is set at a relatively large angle of incidence θα (for example, θα≧20°), it has been found that the intensity distribution at the pupil Ep of the imaging light flux due to the light reflected from the micromirror Msa (or Msc) of the DMD 10 in the on state does not become the distribution of the light source image Ips defined by a circular contour as in Fig. 9, but becomes elliptical. This will be explained with reference to Fig. 10.

[0047] FIG. 10 is a simplified optical path diagram of FIG. 6, and the Cartesian coordinate system X'Y'Z is set to be the same as in FIG. 6. Also, for simplicity of explanation, the tilt mirror 112 shown in FIG. 6 is omitted. In FIG. 10, the tilt angle θd of the micromirror Msa of the DMD 10 in the on state is set to a design value of 17.5° with respect to the neutral plane Pcc. Therefore, the angle between the optical axis AXb passing through the MFE lens 108A and the condenser lens system 110 and the optical axis AXa of the projection unit PLU, i.e., the incidence angle θα, is set to 35° in the X'Z plane.

[0048] Of the multiple point light sources SPF formed on the exit side of MFE 108A, illumination light ILma, ILmb from two point light sources SPFa, SPFb located on the outermost periphery of circular area APh shown in Fig. 7 within a plane parallel to the X'Z plane including optical axis AXb illuminates the entire DMD 10 by condenser lens system 110. Central rays LLa, LLb of illumination light ILma, ILmb are parallel to optical axis AXb until they enter condenser lens system 110. Therefore, when the surface light source (a collection of point light sources SPF) on the exit side of MFE 108A is viewed from the DMD 10 side, its shape is a circle CL1.

[0049] Here, assuming that all of the reflecting surfaces of the multiple micromirrors of the DMD 10 are parallel to the neutral plane Pcc, the illumination light ILma, ILmb travel as regular reflected light along an optical axis AXb' inclined at an angle (-θα) symmetrical to the optical axis AXb with respect to the optical axis AXa. Here, assume that the principal surface of the first lens group 116 of the projection unit PLU and the principal surface of the condenser lens system 110 are located on an arc Prr centered on the intersection of the neutral plane Pcc of the DMD 10 and the optical axis AXa. When viewed from the side indicated by the arrow Arw1, the regular reflected light traveling along the optical axis AXb' appears as a circle CL2 similar to the surface light source (a collection of point light sources SPF) on the exit side of the MFE 108A.

[0050] However, when viewed from the side of the arrow Arw2 parallel to the optical axis AXa of the projection unit PLU, the regular reflected light traveling along the optical axis AXb' looks like an ellipse CL2' because it sees the circular surface light source (a collection of point light sources SPF) on the exit side of the MFE 108A at an angle. On the other hand, when projecting a pattern by driving the DMD 10, the reflected light (and diffracted light) generated from many micromirrors Msa in the ON state becomes an imaging light beam Sa' and enters the first lens group 116 of the projection unit PLU. Since the first lens group 116 and the condenser lens system 110 are arranged along separate optical axes AXa and AXb, which are inclined by an angle θα, when the intensity distribution of the component equivalent to zero-order light (distribution of the image of the point light source SPF) of the imaging light beam Sa' generated from the micromirrors Msa in the ON state of the DMD 10 is viewed on the pupil Ep, it looks like an ellipse CL3 because it sees the circular surface light source on the exit side of the MFE 108A at an angle.

[0051] When the distribution of the surface light source on the exit surface side of the MFE108A is a perfect circle centered on the optical axis AXb, the intensity distribution of the ellipse CL3 of the imaging light beam Sa' (component equivalent to zero-order light) formed on the pupil Ep of the projection unit PLU is compressed in the incident direction of the illumination light ILm when viewed in the X'Y' plane. Since the incident direction of the illumination light ILm to the DMD10 is the X' direction in the X'Y' plane, the major axis of the intensity distribution of the ellipse CL3 is parallel to the Y' axis, and the minor axis is parallel to the X' axis. If the dimension of the major axis of the intensity distribution of the ellipse CL3 is Uy' and the dimension of the minor axis is Ux', the ratio Ux' / Uy' of the ellipse is cosθα depending on the incident angle θα of the illumination light ILm. Since the incident angle θα is twice the tilt angle θd of the micromirror Msa of the DMD10 in the on state, the ratio Ux' / Uy' may be set to cos(2·θd). When the incidence angle θα is set to 35°, the ratio Ux' / Uy' is approximately 0.82.

[0052] FIG. 11 is a diagram that, like FIG. 9, shows a schematic diagram of a light source image Ips formed on the pupil Ep by the zeroth-order equivalent component having the highest intensity among the imaging light beams Sa from the DMD 10. The light source image Ips (ellipse CL3) has the same radial dimension in the Y' direction as that of FIG. 9, but has a radial dimension in the X' direction with a radius ri' that is approximately 0.82 times smaller than the radius ri. In this way, when the intensity distribution (distribution of the light source image Ips) formed on the pupil Ep by the zeroth-order equivalent component of the imaging light beam Sa is anisotropic, the imaging characteristics of the edge portion may differ depending on the direction of the edge of the pattern projected on the substrate P via the projection unit PLU in the X'Y' plane (i.e., in the XY plane). For this reason, it is generally desirable to make the intensity distribution formed on the pupil Ep by the zeroth-order equivalent component of the imaging light beam Sa an isotropic circular shape.

[0053] Therefore, in this embodiment, the circular region APh of the aperture shape of the aperture stop provided on the exit surface side of the MFE 108A described in FIG. 7 above is transformed into an elliptical region APh' with the major axis in the X' direction and the minor axis in the Y' direction as shown in FIG. 12. FIG. 12 is a schematic diagram of the MFE lens 108A of the optical integrator 108 as seen from the exit surface side, similar to FIG. 7. The elliptical region APh' is obtained by rotating the ellipse CL3 of the light source image Ips formed on the pupil Ep of the projection unit PLU by 90° in the X'Y' plane. Furthermore, the ellipse ratio (minor axis dimension / major axis dimension) of the elliptical region APh' is set to cosθα, which is the same as the ratio of the ellipse CL3 shown in FIG. 10.

[0054] In this way, by making the effective overall shape (contour) of the surface light source (a collection of point light sources SPF) formed on the exit surface side of the MFE lens 108A elliptical, the intensity distribution (light source image Ips) of the zeroth order light equivalent component of the imaging light beam Sa' formed on the pupil Ep of the projection unit PLU can be made circular, and the imaging characteristics (especially the edge contrast characteristics) can be made uniform regardless of the direction in which the edge of the pattern extends within the X'Y' plane (within the XY plane).

[0055] [Telecentric error during projection exposure] Next, a telecentric error that may occur in the exposure apparatus EX using the DMD 10 as in this embodiment will be described. Before that, one of the factors that cause the telecentric error will be briefly described with reference to FIG. 13. FIGS. 13(A) and 13(B) are diagrams that show the behavior of the imaging light beam Sa on the optical path from the pupil Ep shown in FIG. 6 to the substrate P via the second lens group 118. The orthogonal coordinate system X'Y'Z in FIGS. 13(A) and 13(B) is the same as the coordinate system X'Y'Z in FIG. 6. For the sake of simplicity, it is assumed here that the entire mirror surface of the DMD 10 is a single plane mirror that is inclined by an angle θα / 2 in parallel with the inclined mirror 112 in FIG. 6. In FIGS. 13(A) and 13(B), lens groups G4 and G5 are arranged along the optical axis AXa between the pupil Ep and the substrate P, and an elliptical light source image (surface light source image) Ips is formed in the pupil Ep as shown in FIG. 11. The principal ray of the reflected light (imaging light flux) Sa that passes through one point on the periphery in the X' direction of the light source image (surface light source image) Ips and enters the lens groups G4 and G5 is denoted by La.

[0056] 13A shows the behavior of the reflected light (imaging light flux) Sa when the center (or center of gravity) of the light source image (surface light source image) Ips is accurately positioned at the center of the pupil Ep, and the chief rays La of the reflected light (imaging light flux) Sa directed toward a point in the projection area IAn on the substrate P are all parallel to the optical axis AXa, and the imaging light flux projected onto the projection area IAn is in a telecentric state, that is, the telecentric error is zero. In contrast, FIG. 13B shows the behavior of the reflected light (imaging light flux) Sa when the center (or center of gravity) of the light source image (surface light source image) Ips is shifted laterally by ΔDx in the X' direction from the center of the pupil Ep. In this case, the chief rays La of the reflected light (imaging light flux) Sa directed toward a point in the projection area IAn on the substrate P are all inclined by Δθt with respect to the optical axis AXa. The amount of inclination Δθt becomes a telecentric error, and as the amount of inclination Δθt (that is, the amount of lateral shift ΔDx) becomes larger than a predetermined allowable value, the imaging condition of the pattern image projected onto the projection area IAn deteriorates.

[0057] [DMD Configuration] As described above, the DMD 10 used in this embodiment is a roll and pitch drive type, and its specific configuration will be described with reference to Figs. 14 and 15. Figs. 14 and 15 are perspective views showing an enlarged view of a part of the mirror surface of the DMD 10. Here, the Cartesian coordinate system X'Y'Z is the same as the coordinate system X'Y'Z in Fig. 6. Fig. 14 shows a state when the power supply to the drive circuit provided in the lower layer of each micromirror Ms of the DMD 10 is turned off. When the power is turned off, the reflecting surface of each micromirror Ms is set parallel to the X'Y' plane. Here, the arrangement pitch of each micromirror Ms in the X' direction is Pdx (μm) and the arrangement pitch in the Y' direction is Pdy (μm), but in practice, Pdx=Pdy is set.

[0058] FIG. 15 shows a state where the power supply to the drive circuit is turned on and the micromirrors Msa in the on state and the micromirrors Msb in the off state are mixed. In this embodiment, the micromirror Msa in the on state is driven to tilt at an angle θd (=θα / 2) from the X'Y' plane around a line parallel to the Y' axis, and the micromirror Msb in the off state is driven to tilt at an angle θd (=θα / 2) from the X'Y' plane around a line parallel to the X' axis. The illumination light ILm is irradiated to each of the micromirrors Msa and Msb along the principal ray Lp parallel to the X'Z plane (parallel to the optical axis AXb shown in FIG. 6). The line Lx' in FIG. 15 is a projection of the principal ray Lp onto the X'Y' plane and is parallel to the X' axis.

[0059] The angle of incidence θα of illumination light ILm on DMD 10 is the tilt angle with respect to the Z axis in the X'Z plane, and from the viewpoint of geometrical optics, the micromirror Msa in the ON state, tilted in the X' direction by an angle θα / 2, generates reflected light (imaging light beam) Sa that travels in the -Z direction, nearly parallel to the Z axis. On the other hand, the reflected light Sg reflected by the micromirror Msb in the OFF state is generated in the -Z direction, non-parallel to the Z axis, because the micromirror Msb is tilted in the Y' direction. In Figure 15, if the line Lv is a line parallel to the Z axis (optical axis AXa) and the line Lh is a projection of the chief ray of the reflected light Sg onto the X'Y' plane, the reflected light Sg travels in an inclined direction in the plane including the lines Lv and Lh.

[0060] [Image formation by DMD] In projection exposure using the DMD 10, the multiple micromirrors Ms are each switched between an ON-state tilt and an OFF-state vertical tilt at high speed based on pattern data (drawing data) in the operation shown in Fig. 15, while the substrate P is scanned and moved in the X direction at a speed corresponding to the switching speed, to perform pattern exposure. However, depending on the fineness, density, or periodicity of the projected pattern, the telecentricity of the imaging light beam projected from the projection unit PLU (first lens group 116 and second lens group 118) to the substrate P may change. This is because the mirror surface of the DMD 10 acts as a reflective diffraction grating (blazed diffraction grating) depending on the tilt state of the multiple micromirrors Ms of the DMD 10 according to the pattern.

[0061] FIG. 16 is a diagram showing a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and FIG. 17 is a diagram showing the a-a' arrow portion of the mirror surface of the DMD 10 in FIG. 16 as viewed in the X'Z plane. In FIG. 16, among the multiple micromirrors Ms, only the micromirrors Ms arranged in a line in the Y' direction are micromirrors Msa in the on state, and the other micromirrors Ms are micromirrors Msb in the off state. The inclined state of the micromirrors Ms as shown in FIG. 16 appears when an isolated line pattern with a line width of the resolution limit (for example, about 1 μm) is projected. In the X'Y' plane, the reflected light (imaging light beam) Sa from the micromirror Msa in the on state is generated in the -Z direction parallel to the Z axis, and the reflected light Sg from the micromirror Msb in the off state is generated in the -Z direction but tilted in the direction along the line Lh in FIG. 11.

[0062] In this case, as shown in FIG. 17, only one of the micromirrors Ms arranged in the X' direction is an on-state micromirror Msa tilted at an angle θd (=θα / 2) around a line parallel to the Y' axis with respect to the neutral plane Pcc (a plane parallel to the X'Y' plane that includes the center points of all the micromirrors Ms). Therefore, when viewed in the X'Z plane, the reflected light (imaging light beam) Sa generated from the on-state micromirror Msa becomes a simple regular reflected light that does not contain diffracted light of the first or higher order, and its chief ray La is parallel to the optical axis AXa and enters the projection unit PLU. The reflected light Sg from the other off-state micromirrors Msb does not enter the projection unit PLU. Note that when the on-state micromirror Msa is an isolated one in the X' direction (or a row arranged in the Y' direction), the chief ray La of the reflected light (imaging light beam) Sa is parallel to the optical axis AXa regardless of the wavelength λ of the illumination light ILm.

[0063] FIG. 18 is a schematic diagram showing the imaging state of the reflected light (imaging light beam) Sa from the isolated micromirror Msa as shown in FIG. 17 by the projection unit PLU in the X'Z plane. In FIG. 18, the same reference numerals are used for the members having the same functions as those described in FIG. 6. Since the projection unit PLU (lens groups G1 to G5) is a double-telecentric reduction projection system, if the chief ray La of the reflected light (imaging light beam) Sa from the isolated micromirror Msa is parallel to the optical axis AXa, the chief ray La of the reflected light (imaging light beam) Sa imaged as a reduced image ia is also parallel to the perpendicular line (optical axis AXa) to the surface of the substrate P, and no telecentric error occurs. Note that the numerical aperture NAo of the reflected light (imaging light beam) Sa on the object surface side (DMD10) of the projection unit PLU shown in FIG. 18 is equal to the numerical aperture of the illumination light ILm.

[0064] 11 (or 9) and 13(A), when the DMD 10 is a single large plane mirror tilted by an angle θα / 2, the center (center of gravity) of the light source image (surface light source image) Ips formed on the pupil Ep of the projection unit PLU passes through the optical axis AXa. Similarly, when only the specular reflected light Sa from an isolated micromirror Msa in the mirror surface of the DMD 10 is incident on the projection unit PLU, the point spread function of the light flux Isa at the position of the pupil Ep (Fourier transform plane) of the specular reflected light Sa is expressed as a sinc2 function (point spread function of a rectangular aperture) centered on the optical axis AXa because the reflecting surface of the micromirror Ms is a minute rectangle (square).

[0065] Fig. 19 is a graph showing a schematic representation of a theoretical point spread function Iea (distribution produced by a light beam from one point light source SPF shown in Figs. 7 and 8) of a light beam (here, zeroth-order diffracted light) Isa in a pupil Ep due to reflected light Sa from a single row (or single unit) of micromirrors Msa isolated in the X' direction. In the graph of Fig. 19, the horizontal axis represents the coordinate position in the X' (or Y') direction taken as the position of the optical axis AXa, and the vertical axis represents light intensity Ie. The point spread function Iea is expressed by the following equation (1):

[0066]

number

[0067] In this formula (1), Io represents the peak value of the light intensity Ie, and the position of the peak value Io due to the reflected light Sa from an isolated row (or a single unit) of micromirrors Msa coincides with the origin 0 in the X' (or Y') direction, that is, the position of the optical axis AXa. As described above in FIG. 12, when the shape of the surface light source formed on the exit surface side of the MFE 108A is adjusted to an elliptical region APh, the position ±ra in the X' (or Y') direction of the first dark line where the light intensity Ie of the point spread distribution Iea first becomes the minimum value (0) from the origin 0 roughly corresponds to the position of the radius ri of the light source image Ips described above in FIG. 9. Note that the actual intensity distribution in the pupil Ep is obtained by convoluting the point spread distribution Iea over the spread range (σ value) of the light source image Ips shown in FIG. 9, and has a roughly uniform intensity.

[0068] Next, a case where the width of the projected pattern in the X' direction (X direction) is sufficiently large will be described with reference to Figs. 20 and 21. Fig. 20 is a diagram showing a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and Fig. 21 is a diagram showing the a-a' arrow portion of the mirror surface of the DMD 10 in Fig. 20 as viewed in the X'Z plane. Fig. 20 shows a case where all of the multiple micromirrors Ms shown in Fig. 16 above become micromirrors Msa in the on state. Fig. 20 shows only an arrangement of nine micromirrors Ms in the X' direction and ten micromirrors Ms in the Y' direction, but there are also cases where more than this number of adjacent micromirrors Ms (or all of the micromirrors Ms on the DMD 10) are in the on state.

[0069] 20 and 21, from multiple micromirrors Msa in the on state that are adjacently arranged in the X' direction, reflected light Sa' is generated at a slight inclination from the optical axis AXa due to diffraction. If the mirror surface of DMD 10 in the state of Fig. 21 is considered as a diffraction grating arranged in the X' direction along the neutral plane Pcc with a pitch Pdx, the generation angle θj of the diffracted light is expressed as the following formula (2) or formula (3), where j is the order (j=0, 1, 2, 3, ...), λ is the wavelength, and θα is the angle of incidence of the illumination light ILm.

[0070]

number

[0071]

number

[0072] FIG. 22 is a graph showing the distribution of the angle θj of the diffracted light Idj calculated assuming that the incident angle θα of the illumination light ILm (the inclination angle of the principal ray Lp of the illumination light ILm with respect to the optical axis AXa) is 35.0°, the inclination angle θd of the micromirror Msa in the on state is 17.5°, the pitch Pdx of the micromirror Msa is 5.4 μm, and the wavelength λ is 355.0 nm. As shown in FIG. 22, since the incident angle θα of the illumination light ILm is 35°, the 0th order diffracted light Id0 (j=0) is inclined at +35° with respect to the optical axis AXa, and the angle θj with respect to the 0th order diffracted light Id0 increases as the diffraction order increases. The numerical values ​​shown in the lower part of FIG. 22 represent the order j in parentheses and the inclination angle of the diffracted light Idj of each order from the optical axis AXa.

[0073] In the case of the numerical conditions in Fig. 22, the inclination angle of the ninth-order diffracted light Id9 from the optical axis AXa is the smallest, at approximately -1.04°. Therefore, when the micromirrors Ms of the DMD 10 are densely packed and turned on as in Figs. 20 and 21, the center of the intensity distribution of the imaging light beam (Sa') in the pupil EP of the projection unit PLU is decentered to a position shifted laterally by an amount equivalent to an angle of -1.04° from the position of the optical axis AXa (corresponding to the amount of lateral shift ΔDx shown in Fig. 13(B) above). The actual distribution of the imaging light beam in the pupil Ep is calculated by multiplying the diffracted light distribution expressed by equation (2) or (3) by the sinc 2 It can be calculated by performing convolution integral (convolution operation) using a function.

[0074] FIG. 23 is a diagram schematically showing the intensity distribution of the imaging light beam Sa' at the pupil Ep in the state of the generated diffracted light as shown in FIG. 22. The horizontal axis in FIG. 23 represents the value obtained by converting the angle θj of the diffracted light Idj into the numerical aperture NAo on the object plane (DMD10) side and the numerical aperture NAi on the image plane (substrate P) side when the projection magnification Mp of the projection unit PLU is 1 / 6. Also, it is assumed that the numerical aperture NAi on the image plane side of the projection unit PLU is 0.3 (numerical aperture NAo on the object plane side = 0.05). In this case, the resolution (minimum resolvable line width) Rs is expressed as Rs = k1(λ / NAi) using the process constant k1 (0 < k1 ≦ 1).

[0075] Therefore, when the wavelength λ = 355.0 nm and k1 = 0.7, the resolution Rs is about 0.83 μm. The pitch Pdx (Pdy) of the micromirror Ms is reduced by the projection magnification Mp = 1 / 6 on the image plane (substrate P) side to 0.9 μm. Therefore, if the projection unit PLU has a numerical aperture NAi on the image plane side of 0.3 or more (numerical aperture NAo on the object plane side of 0.05 or more), one projected image of the on-state micromirror Msa can be imaged with high contrast.

[0076] In FIG. 23, the angle θe from the optical axis AXa in the X' direction with the numerical aperture NAo on the object plane side, which is the maximum aperture of the pupil Ep of the projection unit PLU, is θe ≒ ±2.87° from NAo = sinθe. As shown in FIG. 22 above, the inclination angle -1.04° (accurately, -1.037°) of the 9th-order diffracted light Id9 becomes about 0.018 when converted to the numerical aperture NAo on the object plane side, and the intensity distribution Hpa of the imaging light beam Sa' (component corresponding to the 0th-order light) at the pupil Ep is displaced by the shift amount ΔDx in the X' direction from the original position of the light source image Ips (radius ri). Note that a part of the intensity distribution Hpb due to the 8th-order diffracted light Id8 also appears in the periphery in the +X' direction within the pupil Ep, but its peak intensity is low. Furthermore, since the inclination angle of the 10th-order diffracted light Id10 from the optical axis AXa on the object plane side is as large as 4.81°, its intensity distribution is distributed outside the pupil Ep and does not pass through the projection unit PLU. Note that the intensity distributions Hpa and Hpb in FIG. 23 become approximately circular by making the surface light source formed on the emission surface side of the MFE108A of the illumination unit ILU into the elliptical region APh' as described in FIG. 12 above.

[0077] Furthermore, because the micromirrors Ms of the DMD 10 are also arranged in the Y' direction at a pitch Pdy (=5.4 μm), diffracted light is also generated in the Y' direction at a low illuminance according to the pitch Pdy, resulting in weak intensity distributions Hpc, Hpd. Depending on the size of the numerical aperture NAo (NAi) of the projection unit PLU, a portion of the intensity distributions Hpc, Hpd may fall within the pupil Ep. For this reason, by appropriately setting the relationship between the numerical aperture NAo (NAi) of the projection unit PLU and the size (radius ri) of the light source image Ips, it is possible to prevent the intensity distributions Hpc, Hpd from falling within the pupil Ep.

[0078] As explained in Fig. 13B above, the telecentric error Δθt on the image plane side caused by the shift amount ΔDx of the center of the intensity distribution Hpa is Δθt = -6.22° (= -1.037° / projection magnification Mp) under the conditions shown in Fig. 22 and Fig. 23. Thus, when exposing a large pattern in which many of the multiple micromirrors Ms of the DMD 10 are densely turned on, the chief ray of the imaging light beam Sa' on the substrate P is inclined by 6° or more with respect to the optical axis AXa. Such a telecentric error Δθt may also be a factor in degrading the imaging quality (contrast characteristics, distortion characteristics, symmetry, etc.) of the projected image.

[0079] Next, a case where the projected pattern is a line and space pattern having a constant pitch in the X' direction (X direction) will be described with reference to Figs. 24 and 25. Fig. 24 is a diagram showing a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and Fig. 25 is a diagram showing the a-a' arrow portion of the mirror surface of the DMD 10 in Fig. 24 as viewed in the X'Z plane. Fig. 24 shows a case where, among the multiple micromirrors Ms shown in Fig. 16 above, odd-numbered micromirrors Ms aligned in the X' direction are micromirrors Msa in the on state, and even-numbered micromirrors Msb are micromirrors in the off state. It is assumed that all of the odd-numbered micromirrors Ms aligned in the Y' direction in one row in the X' direction are in the on state, and all of the even-numbered micromirrors Ms aligned in the Y' direction in one row are in the off state.

[0080] As shown in Figure 25, when every other micromirror Msa is arranged in the on-state in the X' direction, the angle of occurrence θj of diffracted light generated from DMD 10 can be expressed by the following equation (4) or (5), which is similar to the above equation (2) or (3), by considering the mirror surface of DMD 10 as a diffraction grating arranged in the X' direction at a pitch of 2·Pdx along the neutral plane Pcc.

[0081]

number

[0082]

number

[0083] Fig. 26 is a graph showing the distribution of the angle θj of the diffracted light Idj calculated assuming that the incident angle θα of the illumination light ILm (the inclination angle of the principal ray Lp of the illumination light ILm with respect to the optical axis AXa) is 35.0°, the inclination angle θd of the micromirror Msa in the on state is 17.5°, the pitch 2Pdx of the micromirror Msa is 10.8 μm, and the wavelength λ is 355.0 nm, as in Fig. 22. As shown in Fig. 26, since the incident angle θα of the illumination light ILm is 35°, the 0th order diffracted light Id0 (j=0) is inclined at +35° with respect to the optical axis AXa, and the angle θj with respect to the 0th order diffracted light Id0 increases as the diffraction order increases. The numerical values ​​shown in the lower part of Fig. 26 represent the order j in parentheses and the inclination angle of the diffracted light Idj of each order from the optical axis AXa.

[0084] In the case of the numerical conditions of FIG. 26, the tilt angle of the 17th-order diffracted light Id17 from the optical axis AXa is the smallest, at about 0.85°. Furthermore, an 18th-order diffracted light Id18 with a tilt angle of −1.04° from the optical axis AXa is also generated. Therefore, when the micromirrors Ms of the DMD 10 are turned on in the finest line and space shape as shown in FIG. 24 and FIG. 25, the center of the intensity distribution of the imaging light beam Sa′ in the pupil EP of the projection unit PLU is decentered to a position shifted laterally from the position of the optical axis AXa by an angle equivalent to 0.85° or −1.04°. The actual distribution of the imaging light beam Sa′ in the pupil Ep is calculated by multiplying the diffracted light distribution expressed by Equation (4) or Equation (5) by the sinc 2 It can be calculated by performing convolution integral (convolution operation) using a function.

[0085] In the case of Fig. 26, similarly to Fig. 23, the intensity distribution Hpa of the imaging light beam (regular reflected light component) in the pupil Ep appears displaced in the X' direction from the original position of the light source image Ips (radius ri) in response to the inclination angle of 0.85° of the 17th-order diffracted light Id17 and the inclination angle of -1.04° of the 18th-order diffracted light Id18. In the case of the diffracted light distribution as shown in Fig. 26, the intensity of one of the intensity distribution Hpa formed in the direction of the 17th-order diffracted light Id17 and the intensity distribution Hpa formed in the direction of the 18th-order diffracted light Id18 is high and the intensity of the other is low, so that the telecentric error Δθt on the image plane side caused by the shift of the intensity distribution Hpa is generally within the range between Δθt = 5.1° and Δθt = -6.22°.

[0086] This range is slightly different from the telecentric error Δθt=-6.22°, which is the direction of the ninth-order diffracted light Id9 (see FIG. 22) when multiple adjacent micromirrors Ms become micromirrors Msa in the on-state as shown in FIG. 20 and FIG. 21. Furthermore, it is significantly different from the telecentric error Δθt=0° when one row (or a single one) of multiple micromirrors Ms becomes an isolated micromirror Msa in the on-state as shown in FIG. 16 and FIG. 17. Note that the actual pattern image projected onto the substrate P by the projection unit PLU is formed by the interference of reflected light Sa′ including diffracted light from the DMD 10 that can be captured in the projection unit PLU. Note that, for formula (4) or formula (5), the generation state of diffracted light in a line-and-space pattern whose arrangement pitch or line width is n times Pdx (5.4 μm) can be specified by the following formula (6) or formula (7) where n is a real number.

[0087]

number

[0088]

number

[0089] FIG. 27 is a diagram showing a distribution of the reflected light (diffracted light) from the DMD 10 shown in FIG. 26 at the pupil Ep of the projection unit PLU, corresponding to FIG. 23. In the case of FIG. 27, as described in FIG. 12, the contour of the surface light source formed on the exit surface side of the MFE 108A is made into an elliptical shape APh', so that the intensity distribution of each diffracted light beam as the imaging light beam Sa' formed at the pupil Ep of the projection unit PLU is circular. In addition, in FIG. 27, the intensity of the 18th-order diffracted light Id18 shown in FIG. 26 is the largest, and in the case of projection of a line-and-space pattern as shown in FIGS. 24 and 25, the 18th-order diffracted light Id18 is set to the intensity distribution Hpa of the 0th-order equivalent component. The intensity distribution Hpa is decentered by ΔDx in the -X' direction corresponding to the angle -1.04° of the 18th-order diffracted light Id18 from the optical axis AXa, and a telecentric error Δθt occurs.

[0090] As described above in FIG. 23, the intensity distributions Hpb, Hpc, and Hpd of the diffracted light components are generated in the plane of the pupil Ep due to the pitches Pdx and Pdy of the arrangement of the micromirrors Ms of the DMD 10 in the X' and Y' directions, but their intensities are sufficiently small compared to the intensity of the intensity distribution Hpa. Furthermore, from the line-and-space pattern (line width in the X' direction is Pdx and pitch is 2Pdx) created by the micromirrors Ms of the DMD 10, the intensity distributions ±Hpb' of the ±1st order light components generated by the diffraction effect appear on both sides of the intensity distribution Hpa in the X' direction. The center point PXp of the intensity distribution +Hpb' of the +1st order light component is located approximately midway between the center point (Id18) of the intensity distribution Hpa of the 0th order light component and the center point of the intensity distribution Hpb in the +X' direction. Similarly, the center point PXm of the intensity distribution -Hpb' of the component equivalent to -1st order light is located approximately midway between the center point (Id18) of the intensity distribution Hpa of the component equivalent to 0th order light and the center point of the intensity distribution Hpb in the -X' direction.

[0091] Also, Fig. 27 shows the intensity distribution of the imaging light beam Sa' (diffracted light beam) at the pupil Ep in the case of a line-and-space pattern with a pitch of 2Pdx in the X' direction as in Fig. 24. In contrast to this, in the case of a line-and-space pattern with a pitch of 2Pdy (Pdy = Pdx) in the Y' direction, the intensity distributions ±Hpb' of components equivalent to ±1st order light appear on both sides of the intensity distribution Hpa in the Y' direction, with the center point (Id18) of the intensity distribution Hpa of the component equivalent to 0th order light being decentered by ΔDx in the -X' direction.

[0092] In this way, even when many of the multiple micromirrors Ms of the DMD 10 are in the on state in a line-and-space pattern, the chief ray of the imaging light beam on the substrate P may be significantly tilted with respect to the optical axis AXa, and the imaging quality (contrast characteristics, distortion characteristics, etc.) of the projected image may be significantly degraded. Therefore, an example of a change in imaging quality due to the occurrence of a telecentric error Δθt will be described with reference to FIG. 28. FIG. 28 is a graph showing the results of simulating the spatial image of a line-and-space pattern with a line width of 1 μm and a pitch in the X' direction of 2 μm on the image plane. The horizontal axis of FIG. 28 represents the position (μm) in the X' direction on the image plane, and the vertical axis represents the relative intensity value obtained by normalizing the intensity of the illumination light (incident light) to 1.

[0093] In the graph of Fig. 28, the simulation was performed assuming that the numerical aperture NAi on the image side of the projection unit PLU is 0.25, the σ value of the illumination light ILm is 0.6, the imaging light beam Sa' at the pupil Ep of the projection unit PLU is decentered in the X' direction with respect to the optical axis AXa, and the telecentric error Δθt on the image plane side is 50 mrad (≒2.865°). In the graph of Fig. 28, the characteristic Q1 shown by the dashed line is the contrast characteristic on the best focus plane (best imaging plane) of the projection unit PLU, and the characteristic Q2 shown by the solid line is the contrast characteristic on a plane defocused by 3 μm from the best focus plane in the direction of the optical axis AXa. In Fig. 28, dark lines with a line width of 1 μm are formed at five locations in total, at positions 0, ±2 μm, and ±4 μm.

[0094] It is typical that the contrast (intensity amplitude) of the characteristic Q2 is lower than that of the characteristic Q1 due to defocusing, but it can be seen that the symmetry between the characteristic near +5 μm and the characteristic near -5 μm is deteriorated due to the influence of the telecentric error Δθt. From this, in the case of a pattern in which the telecentric error Δθt on the image plane side exceeds the allowable range (for example, ±2°), that is, in the case of a pattern in which the on-state micromirrors Msa among the multiple micromirrors Ms of the DMD 10 are densely packed over a wide range or are arranged with periodicity, the accuracy of the edge position of the resist image corresponding to the edge portion of the exposed pattern is impaired, and as a result, errors occur in the line width and dimensions of the pattern. In other words, as the intensity distribution (distribution of diffracted light) formed on the pupil Ep of the projection unit PLU by the reflected light (imaging light flux) Sa' from the DMD 10 deviates from an isotropic state or a symmetric state centered on the optical axis AXa, the asymmetry of the projected pattern image increases.

[0095] [Telecentric error wavelength dependence] As is clear from the above formulas (2) to (5), the telecentric error Δθt described above varies depending on the wavelength λ. For example, in the state shown in Fig. 20 and Fig. 21, which is expressed by formula (2), in order to make the telecentric error Δθt on the image side zero, it is necessary to set the wavelength λ so that the inclination angle of -1.04° (-1.037° to be exact) of the ninth-order diffracted light Id9 from the optical axis AXa shown in Fig. 22 and Fig. 23 becomes zero.

[0096] Fig. 29 is a graph showing the relationship between the central wavelength λ and the telecentric error Δθt based on the above formula (2), where the horizontal axis represents the central wavelength λ (nm) and the vertical axis represents the telecentric error Δθt (deg) on ​​the image side. If the pitch Pdx (Pdy) of the micromirrors Ms of the DMD 10 is 5.4 μm, the tilt angle θd of the micromirrors Ms is 17.5°, the incident angle θα of the illumination light ILm is 35°, and the micromirrors Ms are densely turned on as shown in Figs. 20 and 21, the telecentric error Δθt is theoretically zero when the central wavelength λ is about 344.146 nm. It is desirable to make the telecentric error Δθt on the image side zero as much as possible, but a tolerance can be given depending on the minimum line width (or resolution Rs) of the pattern to be projected, etc.

[0097] For example, when the allowable range of the telecentric error Δθt on the image side is set to within ±0.6° (approximately 10 mrad) as shown in Fig. 29, the central wavelength λ may be in the range of 343.098 nm to 345.193 nm (width 2.095 nm). Also, when the allowable range of the telecentric error Δθt on the image side is set to within ±2.0°, the central wavelength λ may be in the range of 340.655 nm to 347.636 nm (width 6.98 nm).

[0098] In this way, the telecentric error Δθt caused by the arrangement (periodicity) and density of the micromirrors Msa in the on-state of the DMD 10, i.e., the magnitude of the distribution density, also has wavelength dependency. In general, the pitch Pdx (Pdy) and tilt angle θd of the micromirrors Ms of the DMD 10 are uniquely set as a ready-made product (for example, an ultraviolet-compatible DMD manufactured by Texas Instruments), so the wavelength λ of the illumination light ILm is set to match the specifications. In the DMD 10 of this embodiment, the pitch Pdx (Pdy) of the micromirrors Ms is set to 5.4 μm and the tilt angle θd is set to 17.5°, so that a fiber amplifier laser light source that generates high-brightness ultraviolet pulse light can be used as a light source that supplies the illumination light ILm to each of the optical fiber bundles FBn (n = 1 to 27).

[0099] As disclosed in Japanese Patent No. 6428675, for example, a fiber amplifier laser light source is composed of a semiconductor laser element that generates seed light in an infrared wavelength region, a high-speed switching element (electro-optic element, etc.) for the seed light, an optical fiber that amplifies the switched seed light (pulsed light) by pump light, and a wavelength conversion element that converts the amplified light in the infrared wavelength region into pulsed light of a higher harmonic (ultraviolet wavelength region). In the case of such a fiber amplifier laser light source, the peak wavelength of ultraviolet light that can increase the generation efficiency (conversion efficiency) with a combination of available semiconductor laser elements, optical fibers, and wavelength conversion elements is 343.333 nm. In the case of this peak wavelength, the maximum image-side telecentric error Δθt (the tilt angle on the image side of the 9th-order diffracted light Id9 in FIGS. 22 and 23) that can occur in the state of FIG. 20 is about 0.466° (about 8.13 mrad).

[0100] From the above, when two or more lights with significantly different peak wavelengths (for example, lights with wavelengths of 350 nm and 400 nm) are combined as the illumination light ILm, the telecentric error Δθt may vary significantly depending on the shape of the pattern to be projected (isolated pattern, line and space pattern, or large land pattern). In this embodiment, the illumination light ILm supplied to each module MUn (n=1 to 27) is a combination of lights from multiple fiber amplifier laser light sources with slightly shifted peak wavelengths within the range in which the wavelength-dependent telecentric error Δθt is allowed. In this way, by using the illumination light ILm that combines multiple lights with slightly shifted peak wavelengths, the contrast of speckles (or interference fringes) generated on the micromirror Ms of the DMD 10 (and on the substrate P) due to the coherence of the illumination light ILm can be suppressed.

[0101] [Telecenter Adjustment Mechanism] As described above, when the micromirrors Msa, which are turned on according to the pattern to be exposed on the substrate P, among the multiple micromirrors Ms of the DMD 10, are densely arranged in the X' and Y' directions, or are arranged with periodicity in the X' (or Y') direction, a telecentric error (angle change) Δθt occurs in the imaging light beam (Sa, Sa') projected from the projection unit PLU, although the degree varies. Since each of the multiple micromirrors Ms of the DMD 10 is switched between the on and off states at a response speed of about 10 KHz, the pattern image generated by the DMD 10 also changes at high speed according to the drawing data. Therefore, during the scanning exposure of a pattern such as a display panel, the pattern image projected from each of the modules MUn (n=1 to 27) instantaneously changes in shape to an isolated line or dot pattern, a line and space pattern, a large land pattern, or the like.

[0102] A typical television display panel (liquid crystal type, organic EL type) is composed of an image display area in which pixel units of about 200 to 300 μm square are arranged in a matrix on a substrate P to have a predetermined aspect ratio such as 2:1 or 16:9, and a peripheral circuit unit (drawing wiring, connection pads, etc.) arranged around the image display area. A thin film transistor (TFT) for switching or current driving is formed in each pixel unit, but the size (line width) of the TFT pattern (patterns of gate layer, drain / source layer, semiconductor layer, etc.), gate wiring, and driving wiring is sufficiently small compared to the arrangement pitch (200 to 300 μm) of the pixel units. Therefore, when exposing a pattern in the image display area, the pattern image projected from the DMD 10 is almost isolated, so no telecentric error Δθt occurs.

[0103] However, depending on the configuration of the lighting drive circuit (TFT circuit) for each pixel unit, wiring in the form of lines and spaces arranged in the X direction or Y direction may be formed at a pitch smaller than the arrangement pitch of the pixel units. In that case, when exposing a pattern in the image display area, the pattern image projected from the DMD 10 has periodicity. Therefore, depending on the degree of periodicity, a telecentric error Δθt may occur. In addition, when exposing the image display area, a rectangular pattern having almost the same size as the pixel unit or a size equal to or larger than half the area of ​​the pixel unit may be uniformly exposed. In that case, more than half of the multiple micromirrors Ms of the DMD 10 are turned on in a nearly dense state during exposure of the image display area. Therefore, a relatively large telecentric error Δθt may occur.

[0104] The occurrence state of the telecentric error Δθt can be estimated before exposure based on drawing data of a pattern for a display panel to be exposed in each of a plurality of modules MUn (n=1 to 27). In this embodiment, the position and attitude of each of several optical members in the module MUn are configured to be finely adjustable, and among those optical members, an adjustable optical member can be selected according to the magnitude of the estimated telecentric error Δθt to correct the telecentric error Δθt.

[0105] Fig. 30 shows a specific configuration of an optical path from the optical fiber bundle FBn in the illumination unit ILU of the module MUn shown in Fig. 4 or 6 to the MFE lens 108A, and Fig. 31 shows a specific configuration of an optical path from the MFE lens 108A in the illumination unit ILU to the DMD 10. In Fig. 30 and Fig. 31, the orthogonal coordinate system X'Y'Z is set to be the same as the coordinate system X'Y'Z in Fig. 4 (Fig. 6), and the same reference numerals are used to designate components having the same functions as those shown in Fig. 4.

[0106] Although not shown in Fig. 4, in Fig. 30, a contact lens 101 is disposed immediately after the output end of the optical fiber bundle FBn, and the spread of the illumination light ILm from the output end is suppressed. The optical axis of the contact lens 101 is set parallel to the Z axis, and the illumination light ILm traveling from the optical fiber bundle FBn with a predetermined numerical aperture is reflected by the mirror 100, travels parallel to the X' axis, and is reflected in the -Z direction by the mirror 102. The input lens system 104, which is disposed in the optical path from the mirror 102 to the MFE lens 108A, is composed of three lens groups 104A, 104B, and 104C spaced apart from one another along the optical axis AXc.

[0107] The illuminance adjustment filter 106 is supported by a holding member 106A that is translated by a driving mechanism 106B, and is disposed between the lens group 104A and the lens group 104B. One example of the illuminance adjustment filter 106 is one in which a fine light-shielding dot pattern is formed on a transmissive plate made of quartz or the like with a gradually changing density, or one in which a plurality of rows of elongated light-shielding wedge patterns are formed, as disclosed in, for example, Japanese Patent Application Laid-Open No. 11-195587, and the transmittance of the illumination light ILm can be changed continuously within a predetermined range by translating the quartz plate.

[0108] The first telecentric adjustment mechanism is composed of a tilt mechanism 100A that finely adjusts the two-dimensional tilt (rotation angles around the X' axis and the Y' axis) of mirror 100 that reflects illumination light ILm from optical fiber bundle FBn, a translation mechanism 100B that finely moves mirror 100 two-dimensionally within the X'Y' plane perpendicular to the optical axis AXc, and a drive unit 100C such as a microhead or piezoelectric actuator that individually drives each of tilt mechanism 100A and translation mechanism 100B.

[0109] By adjusting the inclination of the mirror 100, the central ray (principal ray) of the illumination light ILm entering the input lens system 104 can be adjusted to be coaxial with the optical axis AXc. In addition, since the exit end of the fiber bundle FBn is disposed at the position of the front focal point of the input lens system 104, when the mirror 100 is moved slightly in the X' direction, the central ray (principal ray) of the illumination light ILm entering the input lens system 104 shifts parallel to the optical axis AXc in the X' direction. As a result, the central ray (principal ray) of the illumination light ILm emerging from the input lens system 104 advances at a slight inclination with respect to the optical axis AXc. Therefore, the illumination light ILm entering the MFE lens 108A is slightly inclined overall within the X'Z plane.

[0110] FIG. 32 is an exaggerated view showing the state of the point light source SPF formed on the exit surface side of the MFE lens 108A when the illumination light ILm incident on the MFE lens 108A is tilted in the X'Z plane. When the central ray (principal ray) of the illumination light ILm is parallel to the optical axis AXc, the point light source SPF focused on the exit surface side of each lens element EL of the MFE lens 108A is located at the center in the X' direction, as shown by the white circle in FIG. 32. When the illumination light ILm is tilted with respect to the optical axis AXc in the X'Z plane, the point light source SPF focused on the exit surface side of each lens element EL is decentered by Δxs in the X' direction from the center position, as shown by the black circle in FIG. 32. In this case, as described above in FIG. 7 to FIG. 9, the surface light source formed by the collection of multiple point light sources SPF formed on the exit surface side of the MFE lens 108A is shifted laterally by Δxs in the X' direction as a whole. Since the cross-sectional dimensions in the X'Y' plane of each lens element EL of the MFE lens 108A are small, the amount of decentering Δxs in the X' direction as a surface light source is also small.

[0111] As shown in FIG. 30, an aperture stop 108B having an aperture shape of an elliptical region APh' shown in FIG. 12 is provided on the exit surface side of the MFE lens 108A, and the MFE lens 108A and the aperture stop 108B are integrally attached to a holder 108C. The holder 108C (MFE 108A) is provided so that the position in the X'Y' plane can be finely adjusted by a fine movement mechanism 108D such as a microhead or a piezo motor. In this embodiment, the fine movement mechanism 108D that finely moves the MFE lens 108A two-dimensionally in the X'Y' plane functions as a second telecentric adjustment mechanism. As shown in FIG. 31, the aperture stop 108B has an opening of an elliptical region APh' with the X' direction as the major axis and the Y' direction as the minor axis. If the dimension of the long axis of the elliptical region APh' is Ux and the dimension of the short axis is Uy, the ratio of the ellipse Uy / Ux is set to the relationship Uy / Ux = cos θα, depending on the cosine value of the incident angle θα of the illumination light ILm to the DMD10 (twice the inclination angle θd of the micromirror Msa in the on state).

[0112] A plate-type beam splitter 109A inclined at approximately 45° with respect to the optical axis AXc is provided immediately after the MFE lens 108A (aperture stop 108B). The beam splitter 109A transmits most of the amount of illumination light ILm from the MFE lens 108A and reflects the remaining amount of light (for example, about a few percent) toward the condenser lens 109B. A portion of the illumination light ILm condensed by the condenser lens 109B is guided to a photoelectric element 109D by an optical fiber bundle 109C. The photoelectric element 109D is used as an integrated sensor (integral monitor) that monitors the intensity of the illumination light ILm and measures the exposure amount of the imaging light beam projected onto the substrate P.

[0113] As shown in FIG. 31, illumination light ILm from a surface light source (a collection of point light sources SPF) on the exit surface side of the MFE lens 108A passes through a beam splitter 109A and enters a condenser lens system 110. The condenser lens system 110 is composed of a front lens group 110A and a rear lens group 110B arranged at an interval, and a two-dimensional position in the X'Y' plane can be finely adjusted by a fine movement mechanism 110C using a microhead, a piezoelectric motor, or the like. In other words, the fine movement mechanism 110C enables decentering adjustment of the condenser lens system 110. In this embodiment, the fine movement mechanism 110C that finely moves the condenser lens system 110 two-dimensionally in the X'Y' plane functions as a third telecentric adjustment mechanism. The first telecentric adjustment mechanism, the second telecentric adjustment mechanism, and the third telecentric adjustment mechanism all adjust the relative positional relationship in the decentering direction between the surface light source generated on the exit surface side of the MFE lens 108A (or the surface light source limited within the aperture of the elliptical region APh' of the aperture stop 108B) and the condenser lens system 110.

[0114] The front focal point of the condenser lens system 110 is set at the position of the surface light source (a collection of point light sources SPF) on the exit surface side of the MFE lens 108A, and the illumination light ILm traveling in a telecentric state from the condenser lens system 110 via the tilted mirror 112 illuminates the DMD 10 with Koehler illumination. As described above in FIG. 32, when the surface light source formed by the collection of multiple point light sources SPF formed on the exit surface side of the MFE lens 108A is shifted laterally in the X' direction by Δxs as a whole, the principal ray (central ray) of the illumination light ILm irradiated to the DMD 10 becomes slightly inclined with respect to the optical axis AXb in FIG. 31. That is, by intentionally giving a telecentric error to the illumination light ILm by the first telecentric adjustment mechanism, the incidence angle θα of the illumination light ILm described above in FIG. 6, FIG. 17, FIG. 21, and FIG. 25 can be slightly changed from the initial setting angle (35.0°) in the X'Z plane.

[0115] Furthermore, when the MFE lens 108A and the variable aperture stop 108B are displaced together in the X' direction in the X'Y' plane by the fine movement mechanism 108D as the second telecentric adjustment mechanism shown in FIG. 30, the aperture of the aperture stop 108B (the elliptical region APh' in FIG. 31) is decentered with respect to the optical axis AXc. As a result, the surface light source formed in the elliptical region APh' is also shifted in the X' direction as a whole. In this case, too, the chief ray (central ray) of the illumination light ILm irradiated to the DMD 10 can be tilted in the X'Z plane with respect to the optical axis AXb in FIG. 31, that is, the incidence angle θα of the illumination light ILm to the DMD 10 can be changed from the initial setting angle (35.0°) in the X'Z plane. Note that the incidence angle θα can be changed in the same manner even if the fine movement mechanism 108D is configured to finely move only the aperture stop 108B independently in the X'Y' plane.

[0116] In order to displace the MFE lens 108A and the aperture stop 108B together by a relatively large amount, it is necessary to widen the beam width (diameter of the irradiation range) of the illumination light ILm irradiated from the input lens system 104 to the MFE lens 108A. Furthermore, it is also effective to provide a shift mechanism that shifts the illumination light ILm irradiated to the MFE lens 108A laterally within the X'Y' plane in conjunction with the amount of displacement. The shift mechanism can be configured with a mechanism that tilts the direction of the exit end of the optical fiber bundle FBn, or a mechanism that tilts a parallel plane plate (quartz plate) placed in front of the MFE lens 108A.

[0117] Both the first telecentric adjustment mechanism (drive unit 100C, etc.) and the second telecentric adjustment mechanism (fine movement mechanism 108D, etc.) can adjust the incident angle θα of the illumination light ILm to the DMD 10, but in terms of the amount of adjustment, the first telecentric adjustment mechanism can be used for fine adjustment, and the second telecentric adjustment mechanism can be used for coarse adjustment. During actual adjustment, it is possible to appropriately select whether to use both the first telecentric adjustment mechanism and the second telecentric adjustment mechanism, or to use only one of them, depending on the form of the pattern to be projected and exposed (the amount of telecentric error Δθt and the amount of correction).

[0118] Furthermore, the fine movement mechanism 110C, which serves as a third telecentric adjustment mechanism for decentering the condenser lens system 110 in the X'Y' plane, has the same effect as when the position of the surface light source defined by the MFE lens 108A and the aperture stop 108B is relatively decentered by the second telecentric adjustment mechanism. However, when the condenser lens system 110 is decentered in the X' direction (or Y' direction), the irradiation area of ​​the illumination light ILm projected onto the DMD 10 also shifts laterally, so the irradiation area is set to be larger than the size of the entire mirror surface of the DMD 10, taking into account this lateral shift. The third telecentric adjustment mechanism using the fine movement mechanism 110C can also be used for coarse adjustment, like the second telecentric adjustment mechanism.

[0119] [Other Telecenter Coordination Mechanisms] The telecentric error can also be adjusted (corrected) by laterally shifting the position in the X'Y' plane of each of the output ends of the optical fiber bundles FBn (n=1 to 27) shown in Figures 4 and 30 using a fine adjustment mechanism. In this case, like the first telecentric adjustment mechanism (drive mechanism 100C, etc.), the position of the surface light source (a collection of multiple point light sources SPF) formed on the output surface side of the MFE lens 108A can be finely adjusted.

[0120] The telecentric error can be corrected by adjusting the original angle of the tilted mirror 112 shown in FIG. 4, FIG. 6, and FIG. 31 with a fine movement mechanism such as a microhead or a piezoelectric actuator, and finely adjusting the incident angle θα (for example, 35.0° in design) of the illumination light ILm to the DMD 10. Alternatively, the telecentric error can be corrected by finely adjusting the tilt of the mirror surface (neutral surface Pcc) of the DMD 10 with a fine movement stage combining a parallel link mechanism and a piezoelectric element of the mount unit 10M shown in FIG. 4 and FIG. 31. However, the adjustment of the angle of the tilted mirror 112 and the DMD 10 is used for rough adjustment because the reflected light is tilted at an angle double that of the adjustment angle. Furthermore, the adjustment of the angle of the DMD 10 causes an image plane tilt in which the conjugate plane (best focus plane) of the neutral surface Pcc projected on the substrate P is tilted in the direction of scanning exposure (X' direction or X direction) with respect to the plane perpendicular to the optical axis AXa.

[0121] When the direction of the image plane tilt is the direction of scanning exposure, the scanning exposure is performed at the average image plane position of the tilted image plane, so the reduction in contrast of the exposed pattern image is minor. An exposure method in which the best focus plane of the pattern image projected from the projection unit PLU and the surface of the substrate P are slightly tilted relatively to the direction of scanning exposure, as disclosed in Japanese Patent No. 2830492, for example, has the effect of increasing the depth of focus (DOF) during exposure, particularly for isolated patterns.

[0122] Therefore, the function of correcting the telecentric error Δθt by tilting the DMD 10 in the scanning exposure direction (X' direction or X direction) can be utilized to the extent that the contrast reduction of the exposed pattern image can be ignored. When tilting the DMD 10 to an extent that the contrast reduction cannot be ignored, some kind of image plane tilt correction system (two wedge-shaped deflection prisms, etc.) is provided in the projection unit PLU. Alternatively, a mechanism for decentering a specific lens group or lens in the projection unit PLU with respect to the optical axis AXa may be provided to correct the telecentric error Δθt.

[0123] In the above explanation, it has been assumed that the telecentric error Δθt occurs mainly in the X' direction (the tilt direction of the micromirror Msa in the ON state). However, the pattern to be exposed may be a line-and-space pattern tilted at angles of 30° to 60° with respect to each of the X' and Y' directions on the substrate P. In such a case, the micromirrors Msa in the ON state are also arranged obliquely in the X'Y' plane, and are arranged with periodicity in the direction perpendicular to the oblique direction. Therefore, the reflected light (imaging light beam) Sa' generated from the micromirror Msa in the ON state has a telecentric error Δθt due to the influence of the diffraction phenomenon.

[0124] 24, the telecentric error Δθt occurs only in the X' direction, but in the case of a line and space pattern tilted in the X'Y' plane (within the XY plane), the telecentric error Δθt occurs in both the X' and Y' directions. Therefore, even in the case of a line and space pattern tilted at an angle of 30° to 60°, if the telecentric error Δθt that can occur exceeds the allowable range in either the X' or Y' direction, it can be corrected by some of the telecentric error adjustment mechanisms described above in FIGS. 30 and 31.

[0125] In addition, the telecentric error Δθt is also generated by an error from the design value of the tilt angle θd of the micromirror Ms in the on-state of the DMD 10, regardless of the state of the pattern to be projected. In the DMD 10 illustrated above, the tilt angle θd of the micromirror Msa in the on-state is set to a nominal value (design value) of 17.5°, but a driving error of ±0.5° occurs due to process variations in the manufacturing stage of the DMD 10. When the driving error is ±0.5°, if the incident angle θα of the illumination light ILm to the DMD 10 is constant at 35.0°, the telecentric error on the object surface side (DMD 10 side) of the projection unit PLU is a maximum of ±1°. Therefore, when the projection magnification Mp of the projection unit PLU is 1 / 6, the telecentric error Δθt on the image surface side caused by the driving error of the micromirror Msa is a maximum of ±6°.

[0126] Therefore, it is desirable to measure the telecentric error Δθt caused by the driving error of each DMD 10 of the module MUn (n=1 to 27) in advance using the calibration reference unit CU provided around the substrate holder 4B of the exposure apparatus shown in FIG. 1, and adjust (calibrate) it before exposing the actual pattern. The calibration reference unit CU incorporates an imaging element for partially enlarging and observing the projected image of the pattern created by the DMD 10 projected by the projection unit PLU. Therefore, the telecentric error Δθt can be measured by sampling the projected image of the test pattern (lines & spaces, etc.) created by the DMD 10 while gradually changing the focus position (the position of the substrate holder 4B in the Z direction) and analyzing the change in the lateral shift of the test pattern image for each focus position.

[0127] In the above description of the first embodiment, an isolated pattern as a pattern aspect is not necessarily limited to a case where a single or a row of micromirrors Msa among all the micromirrors Ms of the DMD 10 is in the on state. For example, a case where two, three (1×3), four (2×2), six (2×3), eight (2×4), or nine (3×3) micromirrors Msa in the on state are densely arranged and, for example, ten or more micromirrors Ms surrounding them in the X′ direction and Y′ direction are in the off state micromirrors Msb can also be regarded as an isolated pattern. Conversely, when three (1 x 3), four (2 x 2), six (2 x 3), eight (2 x 4), or nine (3 x 3) off-state micromirrors Msb are densely arranged and the surrounding micromirrors Ms are densely on-state micromirrors Msa over, for example, several or more (corresponding to a dimension several times or more than that of the isolated pattern) in the X' and Y' directions, this can also be regarded as a land-like pattern.

[0128] In addition, the line-and-space pattern as a pattern form is not necessarily limited to the form shown in FIG. 24 in which one row of micromirrors Msa in the ON state and one row of micromirrors Msb in the OFF state are alternately arranged. For example, two rows of micromirrors Msa in the ON state and two rows of micromirrors Msb in the OFF state may be alternately arranged, three rows of micromirrors Msa in the ON state and three rows of micromirrors Msb in the OFF state may be alternately arranged, or two rows of micromirrors Msa in the ON state and four rows of micromirrors Msb in the OFF state may be alternately arranged. In any pattern form, if the distribution state (density or concentration) of the micromirrors Ms in the ON state per unit area (e.g., an area in which 100×100 micromirrors Ms are arranged) of all the micromirrors Ms of the DMD 10 is known, the telecentric error Δθt and the degree of asymmetry of the pattern edge can be easily specified by simulation or the like.

[0129] [Variation 1] In the previous embodiment, as explained in FIG. 11, due to the oblique illumination of illumination light ILm onto DMD 10, the intensity distribution (light source image Ips) of the zeroth-order light equivalent component of the imaging light beam Sa' formed on the pupil Ep of the projection unit PLU becomes elliptical. To correct this, an aperture stop 108B having an opening of an elliptical region APh' is provided on the exit surface side of MFE 108A, as shown in FIG.

[0130] In this case, as shown in Fig. 12, the illumination light ILm irradiated to the entrance surface side of the MFE 108A has a circular illumination area Ef, so that the point light sources SPF distributed outside the elliptical area APh' are blocked, resulting in a decrease in the utilization efficiency of the illumination light ILm, i.e., a loss in the amount of light. Therefore, in this modification, the illumination area Ef of the illumination light ILm irradiated to the entrance surface side of the MFE 108A is shaped into an ellipse to match the elliptical area APh'. For this reason, in this modification, a transmissive diffractive optical element (also called a DOE) is used to reduce the loss in the amount of light.

[0131] FIG. 33 is a diagram showing a schematic optical arrangement of a main part of an illumination unit ILU using a diffractive optical element (DOE) 200. FIG. 33(A) is a diagram showing the arrangement of the DOE 200, the input lens system 202 (corresponding to the input lens system 104 in FIG. 30), and the MFE 108A in the X'Z plane, and FIG. 33(B) is a diagram showing the arrangement of the DOE 200, the input lens system 202, and the MFE 108A in the Y'Z plane. The DOE 200 is formed by forming a plurality of diffraction grating elements with different pitches and directions by carving fine linear irregularities on the surface of a quartz plate. An illumination optical system in which such a DOE 200 is placed in front of a fly's eye lens to change the shape of a surface light source formed on the exit surface side of the fly's eye lens is disclosed in, for example, Japanese Patent Application Laid-Open No. 2001-176766.

[0132] In this modification, the pitch of the diffraction grating of the DOE 200 and the like are set so that the illumination area Ef of the illumination light ILm on the incident surface side of the MFE 108A is elliptical in the X'Y' plane. The illumination light ILm (divergent light) from the fiber bundle FBn shown in FIG. 30 is converted into a circular parallel light beam by a beam expander optical system (not shown) and the like, and then enters the DOF 200. As shown in FIG. 33(A) and FIG. 33(B), the diffraction angle of the diffracted light generated from the DOE 200 is set so that the diffraction angle Δdy when viewed in the Y'Z plane is smaller than the diffraction angle Δdx when viewed in the X'Z plane.

[0133] Since the position of the rear focal point of the input lens system 202 is set to the entrance surface of the MFE 108A, the Y'-direction dimension Uy of the illumination area Ef in the plane including the optical axis AXc parallel to the Y'Z plane becomes smaller than the X'-direction dimension Ux of the illumination area Ef in the plane including the optical axis AXc parallel to the X'Z plane due to the difference between the diffraction angles Δdx and Δdy. The ratio Uy / Ux of the dimension Ux of the major axis to the dimension Uy of the minor axis is set to cosθα, as explained above.

[0134] With this configuration, the multiple point light sources SPF formed on the exit surface side of the MFE 108A are formed only on the exit surface side of each of the multiple lens elements EL arranged within an elliptical range corresponding to the illumination area Ef. The diffraction grating formed in the DOE 200 has a lattice structure that does not generate high-order diffracted light with diffraction angles larger than Δdx, Δdy, or even if it is generated, the intensity is extremely low, so that most of the total light amount of the illumination light ILm (for example, about 90%) is incident on the input lens system 202.

[0135] Incidentally, whether using DOE 200 or aperture stop 108B having an elliptical opening, the long axis direction and short axis direction of the elliptical surface light source formed on the exit surface side of MFE 108A are uniquely determined by the incident direction in the X'Y' plane of illumination light ILm to DMD 10. Therefore, it is not necessary to adjust the rotation direction of elliptical region APh' in the X'Y' plane, but if necessary, a micro-rotation mechanism for DOE 200 or aperture stop 108B may be provided.

[0136] In addition, when the incident angle θα of the illumination light ILm to the DMD 10 is finely adjusted from a specified value (e.g., 35.0°) in order to adjust (correct) the telecentric error Δθt, the adjustment of the ellipse ratio Uy / Ux (see FIG. 30 and FIG. 33) of the ellipse region APh' is also considered. For example, if the incident angle θα is changed by ±0.5° from the specified value of 35.0° (corresponding to ±6° as the telecentric angle adjustment amount on the image surface side when the projection magnification Mp=1 / 6), the ellipse ratio Uy / Ux at the incident angle of 35.0° is 0.8191, the ellipse ratio Uy / Ux at the incident angle of 34.5° is 0.8241, and the ellipse ratio Uy / Ux at the incident angle of 35.5° is 0.8141. Therefore, the rate of change of the ellipse ratio Uy / Ux due to the adjustment of the incident angle θα by ±0.5° is as small as ±0.6%. Furthermore, even if the adjustment range of the incident angle θα becomes ±1.0°, the rate of change of the ellipse ratio Uy / Ux is ±1.2%, so there is no problem even if the ellipse ratio Uy / Ux is not adjusted.

[0137] [Modification 2] Fig. 34 shows an optical arrangement according to a second modified example in which the distribution (contour) in the cross section of the illumination light ILm incident on the MFE 108A is made elliptical in order to form an elliptical surface light source (a collection of multiple point light sources SPF) on the exit surface side of the MFE 108A. Fig. 34(A) is a diagram showing the arrangement of two cylindrical lenses 210, 212 arranged in front of the MFE 108A in the X'Z plane, and Fig. 34(B) is a diagram showing the arrangement of Fig. 34(A) in the Y'Z plane. In this modified example, a cylindrical lens 210 having a positive refractive power and a cylindrical lens 212 having a negative refractive power are arranged at a predetermined interval along the optical axis AXc of the illumination unit ILu in front of the MFE 108A.

[0138] The generatrix of each of the cylindrical lenses 210 and 212 is set parallel to the X' axis. Therefore, when the illumination light ILm, which has a circular intensity distribution in the cross section and has been made into a parallel beam, enters the cylindrical lens 210, the cylindrical lens 210 functions as a parallel plate with no refractive power in the X'Z plane, so that the illumination light ILm enters the cylindrical lens 212 as is without changing its width in the X' direction, as shown in Fig. 34(A). On the other hand, as shown in Fig. 34(B), the cylindrical lens 210 has a positive refractive power in the Y'Z plane, so that the illumination light ILm, which has passed through the cylindrical lens 210, enters the cylindrical lens 212 while gradually decreasing its width in the X' direction.

[0139] Since the cylindrical lens 212 functions as a parallel plate with no refractive power in the X'Z plane, the width of the illumination light ILm in the X' direction does not change and it is emitted as a parallel beam as is and reaches the illumination area Ef on the downstream MFE 108A as shown in Fig. 34(A). On the other hand, as shown in Fig. 34(B), the cylindrical lens 212 has a negative refractive power in the Y'Z plane, so the illumination light ILm that has passed through the cylindrical lens 212 reaches the illumination area Ef on the downstream MFE 108A as a parallel beam whose width in the Y' direction is reduced from the original width.

[0140] In this way, when two cylindrical lenses 210 and 212 are provided as lens elements having anisotropic refractive power, the focal position of the cylindrical lens 210 (the position where the illumination light ILm is focused in the Y'Z plane) and the focal position of the cylindrical lens 212 are set to be the same position on the optical axis AXc. By appropriately setting the focal length of each of the cylindrical lenses 210 and 212 and the interval between the cylindrical lenses 210 and 212, the elliptical ratio Uy / Ux of the illumination area Ef can be set to a value (cosθα) corresponding to the incident angle θα.

[0141] In the configuration of Fig. 34, the circular intensity distribution in the cross section of the original illumination light ILm is compressed in the Y' direction to be transformed into an ellipse, but the arrangement of the cylindrical lenses 210 and 212 may be interchanged so that the illumination light ILm having a circular intensity distribution is expanded in the Y' direction by the negative cylindrical lens 212 and then converted into a parallel beam by the positive cylindrical lens 210. In this case, the circular intensity distribution in the cross section of the original illumination light ILm is transformed into an ellipse expanded in the Y' direction while keeping the width in the X' direction the same. Therefore, when the illumination light ILm is passed from the negative cylindrical lens 212 to the positive cylindrical lens 210, the generatrix of each of the cylindrical lenses 210 and 212 is set parallel to the Y' axis.

[0142] As described above, as a configuration for making the intensity distribution in the cross section of the illumination light ILm irradiated to the MFE 108A elliptical, a lens system with different magnifications in the vertical and horizontal directions such as an anamorphic lens, a lens element or reflecting element having a toroidal surface (toric surface), a Fresnel lens element, or a microprism array can be used alone or in combination with other spherical lenses or aspherical lenses. In this case, the anamorphic lens, the lens element having a toroidal surface (toric surface), the Fresnel lens element, and the microprism array all function as an optical element (lens element) having an anisotropic refractive power or refraction angle, similar to a cylindrical lens, or as a distribution shaping optical element that shapes the contour of the intensity distribution in the cross section.

[0143] [Modification 3] In a projection exposure apparatus that uses a mask substrate to expose patterns for electronic devices such as semiconductor circuits and display panels onto a semiconductor wafer or a glass substrate, it is known to use a modified illumination method in which the shape of a surface light source formed on the pupil plane (for example, the exit surface side of a fly's eye lens) in an illumination optical system that irradiates illumination light onto a mask substrate is made not only a simple circle but also annular, dipole, or quadrupole in order to faithfully expose a pattern with a finer line width. The above-mentioned Japanese Patent Application Laid-Open No. 2001-176766 also discloses a configuration in which a diffractive optical element is used to perform multipole illumination such as quadrupole illumination or annular illumination.

[0144] In projection exposure of a pattern using the DMD 10, a configuration capable of supporting a similar modified illumination method can be provided in the illumination unit ILU in order to support high resolution. A simple configuration for performing a modified illumination method is to make the aperture shape of the aperture stop 108B shown in FIG. 31 annular or multipole. FIG. 35 is a view of a collection (surface light source) of multiple point light sources SPF formed on the exit surface side of the MFE 108A as seen in the +Z direction, similar to FIG. 31. The aperture stop 108B has an elliptical annular opening so as to transmit light from point light sources SPF only in the area between the outer ring APro and the inner ring APri, which have an elliptical contour, and to block light from point light sources SPF located in the inner center of the inner ring APri including the optical axis AXc and the outer peripheral part of the outer ring APro.

[0145] In this modified example, the ratio Uy / Ux of the dimension Ux of the major axis in the X' direction of the elliptical outer ring APro to the dimension Uy of the minor axis in the Y' direction is set to cos θα according to the angle of incidence θα. The ratio of the dimension of the major axis in the X' direction of the elliptical inner ring APri to the dimension of the minor axis in the Y' direction is also set to cos θα, which is determined by the angle of incidence θα. When the aperture stop 108B is to be an elliptical annular aperture, a light-shielding film made of a chrome layer is formed over the entire surface of a transparent quartz plate, and then part of the light-shielding film is removed by etching into the shape of the elliptical annular aperture.

[0146] Furthermore, when quadrupole illumination is used as the multipole illumination, an aperture stop 108B is provided that has an aperture for transmitting light from a point light source SPF in each of four sectorial regions APa1, APa2, APa3, and APa4 in the direction inclined by about 45° from each of the X'-axis and Y'-axis in the elliptical annular region surrounded by the outer ring APro and the inner ring APri in Fig. 35, as shown in Fig. 36. The contour of the annular region including all of the four sectorial regions APa1, APa2, APa3, and APa4, or the shape of the ring line passing through the center (center of gravity) of each of the sectorial regions APa1, APa2, APa3, and APa4, is set to an elliptical shape having a ratio of the cosine value (=cosθα) of the incident angle θα.

[0147] In this modification, an elliptical annular aperture or four sector-shaped apertures are provided in the aperture stop 108B for annular illumination or multipole illumination, but as disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 2001-176766, an elliptical annular illumination area or a quadruple-pole illumination area can be formed on the entrance surface of the MFE 108A by using a diffractive optical element (DOE) or an axicon element (a conical prism with the optical axis as the center of rotation), and the light loss caused by the light from the point light source SPF being blocked by the light-shielding part of the aperture stop 108B can be reduced. In addition, the shape of the surface light source of each pole for multipole illumination is not limited to the sector-shaped areas APa1, APa2, APa3, and APa4 as shown in FIG. 36, and may be a rectangular area or a circular area. In addition, the number of poles may be 2, 6, or 8 poles other than 4 poles.

[0148] [Modification 4] The distribution of the zeroth-order light equivalent component (the ninth-order diffracted light Id9 in FIG. 22 and the 18th-order diffracted light Id18 in FIG. 26) of the imaging light beam Sa' formed on the pupil Ep of the projection unit PLU by the oblique illumination of the illumination light ILm on the DMD 10 is deformed into an ellipse, but this can be corrected to a circular shape by modifying the shape of the surface light source in the illumination unit ILU. However, as described above in FIG. 23 or FIG. 27, depending on the settings of the diameter (numerical aperture NA) of the pupil Ep of the projection unit PLU, the diameter of the circularly corrected intensity distribution Hpa of the zeroth-order light equivalent component (the ninth-order diffracted light Id9 in FIG. 23 and the 18th-order diffracted light Id18 in FIG. 27), the arrangement pitches Pdx and Pdy of the micromirrors Ms of the DMD 10, the angle of incidence θα (=2θd), and the wavelength λ of the illumination light ILm, many unnecessary diffracted light components may pass through the pupil Ep, deteriorating the quality of the pattern image exposed on the substrate P.

[0149] The unnecessary diffracted light components are mainly diffracted light components determined by the pitches Pdx, Pdy of the array of the micromirrors Ms of the DMD 10 and the wavelength λ. For example, as described above in FIG. 22 and FIG. 23, on both sides of the X' direction (and Y' direction) of the 9th-order diffracted light Id9, which is the component equivalent to the 0th-order light, circular intensity distributions Hpb (and Hpc, Hpd) are generated by the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10, which are components equivalent to ±1st-order light generated at the pitch Pdx (=Pdy). In the case of FIG. 23, if the shift amount ΔDx (telecentric error Δθt) of the intensity distribution Hpa of the 9th-order diffracted light Id9, which is the component equivalent to the 0th-order light, is corrected to zero, parts of both the intensity distributions Hpb due to the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10 will appear in the pupil Ep of the projection unit PLU.

[0150] When the maximum numerical aperture on the image plane side corresponding to the diameter of the pupil Ep of the projection unit PLU is NAi, if the numerical aperture NAi is larger than 0.3 as exemplified in Fig. 23, much of the intensity distribution Hpb, Hpc, and Hpd of the components equivalent to ±first-order light from the DMD 10 passes through the pupil Ep. As a result, the individual edge lines of the micromirrors Msa of the DMD 10 in the on state are resolved, albeit weakly, on the substrate P, which leads to a deterioration in the image quality of the pattern that is finally exposed.

[0151] Therefore, the numerical aperture NAi on the image plane side corresponding to the maximum effective diameter of the pupil Ep of the projection unit PLU is set from the relationship of the formula R = k(λ / NAi) determined by the required resolution R (μm), the central wavelength λ of the illumination light ILm, and the process factor k (0 < k ≤ 1). As an example, when the process factor k is 0.6, the central wavelength λ is 355.00 nm, and the required resolution R is 0.8 μm, the numerical aperture NAi is approximately 0.266. Also, when the central wavelength λ is 343.33 nm and other conditions are the same, the numerical aperture NAi is approximately 0.257. Further, since the central wavelength λ, the pitches Pdx and Pdy of the micromirrors Ms of the DMD10, and the incident angle θα of the illumination light ILm are determined, the angles on the object plane side of the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10 corresponding to the 0th-order light equivalent component after correcting the telecentric error Δθt with respect to the 9th-order diffracted light Id9 are uniquely determined from the previous formula (2) or formula (3).

[0152] When the central wavelength λ is 355.00 nm, as in the examples shown in the previous FIGS. 22 and 23, the diffraction angle θ9 of the 9th-order diffracted light Id9 is -1.04°, the diffraction angle θ8 of the 8th-order diffracted light Id8 is +2.73°, and the diffraction angle θ10 of the 10th-order diffracted light Id10 is -4.81°. From this, the opening angle Δθ8 of the 8th-order diffracted light Id8 as seen from the 9th-order diffracted light Id9 is 3.77°, and the opening angle Δθ10 of the 10th-order diffracted light Id10 as seen from the 9th-order diffracted light Id9 is also 3.77°. Since the opening angles Δθ8 and Δθ10 are the same, setting Δθ8 = Δθ10 = Δθj and converting to the numerical aperture NAoj on the object plane side, from NAoj = sin(Δθj), NAoj ≈ 0.06575. When the projection magnification Mp of the projection unit PLU is 1 / 6, the numerical aperture NAij on the image plane side corresponding to the numerical aperture NAoj on the object plane side is NAij = NAoj / Mp ≈ 0.395.

[0153] Furthermore, in the pupil Ep of the projection unit PLU, as shown in FIG. 23, a circular intensity distribution Hpa of the 9th-order diffracted light Id9 equivalent to the 0th-order light component with the elliptical shape corrected is formed. As described in FIG. 11 above, the σ value (0<σ≦1), which is the ratio of the diameter of the intensity distribution Hpa to the diameter of the pupil Ep, is determined by the magnification of the imaging optical path from the surface light source formed on the exit surface side of the MFE 108A shown in FIG. 31 to the pupil Ep of the projection unit PLU, and the size of the surface light source formed on the exit surface side of the MFE 108A (if the aperture stop 108B is provided, the size of the aperture). Therefore, the numerical aperture NAib on the image plane side corresponding to the radius of the intensity distribution Hpa is NAib=σ·NAi. Similarly, the intensity distributions Hpb (and Hpc, Hpd) of the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10 equivalent to the ±1st-order light components are also distributed with approximately the same diameter as the intensity distribution Hpa.

[0154] The above state is shown diagrammatically in Fig. 37. In Fig. 37, the horizontal line represents the numerical aperture in the X' direction in the plane of the pupil Ep, the vertical line represents the numerical aperture in the Y' direction in the plane of the pupil Ep, and the central point represents the center of the pupil Ep (optical axis AXp). Here, the array pitch Pdx (Pdy) of the micromirrors Ms is 5.4 μm, the central wavelength λ is 355.00 nm, the maximum numerical aperture NAi on the image plane side of the projection unit PLU is 0.266, and the σ value is 0.8. Therefore, the numerical aperture NAib on the image plane side of each of the intensity distributions Hpa, Hpb, Hpc, and Hpd is approximately 0.213.

[0155] Under the above conditions, the positions of the centers (centers of gravity) of the intensity distributions Hpb, Hpc, and Hpd of the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10 of the ±1st-order light components are outside the pupil Ep because the numerical aperture is large at NAij = 0.395, but some of them pass through the pupil Ep. Therefore, there is a possibility that an image will be formed, although the edge line of the micromirror Msa in the on state is weak. Therefore, it is possible to set all of the intensity distributions Hpb, Hpc, and Hpd so that they are almost completely outside the pupil Ep. Assuming that the central wavelength λ, the pitches Pdx and Pdy of the micromirrors Ms, the angle of incidence θα, and the maximum numerical aperture NAi (here, NAi = 0.266) on the image plane side of the projection unit PLU are not changed, by adjusting the σ value to reduce the diameter of the intensity distribution Hpa of the 9th-order diffracted light Id9 equivalent to the 0th-order light component, i.e., the numerical aperture NAib, from the state in Figure 37, it is possible to position all of the intensity distributions Hpb, Hpc, and Hpd almost completely outside the pupil Ep.

[0156] As a specific example, the numerical aperture NAij (≒0.395) corresponding to the positions of the centers (centers of gravity) of the 8th-order diffracted light Id8 and the 10th-order diffracted light Id10 of the ±1st-order light components, the maximum numerical aperture NAi (≒0.266) on the image plane side of the projection unit PLU, and the numerical aperture NAib corresponding to the diameter of the intensity distribution Hpa of the 9th-order diffracted light Id9 equivalent to the 0th-order light component set by the σ value should theoretically be related as shown in the following equation (8).

[0157]

number

[0158] As described in the previous embodiment, when the elliptical correction of the intensity distribution Hpa of the 9th-order diffracted light Id9 corresponding to the 0th-order light component is performed and the telecentric error Δθt is also corrected to zero, it is desirable that the numerical aperture NAib corresponding to the diameter of the intensity distribution Hpa satisfies the formula (8) and is as large as possible. Therefore, under the conditions of FIG. 37, it is desirable to set NAib ≒ 0.129, which is expressed as a σ value, σ = NAib / NAi = 0.485. In actual settings, it is sufficient to have a tolerance and be in the range of σ = 0.485 ± 15%. Such settings can be similarly applied to the annular illumination method and the multipole illumination method described in FIG. 35 and FIG. 36.

[0159] 24 to 27, the line and space pitch is 2Pdx (or 2Pdy), so the opening angle of the diffracted light of the ±1st order light component relative to the diffracted light of the 0th order light component is about half that in the case of Fig. 37, which is about NAij / 2 when converted to a numerical aperture. Therefore, most of the diffracted light of the ±1st order light component passes through the pupil Ep, and the line and space pattern is faithfully exposed.

[0160] Fig. 38 is a diagram showing a typical distribution of each diffracted light when the wavelength λ of the illumination light ILm is changed to 343.44 nm and the maximum numerical aperture NAi on the image plane side of the projection unit PLU is set to 0.25 under the conditions described in Fig. 37. When the array pitch Pdx (=Pdy) of the micromirrors Ms of the DMD10 is 5.4 μm, the telecentric error on the object plane side (DMD10 side) of the ninth-order diffracted light Id9, which has the smallest tilt angle from the optical axis AXa of the projection unit PLU, is calculated based on the above formula (2) or (3) to be about 0.078° in angle, and the telecentric error Δθt on the image plane side is about 0.467°. If this value is not acceptable, it is corrected by the telecentric error adjustment mechanism described above.

[0161] 38, the intensity distribution of the 9th-order diffracted light Id9 (component equivalent to 0th-order light) at the pupil Ep is corrected from an elliptical to a circular distribution Hpa in accordance with the incident angle θα of the illumination light ILm after correction for the telecentric error Δθt. When the wavelength λ is 343.33 nm, the center (center of gravity) point of the 8th-order diffracted light Id8 of the component equivalent to +1st-order light corresponding to the pitch Pdx (Pdy) of the micromirror Ms and the center (center of gravity) point of the 10th-order diffracted light Id10 of the component equivalent to -1st-order light are expressed in numerical aperture NAij, which is NAij ≈ 0.382 in each of the X' and Y' directions.

[0162] Therefore, based on the above formula (8), when the maximum numerical aperture NAi of the pupil Ep is 0.25, the numerical aperture NAib of the circular intensity distribution Hpa of the component equivalent to 0th order light (9th order diffracted light Id9) from the DMD 10 is approximately 0.132. Therefore, if the size of the surface light source generated by the MFE 108A or the aperture stop 108B (specifically, the dimension in the minor axis direction of the ellipse) is set to a σ(=NAib / NAi) value of approximately 0.528 or less, the intensity distribution Hpb of the unnecessary 8th order diffracted light Id8 of the component equivalent to +1st order light and the 10th order diffracted light Id10 of the component equivalent to -1st order light can be placed outside the pupil Ep, as shown in FIG.

[0163] 24 and 25, in the case of a line-and-space pattern made with a pitch of 2Pdx in the X' direction, that is, a line-and-space pattern with the smallest grating pitch on the DMD 10, each center (center of gravity) point of the intensity distribution ±Hpb' of the high-order diffracted light of the ±1st-order light equivalent components generated from the on-state micromirrors Msa arranged every other one in the X' direction with a pitch of 2Pdx is approximately 0.19 when converted into a numerical aperture NA$1, and the numerical aperture equivalent to each radius of the intensity distribution ±Hpb' is equal to the numerical aperture NAib of the intensity distribution Hpa. Therefore, within the maximum numerical aperture NAi (=0.25) of the projection unit PLU, more than half (calculated to be approximately 72.6%) of the area including each center (center of gravity) point of the intensity distribution ±Hpb' appears symmetrically with the optical axis AXa, and the line-and-space pattern is well imaged.

[0164] In addition, in the case of a line-and-space pattern made with a pitch of 2Pdy in the Y' direction, each center (center of gravity) point of the intensity distribution ±Hpb' of the high-order diffracted light of the components equivalent to ±1st order light appears on the Y' axis optically rotated approximately 90° around the axis AXa from the state in Figure 38.

[0165] From the above, it is also possible to completely include each of the intensity distributions ±Hpb' of the high-order diffracted light of the components equivalent to ±1st order light within the pupil Ep. In that case, the numerical apertures corresponding to the radii of each of the intensity distributions ±Hpb' shown in Fig. 38 can be set to NAi(0.25)-NA$1(0.19)=0.06. This means that the numerical aperture NAib of the intensity distribution Hpa is set to about 0.06, that is, the σ value is set to about 0.24 (=0.06 / 0.25).

[0166] Here, taking into consideration the numerical aperture NAij (≒0.382) of each center (centre of gravity) point of the intensity distribution Hpb of the 8th order diffracted light Id8 and the 10th order diffracted light Id0 of the components equivalent to ±1st order light when the on-state micromirrors Msa are arranged at a pitch of Pdx (Pdy), and the numerical aperture NA$1 (≒0.19) of each center (centre of gravity) point of the intensity distribution ±Hpb' of the higher order diffracted light of the components equivalent to ±1st order light when the on-state micromirrors Msa are arranged at a pitch of 2Pdx (2Pdy) so that every other one of the micromirrors Msa is arranged, the condition of the above equation (8) can also be further modified to the condition of equation (9).

[0167]

number

[0168] If equation (9) is divided by the maximum numerical aperture NAi on the image plane side of the projection unit PLU, it can be transformed into equation (10) which expresses a preferable range of the σ value.

[0169]

number

[0170] In the above embodiment and modified examples, the elliptical shape of the light source image Ips formed on the pupil Ep of the projection unit PLU, that is, the intensity distribution Hpa of the 9th-order diffracted light (or 18th-order diffracted light, etc.) which is the component equivalent to the 0th-order light from the DMD 10, is suppressed and corrected to a circular shape. Therefore, it is assumed that the intensity distributions Hpb, Hpc, Hpd, and ±Hpb' of the components equivalent to ±1st-order light also become circular. However, in reality, since the illumination light ILm is obliquely illuminated from the X' direction, even if the intensity distribution Hpa becomes a perfect circle, each of the intensity distributions Hpb, Hpc, Hpd, and ±Hpb' becomes an ellipse that is slightly compressed in the X' direction depending on the diffraction angle from the center of the intensity distribution Hpa (the position of the optical axis AXa).

[0171] Therefore, the numerical aperture in the X' direction on the image side corresponding to the radius of the intensity distribution Hpb (and Hpc, Hpd) shown in Figures 37 and 38 is, strictly speaking, a numerical aperture NAib' that is slightly smaller than the numerical aperture NAib of the intensity distribution Hpb. Here, the numerical aperture NAib on the image side corresponding to the radius of the intensity distribution Hpa is the projection magnification Mp (= 1 / 6) times on the object side (DMD 10 side), and is Mp · NAib. Therefore, the angle equivalent to the numerical aperture (Mp · NAib) is Δθσ (= arcsin (± Mp · NAib)). Similarly, the numerical aperture NAib' in the X' direction on the image side of the intensity distribution Hpb (and Hpc, Hpd) is the projection magnification Mp (= 1 / 6) times on the object side (DMD 10 side), and is Mp · NAib'. Therefore, the angle equivalent to the numerical aperture (Mp · NAib') in the X' direction is Δθib (= arcsin (± Mp · NAib')).

[0172] Considering these angles Δθσ and Δθib, the above formula (2) and formula (3) can be expressed as the following formulas (11) and (12), respectively.

[0173]

number

[0174]

number

[0175] [Modification 5] 37 and 38, the setting of the σ value for positioning the entire intensity distribution Hpb of the diffracted light of the ±1st order light components generated by the arrangement pitches Pdx and Pdy of the micromirrors Ms of the DMD 10 outside the pupil Ep of the projection unit PLU can be similarly applied to an exposure apparatus that illuminates the DMD 10 with illumination light ILm by epi-illumination. In this case, a polarizing beam splitter and a quarter-wave plate are provided in the optical path between the DMD 10 and the projection unit PLU. In this case, the polarization separation surface of the polarizing beam splitter is set to be at 45° with the optical axis AXa of the projection unit PLU, for example, and the illumination light ILm is set to be approximately perpendicular (incident angle θα ≒ 0°) to the neutral plane Pcc of the DMD 10 from the polarizing beam splitter side.

[0176] In this configuration, the optical axis (AXc, AXb) of the condenser lens system that emits the illumination light ILm and the optical axis AXa of the projection unit PLU are coaxial or parallel on the DMD 10. Therefore, the problem of ellipticity does not occur, but a telecentric error Δθt occurs due to a driving error of the micromirror Msa in the on-state of the DMD 10, and this error must be corrected. Note that even in the epi-illumination method, if the optical axis of the condenser lens system and the optical axis AXa of the projection unit PLU are not strictly parallel on the DMD 10, but are intentionally set to be tilted at a certain angle of incidence θα (for example, 5° or more), it is desirable to correct the ellipticity.

[0177] [Modification 6] In the elliptical correction methods described in the above embodiments and modifications, the contour shape of the surface light source generated in the illumination unit ILU is made to be a complementary ellipse so that the contour of the light source image Ips (intensity distribution Hpa of the diffracted light of the component equivalent to 0th order light from the DMD 10) formed in an ellipse on the pupil Ep of the projection unit PLU is corrected to a circle. The incidence angle θα of the illumination light ILm to the DMD 10 does not change significantly in terms of the device configuration, so the ratio of the ellipse is also considered to be approximately constant.

[0178] Therefore, the contour shape of the surface light source generated in the illumination unit ILU may be left circular, and a distribution shaping optical element having an anisotropic refractive power, such as a cylindrical lens, a toric lens, or a diffractive optical element, may be added in front of or before or after the pupil Ep in the projection unit PLU to correct the elliptical distribution of the light source image Ips (the intensity distribution Hpa of the diffracted light of the component equivalent to the zeroth order light from the DMD 10) to a circular shape. However, in the case of such a projection unit PLU, it is necessary to carry out an optical design as an imaging lens including a distribution shaping optical element so that the imaging performance of the projection unit PLU, in particular the isotropy of the projection magnification Mp, the distortion characteristics, and other aberration characteristics, are within an allowable range.

[0179] The pattern exposure apparatus EX described in the above embodiments and variations includes a DMD10 (spatial light modulation element) having a plurality of micromirrors Ms that are selectively driven based on drawing data, an illumination unit PLU that irradiates illumination light ILm onto the DMD10 at a predetermined incident angle θα, and a projection unit PLU that receives reflected light from a selected on-state micromirror Msa of the DMD10 and projects it onto the substrate P.

[0180] The illumination unit ILU includes a condenser lens system 110 as a focusing optical member that focuses light from a surface light source (a collection of multiple point light sources SPF on the exit surface side of the MFE 108A) of a predetermined shape that serves as the source of illumination light ILm, and obliquely irradiates the DMD 10. The condenser lens system 110 is disposed along an optical axis (AXb, AXc) that is inclined at an incident angle θα with respect to the optical axis AXa of the projection unit PLU, and serves as a focusing optical member that optically conjugates the surface light source (a collection of point light sources SPF) with the pupil Ep of the projection unit PLU. In order to correct the distortion of the overall contour of the intensity distribution Hpa of the light source image Ips of the surface light source formed on the pupil Ep of the projection unit PLU by the diffracted light (Id9, Id18, etc.) of the component equivalent to zero-order light as reflected light from the micromirror Msa in the above-mentioned state into an ellipse according to the incident angle θα, an aperture stop 108B, a diffractive optical element (DOE) 200, or lens elements 210, 212 having an anisotropic refractive power, etc., are provided as correction optical members that deform the shape of the contour of the surface light source Ips (intensity distribution Hpa).

[0181] Furthermore, according to the above-described embodiments and variations, in a device manufacturing method in which a DMD10 (spatial light modulation element) having a plurality of micromirrors Ms that are selectively driven based on drawing data of a pattern for an electronic device (semiconductor circuit, display, wiring, sensor, etc.) is illuminated with illumination light ILm from an illumination unit ILU, and the reflected light from selected on-state micromirrors Msa of the DMD10 is projected and exposed onto the substrate P via a projection unit ILm to form a pattern of an electronic device on the substrate P, the device manufacturing method includes a step of concentrating light from a surface light source of a predetermined shape generated within the illumination unit ILU as illumination light and irradiating the DMD10 at an angle of incidence θα at an angle, and a step of deforming the shape of the contour of the surface light source so as to correct the elliptical distortion of the contour of the light source image Ips (intensity distribution Hpa) of the surface light source formed on the pupil Ep of the projection unit PLU by the reflected light from the on-state micromirrors Msa of the DMD10 (diffracted light Id9, Id18 of the component equivalent to zero-order light).

[0182] With this configuration, the overall contour of the light source image Ips formed in the pupil Ep of the shadow unit PLU, i.e., the intensity distribution Hpa of the zeroth order light equivalent component from the micromirror Msa of the DMD 10 in the on state, can be corrected from a distorted ellipse to a circular shape, and the image quality of the edge portion of the pattern image projected and exposed onto the substrate P by the projection unit PLU can be made uniform regardless of the directionality of the edge. [Explanation of symbols]

[0183] 10...DMD, 108...Optical integrator, ILU...Illumination unit

Claims

[Claim 1] A pattern exposure apparatus comprising: a spatial light modulation element having a plurality of micromirrors selectively driven based on drawing data; an illumination unit which irradiates the spatial light modulation element with illumination light at a predetermined angle of incidence; and a projection unit which projects reflected light from selected micromirrors of the spatial light modulation element in an on-state onto a substrate, the pattern exposure apparatus projecting and exposing a pattern corresponding to the drawing data onto the substrate, The lighting unit includes: a focusing optical member that focuses light from a surface light source of a predetermined shape that serves as a source of the illumination light, and obliquely irradiates the spatial light modulation element with the light, and is disposed along an optical axis that is inclined at the incident angle with respect to an optical axis of the projection unit, so as to make the surface light source optically conjugate with a pupil of the projection unit; a correction optical member that deforms the shape of a contour of the surface light source so as to correct an elliptical distortion of a contour of the image of the surface light source formed on a pupil of the projection unit by reflected light from the micromirrors in the on state of the spatial light modulation element in accordance with the incidence angle; A pattern exposure apparatus comprising:

Images